JP2887356B2 - Fiber fusion spliced quartz waveguide device - Google Patents
Fiber fusion spliced quartz waveguide deviceInfo
- Publication number
- JP2887356B2 JP2887356B2 JP3314898A JP31489891A JP2887356B2 JP 2887356 B2 JP2887356 B2 JP 2887356B2 JP 3314898 A JP3314898 A JP 3314898A JP 31489891 A JP31489891 A JP 31489891A JP 2887356 B2 JP2887356 B2 JP 2887356B2
- Authority
- JP
- Japan
- Prior art keywords
- fusion
- mount
- waveguide device
- optical fiber
- silica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Optical Couplings Of Light Guides (AREA)
- Mechanical Coupling Of Light Guides (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明はＣＯ2 レーザ光を用いて
石英系導波路等の光学部品と石英系光ファイバを融着接
続するファイバ融着接続型石英系導波路デバイスに関す
るものである。The present invention relates to relates to a fiber fusion splicing type silica-based waveguide device for fusion splicing optical components and silica-based optical fiber, such as silica-based waveguides with CO 2 laser light.
【０００２】[0002]
【従来の技術】石英系導波路デバイスは将来の光通信時
代のニーズに対応し得る量産化が可能で石英系光ファイ
バとの融着により、低損失な永久接続ができるため、光
波長合成分波器や光スターカプラ等のパッシブデバイス
開発が盛んに行われている。2. Description of the Related Art Quartz-based waveguide devices can be mass-produced to meet the needs of the future optical communication era, and low-loss permanent connection can be achieved by fusion with quartz-based optical fibers. Passive devices such as wave devices and optical star couplers have been actively developed.
【０００３】この石英系導波路デバイスと石英系光ファ
イバとの融着接続には、一般にＣＯ2 レーザが用いられ
ている。このＣＯ2 レーザ光は波長が１０．６μｍで、
石英系材料に効率良く吸収されるため、融着用熱源とし
ては最適である。しかも、レンズで集光することによ
り、微少なスポットで任意の部位に対し、選択的に溶融
させることも可能である。[0003] A CO 2 laser is generally used for fusion splicing between the silica-based waveguide device and the silica-based optical fiber. This CO 2 laser beam has a wavelength of 10.6 μm,
Since it is efficiently absorbed by the quartz-based material, it is optimal as a heat source for fusing. In addition, by condensing the light with a lens, it is also possible to selectively melt an arbitrary portion with a minute spot.
【０００４】図３は従来のＣＯ2 レーザ融着接続方法の
一般的な例を示したものである。図示するように、金属
パッケージａの中に固定された略矩体状のマウントｂの
上面には、同様に略矩体状に形成された石英系導波路ｃ
がはんだ付けによって設けられており、この石英系導波
路ｃの端面ｄに、光ファイバｅの端部を突き合わせ、そ
の上方よりレンズｇで集光されたＣＯ2 レーザ光ｆを照
射して、これらの突き合わせ部ｈを加熱することによっ
て、光ファイバｅの端部を石英系導波路ｃの端面ｄに融
着するものである。FIG. 3 shows a general example of a conventional CO 2 laser fusion splicing method. As shown in the figure, on the upper surface of a substantially rectangular mount b fixed in a metal package a, a quartz-based waveguide c similarly formed in a substantially rectangular shape is provided.
Is provided by soldering, an end of an optical fiber e is brought into contact with an end face d of the quartz-based waveguide c, and a CO 2 laser beam f condensed by a lens g is radiated from above the end thereof. By heating the abutting portion h, the end of the optical fiber e is fused to the end face d of the silica-based waveguide c.
【０００５】[0005]
【発明が解決しようとする課題】ところで、これら光通
信用デバイスは光学的特性が優れていると当時に、十分
な機械強度を有し、長期信頼性が保証されなければなら
ない。しかしながら、上述した従来の方式では石英系導
波路ｃがパッケージａ内にあるため、融着熱源であるＣ
Ｏ2 レーザ光ｆを、両者の突き合わせ融着部ｈの上方、
あるいは斜め側方からしか照射できず、融着部ｈの下側
に直射することは困難であった。また、この石英系導波
路ｃはホトダイオードやホトディテクター等と高精度に
軸調整し、固定するために、はんだ固定が可能な金属製
のマウント上に固定されている場合、光ファイバｅの融
着の際に、ＣＯ2 レーザ光ｆの熱が金属製のマウント側
に熱伝導して放散してしまい、融着部ｈのファイバ下部
の溶融効率が著しく低下してしまう。このため、融着時
の融着部ｈに温度分布が生じ、レーザ光ｆが直射できる
上側が十分に溶融して一体化するのに対し、下側ではレ
ーザ光ｆの熱が届きにくくなって、その上側よりも温度
上昇が少なく溶融が不十分となり、機械強度が劣るとい
った問題点があった。また、主に下側を十分に溶融させ
ると、反対に上側の溶融が過剰になってしまい、融着部
ｈでの損失が増大してしまうといった欠点があり、低損
失で、しかも十分な機械強度を有する融着接続部を得る
ことは困難であった。However, these optical communication devices must have sufficient mechanical strength and long-term reliability at the time if they have excellent optical characteristics. However, in the above-described conventional method, since the silica-based waveguide c is located in the package a, the fusion heat source C
O 2 laser light f is applied above the butt fusion portion h
Alternatively, irradiation can be performed only from the oblique side, and it is difficult to directly irradiate the lower side of the fusion part h. In addition, in order to adjust the axis of the quartz-based waveguide c with a photodiode or a photodetector with high accuracy and to fix the same, the optical waveguide is fused with an optical fiber e when fixed on a solderable metal mount. In this case, the heat of the CO 2 laser beam f is conducted and dissipated to the metal mount side, and the melting efficiency of the lower portion of the fiber of the fusion portion h is significantly reduced. For this reason, a temperature distribution is generated in the fused portion h at the time of fusion, and the upper side where the laser beam f can be directly irradiated is sufficiently melted and integrated, whereas the heat of the laser beam f does not easily reach the lower side. However, there is a problem that the temperature rise is smaller than the upper side, the melting is insufficient, and the mechanical strength is inferior. In addition, if the lower side is sufficiently melted, the upper side is excessively melted. On the other hand, there is a disadvantage that the loss at the welded portion h is increased. It was difficult to obtain a fusion spliced part having strength.
【０００６】そこで、本発明は上記の問題点を有効に解
決するために案出されたものであり、その目的は融着部
のファイバ下部からの金属マウントへの熱放散を抑制
し、その上側との温度差を低減して均一な溶融を達成す
ることにより、低損失で高機械強度の融着部を達成でき
るファイバ融着接続型石英系導波路デバイスを提供する
ものである。Accordingly, the present invention has been devised in order to effectively solve the above-mentioned problems, and has as its object to suppress heat dissipation from the lower part of the fiber at the fusion splicing portion to the metal mount, and to suppress the heat radiation at the upper part. A fiber fusion-spliced quartz waveguide device capable of achieving a low-loss, high-mechanical-strength fused portion by reducing the temperature difference between the fused silica-based waveguide device and a uniform fused portion.
【０００７】[0007]
【課題を解決するための手段】上記目的を達成するため
に、本発明は金属製のマウント上に石英系材料で構成さ
れる光部品がはんだ固定され、当該光部品の端面に、Ｃ
Ｏ2 レーザ光を用いて石英系光ファイバが融着接続され
てなるファイバ融着接続型石英系導波路デバイスにおい
て、上記石英系光ファイバと上記光部品（ただし、その
端面に光ファイバ接続用の突起が形成されているものは
除く）の融着部の下部に位置するマウントの表面に、切
欠溝を形成したものである。According to the present invention, an optical component made of a quartz-based material is fixed on a metal mount by soldering.
In a fiber fusion spliced silica-based waveguide device in which a silica-based optical fiber is fusion-spliced using O 2 laser light, the silica-based optical fiber and the optical component (however,
If the projection for optical fiber connection is formed on the end face,
(Not shown) , a notch groove is formed in the surface of the mount located below the fusion portion .
【０００８】[0008]
【作用】本発明は上述したような構成により、ＣＯ2 レ
ーザ光によって上記光ファイバと光部品端面の融着部に
達した熱は、この融着部の下部のマウント表面に形成さ
れた切欠溝によって、マウント側へ放散しなくなって融
着部に集中するため、融着部における熱分布が均一化さ
れ、ＣＯ2 レーザ光が直射し難い融着部下側においても
溶融が充分に行われることなり、低損失で高機械強度の
接続融着部が得られる。According to the present invention, with the above-described structure, the heat that has reached the fusion portion between the optical fiber and the end face of the optical component due to the CO 2 laser beam is transmitted to the notch groove formed on the mount surface below the fusion portion. As a result, heat is not diffused to the mount side and concentrates on the fusion zone, so the heat distribution in the fusion zone is uniformed, and melting is sufficiently performed even on the lower side of the fusion zone where CO 2 laser light is difficult to directly irradiate. Thus, a spliced portion having low loss and high mechanical strength can be obtained.
【０００９】[0009]
【実施例】以下、本発明の好適実施例を添付図面に基づ
いて詳述する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
【００１０】図１に示すように、略矩体状に形成された
金属製のマウント１の上面には、このマウント１と同様
に略矩体状に形成された石英系導波路型波長分波器等の
光部品２がハンダ３によって固定されており、この光部
品２の端面２ａには、光ファイバー４を突き合わせて融
着する融着部５が形成されている。また、図示するよう
に、この融着部５の下部に位置するマウント１上面に
は、深さ５０μｍ、奥行き４ｍｍの切欠溝６が一端部か
らその長さ方向に形成されており、その上部に位置する
光部品２とを離反するように所定の間隙が形成されてい
る。As shown in FIG. 1, a substantially rectangular body is formed.
An optical component 2 such as a silica-based waveguide wavelength demultiplexer formed in a substantially rectangular shape like the mount 1 is fixed by solder 3 on the upper surface of the metal mount 1. A fusion portion 5 for abutting and fusing the optical fibers 4 to each other is formed on the end surface 2a. Further, as shown in the figure, a cutout groove 6 having a depth of 50 μm and a depth of 4 mm is formed in the longitudinal direction from one end on the upper surface of the mount 1 located at the lower part of the fusion part 5, A predetermined gap is formed so as to separate the optical component 2 located therefrom.
【００１１】この融着部５は石英系材料で形成された光
ファイバ４の端部４ａが突き合わされるようになってお
り、その上方からＺｎＳｅレンズ８で集光されたＣＯ2
レーザ光７を照射して光部品２の端面２ａに光ファイバ
４の端部４ａを融着接続するようになっている。The fused portion 5 has an end 4a of an optical fiber 4 made of a quartz-based material abutted thereon, and CO 2 collected by a ZnSe lens 8 from above.
The end 4a of the optical fiber 4 is fusion-spliced to the end face 2a of the optical component 2 by irradiating a laser beam 7.
【００１２】次に、本発明の作用を説明する。Next, the operation of the present invention will be described.
【００１３】図１に示すように、先ず、マウント１の上
面に、はんだ付けされた光部品２の端面２ａに光ファイ
バ４の端部４ａを突き合わせる。次に、このままの状態
で、この突き合わせ部（溶着部５）にその上方からＺｎ
Ｓｅレンズ８で集光された１０2 Ｗ／ｃｍ2 以上のパワ
ー密度を有するＣＯ2 レーザ光７を連続的にあるいは断
続的に照射すると、これらの溶着部５はＣＯ2 レーザ光
７を効率良く吸収し、瞬時にして融点（１４００〜２０
００℃）まで温度上昇して溶融し、光ファイバ４と光部
品２の端面２ａが一体化して永久接続される。尚、この
溶着部５における機械強度はその溶融量が多いほど向上
することになる。As shown in FIG. 1 , first, the end 4a of the optical fiber 4 is butted against the end surface 2a of the optical component 2 soldered to the upper surface of the mount 1. Next, in this state, Zn is applied to the butted portion (welded portion 5) from above.
When the CO 2 laser beam 7 having a power density of 10 2 W / cm 2 or more focused by the Se lens 8 is continuously or intermittently irradiated, these welded portions 5 efficiently emit the CO 2 laser beam 7. Absorb and instantaneously melt (1400-20
The optical fiber 4 and the end face 2a of the optical component 2 are integrated and permanently connected. It should be noted that the mechanical strength of the welded portion 5 increases as the amount of fusion increases.
【００１４】この時、光ファイバ４と光部品端面２ａの
融着部５に達したＣＯ2 レーザ光７の熱は、この融着部
５の下部のマウント１表面に形成された切欠溝６によっ
て、マウント１側へ伝導放散しなくなって融着部５に集
中するため、融着部５における熱分布が均一化され、Ｃ
Ｏ2 レーザ光７が直射し難い融着部５下側においてもそ
の溶融が充分に行われることなり、低損失で高機械強度
の融着が達成される。At this time, the heat of the CO 2 laser beam 7 that has reached the fusion portion 5 between the optical fiber 4 and the optical component end face 2a is dissipated by the notch groove 6 formed on the surface of the mount 1 below the fusion portion 5. Since the heat does not radiate to the mount 1 and concentrates on the fusion portion 5, the heat distribution in the fusion portion 5 is uniform, and C
Even under the fusion portion 5 where the O 2 laser beam 7 is hard to directly radiate, the fusion is sufficiently performed, and fusion with low loss and high mechanical strength is achieved.
【００１５】そして、この接続損失は０．６ｄＢであ
り、また、この融着接続部５の引張強度を測定したとこ
ろ、引張荷重６００〜９００ｇとなり、従来のマウント
を用いた融着接続部よりも２〜３倍の強度が得られた。The connection loss is 0.6 dB, and the tensile strength of the fusion spliced portion 5 is measured. As a result, the tensile load is 600 to 900 g, which is larger than that of the fusion spliced portion using the conventional mount. 2-3 times the strength was obtained.
【００１６】尚、図２は本発明の変形実施例を示したも
のである。FIG. 2 shows a modified embodiment of the present invention.
【００１７】図示するように、本実施例は切欠溝６ａの
形状を、光部品端面２ａ側を底辺とする半径４ｍｍ程度
の半円形にしたものであり、上記実施例と同様に、融着
接続部５側からマウント１側への熱放散を抑制すること
ができ、高強度で低損失の融着接続部５が得られる。し
かも、本実施例は上記実施例に比較して、熱拡散抑制効
果は多少劣るものの、マウント１と光部品２との密着性
が向上するため、耐衝撃性が向上し、１５００Ｇの衝撃
に耐えられる。また、本発明の切欠溝は、融着接続部側
からマウント側への熱の放散を防止するためのものであ
るため、切欠溝の形状及び大きさは、上記実施例に限定
されるものではなく、長溝形状や多角形状など必要に応
じて変化させても良い。As shown in the drawing, in this embodiment, the shape of the cutout groove 6a is a semicircle having a radius of about 4 mm with the bottom side of the optical component end face 2a side. Heat dissipation from the part 5 side to the mount 1 side can be suppressed, and a high-strength, low-loss fusion spliced part 5 can be obtained. Moreover, in this embodiment, although the heat diffusion suppressing effect is somewhat inferior to the above embodiment, the adhesion between the mount 1 and the optical component 2 is improved, so that the shock resistance is improved and the shock resistance of 1500 G is endured. Can be In addition, since the notch groove of the present invention is for preventing heat from dissipating from the fusion splicing part side to the mount side, the shape and size of the notch groove are not limited to those in the above embodiment. Alternatively, the shape may be changed as needed, such as a long groove shape or a polygonal shape.
【００１８】[0018]
【発明の効果】以上要するに本発明によれば、簡単な構
造により、光部品と光ファイバの融着部の溶融状態の均
一化が達成され、低損失で高強度な融着接続部を得るこ
とができるといった優れた効果を有する。In summary, according to the present invention, with a simple structure, the fusion state of the fusion part between the optical component and the optical fiber can be made uniform, and a low-loss, high-strength fusion spliced part can be obtained. It has an excellent effect that it can be produced.
【図１】本発明のファイバ融着接続型石英系導波路デバ
イスの一実施例を示す斜視図である。FIG. 1 is a fiber fusion spliced quartz waveguide device of the present invention.
It is a perspective view showing one example of a chair .
【図２】本発明のファイバ融着接続型石英系導波路デバ
イスのマウント部分の変形実施例を示す斜視図である。FIG. 2 is a fiber fusion spliced quartz waveguide device of the present invention.
It is a perspective view showing a modification of a mount part of a chair .
【図３】従来の光ファイバーと光部品の癒着接続状態を
示す概略図である。FIG. 3 is a schematic view showing a conventional fused connection state between an optical fiber and an optical component.
１ マウント ２ 光部品 ２ａ 端面 ４ 光ファイバ ５ 融着部 ６ 切欠溝 ７ ＣＯ2 レーザ光1 mount 2 optical component 2a end face 4 optical fiber 5 fused portion 6 cutout groove 7 CO 2 laser beam
フロントページの続き (56)参考文献 特開 平２−251916（ＪＰ，Ａ) 特開 昭63−163413（ＪＰ，Ａ) 特開 昭63−85509（ＪＰ，Ａ)Continuation of the front page (56) References JP-A-2-251916 (JP, A) JP-A-63-163413 (JP, A) JP-A-63-85509 (JP, A)
Claims (1)
れる光部品がはんだ固定され、当該光部品の端面に、Ｃ
Ｏ2 レーザ光を用いて石英系光ファイバが融着接続され
てなるファイバ融着接続型石英系導波路デバイスにおい
て、上記石英系光ファイバと上記光部品（ただし、その
端面に光ファイバ接続用の突起が形成されているものは
除く）の融着部の下部に位置するマウントの表面に、切
欠溝を形成したことを特徴とするファイバ融着接続型石
英系導波路デバイス。An optical component made of a quartz-based material is fixed on a metal mount by soldering, and C
In a fiber fusion spliced silica-based waveguide device in which a silica-based optical fiber is fusion-spliced using O 2 laser light, the silica-based optical fiber and the optical component (however,
If the projection for optical fiber connection is formed on the end face,
A fiber fusion spliced quartz-based waveguide device, wherein a cutout groove is formed in the surface of the mount located below the fusion spliced part .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3314898A JP2887356B2 (en) | 1991-11-28 | 1991-11-28 | Fiber fusion spliced quartz waveguide device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3314898A JP2887356B2 (en) | 1991-11-28 | 1991-11-28 | Fiber fusion spliced quartz waveguide device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05150133A JPH05150133A (en) | 1993-06-18 |
| JP2887356B2 true JP2887356B2 (en) | 1999-04-26 |
Family
ID=18058967
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3314898A Expired - Lifetime JP2887356B2 (en) | 1991-11-28 | 1991-11-28 | Fiber fusion spliced quartz waveguide device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2887356B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023233474A1 (en) * | 2022-05-30 | 2023-12-07 | 日本電信電話株式会社 | Optical fiber module and manufacturing method therefor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02251916A (en) * | 1989-03-27 | 1990-10-09 | Nippon Telegr & Teleph Corp <Ntt> | Method for connecting quartz-based optical waveguide circuit and optical fiber |
-
1991
- 1991-11-28 JP JP3314898A patent/JP2887356B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05150133A (en) | 1993-06-18 |
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