JP2892857B2 - イオン化剥離による除染方法および装置 - Google Patents
イオン化剥離による除染方法および装置Info
- Publication number
- JP2892857B2 JP2892857B2 JP3095983A JP9598391A JP2892857B2 JP 2892857 B2 JP2892857 B2 JP 2892857B2 JP 3095983 A JP3095983 A JP 3095983A JP 9598391 A JP9598391 A JP 9598391A JP 2892857 B2 JP2892857 B2 JP 2892857B2
- Authority
- JP
- Japan
- Prior art keywords
- enclosure
- substrate
- decontaminated
- contaminated
- milling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21F—PROTECTION AGAINST X-RADIATION, GAMMA RADIATION, CORPUSCULAR RADIATION OR PARTICLE BOMBARDMENT; TREATING RADIOACTIVELY CONTAMINATED MATERIAL; DECONTAMINATION ARRANGEMENTS THEREFOR
- G21F9/00—Treating radioactively contaminated material; Decontamination arrangements therefor
- G21F9/001—Decontamination of contaminated objects, apparatus, clothes, food; Preventing contamination thereof
- G21F9/005—Decontamination of the surface of objects by ablation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Food Science & Technology (AREA)
- Materials Engineering (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Optics & Photonics (AREA)
- Physical Vapour Deposition (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR9005417 | 1990-04-27 | ||
FR9005417A FR2661544B1 (fr) | 1990-04-27 | 1990-04-27 | Procede et dispositif de decontamination par decapage ionique. |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH04230898A JPH04230898A (ja) | 1992-08-19 |
JP2892857B2 true JP2892857B2 (ja) | 1999-05-17 |
Family
ID=9396183
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3095983A Expired - Lifetime JP2892857B2 (ja) | 1990-04-27 | 1991-04-26 | イオン化剥離による除染方法および装置 |
Country Status (4)
Country | Link |
---|---|
EP (1) | EP0454584B1 (fr) |
JP (1) | JP2892857B2 (fr) |
DE (1) | DE69111671T2 (fr) |
FR (1) | FR2661544B1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3886117A4 (fr) * | 2018-11-21 | 2022-07-20 | Joint Stock Company "Rosenergoatom" | Procédé de désactivation d'un élément de la structure d'un réacteur nucléaire |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL119634A (en) * | 1996-11-18 | 2000-12-06 | Omerco Ltd | Method and apparatus for the treatment of surfaces of large metal objects |
JP6052538B2 (ja) * | 2012-12-04 | 2016-12-27 | 清水建設株式会社 | 汚染コンクリート塊の除染処理方法および装置 |
CN112139151A (zh) * | 2020-09-11 | 2020-12-29 | 韩山师范学院 | 一种大型设备表面清理装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1382915A (en) * | 1972-04-25 | 1975-02-05 | British Nuclear Fuels Ltd | Decontamination of fuel element sheaths |
DE3114543A1 (de) * | 1981-04-10 | 1982-12-16 | Alkem Gmbh, 6450 Hanau | Verfahren zum dekontaminieren der oberflaeche eines koerpers von radioaktiven verunreinigungspartikeln und einrichtung zur durchfuehrung dieses verfahrens |
GB2159753B (en) * | 1984-03-06 | 1988-09-07 | Asm Fico Tooling | Method and apparatus for cleaning lead pins before soldering operations |
BE1001027A3 (nl) * | 1987-10-21 | 1989-06-13 | Bekaert Sa Nv | Werkwijze en inrichting voor het reinigen van een langwerpig metalen substraat, zoals een draad, een band, een koord, enz., alsmede volgens die werkwijze gereinigde substraten en met dergelijke substraten versterkte voorwerpen uit polymeermateriaal. |
-
1990
- 1990-04-27 FR FR9005417A patent/FR2661544B1/fr not_active Expired - Fee Related
-
1991
- 1991-04-25 DE DE1991611671 patent/DE69111671T2/de not_active Expired - Fee Related
- 1991-04-25 EP EP19910401101 patent/EP0454584B1/fr not_active Expired - Lifetime
- 1991-04-26 JP JP3095983A patent/JP2892857B2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3886117A4 (fr) * | 2018-11-21 | 2022-07-20 | Joint Stock Company "Rosenergoatom" | Procédé de désactivation d'un élément de la structure d'un réacteur nucléaire |
Also Published As
Publication number | Publication date |
---|---|
JPH04230898A (ja) | 1992-08-19 |
FR2661544B1 (fr) | 1994-05-27 |
EP0454584A1 (fr) | 1991-10-30 |
FR2661544A1 (fr) | 1991-10-31 |
DE69111671T2 (de) | 1996-04-04 |
EP0454584B1 (fr) | 1995-08-02 |
DE69111671D1 (de) | 1995-09-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3917176B2 (ja) | プラズマ反応チャンバーをその場でマグネトロンクリーニングするための装置と方法 | |
JP4150504B2 (ja) | イオン化物理蒸着のための方法および装置 | |
US5938854A (en) | Method and apparatus for cleaning surfaces with a glow discharge plasma at one atmosphere of pressure | |
US20040108469A1 (en) | Beam processing apparatus | |
JP3123735B2 (ja) | イオンビーム処理装置 | |
JP2892857B2 (ja) | イオン化剥離による除染方法および装置 | |
JP4042817B2 (ja) | 中性粒子ビーム処理装置 | |
JP2008071528A (ja) | プラズマ処理装置 | |
JP3243807B2 (ja) | イオン照射装置 | |
WO2001012350A1 (fr) | Nettoyage de surfaces au moyen d'un plasma haute pression par decharge luminescente sans equilibre thermique | |
JPH07106307A (ja) | プラズマ処理装置およびプラズマ処理方法 | |
JPH0770755A (ja) | 基板を被覆あるいはエッチングする装置 | |
JPH0329863B2 (fr) | ||
JPH02130915A (ja) | プラズマ処理装置 | |
JP2004211123A (ja) | 荷電粒子照射装置 | |
JPH04315797A (ja) | プラズマ処理装置およびそのプラズマ源のクリーニング方法 | |
JPS6396840A (ja) | イオン源 | |
JPH06267899A (ja) | エッチング装置 | |
JPH02148647A (ja) | イオン注入装置のイオンソース洗浄治具及び洗浄方法 | |
JPH01140724A (ja) | プラズマ処理装置 | |
JP2000017429A (ja) | 真空成膜装置 | |
JPH0252855B2 (fr) | ||
JPH0737231Y2 (ja) | イオン注入装置 | |
JPH03219541A (ja) | プラズマ処理装置 | |
JP3134942B2 (ja) | ウエーハステージ前処理方法 |