JP3040256B2 - Electrode support device for gas laser oscillator - Google Patents
Electrode support device for gas laser oscillatorInfo
- Publication number
- JP3040256B2 JP3040256B2 JP18484492A JP18484492A JP3040256B2 JP 3040256 B2 JP3040256 B2 JP 3040256B2 JP 18484492 A JP18484492 A JP 18484492A JP 18484492 A JP18484492 A JP 18484492A JP 3040256 B2 JP3040256 B2 JP 3040256B2
- Authority
- JP
- Japan
- Prior art keywords
- laser
- electrodes
- gas
- electrode
- laser tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Lasers (AREA)
Description
【0001】[0001]
【産業上の利用分野】本発明は、高周波励起ガスレーザ
発振装置の電極支持装置に関する。The present invention relates to relates to electrodes supporting device of a high-frequency excitation gas laser oscillator apparatus.
【0002】[0002]
【従来の技術】従来の高周波励起ガスレーザ発振装置の
電極と、電極支持装置の一例を示すものとして特開昭60
−3170号公報、特開昭62−210685号公報がある。前者に
示されるものは図5のとおりであり、後者に示されるも
のは図6のようになっている。以下その構成について説
明する。なお同一物には同一の符号を付け、重複はさけ
る。図5において、1は誘電体のレーザ管であり、この
レーザ管1の外周には電極2、3を螺旋状に対向配置し
ている。前記電極2、3は溶射によって形成され、高周
波電源5に接続されている。図中の6はレーザガスの流
れ、7は放電、12は放電空間である。図6において、1
0、11は平行平板電極であり、前記電極10、11を一定の
放電空間をもつように所定寸法に特定された一対の絶縁
支持板4で支持している。図中のねじ6はレーザガス、
8、9は出力、終段ミラーである。2. Description of the Related Art Japanese Unexamined Patent Publication No. Sho 60 (1999) discloses an example of an electrode of a conventional high frequency excitation gas laser oscillation device and an electrode support device.
JP-A-3170 and JP-A-62-110685. The former is shown in FIG. 5, and the latter is shown in FIG. Hereinafter, the configuration will be described. In addition, the same thing is attached with the same code and avoids duplication. In FIG. 5, reference numeral 1 denotes a dielectric laser tube, and electrodes 2 and 3 are spirally arranged around the outer periphery of the laser tube 1. The electrodes 2 and 3 are formed by thermal spraying and are connected to a high frequency power supply 5. In the figure, reference numeral 6 denotes a flow of the laser gas, 7 denotes a discharge, and 12 denotes a discharge space. In FIG. 6, 1
Reference numerals 0 and 11 are parallel plate electrodes, and the electrodes 10 and 11 are supported by a pair of insulating support plates 4 specified to have predetermined dimensions so as to have a certain discharge space. The screw 6 in the figure is a laser gas,
8 and 9 are output and final stage mirrors.
【0003】次に図5を用いて動作について説明する。
まず一対の電極2、3に高周波電源5から高周波高電圧
を印加してレーザ管1内で放電7を発生させる。放電空
間12のエネルギーは出力、終端ミラーにより形成される
光共振器で共振状態となり、出力ミラーからレーザビー
ムが出力される。ここで電極2、3の形状はスパイラル
形状をしているため、放電空間12では均一な放電強度が
えられる。図6は、レーザガス6が横方向から流れてお
り、レーザ管が図示されていないが図5と同様に考えて
もよい。一対の絶縁支持板4により取付ねじを用いて電
極10、11を一体的に固定し、高周波電源5により放電空
間12に放電させる。放電の広がりは平行平板電極である
ため、電極10、11間の放電が発生する。放電の特性は電
極10、11間の距離により定まるため、装置の別なく同一
の放電特性が得られる。この場合、図7のようにレーザ
ガス6がレーザ管1の中を通っていると放電7はレーザ
管1内で発生することとなり、放電7は広がらないこと
が知られている。Next, the operation will be described with reference to FIG.
First, a high-frequency high voltage is applied to a pair of electrodes 2 and 3 from a high-frequency power supply 5 to generate a discharge 7 in the laser tube 1. The energy in the discharge space 12 is output and resonates in the optical resonator formed by the terminating mirror, and a laser beam is output from the output mirror. Since the electrodes 2 and 3 have a spiral shape, a uniform discharge intensity can be obtained in the discharge space 12. In FIG. 6, the laser gas 6 flows from the lateral direction, and the laser tube is not shown. The electrodes 10 and 11 are integrally fixed by a pair of insulating support plates 4 using mounting screws, and discharged to the discharge space 12 by the high frequency power supply 5. Since the spread of the discharge is parallel plate electrodes, a discharge occurs between the electrodes 10 and 11. Since the discharge characteristics are determined by the distance between the electrodes 10 and 11, the same discharge characteristics can be obtained regardless of the device. In this case, it is known that when the laser gas 6 passes through the laser tube 1 as shown in FIG. 7, the discharge 7 is generated in the laser tube 1 and the discharge 7 does not spread.
【0004】[0004]
【発明が解決しようとする課題】ところで図5に示すよ
うに電極2、3をレーザ管1にスパイラル状に金属を溶
射して形成した場合、放電空間のレーザガスは300 度近
くにも温度があがるため、熱によるはがれ等で電極とし
ての信頼性が低いこと、またレーザ管に溶射して電極
2、3を形成するため製造コストが高いという問題があ
った。図6に示される平行平板電極は簡易な構造で所定
寸法の絶縁支持板により固定されて使用できるが、レー
ザ管にガスを流す構成とした場合、放電は図7に示すよ
うにレーザ管内に均一に広がらず、レーザ変換効率が低
いという問題点があった。また、レーザ管1の径は必要
とされるレーザ出力により定まるため、管径はφ10mm〜
30mmと幅広く、前述の電極支持構成、すなわち所定寸法
の絶縁板では調整がきかず、その度に作成しなければな
らないという問題点があった。本発明は、このような従
来の課題を解決するもので、放電の広がりを実現できる
電極、および電極間隔の調整を簡易とする電極支持装置
の提供を目的とする。As shown in FIG. 5, when the electrodes 2 and 3 are formed by spraying metal onto the laser tube 1 in a spiral manner, the temperature of the laser gas in the discharge space rises to nearly 300 degrees. Therefore, there is a problem that the reliability as an electrode is low due to peeling due to heat or the like, and that the manufacturing cost is high because the electrodes 2 and 3 are formed by spraying on a laser tube. The parallel plate electrode shown in FIG. 6 has a simple structure and can be used by being fixed by an insulating support plate of a predetermined size. However, when the gas is supplied to the laser tube, the discharge is uniform in the laser tube as shown in FIG. However, there is a problem that the laser conversion efficiency is low. Also, since the diameter of the laser tube 1 is determined by the required laser output, the tube diameter should be φ10 mm or more.
There is a problem that adjustment is not possible with the above-described electrode supporting structure, that is, an insulating plate having a predetermined size, which is as wide as 30 mm, and must be formed each time. An object of the present invention is to solve such a conventional problem, and an object of the present invention is to provide an electrode capable of realizing the spread of discharge and an electrode support device which facilitates adjustment of an electrode interval.
【0005】[0005]
【課題を解決するための手段】上記目的を達成するため
に本発明は、レーザ管内を光軸方向にレーザガスを流
し、前記レーザ管の外周に設けられる一対の電極間に高
周波電源を接続し、レーザビームを発生するガスレーザ
発振装置において、前記一対の電極をねじ穴のある環状
の絶縁物の中に挿入し、前記環状の絶縁物とねじにより
レーザ管に固定させたことを特徴とする。In order to achieve the above object, the present invention provides a method for flowing a laser gas in a laser tube in an optical axis direction.
And a height between a pair of electrodes provided on the outer circumference of the laser tube.
Gas laser that generates a laser beam by connecting a high frequency power supply
In the oscillation device, the pair of electrodes may be formed in a ring shape having a screw hole.
Insert into the insulator of the above, with the annular insulator and screw
It is characterized by being fixed to a laser tube .
【0006】[0006]
【作用】本発明は上記した構成によって、ガスレーザの
発振器における電極が着脱可能で、また放電空間に均一
な放電広がりを実現できることとなる。また、任意のレ
ーザ管径に対して調整可能な電極支持装置とすることと
なる。According to the present invention, the electrodes of the gas laser oscillator can be detached and the discharge space can be uniformly spread in the discharge space. Further, the electrode support device can be adjusted to an arbitrary laser tube diameter.
【0007】[0007]
【実施例】以下、本発明の実施例を添付図面に基づいて
説明する。図1、図3、図4は、本発明の実施例のガス
レーザ発振器の電極の詳細図である。なお従来例と同じ
箇所には同じ符号を用いて説明は省略する。図1で13、
14は一対の電極であり、レーザ管1の外周に対向するよ
うに配置され、かつレーザ管1のラジアル方向に90度ひ
ねった形状に形成されている。Embodiments of the present invention will be described below with reference to the accompanying drawings. 1, 3 and 4 are detailed views of the electrodes of the gas laser oscillator according to the embodiment of the present invention. The same parts as those in the conventional example are denoted by the same reference numerals, and description thereof is omitted. 13, in FIG.
Reference numeral 14 denotes a pair of electrodes, which are arranged so as to face the outer periphery of the laser tube 1 and are twisted by 90 degrees in the radial direction of the laser tube 1.
【0008】図3で15、16は一対の棒状の絶縁物であ
り、一対の棒状絶縁物15、16の両端は絶縁性のねじ17で
締めつけるようになっている。すなわち、レーザ管(図
示せず)の外周の配置される一対の電極13、14の端部を
締めつけて固定する。In FIG. 3, reference numerals 15 and 16 denote a pair of rod-shaped insulators. Both ends of the pair of rod-shaped insulators 15 and 16 are tightened by insulating screws 17. That is, the ends of the pair of electrodes 13 and 14 arranged on the outer periphery of the laser tube (not shown) are tightened and fixed.
【0009】図4で、18はねじ穴等のある環状の絶縁物
であり、レーザ管(図示せず)の外周に配置される一対
の電極13、14の端部を挿入し、ねじ穴にねじ19をねじ込
んで、前記電極13、14を締めつける構成となっている。
図1に関して、図2に電極ひねり角度と放電広がり率を
示す。図2に示すように、電極ひねり角度0度(平行平
板)は放電広がり率60%であり、ひねり角を増すにつれ
て放電広がり率は大きくなることが判明した。またひね
り角度20度で広がり率が80%となり、また、広がり率が
80%を越えればレーザ出力に対しての放電広がり率の影
響が少なくなることも判明した。電極製造上からは、90
度以下とすれば電極取付が容易になり、溶射と比べ金属
加工で製造可能なため信頼性の向上および大幅なコスト
ダウンが図れる。この結果から判るように、誘電体より
なるレーザ管内を光軸方向にレーザガスを流し、前記レ
ーザ管の外周に設けられる一対の電極間に高周波電源を
接続し、レーザビームを発生するガスレーザ発振装置に
おいて、前記一対の電極を20度から90度の範囲でひねっ
た着脱自在の電極とすれば、良好な放電広がりを実現で
きる、信頼性の高い、低価格の電極とすることができ
る。図3に関して、棒状の絶縁物15、16をねじ17で止め
ることによりひねり電極13、14をレーザ管の外周に固定
する。そのため、レーザ管とひねり電極13、14の間にス
ペーサを挿入しても、レーザ管の寸法が変化しても簡易
に固定することができる。本図では電極としてひねり電
極を明示しているが、当然平行平板電極にも有効であ
る。図4の環状の絶縁物18を用いたものに関しても同様
であり図3に比べ、レーザ管の寸法に対する自由度は少
ないが、一方向からの締め付けでよく、より簡単に固定
ができる。この結果から判るようにレーザ管内を光軸方
向にレーザガスを流し、前記レーザ管の外周に設けられ
る一対の電極間に高周波電源を接続し、レーザビームを
発生するガスレーザ発振装置において、前記電極両端部
に一対の棒状の絶縁物と、前記一対の棒状絶縁物の両端
を締め付ける絶縁性のねじによりレーザ管に電極を固定
させたガスレーザ発振装置の電極支持構成、または、一
対の電極をネジ穴等のある環状の絶縁物の中に挿入し前
記環状の絶縁物とねじ等の手段でにより放電管に電極を
固定させたガスレーザ発振装置の電極支持構成とすれ
ば、着脱自在の電極を、安定して、任意の寸法のレーザ
管に簡単に固定できる。In FIG. 4, reference numeral 18 denotes an annular insulator having a screw hole or the like, into which the ends of a pair of electrodes 13 and 14 arranged on the outer periphery of a laser tube (not shown) are inserted, and inserted into the screw hole. The screw 19 is screwed in and the electrodes 13 and 14 are tightened.
With respect to FIG. 1, FIG. 2 shows the electrode twist angle and the discharge spread rate. As shown in FIG. 2, the electrode twist angle of 0 degree (parallel plate) has a discharge spread rate of 60%, and it has been found that the discharge spread rate increases as the twist angle increases. At a twist angle of 20 degrees, the spreading rate is 80%, and the spreading rate is
It was also found that the effect of the discharge spread rate on the laser output was reduced when the ratio exceeded 80%. From the viewpoint of electrode manufacturing, 90
If the temperature is lower than the above, the electrodes can be easily attached, and can be manufactured by metal processing as compared with thermal spraying, so that reliability can be improved and cost can be significantly reduced. As can be seen from this result, in a gas laser oscillation device that flows a laser gas in the optical axis direction through a laser tube made of a dielectric, connects a high-frequency power supply between a pair of electrodes provided on the outer periphery of the laser tube, and generates a laser beam. If the pair of electrodes is a detachable electrode twisted in the range of 20 degrees to 90 degrees, a highly reliable and inexpensive electrode that can realize good discharge spread can be realized. Referring to FIG. 3, the twist electrodes 13 and 14 are fixed to the outer periphery of the laser tube by fixing rod-shaped insulators 15 and 16 with screws 17. Therefore, even if a spacer is inserted between the laser tube and the twist electrodes 13 and 14, even if the size of the laser tube changes, it can be easily fixed. In this figure, a twist electrode is clearly shown as an electrode, but it is naturally also effective for a parallel plate electrode. The same applies to the case of using the annular insulator 18 in FIG. 4 and the degree of freedom with respect to the size of the laser tube is smaller than that in FIG. As can be seen from this result, in a gas laser oscillation device that flows a laser gas in the direction of the optical axis in the laser tube, connects a high-frequency power supply between a pair of electrodes provided on the outer periphery of the laser tube, and generates a laser beam, A pair of rod-shaped insulators, and an electrode support structure of a gas laser oscillation device in which electrodes are fixed to a laser tube by insulating screws that tighten both ends of the pair of rod-shaped insulators, or a pair of electrodes such as screw holes If the electrode support structure of the gas laser oscillation device in which the electrode is fixed to the discharge tube by means of the annular insulator and screws or the like inserted into a certain annular insulator, the detachable electrode can be stably mounted. It can be easily fixed to a laser tube of any size.
【0010】[0010]
【発明の効果】以上のように本発明のガスレーザ発振装
置の電極支持装置によると、レーザ管内を光軸方向にレ
ーザガスを流し、前記レーザ管の外周に設けられる一対
の電極間に高周波電源を接続し、レーザビームを発生す
るガスレーザ発振装置において、前記一対の電極をねじ
穴のある環状の絶縁物の中に挿入し、前記環状の絶縁物
とねじによりレーザ管に固定させることにより、着脱自
在の電極を任意の寸法のレーザ管に、簡単に固定するこ
とができる。 As described above, the gas laser oscillation device of the present invention
According to the electrode support device, the laser tube is driven in the optical axis direction.
Laser gas, and a pair of laser gas
Connect a high frequency power supply between the electrodes to generate a laser beam
In the gas laser oscillation device, the pair of electrodes are screwed.
Insert into the annular insulator with a hole,
And fixed to the laser tube with screws
The existing electrode can be easily fixed to a laser tube of any size.
Can be.
【図1】本発明のレーザ発振装置の電極の一実施例の概
略構成図FIG. 1 is a schematic configuration diagram of an embodiment of an electrode of a laser oscillation device of the present invention.
【図2】電極ひねり角度−放電広がり率の特性図FIG. 2 is a characteristic diagram of an electrode twist angle-discharge spread rate.
【図3】本発明の電極支持装置の一実施例の斜視図FIG. 3 is a perspective view of an embodiment of the electrode support device of the present invention.
【図4】本発明の電極支持装置の他の実施例の斜視図FIG. 4 is a perspective view of another embodiment of the electrode support device of the present invention.
【図5】従来のレーザ発振装置の電極の構成図FIG. 5 is a configuration diagram of electrodes of a conventional laser oscillation device.
【図6】従来のレーザ発振装置の電極支持装置の斜視図FIG. 6 is a perspective view of an electrode support device of a conventional laser oscillation device.
【図7】従来のレーザ管内をガスが流れる場合の平行平
板電極での放電を示す説明図FIG. 7 is an explanatory view showing a discharge at a parallel plate electrode when a gas flows in a conventional laser tube.
13、14 1レーザ管 15、16 棒状の絶縁物 17 ねじ 18 ねじ穴等がある環状の絶縁物 19 ねじ 13, 14 1 Laser tube 15, 16 Rod-shaped insulator 17 Screw 18 Ring insulator with screw holes, etc. 19 Screw
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平1−151280(JP,A) 特開 平1−151279(JP,A) 特開 平2−35787(JP,A) 特開 昭61−269387(JP,A) 特開 平3−1585(JP,A) 特開 昭61−142783(JP,A) (58)調査した分野(Int.Cl.7,DB名) H01S 3/038 H01S 3/0975 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-1-151280 (JP, A) JP-A-1-151279 (JP, A) JP-A-2-35787 (JP, A) JP-A-61- 269387 (JP, A) JP-A-3-1585 (JP, A) JP-A-67-142783 (JP, A) (58) Fields investigated (Int. Cl. 7 , DB name) H01S 3/038 H01S 3 / 0975
Claims (1)
し、前記レーザ管の外周に設けられる一対の電極間に高
周波電源を接続し、レーザビームを発生するガスレーザ
発振装置において、前記一対の電極をねじ穴のある環状
の絶縁物の中に挿入し、前記環状の絶縁物とねじにより
レーザ管に固定させたガスレーザ発振装置の電極支持装
置。1. A gas laser oscillation device for flowing a laser gas in an optical axis direction in a laser tube, connecting a high-frequency power supply between a pair of electrodes provided on an outer periphery of the laser tube, and generating a laser beam, inserted into the annular insulator with screw holes, electrode support device of the gas laser oscillator apparatus in which more is fixed to the laser tube Ji insulator and the roots of the annular.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18484492A JP3040256B2 (en) | 1992-07-13 | 1992-07-13 | Electrode support device for gas laser oscillator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18484492A JP3040256B2 (en) | 1992-07-13 | 1992-07-13 | Electrode support device for gas laser oscillator |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0629594A JPH0629594A (en) | 1994-02-04 |
JP3040256B2 true JP3040256B2 (en) | 2000-05-15 |
Family
ID=16160305
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18484492A Expired - Fee Related JP3040256B2 (en) | 1992-07-13 | 1992-07-13 | Electrode support device for gas laser oscillator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP3040256B2 (en) |
-
1992
- 1992-07-13 JP JP18484492A patent/JP3040256B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0629594A (en) | 1994-02-04 |
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