JP2938277B2 - Inflow valve control device - Google Patents
Inflow valve control deviceInfo
- Publication number
- JP2938277B2 JP2938277B2 JP19196792A JP19196792A JP2938277B2 JP 2938277 B2 JP2938277 B2 JP 2938277B2 JP 19196792 A JP19196792 A JP 19196792A JP 19196792 A JP19196792 A JP 19196792A JP 2938277 B2 JP2938277 B2 JP 2938277B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- inflow
- valve control
- pressure
- valves
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Feedback Control In General (AREA)
- Flow Control (AREA)
- Control Of Fluid Pressure (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は複数の弁を用いて高圧の
流体流出部から低圧の流体流入部へ流入する流体の流量
を制御する流入弁制御装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inflow valve control device for controlling the flow rate of fluid flowing from a high pressure fluid outflow to a low pressure fluid inflow using a plurality of valves.
【０００２】[0002]
【従来の技術】例えば、上水道プラントにおいては、図
５に示すように、水は標高の高い位置に設けられたダム
等の貯水池１から流入管２を介して配水場３の配水池４
に導かれる。貯水池１の標高［水頭Ｈ1 （ｍ）］は配水
池４の標高［水頭Ｈ0 （ｍ）］より高いので、貯水池１
と配水池４との間には標高差に対応する水圧ΔＨ（＝Ｈ
1 −Ｈ0 ）が発生する。2. Description of the Related Art In a water supply plant, for example, as shown in FIG. 5, water is supplied from a reservoir 1 such as a dam provided at a high altitude to a reservoir 4 of a distribution plant 3 through an inflow pipe 2.
It is led to. The elevation [water head H1 (m)] of the reservoir 1 is higher than the elevation [water head H0 (m)] of the reservoir 4, so that the reservoir 1
Between the reservoir and the reservoir 4 is a water pressure ΔH (= H
1 -H0) occurs.
【０００３】貯水池１から配水池４への単位時間当りの
流入量Ｑは配水池４から各需要家へ配水する流出量によ
って定まる。したがって、この流入量Ｑを制御するため
に流入管２に弁が配設されている。そして、前記標高差
が大きい場合は前記水圧ΔＨも大きく、１台の弁でその
水圧を減圧しきれない場合は、２台の弁５，６を流入管
２に直列介挿して、段階的に減圧を行い、目標流量Ｑｒ
を得るようにしている。配水場３（配水池４）への流入
量Ｑは流量計７で計測され、配水場３（弁５）への流入
圧力Ｐ0 は水圧計８で検出され、弁６の両端圧力差（Ｐ
1 −Ｐ2 ）は別の水圧計９で検出される。The amount of inflow Q per unit time from the reservoir 1 to the reservoir 4 is determined by the amount of outflow distributed from the reservoir 4 to each customer. Therefore, a valve is provided in the inflow pipe 2 to control the inflow amount Q. When the elevation difference is large, the hydraulic pressure ΔH is also large, and when the hydraulic pressure cannot be reduced by one valve, two valves 5 and 6 are inserted in series in the inflow pipe 2 and are stepped. Reduce the pressure and set the target flow rate
I'm trying to get The inflow amount Q into the water distribution station 3 (reservoir 4) is measured by the flow meter 7, the inflow pressure P0 into the water distribution station 3 (valve 5) is detected by the water pressure gauge 8, and the pressure difference (P
1 -P2) is detected by another water pressure gauge 9.
【０００４】管理者は、これらの各圧力Ｐ0 ，（Ｐ1 −
Ｐ2 ）を監視しながら各弁５，６の各開度を調整して流
入量Ｑを目標流量Ｑｒに合わせる。すなわち、流入量Ｑ
を小さくする場合には、各弁５，６の開度を小さくし
て、各弁５，６における減圧比を大きくする。逆に、流
入量Ｑを大きくする場合には、各弁５，６の開度を大き
くくして、各弁５，６における減圧比を小さくする。[0004] The administrator determines each of these pressures P0, (P1-
While monitoring P2), each opening of each of the valves 5 and 6 is adjusted to adjust the inflow amount Q to the target flow amount Qr. That is, the inflow amount Q
Is reduced, the opening degree of each of the valves 5 and 6 is reduced, and the pressure reduction ratio of each of the valves 5 and 6 is increased. Conversely, when increasing the inflow amount Q, the opening degree of each of the valves 5 and 6 is increased, and the pressure reduction ratio of each of the valves 5 and 6 is reduced.
【０００５】しかし、一方の弁５（６）を全開して、他
方の弁６（５）のみで減圧しようとすると、上述したよ
うに、１台の弁５（６）でもって、全部の水圧ΔＨを減
圧できないので、減圧を受持つ弁６（５）が受ける圧力
は、該当弁６（５）で減圧可能な減圧量を越え、結果と
して弁６（５）が破損する懸念がある。However, if one valve 5 (6) is fully opened and the pressure is to be reduced only by the other valve 6 (5), as described above, the entire hydraulic pressure is controlled by one valve 5 (6). Since ΔH cannot be reduced, the pressure received by the valve 6 (5) responsible for reducing the pressure exceeds the amount of reduced pressure that can be reduced by the valve 6 (5), and as a result, the valve 6 (5) may be damaged.
【０００６】このような操作者の操作誤りによる事故を
未然に防止するために、図６に示すような、流入量Ｑを
目標流量Ｑｒに自動的に制御する流入弁制御装置１０が
提唱されている。[0006] In order to prevent such an accident due to an erroneous operation of the operator, an inflow valve control device 10 for automatically controlling the inflow amount Q to a target flow rate Qr as shown in FIG. 6 has been proposed. I have.
【０００７】各弁５，６にはそれぞれ専用の弁制御部１
１，１２が設けられている。各弁制御部１１，１２内に
はＰＩ制御演算部１１ａ，１２ａと各弁５，６を駆動す
る駆動制御部１１ｂ，１２ｂが組込まれている。Each of the valves 5 and 6 has a dedicated valve control unit 1
1 and 12 are provided. The valve control units 11 and 12 incorporate PI control calculation units 11a and 12a and drive control units 11b and 12b for driving the valves 5 and 6, respectively.
【０００８】そして、上流側の弁制御部１１は、水圧計
１３で検出された弁５の下流側の水圧Ｐ1 が目標流量Ｑ
ｒに対応して設定された目標水圧Ｐｒになるように、弁
５の開度Ｕ1 をＰＩ制御演算部１１ａによって自動制御
する。なお、弁５の開度−抵抗特性における非直線性を
補正するために、検出された弁５の開度Ｕ1 をＰＩ制御
演算部１１ａへ帰還させることによって、弁５の開度制
御精度を向上させている。The valve control section 11 on the upstream side determines that the water pressure P 1 on the downstream side of the valve 5 detected by the water pressure gauge 13 is equal to the target flow rate Q
The opening degree U1 of the valve 5 is automatically controlled by the PI control calculation unit 11a so that the target water pressure Pr set in accordance with the value r is obtained. In addition, in order to correct the non-linearity in the opening-resistance characteristic of the valve 5, the detected opening U1 of the valve 5 is fed back to the PI control calculation unit 11a, thereby improving the accuracy of the opening control of the valve 5. Let me.
【０００９】この場合、ＰＩ制御演算部１１ａが、水圧
Ｐ1 を読取って、所定のＰＩ制御演算を実行して、駆動
制御部１１ｂに操作量ΔＵ1 を出力して、実際に弁５の
流路が開閉駆動するまでの一連の動作を行う周期を制御
周期と言う。この制御周期内に弁５における流路を開閉
する機械的要素が含まれるので、流入管２の径が大きい
場合、前記制御周期は１０秒〜１００秒程度となる。In this case, the PI control calculation unit 11a reads the hydraulic pressure P1, executes a predetermined PI control calculation, and outputs an operation amount ΔU1 to the drive control unit 11b, so that the flow path of the valve 5 is actually A cycle in which a series of operations until opening / closing drive is performed is called a control cycle. Since a mechanical element for opening and closing the flow path in the valve 5 is included in the control cycle, when the diameter of the inflow pipe 2 is large, the control cycle is about 10 seconds to 100 seconds.
【００１０】また、下流側の弁制御部１２は、流量計１
４で検出された弁６の下流側の流量、すなわち配水池４
の流入量Ｑが目標流量Ｑｒになるように、弁６の開度Ｕ
2 をＰＩ制御演算部１２ａによって自動制御する。この
ように構成された図６に示す流入弁制御装置１０の動作
を図７（ａ），図７（ｂ）に示す流入量制御応答特性図
および水圧特性図を用いて説明する。Further, the downstream valve control section 12 is provided with a flow meter 1
4, the flow rate on the downstream side of the valve 6, that is, the distribution reservoir 4
Of the valve 6 so that the inflow amount Q of the valve 6 becomes the target flow rate Qr.
2 is automatically controlled by the PI control calculation unit 12a. The operation of the thus-configured inflow valve control device 10 shown in FIG. 6 will be described with reference to the inflow control response characteristic diagram and the hydraulic characteristic diagram shown in FIGS. 7A and 7B.
【００１１】図７（ａ）は、目標流量Ｑｒを時刻ｔ＝０
（秒）において、６３００［ｍ3 ／ｈ］から１０００
［ｍ3 ／ｈ］へ変更した場合に、各時刻ｔにおける実際
の流入量Ｑの変化を示す実測図である。なお、この図に
おいては、上流側の弁制御部１１の制御周期は９０秒に
設定され、下流側の弁制御部１２の制御周期は１５秒に
設定されている。図示するように、約１５０秒後には、
流入量Ｑは目標流量Ｑｒに達する。FIG. 7A shows that the target flow rate Qr is changed at time t = 0.
(Seconds), 6300 [m 3 / H] to 1000
[M 3 / H] is an actual measurement diagram showing a change in the actual inflow amount Q at each time t when changed to [/ h]. In this figure, the control cycle of the upstream valve control unit 11 is set to 90 seconds, and the control cycle of the downstream valve control unit 12 is set to 15 seconds. As shown, after about 150 seconds,
The inflow amount Q reaches the target flow rate Qr.
【００１２】また、図７（ｂ）は、図７（ａ）と同様
に、目標流量Ｑｒを時刻ｔ＝０（秒）において、６３０
０［ｍ3 ／ｈ］から１０００［ｍ3 ／ｈ］へ変更した場
合に、各時刻ｔにおける弁５に対する流入圧力Ｐ0 と、
同一弁５の出力側の１段目減圧後の圧力Ｐ1 と、下流側
の弁６の出力側の２段目減圧後の圧力、すなわち配水池
４へ流入する時の流出圧力Ｐ2 の変化を示す図である。
図示するように、例えば、６００秒程度（約１０分）経
過後に、弁５の出力側の水圧Ｐ1 が目標水圧Ｐｒに達す
る。このように、目標流量Ｑｒを変更すると、所定時間
後に、流入量Ｑおよび水圧Ｐ1 が目標流量Ｑr および目
標水圧Ｐｒに達する。FIG. 7B shows that the target flow rate Qr is 630 at time t = 0 (second), as in FIG. 7A.
0 [m 3 / H] to 1000 [m 3 / H], the inflow pressure P0 to the valve 5 at each time t,
Changes in the pressure P1 after the first stage pressure reduction on the output side of the same valve 5 and the pressure after the second stage pressure reduction on the output side of the downstream valve 6, that is, the outflow pressure P2 when flowing into the reservoir 4 are shown. FIG.
As shown in the drawing, for example, after elapse of about 600 seconds (about 10 minutes), the hydraulic pressure P1 on the output side of the valve 5 reaches the target hydraulic pressure Pr. As described above, when the target flow rate Qr is changed, the inflow amount Q and the hydraulic pressure P1 reach the target flow rate Qr and the target hydraulic pressure Pr after a predetermined time.
【００１３】[0013]
【発明が解決しようとする課題】しかしながら、図６に
示す流入弁制御装置１０においても、まだ次のような課
題があった。However, the inflow valve control device 10 shown in FIG. 6 still has the following problems.
【００１４】すなわち、目標流量Ｑｒが変化すると、各
弁５，６専用の弁制御部１１，１２が同時に同一の流入
量Ｑを用いて各弁５，６の各開度Ｕ1 ，Ｕ2 に対する制
御を開始する。That is, when the target flow rate Qr changes, the valve control units 11 and 12 dedicated to the valves 5 and 6 simultaneously control the respective opening degrees U1 and U2 of the valves 5 and 6 using the same inflow amount Q. Start.
【００１５】その結果、図７（ｂ）に示すように、双方
の弁制御部１１，１２の制御動作が互いに干渉しあっ
て、短時間で水圧Ｐ1 が目標水圧Ｐｒに達しなく、制御
精度が低下する懸念がある。また、制御過程において一
時的に一方の弁に過大な減圧が印加し、弁の破損やキャ
ビティに起因する騒音が発生する懸念がある。As a result, as shown in FIG. 7 (b), the control operations of the two valve control units 11 and 12 interfere with each other, the hydraulic pressure P1 does not reach the target hydraulic pressure Pr in a short time, and the control accuracy is reduced. There is concern that it will decline. Further, there is a concern that excessive pressure reduction is temporarily applied to one of the valves during the control process, and that the valve is damaged or noise due to the cavity is generated.
【００１６】具体的に説明すると、弁５の開度Ｕ1 が変
化すると、他方の弁制御部１２の入力である流入量Ｑが
変化してしまう。逆に、弁６の開度Ｕ2 が変化すると、
弁制御部１１の入力である水圧Ｐ1 が変化してしまう。
このように、弁制御部１１，１２相互間で干渉現象が発
生する。このような問題を解消するために、前述したよ
うに、各弁制御部１１，１２の各制御周期の比を３倍以
上に設定する手法が採用されている。More specifically, when the opening degree U1 of the valve 5 changes, the inflow amount Q, which is an input of the other valve control unit 12, changes. Conversely, when the opening degree U2 of the valve 6 changes,
The water pressure P1, which is an input of the valve control unit 11, changes.
Thus, an interference phenomenon occurs between the valve control units 11 and 12. In order to solve such a problem, as described above, a method of setting the ratio of each control cycle of each of the valve control units 11 and 12 to three times or more is adopted.
【００１７】しかし、この場合においても、長い制御周
期で制御される弁制御部の制御応答が遅くなる。すなわ
ち、図６の制御装置においては、前述したように、弁５
の弁制御部１１の制御周期を９０秒、弁６の弁制御部１
２の制御周期を１５秒に設定しているので、弁５を用い
た圧力制御の制御応答が遅くなり、結果的に、弁６の減
圧量が過大になる。図７（ｂ）の時刻ｔ＝６０近傍に示
すように、一時的に、各弁５，６が受持つ減圧量が著し
く不均衡になる場合が発生する。過大な減圧を受持つ方
の弁６が損傷する懸念がある。However, also in this case, the control response of the valve control unit controlled in a long control cycle becomes slow. That is, in the control device of FIG.
The control cycle of the valve control unit 11 is 90 seconds, and the valve control unit 1 of the valve 6 is
Since the control cycle of 2 is set to 15 seconds, the control response of the pressure control using the valve 5 becomes slow, and as a result, the pressure reduction amount of the valve 6 becomes excessive. As shown in the vicinity of time t = 60 in FIG. 7B, there is a case where the pressure reduction amounts of the valves 5 and 6 temporarily become extremely imbalanced temporarily. There is a concern that the valve 6 responsible for excessive pressure reduction may be damaged.
【００１８】本発明はこのような事情に鑑みてなされた
ものであり、流路に直列介挿された各弁を制御する弁制
御部を一定周期で択一的に選択して駆動させることによ
って、同時に双方の弁が制御されるのを防止でき、制御
動作中に一方の弁に過大減圧が印加されるのを未然に防
止でき、かつ制御応答特性を大幅に向上できる流入弁制
御装置を提供することを目的とする。The present invention has been made in view of such circumstances, and selectively drives a valve control unit that controls each valve inserted in series in a flow path at a constant cycle. The present invention provides an inflow valve control device that can prevent both valves from being controlled at the same time, prevent an excessively reduced pressure from being applied to one of the valves during a control operation, and greatly improve control response characteristics. The purpose is to do.
【００１９】[0019]
【課題を解決するための手段】上記課題を解消するため
に本発明は、高圧の流体流出部から低圧の流体流入部へ
の流路に直列介挿された第１，第２の弁の各開度を調整
することによって、流体流入部への流入量を目標流量に
制御する流入弁制御装置において、SUMMARY OF THE INVENTION In order to solve the above problems, the present invention is directed to a first and a second valve which are inserted in series in a flow path from a high pressure fluid outlet to a low pressure fluid inlet. In the inflow valve control device that controls the amount of inflow to the fluid inflow portion to the target flow rate by adjusting the opening degree,
【００２０】流入量を検出する流入量検出手段と、検出
された流入量が目標流量になるように第１の弁の開度を
制御する第１の弁制御部と、検出された流入量が目標流
量になるように第２の弁の開度を制御する第２の弁制御
部と、第１，第２の弁制御部を択一的に動作させる弁制
御部切換手段と、各弁相互間の減圧比を検出する減圧比
検出手段と、各弁制御部による各弁に対する開度の各制
御方向および減圧比に基づいて弁制御部切換手段により
駆動すべき弁制御部を選択させる判定手段とを備えたも
のである。An inflow amount detecting means for detecting the inflow amount, a first valve control unit for controlling an opening degree of the first valve so that the detected inflow amount becomes a target flow rate; A second valve control unit for controlling the opening of the second valve so as to achieve the target flow rate, a valve control unit switching means for selectively operating the first and second valve control units, Pressure reducing ratio detecting means for detecting a pressure reducing ratio between the two, and determining means for selecting a valve control unit to be driven by the valve control unit switching means based on each control direction of the opening degree of each valve by each valve control unit and the pressure reducing ratio. It is provided with.
【００２１】[0021]
【作用】このように構成された流入弁制御装置において
は、高圧の流体流出部から低圧の流体流入部への流路に
直列介挿された第１，第２の弁の各開度は、それぞれ専
用の第１，第２の弁制御部によって、流入量が目標流量
になるように制御される。この場合、各弁制御部は同時
に動作することはなく、弁制御部切換手段によって、一
定の制御周期毎にいずれか一方の弁制御部のみが動作し
ている。すなわち、弁制御部相互間において干渉現象が
発生することはない。In the inflow valve control device thus configured, each opening of the first and second valves inserted in series in the flow path from the high-pressure fluid outflow to the low-pressure fluid inflow is: The inflow amount is controlled by the dedicated first and second valve control units so that the inflow amount becomes the target flow amount. In this case, each of the valve control units does not operate at the same time, and only one of the valve control units is operating at a constant control cycle by the valve control unit switching unit. That is, the interference phenomenon does not occur between the valve control units.
【００２２】そして、次の制御周期において、上流側ま
たは下流側のいずれの弁に対する弁制御部を動作させる
かの判定を判定手段で行う。この判定手段における判定
の判断に使用する項目は、各弁における現在の各開度の
制御方向と、現在の各弁相互間の減圧比である。Then, in the next control cycle, the determination means determines whether to operate the valve control unit for the upstream or downstream valve. Items used for the determination by the determination means are the current control direction of each opening degree of each valve and the current pressure reduction ratio between the valves.
【００２３】このように、一定の制御周期毎に、次の制
御周期で動作させる弁制御部を、現在の弁の動作状態を
参照して決定しているので、いずれか一方の弁のみに過
大な減圧負担が加わることを未然に防止できる。また、
結果的に各弁制御部の制御周期を等しく設定しているの
で、この制御周期を弁の機械的開閉動作に必要な最短の
制御周期に設定することによって、制御応答を改善でき
る。As described above, since the valve control unit operated in the next control cycle is determined with reference to the current operation state of the valve in each fixed control cycle, only one of the valves is excessively large. It is possible to prevent a heavy decompression load from being applied. Also,
As a result, since the control cycle of each valve control unit is set to be equal, the control response can be improved by setting this control cycle to the shortest control cycle necessary for the mechanical opening / closing operation of the valve.
【００２４】[0024]
【実施例】以下本発明の一実施例を図面を用いて説明す
る。An embodiment of the present invention will be described below with reference to the drawings.
【００２５】図１は実施例の流入弁制御装置を示す概略
構成図である。図５，図６に示す従来の装置と同一部分
には同一符号か付してある。したがって、重複する部分
の詳細説明は省略されている。FIG. 1 is a schematic configuration diagram showing an inflow valve control device according to an embodiment. The same parts as those of the conventional apparatus shown in FIGS. 5 and 6 are denoted by the same reference numerals. Therefore, the detailed description of the overlapping part is omitted.
【００２６】この実施例の流入弁制御装置においては、
流体流出部としての貯水池１と流体流入部としての配水
池４とを接続する流入管２に、上流側の弁５の流入圧力
Ｐ0を検出する水圧計８，配水池４へ流入する水の単位
時間当りの流入量Ｑを検出する流量計７、弁５および弁
６が介挿されている。また、弁６の両端に両端圧力差
（Ｐ1 −Ｐ2 ）を検出する別の水圧計９が接続されてい
る。In the inflow valve control device of this embodiment,
A water pressure gauge 8 for detecting an inflow pressure P0 of an upstream valve 5 and a unit of water flowing into the reservoir 4 in an inflow pipe 2 connecting the reservoir 1 as a fluid outlet and the reservoir 4 as a fluid inlet. A flow meter 7, a valve 5, and a valve 6 for detecting the inflow amount Q per hour are interposed. Further, another water pressure gauge 9 for detecting a pressure difference between both ends (P1 -P2) is connected to both ends of the valve 6.
【００２７】弁５には第１の弁制御部２１が接続され、
弁６には第２の弁制御部２２が接続されている。第１，
第２の弁制御部２１，２２内にはＰＩ制御演算部２１
ａ，２２ａと各弁５，６を駆動する駆動制御部２１ｂ，
２２ｂとが組込まれている。A first valve control unit 21 is connected to the valve 5,
A second valve control unit 22 is connected to the valve 6. First
The PI control calculation unit 21 is provided in the second valve control units 21 and 22.
a, 22a and a drive control unit 21b for driving each of the valves 5, 6;
22b.
【００２８】そして、上流側の第１の弁制御部２１は、
水量計７で検出された流入量Ｑが目標流量Ｑｒになるよ
うに、弁５の開度Ｕ1 をＰＩ制御演算部２１ａによって
自動制御する。同様に、下流側の第２の弁制御部２２
は、水量計７で検出された流入量Ｑが目標流量Ｑｒにな
るように、弁６の開度Ｕ2 をＰＩ制御演算部２２ａによ
って自動制御する。なお、第１，第２の弁制御部２１，
２２における制御周期は各弁５，６のうちの開閉動作時
間が大きい方の弁における設定可能な最短制御周期に設
定されている。当然第１，第２の弁制御部２１，２２は
同一の制御周期に設定されている。The first valve control unit 21 on the upstream side
The opening degree U1 of the valve 5 is automatically controlled by the PI control calculation unit 21a so that the inflow amount Q detected by the water meter 7 becomes the target flow rate Qr. Similarly, the downstream second valve control unit 22
Automatically controls the opening degree U2 of the valve 6 by the PI control calculation unit 22a so that the inflow amount Q detected by the water meter 7 becomes the target flow rate Qr. Note that the first and second valve control units 21,
The control cycle at 22 is set to the shortest control cycle that can be set for the valve with the longer open / close operation time of each of the valves 5 and 6. Naturally, the first and second valve controllers 21 and 22 are set to the same control cycle.
【００２９】さらに、この実施例においては、第１，第
２の弁制御部２１，２２のＰＩ制御演算部２１ａ，２２
ａから駆動制御部２１ｂ，２２ｂへ送出される各操作量
ΔＵ1 ．ΔＵ2 の各信号路にそれぞれ接点２３ａ，２３
ｂが介挿されている。そして、各接点２３ａ，２３ｂは
一つの切換スイッチ２３として動作し、いずれか一方の
接点２３ａ．２３ｂが択一的に閉成される。この切換ス
イッチ２３は判定部２４によって切換制御される。した
がって、接点２３ａ，２３ｂが開放された側の弁制御部
２１，２２は各弁５，６に対する開度制御動作を停止す
る。Further, in this embodiment, the PI control calculation sections 21a and 22a of the first and second valve control sections 21 and 22 are used.
a to the drive control units 21b and 22b. Contacts 23a, 23 are connected to each signal path of ΔU2.
b is interposed. Each of the contacts 23a and 23b operates as one changeover switch 23, and one of the contacts 23a. 23b is alternatively closed. The changeover switch 23 is controlled by the determination unit 24. Therefore, the valve control units 21 and 22 on the side where the contacts 23a and 23b are opened stop the opening control operation for the valves 5 and 6.
【００３０】また、各水圧計８，９にて検出された流入
圧力Ｐ0 およぴ両端圧力差（Ｐ1 −Ｐ2 ）は減圧比演算
部２５へ入力される。減圧比演算部２５は、各弁５，６
に印加される減圧ΔＨ1 ，ΔＨ2 を算出する。すなわ
ち、弁６の減圧ΔＨ2 は測定された圧力差（Ｐ1 −Ｐ2
）である。また、配水池４の圧力Ｈ0 は既知であるの
で、弁５の流出側の水圧Ｐ1 は簡単に算出できる（Ｐ1
＝Ｈ0 ＋ΔＨ2 ）。したがって、弁５の減圧ΔＨ1 は
（Ｐ0 −Ｐ1 ）＝（Ｐ0 −Ｈ0 −ΔＨ2 ）となる。減圧
比演算部２５は弁５，６相互間の減圧比（ΔＨ1 ／ΔＨ
2 ）を算出して、判定部２４へ送出する。The inflow pressure P 0 and the pressure difference between both ends (P 1 -P 2) detected by the water pressure gauges 8 and 9 are input to the pressure reduction ratio calculator 25. The pressure-reduction-ratio calculation unit 25 includes a
The pressure reduction ΔH1 and ΔH2 applied to are calculated. That is, the pressure reduction ΔH2 of the valve 6 is determined by the measured pressure difference (P1-P2
). Since the pressure H0 of the reservoir 4 is known, the water pressure P1 on the outlet side of the valve 5 can be easily calculated (P1
= H0 + .DELTA.H2). Therefore, the pressure reduction ΔH1 of the valve 5 is (P0−P1) = (P0−H0−ΔH2). The pressure reduction ratio calculation unit 25 calculates a pressure reduction ratio between the valves 5 and 6 (ΔH1 / ΔH).
2) is calculated and sent to the determination unit 24.
【００３１】判定部２４には、減圧比（ΔＨ1 ／ΔＨ2
）の他に、第１，第２の弁制御部２１，２２のＰＩ制
御演算部２１ａ，２２ａから駆動制御部２１ｂ，２２ｂ
へ送出される各操作量ΔＵ1 ．ΔＵ2 が入力される。さ
らに、この判定部２４には外部から目標減圧比Ａが入力
されている。なお、この目標減圧比Ａは、各弁５，６が
同一規格の弁であれば１に設定されており、また同一規
格でなければ、各弁相互間で負担可能な減圧の比率に設
定されている。The determination unit 24 includes a pressure reduction ratio (ΔH1 / ΔH2).
), The PI control calculation sections 21a and 22a of the first and second valve control sections 21 and 22 to the drive control sections 21b and 22b.
The operation amounts ΔU1. ΔU2 is input. Further, the target pressure reduction ratio A is input to the determination unit 24 from outside. The target pressure reduction ratio A is set to 1 if the valves 5 and 6 have the same standard, and if not, the target pressure reduction ratio A is set to a ratio of pressure reduction that can be borne between the valves. ing.
【００３２】そして、前記判定部２４は、前述した制御
周期毎に、減圧比演算部２５から入力される減圧比（Δ
Ｈ1 ／ΔＨ2 ），第１，第２の弁制御部２１，２２の各
操作量ΔＵ1 ．ΔＵ2 を読取って、図２に示す判定処理
を実行する。すなわち、Ｐ（プログラムステップ）１に
おいて、読取った減圧比（ΔＨ1 ／ΔＨ2 ）と目標減圧
比Ａとの大小を比較し、次の各ステップＰ２，Ｐ３にお
いて、各操作量ΔＵ1．ΔＵ2 の極性を判断する。すな
わち、各弁５，６の開度Ｕ1 ，Ｕ2 を増加しようとして
いるのか、減少しようとしているのかを判断する。そし
て、Ｐ１〜Ｐ３の判断結果に従って、現在の減圧比およ
び制御方向の状態を条件１〜条件４の４つの条件に分類
して、各条件に対応して、Ｐ４およびＰ５にて次の制御
周期にいずれの弁制御部２１，２２を動作させるかを決
定する。The determination unit 24 determines the pressure reduction ratio (Δ （) input from the pressure reduction ratio calculation unit 25 for each control cycle described above.
H1 / ΔH2), the operation amounts ΔU1... Of the first and second valve controllers 21 and 22. .DELTA.U2 is read and the determination process shown in FIG. 2 is executed. That is, in P (program step) 1, the magnitude of the read pressure reduction ratio (ΔH1 / ΔH2) is compared with the target pressure reduction ratio A, and in each of the next steps P2 and P3, each operation amount ΔU1. The polarity of ΔU2 is determined. That is, it is determined whether the opening degrees U1 and U2 of the valves 5 and 6 are to be increased or decreased. Then, according to the judgment results of P1 to P3, the current pressure reduction ratio and the state of the control direction are classified into four conditions, Condition 1 to Condition 4, and the next control cycle is performed in P4 and P5 corresponding to each condition. Which of the valve control units 21 and 22 should be operated at the same time.
【００３３】（１）条件１：ΔＵ1 ＞０，ΔＵ2 ＞０、
かつＡ＞（ΔＨ1 ／ΔＨ2 ）の場合 すなわち、流入量Ｑを増加するために弁５，６に対して
開方向操作を行おうとしており、かつ弁６の減圧負担分
が設定値より大きいので、この条件１においては、切換
スイッチ２３に対して、弁６の弁制御部２２を動作させ
るために、接点２３ｂを閉じ、接点２３ａを開放する制
御信号を送出する。その結果、次の制御周期において、
弁５の開度Ｕ1 は固定であり、弁６の開度Ｕ2 が増大す
る。よって。流入量Ｑが増加し、全体の減圧量に対する
弁６の減圧負担率が減少し、弁５，６相互間の減圧比
（ΔＨ1 ／ΔＨ2 ）が目標減圧比Ａに近ずく。(1) Condition 1: ΔU1> 0, ΔU2> 0,
And A> (ΔH1 / ΔH2) That is, the opening direction operation is being performed on the valves 5 and 6 in order to increase the inflow amount Q, and the decompression share of the valve 6 is larger than the set value. Under the condition 1, a control signal for closing the contact 23b and opening the contact 23a is transmitted to the changeover switch 23 in order to operate the valve control unit 22 of the valve 6. As a result, in the next control cycle,
The opening U1 of the valve 5 is fixed, and the opening U2 of the valve 6 increases. Therefore. The inflow amount Q increases, the pressure reduction burden ratio of the valve 6 with respect to the total pressure reduction amount decreases, and the pressure reduction ratio (ΔH1 / ΔH2) between the valves 5 and 6 approaches the target pressure reduction ratio A.
【００３４】（２）条件２：ΔＵ1 ＞０，ΔＵ2 ＞０、
かつＡ＜（ΔＨ1 ／ΔＨ2 ）の場合 すなわち、流入量Ｑを増加するために弁５，６に対して
開方向操作を行おうとしており、かつ弁５の減圧負担分
が設定値より大きいので、この条件２においては、切換
スイッチ２３に対して、弁５の弁制御部２１を動作させ
るために、接点２３ａを閉じ、接点２３ｂを開放する制
御信号を送出する。この場合、次の制御周期において、
弁６の開度Ｕ2 は固定であり、弁５の開度Ｕ1 が増大す
る。よって。流入量Ｑが増加し、全体の減圧量に対する
弁５の減圧負担率が減少し、弁５，６相互間の減圧比
（ΔＨ1 ／ΔＨ2 ）が目標減圧比Ａに近ずく。(2) Condition 2: ΔU1> 0, ΔU2> 0,
And A <(ΔH1 / ΔH2) That is, the opening direction operation is being performed on the valves 5 and 6 in order to increase the inflow amount Q, and the pressure reduction burden of the valve 5 is larger than the set value. Under the condition 2, a control signal for closing the contact 23a and opening the contact 23b is transmitted to the changeover switch 23 in order to operate the valve control unit 21 of the valve 5. In this case, in the next control cycle,
The opening U2 of the valve 6 is fixed, and the opening U1 of the valve 5 increases. Therefore. The inflow amount Q increases, the pressure reduction burden ratio of the valve 5 with respect to the total pressure reduction amount decreases, and the pressure reduction ratio (ΔH1 / ΔH2) between the valves 5 and 6 approaches the target pressure reduction ratio A.
【００３５】（３）条件３：ΔＵ1 ＜０，ΔＵ2 ＜０、
かつＡ＞（ΔＨ1 ／ΔＨ2 ）の場合 すなわち、流入量Ｑを減少するために弁５，６に対して
閉方向操作を行おうとしており、かつ弁６の減圧負担分
が設定値より大きいので、この条件３においては、切換
スイッチ２３に対して、弁５の弁制御部２１を動作させ
るために、接点２３ａを閉じ、接点２３ｂを開放する制
御信号を送出する。したがって、次の制御周期におい
て、弁６の開度Ｕ2 は固定であり、弁５の開度Ｕ1 が減
少する。よって。流入量Ｑが減少し、全体の減圧量に対
する弁５の減圧負担率が増加し、弁５，６相互間の減圧
比（ΔＨ1 ／ΔＨ2 ）が目標減圧比Ａに近ずく。(3) Condition 3: ΔU1 <0, ΔU2 <0,
And A> (ΔH1 / ΔH2) That is, since the closing direction operation is being performed on the valves 5 and 6 in order to reduce the inflow amount Q, and the pressure reduction burden of the valve 6 is larger than the set value, Under the condition 3, a control signal for closing the contact 23a and opening the contact 23b is transmitted to the changeover switch 23 in order to operate the valve control unit 21 of the valve 5. Therefore, in the next control cycle, the opening degree U2 of the valve 6 is fixed, and the opening degree U1 of the valve 5 decreases. Therefore. The inflow amount Q decreases, the pressure reduction burden ratio of the valve 5 with respect to the entire pressure reduction amount increases, and the pressure reduction ratio (ΔH1 / ΔH2) between the valves 5 and 6 approaches the target pressure reduction ratio A.
【００３６】（４）条件２：ΔＵ1 ＜０，ΔＵ2 ＜０、
かつＡ＞（ΔＨ1 ／ΔＨ2 ）の場合 すなわち、流入量Ｑを増加するために弁５，６に対して
開方向操作を行おうとしており、かつ弁５の減圧負担分
が設定値より大きいので、この条件４においては、切換
スイッチ２３に対して、弁６の弁制御部２２を動作させ
るために、接点２３ａを開放し、接点２３ｂを閉じる制
御信号を送出する。この場合、次の制御周期において、
弁５の開度Ｕ1 は固定であり、弁６の開度Ｕ2 が減少す
る。よって。流入量Ｑが増加し、全体の減圧量に対する
弁６の減圧負担率が増加し、弁５，６相互間の減圧比
（ΔＨ1 ／ΔＨ2 ）が目標減圧比Ａに近ずく。(4) Condition 2: ΔU1 <0, ΔU2 <0,
And A> (ΔH1 / ΔH2) That is, the opening direction operation is being performed on the valves 5 and 6 in order to increase the inflow amount Q, and the decompression share of the valve 5 is larger than the set value. Under the condition 4, a control signal for opening the contact 23a and closing the contact 23b is sent to the changeover switch 23 in order to operate the valve control unit 22 of the valve 6. In this case, in the next control cycle,
The opening U1 of the valve 5 is fixed, and the opening U2 of the valve 6 decreases. Therefore. The inflow amount Q increases, the pressure reduction burden ratio of the valve 6 to the entire pressure reduction amount increases, and the pressure reduction ratio (ΔH1 / ΔH2) between the valves 5 and 6 approaches the target pressure reduction ratio A.
【００３７】以上説明したように、目標流量Ｑｒを変化
した場合に、流入量Ｑが目標流量Ｑｒに近ずく過程で、
弁５，６相互間の減圧比（ΔＨ1 ／ΔＨ2 ）を監視し、
この減圧比（ΔＨ1 ／ΔＨ2 ）が目標減圧比Ａに接近す
る方向に開度が変化する弁の弁制御部２１，２２を選択
設定している。したがって、たとえ目標流量Ｑｒを大き
く変化した場合であっても、流量Ｑの変化過程におい
て、弁５，６相互間の減圧比（ΔＨ1 ／ΔＨ2 ）が目標
減圧比Ａから大きく外れることはない。As described above, when the target flow rate Qr is changed, the inflow rate Q approaches the target flow rate Qr,
Monitor the pressure reduction ratio (ΔH1 / ΔH2) between the valves 5 and 6,
The valve control units 21 and 22 of the valves whose degree of opening changes in such a direction that the pressure reduction ratio (ΔH1 / ΔH2) approaches the target pressure reduction ratio A are selectively set. Therefore, even if the target flow rate Qr is largely changed, the pressure reduction ratio (ΔH1 / ΔH2) between the valves 5 and 6 does not greatly deviate from the target pressure reduction ratio A in the process of changing the flow rate Q.
【００３８】したがって、いずれか一方の弁５．６に許
容減圧を越える減圧負担が印加されることはないので、
弁５，６が損傷を受けたり、キャビィティに起因する騒
音が発生することを未然に防止できる。Therefore, a reduced pressure load exceeding the allowable reduced pressure is not applied to one of the valves 5.6.
It is possible to prevent the valves 5 and 6 from being damaged or generating noise due to cavities.
【００３９】また、同時に両方の弁制御部２１，２２が
制御動作を実行することはないので、従来装置に生じた
干渉現象が発生することはない。また、両方の弁制御部
２１，２２の制御周期を弁５，６の特性で定まる最短時
間の同一値に設定することが可能となる。その結果、流
入量Ｑおよび各部の水圧Ｐ0 ，Ｐ1 が目標流量Ｑｒで定
まる各目標圧力に達するまでの時間を大幅に短縮でき、
制御応答特性を大幅に向上できる。Further, since the two valve control units 21 and 22 do not execute the control operation at the same time, the interference phenomenon which occurs in the conventional device does not occur. Further, it is possible to set the control cycle of both the valve control units 21 and 22 to the same value in the shortest time determined by the characteristics of the valves 5 and 6. As a result, the time required for the inflow amount Q and the water pressures P0 and P1 of the respective parts to reach the respective target pressures determined by the target flow rate Qr can be greatly reduced.
Control response characteristics can be greatly improved.
【００４０】図３は本発明の他の実施例に係わる流入弁
制御装置を示す概略構成図である。図１に示す実施例と
同一部分には同一符号が付してある。したがって、重複
する部分の詳細説明は省略されている。FIG. 3 is a schematic configuration diagram showing an inflow valve control device according to another embodiment of the present invention. The same parts as those in the embodiment shown in FIG. 1 are denoted by the same reference numerals. Therefore, the detailed description of the overlapping part is omitted.
【００４１】この実施例においては、各弁５，６を制御
する第１，第２の弁制御部２１，２２のＰＩ制御演算部
として、各弁５，６の実際の開度Ｕ1 ，Ｕ2 に応じてゲ
インが変化するゲイン・スケージューリング式ＰＩ制御
演算部２１aa，２２aaが採用されている。このような、
ゲイン・スケージューリング式ＰＩ制御演算部２１aa，
２２aaを用いることによって、弁開度−弁抵抗特性の非
線形特性が補正される。In this embodiment, as the PI control calculation units of the first and second valve control units 21 and 22 for controlling the valves 5 and 6, the actual opening degrees U1 and U2 of the valves 5 and 6 are used. Gain-scheduling PI control calculation units 21aa and 22aa whose gains change accordingly are employed. like this,
Gain-scheduling PI control operation unit 21aa,
By using 22aa, the non-linear characteristic of the valve opening-valve resistance characteristic is corrected.
【００４２】図４（ａ）は、図３の実施例装置におい
て、目標流量Ｑｒを時刻ｔ＝０（秒）に、６３００［ｍ
3 ／ｈ］から１０００［ｍ3 ／ｈ］へ変更した場合に、
各時刻ｔにおける実際の流入量Ｑの変化を示す実測図で
ある。なお、各弁制御部２１，２２の制御周期は１５秒
に設定されている。図示するように、約１５０秒後に
は、流入量Ｑは目標流量Ｑｒに達する。FIG. 4A shows that the target flow rate Qr is changed to 6300 [m] at time t = 0 (second) in the apparatus of the embodiment shown in FIG.
Three / H] to 1000 [m 3 / H],
FIG. 9 is an actual measurement diagram showing a change in an actual inflow amount Q at each time t. The control cycle of each of the valve controllers 21 and 22 is set to 15 seconds. As shown, after about 150 seconds, the inflow amount Q reaches the target flow rate Qr.
【００４３】また、図４（ｂ）は、図４（ａ）と同様
に、目標流量Ｑｒを時刻ｔ＝０（秒）に、６３００［ｍ
3 ／ｈ］から１０００［ｍ3 ／ｈ］へ変更した場合に、
各時刻ｔにおける弁５に対する流入圧力Ｐ0 と、同一弁
５の出力側の１段目減圧後の圧力Ｐ1 と、下流側の弁６
の出力側の２段目減圧後の圧力（流出圧力）Ｐ2 の変化
を示す図である。図示するように、図４（ａ）の流入量
Ｑｒと同様に、約１５０秒後に、各圧力Ｐ0 ，Ｐ1 は、
目標流量Ｑｒで定まる各目標圧力に達する。FIG. 4B shows that the target flow rate Qr is changed to 6300 [m] at time t = 0 (second), similarly to FIG.
Three / H] to 1000 [m 3 / H],
The inflow pressure P0 to the valve 5 at each time t, the pressure P1 after the first stage pressure reduction on the output side of the same valve 5, and the downstream valve 6
FIG. 7 is a diagram showing a change in pressure (outflow pressure) P2 after the second stage pressure reduction on the output side of FIG. As shown, similarly to the inflow amount Qr in FIG. 4A, after about 150 seconds, each of the pressures P0 and P1 becomes:
Each target pressure determined by the target flow rate Qr is reached.
【００４４】また、図７（ｂ）に示すように、制御過程
において、弁６の流入側圧力Ｐ1 が大きく変動すること
はないので、弁６が受持つ減圧量ΔＨ2 が許容限界を越
えることはない。As shown in FIG. 7 (b), in the control process, the inflow side pressure P1 of the valve 6 does not fluctuate greatly, so that the pressure reduction amount ΔH2 of the valve 6 does not exceed the allowable limit. Absent.
【００４５】このように、短時間で各圧力Ｐ0 ，Ｐ1 を
目標圧力に一致させることができ、制御応答性能を大幅
に向上できると共に、制御過程で各弁５．６にたとえ一
時的であっても許容限界を越える減圧量が印加されるこ
とはないので、装置全体の信頼性およひ安全性を向上で
きる。As described above, each of the pressures P0 and P1 can be made to coincide with the target pressure in a short period of time, and the control response performance can be greatly improved. Also, since the amount of reduced pressure exceeding the allowable limit is not applied, the reliability and safety of the entire apparatus can be improved.
【００４６】なお、本発明は上述した実施例に限定され
るものではない。実施例装置においては、上水道プラン
トに適用したが、一般の産業科学プラントに適用するこ
とが可能である。The present invention is not limited to the embodiment described above. The apparatus of the embodiment is applied to a water supply plant, but can be applied to a general industrial science plant.
【００４７】[0047]
【発明の効果】以上説明したように本発明の流入弁制御
装置によれば、流路に直列介挿された各弁を制御する弁
制御部を、現在の各弁の制御方向および弁相互間の減圧
比でもって一義的に定まる方を一定周期で択一的に選択
して駆動させている。したがって、同時に双方の弁が制
御されるのを防止でき、制御動作過程に一方の弁に過大
減圧が印加されるのを未然に防止でき、かつ制御応答特
性を大幅に向上できる。As described above, according to the inflow valve control device of the present invention, the valve control section for controlling each valve inserted in series in the flow path is provided with the current control direction of each valve and the inter-valve control. The drive which is uniquely determined by the pressure reduction ratio is selectively selected and driven at a constant cycle. Therefore, it is possible to prevent both valves from being controlled at the same time, to prevent application of excessively reduced pressure to one of the valves during the control operation process, and to significantly improve control response characteristics.
【図１】 本発明の一実施例に係わる流入弁制御装置を
示す概略構成図、FIG. 1 is a schematic configuration diagram showing an inflow valve control device according to one embodiment of the present invention;
【図２】 同実施例装置の動作を示す流れ図、FIG. 2 is a flowchart showing the operation of the apparatus of the embodiment;
【図３】 本発明の他の実施例に係わる流入弁制御装置
を示す概略構成図、FIG. 3 is a schematic configuration diagram showing an inflow valve control device according to another embodiment of the present invention;
【図４】 同実施例装置の動作特性図、FIG. 4 is an operation characteristic diagram of the device of the embodiment;
【図５】 一般的な上水道プラントを示す模式図、FIG. 5 is a schematic diagram showing a general water supply plant;
【図６】 従来の流入弁制御装置を示す概略構成図、FIG. 6 is a schematic configuration diagram showing a conventional inflow valve control device;
【図７】 同従来装置の動作特性図。FIG. 7 is an operation characteristic diagram of the conventional device.
１…貯水池、２…流入管、４…配水池、５，６…弁，７
…流量系、８，９…水圧計、２１…第１の弁制御部、２
２…第２の弁制御部、２３…切換スイッチ、２４…判定
部、２５…減圧比演算部。DESCRIPTION OF SYMBOLS 1 ... Reservoir, 2 ... Inflow pipe, 4 ... Reservoir, 5, 6 ... Valve, 7
... Flow system, 8, 9 ... Hydraulic pressure gauge, 21 ... First valve control unit, 2
2 ... second valve control unit, 23 ... changeover switch, 24 ... determination unit, 25 ... pressure reduction ratio calculation unit.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 山下 幸治 東京都港区芝浦一丁目１番１号 株式会 社東芝本社事務所内 (56)参考文献 特開 平１−219912（ＪＰ，Ａ) 特開 昭53−129788（ＪＰ，Ａ) 特開 昭54−93789（ＪＰ，Ａ) 特開 昭54−33990（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) G05D 7/06 G05D 7/00 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Koji Yamashita, Inventor Koji Yamashita 1-1-1, Shibaura, Minato-ku, Tokyo Inside the head office of Toshiba Corporation (56) References JP-A-1-219912 (JP, A) JP-A JP-A-53-129788 (JP, A) JP-A-54-93789 (JP, A) JP-A-54-33990 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) G05D 7 / 06 G05D 7/00
Claims (1)
への流路に直列介挿された第１，第２の弁の各開度を調
整することによって、前記流体流入部への流入量を目標
流量に制御する流入弁制御装置において、 前記流入量を検出する流入量検出手段と、検出された流
入量が前記目標流量になるように前記第１の弁の開度を
制御する第１の弁制御部と、前記検出された流入量が前
記目標流量になるように第２の弁の開度を制御する第２
の弁制御部と、前記第１，第２の弁制御部を択一的に動
作させる弁制御部切換手段と、前記各弁相互間の減圧比
を検出する減圧比検出手段と、前記各弁制御部による各
弁に対する開度の各制御方向および前記減圧比に基づい
て前記弁制御部切換手段により駆動すべき弁制御部を選
択させる判定手段とを備えた流入弁制御装置。1. An inflow into the fluid inflow section by adjusting respective opening degrees of first and second valves inserted in series in a flow path from a high pressure fluid outflow section to a low pressure fluid inflow section. An inflow valve control device that controls the amount to a target flow rate, wherein an inflow amount detection unit that detects the inflow amount, and an opening degree control unit that controls an opening degree of the first valve so that the detected inflow amount becomes the target flow rate. A second valve control unit that controls an opening degree of a second valve so that the detected inflow amount becomes the target flow rate.
A valve control unit, valve control unit switching means for selectively operating the first and second valve control units, pressure reduction ratio detection means for detecting a pressure reduction ratio between the valves, and each of the valves An inflow valve control device comprising: a determination unit configured to select a valve control unit to be driven by the valve control unit switching unit based on each control direction of an opening degree of each valve by the control unit and the pressure reduction ratio.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19196792A JP2938277B2 (en) | 1992-07-20 | 1992-07-20 | Inflow valve control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19196792A JP2938277B2 (en) | 1992-07-20 | 1992-07-20 | Inflow valve control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0635543A JPH0635543A (en) | 1994-02-10 |
| JP2938277B2 true JP2938277B2 (en) | 1999-08-23 |
Family
ID=16283428
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19196792A Expired - Fee Related JP2938277B2 (en) | 1992-07-20 | 1992-07-20 | Inflow valve control device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2938277B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100445631B1 (en) * | 2001-07-12 | 2004-08-25 | 삼성전자주식회사 | Slot valve opening and shutting apparatus of semiconductor device fabrication equipment |
| JP2003280745A (en) * | 2002-03-25 | 2003-10-02 | Stec Inc | Mass-flow controller |
| US20050000570A1 (en) * | 2003-01-17 | 2005-01-06 | Mohammed Balarabe Nuhu | Combination manual/pneumatic shut-off valve |
-
1992
- 1992-07-20 JP JP19196792A patent/JP2938277B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0635543A (en) | 1994-02-10 |
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