JP2759673B2 - Multi-stage reflective electric furnace - Google Patents
Multi-stage reflective electric furnaceInfo
- Publication number
- JP2759673B2 JP2759673B2 JP1064693A JP6469389A JP2759673B2 JP 2759673 B2 JP2759673 B2 JP 2759673B2 JP 1064693 A JP1064693 A JP 1064693A JP 6469389 A JP6469389 A JP 6469389A JP 2759673 B2 JP2759673 B2 JP 2759673B2
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- electric furnace
- heating
- temperature gradient
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Control Of Resistance Heating (AREA)
- Devices For Use In Laboratory Experiments (AREA)
- Furnace Details (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、反射型電気炉に係り、特に被加熱物を移動
し或いは移動せずに任意の温度勾配で加熱し得るコンパ
クトな多段反射型電気炉に関するものである。Description: TECHNICAL FIELD The present invention relates to a reflection type electric furnace, and particularly to a compact multi-stage reflection type capable of heating an object to be heated at an arbitrary temperature gradient without moving or moving the object to be heated. It relates to an electric furnace.
（従来の技術及び解決しようとする課題） 従来、金属発熱体を使用し、加熱部分を分割して夫々
独立に温度制御する方式の、いわゆる多段分割型の電気
炉がある。(Conventional technology and problems to be solved) Conventionally, there is a so-called multi-stage electric furnace in which a metal heating element is used, and a heated portion is divided to independently control the temperature.
しかし、この方式では、ある程度の温度勾配を調節す
ることはできるが、加熱部間の熱伝導と輻射の相互作用
が強く、急激な温度勾配を得ることはもとより、高精度
の任意な温度勾配を得ることは不可能であった。However, with this method, although a certain degree of temperature gradient can be adjusted, the interaction between heat conduction and radiation between the heating parts is strong, and not only a sharp temperature gradient can be obtained, but also a high-precision arbitrary temperature gradient can be obtained. It was impossible to get.
一方、従来、反射型の電気炉として様々なタイプのも
のがある。On the other hand, conventionally, there are various types of electric furnaces of the reflection type.
まず、赤外線集光型の電気炉がある。これは、回転楕
円形の反射鏡の第一焦点に熱源ランプの光源を置き、第
二焦点に集光させて試料を加熱する方式であるが、反射
鏡は著しく大きく、多段型に構成することは不可能であ
るため、任意の温度勾配を得ることはできない。First, there is an infrared concentrating electric furnace. In this method, the light source of the heat source lamp is placed at the first focal point of the spheroidal reflector, and the sample is heated by condensing it at the second focal point. Is impossible, so that an arbitrary temperature gradient cannot be obtained.
また、透明電気炉と呼ばれるもので、透明石英管の内
壁に熱反射面を設け、その内側に金属発熱体を取り付け
た電気炉を２台置き、電気炉２台の間隔を可変にして、
更に各々の電気炉の温度を独立に制御することによっ
て、温度勾配を調節するものがある。この方式は、従来
の電気炉の中では最も大きな温度勾配が得られている方
式である。それでも、得られる温度勾配は1cm当たり50
℃までである。この理由は、両電気炉間の輻射と熱伝導
の相互作用が強く、急激な温度勾配が得られないところ
にある。In addition, a transparent electric furnace is provided, in which a heat reflecting surface is provided on the inner wall of a transparent quartz tube, and two electric furnaces each having a metal heating element mounted on the inner surface thereof, and the distance between the two electric furnaces is made variable.
Further, there is an apparatus in which the temperature gradient is adjusted by independently controlling the temperature of each electric furnace. This method is a method in which the largest temperature gradient is obtained among conventional electric furnaces. Still, the temperature gradient obtained is 50 per cm
Up to ° C. The reason is that the interaction between radiation and heat conduction between the two electric furnaces is so strong that a steep temperature gradient cannot be obtained.
更に、管状の熱源ランプの背面に熱反射面を設け、こ
れを上下又は左右に複数本配列する方式の赤外線反射型
電気炉がある。この方式の場合、それぞれのランプを独
立に温度制御して温度勾配を可変することが考えられる
が、ランプの直径が大きいため、それにともない熱反射
面が大きくなり、急激な温度勾配を得ることはできな
い。Further, there is an infrared reflection type electric furnace in which a heat reflection surface is provided on the back surface of a tubular heat source lamp and a plurality of heat reflection surfaces are arranged vertically or horizontally. In this method, it is conceivable to vary the temperature gradient by controlling the temperature of each lamp independently.However, since the diameter of the lamp is large, the heat reflection surface becomes large accordingly, and it is not possible to obtain a sharp temperature gradient. Can not.
しかも、上記のいずれの方式の電気炉であっても、特
に長尺の被加熱物を加熱するには、被加熱物を炉軸方向
に移動させながら加熱しなければならず、そのため、炉
長が必然的に長くなり、設置スペースが大きくなり、経
済的でない。Moreover, in any of the above-described electric furnaces, in order to heat a particularly long object to be heated, it is necessary to heat the object while moving the object in the axial direction of the furnace. Is inevitably long, requires a large installation space, and is not economical.
更に、近年、単結晶の育成等々の如く新材料の製造分
野では、温度勾配を急激に変化させる加熱方式の要請が
ますます強くなってきているが、従来の電気炉ではこの
ような要請に十分応えることが困難であった。Further, in recent years, in the field of manufacturing new materials, such as growing single crystals, the demand for a heating method for rapidly changing the temperature gradient has been increasingly strong. It was difficult to respond.
本発明は、上記従来技術の問題点を解決すると共に上
記要請に応えるべくなされたものであって、任意の温度
勾配で、特に1cm当たり250℃の如く急激な温度勾配が容
易に調節でき、しかも敢えて被加熱物を移動する必要の
ない新規な多段反射型電気炉を提供することを目的とす
るものである。The present invention has been made to solve the above-mentioned problems of the prior art and to meet the above-mentioned demand, and it is possible to easily adjust a steep temperature gradient such as 250 ° C./cm with an arbitrary temperature gradient, and It is an object of the present invention to provide a novel multi-stage reflection type electric furnace which does not need to move the object to be heated.
（課題を解決するための手段） 前記目的を達成するため、本発明者らは、鋭意研究を
重ねた結果、電気炉を構成する加熱素子を複数個設け、
各々の加熱素子の厚みを極力薄くし、また加熱素子間の
輻射と熱伝導による相互作用を極力少ない独立型にし、
更には、容易にこれらの加熱素子を積層できる構造設計
にすることにより、可能であることを見い出し、ここに
発明をなしたものである。(Means for Solving the Problems) In order to achieve the above object, the present inventors have conducted intensive research and as a result, provided a plurality of heating elements constituting an electric furnace,
The thickness of each heating element is made as thin as possible, and the interaction between the heating elements by radiation and heat conduction is made as independent as possible,
Further, the present inventors have found out that this is possible by adopting a structural design in which these heating elements can be easily stacked, and have made the present invention.
すなわち、本発明に係る多段反射型電気炉は、複数個
の加熱素子を炉軸方向に多段に積層した構成であって、
各加熱素子は中央部に空間を有し、該空間側の中央に凸
部を環状に有すると共に、該凸部の両側に凹部の半分と
なる熱反射面を環状に持つ一体型形状で、かつ熱反射面
を冷却する構造を有するものであり、各加熱素子と加熱
素子を重ねることによって形成される凹部内に金属抵抗
体からなる発熱体を配置したことを特徴とするものであ
る。That is, the multi-stage reflection type electric furnace according to the present invention has a configuration in which a plurality of heating elements are stacked in multiple stages in the furnace axis direction,
Each heating element has a space in the center part, and has a convex portion in the center on the space side in an annular shape, and has an integral shape having a heat reflecting surface that is half of a concave portion on both sides of the convex portion in an annular shape, and It has a structure for cooling the heat reflecting surface, and is characterized in that a heating element made of a metal resistor is arranged in a concave portion formed by stacking each heating element and the heating element.
以下に本発明を図面を参照しつつ更に詳細に説明す
る。Hereinafter, the present invention will be described in more detail with reference to the drawings.
（実施例） 第１図は、本発明に係る多段反射型電気炉をその縦断
面にて示した例であり、複数個の加熱素子１を炉軸方向
に多段型に順次積層してなる電気炉本体20は、支持アー
ム22を介して架台21に取り付けられている。勿論、他の
設置形態も可能である。(Embodiment) FIG. 1 is an example in which a multi-stage reflection type electric furnace according to the present invention is shown in a longitudinal section thereof, and is an electric furnace formed by sequentially laminating a plurality of heating elements 1 in a multi-stage manner in the furnace axis direction. The furnace body 20 is attached to the gantry 21 via a support arm 22. Of course, other installation forms are possible.
加熱素子１は、第２図及び第３図に示すように金属基
板２（通常、銅製）の略中央に径が不均一な円盤状の空
間を有する一体型であり、その縦断面構造は、内側（熱
反射面側）に凹部21と凸部22を環状に有し、金属基板内
に冷却水路３を設けた冷却構造のもので、炉軸方向の両
端面が積層面23になっている。As shown in FIGS. 2 and 3, the heating element 1 is an integral type having a disc-shaped space having a non-uniform diameter substantially in the center of a metal substrate 2 (usually made of copper). an inner (heat reflecting surface) in the recess 2 1 and the convex portions 2 2 annularly intended cooling structure provided with cooling water channel 3 to the metal substrate, both end faces of the furnace axis direction to the laminated surface 2 3 Has become.
各加熱素子１の内側は、第３図に示すように中央の凸
部22の両側に凹部21が形成されている形状で、この凹部
21は相隣る加熱素子１の凹部21と組み合わされて一個の
完全な熱反射面を構成している。Inside each heating element 1, a shape recess 2 1 on either side of the central convex portion 2 2 is formed as shown in FIG. 3, the recess
2 1 constitutes a single complete heat reflecting surface is combined with the concave portion 2 1 of Aitonaru heating element 1.
したがって、熱反射面は、金属基板２の空間部周辺に
形成されるが、加熱空間の大きさ、反射効率等を考慮し
て任意の曲率を有する曲面とする。また凸部22の高さ或
いは凹部21の深さは、発熱体４が完全に凹部内に配置し
得る寸法とするのが好ましい。発熱体４を凸部22の先端
よりも内側に突出させると、加熱部間の熱伝導と輻射の
相互作用が強くなるので留意する。Therefore, the heat reflection surface is formed around the space of the metal substrate 2, but is a curved surface having an arbitrary curvature in consideration of the size of the heating space, the reflection efficiency, and the like. The height or recess 2 1 of the depth of the convex portions 2 2 is preferably sized to the heating element 4 may be disposed entirely within the recess. When protrudes inwardly from the heating body 4 of the convex portion 2 2 tip, to note that the interaction of heat conduction and radiation between the heating portion becomes strong.
このような加熱素子は、第２図に示すように、冷却水
通路３とその出入口31、32を備えた冷却構造を有すると
共に、測温、制御用熱電対11を挿入し得る孔５と、積層
用止めネジのための孔６が設けられている。Such heating elements, as shown in FIG. 2, which has a cooling structure having a cooling water passage 3 and the entrance 3 1, 3 2, temperature measurement, the hole may be inserted a control thermocouple 11 5 And a hole 6 for a set screw for lamination.
発熱体４としては、適宜材質のものを使用することが
できる。例えば、Ni−Cr系、Fe−Al系、Pt系、Mo系、Ｗ
系、Ta系などの容易に加工できる金属抵抗体を挙げるこ
とができ、これらの材質を使用すれば1500℃まで加熱可
能である。また、発熱体４は、螺旋線、丸棒、角板、薄
膜等を円形状に作られた形状のものでよく、第２図に示
すように、加熱素子１を凹部内に配置し、保持用セラミ
ック８等で保持する。The heating element 4 may be made of any suitable material. For example, Ni-Cr, Fe-Al, Pt, Mo, W
And metal resistors that can be easily processed, such as a metal-based or Ta-based material. If these materials are used, heating can be performed up to 1500 ° C. Further, the heating element 4 may have a shape in which a helical wire, a round bar, a square plate, a thin film and the like are formed in a circular shape, and as shown in FIG. It is held by a ceramic 8 for use.
このような加熱素子１を多段に積層するには、第４図
に示すように、まず、第一の加熱素子を配置し、その凹
部内に発熱体４を配置し、次にその上に第２の加熱素子
１を積層してその凹部内に発熱体４を配置するという操
作を繰り返して行って、所定の個数の加熱素子１を炉軸
方向に多段型に積層した後、止めネジにて組み立て、内
側（空間部）に電気炉内雰囲気用の透明石英管９を配置
して、多段反射型電気炉を構成する。加熱素子１の組立
体は、いわば積層面23で分割された分割型加熱素子とい
うことができる。なお、符号の10は発熱体４の電気入力
端子部、符号12は熱電対11の電極端子である。In order to stack such heating elements 1 in multiple stages, first, as shown in FIG. 4, a first heating element is arranged, a heating element 4 is arranged in a concave portion thereof, and then a heating element 4 is arranged thereon. The operation of laminating two heating elements 1 and arranging the heating elements 4 in the recesses is repeated, and a predetermined number of heating elements 1 are laminated in a multi-stage manner in the furnace axis direction. Assembling and arranging the transparent quartz tube 9 for the atmosphere in the electric furnace inside (in the space) forms a multi-stage reflection type electric furnace. The assembly of the heating element 1 can be referred to speak divided split heating element in the lamination plane 2 3. Reference numeral 10 denotes an electric input terminal of the heating element 4, and reference numeral 12 denotes an electrode terminal of the thermocouple 11.
この多段反射型電気炉は、加熱部間の熱伝導と輻射の
相互作用が生じないように設計され、かつ各加熱素子の
凹部に配置した発熱体の発熱をコントロールすることに
より、夫々の加熱素子が独立に温度制御ができ、炉軸方
向（積層方向）に任意の熱勾配をつくることが可能であ
る。加熱素子の厚さ等を考慮すれば、例えば、炉軸方向
で1cm当たり250℃までの急激な温度勾配をつくり出すこ
とができる。This multi-stage reflection type electric furnace is designed so that there is no interaction between heat conduction and radiation between the heating units, and by controlling the heat generation of the heating elements arranged in the recesses of each heating element, each heating element However, the temperature can be controlled independently, and an arbitrary thermal gradient can be created in the furnace axis direction (stacking direction). Taking into account the thickness of the heating element and the like, it is possible to create, for example, a steep temperature gradient of up to 250 ° C./cm in the furnace axis direction.
なお、被加熱物13は炉内に任意の態様でセットでき
（第４図参照）、炉内にセットしたままでも、或いは移
動させながら加熱することもできが、いずれの場合にも
被加熱物の加熱パターンに従い温度勾配をつくり出し、
この温度勾配パターンを固定し或いは炉軸方向に移動さ
せることも可能である。その際、被加熱物の寸法、加熱
パターン等に応じて、加熱素子を他の形状寸法のものに
変更したり、あるいはその枚数を変更することができ
る。The object to be heated 13 can be set in an arbitrary manner in the furnace (see FIG. 4), and can be heated while being set in the furnace or while being moved. Create a temperature gradient according to the heating pattern of
This temperature gradient pattern can be fixed or moved in the furnace axis direction. At that time, the heating element can be changed to another shape and size, or the number thereof can be changed according to the size of the object to be heated, the heating pattern, and the like.
（発明の効果） 以上詳述したように、本発明によれば、加熱素子の冷
却部による断熱効果と熱反射面による集熱効果により加
熱素子間の熱的な相互作用を極度に少なくできると共
に、加熱素子基板の厚みを薄くし、更にこれを必要に応
じた数だけ容易に積層する構造であるので、加熱素子を
夫々独立に温度制御することによって1cm当たり250℃の
如く急激な温度勾配、或いは任意の温度勾配が容易よ得
られ、更に夫々の加熱素子を独立にプログラム制御し、
順次プログラムを移行することによって、電気炉内の被
加熱物を移動せずに、被加熱物移動と同様の効果が得ら
れる。具体的には、以下のような優れた効果が得られ
る。(Effects of the Invention) As described in detail above, according to the present invention, the thermal interaction between the heating elements can be extremely reduced due to the heat insulating effect of the cooling portion of the heating element and the heat collecting effect of the heat reflecting surface. Since the thickness of the heating element substrate is reduced, and furthermore, it is easily laminated as many times as necessary, by controlling the temperature of the heating elements independently, a steep temperature gradient such as 250 ° C./cm, Alternatively, an arbitrary temperature gradient can be easily obtained, and further, each heating element is independently programmed and controlled,
By sequentially shifting the program, the same effect as the movement of the object to be heated can be obtained without moving the object to be heated in the electric furnace. Specifically, the following excellent effects can be obtained.
（１）長尺の被加熱物全体を一定の温度で加熱できると
共に、急激な温度勾配や任意の温度勾配で加熱処理でき
る。(1) The entire long object to be heated can be heated at a constant temperature, and the heat treatment can be performed with a steep temperature gradient or an arbitrary temperature gradient.
（２）単結晶を引き上げる際には、ルツボ、固液界面、
引き上げ結晶の夫々の位置の温度勾配を任意に設定でき
る。(2) When pulling a single crystal, crucible, solid-liquid interface,
The temperature gradient at each position of the pulled crystal can be set arbitrarily.
（３）単結晶を引き上げる際には、ルツボ内の固液界面
の温度勾配を任意に調節し、ルツボを下降して結晶成長
することができる。更には、ルツボを下降せずに、この
温度勾配を上部へ移動し結晶成長することができるの
で、従来の電気炉に比べ著しく小型の電気炉が実現す
る。(3) When pulling up a single crystal, the temperature gradient at the solid-liquid interface in the crucible can be arbitrarily adjusted, and the crystal can be grown down the crucible. Furthermore, since the temperature gradient can be moved upward and the crystal can be grown without lowering the crucible, an electric furnace significantly smaller than the conventional electric furnace can be realized.
（４）また、蒸着、スパッタリング等で作成した薄膜を
ラミネートする等の技術を駆使して加熱素子の厚みをさ
らに薄型化し、多量の加熱素子を独立して同時に制御で
きるようにコンピュータ制御すれば、究極の多段反射型
電気炉できる。(4) If the thickness of the heating element is further reduced by making full use of a technique such as laminating a thin film formed by vapor deposition, sputtering, or the like, and the computer is controlled so that a large number of heating elements can be independently and simultaneously controlled, The ultimate multi-stage reflex electric furnace.
第１図は本発明に係る多段反射型電気炉の全体と設置態
様を示す説明図、第２図は本発明の加熱素子の横断面
図、第３図は本発明の加熱素子の縦断面図、第４図は多
数個の加熱素子を組み立てた状態を示すと共に、被加熱
物を炉内にセットした使用例を示す縦断面図である。 １……加熱素子、２……加熱素子の金属基板、21……凹
部（熱反射面）、22……凸部、23……積層面、３……冷
却水通路、31……冷却水入口、32……冷却水出口、４…
…発熱体、５……測温、制御用熱電対の挿入孔、６……
加熱素子の積層用止めネジ孔、８……発熱体保持用セラ
ミック、９……透明石英管、10……発熱体の電気入力端
子部、11……測温、制御用熱電対、12……熱電対の電極
端子、13……被加熱物、20……多段反射型電気炉、21…
…架台、22……支持アーム。FIG. 1 is an explanatory view showing the whole and installation mode of a multi-stage reflection type electric furnace according to the present invention, FIG. 2 is a transverse sectional view of a heating element of the present invention, and FIG. 3 is a longitudinal sectional view of a heating element of the present invention. FIG. 4 is a longitudinal sectional view showing a state in which a large number of heating elements are assembled and showing a usage example in which an object to be heated is set in a furnace. 1 ...... heating element, the metal substrate 2 ...... heating element, 2 1 ...... recess (heat reflecting surface), 2 2 ...... protrusions, 2 3 ...... stacking surface, 3 ...... coolant passage, 3 1 ... ... cooling water inlet, 3 2 ... cooling water outlet, 4 ...
... heating element, 5 ... insertion hole for thermocouple for temperature measurement and control, 6 ...
Set screw hole for laminating heating element, 8: Ceramic for holding heating element, 9: Transparent quartz tube, 10: Electric input terminal of heating element, 11: Thermocouple for temperature measurement and control, 12: Electrode terminals of thermocouple, 13 ... Heated object, 20 ... Multi-stage reflection type electric furnace, 21 ...
... Stand, 22 ... Support arm.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特公 昭56−34794（ＪＰ，Ｂ２) 特公 昭62−5272（ＪＰ，Ｂ２) (58)調査した分野(Int.Cl.6，ＤＢ名) F27D 11/02 - 11/04 H05B 3/00────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-B-56-34794 (JP, B2) JP-B 62-5272 (JP, B2) (58) Fields surveyed (Int. Cl. 6 , DB name) F27D 11/02-11/04 H05B 3/00
Claims (1)
した構成であって、各加熱素子は中央部に空間を有し、
該空間側の中央に凸部を環状に有すると共に、該凸部の
両側に凹部の半分となる熱反射面を持つ一体型形状で、
かつ熱反射面を冷却する構造を有するものであり、各加
熱素子と加熱素子を重ねることによって形成される凹部
内に金属抵抗体からなる発熱体を配置したことを特徴と
多段反射型電気炉。1. A structure in which a plurality of heating elements are stacked in multiple stages in a furnace axis direction, wherein each heating element has a space in a central portion,
With an annular convex portion in the center of the space side, an integral shape having a heat reflecting surface that is half of the concave portion on both sides of the convex portion,
In addition, the multi-reflection electric furnace has a structure for cooling the heat reflecting surface, and a heating element made of a metal resistor is disposed in a concave portion formed by stacking each heating element and the heating element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1064693A JP2759673B2 (en) | 1989-03-15 | 1989-03-15 | Multi-stage reflective electric furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1064693A JP2759673B2 (en) | 1989-03-15 | 1989-03-15 | Multi-stage reflective electric furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02242086A JPH02242086A (en) | 1990-09-26 |
| JP2759673B2 true JP2759673B2 (en) | 1998-05-28 |
Family
ID=13265482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1064693A Expired - Lifetime JP2759673B2 (en) | 1989-03-15 | 1989-03-15 | Multi-stage reflective electric furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2759673B2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4907937B2 (en) * | 2005-09-26 | 2012-04-04 | 株式会社日立国際電気 | Thermal insulation wall, heating element holding structure, heating device and substrate processing apparatus |
| JP2011089645A (en) * | 2010-12-20 | 2011-05-06 | Hitachi Kokusai Electric Inc | Heat insulating block |
| JP5383752B2 (en) * | 2011-07-19 | 2014-01-08 | 株式会社日立国際電気 | Insulating wall, heating device, substrate processing apparatus, and semiconductor device manufacturing method |
| JP6916988B2 (en) * | 2017-05-29 | 2021-08-11 | ウシオ電機株式会社 | Light heating device |
| CN107262684A (en) * | 2017-07-27 | 2017-10-20 | 福建省瑞奥麦特轻金属有限责任公司 | One kind continuously prepares aluminium alloy semi-solid slurry crucible heat insulation stove differential heating system |
| JP7122856B2 (en) * | 2018-05-02 | 2022-08-22 | 東京エレクトロン株式会社 | Heat treatment equipment |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5634794A (en) * | 1979-08-30 | 1981-04-07 | Ube Ind Ltd | Lubricating oil composition |
| JPS625272A (en) * | 1985-06-29 | 1987-01-12 | Toshiba Corp | Image forming device |
-
1989
- 1989-03-15 JP JP1064693A patent/JP2759673B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02242086A (en) | 1990-09-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100700766B1 (en) | Thermal processing apparatus | |
| US4914276A (en) | Efficient high temperature radiant furnace | |
| JP2759673B2 (en) | Multi-stage reflective electric furnace | |
| JP2002141294A (en) | Improved heat lamp for heating zone | |
| CN107881490A (en) | Chemical vapor deposition unit and application thereof | |
| CA2394426A1 (en) | Device for fast and uniform heating of a substrate with infrared radiation | |
| JP2002540610A (en) | Combined heater with plate with jagged ceramic foil and gas assist | |
| JPS60159591A (en) | Heating furnace | |
| CN114959659A (en) | Heating device for sample heating | |
| US4595826A (en) | Heat treatment furnace and method of construction | |
| JPH0820868A (en) | Vacuum soaking heater | |
| JP3020773B2 (en) | Heat treatment equipment | |
| JP3002990B1 (en) | Soaking heater | |
| US3462580A (en) | Heater assembly for copying machines | |
| GB2044056A (en) | Method of shaping coils | |
| JP2002075899A (en) | Uniformly heating method for circular plate-form workpiece | |
| JPS5989991A (en) | Electric furnace | |
| JPS61199631A (en) | Infrared heating furnace | |
| JP2002310570A (en) | Laminating heating base plate and infrared reflection type multi-stage electric furnace | |
| JPH08191074A (en) | High speed thermal treatment equipment | |
| JPS647302Y2 (en) | ||
| JPH0638392Y2 (en) | Multi-stage electric furnace | |
| JPS62170481A (en) | Tubular electric furnace | |
| JPS5827006Y2 (en) | Wire annealing equipment | |
| JPS61287224A (en) | Heating furnace |