JP2815822B2 - Liquid crystal panel manufacturing method - Google Patents
Liquid crystal panel manufacturing methodInfo
- Publication number
- JP2815822B2 JP2815822B2 JP14309195A JP14309195A JP2815822B2 JP 2815822 B2 JP2815822 B2 JP 2815822B2 JP 14309195 A JP14309195 A JP 14309195A JP 14309195 A JP14309195 A JP 14309195A JP 2815822 B2 JP2815822 B2 JP 2815822B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- liquid crystal
- sealant
- panel
- crystal panel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
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- Liquid Crystal (AREA)
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【0001】[0001]
【産業上の利用分野】この発明は、液晶パネルの製造方
法に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a liquid crystal panel.
【0002】[0002]
【従来の技術】従来の液晶パネルの製造方法について説
明する。ガラス基板上にトランジスタ素子がマトリクス
状に配置されたTFT(薄膜トランジスタ)基板と、ブ
ラックマトリクスおよびR,G,B画素がマトリクス状
に配置されたCF(カラーフィルタ)基板とに、ポリイ
ミドよりなる配向剤をフレキソ印刷法等により形成した
後、ラビング処理等により配向処理を施す。2. Description of the Related Art A conventional liquid crystal panel manufacturing method will be described. A TFT (thin film transistor) substrate in which transistor elements are arranged in a matrix on a glass substrate, and a CF (color filter) substrate in which a black matrix and R, G, and B pixels are arranged in a matrix, an alignment agent made of polyimide. Is formed by a flexographic printing method or the like, and then subjected to an orientation treatment by a rubbing treatment or the like.
【0003】つぎに、TFT基板およびCF基板のどち
らか一方に、スクリーン印刷法により、エポキシ樹脂等
よりなるシール剤をリング状に形成した後、球状のスペ
ーサを均一に複数個配置する。つぎに、TFT基板とC
F基板を上下対向するように位置合わせ装置上に配置
し、位置合わせを行った後、加圧、貼合わせて空パネル
を作製する。Next, a sealant made of an epoxy resin or the like is formed in a ring shape on one of the TFT substrate and the CF substrate by a screen printing method, and then a plurality of spherical spacers are uniformly arranged. Next, the TFT substrate and C
An F panel is placed on a positioning device so as to face up and down, and after positioning, pressure and bonding are performed to produce an empty panel.
【0004】つぎに、空パネルを位置合わせ装置から取
り出し、均一に加圧しつつ、150℃に保たれたオーブ
ンに1時間程度放置してシール剤の硬化を行い、所定ギ
ャップを形成する。このシール剤の硬化工程時における
空パネルの姿勢(基板姿勢)を図2に示す。図2におい
て、1はTFT基板、2はCF基板、3はシール剤、4
はスペーサである。この図2に示すように、シール剤の
硬化工程時におけるTFT基板1,CF基板2は、重力
方向と垂直な姿勢になっている。[0004] Next, the empty panel is taken out of the positioning device, and is left in an oven maintained at 150 ° C for about 1 hour to cure the sealant while uniformly pressing, thereby forming a predetermined gap. FIG. 2 shows the posture (substrate posture) of the empty panel during the curing step of the sealant. In FIG. 2, 1 is a TFT substrate, 2 is a CF substrate, 3 is a sealant, 4
Is a spacer. As shown in FIG. 2, the TFT substrate 1 and the CF substrate 2 are in a posture perpendicular to the direction of gravity during the curing step of the sealant.
【0005】その後、空パネルに液晶を注入し、注入口
を封止して液晶パネルを得ていた。Thereafter, liquid crystal was injected into the empty panel, and the injection port was sealed to obtain a liquid crystal panel.
【0006】[0006]
【発明が解決しようとする課題】上記従来の製造方法で
は、TFT基板とCF基板を正確に位置合わせした後、
位置合わせの精度を確保しつつシール剤を加熱し硬化す
るが、TFT基板とCF基板とのガラス素材の違いによ
る線膨張率の違いや、基板の自重により貼り合わされた
基板に反りが生じる。この基板の反りにより、TFT基
板とCF基板のトータルピッチに差異が生じ、TFT基
板とCF基板の位置合わせ精度が悪くなったり、ギャッ
プ精度の低下を引き起こし、コントラスト等の表示品質
が劣化するるという問題点があった。In the above-mentioned conventional manufacturing method, after the TFT substrate and the CF substrate are accurately aligned,
The sealant is heated and cured while maintaining the accuracy of the alignment. However, a difference in the coefficient of linear expansion due to the difference in the glass material between the TFT substrate and the CF substrate, and warping of the bonded substrates due to the weight of the substrates occur. Due to the warpage of the substrate, a difference occurs in the total pitch between the TFT substrate and the CF substrate, and the alignment accuracy between the TFT substrate and the CF substrate is deteriorated, the gap accuracy is reduced, and the display quality such as contrast is deteriorated. There was a problem.
【0007】なお、このような問題点を解決するため
に、紫外線硬化型樹脂を使用し、TFT基板とCF基板
を仮固定する方法が考えられている。しかしこの方法
も、仮止め接着剤はパネル端部、すなわち有効画素外に
塗布されるため、基板の反りを防止することはできず、
トータルピッチの差異によって生ずる有効画面内の位置
精度の低下に対しては、有効ではなかった。[0007] In order to solve such a problem, a method of temporarily fixing the TFT substrate and the CF substrate using an ultraviolet curable resin has been considered. However, also in this method, since the temporary fixing adhesive is applied to the edge of the panel, that is, outside the effective pixels, it is not possible to prevent the warpage of the substrate,
It was not effective against a decrease in position accuracy in the effective screen caused by the difference in the total pitch.
【0008】また、シール剤として、紫外線硬化型の樹
脂を使用することも提案されているが、基板との接着性
や液晶への影響を考慮し、紫外線・熱硬化併用型である
ため、硬化時の熱の影響は避けられないものであり、自
重による基板の反りの防止に対しても、有効なものとは
言えなかった。この発明の目的は、シール剤硬化時にお
ける基板の反りに起因する2つの基板の位置合わせ精度
の低下を防止し、ギャップ精度が高く、コントラスト等
の表示品質の優れた液晶パネルの製造方法を提供するこ
とである。It has also been proposed to use an ultraviolet-curable resin as the sealant. However, in consideration of the adhesiveness to the substrate and the effect on the liquid crystal, the resin is a combination of ultraviolet and heat-curable. The influence of heat at the time is inevitable, and it cannot be said that it is effective in preventing the warpage of the substrate due to its own weight. SUMMARY OF THE INVENTION An object of the present invention is to provide a method of manufacturing a liquid crystal panel which prevents a decrease in alignment accuracy of two substrates due to warpage of a substrate during curing of a sealant, has a high gap accuracy, and has excellent display quality such as contrast. It is to be.
【0009】[0009]
【課題を解決するための手段】請求項1記載の液晶パネ
ルの製造方法は、第1の基板と第2の基板とをシール剤
を介して位置合わせして空パネルを作製し、シール剤を
硬化した後、空パネルに液晶を注入する液晶パネルの製
造方法であって、シール剤の硬化は、空パネルの姿勢を
重力方向と平行に保った状態で行うことを特徴とする。According to a first aspect of the present invention, there is provided a method of manufacturing a liquid crystal panel, wherein a first substrate and a second substrate are aligned with each other via a sealant to form an empty panel, and the sealant is applied. A method for manufacturing a liquid crystal panel, in which liquid crystal is injected into an empty panel after being cured, wherein the curing of the sealant is performed while keeping the attitude of the empty panel parallel to the direction of gravity.
【0010】請求項2記載の液晶パネルの製造方法は、
請求項1記載の液晶パネルの製造方法において、シール
剤の硬化時に、空パネル内を真空状態とし、大気圧によ
って加圧するようにしている。請求項3記載の液晶パネ
ルの製造方法は、請求項1記載の液晶パネルの製造方法
において、シール剤の硬化時に、空パネルをプレス機に
より加圧するようにしている。[0010] The method for manufacturing a liquid crystal panel according to claim 2 is characterized in that:
In the method of manufacturing a liquid crystal panel according to the first aspect, when the sealant is cured, the inside of the empty panel is evacuated and pressurized by atmospheric pressure. According to a third aspect of the present invention, in the method for manufacturing a liquid crystal panel according to the first aspect, when the sealant is cured, the empty panel is pressed by a press.
【0011】[0011]
【作用】この発明によれば、第1の基板と第2の基板と
をシール剤を介して位置合わせした後、シール剤を硬化
する際に、空パネルの姿勢を重力方向と平行に保った状
態で行うことにより、基板の自重によって従来生じてい
た基板の反りを防止することができるため、基板の反り
に起因する位置合わせ精度の低下を防止し、有効画素部
のギャップを均一に形成し、コントラスト等の表示品質
の優れた液晶パネルを実現することができる。According to the present invention, after the first substrate and the second substrate are aligned with each other via the sealant, when the sealant is cured, the posture of the empty panel is kept parallel to the direction of gravity. By performing in a state, the warpage of the substrate, which has been conventionally caused by the weight of the substrate, can be prevented, so that a decrease in alignment accuracy due to the warpage of the substrate is prevented, and the gap of the effective pixel portion is formed uniformly. A liquid crystal panel having excellent display quality such as contrast and the like can be realized.
【0012】[0012]
【実施例】以下、この発明の実施例について説明する。 〔第1の実施例〕まず、この発明の第1の実施例の液晶
パネルの製造方法を説明する。ガラス基板上にトランジ
スタ素子がマトリクス状に配置されたTFT基板と、ブ
ラックマトリクスおよびR,G,B画素がマトリクス状
に配置されたCF基板とに、ポリアミック酸のN−メチ
ル2ピロリドン溶液を厚さ800オングストロームにな
るようにフレキソ印刷法より形成する。これらの基板を
190℃,90分加熱しポリイミドの皮膜を得た後、レ
ーヨン製の布にて配向処理を行う。Embodiments of the present invention will be described below. [First Embodiment] First, a method for manufacturing a liquid crystal panel according to a first embodiment of the present invention will be described. A N-methyl-2-pyrrolidone solution of polyamic acid is deposited on a TFT substrate in which transistor elements are arranged in a matrix on a glass substrate, and a CF substrate in which a black matrix and R, G, B pixels are arranged in a matrix. The film is formed by flexographic printing so as to have a thickness of 800 Å. After heating these substrates at 190 ° C. for 90 minutes to obtain a polyimide film, an orientation treatment is performed with a cloth made of rayon.
【0013】つぎに、TFT基板およびCF基板のどち
らか一方に、エポキシ樹脂等よりなるシール剤をスクリ
ーン印刷法によりリング状に形成し、平均粒子径5μm
のガラススペーサを100個/mm2 の密度で分散す
る。この基板にディスペンサにて紫外線硬化型の樹脂か
らなる仮止め接着剤を有効画素エリア外の4箇所に塗布
した。Next, a sealant made of an epoxy resin or the like is formed in a ring shape on one of the TFT substrate and the CF substrate by a screen printing method, and the average particle diameter is 5 μm.
Are dispersed at a density of 100 pieces / mm 2 . A temporary fixing adhesive made of an ultraviolet curable resin was applied to the substrate at four places outside the effective pixel area by a dispenser.
【0014】この後、TFT基板とCF基板とがシール
剤,スペーサを介して対向するように位置合わせ装置に
取付け、正確に位置合わせした後、0.3kg/cm2
の力で加圧しつつ、紫外線を500mJ/cm2 の光量
で照射し、仮止め接着剤を硬化して貼り合わせ、空パネ
ルを作製する。貼り合わせの完了した空パネルを位置合
わせ装置から取出し、真空パック法により空パネル内を
真空状態にして大気圧によって均一に加圧しつつ、空パ
ネルの姿勢(基板姿勢)を重力方向と平行に保ち、15
0℃,60分間加熱することにより、シール剤の硬化を
行い、所定のギャップを形成する。このシール剤の硬化
工程時における空パネルの姿勢(基板姿勢)を図1に示
す。図1において、1はTFT基板、2はCF基板、3
はシール剤、4はスペーサである。この図1に示すよう
に、シール剤の硬化工程時におけるTFT基板1,CF
基板2は、重力方向と平行な姿勢にしている。Thereafter, the TFT substrate and the CF substrate are mounted on a positioning device so as to face each other via a sealant and a spacer, and after accurate positioning, 0.3 kg / cm 2.
While applying pressure, ultraviolet rays are irradiated at a light amount of 500 mJ / cm 2 , and the temporarily-fixed adhesive is cured and bonded to form an empty panel. Take out the empty panel that has been pasted from the alignment device, make the inside of the empty panel vacuum by the vacuum packing method, pressurize it evenly by atmospheric pressure, and keep the posture of the empty panel (substrate posture) parallel to the direction of gravity. , 15
By heating at 0 ° C. for 60 minutes, the sealant is hardened to form a predetermined gap. FIG. 1 shows the posture of the empty panel (substrate posture) during the curing step of the sealant. In FIG. 1, 1 is a TFT substrate, 2 is a CF substrate, 3
Is a sealant, and 4 is a spacer. As shown in FIG. 1, the TFT substrate 1 and CF
The substrate 2 has a posture parallel to the direction of gravity.
【0015】その後、空パネルに液晶を注入し、注入口
を封止して液晶パネルを得る。この実施例の液晶パネル
は、TFT基板とCF基板の位置合わせ精度が、±2μ
m以内であり、面内ギャップも均一であった。また、液
晶注入口を封口した後、偏光板を貼付けて得られた液晶
パネルは、ブラックマトリクス端部より光漏のない、面
内ギャップ精度が±0.2μmとギャップ精度の高い、
コントラストの低下のない、品質の優れた液晶パネルで
あった。Thereafter, liquid crystal is injected into the empty panel, and the injection port is sealed to obtain a liquid crystal panel. The liquid crystal panel of this embodiment has a positioning accuracy of ± 2 μm between the TFT substrate and the CF substrate.
m, and the in-plane gap was uniform. In addition, after sealing the liquid crystal injection port, the liquid crystal panel obtained by pasting a polarizing plate has no light leakage from the black matrix end, the in-plane gap accuracy is ± 0.2 μm and the gap accuracy is high,
The liquid crystal panel was excellent in quality without a decrease in contrast.
【0016】以上のようにこの実施例によれば、TFT
基板とCF基板の位置合わせを正確に行った後、シール
剤を硬化する際に、空パネルの姿勢を重力方向と平行に
保った状態で行うことにより、TFT基板とCF基板の
自重による基板の反りを防止し、位置合わせ装置によっ
て得られたTFT基板とCF基板の位置合わせ精度をシ
ール硬化工程後も確保することができ、有効画素部のギ
ャップを均一に形成することが可能となり、シール剤の
硬化時の収縮、基板の反りや熱膨張による応力等の影響
も緩和し、さらに位置合わせ精度の高いパネルの製造が
可能であり、色むら等の問題の無い、またコントラスト
の低下のない、品質の優れた液晶パネルを得ることがで
きる。As described above, according to this embodiment, the TFT
After accurately aligning the substrate and the CF substrate, when the sealant is cured, the position of the empty panel is kept parallel to the direction of gravity when the sealing panel is cured. It is possible to prevent warpage and ensure the alignment accuracy of the TFT substrate and the CF substrate obtained by the alignment device even after the seal hardening process, and it is possible to uniformly form a gap in the effective pixel portion, and to use the sealant. Shrinkage during curing, the effects of stress due to substrate warpage and thermal expansion, etc. are alleviated, making it possible to manufacture panels with high alignment accuracy, without problems such as color unevenness, and without lowering contrast. A liquid crystal panel having excellent quality can be obtained.
【0017】〔第2の実施例〕つぎに、この発明の第2
の実施例の液晶パネルの製造方法を説明する。TFT基
板とCF基板とを紫外線硬化型の樹脂からなる仮止め接
着剤で貼り合わせるまでは、第1の実施例と同様であ
る。貼り合わせの完了した空パネルを位置合わせ装置か
ら取出し、プレス法により空パネルをプレス機で均一に
加圧しつつ、図1に示すように、空パネルの姿勢(基板
姿勢)を重力方向と平行に保ち、150℃,60分間加
熱することにより、シール剤の硬化を行い、所定のギャ
ップを形成する。その後、空パネルに液晶を注入し、注
入口を封止して液晶パネルを得る。Second Embodiment Next, a second embodiment of the present invention will be described.
The manufacturing method of the liquid crystal panel of the embodiment will be described. The process is the same as that of the first embodiment until the TFT substrate and the CF substrate are bonded with a temporary fixing adhesive made of an ultraviolet curing resin. The empty panel on which the bonding is completed is taken out of the positioning device, and the empty panel is pressed uniformly by a press by a pressing method, and as shown in FIG. 1, the posture of the empty panel (substrate posture) is made parallel to the direction of gravity. The sealing agent is cured by heating while keeping the temperature at 150 ° C. for 60 minutes to form a predetermined gap. Thereafter, liquid crystal is injected into the empty panel, and the injection port is sealed to obtain a liquid crystal panel.
【0018】この実施例の液晶パネルは、TFT基板と
CF基板の位置合わせ精度が、±2μm以内であり、面
内ギャップも均一であった。また、液晶注入口を封口し
た後、偏光板を貼付けて得られた液晶パネルは、ブラッ
クマトリクス端部より光漏のない、面内ギャップ精度が
±0.2μmとギャップ精度の高い、コントラストの低
下のない、品質の優れた液晶パネルであった。In the liquid crystal panel of this embodiment, the alignment accuracy between the TFT substrate and the CF substrate was within ± 2 μm, and the in-plane gap was uniform. In addition, the liquid crystal panel obtained by sealing the liquid crystal injection port and pasting the polarizing plate has no light leakage from the edge of the black matrix, an in-plane gap accuracy of ± 0.2 μm, a high gap accuracy, and a decrease in contrast. There was no liquid crystal panel of excellent quality.
【0019】以上のようにこの実施例によれば、第1の
実施例同様、シール剤の硬化時に空パネルの姿勢(基板
姿勢)を重力方向と平行に保つことにより、第1の実施
例と同様の効果が得られる。 〔比較例〕つぎに、比較例を説明しておく。As described above, according to this embodiment, as in the first embodiment, the posture of the empty panel (substrate posture) is kept parallel to the direction of gravity when the sealant is hardened, thereby achieving a difference from the first embodiment. Similar effects can be obtained. Comparative Example Next, a comparative example will be described.
【0020】TFT基板とCF基板とを紫外線硬化型の
樹脂からなる仮止め接着剤で貼り合わせるまでは、第1
の実施例と同様である。貼り合わせの完了した空パネル
を位置合わせ装置から取出し、真空パック法により空パ
ネルを均一に加圧しつつ、図2に示す従来例と同様、空
パネルの姿勢(基板姿勢)を重力方向と垂直に保ち、1
50℃,60分間加熱することにより、シール剤の硬化
を行い、所定のギャップを形成する。その後、空パネル
に液晶を注入し、注入口を封止して液晶パネルを得る。Until the TFT substrate and the CF substrate are bonded together with a temporary fixing adhesive made of an ultraviolet curing resin, the first
This is the same as the embodiment. The bonded empty panel is taken out of the alignment device, and while uniformly pressing the empty panel by the vacuum packing method, the attitude of the empty panel (substrate attitude) is perpendicular to the direction of gravity as in the conventional example shown in FIG. Keep 1
By heating at 50 ° C. for 60 minutes, the sealant is hardened to form a predetermined gap. Thereafter, liquid crystal is injected into the empty panel, and the injection port is sealed to obtain a liquid crystal panel.
【0021】この比較例によるTFT基板とCF基板の
位置合わせ精度は、パネルの自重によりパネルの反りが
生じたため、±10μm以上であった。また、液晶注入
口を封口した後、偏光板を貼付けて得られた液晶パネル
は、ブラックマトリクス端部より光漏れを生じ、面内ギ
ャップ精度が±0.6μmとギャップ精度の低い、コン
トラストの低下した表示品質に劣る液晶パネルであっ
た。The alignment accuracy between the TFT substrate and the CF substrate according to this comparative example was ± 10 μm or more because the panel was warped by its own weight. In addition, the liquid crystal panel obtained by attaching the polarizing plate after sealing the liquid crystal injection port causes light leakage from the end of the black matrix, the in-plane gap accuracy is ± 0.6 μm, the gap accuracy is low, and the contrast is lowered. The liquid crystal panel was inferior in display quality.
【0022】この比較例より、シール剤の硬化時に空パ
ネルの姿勢(基板姿勢)を重力方向と平行に保つことに
より、上記実施例の効果が得られたことは明白である。From this comparative example, it is clear that the effect of the above embodiment was obtained by keeping the posture of the empty panel (substrate posture) parallel to the direction of gravity when the sealant was cured.
【0023】[0023]
【発明の効果】この発明の液晶パネルの製造方法は、第
1の基板と第2の基板とをシール剤を介して位置合わせ
した後、シール剤を硬化する際に、空パネルの姿勢を重
力方向と平行に保った状態で行うことにより、基板の自
重によって従来生じていた基板の反りを防止することが
できるため、基板の反りに起因する位置合わせ精度の低
下を防止し、有効画素部のギャップを均一に形成し、コ
ントラスト等の表示品質の優れた液晶パネルを実現する
ことができる。According to the method of manufacturing a liquid crystal panel of the present invention, when the first substrate and the second substrate are aligned with each other via the sealant and the sealant is cured, the posture of the empty panel is changed by gravity. By keeping the substrate parallel to the direction, the warpage of the substrate, which has conventionally occurred due to the weight of the substrate, can be prevented. A liquid crystal panel having a uniform gap and excellent display quality such as contrast can be realized.
【図1】この発明の実施例におけるシール剤の硬化工程
時における空パネルの姿勢(基板姿勢)を示す図であ
る。FIG. 1 is a view showing a posture (substrate posture) of an empty panel during a curing step of a sealant in an embodiment of the present invention.
【図2】従来例におけるシール剤の硬化工程時における
空パネルの姿勢(基板姿勢)を示す図である。FIG. 2 is a view showing a posture (substrate posture) of an empty panel during a curing step of a sealant in a conventional example.
1 TFT基板 2 CF基板 3 シール剤 4 スペーサ Reference Signs List 1 TFT substrate 2 CF substrate 3 Sealant 4 Spacer
Claims (3)
介して位置合わせして空パネルを作製し、前記シール剤
を硬化した後、前記空パネルに液晶を注入する液晶パネ
ルの製造方法であって、 前記シール剤の硬化は、前記空パネルの姿勢を重力方向
と平行に保った状態で行うことを特徴とする液晶パネル
の製造方法。1. A liquid crystal panel according to claim 1, wherein the first substrate and the second substrate are aligned with each other via a sealant to form an empty panel, and after the sealant is cured, liquid crystal is injected into the empty panel. A method of manufacturing a liquid crystal panel, wherein the curing of the sealant is performed while keeping the position of the empty panel parallel to the direction of gravity.
状態とし、大気圧によって加圧する請求項1記載の液晶
パネルの製造方法。2. The method for manufacturing a liquid crystal panel according to claim 1, wherein when the sealant is cured, the inside of the empty panel is evacuated and pressurized by atmospheric pressure.
機により加圧する請求項1記載の液晶パネルの製造方
法。3. The method for manufacturing a liquid crystal panel according to claim 1, wherein the empty panel is pressurized by a press when the sealant is cured.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14309195A JP2815822B2 (en) | 1995-06-09 | 1995-06-09 | Liquid crystal panel manufacturing method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14309195A JP2815822B2 (en) | 1995-06-09 | 1995-06-09 | Liquid crystal panel manufacturing method |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08334772A JPH08334772A (en) | 1996-12-17 |
JP2815822B2 true JP2815822B2 (en) | 1998-10-27 |
Family
ID=15330709
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14309195A Expired - Fee Related JP2815822B2 (en) | 1995-06-09 | 1995-06-09 | Liquid crystal panel manufacturing method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2815822B2 (en) |
-
1995
- 1995-06-09 JP JP14309195A patent/JP2815822B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH08334772A (en) | 1996-12-17 |
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