JP2948353B2 - Glass plate surface defect inspection method and inspection device - Google Patents
Glass plate surface defect inspection method and inspection deviceInfo
- Publication number
- JP2948353B2 JP2948353B2 JP11530391A JP11530391A JP2948353B2 JP 2948353 B2 JP2948353 B2 JP 2948353B2 JP 11530391 A JP11530391 A JP 11530391A JP 11530391 A JP11530391 A JP 11530391A JP 2948353 B2 JP2948353 B2 JP 2948353B2
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- JP
- Japan
- Prior art keywords
- glass plate
- light
- defect
- supported
- defects
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Description
【０００１】[0001]
【産業上の利用分野】この発明は、ガラス板の表面欠陥
検査方法と、その装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for inspecting a surface defect of a glass sheet.
【０００２】[0002]
【従来の技術】半導体技術の進展により、例えば液晶板
においては、その表面にトランジスタなどの微小な半導
体素子を形成したカラー液晶パネルが開発されている。
カラー液晶パネルの素材には平滑なガラス板が用いら
れ、その表面を種々に加工して製作される。ガラス板に
欠陥あると製品の品質がもとより低下するが、液晶パネ
ルにおいては形成された半導体素子の複数個が互いに接
続され、もし１個の素子が故障すると、接続された全部
が同時に故障するという特徴ないしは欠点があり、加工
前の平滑な表面に対して欠陥検査が行われている。なお
液晶パネル用のガラス板には角型のものが使用され、そ
のサイズは大型のカラー用の場合は、例えば４００ｍｍ
×５００ｍｍに達する。2. Description of the Related Art With the advance of semiconductor technology, for example, in the case of a liquid crystal plate, a color liquid crystal panel in which minute semiconductor elements such as transistors are formed on the surface has been developed.
A smooth glass plate is used as a material of the color liquid crystal panel, and the surface thereof is variously processed to manufacture. If the glass plate is defective, the quality of the product will deteriorate, but in a liquid crystal panel, a plurality of formed semiconductor elements are connected to each other, and if one element fails, all connected elements fail simultaneously. Defect inspection is performed on a smooth surface before processing, which has features or defects. Note that a rectangular glass plate is used for a liquid crystal panel, and the size thereof is, for example, 400 mm for a large color.
X 500 mm.
【０００３】[0003]
【発明が解決しようとする課題】図４は液晶パネル用の
角型ガラス板に対する従来の欠陥検査方法を示す。被検
査のガラス板１を両手で支持し、その表面側または裏面
側に白色光源を置いて照射し、反対側で目視観察する。
表面または裏面に欠陥があると照射光が散乱するので欠
陥が検出される。しかし、このような検査方法は非能率
であるばかりでなく、折角の散乱光は照射光に妨害され
てＳ／Ｎが悪く、微小な欠陥を検出することが困難であ
る。これに対して、この発明の発明者により簡単な実験
が行われた。図５は実験方法を示すもので、ガラス板１
の側面に対して白色光Ｌを照射すると表面欠陥ｐが散乱
光Ｒを散乱し、表面側または裏面側で肉眼３により観察
できることが判明した。またこの方法は、従来の表面に
対して投射する方法のように、表面反射による受光器の
Ｓ／Ｎの低下の恐れがない点が有利と考えられる。この
発明は、上記の実験結果に基づいてなされたもので、ガ
ラス板の微小な欠陥を検査する方法と、その装置を提供
することを目的とするものである。FIG. 4 shows a conventional defect inspection method for a square glass plate for a liquid crystal panel. The glass plate 1 to be inspected is supported by both hands, and a white light source is placed on the front side or the back side to irradiate the glass plate 1 and visually observed on the opposite side.
If there is a defect on the front surface or the back surface, the irradiation light is scattered, so that the defect is detected. However, such an inspection method is not only inefficient, but also the scattered light at an angle is disturbed by the irradiation light, so that the S / N is poor, and it is difficult to detect a minute defect. In contrast, a simple experiment was performed by the inventor of the present invention. FIG. 5 shows an experimental method.
When the white light L is applied to the side surface, the surface defect p scatters the scattered light R, and can be observed by the naked eye 3 on the front side or the back side. Also, this method is considered to be advantageous in that there is no possibility that the S / N of the light receiver is reduced due to surface reflection unlike the method of projecting light onto a conventional surface. The present invention has been made based on the above experimental results, and has as its object to provide a method for inspecting a small defect in a glass plate and an apparatus therefor.
【０００４】[0004]
【課題を解決するための手段】この発明は表面が平滑な
ガラス板の表面欠陥検査方法とその装置である。検査方
法は、被検査のガラス板を支持台に支持し、その直交す
る２方向の側面に対して適当な角度でガラス板に沿った
線状の白色光束を投射して内面により全反射させる。こ
の全反射光は表面に存在する欠陥により散乱し、その散
乱光を表面側または裏面側で受光器により受光して欠陥
を検出し、遮蔽板を設けて側面の反射光による受光器へ
の妨害を排除するものである。検査装置は、表面が平滑
な被検査のガラス板を支持台に支持し、ガラス板の直交
する２方向の側面に対してガラス板内面で全反射をする
適当な角度の白色光束を投射する２個の線状の光源と、
白色光束の投射によって発生する表面に存在する欠陥に
よる全反射光の散乱光を、表面側または裏面側で受光し
て欠陥を検出する受光器と、および側面の反射光による
受光器への妨害を排除する遮蔽板とにより構成される。
さらに、この検査装置の発明として、フレームに支持さ
れた被検査の角型ガラス板についてのものがある。これ
は、フレームに支持された被検査の角型ガラス板に対し
て、その直交する２辺の側面に対して２個の線光源より
適当な角度の白色光束が投射され、内部に全反射光が生
ずる。全反射光による表面欠陥の散乱光が受像カメラに
より受像されて欠陥が検出される。この場合、２個の線
光源の投射光は直交するので、欠陥の形状により散乱光
に指向性があっても、いずれかの投射光により欠陥が良
好に検出される。また、側面の反射光が受像カメラの受
像を妨害するので、これを遮蔽板により遮断して排除す
る。大型のガラス板の場合は、その表面を複数の領域に
区分し、ガラス板の上方にＸＹ移動機構を設け、これに
受像カメラを取り付けてＸまたはＹ方向に移動し、区分
された領域を順次に検査する。SUMMARY OF THE INVENTION The present invention is a method and an apparatus for inspecting a surface defect of a glass plate having a smooth surface. Inspection method is to support the support base of the glass plate to be inspected, to the orthogonal
Along the glass plate at an appropriate angle to the two sides
A linear white light beam is projected and totally reflected by the inner surface. The totally reflected light is scattered by defects on the surface, to detect a defect by receiving the light receiver of the scattered light on the surface side or the back side, to the photodetector by the reflected light of the side provided with shielding plates
It is to eliminate the interference . The inspection device has a smooth surface
The glass plate to be inspected is supported on a support base,
Total reflection on the inner surface of the glass plate against the two sides
Two linear light sources projecting a white light beam at an appropriate angle;
Defects on the surface caused by the projection of white light flux
Scattered light reflected by the
With a detector to detect defects
And a shielding plate for eliminating interference with the light receiver .
Furthermore, as an invention of this inspection apparatus, the inspection apparatus is supported by a frame.
There is one for a square glass plate to be inspected. this
A white light flux of an appropriate angle is projected from two linear light sources onto two orthogonal side surfaces of a rectangular glass plate to be inspected supported by a frame, and internally reflected light is totally reflected. Occurs. The scattered light of the surface defect due to the total reflection light is received by the image receiving camera, and the defect is detected. In this case, since the projection lights of the two line light sources are orthogonal to each other, even if the scattered light has directivity due to the shape of the defect, the defect is favorably detected by any of the projection lights. Further, since the reflected light on the side surface interferes with the image reception of the image receiving camera, the light is cut off by a shielding plate and eliminated. In the case of a large glass plate, the surface is divided into a plurality of regions, an XY moving mechanism is provided above the glass plate, an image receiving camera is attached to this, and the device is moved in the X or Y direction, and the divided regions are sequentially arranged. To inspect.
【０００５】[0005]
【作用】前記の構成を持つこの発明のガラス板の表面欠
陥検査方法および検査装置にあっては、被検査のガラス
板の直交する２方向の側面に対して投射された適当な角
度の白色光束は、内面の全面で全反射する。この全反射
光は表面欠陥により散乱し、その散乱光は表面側または
裏面側に射出されるので、これを受光器の受光に対する
妨害を排除する遮蔽板を設けて受光器により受光して欠
陥を検出する。この場合、全反射光は内部に留まって外
側には射出されないので、従来の表面に投射する方式は
表面反射光によりＳ／Ｎ比が低下するものに比べて有利
で、その分検出性能が良好である。フレームに支持され
た被検査の角型ガラス板について発明の作用について説
明すると、フレームに支持された被検査の角型ガラス板
に対して、その直交する２辺の側面に対して２個の線光
源より適当な角度の白色光束が投射され、内部に全反射
光が生ずる。全反射光による表面欠陥の散乱光が受像カ
メラにより受像されて欠陥が検出される。この場合、２
個の線光源の投射光は直交するので、欠陥の形状により
散乱光に指向性があっても、いずれかの投射光により欠
陥が良好に検出される。また、側面の反射光が受像カメ
ラの受像を妨害するので、これを遮蔽板により遮断して
排除する。大型のガラス板の場合は、受像カメラのＸま
たはＹ方向の移動により、複数に区分されたガラス板の
各領域が順次に検査され、受像カメラの視野に比較して
大きいサイズのガラス板でも欠陥が良好な感度で検出さ
れる。 The glass plate of the present invention having the above-mentioned structure has surface defects.
In the defect inspection method and the inspection apparatus, a white light beam having an appropriate angle projected on two orthogonal side surfaces of the glass plate to be inspected is totally reflected on the entire inner surface. This totally reflected light is scattered by a surface defect, and the scattered light is emitted to the front side or the back side .
It provided shielding plates to eliminate interference to detect defects and received by light receiver. In this case, the total reflection light is not emitted to the outside remains in the interior, a method of projecting to a conventional surface advantageous over those S / N ratio is lowered by the surface reflection light, that amount detection performance good It is. Supported by the frame
Of the invention on the square glass plate to be inspected
Specifically, a white luminous flux of an appropriate angle is projected from two line light sources onto two orthogonal side surfaces of a rectangular glass plate to be inspected supported by a frame, and total internal reflection light is generated therein. Occurs. The scattered light of the surface defect due to the total reflection light is received by the image receiving camera, and the defect is detected. In this case, 2
Since the projection lights of the line light sources are orthogonal to each other, even if the scattered light has directivity depending on the shape of the defect, the defect can be detected favorably by any of the projection lights. Further, since the reflected light on the side surface interferes with the image reception of the image receiving camera, the light is cut off by a shielding plate and eliminated. In the case of a large glass plate, each region of the glass plate divided into a plurality of sections is sequentially inspected by moving the image receiving camera in the X or Y direction, and even if the glass plate has a size larger than the field of view of the image receiving camera, it is defective. Are detected with good sensitivity.
【０００６】[0006]
【実施例】図１によりこの発明による表面欠陥検査方法
の実施例を説明する。まず、その原理を述べると、(a)
はガラス板１の側面に投射した白色の投射光Ｌの、ガラ
ス板内部における屈折状態を示す。内面に対する入射角
θ′が臨界角を越える光線は全反射して前方に進み、反
対側の側面に達する。投射光を角度θの範囲の光束とす
れば、内面は全面が全反射光により照射される。いま、
表面に傷(イ) があると、これにより全反射光が散乱し、
散乱光Ｒの一部は表面を透過して上方に進む。表面に凹
凸(ロ) があるときも同様である。ただし、前記の実験に
よると、表面に付着した異物(ハ) は散乱光を散乱しない
ことが判明した。この理由は、異物(ハ) は表面上にある
ために全反射光が照射されないからと考えられる。以上
の表面側に対して、裏面側も同様で傷や凹凸により散乱
光が散乱されるが、この場合はガラス板の内部における
損失などにより表面側の射出量は小さい。ここで付言す
ると、従来のガラス板などの表面欠陥検査では、表面に
対してレーザビームを投射し、欠陥による散乱光を受光
する方式が専ら行われているが、このような方式は投射
光が表面で反射してノイズとなり、受光のＳ／Ｎが低下
する難点がある。これに対してこの発明のように側面よ
り内部に投射する方式では表面反射がないので、これに
よるＳ／Ｎの低下が生ぜず、この点が原理的に有利であ
る。以上においては、投射光は白色光が最適であり、裏
面側の空間は適当な方法により無反射状態とすることが
必要である。また図１(b) に示すように、投射光Ｌが側
面のエッジにより反射され、その反射光Ｌe が上方に向
って受光器のＳ／Ｎが低下するので、これを遮断するこ
とが必要である。次に、大型液晶パネルの場合は、これ
を４辺により支持するときはある程度の湾曲が避けられ
ない。図１(c) は湾曲したガラス板１を示し、この場合
も前記と同様に全反射光が内面の全面を照射する。従っ
て、ある程度湾曲しても欠陥検査には差し支えない。以
上により、ガラス板１を適当な支持台により支持して側
面に適当な角度の白色光束を投射し、表面側または裏面
側で散乱光を受光器に受光して表面欠陥が良好に検出さ
れる。FIG. 1 shows an embodiment of a surface defect inspection method according to the present invention. First, the principle is described as (a)
Indicates the state of refraction of the white projection light L projected on the side surface of the glass plate 1 inside the glass plate. Light rays whose incident angle θ ′ with respect to the inner surface exceeds the critical angle are totally reflected and travel forward, and reach the opposite side surface. If the projection light is a light flux in the range of the angle θ, the entire inner surface is irradiated with the totally reflected light. Now
If there is a scratch (a) on the surface, this will scatter the total reflection light,
Part of the scattered light R passes through the surface and travels upward. The same applies when the surface has irregularities (b). However, according to the above experiment, it was found that the foreign matter (c) attached to the surface did not scatter scattered light. This is probably because the foreign matter (c) is not irradiated with the total reflection light because it is on the surface. Scattered light is similarly scattered due to scratches and irregularities on the back side with respect to the above-mentioned front side, but in this case, the amount of emission on the front side is small due to loss inside the glass plate. It should be added here that in the conventional surface defect inspection of a glass plate or the like, a method of projecting a laser beam onto the surface and receiving light scattered by the defect is mainly performed. There is a problem that the light is reflected by the surface to become noise and the S / N of the received light is reduced. On the other hand, in the method of projecting from the side to the inside as in the present invention, since there is no surface reflection, there is no reduction in S / N, which is advantageous in principle. In the above description, white light is optimal for the projection light, and the space on the back side needs to be made non-reflective by an appropriate method. Further, as shown in FIG. 1 (b), the projection light L is reflected by the edge of the side surface, because the reflected light L e is the light receiver of the S / N is reduced upward, necessary to block this It is. Next, in the case of a large-sized liquid crystal panel, when it is supported by four sides, a certain degree of curvature cannot be avoided. FIG. 1 (c) shows a curved glass plate 1, in which the total reflection light irradiates the entire inner surface in the same manner as described above. Therefore, even if it bends to some extent, it does not interfere with defect inspection. By the above, the glass plate 1 is supported by a suitable support base projecting a white light beam appropriate angle to the side surface, the surface defects by receiving scattered light to the light receiving unit at the surface side or back side is satisfactorily detected You.
【０００７】図２はこの発明による表面欠陥検査装置の
一実施例を示し、(a) は平面図、(b) は垂直断面図であ
る。(a),(b) においてベース盤４に固定具41によりフレ
ーム５を固定する。フレームに被検査のガラス板１の４
辺を支持し、ガラス板の直交２辺の側面に対して白色光
源61,62 を配設する。ガラス板の上方の適当な位置に受
像カメラ８を設け、これに投射光の側面による反射光が
入らないように遮蔽板71〜74を設けて構成される。なお
この場合、受像カメラによらず、散乱光Ｒを肉眼により
観察して欠陥を検出することもある程度可能であるが、
検出感度は小さい。FIGS. 2A and 2B show an embodiment of a surface defect inspection apparatus according to the present invention, wherein FIG. 2A is a plan view and FIG. 2B is a vertical sectional view. 4A and 4B, the frame 5 is fixed to the base board 4 by the fixing tool 41. 4 of the glass plate 1 to be inspected on the frame
The sides are supported, and white light sources 61 and 62 are disposed on the sides of two orthogonal sides of the glass plate. An image receiving camera 8 is provided at an appropriate position above the glass plate, and shielding plates 71 to 74 are provided so that light reflected by the side surface of the projection light does not enter the camera. In this case, the defect can be detected to some extent by observing the scattered light R with the naked eye, regardless of the image receiving camera.
The detection sensitivity is small.
【０００８】図３は他の実施例で大型ガラス板の場合を
示し、(a) は垂直断面図、(b) はガラス板１の平面図で
ある。(a) においては図２(b) の構成に対して、ガラス
板１の上方にＸＹ移動機構９を設け、これに受像カメラ
８を取り付ける。ガラス板の表面を(b) のように、複数
の領域11〜nmのマトリックスに区分し、ＸＹ移動機構に
より受像カメラをＸまたはＹ方向に移動して各領域を順
次に検査する。前記したように液晶パネルには大きいサ
イズのものがあり、また受像カメラの視野を広くとると
感度と分解能が低下するので、視野には限度があり、こ
の区分方法によりサイズの大きいガラス板でも欠陥が良
好な感度で検出される。FIGS. 3A and 3B show another embodiment in which a large glass plate is used. FIG. 3A is a vertical sectional view, and FIG. 3B is a plan view of the glass plate 1. In FIG. 2A, an XY moving mechanism 9 is provided above the glass plate 1 with respect to the configuration shown in FIG. As shown in (b), the surface of the glass plate is divided into a matrix of a plurality of regions 11 to nm, and the image receiving camera is moved in the X or Y direction by the XY moving mechanism to sequentially inspect each region. As described above, there are liquid crystal panels of large size, and if the field of view of the receiving camera is widened, the sensitivity and resolution are reduced, so the field of view is limited. Are detected with good sensitivity.
【０００９】[0009]
【発明の効果】以上の説明のとおり、この発明による表
面欠陥検査方法および検査装置にあっては、表面が平滑
なガラス板を対象とし、その直交する２方向の側面に投
射された白色光束が内面により全反射し、全反射光が欠
陥により散乱して表面側に射出されることを実験により
確認し、これに基づいてなされたもので、受光器の受光
に対する妨害を排除する遮蔽板を設けて散乱光を受光器
により受光することにより、従来の方式のように表面反
射によるＳ／Ｎ比が低下することなく、表面欠陥が良好
に検出される。次に検査装置のうち角型ガラス板を対象
とするものにあっては、上記の検査装置をさらに具体化
したもので、２個の光源より直交した投射光を投射する
ことにより、形状による散乱光の指向性に拘らず欠陥が
良好に検出され、また、側面の反射光が受像カメラの受
像を妨害しないように遮蔽板が考慮されている。さら
に、大型のガラス板に対してはガラス板を複数に区分
し、各領域を順次に受像カメラにより受像して表面欠陥
を検出し、受像カメラの視野に比較して大きいサイズの
ガラス板でも欠陥が良好な感度で検出できるように配慮
されており、カラー液晶パネルなどの素材の、表面が平
滑なガラス板の表面欠陥検査に寄与するところには大き
いものがある。As described above, in the surface defect inspection method and inspection apparatus according to the present invention, a white light beam projected on a side surface of a glass plate having a smooth surface and projected in two directions orthogonal to each other is used. totally reflected by the inner surface, experimentally confirmed that the total reflection light is emitted on the front side and scattered by defects, which has been made based on this, light of the light receiver
By receiving the light receiver scattered light provided with a shielding plate to eliminate interference with, without S / N ratio is lowered due to surface reflection as in the conventional method, the surface defects are detected well. Is then regard to those intended for the angular type glass plate of the test apparatus, which was further embodying the above inspection device, by projecting the projection light orthogonal than two light sources, the scattering due to the shape Defects are detected satisfactorily regardless of the directivity of light, and a shielding plate is taken into consideration so that the reflected light on the side surface does not disturb the image reception of the image receiving camera. Furthermore, for a large glass plate, the glass plate is divided into a plurality of parts, each area is sequentially received by an image receiving camera to detect surface defects, and even a glass plate having a size larger than the field of view of the image receiving camera detects defects. Is considered so that it can be detected with good sensitivity, and there is a large part of a material such as a color liquid crystal panel which contributes to a surface defect inspection of a glass plate having a smooth surface.
【図１】 この発明によるガラス板の表面欠陥検査方法
の実施例における検査原理の説明図で、(a) はガラス板
の側面に対する白色光束Ｌの内面による全反射を示し、
(b) は側面のエッジによる反射光Ｌe を示し、(c) は湾
曲したガラス板を示す。FIG. 1 is an explanatory view of an inspection principle in an embodiment of a method for inspecting a surface defect of a glass plate according to the present invention, wherein (a) shows total internal reflection of a white light beam L on a side surface of the glass plate;
(b) shows the reflected light L e by side edges, (c) shows a glass sheet curved.
【図２】 この発明によるガラス板の表面欠陥検査装置
の一実施例を示し、(a) は平面図、(b) は垂直断面図で
ある。FIGS. 2A and 2B show an embodiment of a glass plate surface defect inspection apparatus according to the present invention, wherein FIG. 2A is a plan view and FIG.
【図３】 この発明の他の実施例を示し、(a) は垂直断
面図、(b)はガラス板の領域区分の説明図である。3A and 3B show another embodiment of the present invention, in which FIG. 3A is a vertical sectional view, and FIG. 3B is an explanatory view of a region division of a glass plate.
【図４】 液晶パネル用の角型ガラス板に対する従来の
欠陥検査方法を示す説明図である。FIG. 4 is an explanatory view showing a conventional defect inspection method for a square glass plate for a liquid crystal panel.
【図５】 図４のものに対する実験方法を示す説明図で
ある。FIG. 5 is an explanatory diagram showing an experimental method for the one shown in FIG.
１…ガラス板、11〜nm…ガラス板の区分領域、 ２…光源、 ３…肉眼、 ４…ベース盤、41…固定具、 ５…フレーム、 61,62 …線光源、 71〜74…遮蔽板、 ８…受像カメラ、 ９…ＸＹ移動機構。 DESCRIPTION OF SYMBOLS 1 ... Glass plate, 11-nm ... Sectional area of a glass plate, 2 ... Light source, 3 ... The naked eye, 4 ... Base board, 41 ... Fixture, 5 ... Frame, 61,62 ... Line light source, 71-74 ... Shielding plate 8, an image receiving camera, 9 ... an XY moving mechanism.
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.6，ＤＢ名) G01N 21/00 - 21/01 G01N 21/17 - 21/61 G01M 11/00 - 11/04 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int. Cl. 6 , DB name) G01N 21/00-21/01 G01N 21/17-21/61 G01M 11/00-11/04
Claims (4)
に支持し、該ガラス板の直交する２方向の側面に対し
て、適当な角度で前記ガラス板に沿った線状の白色光束
を投射して内面により全反射させ、前記表面に存在する
欠陥による該全反射光の散乱光を、前記表面側または裏
面側で受光器により受光して該欠陥を検出し、遮蔽板を
設けて前記側面の反射光による前記受光器への妨害を排
除することを特徴とする、ガラス板の表面欠陥検査方
法。1. A glass plate to be inspected having a smooth surface is supported on a support table, and a linear white light beam is formed along the glass plate at an appropriate angle with respect to two orthogonal side surfaces of the glass plate. is totally reflected by the inner surface by projecting the scattered light of the total reflection light by defects present in the surface, and received by the light receiver detects the defects in the surface side or the back side, the shielding plate
To prevent interference of the reflected light from the side surface to the light receiver.
A method for inspecting a surface defect of a glass sheet, wherein the method comprises:
に支持し、該ガラス板の直交する２方向の側面に対して
ガラス板内面で全反射をする適当な角度の白色光束を投
射する２個の線状の光源と、前記白色光束の投射によっ
て発生する前記表面に存在する欠陥による該全反射光の
散乱光を、前記表面側または裏面側で受光して該欠陥を
検出する受光器と、前記側面の反射光による前記受光器
への妨害を排除する遮蔽板とを備えることを特徴とす
る、ガラス板の表面欠陥検査方法。2. A glass plate to be inspected having a smooth surface is supported on a support table, and the side surface of the glass plate in two directions orthogonal to each other is supported .
A white light beam with an appropriate angle for total internal reflection on the inner surface of the glass plate
Two linear light sources that emit light and the projection of the white light flux.
A photodetector for detecting the defect Te scattered light total reflection light by defects present in the surface to be generated, and receiving light at the front surface side or the back side, the photodetector by the reflected light of the side
And a shielding plate for eliminating interference with the glass plate.
査の角型ガラス板の４辺を支持するフレームと、該フレ
ームに支持された該角型ガラス板の直交する２辺の側面
に対して適当な角度の白色光束を投射する２個の線状の
光源と、該角型ガラス板の内面による全反射光の欠陥に
よる散乱光を受像する受像カメラ、および前記側面の反
射光による該受像に対する妨害を排除する遮蔽板とより
なることを特徴とする、ガラス板の表面欠陥検査装置。 3. A test which is fixed to a base board and has a smooth surface.
A frame supporting four sides of the rectangular glass plate to be inspected;
Side faces of two orthogonal sides of the rectangular glass plate supported by the arm
Two linear projections that project a white light beam at an appropriate angle
Defects in total reflected light due to the light source and the inner surface of the square glass plate
Receiving camera for receiving the scattered light by the
A shield plate that eliminates interference with the image due to radiation
A surface defect inspection apparatus for a glass sheet, characterized in that:
に区分し、前記角型ガラス板の上方にＸＹ移動機構を設
け、該ＸＹ移動機構に前記受像カメラを取り付けてＸま
たはＹ方向に移動し、該区分された領域を順次に検査す
る、請求項３記載のガラス板の表面欠陥検査装置。 4. The method according to claim 1 , wherein the surface of the large-sized glass plate is formed in a plurality of areas.
And an XY moving mechanism above the rectangular glass plate.
Then, attach the image receiving camera to the XY moving mechanism,
Or in the Y direction, and sequentially inspects the divided areas.
The glass sheet surface defect inspection apparatus according to claim 3.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11530391A JP2948353B2 (en) | 1991-04-19 | 1991-04-19 | Glass plate surface defect inspection method and inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11530391A JP2948353B2 (en) | 1991-04-19 | 1991-04-19 | Glass plate surface defect inspection method and inspection device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04320951A JPH04320951A (en) | 1992-11-11 |
| JP2948353B2 true JP2948353B2 (en) | 1999-09-13 |
Family
ID=14659294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11530391A Expired - Lifetime JP2948353B2 (en) | 1991-04-19 | 1991-04-19 | Glass plate surface defect inspection method and inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2948353B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5790247A (en) * | 1995-10-06 | 1998-08-04 | Photon Dynamics, Inc. | Technique for determining defect positions in three dimensions in a transparent structure |
| CN107831172A (en) * | 2017-08-02 | 2018-03-23 | 深圳市迪姆自动化有限公司 | Full-automatic glass surface blemish detection machine |
| CN113075166A (en) * | 2019-12-18 | 2021-07-06 | 河南豫科光学科技股份有限公司 | Frosted glass multi-position reflected light testing device |
-
1991
- 1991-04-19 JP JP11530391A patent/JP2948353B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04320951A (en) | 1992-11-11 |
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