JP2760858B2 - Cryostat for superconducting device - Google Patents
Cryostat for superconducting deviceInfo
- Publication number
- JP2760858B2 JP2760858B2 JP1217463A JP21746389A JP2760858B2 JP 2760858 B2 JP2760858 B2 JP 2760858B2 JP 1217463 A JP1217463 A JP 1217463A JP 21746389 A JP21746389 A JP 21746389A JP 2760858 B2 JP2760858 B2 JP 2760858B2
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- tank
- liquid helium
- pressure
- helium
- liquid
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Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、液体ヘリウムにより被冷却体を冷却する超
電導装置に係り、特に、超電導コイルの冷却に好適なク
ライオスタツトに関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a superconducting device for cooling an object to be cooled with liquid helium, and more particularly to a cryostat suitable for cooling a superconducting coil.
液体ヘリウムは、通常の大気圧下の条件では、4.2Kの
温度にあるが、たとえば、減圧ポンプ等で圧力を大気圧
より徐々に低くしていくと、液体ヘリウムの蒸発が盛ん
に発生し、その増発潜熱により液体ヘリウムの温度は4.
2Kより下がる。その温度がラムダ温度（約2.17K）以下
になると、液体ヘリウムは、粘性がなくなり、優れた熱
除去能力を持つ超流動ヘリウム状態になる。この超流動
ヘリウムは、特に、通常の超電導マグネツトの発生磁場
よりも強力な磁場が必要な物性値測定用の高磁界超電導
マグネツトの冷媒として利用されてきた。その生成法と
して、特開昭63−224269号公報に、大気圧よりも減圧さ
れた状態にある超流動ヘリウムの生成装置について記載
されている。すなわち、容器内の超流動ヘリウム上方に
挿入された気液分離器付きの液体ヘリウム供給管の開口
部に膨張弁を取り付け、容器内の気体ヘリウムを排気管
を通して減圧ポンプにて容器外部へ排気して超流動ヘリ
ウムを連続して生成する。Liquid helium is at a temperature of 4.2 K under normal atmospheric pressure conditions.For example, if the pressure is gradually lowered from the atmospheric pressure by a pressure reducing pump or the like, the evaporation of liquid helium occurs actively, The temperature of liquid helium is 4.
Drops below 2K. When the temperature drops below the lambda temperature (about 2.17K), the liquid helium becomes less viscous and enters a superfluid helium state with excellent heat removal capability. This superfluid helium has been particularly used as a refrigerant of a high-field superconducting magnet for measuring physical properties that requires a magnetic field stronger than the magnetic field generated by a normal superconducting magnet. As a production method, Japanese Patent Application Laid-Open No. 63-224269 describes an apparatus for producing superfluid helium at a pressure lower than the atmospheric pressure. That is, an expansion valve is attached to the opening of the liquid helium supply pipe with a gas-liquid separator inserted above the superfluid helium in the vessel, and the gas helium in the vessel is exhausted to the outside of the vessel by the decompression pump through the exhaust pipe. To produce superfluid helium continuously.
しかしながら、上記従来技術は、大気圧よりも減圧さ
れた超流動ヘリウムを生成する装置においては、この超
流動ヘリウムの圧力又は温度及び液位を所定の値に設
点、保持する点について配慮がなされておらず、圧力又
は温度及び液位が変動することによる超流動ヘリウムの
熱除去能力及び超電導マグネツト自身の臨界磁場及び電
流が大きく変動し、安定した超電導マグネツトの運転が
出来ないという問題があつた。However, in the above prior art, in a device for generating superfluid helium at a pressure lower than the atmospheric pressure, consideration is given to setting and maintaining the pressure, temperature, and liquid level of the superfluid helium at predetermined values. However, the heat removal ability of superfluid helium and the critical magnetic field and current of the superconducting magnet itself fluctuate greatly due to fluctuations in pressure, temperature, and liquid level, making it impossible to operate a stable superconducting magnet. .
本発明は、超電導マグネツトの冷媒である液体ヘリウ
ムの圧力を大気圧から大気圧以下の所定の値に設定保持
し、かつ、その液位も所定値に設定保持することにより
安定して動作する超電導マグネツトを提供することを目
的としており、さらに超電導マグネツトの冷媒として、
通常の液体ヘリウムでも超流動ヘリウムでも使用できる
大型のクライオスタツトを提供することを目的とする。The present invention relates to a superconducting superconducting magnet that operates stably by setting the pressure of liquid helium, which is the refrigerant of the superconducting magnet, from an atmospheric pressure to a predetermined value equal to or lower than the atmospheric pressure, and also setting and holding the liquid level at a predetermined value. It aims to provide magnets, and as a refrigerant for superconducting magnets,
It is an object of the present invention to provide a large-sized cryostat that can be used with either ordinary liquid helium or superfluid helium.
上記目的は、液体ヘリウムにより冷却される被冷却体
を有し、蒸発したヘリウムガスを外部へ排気する排気管
を有する密閉された第１槽と、外部から供給される液体
ヘリウムを貯留する第２槽と、前記第２槽の液体ヘリウ
ムを第１槽へと導く液体ヘリウム供給管と、前記液体ヘ
リウム供給管中を流れる液体ヘリウムを膨張させ、か
つ、流量を制御できる機能を有する膨張弁と、前記排気
管に取りつけた前記第１槽のヘリウムガスを排気し、前
記第１槽の液体ヘリウムを前記第２槽の液体ヘリウムの
圧力以下に減圧する減圧装置と、前記第１槽内圧力と前
記第２槽内圧力がほぼ等しいときに前記減圧装置を介す
ことなしに前記排気管を流れるヘリウムガスを外部へ放
出し得る開閉弁を有したバイパス配管と、前記膨張弁の
開度及び前記減圧装置の排気速度を、前記第１槽の液体
ヘリウムの液位を前記第１槽内の所定の位置に設定、保
持し、かつ、前記第１槽の液体ヘリウムの圧力又は温度
を前記第２槽の液体ヘリウムの圧力又は温度以下の所定
の値に設定保持するように制御する制御装置を設けるこ
とにより達成される。The object is to provide a sealed first tank having an object to be cooled by liquid helium and having an exhaust pipe for exhausting evaporated helium gas to the outside, and a second tank for storing liquid helium supplied from outside. A tank, a liquid helium supply pipe that guides liquid helium in the second tank to the first tank, an expansion valve having a function of expanding liquid helium flowing in the liquid helium supply pipe and controlling a flow rate, A pressure reducing device that exhausts the helium gas in the first tank attached to the exhaust pipe and reduces the pressure of the liquid helium in the first tank to a pressure equal to or lower than the pressure of the liquid helium in the second tank; A bypass pipe having an on-off valve capable of discharging helium gas flowing through the exhaust pipe to the outside without passing through the pressure reducing device when the pressure in the second tank is substantially equal; an opening degree of the expansion valve and the pressure reduction; apparatus The pumping speed is set and maintained at the liquid helium level in the first tank at a predetermined position in the first tank, and the pressure or temperature of the liquid helium in the first tank is set in the liquid in the second tank. This is achieved by providing a control device for controlling the helium pressure to a predetermined value equal to or lower than the helium pressure or temperature.
〔作用〕 前記第１及び２槽は、液体ヘリウムを貯留するが、前
記第１槽は、被冷却体を有し、その液体ヘリウムは、状
況に応じて前記減圧装置及び前記バイパス配管の開閉弁
により、前記第２槽の圧力又はそれ以下に減圧された状
態に保持される。第２槽は、外部から供給された液体ヘ
リウムを一時貯留するためのもので、二相状態で供給さ
れる液体ヘリウムの気液分離も行う。気液分離された液
体ヘリウムは、前記膨張弁において、前記第１槽内の圧
力が前記第２槽の圧力とほぼ等しいときには、流量調節
をされた後に第１槽に供給され、前記第１槽内の圧力が
前記第２槽の圧力よりも減圧された状態にあるときに
は、流量調節及び等エンタルピ膨張をした後に第１槽に
供給される。[Operation] The first and second tanks store liquid helium, and the first tank has a body to be cooled, and the liquid helium is opened and closed by the decompression device and the bypass pipe depending on the situation. Thus, the pressure in the second tank is maintained at or below the pressure. The second tank is for temporarily storing liquid helium supplied from the outside, and also performs gas-liquid separation of liquid helium supplied in a two-phase state. In the expansion valve, when the pressure in the first tank is substantially equal to the pressure in the second tank, the liquid helium subjected to gas-liquid separation is supplied to the first tank after the flow rate is adjusted, and is supplied to the first tank. When the internal pressure is lower than the pressure in the second tank, it is supplied to the first tank after flow rate adjustment and isenthalpy expansion.
第１槽の液体ヘリウムの圧力又は温度及び液位は、前
記膨張弁の開度及び減圧装置の排気速度を制御する制御
装置によつて所定の値になるように連続して調節するよ
うにする。前記排気速度の調節は、第１槽の液体ヘリウ
ムがほぼ飽和状態にあるため、圧力が温度を制御装置の
入力対象とすればよい。The pressure or temperature and the liquid level of the liquid helium in the first tank are continuously adjusted to predetermined values by a control device that controls the opening degree of the expansion valve and the exhaust speed of the pressure reducing device. . The adjustment of the pumping speed may be performed by setting the pressure and the temperature as the input objects of the control device since the liquid helium in the first tank is almost saturated.
以下、本発明の一実施例を第１図により説明する。第
１図は、本発明を適用したクライオスタツトの概念構造
図である。Hereinafter, an embodiment of the present invention will be described with reference to FIG. FIG. 1 is a conceptual structural diagram of a cryostat to which the present invention is applied.
本発明の被冷却体である超電導マグネツト１は、大気
圧又は大気圧より減圧された状態にある液体ヘリウム２
により浸漬冷却する。液体ヘリウム２は真空断熱された
第１槽内に満され、この槽内で蒸発したヘリウムガスを
外部へ排気する排気管４を介して室温部に設置され排気
管４出口部に吸込口を持つ減圧装置５により大気圧以下
に減圧保持する。なお、このときにはバイパス配管６に
設置された開閉弁７は閉じておく。減圧装置５により排
気されたヘリウムガスはヘリウムガス回収系へと送る。
この減圧装置５としては、吸込圧力が約1Torr以上で大
きな排気速度を持つ真空ポンプ例えば、メカニカルブー
スタポンプ又はロータリポンプ等を用いるとよい。第１
槽３の液体ヘリウム２を大気圧以下に減圧しないとき
は、減圧装置５を動作せず、バイパス配管６に設置され
た開閉弁７を開放し、ヘリウムガスが減圧装置５を介す
ることなくヘリウムガス回収系に至るようにする。The superconducting magnet 1, which is the object to be cooled according to the present invention, is a liquid helium 2 which is at atmospheric pressure or at a pressure reduced from atmospheric pressure.
Immersion cooling. The liquid helium 2 is filled in a vacuum-insulated first tank, and is installed at a room temperature through an exhaust pipe 4 for exhausting helium gas evaporated in the tank to the outside, and has a suction port at an outlet of the exhaust pipe 4. The pressure is kept at a pressure lower than the atmospheric pressure by the pressure reducing device 5. At this time, the on-off valve 7 installed in the bypass pipe 6 is closed. The helium gas exhausted by the pressure reducing device 5 is sent to a helium gas recovery system.
As the pressure reducing device 5, a vacuum pump having a suction pressure of about 1 Torr or more and having a large pumping speed, for example, a mechanical booster pump or a rotary pump may be used. First
When the pressure of the liquid helium 2 in the tank 3 is not reduced to the atmospheric pressure or less, the pressure reducing device 5 is not operated, the opening / closing valve 7 provided in the bypass pipe 6 is opened, and the helium gas flows without passing through the pressure reducing device 5. Make it to the collection system.
第１槽３への輻射侵入熱は、第２槽８によつて冷却保
持された輻射シールド９によつて囲むようにし、極力小
さくなるようにする。できれば、排気管４の室温部から
第１槽３への輻射侵入熱も、排気管４の排気コンダクタ
ンスの減少を最小限にする形で排気管４の内部に輻射シ
ールドを設けるとよい。第１槽３への液体ヘリウムの供
給は、膨張弁10aを有し、第１槽３と第２槽８の液体ヘ
リウム部を連通する液体ヘリウム供給配管10bにより行
われる。なお、膨張弁10aをバイパスするこれより流路
径の大きい弁を付加してもかまわない。Radiation penetrating heat into the first tank 3 is surrounded by a radiation shield 9 cooled and held by the second tank 8 so as to be minimized. If possible, it is preferable to provide a radiation shield inside the exhaust pipe 4 in such a manner that the heat radiated from the room temperature portion of the exhaust pipe 4 into the first tank 3 minimizes the decrease in the exhaust conductance of the exhaust pipe 4. The supply of liquid helium to the first tank 3 is performed by a liquid helium supply pipe 10b having an expansion valve 10a and communicating the liquid helium portion of the first tank 3 with the liquid helium portion of the second tank 8. In addition, a valve having a larger flow path diameter than the expansion valve that bypasses the expansion valve 10a may be added.
第１槽３へ供給される第２槽の液体ヘリウム11は、膨
張弁10aにおいて、第１槽３の圧力と第２槽８の圧力が
ほぼ等しいときには、流量調節のみ行い、第１槽３の圧
力が第２槽８の圧力よりも低いときには、流量調整と等
エンタルピ膨張を行い、第１槽３へと供給する。第２槽
８の液体ヘリウム11は、液体ヘリウム供給配管12を介し
て外部のヘリウム冷凍機又は液体ヘリウムデユワより供
給する。When the pressure in the first tank 3 and the pressure in the second tank 8 are almost equal to each other in the expansion valve 10a, only the flow rate of the liquid helium 11 in the second tank supplied to the first tank 3 is adjusted. When the pressure is lower than the pressure in the second tank 8, flow control and isenthalpy expansion are performed, and the pressure is supplied to the first tank 3. The liquid helium 11 in the second tank 8 is supplied from an external helium refrigerator or liquid helium dewar via a liquid helium supply pipe 12.
第２槽８の液体ヘリウム11の蒸発したヘリウムガス
は、超電導マグネツト１に電流を送るパワーリード（室
温部と第２槽８の間）13の冷却流路を形成するヘリウム
ガス排気管14を介してヘリウムガス回収系へと送られ
る。パワーリード13は、超電導マグネツト１に電気的に
接続されたパワーリード（第２槽と第１槽の間）15と、
電気伝導性の良好な応力緩和機能を有するパワーリード
16により電気的に接続する。The helium gas evaporated from the liquid helium 11 in the second tank 8 passes through a helium gas exhaust pipe 14 which forms a cooling passage for a power lead (between the room temperature part and the second tank 8) 13 for sending a current to the superconducting magnet 1. To the helium gas recovery system. The power lead 13 includes a power lead (between the second tank and the first tank) 15 electrically connected to the superconducting magnet 1,
Power lead with good electrical conductivity and stress relaxation function
16 for electrical connection.
パワーリード16は、パワーリード13及び15で熱収縮に
起因する熱応力を全て吸収する。その材料としては、銅
又はアルミ等でもよいが、NbTiなどの超電導導体を用い
れば、ジユール発熱を押えることができ、第２槽８の液
体ヘリウム11の蒸発を低減することができる。またパワ
ーリード15にも、安定化材を備えた超電導導体を用いれ
ば、同様な理由で液体ヘリウム２及び11の蒸発を低減す
ることができる。ただし、その設計に当つては、クエン
チが生じてもその最大上昇温度が超電導体の臨界温度を
越えないように液体ヘリウム２及び11による伝導冷却を
行う一方、第２槽から第１槽への熱伝導による熱侵入を
極力抑えるように配慮する必要がある。The power lead 16 absorbs all thermal stresses caused by thermal contraction in the power leads 13 and 15. As a material thereof, copper or aluminum may be used. However, when a superconducting conductor such as NbTi is used, it is possible to suppress the heat generated by the joule, and to reduce the evaporation of the liquid helium 11 in the second tank 8. If a superconducting conductor including a stabilizing material is used for the power lead 15, the evaporation of the liquid helium 2 and 11 can be reduced for the same reason. However, in the design, conduction cooling with liquid helium 2 and 11 is performed so that the maximum rise temperature does not exceed the critical temperature of the superconductor even if quench occurs, while the second tank is cooled from the first tank to the first tank. Care must be taken to minimize heat intrusion due to heat conduction.
液体窒素槽17は液体窒素18を満し、輻射シールド19を
液体窒素温度レベルに保つ。この輻射シールド19は、室
温にある真空容器20から第２槽８及び液体ヘリウム温度
レベルにある輻射シールド19への輻射侵入熱を防ぐ。真
空容器20は、内部を高真空状態に保つことにより、第１
槽3,第２槽８並びに液体窒素槽17等を断熱状態にする。
なお、輻射シールド９及び19、第２槽８並びに液体窒素
槽17外皮を積層断熱材で多重に覆うことにより、更に高
い断熱状態を保持することができる。The liquid nitrogen bath 17 is filled with liquid nitrogen 18 and keeps the radiation shield 19 at liquid nitrogen temperature level. The radiation shield 19 prevents radiation from entering the second vessel 8 and the radiation shield 19 at the liquid helium temperature level from the vacuum vessel 20 at room temperature. The vacuum vessel 20 is provided with a first vacuum by maintaining the inside in a high vacuum state.
The tank 3, the second tank 8, the liquid nitrogen tank 17 and the like are insulated.
In addition, by further covering the radiation shields 9 and 19, the second tank 8, and the outer skin of the liquid nitrogen tank 17 with the laminated heat insulating material, a higher heat insulation state can be maintained.
第２図は、本発明の他の実施例を示したもので第１図
とは、第２槽８が第１槽内部にある点と制御装置を示し
た点とが異なつている。第２槽８は、第１槽３に貯留し
た液体ヘリウム２の蒸発したヘリウムガスに対して、ヘ
リウムガスの顕熱が小さいため特別な断熱措置は施こす
必要はなく、むしろ、ヘリウムガスが第２槽８の液体ヘ
リウムの温度以下のため、第２槽８がそのヘリウムガス
により冷却されたとしても、結果として、第２槽８の液
体ヘリウム11の蒸発量を低減することになる。その冷却
量は小さいため、パワーリード13からの侵入熱量を考慮
すると、第２槽８の液体ヘリウム11の温度が4.2K以下に
下がり第２槽内圧力が大気圧以下になり、空気の第２槽
８への侵入を招く心配はない。FIG. 2 shows another embodiment of the present invention, which differs from FIG. 1 in that the second tank 8 is inside the first tank and that the control device is shown. The second tank 8 does not require any special adiabatic measures since the helium gas has a small sensible heat with respect to the evaporated helium gas of the liquid helium 2 stored in the first tank 3. Since the temperature of the liquid helium in the second tank 8 is lower than the temperature of the liquid helium, the evaporation amount of the liquid helium 11 in the second tank 8 is reduced even if the second tank 8 is cooled by the helium gas. Since the amount of cooling is small, the temperature of the liquid helium 11 in the second tank 8 drops to 4.2 K or less and the pressure in the second tank drops to atmospheric pressure or less, considering the amount of heat entering from the power lead 13. There is no fear of intrusion into the tank 8.
この実施例においては、全体の構造が従来のクライオ
スタツト構造と酷似しており、組立等は、従来と同様な
手法で行うことが可能である。さらに、従来より用いて
いた液体ヘリウムクライオスタツトがあれば、本発明を
適応する場合にそのまま流用することもできる。なお、
サーマルアンカ2/9は、第１槽３と第２槽８を熱的に接
触し、第１槽３の壁面の熱伝導による室温からの液体ヘ
リウム２への侵入熱を低減する。輻射シールド21bは、
室温部から第１及び第２槽３及び８への輻射侵入熱量を
低減する。In this embodiment, the entire structure is very similar to the conventional cryostat structure, and the assembly and the like can be performed by the same method as the conventional one. Further, if there is a liquid helium cryostat conventionally used, it can be used as it is when the present invention is applied. In addition,
The thermal anchor 2/9 makes thermal contact between the first tank 3 and the second tank 8, and reduces heat entering the liquid helium 2 from room temperature due to heat conduction of the wall surface of the first tank 3. The radiation shield 21b
The amount of heat radiated from the room temperature to the first and second tanks 3 and 8 is reduced.
第２図において、31は第２槽内圧力センサ、32は第２
槽内液体ヘリウムの液位センサ、33は温度センサ、34は
液位発信器、35は液位発信器34の信号に基づき、所定の
液位を保持するよう膨張弁10aの開度を制御する制御装
置、36は圧力発信器、37は圧力発信器36の信号に基づき
所定の圧力になるよう減圧装置５の回転数又は内蔵弁開
度を制御する制御装置である。減圧装置５の制御装置37
は温度センサ33の出力に基づき、設定温度を維持するよ
うに制御してもよい。In FIG. 2, reference numeral 31 denotes a second tank pressure sensor, and 32 denotes a second tank pressure sensor.
The liquid level sensor of the liquid helium in the tank, 33 is a temperature sensor, 34 is a liquid level transmitter, 35 is based on the signal of the liquid level transmitter 34, and controls the opening of the expansion valve 10a so as to maintain a predetermined liquid level. A control device, 36 is a pressure transmitter, and 37 is a control device for controlling the rotation speed of the pressure reducing device 5 or the degree of opening of the built-in valve so that a predetermined pressure is obtained based on a signal from the pressure transmitter 36. Control device 37 for pressure reducing device 5
May be controlled based on the output of the temperature sensor 33 to maintain the set temperature.
以上本発明の第1,第２の実施例によれば、以上説明し
たように構成されているので以下に記載されるような効
果を奏する。According to the first and second embodiments of the present invention, since the configuration is as described above, the following effects can be obtained.
液体ヘリウムにより冷却される被冷却体を有し、蒸発
したヘリウムガスを外部へ排気する排気管も有する密閉
された液体ヘリウム容器（第１槽）と外部から供給され
る液体ヘリウムを貯留する容器（第２槽）と、第１槽か
ら第２槽へ液体ヘリウムを供給する膨張弁付きの液体ヘ
リウム供給管と、上記排気管に出口に入口を有する減圧
装置と、この減圧装置をバイパスしヘリウムガスを外部
へ放出し得る開閉弁付きのバイパス配管と上記膨張弁開
度及び減圧装置の排気速度を調節する制御装置とを設け
ることにより、上記第１槽の液体ヘリウムの圧力又は温
度を上記第２槽の圧力及び温度以下の所定の値に設定保
持し、かつ、上記第１槽の液体ヘリウムの液位を所定の
値に設定保持できる。A sealed liquid helium container (first tank) having an object to be cooled by liquid helium, and also having an exhaust pipe for exhausting the evaporated helium gas to the outside, and a container for storing liquid helium supplied from the outside ( A second tank), a liquid helium supply pipe with an expansion valve for supplying liquid helium from the first tank to the second tank, a pressure reducing device having an inlet at an outlet of the exhaust pipe, and a helium gas bypassing the pressure reducing device. By providing a bypass pipe with an on-off valve capable of discharging pressure to the outside and a control device for adjusting the opening degree of the expansion valve and the evacuation speed of the pressure reducing device, thereby controlling the pressure or temperature of the liquid helium in the first tank to the second pressure. The liquid helium level in the first tank can be set and held at a predetermined value equal to or lower than the pressure and temperature of the tank and the liquid level of the liquid helium in the first tank can be set and held.
また、上記第１槽内に上記第２槽を設けた構造にする
ことにより、装置全体の構造を簡単にし、組立を容易に
できる。さらに、従来用いた液体ヘリウム容器を流用し
て本発明を実施できるという利点もある。In addition, by adopting a structure in which the second tank is provided in the first tank, the structure of the entire apparatus can be simplified and assembly can be facilitated. Further, there is an advantage that the present invention can be implemented by diverting a conventionally used liquid helium container.
以上の如く、本発明によれば超電導マグネツトの冷媒
である液体ヘリウムの圧力を大気圧から大気圧以下の所
定の値に設定保持して、かつその液位も所定値に設定保
持可能であり、これによつて超電導マグネツトの安定動
作が達成可能である。As described above, according to the present invention, the pressure of liquid helium, which is a refrigerant of a superconducting magnet, can be set and held at a predetermined value from atmospheric pressure to atmospheric pressure, and the liquid level can be set and held at a predetermined value. Thereby, stable operation of the superconducting magnet can be achieved.
第１図，第２図は夫々本発明の実施例に係るクライオス
タツトの概念構造を示す装置断面図である。 １……被冷却体、2,11……液体ヘリウム、３……第１
槽、４……排気管、５……減圧装置、10a……膨張弁、1
0b……液体ヘリウム供給管、9,19……輻射シールド、17
……液体窒素槽、20……真空容器。FIGS. 1 and 2 are sectional views showing the conceptual structure of a cryostat according to an embodiment of the present invention. 1 ... object to be cooled, 2, 11 ... liquid helium, 3 ... first
Vessel, 4 ... exhaust pipe, 5 ... decompression device, 10a ... expansion valve, 1
0b …… Liquid helium supply pipe, 9,19 …… Radiation shield, 17
…… Liquid nitrogen tank, 20 …… Vacuum container.
フロントページの続き (72)発明者 森 英明 茨城県土浦市神立町502番地 株式会社 日立製作所機械研究所内 (72)発明者 尾形 久直 茨城県土浦市神立町502番地 株式会社 日立製作所機械研究所内 (72)発明者 鈴木 史男 茨城県日立市幸町３丁目１番１号 株式 会社日立製作所日立工場内 (56)参考文献 特開 昭63−224269（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) H01L 39/04Continued on front page (72) Inventor Hideaki Mori 502 Kandate-cho, Tsuchiura-shi, Ibaraki Pref.Hitachi, Ltd.Mechanical Research Laboratory Co., Ltd. ) Inventor Fumio Suzuki 3-1-1, Sachimachi, Hitachi City, Ibaraki Pref. Hitachi, Ltd. Hitachi Plant (56) References JP-A-63-224269 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) H01L 39/04
Claims (1)
有し、蒸発したヘリウムガスを外部へ排気する排気管を
有する密閉された第１槽と、外部から供給される液体ヘ
リウムを貯留する第２槽と、前記第２槽の液体ヘリウム
を第１槽へ導く液体ヘリウム供給管と、前記液体ヘリウ
ム供給管中を流れる液体ヘリウムを膨張させ、かつ、流
量を制御できる機能を有する膨張弁と、前記排気管に取
り付けた前記第１槽のヘリウムガスを排気し前記第１槽
の液体ヘリウムを前記第２槽の液体ヘリウムの圧力以下
に減圧する減圧装置と、前記第１槽内圧力と前記第２槽
内圧力がほぼ等しいときに減圧装置を介すことなしに前
記排気管を流れるヘリウムガスを外部へ放出し得る開閉
弁を有したバイパス配管と、前記膨張弁の開度及び前記
減圧装置の排気速度を前記第１槽の液体ヘリウムの液位
を前記第１槽内の所定の位置に設定、保持し、かつ、前
記第１槽の液体ヘリウムの圧力又は温度を前記第２槽の
液体ヘリウムの圧力又は温度以下の所定の値に設定、保
持するように制御する制御装置からなることを特徴とす
る超電導装置用クライオスタツト。1. A closed first tank having an object to be cooled by liquid helium and having an exhaust pipe for exhausting evaporated helium gas to the outside, and a first tank for storing liquid helium supplied from outside. Two tanks, a liquid helium supply pipe that guides liquid helium in the second tank to the first tank, an expansion valve having a function of expanding liquid helium flowing in the liquid helium supply pipe and controlling a flow rate, A decompression device attached to the exhaust pipe for exhausting the helium gas in the first tank and reducing the liquid helium in the first tank to a pressure equal to or lower than the pressure of the liquid helium in the second tank; (2) a bypass pipe having an on-off valve capable of discharging helium gas flowing through the exhaust pipe to the outside without passing through a pressure reducing device when the pressures in the two tanks are substantially equal to each other; Exhaust speed The liquid level of the liquid helium in the first tank is set and maintained at a predetermined position in the first tank, and the pressure or temperature of the liquid helium in the first tank is set to the pressure of the liquid helium in the second tank. Alternatively, a cryostat for a superconducting device comprising a control device for controlling to set and maintain a predetermined value equal to or lower than a temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1217463A JP2760858B2 (en) | 1989-08-25 | 1989-08-25 | Cryostat for superconducting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1217463A JP2760858B2 (en) | 1989-08-25 | 1989-08-25 | Cryostat for superconducting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0382175A JPH0382175A (en) | 1991-04-08 |
| JP2760858B2 true JP2760858B2 (en) | 1998-06-04 |
Family
ID=16704628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1217463A Expired - Fee Related JP2760858B2 (en) | 1989-08-25 | 1989-08-25 | Cryostat for superconducting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2760858B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4837202B2 (en) * | 2001-08-24 | 2011-12-14 | ジャパンスーパーコンダクタテクノロジー株式会社 | NMR superconducting magnet system |
| JP4537270B2 (en) * | 2005-06-23 | 2010-09-01 | 株式会社日立製作所 | Cryostat for superconducting magnet |
| CN104718459A (en) * | 2012-10-11 | 2015-06-17 | 住友电气工业株式会社 | Method for testing cable core for superconducting cable, and cooling container |
| JP7282254B2 (en) * | 2020-03-04 | 2023-05-26 | 三菱電機株式会社 | Superconducting electromagnet device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52116190A (en) * | 1976-03-26 | 1977-09-29 | Hitachi Ltd | Cryostat |
| JPH0797664B2 (en) * | 1987-03-12 | 1995-10-18 | 株式会社日立製作所 | Superfluid helium cooling device |
-
1989
- 1989-08-25 JP JP1217463A patent/JP2760858B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0382175A (en) | 1991-04-08 |
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