JP2739839B2 - Fluid application method - Google Patents
Fluid application methodInfo
- Publication number
- JP2739839B2 JP2739839B2 JP7153154A JP15315495A JP2739839B2 JP 2739839 B2 JP2739839 B2 JP 2739839B2 JP 7153154 A JP7153154 A JP 7153154A JP 15315495 A JP15315495 A JP 15315495A JP 2739839 B2 JP2739839 B2 JP 2739839B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- suction nozzle
- nozzle
- coating
- suction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は基板上に電子部品を固定
するため接着剤を塗布する電子部品固定用接着剤の塗
布、基板上の電子部品を保護するために塗布する保護樹
脂の塗布、または基板上に形成された電子回路の一部を
電解液を介して電気特性を測定するための電解液の塗布
など、を行うためのディスペンサ装置を用いた流動体の
塗布方法に関し、特に吐出ノズルの周囲に設けた吸引ノ
ズルと、基板と塗布部との距離を調整する機構を具備す
るディスペンサ装置を用いた流動体の塗布方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to the application of an adhesive for fixing an electronic component to fix an electronic component on a substrate, the application of a protective resin applied to protect the electronic component on the substrate, Alternatively, a part of an electronic circuit formed on a substrate is coated with a fluid using a dispenser device for performing an application of an electrolyte for measuring electric characteristics via the electrolyte .
The present invention relates to a coating method , particularly to a method of applying a fluid using a dispenser apparatus having a suction nozzle provided around a discharge nozzle and a mechanism for adjusting a distance between a substrate and a coating section.
【０００２】[0002]
【従来の技術】従来、この種のディスペンサ装置のシリ
ンジ部、ノズル部においては、塗布流動体を入れたシリ
ンジと吐出ノズルから構成されており、圧力制御された
気体を塗布流動体に加えることにより塗布を行なってい
る。特に精密微少塗布装置においては図４に示すよう
に、塗布流動体を入れたシリンジ５と吐出ノズル１１と
の内側に塗布流動体を吸引する吸引ノズル１２を設けた
構造のディスペンサ装置が特開平４−１８６７１９号公
報に開示されている。2. Description of the Related Art Conventionally, a syringe portion and a nozzle portion of a dispenser of this type are constituted by a syringe containing a coating fluid and a discharge nozzle, and a pressure controlled gas is added to the coating fluid. Applying. In particular, as shown in FIG. 4, in a precision micro-coating device, a dispenser device having a structure in which a suction nozzle 12 for sucking a coating fluid is provided inside a syringe 5 containing a coating fluid and a discharge nozzle 11 is disclosed in No. 186719.
【０００３】[0003]
【発明が解決しようとする課題】しかし、上述したディ
スペンサ用ノズルでは、高粘度の流動体を塗布すると吸
引ノズルが吐出ノズルの内側にあるため、図５のように
塗布領域の周辺部は、吸引しきれずに流動体１３の被膜
が厚く残る。However, in the above-described dispenser nozzle, when a high-viscosity fluid is applied, the suction nozzle is located inside the discharge nozzle. Therefore, as shown in FIG. The coating of the fluid 13 remains thick without being removed.
【０００４】また、吸引・圧力と時間との関係をそれぞ
れ制御された気体によって行われるため、吐出された流
動体量と吸引された流動体量はこの気体の制御性に依存
する。このため最終塗布量は、前述の気体の制御能力に
直接左右され、特に微少量の塗布の場合には高性能な気
体の制御装置が必要となり、この能力を超える場合には
塗布量の制御精度が低下することになる。Further, since the relationship between suction, pressure and time is controlled by controlled gases, the amount of discharged fluid and the amount of sucked fluid depend on the controllability of the gas. For this reason, the final coating amount is directly affected by the above-mentioned gas control ability. Particularly, in the case of a very small amount of coating, a high-performance gas control device is required. Will decrease.
【０００５】さらに、吸引ノズル内に大気圧程度の気体
がある状態で流動体を吐出すると吐出時に、吐出流動体
は図６のようなドーナツ状の形となり、流動体の内側に
気体が入り込む。この状態から吸引を行うと、吸引ノズ
ル内に流動体と気体が不連続に吸引される。このため吸
引される流動体量の制御が不可能となり所定の最終塗布
量を得られなくなる。Further, when a fluid is discharged in a state where a gas of approximately atmospheric pressure is present in the suction nozzle, at the time of discharge, the discharged fluid has a donut shape as shown in FIG. 6, and the gas enters inside the fluid. When suction is performed from this state, the fluid and the gas are sucked discontinuously into the suction nozzle. For this reason, it is impossible to control the amount of the fluid to be sucked, and a predetermined final application amount cannot be obtained.
【０００６】また、同一基板上の複数箇所に塗布する場
合、１点を塗布した後、２点目の塗布位置にノズルを水
平移動させると、１点目で塗布された流動体の塗布領域
周辺がノズル先端より高いために被膜とノズルが干渉し
塗布後の流動体を変形させてしまう。これを避けるため
には、ディスペンサを基板から離した後ノズルを水平移
動させる必要がある。従って、この動作は塗布箇所の数
だけ増加することになる。In addition, when applying to a plurality of locations on the same substrate, after applying one point, the nozzle is moved horizontally to the second application position, and the area around the application area of the fluid applied at the first point is applied. Is higher than the tip of the nozzle, the coating and the nozzle interfere with each other and deform the fluid after application. To avoid this, it is necessary to move the nozzle horizontally after the dispenser is separated from the substrate. Therefore, this operation is increased by the number of application places.
【０００７】[0007]
【課題を解決するための手段】本発明の流動体の塗布方
法は、上述した問題点を解決するため流動体の吐出ノズ
ルの外周部に吸引ノズルを設けたディスペンサ装置を用
い、流動体を吸引ノズルの外径より広い範囲でかつ吸引
ノズルの先端を被うまで吐出ノズルから吐出する工程
と、吸引ノズルから流動体が分離するまで流動体を吸引
ノズルで吸引する工程とを有することを特徴とする。ま
た吐出ノズル先端と吸引ノズル先端位置とに鉛直方向に
対し差を設けたことや、吸引ノズル先端と被塗布部との
距離を変化させる高さ調整部を有することを特徴とす
る。Means for Solving the Problems A method of applying a fluid of the present invention
In order to solve the above-mentioned problems, the method
Use a dispenser device with a suction nozzle on the outer periphery of the
Suction of fluid over a wider area than the outside diameter of the suction nozzle
The process of discharging from the discharge nozzle until it covers the tip of the nozzle
And suction the fluid until the fluid separates from the suction nozzle
Suctioning with a nozzle . In addition, a difference is provided between the tip of the discharge nozzle and the tip of the suction nozzle in the vertical direction, and a height adjusting unit that changes the distance between the tip of the suction nozzle and the portion to be coated is provided.
【０００８】[0008]
【実施例】本発明について図１，図２（ａ）〜（ｃ），
図３（ａ）〜（ｅ）を参照して説明する。図１は、本発
明の第１の実施例の全体構成を示す斜視図であり、図２
は図１のノズル近傍の動作説明の断面図である。図１及
び図２において本実施例の構成を説明する。図１におい
て、流動体を塗布される基板７は、ステージ６に固定さ
れ、さらにステージ６は水平機構部８によって水平移動
が可能である。図２（ａ）〜（ｃ）に示すように内径お
よそ０．７ｍｍの吸引ノズル２の内側に内径０．３ｍｍ
の吐出ノズル１があり、これら吸引ノズル２と吐出ノズ
ル１は、流動体を入れるためのシリンジ５に固定されて
いる。このシリンジ５は、分解能が数μｍ〜数十μｍ程
度の高さ調整機構部９に取り付けられ基板７との距離を
変更できる。高さ調整機構部９，シリンジ５，吐出ノズ
ル１，吸引ノズル２は、上下機構部１０により、一定の
ストロークだけ上下動作が可能である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described with reference to FIGS.
This will be described with reference to FIGS. FIG. 1 is a perspective view showing the entire configuration of the first embodiment of the present invention, and FIG.
FIG. 3 is a cross-sectional view for explaining the operation near the nozzle in FIG. 1. 1 and 2, the configuration of the present embodiment will be described. In FIG. 1, a substrate 7 to which a fluid is applied is fixed to a stage 6, and the stage 6 can be horizontally moved by a horizontal mechanism 8. As shown in FIGS. 2A to 2C, the inside of the suction nozzle 2 having an inner diameter of about 0.7 mm is 0.3 mm in inner diameter.
The suction nozzle 2 and the discharge nozzle 1 are fixed to a syringe 5 for receiving a fluid. The syringe 5 is attached to a height adjustment mechanism 9 having a resolution of about several μm to several tens μm, and can change the distance from the substrate 7. The height adjustment mechanism 9, the syringe 5, the discharge nozzle 1, and the suction nozzle 2 can be moved up and down by a certain stroke by the up-down mechanism 10.
【０００９】次に本装置を用いた塗布動作について説明
する。図２（ａ）は、塗布前の状態である。上下機構部
１０によってシリンジが加工しシリンジ内の流動体を吐
出ノズル１から圧力制御された気体により吐出する。こ
の塗布液が図２（ｂ）のように吸引ノズルを被ったとこ
ろで吐出動作を終了させる。次に、図２（ｃ）に示すよ
うに塗布液３を吸引ノズル２により吸引する。この動作
終了後に、上下機構部１０によってシリンジを上昇させ
最初の状態に戻す。本実施例によれば、０．２ｍｍ3 程
度の微少塗布を行うことが出来る。Next, a coating operation using the present apparatus will be described. FIG. 2A shows a state before the application. The syringe is processed by the up-down mechanism 10, and the fluid in the syringe is discharged from the discharge nozzle 1 by a pressure-controlled gas. The coating solution is to terminate the discharge operation by Toko <br/> filtration suffered a suction nozzle as shown in FIG. 2 (b). Next, as shown in FIG. 2C, the application liquid 3 is sucked by the suction nozzle 2. After this operation is completed, the syringe is raised by the up-and-down mechanism unit 10 to return to the initial state. According to this embodiment, it is possible to perform a minute application of about 0.2 mm 3 .
【００１０】さらに、同一基板上の複数箇所に塗布を行
う場合の本発明の第２の実施例を説明する。図３（ａ）
〜（ｅ）は、塗布動作を説明するノズル近傍の断面図で
ある。吐出ノズル先端１ａと鉛直方向におよそ２ｍｍの
差を設けた吸引ノズル先端２ａを備える。そのほかの構
成は、図１と同じである。図３（ａ）は、塗布前の状態
である。上下機構部１０によりシリンジを基板上の塗布
位置に移動後下降させ、図３（ｂ）のように塗布液３が
吸引ノズルの先端２ａを被うまで塗布液３を吐出する。
次に、図３（ｃ）に示すように吸引ノズル内を大気圧よ
り陰圧にすることで吸引を行い、吸引ノズル先端２ａの
周囲の気体が吸入され始めた直後の状態が図３（ｃ）と
なる。その後、塗布液３の形状はその表面張力により変
化し、図３（ｄ）のように吐出ノズル先端１ａと吸引ノ
ズル先端２ａのそれぞれから離れた位置で安定する。次
に水平機構部１０により、例えば図３（ｅ）の移動方向
４の向きに基板を移動させ同一基板内の新たな塗布位置
で固定し、図３（ｂ）から図３（ｄ）までの動作を繰り
返す。さらに塗布が必要な場合には、図３（ｅ），
（ｂ），（ｃ），（ｄ），（ｅ）の動作を必要な塗布数
だけ繰り返し、最後の塗布が終了したら上下機構部１０
によりシリンジ５を上昇させ、最初の状態である図３
（ａ）に戻す。Further, a second embodiment of the present invention in the case where coating is performed on a plurality of locations on the same substrate will be described. FIG. 3 (a)
(E) is a cross-sectional view of the vicinity of the nozzle for explaining the coating operation. A suction nozzle tip 2a having a difference of about 2 mm in the vertical direction from the discharge nozzle tip 1a is provided. Other configurations are the same as those in FIG. FIG. 3A shows a state before application. The syringe is moved to the application position on the substrate by the up-down mechanism unit 10 and then lowered , and the application liquid 3 is discharged until the coating liquid 3 covers the tip 2a of the suction nozzle as shown in FIG.
Next, as shown in FIG. 3 (c), suction is performed by setting the inside of the suction nozzle to a pressure lower than the atmospheric pressure, and the state immediately after the gas around the suction nozzle tip 2a starts to be sucked is shown in FIG. 3 (c). ). Thereafter, the shape of the coating liquid 3 changes due to its surface tension, and as shown in FIG. 3D, is stabilized at a position away from each of the discharge nozzle tip 1a and the suction nozzle tip 2a. Next, the substrate is moved by the horizontal mechanism 10 in, for example, the direction of the movement direction 4 in FIG. 3E and fixed at a new coating position in the same substrate. Repeat the operation. If further application is required, see FIG.
The operations of (b), (c), (d), and (e) are repeated for the required number of applications, and when the last application is completed, the up-down mechanism 10
The syringe 5 is lifted up by FIG.
Return to (a).
【００１１】[0011]
【発明の効果】本発明は、以上説明したように構成され
ているので以下に記載する効果を持つ。The present invention is configured as described above and has the following effects.
【００１２】吸引ノズルを吐出ノズルの周囲に設けるこ
とで塗布領域の周辺を吸引でき、高粘度の流動体の塗布
においても厚い被膜部を残すという問題が無く、塗布量
を精度よく制御できる。さらに、流動体の内部に吸引ノ
ズルが無いため、吐出時に吸引ノズル内が大気圧でも塗
布液に気体を混入することがない。By providing the suction nozzle around the discharge nozzle, the periphery of the application area can be sucked, and there is no problem that a thick film portion remains even when a high-viscosity fluid is applied, and the amount of application can be controlled accurately . Further, since there is no suction nozzle inside the fluid, even when the inside of the suction nozzle is at atmospheric pressure during discharge, gas does not mix into the coating liquid.
【００１３】次に、吸引ノズルと基板との距離を調節す
る高さ調整機構部を設けることで、吸引ノズルに気体が
吸引されるまで吸引を行っても塗布量の調整はノズル高
さを変えることで可能となり、吐出・吸引のための気体
の圧力・時間の制御装置の能力に依存せずに塗布量を制
御できる。Next, by providing a height adjusting mechanism for adjusting the distance between the suction nozzle and the substrate, even if suction is performed until the gas is sucked into the suction nozzle, the application amount can be adjusted by changing the nozzle height. This makes it possible to control the amount of application without depending on the capability of the control device for controlling the pressure and time of the gas for discharge and suction.
【００１４】同一基板上に複数箇所の塗布を行う場合に
おいても吐出ノズル先端と吸引ノズル先端は鉛直方向に
差を設けてあるため、吸引終了後の塗布液は吸引ノズル
から離れるのはもちろんであるが吐出ノズルからも離れ
る。また、厚い被膜部を残していないため、ノズルと基
板との高さはそのままで次の塗布位置に移動できる。Even when a plurality of coatings are performed on the same substrate, the tip of the discharge nozzle and the tip of the suction nozzle are provided with a difference in the vertical direction, so that the coating liquid after the end of the suction naturally leaves the suction nozzle. Is also separated from the discharge nozzle. Further, since the thick coating portion is not left, the nozzle and the substrate can be moved to the next coating position without changing the height.
【図１】本発明によるディスペンサ装置の構成図。FIG. 1 is a configuration diagram of a dispenser device according to the present invention.
【図２】（ａ），（ｂ），（ｃ）は本発明の第１の実施
例の塗布動作時の吐出・吸引ノズル近傍状態を示した断
面図。FIGS. 2A, 2B, and 2C are cross-sectional views showing a state near a discharge / suction nozzle during a coating operation according to the first embodiment of the present invention.
【図３】（ａ），（ｂ），（ｃ），（ｄ），（ｅ）は本
発明の第２の実施例の塗布動作時の吐出・吸引ノズル近
傍状態を示した断面図。FIGS. 3 (a), (b), (c), (d), and (e) are cross-sectional views showing states near a discharge / suction nozzle during a coating operation according to a second embodiment of the present invention.
【図４】従来の吸引ノズルを持つディスペンサの断面
図。FIG. 4 is a sectional view of a conventional dispenser having a suction nozzle.
【図５】従来のディスペンサによる吸引後の塗布液形状
を示した断面図。FIG. 5 is a cross-sectional view showing the shape of a coating liquid after suction by a conventional dispenser.
【図６】従来のディスペンサによる吐出時の塗布液形状
を示した断面図。FIG. 6 is a cross-sectional view showing a shape of a coating liquid at the time of discharge by a conventional dispenser.
１ 吐出ノズル １ａ 吐出ノズル先端 ２ 吸引ノズル ２ａ 吸引ノズル先端 ３ 塗布液 ４ 移動方向 ５ シリンジ ７ 基板 ８ 水平機構部 ９ 高さ調整機構部 １１ 吐出ノズル １２ 吸引ノズル １３ 流動体 DESCRIPTION OF SYMBOLS 1 Discharge nozzle 1a Discharge nozzle tip 2 Suction nozzle 2a Suction nozzle tip 3 Coating liquid 4 Moving direction 5 Syringe 7 Substrate 8 Horizontal mechanism 9 Height adjustment mechanism 11 Discharge nozzle 12 Suction nozzle 13 Fluid
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.6 識別記号 ＦＩ Ｈ０５Ｋ 3/34 ５０４ Ｈ０１Ｌ 21/30 ５６４Ｚ ──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 6 Identification code FI H05K 3/34 504 H01L 21/30 564Z
Claims (3)
ルを設けたディスペンサ装置を用いて被塗布部に流動体
を塗布する方法において、前記流動体を前記吸引ノズル
の外径より広い範囲でかつ前記吸引ノズルの先端を被う
まで吐出ノズルから吐出する工程と、前記吸引ノズルか
ら前記流動体が分離するまで前記流動体を前記吸引ノズ
ルで吸引する工程とを有することを特徴とする流動体の
塗布方法。 1. A suction nozzle is provided on an outer peripheral portion of a discharge nozzle of a fluid.
Using a dispenser device equipped with
In the method of applying, the fluid is supplied to the suction nozzle.
Cover the tip of the suction nozzle in a range wider than the outer diameter of
Discharging from the discharge nozzle until the suction nozzle
Until the fluid separates from the fluid.
And a step of sucking with a fluid.
Coating method.
ル先端位置とに鉛直方向に対して差を設けた請求項１記
載の塗布方法。Wherein said suction nozzle tip position and the KanoIzuru nozzle tip position and method of coating according to claim 1, wherein providing the difference with respect to the vertical direction.
距離を変化させる高さ調整部を有する請求項１または請
求項２記載の塗布方法。Wherein the suction nozzle tip and the claim 1 or claim 2 The coating method according with a height adjustment unit for changing the distance between the coating unit.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7153154A JP2739839B2 (en) | 1995-06-20 | 1995-06-20 | Fluid application method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7153154A JP2739839B2 (en) | 1995-06-20 | 1995-06-20 | Fluid application method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH091024A JPH091024A (en) | 1997-01-07 |
| JP2739839B2 true JP2739839B2 (en) | 1998-04-15 |
Family
ID=15556212
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7153154A Expired - Lifetime JP2739839B2 (en) | 1995-06-20 | 1995-06-20 | Fluid application method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2739839B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4496202B2 (en) * | 2006-11-27 | 2010-07-07 | 株式会社 イアス | Nozzle and liquid recovery method |
| JP5971018B2 (en) * | 2012-08-06 | 2016-08-17 | 富士通株式会社 | Coating nozzle, coating apparatus, and coating method |
| CN102836789B (en) * | 2012-09-25 | 2014-12-10 | 衡水英利新能源有限公司 | Sealing machine nozzle |
| US9839932B2 (en) * | 2013-02-14 | 2017-12-12 | Shimadzu Corporation | Surface chemical treatment apparatus for drawing predetermined pattern by carrying out a chemical treatment |
| JP6675601B1 (en) * | 2018-11-30 | 2020-04-01 | コネクトオール株式会社 | Laminated core manufacturing method, adhesive application apparatus and laminated core manufacturing apparatus |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH06244543A (en) * | 1993-02-17 | 1994-09-02 | Matsushita Electric Ind Co Ltd | Adhesive applying nozzle for adhesive applying apparatus |
-
1995
- 1995-06-20 JP JP7153154A patent/JP2739839B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH091024A (en) | 1997-01-07 |
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