JP3056028U - Copper plating waste liquid recycling system - Google Patents
Copper plating waste liquid recycling systemInfo
- Publication number
- JP3056028U JP3056028U JP1998004885U JP488598U JP3056028U JP 3056028 U JP3056028 U JP 3056028U JP 1998004885 U JP1998004885 U JP 1998004885U JP 488598 U JP488598 U JP 488598U JP 3056028 U JP3056028 U JP 3056028U
- Authority
- JP
- Japan
- Prior art keywords
- waste liquid
- plating waste
- copper
- reactor
- ozone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Treatment Of Water By Oxidation Or Reduction (AREA)
Abstract
(57)【要約】
【課題】 銅メッキ廃液を回収利用する際に、環境汚染
が発生しない銅メッキ廃液リサイクル装置を提供する。
【解決手段】 第１の供給口１３，第２の供給口１４及
び排出口１２を具えて、内部に金属銅を装填した反応器
１と、上記第１の供給口１３と連通して、上記反応器１
内にオゾンを供給するオゾン発生器２と、上記第２の供
給口１４と連通して、低濃度硫酸銅および硫酸を含むメ
ッキ廃液を上記反応器１に送るメッキ廃液輸送管とを具
えて、危険性が高い過酸化水素や硝酸を使用する必要が
なく、且つ高汚染性窒素酸化物が発生しないようにす
る。
(57) [Problem] To provide a copper plating waste liquid recycling apparatus which does not cause environmental pollution when collecting and using the copper plating waste liquid. SOLUTION: The reactor 1 having a first supply port 13, a second supply port 14, and a discharge port 12 and having metal copper loaded therein and the first supply port 13 communicates with each other. Reactor 1
An ozone generator 2 for supplying ozone thereinto, and a plating waste liquid transport pipe that communicates with the second supply port 14 and sends a plating waste liquid containing low-concentration copper sulfate and sulfuric acid to the reactor 1. It is not necessary to use hydrogen peroxide or nitric acid, which has a high risk, and it does not generate highly polluting nitrogen oxides.
Description
【０００１】[0001]
本考案はメッキ廃液リサイクル装置に関し、特に環境汚染が発生しない銅メッ キ廃液リサイクル装置に関する。 The present invention relates to a plating waste liquid recycling apparatus, and particularly to a copper plating waste liquid recycling apparatus that does not cause environmental pollution.
【０００２】[0002]
電気メッキ工程は、金属工業や電子工業において、ほとんど欠かせない工程で あり、例えば、プリント基板或いはＩＣリードフレームなどは金や銀などのメッ キ工程に先だって必ず銅メッキの工程を行なう。 然しながら、銅メッキ後に生ずる有毒なメッキ廃液は、当業者に頗る困惑を与 えると共に、近年環境保全意識が急速に高まってからは、環境保全部門のメッキ 廃液処理に対する監視基準もますます厳しくなっている。 The electroplating process is almost indispensable in the metal industry and the electronics industry. For example, a copper plating process is always performed on a printed circuit board or an IC lead frame before a plating process of gold or silver. However, toxic plating effluent generated after copper plating is extremely embarrassing to those skilled in the art, and in recent years environmental awareness has rapidly increased, and environmental protection departments' monitoring standards for plating effluent treatment have become increasingly strict. I have.
【０００３】 従来から行なわれている電気メッキ廃液の解毒処理は、銅解離手段を採用して おり、主に下記の二方式がある。 （１）硝酸解離 その一つの銅解離方式は、硫酸を用いて銅解離を行なうもので、その反応ステ ップは次の通りである。[0003] The detoxification treatment of the electroplating waste liquid that has been conventionally performed employs a copper dissociation means, and mainly includes the following two methods. (1) Nitric acid dissociation One copper dissociation method involves dissociating copper using sulfuric acid. The reaction steps are as follows.
【０００４】 ３Ｃｕ＋８Ｈ+ ＋２ＮＯ3 - →３Ｃｕ+2＋２ＮＯ＋４Ｈ2 Ｏ 《稀硝酸》 Ｃｕ＋４Ｈ+ ＋２ＮＯ3 - →Ｃｕ+2＋２ＮＯ2 ＋２Ｈ2 Ｏ 《濃硝酸》 この方法によると、稀硝酸または濃硝酸の何れを採用したかに拘らず、それぞ れの化学反応にともなって酸化窒素（ＮＯ）或いは二酸化窒素（ＮＯ2 ）、即ち 俗称の窒素酸化物（ＮＯX ）を生ずる。該窒素酸化物は有毒な物質で、もしも大 気中に拡散すると、人体の健康を害する環境公害問題を引き起こす為、通常は大 気中へ放出する前に、必ず一酸化炭素を利用して焼却するなど解毒処理を行なう 。[0004] 3Cu + 8H + + 2NO 3 - → 3Cu +2 + 2NO + 4H 2 O " rare nitrate" Cu + 4H + + 2NO 3 - According to → Cu +2 + 2NO 2 + 2H 2 O " concentrated nitric acid" this method, any rare nitric acid or concentrated nitric acid Regardless of their adoption, each chemical reaction produces nitric oxide (NO) or nitrogen dioxide (NO 2 ), a commonly known nitrogen oxide (NO x ). Nitrogen oxides are toxic substances, and if they diffuse into the air, they will cause environmental pollution problems that may harm human health. Therefore, always incinerate using carbon monoxide before releasing them into the atmosphere. Perform detoxification treatment.
【０００５】 しかし、この種の解毒処理は、処理ステップが複雑で生産コストの増加を招く ばかりでなく、少しでも注意を怠るとやはり環境公害を招く恐れがある。 （２）過酸化水素解離 もう一つの銅解離方式は、過酸化水素を使って銅解離を行なうもので、その反 応ステップは下記の通りである。[0005] However, this type of detoxification treatment involves not only complicated processing steps and an increase in production cost, but also environmental pollution if care is taken with little care. (2) Hydrogen peroxide dissociation Another copper dissociation method involves dissociation of copper using hydrogen peroxide. The reaction steps are as follows.
【０００６】 Ｃｕ＋Ｈ2 ＳＯ4 ＋Ｈ2 Ｏ2 →ＣｕＳＯ4 ＋２Ｈ2 Ｏ この種の過酸化水素を利用した解毒処理は、有毒ガスである窒素酸化物（ＮＯ X ）を発生しないが、大量生産に対応して予め大量の過酸化水素を備えて貯えて おかなければならない。ところが、過酸化水素は極度に不安定で、急激な爆発を 引き起こし易い危険物質である為、この方法は安全性の面で採用できない。[0006] Cu + HTwoSOFour+ HTwoOTwo→ CuSOFour+ 2HTwoO This type of detoxification treatment using hydrogen peroxide involves the removal of nitrogen oxides (NO X ) Does not occur, but a large amount of hydrogen peroxide must be stored in advance for mass production. However, because hydrogen peroxide is extremely unstable and is a dangerous substance that can easily cause a sudden explosion, this method cannot be adopted in terms of safety.
【０００７】[0007]
上記従来の銅メッキ廃液の処理方式における問題点に鑑み、本考案は、銅メッ キ廃液を回収利用する際に、環境汚染が発生しない銅メッキ廃液リサイクル装置 を提供することを目的とする。 In view of the above-mentioned problems in the conventional copper plating wastewater treatment method, the present invention aims to provide a copper plating wastewater recycling apparatus that does not cause environmental pollution when recovering and using the copper plating wastewater.
【０００８】[0008]
上記目的を達成するため、本考案は、通常タンクなどにより形成され、第１の 供給口、第２の供給口及び排出口を具えて、内部に金属銅を装填した反応器と、 上記第１の供給口と連通して、上記反応器内にオゾンを供給するオゾン発生器と 、上記第２の供給口と連通して、低濃度硫酸銅および硫酸を含むメッキ廃液を上 記反応器に送るメッキ廃液輸送管とを具えて構成される。 In order to achieve the above object, the present invention provides a reactor which is usually formed by a tank or the like, has a first supply port, a second supply port, and a discharge port, and is loaded with metallic copper therein; An ozone generator that supplies ozone into the reactor in communication with the supply port of the second reactor, and a plating waste liquid containing low-concentration copper sulfate and sulfuric acid that communicates with the second supply port to the reactor. It comprises a plating waste liquid transport pipe.
【０００９】 或いは、通常タンクなどにより形成され、第１の供給口、第２の供給口及び排 出口を具えて、金属銅を内装した反応器と、オゾンを供給するオゾン発生器と、 低濃度硫酸銅および硫酸を含むメッキ廃液を輸送する廃液輸送管と、ミキサーの 一端にそれぞれオゾン供給管及びメッキ廃液回収管を連接して、該ミキサーの他 端を上記供給口に連結し、これにより該ミキサーで混合したオゾン、メッキ廃液 及び硫酸液を上記反応器に送る混合輸送管とを含んで構成される。[0009] Alternatively, a reactor which is usually formed by a tank or the like and has a first supply port, a second supply port, and a discharge port, and is provided with metal copper, an ozone generator for supplying ozone, A waste liquid transport pipe for transporting plating waste liquid containing copper sulfate and sulfuric acid, and an ozone supply pipe and a plating waste liquid recovery pipe connected to one end of the mixer, respectively, and the other end of the mixer is connected to the above-mentioned supply port. A mixing and transporting pipe for sending the ozone mixed with the mixer, the plating waste liquid and the sulfuric acid liquid to the reactor.
【００１０】 そして、上記反応器の排出口に貯蔵槽を連結して、該反応器で生成した高濃度 硫酸銅を貯蔵したり、上記メッキ廃液輸送管に輸送ポンプを設けて、メッキ廃液 および硫酸液を上記反応器内に送り込むように補助したり、上記オゾン発生器の 外部に酸素供給器を取付けたり、該オゾン発生器を紫外線照射器、或いは電極励 発器で形成したり、上記メッキ廃液輸送管に濃度センサーを連結して、該濃度セ ンサーにオゾン供給管を連接し、且つ該オゾン供給管と上記反応器との間に流量 制御バルブを設けて、該濃度センサーにより該メッキ廃液輸送管内のメッキ廃液 及び硫酸の濃度を探知してオゾン供給量をコントロールしたり、上記金属銅を銅 粒子で形成したりすると一層好ましい。[0010] A storage tank is connected to an outlet of the reactor to store high-concentration copper sulfate generated in the reactor, or a transport pump is provided in the plating waste liquid transport pipe to provide plating waste liquid and sulfuric acid. Assists in sending the solution into the reactor, attaches an oxygen supply to the outside of the ozone generator, forms the ozone generator with an ultraviolet irradiator or an electrode exciter, or removes the plating waste solution. A concentration sensor is connected to the transport pipe, an ozone supply pipe is connected to the concentration sensor, and a flow rate control valve is provided between the ozone supply pipe and the reactor, and the plating waste liquid is transported by the concentration sensor. It is more preferable to detect the concentration of the plating waste liquid and sulfuric acid in the tube to control the supply amount of ozone, or to form the copper metal by using copper particles.
【００１１】 上記のように構成された本考案の銅メッキ廃液リサイクル装置は、メッキ廃液 を反応器内に導入させて、同時にオゾン発生器で造られたオゾンを該反応器内に 流入させ、該メッキ廃液中に含まれている硫酸を反応器内の金属銅と接触させて 、オゾンと化学反応を生じて該金属銅を酸化し、且つ酸化された金属銅と硫酸根 （ＳＯ2 -2）を結合させて硫酸銅（ＣｕＳＯ4 ）を形成し、しかる後に、その生 じた硫酸銅をメッキ槽に回流させて、銅イオン（Ｃｕ+2）を持続的に補充するこ とができる。したがって、従来技術のように、危険性が高い過酸化水素を使用す る必要がなく、メッキ廃液を回収してリサイクル反応を行なえる為、メッキ廃液 を外部へ排出して環境を汚染することがない。The copper plating waste liquid recycling apparatus of the present invention configured as described above introduces the plating waste liquid into the reactor, and at the same time, causes the ozone produced by the ozone generator to flow into the reactor. The sulfuric acid contained in the plating waste solution is brought into contact with metallic copper in the reactor to cause a chemical reaction with ozone to oxidize the metallic copper, and oxidized metallic copper and sulfate (SO 2 -2 ) To form copper sulfate (CuSO 4 ), and thereafter, the generated copper sulfate can be circulated to a plating tank to continuously replenish copper ions (Cu +2 ). Therefore, unlike the prior art, there is no need to use highly dangerous hydrogen peroxide, and it is possible to collect the plating waste solution and carry out a recycling reaction. Absent.
【００１２】[0012]
以下、本考案を実施の形態例に基づき具体的に説明するが、本考案はこの例の みに限定されない。 本考案が開示する銅メッキ廃液リサイクル装置は、実施の一態様例を示すだけ に過ぎず、本考案の請求範囲及び開示した精神に基づき、様々な異なる組合わせ 態様があるが、先ず本考案の目的を達成できる最も基本的な組合わせ態様を説明 すると、図１に示す如く、一個または一以上の反応器１の中に金属銅粒子１１を 装填して、これら反応器１の上端縁に近い上端部の適所に排出口１２を設け、且 つこれら反応器１の底部にそれぞれ第１の供給口１３及び第２の供給口１４を形 成する。 Hereinafter, the present invention will be specifically described based on an embodiment, but the present invention is not limited to only this example. The copper plating waste liquid recycling apparatus disclosed in the present invention is merely an example of the embodiment, and there are various different combinations based on the claims and the disclosed spirit of the present invention. To explain the most basic combination mode that can achieve the object, as shown in FIG. 1, metal copper particles 11 are loaded into one or more reactors 1 and close to the upper edge of these reactors 1. A discharge port 12 is provided at an appropriate position at the upper end, and a first supply port 13 and a second supply port 14 are formed at the bottom of the reactor 1, respectively.
【００１３】 そして、上記第２の供給口１４を電気メッキ槽（図示せず）に連接して、該電 気メッキ槽内でメッキ反応を行なった後の残留低濃度硫酸銅（ＣｕＳＯ4 ）及び 硫酸（Ｈ2 ＳＯ4 ）のメッキ廃液を該反応器１内に送り込む。 また、上記第１の供給口１３は別個に設けたオゾン発生器２と連接して、オゾ ンを該反応器１に送る。Then, the second supply port 14 is connected to an electroplating tank (not shown), and a residual low-concentration copper sulfate (CuSO 4 ) after performing a plating reaction in the electroplating tank and A plating waste solution of sulfuric acid (H 2 SO 4 ) is fed into the reactor 1. Further, the first supply port 13 is connected to the separately provided ozone generator 2 to send ozone to the reactor 1.
【００１４】 上記反応器１は格別の制限はなく、一般常用の従来の反応器でよい。 本考案の銅メッキ廃液リサイクル装置を採用した場合は、主として、従来の過 酸化水素（Ｈ2 Ｏ2 ）に替わって、オゾン（Ｏ3 ）の強酸化力を利用してリサイ クル化学反応を行なわせるのであり、その反応式は次の通りである。 Ｃｕ＋Ｈ2 ＳＯ4 ＋Ｏ3 →ＣｕＳＯ4 ＋Ｈ2 Ｏ＋Ｏ2 即ち、メッキ廃液を第２の供給口１４よりそれら反応器１内に送って、同時に 第１の供給口１３よりオゾン発生器２内で造られたオゾンをそれら反応器１内に 注入し、該メッキ廃液中に含まれた硫酸をそれら反応器１内の金属銅粒子間に装 填して、オゾンと上記化学反応を行なわせて金属銅粒子を酸化し、且つ酸化した 金属銅粒子と硫酸根（ＳＯ2 -2）とを結合して硫酸銅（ＣｕＳＯ4 ）を形成し、 しかる後に、その生じた硫酸銅をメッキ槽（図示せず）に回流させて、槽内のだ んだんと少なくなった銅イオン（Ｃｕ+2）を補充する。The reactor 1 is not particularly limited, and may be a general and conventional reactor. When the copper plating waste liquid recycling device of the present invention is employed, the recycling chemical reaction is performed mainly by using the strong oxidizing power of ozone (O 3 ) instead of the conventional hydrogen peroxide (H 2 O 2 ). The reaction formula is as follows. Cu + H 2 SO 4 + O 3 → CuSO 4 + H 2 O + O 2, that is, the plating waste liquid is sent into the reactors 1 through the second supply port 14, and is simultaneously produced in the ozone generator 2 through the first supply port 13. The ozone is injected into the reactor 1, and the sulfuric acid contained in the plating waste liquid is charged between the metal copper particles in the reactor 1, and the above-described chemical reaction with ozone is carried out to produce the metal copper particles. Is oxidized, and the oxidized metal copper particles are combined with sulfate groups (SO 2 -2 ) to form copper sulfate (CuSO 4 ). Thereafter, the resulting copper sulfate is placed in a plating tank (not shown). And replenish the copper ions (Cu +2 ) that have been gradually reduced in the tank.
【００１５】 本考案のリサイクル反応の中で、反応物が必要とする硫酸（Ｈ2 ＳＯ4 ）は、 メッキ液中の硫酸銅（ＣｕＳＯ4 ）が電気メッキを行なった後、二価銅イオン（ Ｃｕ+2）が陰極で金属銅（Ｃｕ）に還元して、残余の等モル数の硫酸根（ＳＯ4 -2 ）が陽極で生じたＨ+ と結合して硫酸（Ｈ2 ＳＯ4 ）となるため、メッキ廃液 中に相当な量の硫酸（Ｈ2 ＳＯ4 ）を具えており、したがって、別に補充しなく ても持続的に反応を進めることができる。In the recycle reaction of the present invention, sulfuric acid (HTwoSOFour) Is copper sulfate (CuSOFour) Performs electroplating, then divalent copper ions (Cu+2) Is reduced to metallic copper (Cu) at the cathode and the remaining equimolar number of sulfates (SOFour -2 ) Is generated at the anode+Combined with sulfuric acid (HTwoSOFour), A considerable amount of sulfuric acid (HTwoSOFour), So that the reaction can proceed continuously without additional replenishment.
【００１６】 上記のような構成を具えた本考案の銅メッキ廃液リサイクル装置は、危険性が 高い過酸化水素を使用する必要がないほか、メッキ廃液を回収してリサイクル反 応を行なえる為、メッキ廃液を外部へ排洩して環境を汚染することがなく、原料 コストを低減できると共に、メッキ業界が多年困惑しているメッキ廃液の処理問 題から免れ得て、環境汚染問題を充分に解決できる為、革命的な装置と言える。The copper plating waste liquid recycling apparatus of the present invention having the above-described configuration does not require the use of highly dangerous hydrogen peroxide, and also can collect the plating waste liquid and perform a recycling reaction. Pollution wastewater is not discharged to the outside and pollutes the environment, reducing raw material costs.Also, the plating industry can be free from the plating wastewater treatment problem that has been confused for many years, and the environmental pollution problem can be sufficiently solved. Therefore, it can be said that it is a revolutionary device.
【００１７】 更に上記リサイクル反応式の反応物として必要なオゾンは、オゾン発生器２に より電極励発或いは紫外線などの作用でオゾンを製造し、即時に供給して使用す ることができる。また、反応進行の均一性を向上させるため、回収したメッキ廃 液とオゾンを予めミキサーで均一に混合してから、同時にそれら反応器１内に送 り込んで反応の均一性を向上させるようにしてもよい。Further, ozone required as a reactant of the above-mentioned recycle reaction type can be used by producing ozone by the action of an electrode or ultraviolet rays by the ozone generator 2 and immediately supplying it. Further, in order to improve the uniformity of the reaction progress, the recovered plating waste liquid and ozone are previously mixed uniformly by a mixer, and then simultaneously sent into the reactor 1 so as to improve the uniformity of the reaction. You may.
【００１８】 全体装置の比較的好ましい配置は、図２に示す如く、該オゾン発生器２に酸素 供給器２１を連結して、該酸素供給器２１により酸素を直接該オゾン発生器２に 送り、該オゾン発生器２で電極励発器或いは紫外線照射器で迅速にオゾンを製造 して、即時に供給する。更に、メッキ廃液回収管１５とオゾン供給管１６を同時 にミキサー１７に連結して、該ミキサー１７で存分に混合させた後、液料分配管 １９により各反応器１に均等に装入して、リサイクル反応を行なう。A relatively preferred arrangement of the whole apparatus is as shown in FIG. 2, in which an oxygen supplier 21 is connected to the ozone generator 2, and oxygen is directly sent to the ozone generator 2 by the oxygen supplier 21. The ozone generator 2 quickly produces ozone using an electrode exciter or an ultraviolet irradiator, and immediately supplies ozone. Further, the plating waste liquid recovery pipe 15 and the ozone supply pipe 16 are connected to the mixer 17 at the same time, mixed sufficiently by the mixer 17, and uniformly charged into each reactor 1 by the liquid material distribution pipe 19. To carry out a recycling reaction.
【００１９】 他にも、排出口１２の送出側末端に貯蔵槽３を装設して、反応を経た高濃度の 硫酸銅を貯蔵させ、該貯蔵槽３に設けられた外部への輸送管３１を利用してメッ キ槽（図示せず）に回流させてもよい。 図３に示すのは、本考案の銅メッキ廃液リサイクル装置におけるもう一つの実 施例で、リサイクル反応をよりスムーズに進行させ且つメッキ槽に流入した硫酸 銅溶液の濃度をより高めるため、本実施例は上記複数の反応器１を貯蔵槽３内に 取付けて、各反応器１の排出口１２をそれぞれの反応器１の上端部周壁のほぼ同 一レベルに開設される複数の円孔で形成し、且つそれら円孔を該貯蔵槽３内に貯 蔵された硫酸銅溶液の液面以上に位置付ける。In addition, a storage tank 3 is provided at the end of the discharge side of the discharge port 12 to store high-concentration copper sulfate after reaction, and a transport pipe 31 provided in the storage tank 3 to the outside. The water may be circulated to a tank (not shown) by using. FIG. 3 shows another embodiment of the copper plating waste liquid recycling apparatus according to the present invention. In this embodiment, the recycling reaction proceeds more smoothly and the concentration of the copper sulfate solution flowing into the plating tank is further increased. In the example, the plurality of reactors 1 are mounted in the storage tank 3, and the outlet 12 of each reactor 1 is formed by a plurality of circular holes formed at substantially the same level on the peripheral wall at the upper end of each reactor 1. The holes are positioned above the level of the copper sulfate solution stored in the storage tank 3.
【００２０】 そして、メッキ槽（図示せず）のメッキ廃液を輸送器２４によりメッキ廃液輸 送管２３を経て該貯蔵槽３’に送り込む。該貯蔵槽３’は側辺に回流管２５を設 けて、該回流管２５の前端側に輸送ポンプ４を取り付け、且つ該輸送ポンプ４の 出口側にミキサー１７を装設して、該輸送ポンプ４により貯蔵槽３’内の硫酸銅 溶液および硫酸溶液を該ミキサー１７内に送る。また、該貯蔵槽３の側辺に検知 管２８１を取付けて、該検知管２８１の前端に濃度センサー２８を設け、該濃度 センサー２８により貯蔵槽３’内に貯蔵された硫酸銅溶液及び硫酸溶液の濃度を 探知して、その探知結果を上記オゾン発生器２の管路前端に設けられた制御バル ブ５に送り、これによりオゾンの供給量を制御する。しかる後に、オゾン供給管 １６を介してオゾンをミキサー１７に送り、上記のように均一に混合させた後、 更に液料分配管１９を経て均等に各反応器１へ輸送する。該貯蔵槽３’は他にも 外部に液料取得槽２７を連接しており、該液料取得槽２７により該貯蔵槽３’か ら必要な適量の高濃度硫酸溶液を抽出して、環流管２６を経てメッキ槽（図示せ ず）に送り込む。Then, the plating waste liquid in the plating tank (not shown) is sent to the storage tank 3 ′ by the transporter 24 via the plating waste liquid transport pipe 23. The storage tank 3 ′ is provided with a circulating pipe 25 on the side thereof, a transport pump 4 attached to the front end side of the circulating pipe 25, and a mixer 17 provided at an outlet side of the transport pump 4. The copper sulfate solution and the sulfuric acid solution in the storage tank 3 ′ are sent into the mixer 17 by the pump 4. A detection tube 281 is attached to the side of the storage tank 3, and a concentration sensor 28 is provided at the front end of the detection tube 281. The copper sulfate solution and the sulfuric acid solution stored in the storage tank 3 ′ by the concentration sensor 28 are provided. The detection result is sent to the control valve 5 provided at the front end of the pipe of the ozone generator 2 to control the supply amount of ozone. Thereafter, the ozone is sent to the mixer 17 via the ozone supply pipe 16 to be uniformly mixed as described above, and further uniformly transported to the respective reactors 1 via the liquid material distribution pipe 19. The storage tank 3 ′ further connects a liquid material acquisition tank 27 to the outside. The liquid substance acquisition tank 27 extracts a necessary appropriate amount of a high-concentration sulfuric acid solution from the storage tank 3 ′ and returns the liquid to the reflux tank. It is fed into a plating tank (not shown) via a pipe 26.
【００２１】 上記のもう一つの実施例の装置を採用すると、貯蔵槽３’内の硫酸銅溶液を何 度も循環させてリサイクル反応を行なわせることができ、反応によって生ずる硫 酸銅溶液の濃度をより高めることができる。同時に、該濃度センサー２８を設け たことから、適度にオゾンの供給量をコントロールできて、供給過剰で浪費する ようなことがない。If the apparatus of the above another embodiment is adopted, the copper sulfate solution in the storage tank 3 ′ can be circulated many times to cause a recycle reaction, and the concentration of the copper sulfate solution generated by the reaction can be increased. Can be further enhanced. At the same time, since the concentration sensor 28 is provided, the supply amount of ozone can be controlled appropriately, and there is no waste of excess supply.
【００２２】 そして、図４に示す本考案におけるオゾンを加えた後の硫酸銅及び硫酸濃度の 数値リスト、及び図５に示す曲線図を参照すれば分かるように、本考案は極めて 短い反応時間の状況の下で、高濃度の硫酸銅溶液を取得して使用できる為、産業 上至って利用価値が高い。As can be seen from the numerical list of copper sulfate and sulfuric acid concentrations after adding ozone in the present invention shown in FIG. 4 and the curve diagram shown in FIG. 5, the present invention has a very short reaction time. Under these circumstances, a high-concentration copper sulfate solution can be obtained and used.
【００２３】[0023]
上記のように構成された本考案は、各種組合わせ態様に対応してそれぞれ適当 な管路のレイアウトを配し、本考案が初めて開発したリサイクル反応を実施させ ている為、回収したメッキ廃液を完全にリサイクルでき、環境汚染などの問題が 生ずる恐れがなく、生産ステップを簡易化して、コストの低減を期待でき、且つ 環境汚染を低減する効果がある。 In the present invention configured as described above, an appropriate pipe layout is arranged for each combination mode, and the recycling reaction developed for the first time by the present invention is carried out. It can be completely recycled, has no risk of problems such as environmental pollution, simplifies production steps, can be expected to reduce costs, and has the effect of reducing environmental pollution.
【図１】本考案における比較的好ましい実施例の設備配
置表示図である。FIG. 1 is a schematic view showing a layout of equipment according to a preferred embodiment of the present invention.
【図２】上記実施例の他形態の設備配置表示図である。FIG. 2 is a diagram showing a facility arrangement according to another embodiment of the embodiment.
【図３】本考案における比較的好ましいもう一つの実施
例の設備配置表示図である。FIG. 3 is a layout view of another preferred embodiment of the present invention;
【図４】本考案におけるオゾンを加えた後の硫酸銅及び
硫酸濃度の数値リストである。FIG. 4 is a numerical list of copper sulfate and sulfuric acid concentrations after adding ozone in the present invention.
【図５】本考案におけるオゾンを加えた後の硫酸銅及び
硫酸濃度の曲線図である。FIG. 5 is a curve diagram of the concentrations of copper sulfate and sulfuric acid after adding ozone according to the present invention.
１ 反応器 ２ オゾン発生器 ３ 貯蔵槽 ４ 輸送ポンプ ５ 制御バルブ １１ 金属銅粒子 １２ 排出口 １３ 第１の供給口 １４ 第２の供給口 ２１ 酸素供給器 ２３ メッキ廃液輸送管 ２４ 輸送器 DESCRIPTION OF SYMBOLS 1 Reactor 2 Ozone generator 3 Storage tank 4 Transport pump 5 Control valve 11 Metal copper particles 12 Discharge port 13 First supply port 14 Second supply port 21 Oxygen supply unit 23 Plating waste liquid transportation tube 24 Transporter
─────────────────────────────────────────────────────
────────────────────────────────────────────────── ───
【手続補正書】[Procedure amendment]
【提出日】平成１０年９月７日[Submission date] September 7, 1998
【手続補正１】[Procedure amendment 1]
【補正対象書類名】明細書[Document name to be amended] Statement
【補正対象項目名】実用新案登録請求の範囲[Correction target item name] Claims for utility model registration
【補正方法】変更[Correction method] Change
【補正内容】[Correction contents]
【実用新案登録請求の範囲】[Utility model registration claims]
Claims (9)
供給口、第２の供給口及び排出口を具えて、内部に金属
銅を装填した反応器と、 上記第１の供給口と連通して、上記反応器内にオゾンを
供給するオゾン発生器と、 上記第２の供給口と連通して、低濃度硫酸銅および硫酸
を含むメッキ廃液を上記反応器に送る銅メッキ廃液輸送
管とを具えてなる銅メッキ廃液リサイクル装置。A first supply port, a second supply port, and a discharge port, which are usually formed by a tank or the like, and which communicate with the first supply port; An ozone generator that supplies ozone into the reactor, and a copper plating waste liquid transport pipe that communicates the plating waste liquid containing low-concentration copper sulfate and sulfuric acid to the reactor in communication with the second supply port. Equipped with a copper plating waste liquid recycling system.
供給口、第２の供給口及び排出口を具えて、金属銅を内
装した反応器と、 オゾンを供給するオゾン発生器と、 低濃度硫酸銅および硫酸を含むメッキ廃液を輸送する廃
液輸送管と、 ミキサーの一端にそれぞれオゾン供給管及びメッキ廃液
回収管を連接して、該ミキサーの他端を上記供給口に連
結し、これにより該ミキサーで混合したオゾン、メッキ
廃液及び硫酸液を上記反応器に送る混合輸送管と、 を含んでなる銅メッキ廃液リサイクル装置。2. A reactor which is formed by a tank or the like and has a first supply port, a second supply port, and a discharge port and is provided with metal copper, an ozone generator for supplying ozone, A waste liquid transport pipe for transporting a plating waste liquid containing copper sulfate and sulfuric acid, and an ozone supply pipe and a plating waste liquid recovery pipe connected to one end of the mixer, respectively, and the other end of the mixer is connected to the supply port. A mixing and transporting pipe for sending the ozone mixed with the mixer, the plating waste liquid and the sulfuric acid liquid to the reactor, and a copper plating waste liquid recycling apparatus.
て、該反応器で生成した高濃度硫酸銅を貯蔵してなる請
求項１又は２に記載の銅メッキ廃液リサイクル装置。3. The copper plating waste liquid recycling apparatus according to claim 1, wherein a storage tank is connected to an outlet of the reactor to store high-concentration copper sulfate produced in the reactor.
けて、メッキ廃液および硫酸液を上記反応器内に送り込
むように補助してなる請求項１又は２に記載の銅メッキ
廃液リサイクル装置。4. The copper plating waste liquid recycling apparatus according to claim 1, wherein a transport pump is provided in the plating waste liquid transport pipe to assist in feeding the plating waste liquid and the sulfuric acid solution into the reactor.
取付けてなる請求項１又は２に記載の銅メッキ廃液リサ
イクル装置。5. The copper plating waste liquid recycling apparatus according to claim 1, wherein an oxygen supply device is mounted outside the ozone generator.
してなる請求項１又は２に記載の銅メッキ廃液リサイク
ル装置。6. The copper plating waste liquid recycling apparatus according to claim 1, wherein the ozone generator is formed by an ultraviolet irradiator.
てなる請求項１又は２に記載の銅メッキ廃液リサイクル
装置。7. The copper plating waste liquid recycling apparatus according to claim 1, wherein the ozone generator is formed by an electrode exciter.
連結して、該濃度センサーにオゾン供給管を連接し、且
つ該オゾン供給管と上記反応器との間に流量制御バルブ
を設け、該濃度センサーにより該メッキ廃液輸送管内の
メッキ廃液及び硫酸の濃度を探知してオゾン供給量をコ
ントロールしてなる請求項１又は２に記載の銅メッキ廃
液リサイクル装置。8. A concentration sensor is connected to the plating waste liquid transport pipe, an ozone supply pipe is connected to the concentration sensor, and a flow control valve is provided between the ozone supply pipe and the reactor. 3. The copper plating waste liquid recycling apparatus according to claim 1, wherein the concentration of the plating waste liquid and sulfuric acid in the plating waste liquid transport pipe is detected by a sensor to control the supply amount of ozone.
項１又は２に記載の銅メッキ廃液リサイクル装置。9. The apparatus for recycling a copper plating waste liquid according to claim 1, wherein the metallic copper is formed of copper particles.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1998004885U JP3056028U (en) | 1998-07-03 | 1998-07-03 | Copper plating waste liquid recycling system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1998004885U JP3056028U (en) | 1998-07-03 | 1998-07-03 | Copper plating waste liquid recycling system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP3056028U true JP3056028U (en) | 1999-02-02 |
Family
ID=43190016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1998004885U Expired - Lifetime JP3056028U (en) | 1998-07-03 | 1998-07-03 | Copper plating waste liquid recycling system |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3056028U (en) |
-
1998
- 1998-07-03 JP JP1998004885U patent/JP3056028U/en not_active Expired - Lifetime
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108191039A (en) | A kind of efficient compound Fenton reagent and preparation method thereof | |
| JP2001205277A (en) | Method and apparatus for removing hardly decomposable organic compound in water | |
| CN106007099A (en) | Copper-containing etching waste liquid treatment and recovery process | |
| JP3056028U (en) | Copper plating waste liquid recycling system | |
| JPH0757910B2 (en) | Regeneration of ferric chloride etching solution | |
| CN211664878U (en) | Ammonia nitrogen wastewater treatment device | |
| US7360550B2 (en) | System for recycling spent sulfuric acid, method for recycling spent sulfuric waste liquid, and recycled sulfuric acid | |
| EP0861810A2 (en) | Process for the treatment of liquid residues from photographic processes | |
| US9604862B2 (en) | Oxidation method, nozzle and system for treating waste water | |
| CN201882991U (en) | Electroplating wastewater containing cyanide treatment and online cyanide recovery device | |
| CN109368765A (en) | A method of utilizing air-treatment cyanide wastewater | |
| JP2005270886A (en) | Treatment method and apparatus for industrial wastewater | |
| JP2001070958A (en) | Partitioned type ozone/ultraviolet circulating oxidation treatment apparatus | |
| CN110372070A (en) | Electrocatalysis oxidation apparatus and method | |
| JP6663302B2 (en) | Organic acid solution decomposition apparatus and organic acid solution decomposition method | |
| CN218452047U (en) | Equipment for collecting waste gas containing nitrogen oxides for recycling treatment | |
| JP2000017462A (en) | Copper etching method and device therefor | |
| JPS62176592A (en) | Apparatus for treating waste liquid containing sodium hypochlorite | |
| JPH04283700A (en) | Reducing method of volume of low-level concentrated liquid waste | |
| CN205313118U (en) | Silicon liquid electrolyte circulation regenerating unit is shelled to nitric acid | |
| JP2004067469A (en) | Method for recycling sulfuric acid waste liquid and recycled sulfuric acid | |
| JP2000000580A (en) | Method and apparatus for treating cyanogen-containing solution | |
| CN207451871U (en) | Device based on catalysis oxidation and biotechnology Combined Treatment high ammonia-nitrogen wastewater | |
| JPH08254597A (en) | Method for treating waste liquid containing ammoniac nitrogen and organic substance | |
| Watanabe et al. | Treatment of COD bearing electroless plating solution by UV irradiation |