JP2956282B2 - Langmuir-Blodgett film production equipment - Google Patents
Langmuir-Blodgett film production equipmentInfo
- Publication number
- JP2956282B2 JP2956282B2 JP3163518A JP16351891A JP2956282B2 JP 2956282 B2 JP2956282 B2 JP 2956282B2 JP 3163518 A JP3163518 A JP 3163518A JP 16351891 A JP16351891 A JP 16351891A JP 2956282 B2 JP2956282 B2 JP 2956282B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- liquid
- adsorbent
- trough
- liquid tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 239000007788 liquid Substances 0.000 claims description 60
- 239000010409 thin film Substances 0.000 claims description 57
- 230000004888 barrier function Effects 0.000 claims description 37
- 239000003463 adsorbent Substances 0.000 claims description 36
- 239000000758 substrate Substances 0.000 claims description 27
- 239000010408 film Substances 0.000 claims description 23
- 238000005192 partition Methods 0.000 claims description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 9
- 239000005871 repellent Substances 0.000 claims description 5
- 238000010030 laminating Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims 1
- 238000007654 immersion Methods 0.000 claims 1
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000001179 sorption measurement Methods 0.000 description 7
- 239000000243 solution Substances 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 5
- 108010015776 Glucose oxidase Proteins 0.000 description 3
- 239000004366 Glucose oxidase Substances 0.000 description 3
- 229940116332 glucose oxidase Drugs 0.000 description 3
- 235000019420 glucose oxidase Nutrition 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- 230000003592 biomimetic effect Effects 0.000 description 2
- 239000000872 buffer Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- -1 silver ions Chemical class 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- JKMHFZQWWAIEOD-UHFFFAOYSA-N 2-[4-(2-hydroxyethyl)piperazin-1-yl]ethanesulfonic acid Chemical compound OCC[NH+]1CCN(CCS([O-])(=O)=O)CC1 JKMHFZQWWAIEOD-UHFFFAOYSA-N 0.000 description 1
- 241000251468 Actinopterygii Species 0.000 description 1
- 108090000790 Enzymes Proteins 0.000 description 1
- 102000004190 Enzymes Human genes 0.000 description 1
- SXRSQZLOMIGNAQ-UHFFFAOYSA-N Glutaraldehyde Chemical compound O=CCCCC=O SXRSQZLOMIGNAQ-UHFFFAOYSA-N 0.000 description 1
- 239000007995 HEPES buffer Substances 0.000 description 1
- REYJJPSVUYRZGE-UHFFFAOYSA-N Octadecylamine Chemical compound CCCCCCCCCCCCCCCCCCN REYJJPSVUYRZGE-UHFFFAOYSA-N 0.000 description 1
- FOIXSVOLVBLSDH-UHFFFAOYSA-N Silver ion Chemical compound [Ag+] FOIXSVOLVBLSDH-UHFFFAOYSA-N 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003139 buffering effect Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000006911 enzymatic reaction Methods 0.000 description 1
- 229940088598 enzyme Drugs 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明はラングミュア・ブロジェ
ット膜（以下単にＬＢ膜という）を製造する装置に関
し、特にかかる超薄膜間に吸着材料を介在せしめて薄膜
センサ、光機能素子（メモリー、光電変換素子）、生体
模倣膜を製造するに適した装置の構造改良に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for producing a Langmuir-Blodgett film (hereinafter simply referred to as an LB film), and more particularly, to a thin film sensor, an optical functional device (memory, photoelectric device) by interposing an adsorbing material between such ultrathin films. Conversion element), and a structural improvement of an apparatus suitable for manufacturing a biomimetic membrane.
【０００２】[0002]
【従来の技術】かかる用途に適した装置としては、トラ
フを円形となし、該トラフを周方向へ複数に区画して、
一つの薄膜液槽と複数の吸着液槽を設け、旋回移動する
一対のバリヤ間に単分子薄膜を形成してこれを吸着液槽
上で吸着材と結合せしめ、他の旋回位置にて、浸漬され
た基板上に吸着材が結合した単分子薄膜としてのＬＢ膜
を積層形成するものが提案されている（例えばＲｅｖｉ
ｅｗ ｏｆＳｉｅｎｔｉｆｉｃ Ｉｎｓｔｒｕｍｅｎｔ
ｓ Ｖｏｌ．４６，Ｎｏ．１０ Ｏｃｔｏｂｅｒ １９
７５）。2. Description of the Related Art As a device suitable for such an application, a trough is formed in a circular shape, and the trough is divided into a plurality in the circumferential direction.
One thin film liquid tank and a plurality of adsorbent liquid tanks are provided, a monomolecular thin film is formed between a pair of swirling barriers, and this is combined with the adsorbent on the adsorbent liquid tank, and immersed at another swirling position There has been proposed a device in which an LB film as a monomolecular thin film having an adsorbent bonded thereon is formed on a substrate which has been bonded (for example, Revi).
ew of Scientific Instrument
s Vol. 46, no. 10 October 19
75).
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、上記従
来の装置では、液槽間の仕切りが不十分なため２種類以
上の吸着溶液を用いた場合にこれらが混合してしまい、
また、吸着溶液が薄膜液槽内に流入して薄膜の積層を阻
害するという問題がある。さらには、旋回するバリヤは
内周部と外周部で移動速度が異なるため、均一な薄膜圧
縮がなされず、膜構造の乱れや破壊を生じることがあっ
た。However, in the above-mentioned conventional apparatus, when two or more kinds of adsorption solutions are used, they are mixed due to insufficient partition between the liquid tanks.
Further, there is a problem that the adsorption solution flows into the thin film liquid tank and hinders the lamination of the thin film. Furthermore, since the moving speed of the revolving barrier is different between the inner peripheral portion and the outer peripheral portion, the thin film is not uniformly compressed, and the film structure may be disturbed or broken.
【０００４】本発明はかかる課題を解決するもので、吸
着材を担持した均質なＬＢ膜を積層形成することが可能
なＬＢ膜の製造装置を提供することを目的とする。An object of the present invention is to provide an apparatus for manufacturing an LB film capable of laminating and forming a uniform LB film carrying an adsorbent.
【０００５】[0005]
【課題を解決するための手段】本発明の構成を説明する
と、液を貯留した長方形のトラフ１と、撥水性材料より
なりトラフ１内の液を略同液位でかつ表面張力により互
いに壁上で分離した状態でトラフ長手方向へ区画し、下
相水を保持する薄膜液槽１１と液中に吸着材を溶解した
少なくとも一つの吸着液槽１２，１３とを形成する隔壁
１４と、該隔壁１４上に適宜下降してこれに密着する撥
水性材料よりなる仕切板１５と、上記吸着液槽の側面に
連結されて槽内の液を適宜下相水又は異種の吸着液に交
換給排する液給排手段２１，２２と、トラフ長手方向へ
間隔をおきトラフ１を横切って上記薄膜液槽１１の液面
に接して設けられ、その間の下相水上に単分子の有機薄
膜を形成する一対の長尺バリヤ３１，３２と、これらバ
リヤ３１，３２の一方に設けて有機薄膜の表面圧力を検
出する手段４と、表面圧力を適正値に維持して上記バリ
ヤ３１，３２をこれらの相対間隔を調整自在にトラフ長
手方向へ移動せしめて有機薄膜を上記吸着液槽１２，１
３上へ往復移行せしめるバリヤ駆動手段３３と、薄膜液
槽１１の上方位置に設けられ基板Ｓを垂直姿勢で保持し
て薄膜液槽１１内へ往復浸漬し基板Ｓ上にラングミュア
・ブロジェット膜を積層形成する基板移動手段５とを具
備している。To explain the structure of the present invention, a rectangular trough 1 containing a liquid and a liquid made of a water-repellent material are placed on the wall at substantially the same liquid level and by surface tension. Partitioning in the longitudinal direction of the trough in a separated state, and forming a thin-film liquid tank 11 for holding lower-phase water and at least one adsorbing liquid tank 12, 13 in which an adsorbent is dissolved in the liquid; A partition plate 15 made of a water-repellent material, which is appropriately lowered onto and adhered to 14, is connected to the side surface of the adsorbent tank, and exchanges the liquid in the tank with lower phase water or a different adsorbent liquid as appropriate. A pair of liquid supply / discharge means 21 and 22 provided in contact with the liquid surface of the thin film liquid tank 11 across the trough 1 at intervals in the trough longitudinal direction and forming a monomolecular organic thin film on the lower phase water therebetween. Long barriers 31 and 32 and the barriers 31 and 32 Means 4 for detecting the surface pressure of the organic thin film, and maintaining the surface pressure at an appropriate value, and moving the barriers 31, 32 in the trough longitudinal direction so that the relative distance between them can be adjusted. Adsorption liquid tank 12, 1
And a barrier driving means 33 for reciprocating on the substrate 3 and a substrate S provided at a position above the thin film liquid tank 11, holding the substrate S in a vertical position, and immersing the substrate S in the thin film liquid tank 11 to immerse the Langmuir-Blodget film on the substrate S. And a substrate moving means 5 for forming a laminate.
【０００６】[0006]
【作用】上記構成の装置において、バリヤ３１，３２間
に有機薄膜を形成した後、両バリヤ３１，３２を吸着液
槽１２，１３上に移動せしめて吸着材を有機薄膜に担持
せしめ、その後再び薄膜液槽１１に戻す。ここで基板Ｓ
を浸漬し引き上げると、基板面に吸着材を担持したＬＢ
膜が形成され、この過程を繰り返すことにより基板Ｓ上
にＬＢ膜が積層される。After the organic thin film is formed between the barriers 31 and 32, the barriers 31 and 32 are moved onto the adsorbent tanks 12 and 13 to carry the adsorbent on the organic thin film. Return to the thin film liquid tank 11. Here the substrate S
LB with the adsorbent supported on the substrate surface
A film is formed, and an LB film is stacked on the substrate S by repeating this process.
【０００７】バリア３１，３２の移動はトラフ１の長手
方向へ直線的になされるから、有機薄膜はいずれの部分
も均一に圧縮され、また、この移動過程で常時薄膜の表
面圧力が検出されてこれを適正に維持するようにバリヤ
３１，３２の間隔が調整され、有機薄膜の膜構造の乱れ
や破壊の発生が防止される。Since the movement of the barriers 31 and 32 is made linearly in the longitudinal direction of the trough 1, any portion of the organic thin film is uniformly compressed, and the surface pressure of the thin film is constantly detected during the moving process. The distance between the barriers 31 and 32 is adjusted so as to maintain this properly, and the occurrence of disorder and destruction of the film structure of the organic thin film is prevented.
【０００８】また、バリヤ３１，３２が通過する時以外
は各壁１４上に仕切板１５が密着して、吸着溶液が混合
したり、薄膜液槽１１に流入して膜形成を阻害する問題
は生じない。[0008] Also, except when the barriers 31 and 32 pass through, the partition plate 15 adheres to each wall 14, and the adsorbing solution is mixed or flows into the thin film liquid tank 11 to inhibit film formation. Does not occur.
【０００９】バリヤ３１，３２が他の吸着液槽１２を経
て薄膜液槽１１に戻る際には、吸着液槽１２内の液は液
給排手段２１，２２により下相水に交換され、通過時に
再度有機薄膜と反応することは防止される。When the barriers 31 and 32 return to the thin film liquid tank 11 via another adsorbent tank 12, the liquid in the adsorbent tank 12 is exchanged for lower phase water by liquid supply / discharge means 21 and 22, and passes therethrough. Sometimes, it is prevented from reacting with the organic thin film again.
【００１０】[0010]
【実施例】図１において、長方形のトラフ１内は隔壁１
４によって長手方向へ区画されて、ほぼ半分を占める薄
膜液槽１１、二つの吸着液槽１２，１３、およびその間
の緩衝液槽１６となっている。薄膜液槽１１および緩衝
液槽１６には下相水が満たされ、この下相水は例えばｐ
Ｈ７の１ｍＭ ＨＥＰＥＳバッファ水溶液を使用する。
吸着液槽１２，１３には下相水をベースとして吸着材を
溶かした吸着液が満たしてあり、例えばそれぞれ０．５
％グルタルアルデヒド溶液および０．５ｍｇ／ｍｌグル
コースオキシダーゼ溶液とする。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS In FIG.
The thin film liquid tank 11 occupying almost half of the liquid tank 11, the two adsorption liquid tanks 12 and 13, and the buffer liquid tank 16 therebetween are defined by 4 in the longitudinal direction. The thin-film liquid tank 11 and the buffer liquid tank 16 are filled with lower phase water.
An aqueous solution of H7 in 1 mM HEPES buffer is used.
The adsorbent tanks 12 and 13 are filled with an adsorbent in which an adsorbent is dissolved based on lower phase water.
% Glutaraldehyde solution and 0.5 mg / ml glucose oxidase solution.
【００１１】各吸着液槽１２，１３への吸着液の給排は
トラフ１側壁に連結された給排管２１，２２によりなさ
れ、かかる吸排管２１，２２により吸着液が所定水位ま
で供給されるとともに、適宜吸着材を全く含まない下相
水に交換される。上記隔壁１４にはテフロン等の撥水性
材料がコーティングしてあり、各液槽１１〜１３，１６
の液位はほぼ同水準で、隔壁の壁上で表面張力により互
いに分離している（図４参照）。The supply and discharge of the adsorbent to each of the adsorbent tanks 12 and 13 is performed by supply and discharge pipes 21 and 22 connected to the side wall of the trough 1, and the adsorbent is supplied to a predetermined water level by the suction and discharge pipes 21 and 22. At the same time, it is appropriately replaced with lower phase water containing no adsorbent. The partition walls 14 are coated with a water-repellent material such as Teflon.
Are almost the same level and are separated from each other by surface tension on the wall of the partition wall (see FIG. 4).
【００１２】上記各隔壁１４上には仕切板１５が下降し
て密着しており、これはテフロン製で、図２に示す如く
長尺支持板６１の下面に固着されている。支持板６１は
一端がトラフ１側壁に設置したモータ６２の回転軸６３
に固定してあり、モータ６２の回転により上方へ回動し
て（図３）隔壁１４上より離れる。A partition plate 15 descends and adheres to each of the partition walls 14. The partition plate 15 is made of Teflon, and is fixed to the lower surface of a long support plate 61 as shown in FIG. The support plate 61 has a rotating shaft 63 of a motor 62 whose one end is installed on the side wall of the trough 1.
, And is rotated upward by the rotation of the motor 62 (FIG. 3) to be separated from the partition wall 14.
【００１３】薄膜液槽には長尺板材よりなるバリヤ３
１，３２がトラフ長手方向に間隔をおいて設けてあり、
これらバリヤ３１，３２は液面に接した状態でボールね
じとパルスモータよりなるバリヤ駆動機構３３によりそ
れぞれトラフ長手方向へ移動可能である。バリヤには公
知の表面圧センサ４が設けてあって、以下に説明する有
機薄膜の表面圧力を検出する。A barrier 3 made of a long plate material is provided in the thin film liquid tank.
1, 32 are provided at intervals in the trough longitudinal direction,
The barriers 31 and 32 can be moved in the trough longitudinal direction by a barrier drive mechanism 33 including a ball screw and a pulse motor in a state of being in contact with the liquid surface. The barrier is provided with a known surface pressure sensor 4 for detecting the surface pressure of the organic thin film described below.
【００１４】バリヤ３１，３２間に有機薄膜が形成され
るが、これは例えばステアリルアミンを１ｍＭの濃度で
クロロホルム等の溶媒に溶かし、これをマイクロシリン
ダにて下相水上に滴下する。溶媒の蒸発を待ってバリア
３２をバリヤ３１の方向へ移動せしめ、この間の面積
（展開面積）を小さくすると、有機薄膜の表面圧力が上
昇し、所定圧（例えば３０ｍＮ／ｍ）にて分子がその長
手方向に規則正しく並んだ単分子膜が得られる。An organic thin film is formed between the barriers 31 and 32. For example, stearylamine is dissolved at a concentration of 1 mM in a solvent such as chloroform, and the solution is dropped on a lower phase water by a micro cylinder. When the barrier 32 is moved in the direction of the barrier 31 after evaporating the solvent and the area (developed area) therebetween is reduced, the surface pressure of the organic thin film increases, and the molecules are released at a predetermined pressure (for example, 30 mN / m). A monomolecular film regularly arranged in the longitudinal direction is obtained.
【００１５】薄膜液槽１１の上方には架台７上に基板移
動機構５が設けてあり、これはボールネジとパルスモー
タにより上下動せしめられる基板支持体５１の先端に基
板Ｓを保持して、基板Ｓを下方の有機薄膜内に浸漬す
る。基板Ｓが下降する薄膜液槽の底面には基板Ｓとの緩
衝を避けるための凹所１７が形成してある。基板Ｓはガ
ラス、金属板、これらに電極パターンを形成したもの等
である。Above the thin film liquid tank 11, a substrate moving mechanism 5 is provided on a gantry 7. The substrate moving mechanism 5 holds a substrate S at the tip of a substrate support 51 which is vertically moved by a ball screw and a pulse motor. S is immersed in the lower organic thin film. A recess 17 is formed on the bottom surface of the thin film liquid tank where the substrate S descends to avoid buffering with the substrate S. The substrate S is a glass, a metal plate, or the like on which an electrode pattern is formed.
【００１６】有機薄膜がバリヤ３１，３２間に形成され
た状態で両バリヤ３１，３２を吸着液槽１２，１３の方
向へ移動せしめる。この移動の間は、常に有機薄膜の表
面圧を検出してこれが一定範囲内に有るようにバリヤ３
１に対するバリヤ３２の追従速度が制御される。バリヤ
３１，３２の移動速度は例えば１０ｍｍ／ｍｉｎ程度で
あり、移動開始時はバリヤ３１の速度を所定の速度まで
直線的に増加せしめてバリヤ３２の追従を可能としてい
る。With the organic thin film formed between the barriers 31 and 32, the barriers 31 and 32 are moved toward the adsorbent tanks 12 and 13. During this movement, the surface pressure of the organic thin film is always detected and the barrier pressure is set so that it is within a certain range.
The speed at which the barrier 32 follows 1 is controlled. The movement speed of the barriers 31 and 32 is, for example, about 10 mm / min. At the start of movement, the barrier 31 can follow the barrier 32 by linearly increasing the speed of the barrier 31 to a predetermined speed.
【００１７】仕切板１５が上方へ回動せしめられ、有機
薄膜が隔壁１４を越えて各吸着液槽１２，１３に移送さ
れ、吸着液槽１２にて式の化学反応を生じる。有機薄
膜の通過により液が隔壁１４上で連続するため、吸着材
の流出を防止すべくこの反応の間（例えば１時間）上記
仕切板１５は閉じられる。有機薄膜は吸着液槽１３で
式の化学反応を生じ、グルコースオキシダーゼを担持し
た有機薄膜となる。 ＣＨ3 （ＣＨ2 ）17ＮＨ2 ＋ＯＨＣ（ＣＨ2 ）3 ＣＨＯ → ＣＨ3 （ＣＨ2 ）17Ｎ＝ＨＣ（ＣＨ2 ）3 ＣＨＯ ＣＨ3 （ＣＨ2 ）17Ｎ＝ＨＣ（ＣＨ2 ）3 ＣＨＯ＋Ｈ2 Ｎ−ＧＯＤ → ＣＨ3 （ＣＨ2 ）17Ｎ＝ＨＣ（ＣＨ2 ）3 ＣＨ＝Ｎ−ＧＯＤThe partition plate 15 is rotated upward, and the organic thin film is transferred to the respective adsorbent tanks 12 and 13 over the partition walls 14, and a chemical reaction of the formula is generated in the adsorbent tank 12. Since the liquid continues on the partition walls 14 by passing through the organic thin film, the partition plate 15 is closed during this reaction (for example, one hour) to prevent the adsorbent from flowing out. The organic thin film undergoes a chemical reaction of the formula in the adsorbent tank 13 and becomes an organic thin film supporting glucose oxidase. CH 3 (CH 2 ) 17 NH 2 + OHC (CH 2 ) 3 CHO → CH 3 (CH 2 ) 17 N = HC (CH 2 ) 3 CHO CH 3 (CH 2 ) 17 N = HC (CH 2 ) 3 CHO + H 2 N-GOD → CH 3 (CH 2 ) 17 N = HC (CH 2 ) 3 CH = N-GOD
【００１８】反応後の有機薄膜を再び薄膜液槽１１に戻
し移動せしめるに先立って、給排管２１，２２により吸
着液槽１２の吸着液を下相液に入替えておく。これによ
り有機薄膜通過の際に不要な反応を生じることが防止さ
れる。Prior to returning the organic thin film after the reaction to the thin film liquid tank 11 again, the adsorption liquid in the adsorption liquid tank 12 is replaced with the lower phase liquid by the supply / discharge pipes 21 and 22. This prevents an unnecessary reaction from occurring when passing through the organic thin film.
【００１９】薄膜液槽１１に戻した状態で有機薄膜に対
して上方より垂直に基板Ｓを浸漬し引き上げると、基板
Ｓ上にグルコースオキシダーゼを担持したＬＢ膜が形成
され、センサ膜となる。When the substrate S is immersed vertically above the organic thin film in a state of returning to the thin film liquid tank 11, the LB film supporting glucose oxidase is formed on the substrate S, and becomes a sensor film.
【００２０】かかる装置においては、バリヤ３１，３２
が直線的に移動するからバリヤ各部の移動速度が一定に
保たれ、有機薄膜はいずれの部分も均一に圧縮される。
そして移動過程で常時薄膜の表面圧力が検出されてこれ
を適正に維持するようにバリヤ間隔が調整されるから、
有機薄膜の膜構造の乱れや破壊を生じることはない。In such an apparatus, the barriers 31, 32
Moves linearly, so that the moving speed of each part of the barrier is kept constant, and the organic thin film is uniformly compressed in any part.
And during the movement process, the surface pressure of the thin film is always detected and the barrier interval is adjusted so as to maintain this properly,
There is no disturbance or destruction of the film structure of the organic thin film.
【００２１】また、既述の如く、吸着材の流出は仕切板
１５により効果的に防止され、これによっても膜質の低
下が防止される。仕切板１５を設けた効果を図４、図５
で説明すると、液が隔壁１４上で連続した状態で液槽に
銀イオンを添加し、そのままの状態（線ｘ）と仕切板１
５で閉鎖した状態（線ｙ）での液槽への銀イオンの拡散
状態を見ると、仕切板１５により銀イオン濃度は２００
分の１以下に抑えられる。Further, as described above, the outflow of the adsorbent is effectively prevented by the partition plate 15, thereby also preventing the deterioration of the film quality. The effect of providing the partition plate 15 is shown in FIGS.
In the following description, silver ions are added to the liquid tank in a state where the liquid is continuous on the partition wall 14, and the liquid is kept as it is (line x) and the partition plate 1
Looking at the diffusion state of silver ions into the liquid tank in the closed state (line y) at 5, the silver ion concentration was 200 by the partition plate 15.
It can be reduced to less than 1 /.
【００２２】吸着材としては上記実施例以外に種々のも
のを使用することができ、例えば図６に示す如く異なっ
た波長で吸光変化を生じる吸光変化物質ａ´，ｂ´，ｃ
´と吸光変化を生じさせる生体材料（例えば酵素等）
ａ，ｂ，ｃとを有機薄膜Ｆ間に担持せしめたＬＢ膜を形
成すれば、多成分の検知対象を同時に計測することがで
き、例えば従来は二段階の酵素反応で検知していた魚の
鮮度を示すＫ値を瞬時に測定することができる。As the adsorbent, various substances other than the above embodiment can be used. For example, as shown in FIG. 6, light-absorbing substances a ', b', c which cause light-absorbing changes at different wavelengths
'And a biological material that causes a change in absorbance (eg enzymes)
By forming an LB film in which a, b, and c are supported between the organic thin films F, it is possible to simultaneously measure a multi-component detection target. For example, the freshness of fish which has been conventionally detected by a two-stage enzyme reaction Can be measured instantaneously.
【００２３】また、吸着液槽が上記実施例の如く二つの
場合でも、給排管により吸着液を変更すれば３種以上の
吸着材を多層化することも可能である。Further, even when the number of the adsorbent tanks is two as in the above embodiment, three or more kinds of adsorbents can be multilayered by changing the adsorbent by a supply / discharge pipe.
【００２４】[0024]
【発明の効果】以上の如く本発明の製造装置によれば、
センシング用等の吸着材料を介在せしめた良質な超薄膜
を基板上に積層形成することができ、高性能の薄膜セン
サを実現することができる。さらに、種々の膜材、吸着
材を用いることにより、光機能素子（メモリー、光電変
換素子）生体模倣膜を実現することができる。As described above, according to the manufacturing apparatus of the present invention,
A high-quality ultra-thin film having an adsorbent material for sensing or the like interposed therebetween can be laminated on a substrate, and a high-performance thin-film sensor can be realized. Furthermore, by using various film materials and adsorbents, a biomimetic film of an optical functional element (memory, photoelectric conversion element) can be realized.
【図１】製造装置の全体斜視図である。FIG. 1 is an overall perspective view of a manufacturing apparatus.
【図２】製造装置の部分拡大斜視図である。FIG. 2 is a partially enlarged perspective view of the manufacturing apparatus.
【図３】製造装置の部分拡大斜視図である。FIG. 3 is a partially enlarged perspective view of the manufacturing apparatus.
【図４】製造装置の部分断面図である。FIG. 4 is a partial sectional view of the manufacturing apparatus.
【図５】イオン濃度の時間変化を示すグラフである。FIG. 5 is a graph showing a change in ion concentration with time.
【図６】基板上に形成された多層膜の断面図である。FIG. 6 is a sectional view of a multilayer film formed on a substrate.
１ トラフ １１ 薄膜液槽 １２，１３ 吸着液槽 １４ 隔壁 １５ 仕切板 ２１，２２ 給排管（液給排手段） ３１，３２ バリヤ ３３ バリヤ駆動機構（バリヤ駆動手段） ４ 表面圧力センサ（表面圧力検出手段） ５ 基板移動機構（基板移動手段） Ｓ 基板 DESCRIPTION OF SYMBOLS 1 Trough 11 Thin film liquid tank 12,13 Adsorption liquid tank 14 Partition wall 15 Partition plate 21,22 Supply / discharge pipe (liquid supply / discharge means) 31,32 Barrier 33 Barrier drive mechanism (Barrier drive means) 4 Surface pressure sensor (Surface pressure detection Means) 5 Substrate moving mechanism (Substrate moving means) S Substrate
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) B05C 3/02 - 3/109 B05D 1/18,1/20 B01J 19/00 H01L 51/00 C08J 5/18 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 6 , DB name) B05C 3/02-3/109 B05D 1 / 18,1 / 20 B01J 19/00 H01L 51/00 C08J 5 / 18
Claims (1)
材料よりなりトラフ内の液を略同液位でかつ表面張力に
より互いに壁上で分離した状態でトラフ長手方向へ区画
し、下相水を保持する薄膜液槽と液中に吸着材を溶解し
た少なくとも一つの吸着液槽とを形成する隔壁と、該隔
壁上に適宜下降してこれに密着する撥水性材料よりなる
仕切板と、上記吸着液槽の側面に連結されて槽内の液を
適宜下相水又は異種の吸着液に交換給排する液給排手段
と、トラフ長手方向へ間隔をおきトラフを横切って上記
薄膜液槽の液面に接して設けられ、その間の下相水上に
単分子の有機薄膜を形成する一対の長尺バリヤと、これ
らバリヤの一方に設けて有機薄膜の表面圧力を検出する
手段と、表面圧力を適正値に維持して上記バリヤをこれ
らの相対間隔を調整自在にトラフ長手方向へ移動せしめ
て有機薄膜を上記吸着液槽上へ往復移行せしめるバリヤ
駆動手段と、薄膜液槽の上方位置に設けられ基板を垂直
姿勢で保持して薄膜液槽内へ往復浸漬し基板上にラング
ミュア・ブロジェット膜を積層形成する基板移動手段と
を具備するラングミュア・ブロジェット膜の製造装置。1. A trough in which the liquid in the trough is made of a water-repellent material and which is substantially the same liquid level and is separated from each other on a wall by surface tension in a longitudinal direction of the trough. A partition wall that forms a thin film liquid tank that holds water and at least one adsorbent liquid tank in which the adsorbent is dissolved in the liquid, and a partition plate made of a water-repellent material that is appropriately lowered onto the partition wall and closely adhered thereto, A liquid supply / discharge means connected to the side surface of the adsorbent tank and appropriately supplying / discharging the liquid in the tank to lower phase water or a different type of adsorbent liquid; and the thin film liquid tank spaced apart in the trough longitudinal direction and across the trough. A pair of long barriers that are provided in contact with the liquid surface of the organic thin film and form a monomolecular organic thin film on the lower phase water therebetween, a means provided on one of these barriers to detect the surface pressure of the organic thin film, Adjust the relative distance between these barriers while maintaining A barrier driving means for freely moving the trough in the longitudinal direction to reciprocate the organic thin film onto the adsorbing liquid tank, and a reciprocating immersion in the thin film liquid tank provided above the thin film liquid tank while holding the substrate in a vertical posture. A Langmuir-Blodgett film manufacturing apparatus, comprising: a substrate moving means for laminating a Langmuir-Blodgett film on a substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3163518A JP2956282B2 (en) | 1991-06-07 | 1991-06-07 | Langmuir-Blodgett film production equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3163518A JP2956282B2 (en) | 1991-06-07 | 1991-06-07 | Langmuir-Blodgett film production equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04363165A JPH04363165A (en) | 1992-12-16 |
| JP2956282B2 true JP2956282B2 (en) | 1999-10-04 |
Family
ID=15775394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3163518A Expired - Lifetime JP2956282B2 (en) | 1991-06-07 | 1991-06-07 | Langmuir-Blodgett film production equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2956282B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ES2407582B1 (en) * | 2011-07-19 | 2014-09-17 | Universidad De Salamanca | DEVICE AND PROCEDURE FOR EFFECTING A LANGMUIR-BLODGETT COATING IN A TEXTILE MATERIAL |
-
1991
- 1991-06-07 JP JP3163518A patent/JP2956282B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04363165A (en) | 1992-12-16 |
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