JP2986480B2 - Spark sintering apparatus and method for spark sintering using the apparatus - Google Patents
Spark sintering apparatus and method for spark sintering using the apparatusInfo
- Publication number
- JP2986480B2 JP2986480B2 JP1190512A JP19051289A JP2986480B2 JP 2986480 B2 JP2986480 B2 JP 2986480B2 JP 1190512 A JP1190512 A JP 1190512A JP 19051289 A JP19051289 A JP 19051289A JP 2986480 B2 JP2986480 B2 JP 2986480B2
- Authority
- JP
- Japan
- Prior art keywords
- sintering
- punch
- die
- current
- compression
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2998/00—Supplementary information concerning processes or compositions relating to powder metallurgy
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は放電焼結装置及びその装置を用いて放電焼結
を行う方法に関する。Description: TECHNICAL FIELD The present invention relates to a discharge sintering apparatus and a method for performing discharge sintering using the apparatus.
現在は、放電焼結は広く利用されている。 At present, spark sintering is widely used.
従来広く利用されている方法は、粉末材料に数十ない
し数百kg/cm2程度、最大でも3T/cm2程度の圧力を掛けて
軽く圧縮した状態で直流通電又は直流と交流の重畳通電
を行い、材料の温度が十分に高くなったとき、圧力を上
げて加圧成形するものである。Methods have been conventionally widely used, several tens to several hundreds kg / cm 2 about the powder material superimposed energization of DC application or a DC and AC in a state were also lightly compressed under pressure of about 3T / cm 2 at the maximum When the temperature of the material becomes sufficiently high, the pressure is increased to perform pressure molding.
このような方法が採用されている理由は、粉末圧縮体
の抵抗が、圧力の３乗根に逆比例して減少するため、通
電以前に高圧力で圧縮すると、抵抗が減少し過ぎて、通
電に支障があると考えられていたためである。The reason for adopting such a method is that the resistance of the powder compact decreases in inverse proportion to the cube root of the pressure. Because it was thought that there was a problem.
しかしながら、焼結体の寸法精度や、均質性、緻密性
という観点からすると、従来の低圧縮通電方式では、必
ずしも満足し得る品質が得られず、また、焼結のため大
電力が必要であるという問題もあった。However, from the viewpoints of dimensional accuracy, homogeneity, and compactness of the sintered body, the conventional low-compression energizing method does not always provide satisfactory quality, and requires large power for sintering. There was also a problem.
本発明は、上記の観点に立ってなされたものであり、
その目的は、従来よりも緻密かつ均質で寸法精度も高い
良質の焼結体が得られる新規で経済的な放電焼結装置及
びその使用方法に関する。The present invention has been made in view of the above,
The object thereof is to provide a new and economical spark sintering apparatus capable of obtaining a high-quality sintered body that is denser, more homogeneous and higher in dimensional accuracy than before, and a method of using the same.
上記の目的は、 導電性物質からなり、両端に円筒状の開口部を有する
炉室を備えた焼結炉と、 導電性物質からなり、上記焼結炉の開口部からそれぞ
れ炉室内に摺動自在に挿入される円柱状の一対の圧縮通
電用パンチと、 上記炉室に挿入された一対の圧縮通電用パンチの間に
設けられ、その圧縮通電用パンチから圧縮力と電流とを
供給される焼結成形用のダイ及びパンチと、 上記焼結成形用のダイ及びパンチの位置及び加圧力を
制御する装置と、 上記一対の圧縮通電用パンチにパルス電流を供給し得
る電源回路と、 上記焼結成形用のダイ及びパンチ又はその内部の温度
を検出する装置と、 上記温度検出装置の出力に応じ、かつ、予め定められ
たプログラムに従って上記電源回路の出力するパルス電
流のピーク電流とパルス幅を制御する装置と、 好ましくは、焼結炉を内部に保持する真空容器と、 からなる放電焼結装置を用いて放電焼結を行うことによ
って達成される。The above-mentioned objects are as follows: a sintering furnace having a furnace chamber made of a conductive material and having cylindrical openings at both ends; and a sintering furnace made of a conductive material and sliding into the furnace chamber from the opening of the sintering furnace. It is provided between a pair of cylindrical energizing punches freely inserted and a pair of energizing punches inserted into the furnace chamber, and is supplied with a compressive force and a current from the energizing punches. A die and a punch for sintering; a device for controlling the position and pressure of the die and a punch for sintering; a power supply circuit capable of supplying a pulse current to the pair of compression energizing punches; A die and a device for detecting the temperature inside the die or punch for forming, and a peak current and a pulse width of a pulse current output from the power supply circuit according to an output of the temperature detection device and according to a predetermined program. Device to control And preferably a vacuum vessel holding a sintering furnace inside, and discharge sintering is performed by using a discharge sintering apparatus comprising:
また、この放電焼結装置によって焼結を行うときは、
粉末状の材料をダイ内に充填し、真空容器を具備する場
合は、容器内を真空にし、材料の圧縮圧力を5T/cm2ない
し30T/cm2とし通電以前に高密度に圧縮し、高密度に圧
縮された材料に、加圧下でパルス状電流を通電すると共
に、そのピーク電流とパルス幅とを制御して材料温度を
制御しつつ圧縮焼結することが推奨される。Also, when sintering by this spark sintering device,
The powdered material was filled into the die, when having a vacuum container, the container is evacuated, to no 5T / cm 2 compression pressure of the material and 30T / cm 2 and a high density compressed previously energized, high It is recommended that a pulsed current be applied to the material compressed to a density under pressure, and the peak current and the pulse width be controlled to control the material temperature to perform the compression sintering.
上記に示した装置及び方法により放電焼結を行えば、
従来公知の装置及び方法によるよりも緻密で均質な焼結
体が得られる。If spark sintering is performed by the above-described apparatus and method,
A dense and homogeneous sintered body can be obtained as compared with the conventionally known apparatus and method.
また、本発明方法によれば、従来方法より低温度で焼
結が可能となるので、粉体材料に対する制約が緩和さ
れ、かつ、材料の性質を損なうことなく良質の焼結体が
得られる。Further, according to the method of the present invention, since sintering can be performed at a lower temperature than in the conventional method, restrictions on the powder material are alleviated, and a high-quality sintered body can be obtained without impairing the properties of the material.
また、従来考えられていた程には、大電流を必要とし
ないので、電力効率も良好である。In addition, power efficiency is good because a large current is not required as conventionally thought.
以下、図面を参照しつつ本発明の構成を具体的に説明
する。Hereinafter, the configuration of the present invention will be specifically described with reference to the drawings.
第１図は本発明にかかる放電焼結装置の一実施例を示
す正面略図、第２図は第１図を示した装置の主要部の構
造を示す断面図、第３図は電源回路の一例を示す説明図
である。FIG. 1 is a schematic front view showing an embodiment of a discharge sintering apparatus according to the present invention, FIG. 2 is a cross-sectional view showing the structure of a main part of the apparatus shown in FIG. 1, and FIG. FIG.
第１図中、１はベッド、２及び３はベッド１に直立す
るカラム、４は焼結炉を収容する真空容器、５はカラム
２、３に昇降自在に支承された真空容器支持アーム、６
は真空容器４の蓋、７は蓋６を開閉するアーム、８は焼
結加工用のヘッド、９はヘッド８を昇降するアーム、10
は上パンチ、11はしたパンチである。In FIG. 1, 1 is a bed, 2 and 3 are columns standing upright on the bed 1, 4 is a vacuum vessel for accommodating a sintering furnace, 5 is a vacuum vessel support arm supported on columns 2 and 3 so as to be able to move up and down,
Is a lid of the vacuum vessel 4, 7 is an arm for opening and closing the lid 6, 8 is a head for sintering, 9 is an arm for raising and lowering the head 8, 10
Is the upper punch and 11 is the punch.
後に示すように、焼結炉は真空容器４内に設けられて
いる。真空容器支持アーム５は、カラム２、３により昇
降自在に支承されており、真空容器４を昇降せしめる。As will be described later, the sintering furnace is provided in the vacuum vessel 4. The vacuum vessel support arm 5 is supported by the columns 2 and 3 so as to be able to move up and down, and moves the vacuum vessel 4 up and down.
蓋開閉アーム７は、焼結作業中は蓋５を真空容器４に
押しつけてそれを気密に閉鎖する。The lid opening / closing arm 7 presses the lid 5 against the vacuum vessel 4 during the sintering operation to hermetically close it.
上パンチ10はヘッド８内に設けられた昇降装置（図示
せず）により昇降せしめられ、また、下パンチ11はベッ
ド１内に設けられた昇降装置（図示せず）により昇降せ
しめられる。The upper punch 10 is raised and lowered by a lifting device (not shown) provided in the head 8, and the lower punch 11 is raised and lowered by a lifting device (not shown) provided in the bed 1.
第２図により装置の要部に就いて説明する。 The main part of the device will be described with reference to FIG.
第２図中、12は焼結炉、13は上パンチ10の下面に固定
され、焼結成形用パンチ14を支持するパンチホルダ、15
は焼結成形用のダイ、16はダイ15を支承する支台、17は
下パンチ11の上面に固定されたダイホルダ、18はボー
ル、19は焼結用の材料又は焼結体、20は排気管、21は真
空ポンプである。In FIG. 2, reference numeral 12 denotes a sintering furnace, 13 denotes a punch holder fixed to the lower surface of the upper punch 10 and supports a sintering punch 14;
Is a die for sintering molding, 16 is a support for supporting the die 15, 17 is a die holder fixed to the upper surface of the lower punch 11, 18 is a ball, 19 is a sintering material or sintered body, and 20 is an exhaust. The tube 21 is a vacuum pump.
焼結炉12は、グラファイトで構成され、真空容器４内
に固定されており、その中心部に円筒状の炉室を有し、
かつ、その炉室内には上下からそれぞれ上パンチ10及び
下パンチ11が挿入される。The sintering furnace 12 is made of graphite, fixed in the vacuum vessel 4, and has a cylindrical furnace chamber at the center thereof.
An upper punch 10 and a lower punch 11 are inserted into the furnace chamber from above and below, respectively.
上下のパンチ10及び11の間には、焼結成形用のパンチ
14及びダイ15がセットされる。A punch for sinter molding is provided between the upper and lower punches 10 and 11.
14 and die 15 are set.
焼結成形用パンチ14は、上パンチ10の下面に取りつけ
られたパンチホルダ13により支承されている。The sintering punch 14 is supported by a punch holder 13 attached to the lower surface of the upper punch 10.
また、ダイ15は支台16の上に載置されており、支台16
は下パンチ11の上面に取りつけられたダイホルダ17及び
複数のボール18、18を介して支承されている。The die 15 is placed on the abutment 16, and the abutment 16
Is supported via a die holder 17 and a plurality of balls 18 mounted on the upper surface of the lower punch 11.
なお、図には省略したが、装置の要部には、温度計及
び力計が装着されており、それらの出力は後述する制御
装置に入力せしめられるように構成されている。Although not shown in the figure, a thermometer and a dynamometer are mounted on the main parts of the apparatus, and their outputs are configured to be input to a control device described later.
焼結作業中は、真空容器４の内部は、真空ポンプ21に
より排気され、真空状態に保たれる。これは焼結体内の
ガス抜きと、焼結炉12の外面の断熱のために行うもので
ある。During the sintering operation, the inside of the vacuum vessel 4 is evacuated by the vacuum pump 21 and kept in a vacuum state. This is performed for degassing the sintered body and for heat insulation of the outer surface of the sintering furnace 12.
放電焼結を行う際には、まず、真空容器４を引き下げ
ると共に、上パンチ10及び下パンチ11を押し上げて、焼
結成形用パンチ14及びダイ15を蓋６上に９押し出し、第
15の内部に所定量の材料を装填する 次いで、下パンチ11及び上パンチ10を下げ、焼結用パ
ンチ14及びダイ15を焼結炉12内に引き入れ、真空容器４
を気密に閉鎖し、真空ポンプ21を作動させて焼結炉12内
を真空状態とし、必要に応じて上パンチ10及び下パンチ
11内に設けたガス供給路10a及び11aから適宜の雰囲気ガ
スを供給する。When performing spark sintering, first, the vacuum container 4 is pulled down, the upper punch 10 and the lower punch 11 are pushed up, and the sintering forming punch 14 and the die 15 are extruded 9 onto the lid 6.
Next, the lower punch 11 and the upper punch 10 are lowered, and the sintering punch 14 and the die 15 are drawn into the sintering furnace 12.
Is airtightly closed, and the vacuum pump 21 is operated to make the inside of the sintering furnace 12 vacuum, and the upper punch 10 and the lower punch
Appropriate atmospheric gas is supplied from gas supply paths 10a and 11a provided in the inside.
然る後、上パンチ10及び下パンチ11を作動させ、材料
19を少なくとも5T/cm2、望ましくは、10ないし15T/c
m2、場合によっては、20ないし30T/cm2の圧力で圧縮
し、高密度の圧縮成形体とし、然る後、上下のパンチ1
0、11に例えば第３図に示すような電源からパルス電流
を供給する。After that, the upper punch 10 and the lower punch 11 are operated to
19 at least 5 T / cm 2 , preferably 10-15 T / c
m 2 , depending on the case, at a pressure of 20 to 30 T / cm 2 to obtain a high-density compression-molded product, and then the upper and lower punches 1
A pulse current is supplied to 0 and 11 from, for example, a power supply as shown in FIG.
ここで加圧力を5T/cm2以上としたのは、それ以上では
材料の緻密化と抵抗の減少が不十分となり、装置内で集
中的な通電ができず、また、小電流で完全な焼結が不可
能となるためである。The reason why the pressing force is set to 5 T / cm 2 or more is that if the pressing force is more than 5 T / cm 2 , the material will not be sufficiently densified and the resistance will be insufficiently reduced. This is because it is impossible to make a result.
一方、加圧力の上限を、望ましくは10ないし15T/cm2
としたのは、主として型の経済性によるものである。従
って、十分強力な型が安価に供給される場合には、加圧
力を20ないし30T/cm2とすることができる。On the other hand, the upper limit of the pressing force is desirably 10 to 15 T / cm 2
This is mainly due to the economics of the mold. Therefore, when a sufficiently strong mold is supplied at low cost, the pressing force can be set to 20 to 30 T / cm 2 .
第３図中、22は商用電源に接続される受信端子、23は
整流回路、24は電流制御回路、25は焼結炉12の内部や第
15にとり付けられる温度検出器、26は力検出器、27及び
28はA/D変換器、29はCPU、30はパルス幅変調回路、31は
スイッチング回路、32は上パンチ10に接続される給電端
子、34は装置の各部に設けられるアクチュエータ、モー
タ等の作動制御装置である。In FIG. 3, 22 is a receiving terminal connected to a commercial power supply, 23 is a rectifier circuit, 24 is a current control circuit, 25 is the inside of the sintering furnace 12 or the
A temperature detector attached to 15, 26 is a force detector, 27 and
28 is an A / D converter, 29 is a CPU, 30 is a pulse width modulation circuit, 31 is a switching circuit, 32 is a power supply terminal connected to the upper punch 10, 34 is operation of actuators, motors, etc. provided in various parts of the device It is a control device.
CPU29には、予め制御プログラムがロードされてお
り、そのプログラムに従って給電パルスのピーク値とパ
ルス幅が制御されるよう構成されている。A control program is loaded on the CPU 29 in advance, and the peak value and the pulse width of the power supply pulse are controlled according to the program.
ダイ15内の焼結体19の温度は、温度検出器25により推
定される。温度検出器25の出力はA/D変換器27によりデ
ジタル信号に変換され、CPU29に送られる。The temperature of the sintered body 19 in the die 15 is estimated by the temperature detector 25. The output of the temperature detector 25 is converted into a digital signal by the A / D converter 27 and sent to the CPU 29.
また、上下のパンチ10及び11にかかる力は、力検出器
29により検出される。力検出器26の出力はA/D変換器28
によりデジタル信号に変換され、CPU29に送られる。The force applied to the upper and lower punches 10 and 11 is determined by a force detector.
Detected by 29. The output of the force detector 26 is an A / D converter 28
Is converted into a digital signal and sent to the CPU 29.
CPU29は、予め与えられたプログラムに従って電流制
御回路24及びパルス幅変調回路30を制御し、焼結体19の
温度を所定の昇温曲線に合わせて制御すると共に、制装
装置34を介して、焼結作業中は、ヘッダ８内に設けた上
パンチ昇降用モータ及びベッド１内に設けた下パンチ昇
降用モータの作動を制御し、焼結体に加えられる圧力を
制御し、かつ、材料の装填及び焼結体の取り出しを実行
するときは、カラム２及び３の内部に設けられた図示さ
れていない真空容器支持アーム駆動用モータ、蓋開閉ア
ーム駆動用モータ、ヘッド昇降用アーム駆動用モータ等
の作動を制御するものである。The CPU 29 controls the current control circuit 24 and the pulse width modulation circuit 30 according to a program given in advance, controls the temperature of the sintered body 19 in accordance with a predetermined temperature rising curve, and via the control device 34, During the sintering operation, the operation of the upper punch elevating motor provided in the header 8 and the lower punch elevating motor provided in the bed 1 is controlled, the pressure applied to the sintered body is controlled, and When loading and taking out of the sintered body are performed, a motor for driving a vacuum vessel supporting arm, a motor for driving a lid opening / closing arm, a motor for driving a head lifting / lowering arm, and the like, which are provided inside the columns 2 and 3, are not shown. This controls the operation of.
本発明において、電流をパルス状に供給する理由は、
PWMにより正確に温度が制御できることもあるが、特に
本発明方法による場合、直流によるよりも焼結体内に均
一に通電ができ、偏析が生じないので、均質な焼結体が
得られることが判明したためである。In the present invention, the reason for supplying the current in a pulse form is as follows.
In some cases, the temperature can be accurately controlled by PWM.However, in the case of the method of the present invention, it has been found that a homogeneous sintered body can be obtained because a current can be uniformly supplied to the sintered body and segregation does not occur, as compared with direct current. Because he did.
直流通電または交流通電では、一旦焼結体内に通電路
が形成されるとその後はその通電路に沿って電流が持続
して流れる傾向があり、他の部分に対する通電が不十分
となることが多く、特に本発明方法においてはその弊害
が大きい。In direct current or alternating current, once a current path is formed in the sintered body, current tends to continue to flow along the current path, and the current to other parts often becomes insufficient. Particularly, in the method of the present invention, the adverse effect is large.
しかしながら、パルス通電方式によれば、各パルス毎
に通電点が適宜に移動するので、全体的に均質な通電が
可能となり、そのため均質で緻密な焼結体が得られるも
のである。However, according to the pulse energization method, the energization point appropriately moves for each pulse, so that uniform energization can be performed as a whole, and a homogeneous and dense sintered body can be obtained.
本発明方法によるときは、焼結体材料の抵抗が始めか
ら小さいから、電流は主として焼結体材料を流れるが、
焼結炉12、ダイ15等は、例えばグラファイト等の導電性
物質で製造されるので、電流は焼結体19のみならず、焼
結炉12及びダイ15をも通って流れる。これらの電流によ
り焼結炉12及びダイ15は高温度に加熱されるが、この熱
は予め計算されており、かつ、結局焼結体19に吸収され
るので、焼結時間の短縮に役立つ。According to the method of the present invention, since the resistance of the sintered body material is small from the beginning, the current mainly flows through the sintered body material,
Since the sintering furnace 12, the die 15, and the like are made of a conductive material such as graphite, current flows not only through the sintered body 19 but also through the sintering furnace 12 and the die 15. The sintering furnace 12 and the die 15 are heated to a high temperature by these electric currents, and this heat is calculated in advance and eventually absorbed by the sintered body 19, thus helping to reduce the sintering time.
パルス電流の周期は300Hzないし30KHzとすることがで
きるが、電源価格の観点から低周波電源が推奨される。The period of the pulse current can be 300 Hz to 30 KHz, but a low frequency power supply is recommended from the viewpoint of power supply price.
電流は350A/cm2程度で十分であり、焼結温度は概ね80
0〜1000℃程度でよい。A current of about 350 A / cm 2 is sufficient and the sintering temperature is about 80
It may be about 0 to 1000 ° C.
また、本発明によれば必要な場合１〜３分程度で焼結
体を3000℃程度に昇温できるので、経済的能率は極めて
高い。Further, according to the present invention, if necessary, the temperature of the sintered body can be raised to about 3000 ° C. in about 1 to 3 minutes, so that the economic efficiency is extremely high.
本発明は上記のように構成されるから、本発明による
ときは、従来公知の焼結方法に依る場合に比べて、より
緻密で均質な焼結体を得ることができる。Since the present invention is configured as described above, according to the present invention, a denser and more uniform sintered body can be obtained as compared with the case of using a conventionally known sintering method.
また、本発明では、通電焼結による収縮率が小さいか
ら、本発明は型焼結に適しており、本発明によるとき
は、従来品よりは寸法精度が高く、密度誤差が少ない良
質の焼結体が得られるものである。Further, in the present invention, since the shrinkage rate due to electric current sintering is small, the present invention is suitable for die sintering. According to the present invention, high-quality sintering with higher dimensional accuracy and less density error than conventional products. The body is obtained.
また、本発明によれば、焼結温度が低くて済むので、
通電電流が小さくて済み、このため電源回路が比較的小
容量で足りる。Further, according to the present invention, since the sintering temperature can be low,
Since a small current is required, a relatively small capacity of the power supply circuit is sufficient.
また、本発明によれば、磁石材、超硬合金、アマルフ
ァス合金その他の従来公知の全ての粉末材料の焼結が可
能であるばかりでなく、低温度で焼結が可能なので、従
来焼結不可能であった材料の焼結も可能となるものであ
る。Further, according to the present invention, not only sintering of magnet materials, cemented carbides, amalfas alloys, and all other conventionally known powder materials are possible, but also sintering at a low temperature is not possible. The sintering of the material that was possible is now possible.
第１図は本発明にかかる放電焼結装置の一実施例を示す
正面略図、第２図は第１図に示した装置の主要部の構造
を示す断面図、第３図は電源回路の構成を示す説明図で
ある。 １……ベッド ２、３……カラム ４……真空容器 ５……真空容器支持アーム ６……蓋 ７……蓋開閉アーム ８……ヘッド ９……ヘッド昇降用アーム 10……上パンチ 11……下パンチ 12……焼結炉 13……パンチホルダ 14……焼結成形用パンチ 15……ダイ 16……支台 17……ダイホルダ 18……ボール 19……材料または焼結体 20……排気管 21……真空ポンプ 22……商用電源接続端子 23……整流回路 24……電流制御回路 25……温度検出器 26……力検出器 27、28……A/D変換器 29……CPU 30……パルス幅変調回路 31……スイッチング回路 32、33……給電端子 34……モータ等の作動制御回路FIG. 1 is a schematic front view showing one embodiment of a discharge sintering apparatus according to the present invention, FIG. 2 is a cross-sectional view showing the structure of a main part of the apparatus shown in FIG. 1, and FIG. FIG. DESCRIPTION OF SYMBOLS 1 ... Bed 2, 3 ... Column 4 ... Vacuum container 5 ... Vacuum container support arm 6 ... Lid 7 ... Lid opening / closing arm 8 ... Head 9 ... Head raising / lowering arm 10 ... Upper punch 11 ... … Lower punch 12 …… Sintering furnace 13 …… Punch holder 14 …… Punch for sintering molding 15 …… Die 16 …… Abutment 17 …… Die holder 18 …… Ball 19 …… Material or sintered body 20… Exhaust pipe 21 Vacuum pump 22 Commercial power supply connection terminal 23 Rectifier circuit 24 Current control circuit 25 Temperature detector 26 Force detector 27, 28 A / D converter 29 CPU 30: Pulse width modulation circuit 31: Switching circuit 32, 33: Power supply terminal 34: Operation control circuit for motors, etc.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) B22F 3/14 C04B 35/64 ──────────────────────────────────────────────────続 き Continued on front page (58) Field surveyed (Int.Cl. 6 , DB name) B22F 3/14 C04B 35/64
Claims (3)
を具備する放電焼結装置。 （ａ） 導電性物質からなり、両端に円筒状の開口部を
有する炉室を備えた焼結炉（12）。 （ｂ） 導電性物質からなり、上記焼結炉の開口部から
それぞれ炉室内に摺動自在に挿入される円柱状の一対の
圧縮通電用パンチ（10、11）。 （ｃ） 上記炉室に挿入された一対の圧縮通電用パンチ
（10、11）の間に設けられ、その圧縮通電用パンチから
圧縮力と電流とを供給される焼結成形用のダイ（15）及
びパンチ（14）。 （ｄ） 上記焼結成形用のダイ（15）及びパンチ（14）
の位置及び加圧力を制御する装置（34）。 （ｅ） 上記一対の圧縮通電用パンチ（10、11）にパル
ス電流を供給し得る電源回路（23、30、31）。 （ｆ） 上記焼結成形用のダイ（15）及びパンチ（14）
又はその内部の温度を検出する装置（25）。 （ｇ） 上記温度検出装置（25）の出力に応じ、かつ、
予め定められたプログラムに従って上記電源回路の出力
するパルス電流のピーク電流とパルス幅を制御する装置
（24）。An electric discharge sintering apparatus comprising the following components (a) to (g). (A) A sintering furnace (12) comprising a furnace chamber made of a conductive material and having cylindrical openings at both ends. (B) A pair of columnar compression energizing punches (10, 11) made of a conductive substance and slidably inserted into the furnace chamber from the openings of the sintering furnace. (C) A sintering die (15) provided between a pair of compression energizing punches (10, 11) inserted into the furnace chamber and supplied with compressive force and current from the compression energizing punch. ) And punches (14). (D) Die (15) and punch (14) for sintering molding
(34) for controlling the position and pressure of the device. (E) A power supply circuit (23, 30, 31) capable of supplying a pulse current to the pair of compression energizing punches (10, 11). (F) The sintering die (15) and punch (14)
Or a device for detecting the temperature inside the device (25). (G) according to the output of the temperature detection device (25), and
An apparatus (24) for controlling a peak current and a pulse width of a pulse current output from the power supply circuit according to a predetermined program.
（４）を具備する請求項１に記載の放電焼結装置。2. A spark sintering apparatus according to claim 1, further comprising a vacuum vessel (4) holding a sintering furnace (12) therein.
用いて、放電焼結を行う方法であって、 粉末状の材料（19）をダイ（15）内に充填する工程と、 材料（19）の圧縮圧力を5T/cm2ないし30T/cm2とし通電
以前に高密度に圧縮する工程と、 上記高密度に圧縮された材料（19）に、加圧下でパルス
状電流を通電すると共に、そのピーク電流とパルス幅と
を制御して材料温度を制御しつつ圧縮焼結する工程と、 からなる上記の放電焼結を行う方法。3. A method for performing electric discharge sintering using the electric discharge sintering apparatus according to claim 1 or 2, wherein a step of filling a powdery material (19) into a die (15) comprises: A step of setting the compression pressure of the material (19) to 5 T / cm 2 to 30 T / cm 2 and compressing the material (19) to a high density before energizing; and applying a pulse current to the material (19) compressed to a high density under pressure. And performing compression sintering while controlling the material temperature by controlling the peak current and the pulse width.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190512A JP2986480B2 (en) | 1989-07-25 | 1989-07-25 | Spark sintering apparatus and method for spark sintering using the apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1190512A JP2986480B2 (en) | 1989-07-25 | 1989-07-25 | Spark sintering apparatus and method for spark sintering using the apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0356604A JPH0356604A (en) | 1991-03-12 |
| JP2986480B2 true JP2986480B2 (en) | 1999-12-06 |
Family
ID=16259323
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1190512A Expired - Lifetime JP2986480B2 (en) | 1989-07-25 | 1989-07-25 | Spark sintering apparatus and method for spark sintering using the apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2986480B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4617027B2 (en) * | 2001-08-03 | 2011-01-19 | 富士重工業株式会社 | Method for manufacturing sintered body |
| US7319080B2 (en) | 2002-09-20 | 2008-01-15 | Tokuyama Corporation | Aluminum nitride sintered compact |
| JP2005072391A (en) | 2003-08-26 | 2005-03-17 | Kyocera Corp | N-type thermoelectric material, its manufacturing method and n-type thermoelectric element |
| IT1396967B1 (en) * | 2009-12-16 | 2012-12-20 | K4Sint S R L | PROCEDURE FOR SINTERING THE DUST ASSISTED BY PRESSURE AND ELECTRICITY |
| WO2011089971A1 (en) | 2010-01-20 | 2011-07-28 | 株式会社村田製作所 | Method for processing of semiconductor crystal body, and device for processing of semiconductor crystal body |
| JP2013026400A (en) * | 2011-07-20 | 2013-02-04 | Murata Mfg Co Ltd | Method for processing semiconductor crystal body |
-
1989
- 1989-07-25 JP JP1190512A patent/JP2986480B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0356604A (en) | 1991-03-12 |
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