JP2736969B2 - Quartz crucible manufacturing equipment - Google Patents
Quartz crucible manufacturing equipmentInfo
- Publication number
- JP2736969B2 JP2736969B2 JP9067778A JP6777897A JP2736969B2 JP 2736969 B2 JP2736969 B2 JP 2736969B2 JP 9067778 A JP9067778 A JP 9067778A JP 6777897 A JP6777897 A JP 6777897A JP 2736969 B2 JP2736969 B2 JP 2736969B2
- Authority
- JP
- Japan
- Prior art keywords
- mold
- quartz
- holder
- inner peripheral
- quartz crucible
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B19/00—Other methods of shaping glass
- C03B19/09—Other methods of shaping glass by fusing powdered glass in a shaping mould
- C03B19/095—Other methods of shaping glass by fusing powdered glass in a shaping mould by centrifuging, e.g. arc discharge in rotating mould
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、内周面側の気泡含
有率が小さく、外周面側の気泡含有率が大きな石英ルツ
ボを製造するのに適した石英ルツボの製造方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a quartz crucible suitable for producing a quartz crucible having a small bubble content on the inner peripheral surface and a large bubble content on the outer peripheral surface.
【０００２】[0002]
【従来の技術】多結晶シリコンからシリコン単結晶を製
造する際に用いられる石英ルツボの製造方法として回転
モールド法が知られている。 この製法は、回転する中空
のモールドに原料の石英粉体をその内周面に沿って充填
し、モールドを回転しながら石英粉体を加熱溶融するこ
とにより遠心力の作用により溶融した石英充填層がモー
ルド内周面に押圧されてルツボの形状に成形されること
により石英ルツボが形成される。2. Description of the Related Art A rotary molding method is known as a method for producing a quartz crucible used for producing a silicon single crystal from polycrystalline silicon. In this manufacturing method, a rotating hollow mold is filled with quartz powder as a raw material along its inner peripheral surface, and the quartz powder is heated and melted while rotating the mold, thereby melting the quartz packing layer by the action of centrifugal force. Is pressed against the inner peripheral surface of the mold to form a crucible, thereby forming a quartz crucible.
【０００３】この方法によって製造される石英ルツボ
は、その壁体内部に気泡が多数残留する欠点がある。壁
体(周壁及び底壁)に気泡が多いとルツポの強度が低下
し、またルツボの加熱時にルツポ内周面付近の気泡が熱
膨張して該内周面を部分的に剥離させ、剥離した石英小
片が溶融シリコンに混入して単結晶化率が低下する問題
がある。[0003] The quartz crucible manufactured by this method has a disadvantage that a large number of bubbles remain inside the wall. If there are many bubbles in the wall (peripheral wall and bottom wall), the strength of the crucible decreases, and when the crucible is heated, the bubbles near the inner circumferential surface of the crucible thermally expand and partially peel off the inner circumferential surface, and peeled. There is a problem that a small piece of quartz is mixed into the molten silicon and the single crystallization ratio is reduced.
【０００４】そこで、内部気泡の少ないルツボが求めら
れ、その製造法として、モールドに充填した石英粉体を
減圧下で加熱溶融する方法が知られている(特公昭59-34
659号)。この方法によると、モールドに充填した石英層
の内部気泡が溶融時に吸引除去されるので、肉眼では壁
体内部に気泡が殆ど観察されない石英ルツボが得られ
る。しかし、この製造方法においては、製造時に、回転
モールドの内側で石英充填層が加熱溶融されるのに伴
い、石英に比べて格段に比重の小さい気泡が次第に回転
軸側つまり石英充填層の内周面側に移動し、肉眼では観
察出来ない微小な気泡が壁体内周面近傍に多数偏在する
ようになる。この微小気泡は単結晶引き上げ時の加熱に
より膨張して前述と同様の問題を引き起こす。[0004] Therefore, a crucible with few internal bubbles is required, and as a method for producing the crucible, a method of heating and melting a quartz powder filled in a mold under reduced pressure is known (Japanese Patent Publication No. 59-34).
No. 659). According to this method, since the internal bubbles of the quartz layer filled in the mold are removed by suction at the time of melting, a quartz crucible in which almost no bubbles are observed inside the wall with the naked eye can be obtained. However, in this manufacturing method, as the quartz-filled layer is heated and melted inside the rotary mold at the time of manufacture, bubbles having a much lower specific gravity than quartz are gradually formed on the rotation axis side, that is, the inner periphery of the quartz-filled layer. Moving to the surface side, a large number of minute air bubbles that cannot be observed with the naked eye are unevenly distributed near the inner peripheral surface of the wall. These microbubbles expand due to heating during pulling of the single crystal, causing the same problem as described above.
【０００５】また、このような回転モールド法による製
造装置として、石英粉を装入する中空型(モールド)が外
側の筒部(囲い)に一体に固定され、その間に排気通路を
形成した装置構成が知られている(特開平1-160836号等)
が、このような構造ではモールドを取り外すことができ
ないためにメンテナンスに手間がかかる。また、モール
ド上部の排気は狭い排気通路を通じて底部中央まで導か
れるために排気効果が不十分になり易く、加熱溶融時の
減圧調整に適さない。Further, as a manufacturing apparatus using such a rotary molding method, a hollow mold (mold) for charging quartz powder is integrally fixed to an outer cylindrical portion (enclosure), and an exhaust passage is formed therebetween. Is known (Japanese Patent Laid-Open No. 1-160836, etc.)
However, in such a structure, the mold cannot be removed, so that maintenance is troublesome. In addition, since the exhaust at the top of the mold is guided to the center of the bottom through a narrow exhaust passage, the exhaust effect tends to be insufficient, and is not suitable for pressure reduction during heating and melting.
【０００６】この他に、モールド壁体内部に排気通路を
形成し、モールドの胴部と底部をネジにより一体に連結
した装置構成も知られている(特開平1-157426号)が、こ
の装置も上記装置例と同様にモールド胴部の排気が底部
の狭い排気通路に導かれるために排気効果が悪く、排気
の調整を十分に行うものには適さない。また、石英粉体
の装入空間の部分がネジ止めされているために、石英粉
体がネジ部分に入り込んでシール漏れを生じ易い欠点が
あり、さらに開口空間(石英粉を装入する空間)に段差を
生じることなく口径の異なるモールドに取り替えること
はできない。In addition, there is also known an apparatus in which an exhaust passage is formed inside a mold wall and a body and a bottom of the mold are integrally connected by screws (Japanese Patent Laid-Open No. 1-157426). In the same manner as in the above-described apparatus example, since the exhaust of the mold body is guided to the exhaust passage having a narrow bottom, the exhaust effect is poor, and it is not suitable for a device in which exhaust is sufficiently adjusted. Also, since the quartz powder loading space is screwed, there is a drawback that the quartz powder easily enters the screw portion and leaks easily, and furthermore, there is an open space (a space where the quartz powder is loaded). The mold cannot be replaced with a mold having a different diameter without causing a step.
【０００７】[0007]
【発明の解決課題】本発明の製造装置は、従来の製造装
置における上記問題を解決したものであって、回転モー
ルド法による製造装置において、加熱溶融時の減圧調節
の信頼性が高く、従って、ルツボ内周側部分の気泡含有
量が外周側部分よりも大幅に少ない石英ルツボの製造に
適した製造装置を提供することを目的とする。The manufacturing apparatus of the present invention has solved the above-mentioned problems in the conventional manufacturing apparatus. In the manufacturing apparatus by the rotary molding method, the reliability of the pressure reduction at the time of heating and melting is highly reliable. It is an object of the present invention to provide a manufacturing apparatus suitable for manufacturing a quartz crucible in which the bubble content of the inner peripheral side portion of the crucible is significantly smaller than that of the outer peripheral side portion.
【０００８】即ち、本発明は、(１)回転自在な中空のモ
ールド、該モールドの回転手段、該モールドの減圧手
段、該モールドの内側に挿入される出し入れ自在な加熱
手段を有する石英ルツボ製造装置において、石英粉が装
入されるモールドと該モールドを支持するモールドホル
ダーによってモールド部分が形成されており、該モール
ドの底部がモールドホルダー上端に着脱自在に嵌合さ
れ、これによりモールド底部とモールドホルダーの間に
気密な減圧室が形成され、モールドに設けた該減圧室に
通じる複数の排気孔を通じてモールドが減圧されると共
にモールドが交換可能であることを特徴とする石英ルツ
ボ製造装置に関するものである。本発明の製造装置は、
(２)モールドの底部外周にモールドホルダー上端が挿入
する嵌合溝が形成されていると共に、該モールド底部の
外周縁部にモールドホルダー上部内周面に密着する凸部
が形成されている石英ルツボ製造装置を含む。That is, the present invention provides (1) a quartz crucible manufacturing apparatus having a rotatable hollow mold, a rotating means for the mold, a depressurizing means for the mold, and a heating means which can be inserted and removed inside the mold. Wherein a mold part is formed by a mold into which quartz powder is charged and a mold holder supporting the mold, and the bottom of the mold is removably fitted to the upper end of the mold holder, whereby the mold bottom and the mold holder A quartz crucible manufacturing apparatus characterized in that an airtight decompression chamber is formed between the molds, and the mold is decompressed through a plurality of exhaust holes provided in the mold and communicating with the decompression chamber, and the mold is replaceable. . The manufacturing apparatus of the present invention
(2) A quartz crucible in which a fitting groove for inserting the upper end of the mold holder is formed on the outer periphery of the bottom of the mold, and a convex portion which is in close contact with the inner peripheral surface of the upper portion of the mold holder is formed on the outer peripheral edge of the bottom of the mold. Including manufacturing equipment.
【０００９】[0009]
【発明の実施態様】本発明に係る製造装置の一例を図に
示す。図１は本発明に係る製造装置の概略断面図、図２
は図１の装置を分離した状態を示す説明図、図３は出来
上がった石英ルツボを該装置から取り出す状態を示す説
明図である。FIG. 1 shows an example of a manufacturing apparatus according to the present invention. FIG. 1 is a schematic sectional view of a manufacturing apparatus according to the present invention, and FIG.
Is an explanatory view showing a state where the apparatus of FIG. 1 is separated, and FIG. 3 is an explanatory view showing a state where a completed quartz crucible is taken out of the apparatus.
【００１０】(Ｉ)装置構成 図示するように、本発明の製造装置10は、回転自在なモ
ールド形成部分20と該モールド形成部分20を回転する回
転手段(図示省略)と、該モールド形成部分20に接続する
減圧手段30とを有する。モールド形成部分20は石英粉体
が装入されるモールド21と該モールド21を支持するモー
ルドホルダ22とから形成される。モールド21およびモー
ルドホルダ22は何れも中空であり、筒状の周壁21a,22a
と底部21b,22bとを有している。このモールド底部21bは
モールドホルダー22の上端に着脱自在に嵌合され、これ
によりモールド底部21bとモールドホルダー底部22bの間
に気密な減圧室23が形成されている。 (I) Apparatus Configuration As shown, the manufacturing apparatus 10 of the present invention comprises a rotatable mold forming portion 20, a rotating means (not shown) for rotating the mold forming portion 20, and a mold forming portion 20. And decompression means 30 connected to the The mold forming part 20 is formed from a mold 21 into which quartz powder is charged and a mold holder 22 supporting the mold 21. The mold 21 and the mold holder 22 are both hollow, and have cylindrical peripheral walls 21a, 22a.
And bottom portions 21b and 22b. The mold bottom 21b is removably fitted to the upper end of the mold holder 22, whereby an airtight decompression chamber 23 is formed between the mold bottom 21b and the mold holder bottom 22b.
【００１１】すなわち、図示するように、モールド21の
底部外周がモールドホルダー22の上端22cに気密に嵌合
され、これによりモールド21とモールドホルダー22とが
二段重ねに嵌合されてモールド底部とモールドホルダー
の間に気密な減圧室が形成されると共に、図２に示すよ
うに、モールド形成部分20が上下に分割可能であってモ
ールド21をモールドホルダー22から取り外せるように形
成されている。That is, as shown in the drawing, the outer periphery of the bottom of the mold 21 is airtightly fitted to the upper end 22c of the mold holder 22, whereby the mold 21 and the mold holder 22 are fitted in a two-tiered manner, and An airtight pressure-reducing chamber is formed between the mold holders, and as shown in FIG. 2, the mold forming portion 20 is formed so as to be vertically splittable so that the mold 21 can be removed from the mold holder 22.
【００１２】さらに、図示する装置構成例では、モール
ド21の下端(底部)外周にモールドホルダー22の上端22c
が挿入する嵌合溝21eが設けられており、さらにモール
ド底部の該外周縁部にはモールドホルダー上端22cの内
周面に密着する凸部21dが形成されており、モールドホ
ルダー上端22cがモールド底部外周の嵌合溝21eに嵌め込
まれると共にモールド底部外周の凸部21dがモールドホ
ルダー内周面に密着して減圧室23の気密を一層高めるよ
うに形成されている。Further, in the illustrated apparatus configuration example, the upper end 22c of the mold holder 22 is placed around the lower end (bottom) of the mold 21.
There is provided a fitting groove 21e to be inserted therein, and further, a convex portion 21d which is in close contact with the inner peripheral surface of the mold holder upper end 22c is formed on the outer peripheral edge of the mold bottom, and the mold holder upper end 22c is The convex portion 21d on the outer periphery of the mold bottom is fitted into the fitting groove 21e on the outer periphery and is formed so as to be in close contact with the inner peripheral surface of the mold holder to further improve the airtightness of the decompression chamber 23.
【００１３】上記モールド21には、図示するように、そ
の内周面および底面に複数本の排気孔24が穿設されてお
り、該排気孔24はモールド21の周壁21aの内周面21cから
上記減圧室23に連通しており、おのおの減圧室23を通じ
て吸引排気されるように形成されている。さらに、モー
ルドホルダ22の底部22bには減圧機構30に通じる通気孔2
5が設けられており、減圧機構30には真空ポンプ31、フ
ィルタ32および電磁バルブ33を含む配管系が設けられて
いる。As shown in the figure, the mold 21 has a plurality of exhaust holes 24 formed on the inner peripheral surface and the bottom surface thereof. The exhaust holes 24 are formed from the inner peripheral surface 21c of the peripheral wall 21a of the mold 21. The pressure reducing chambers 23 are communicated with each other, and are formed so as to be sucked and exhausted through the respective pressure reducing chambers 23. Further, the bottom 22b of the mold holder 22 has a ventilation hole 2 communicating with the pressure reducing mechanism 30.
5, a pressure reducing mechanism 30 is provided with a piping system including a vacuum pump 31, a filter 32, and an electromagnetic valve 33.
【００１４】モールド21およびモールドホルダ22からな
る上記モールド形成部分20は回転手段(図示省略)によっ
て一体に回転されると共に、モールド21の上方には上下
に出し入れ自在な中子40と、アーク放電を行なう電極な
どからなる上下動自在な加熱手段50が配設されている。
なお、これら中子40および電極50は従来のものを用いる
ことができ、また中子に代えてスクレーパや石英粉をモ
ールド内周面に注入する手段を用いても良い。The mold forming portion 20 comprising the mold 21 and the mold holder 22 is integrally rotated by a rotating means (not shown), and a core 40 capable of being vertically inserted and removed above the mold 21 and an arc discharge. A vertically movable heating means 50 including electrodes and the like is provided.
The core 40 and the electrode 50 may be conventional ones. Instead of the core, a scraper or a means for injecting quartz powder into the inner peripheral surface of the mold may be used.
【００１５】(II)作用 以上の装置構成からなる本発明の製造装置において、モ
ールド21の内側中央に中子40を挿入し、モールド21を回
転しながらモールド21と中子40の間に原料の石英粉体を
供給する。石英粉体は回転するモールド21の遠心力の作
用によりモールド内周面に押しつけられ、該内周面に沿
って堆積し石英充填層を形成する。次に中子40を引き上
げ、アーク電極などの加熱手段50を挿入し、石英充填層
をその内周面側から加熱溶融する。該加熱により先ず石
英充填層の内周面に薄い溶融ないし半溶融の被覆が形成
される。一方、この加熱に伴いモールド21を減圧し、排
気孔24を通じて石英充填層内部のガスを吸引排気する。
加熱の進行に伴い、石英充填層はその内周面からモール
ド内表面に接する外表面付近まで次第に溶融する。 (II) In the manufacturing apparatus of the present invention having the above-described apparatus configuration, the core 40 is inserted into the center of the inside of the mold 21, and the raw material is placed between the mold 21 and the core 40 while rotating the mold 21. Supply quartz powder. The quartz powder is pressed against the inner peripheral surface of the mold by the action of the centrifugal force of the rotating mold 21 and is deposited along the inner peripheral surface to form a quartz filling layer. Next, the core 40 is pulled up, a heating means 50 such as an arc electrode is inserted, and the quartz filling layer is heated and melted from the inner peripheral surface side. By this heating, a thin molten or semi-melted coating is first formed on the inner peripheral surface of the quartz filling layer. On the other hand, the mold 21 is depressurized with this heating, and the gas inside the quartz filling layer is sucked and exhausted through the exhaust hole 24.
As the heating progresses, the quartz filling layer gradually melts from its inner peripheral surface to the vicinity of the outer surface in contact with the inner surface of the mold.
【００１６】この加熱溶融の途中で上記減圧操作を停止
し、減圧停止後、更に石英充填層をその内周面から加熱
する。上記減圧操作によりルツボ壁体内部の気泡は外周
側部分に引き寄せられており、該減圧の停止により外周
側部分は気泡が残留したまま溶融する。一方、内周面側
部分は微小気泡が僅かに残留するものの比較的大きな気
泡は外周側部分に引き寄せられて内周側部分には存在し
ないため気泡の少ない状態で溶融する。この結果、ルツ
ボ外周側部分の気泡含有率が内周側部分より大きいルツ
ボが得られる。なお、減圧力の大きさにより内側部分の
気泡含有率が異なり、減圧力が大きいほど気泡含有率が
小さい。減圧停止時間については、加熱溶融をｔ分間行
なう場合、加熱開始から0.2t分後〜O.9t分前に上記吸引
排気を停止するのが良い。0.2t分より前に減圧を停止す
ると十分な層厚の透明層が形成されない。一方、0.9t分
より長く減圧を継続すると排気孔に溶融層が吸込まれて
外周面に凸部が生じるので好ましくない。During the heating and melting, the pressure reduction operation is stopped, and after the pressure reduction is stopped, the quartz-filled layer is further heated from its inner peripheral surface. The bubbles inside the crucible wall are drawn to the outer peripheral side portion by the above-described depressurizing operation, and the outer peripheral side portion is melted by the stop of the decompression while the bubbles remain. On the other hand, although small bubbles slightly remain in the inner peripheral surface side, relatively large bubbles are attracted to the outer peripheral side portion and do not exist in the inner peripheral side portion, so that they are melted in a state with few bubbles. As a result, a crucible is obtained in which the bubble content of the crucible outer peripheral portion is larger than that of the inner peripheral portion. Note that the bubble content in the inner portion differs depending on the magnitude of the pressure reducing force, and the larger the pressure reducing force, the smaller the bubble content. Regarding the decompression stop time, when heating and melting are performed for t minutes, it is preferable to stop the suction and exhaust from 0.2 t minutes to 0.9 t minutes after the start of heating. If the depressurization is stopped before 0.2 t, a transparent layer having a sufficient thickness is not formed. On the other hand, if the decompression is continued for more than 0.9 t, the molten layer is sucked into the exhaust holes and a convex portion is formed on the outer peripheral surface, which is not preferable.
【００１７】石英充填層の外表面に薄い未溶融状態の剥
離層を残して上記加熱を終了し、図２に示すように、モ
ールド21をモールドホルダー22から取り外し、石英層が
冷却固化した後、モールド21から石英ルツボ60を取り出
す。この時、石英ルツボ60の外周表面は不透明な半溶融
層であり、石英ルツボ外周面とモールド内周面の間には
未溶融石英粉60aが介在しており、石英ルツボ60はモー
ルド内周面に張り付いていないので、図３のように、モ
ールド21を傾けることにより容易に石英ルツボ60を取り
出すことができる。The heating is terminated while leaving a thin unmelted release layer on the outer surface of the quartz filling layer. As shown in FIG. 2, the mold 21 is removed from the mold holder 22, and the quartz layer is cooled and solidified. The quartz crucible 60 is taken out of the mold 21. At this time, the outer peripheral surface of the quartz crucible 60 is an opaque semi-molten layer, and unfused quartz powder 60a is interposed between the outer peripheral surface of the quartz crucible and the inner peripheral surface of the mold. The quartz crucible 60 can be easily taken out by tilting the mold 21 as shown in FIG.
【００１８】[0018]
【発明の効果】本発明の製造装置は、モールドとモール
ドホルダーとを分離できるので、モールドを取替えて使
用できる。既に述べたように、従来の製造装置の大部分
はモールドが外側の筒部と一体に形成されているために
取り外し不能であり、このような利点を有しない。また
一部に、モールドをネジ止めにより連結して形成した例
が知られているが、ホルダーを用いる構造ではなく、モ
ールドの胴部、すなわち石英粉体の装入空間の部分がネ
ジ連結されるためにモールドを分離すると開口部分の空
間が分割されることになり、従って、石英粉体がネジ部
分に入り込みシール漏れを生じ易い問題がある。一方、
本発明の装置は、モールドの底部がモールドホルダー上
端に嵌合して２段重ねの状態になり、石英粉体の装入空
間はそのまま保たれるので、連結部分に石英粉体が入り
込む等の問題を生じない。According to the manufacturing apparatus of the present invention, since the mold and the mold holder can be separated, the mold can be replaced and used. As already mentioned, most of the conventional manufacturing equipment is not removable because the mold is formed integrally with the outer cylinder, and does not have such an advantage. Also, an example is known in which the mold is connected by screwing to a part, but the structure is not a structure using a holder, but the body of the mold, that is, the portion of the space for charging the quartz powder is screw-connected. Therefore, when the mold is separated, the space of the opening portion is divided, so that there is a problem that the quartz powder easily enters the screw portion and seal leakage easily occurs. on the other hand,
In the apparatus of the present invention, the bottom of the mold is fitted into the upper end of the mold holder to be in a two-tiered state, and the space for charging the quartz powder is kept as it is. No problem.
【００１９】さらに、本発明の製造装置は、モールド底
部がホルダーに着脱自在に嵌合しているので、石英粉が
装入される開口部の口径が異なるモールドであっても、
モールド底部の口径をモールドホルダーに合わせておけ
ば互換性があり、容易に取り替えることができる。な
お、従来のモールドをネジ止めした構造のものは、先に
述べたように、ホルダーを用いた構造ではないので、モ
ールドを分離すると開口部分の空間が分割され、開口部
の口径の異なる胴部を連結すると内周面に段差を生じこ
とになり、このようなモールドの交換は実質上できな
い。減圧機構を有する製造装置においては、該減圧機構
に接続されている部分の交換が煩雑であり、本発明装置
のように減圧機構が接続されているモールドホルダーを
交換せずに使用できる実用上の利点は大きい。Further, in the manufacturing apparatus of the present invention, since the bottom of the mold is detachably fitted to the holder, even if the opening of the opening into which the quartz powder is charged has a different diameter,
If the diameter of the mold bottom is matched to the mold holder, it is compatible and can be easily replaced. As described above, since the conventional structure in which the mold is screwed is not a structure using a holder, when the mold is separated, the space of the opening is divided, and the body of the opening has a different diameter. Are connected, a step is generated on the inner peripheral surface, and such a mold exchange cannot be substantially performed. In a manufacturing apparatus having a decompression mechanism, replacement of a portion connected to the decompression mechanism is complicated, and practical equipment that can be used without replacing a mold holder to which the decompression mechanism is connected as in the apparatus of the present invention. The benefits are great.
【００２０】また、本発明の図示する装置構成例では、
モールドの底部外周に嵌合溝を設けてホルダー上端を嵌
め込むと共に、更にモールド底部外周にホルダー上端内
周に密接する凸部を設けているので、石英粉体の加熱溶
融時にはモールドの中空部分側から加熱される結果、モ
ールドの熱膨張によって上記部分のシールが一層確実に
なる。In the illustrated apparatus configuration example of the present invention,
A fitting groove is provided on the outer periphery of the bottom of the mold, and the upper end of the holder is fitted. Further, a convex portion is provided on the outer periphery of the bottom of the mold so as to be in close contact with the inner periphery of the upper end of the mold. As a result, the sealing of the above-mentioned portion is further ensured by the thermal expansion of the mold.
【００２１】さらに、本発明の製造装置では、モールド
の排気孔が各々減圧室に連通し、該減圧室を通じて減圧
排気されるので排気効果が良く、減圧停止する際にも応
答性に優れ信頼性の高い減圧操作ができる。従って、石
英粉体層の加熱時に減圧状態を操作して内周部分の気泡
含有量が外周側部分よりも少ない石英ルツボを製造する
のに適する。また、石英ルツボを取り出す場合に、モー
ルドをモールドホルダから外すことにより減圧室が解消
されてモールドの排気孔が大気に接し、該排気孔を通じ
て石英ルツボとモールド内周面との間に大気が侵入する
ので石英ルツボの取り出しが容易である。Further, in the manufacturing apparatus of the present invention, the exhaust holes of the mold communicate with the decompression chambers, respectively, and the evacuation is performed through the decompression chambers. High pressure reduction operation. Therefore, it is suitable for producing a quartz crucible in which the bubble content in the inner peripheral portion is smaller than that in the outer peripheral portion by operating the reduced pressure state when heating the quartz powder layer. In addition, when removing the quartz crucible, the decompression chamber is eliminated by removing the mold from the mold holder, the exhaust hole of the mold comes into contact with the atmosphere, and the atmosphere enters between the quartz crucible and the inner peripheral surface of the mold through the exhaust hole. Therefore, it is easy to take out the quartz crucible.
【００２２】本発明の製造装置によって得られる石英ル
ツボは、内周部分の気泡含有率が小さく、外周部分の気
泡含有率の大きなルツボが得られる。この石英ルツボ
は、使用時の加熱によっても、内周部分の微小気泡が気
泡含有率の大きな外周部分に吸収されて内周部分の気泡
の熱膨張が抑制されるので、ルツボ内周面の部分的な剥
離を生じる虞がなく、単結晶化率が格段に良い。In the quartz crucible obtained by the manufacturing apparatus of the present invention, a crucible having a small bubble content in the inner peripheral portion and a large bubble content in the outer peripheral portion can be obtained. In this quartz crucible, even when heated during use, the microbubbles in the inner peripheral portion are absorbed by the outer peripheral portion having a high bubble content and the thermal expansion of the bubbles in the inner peripheral portion is suppressed. There is no danger of delamination, and the single crystallization ratio is remarkably good.
【図１】本発明に係る製造装置の概略断面図。FIG. 1 is a schematic sectional view of a manufacturing apparatus according to the present invention.
【図２】図１の装置を分離した状態を示す断面説明図。FIG. 2 is an explanatory sectional view showing a state in which the apparatus of FIG. 1 is separated.
【図３】石英ルツボの取り出す状態を示す断面説明図。FIG. 3 is an explanatory sectional view showing a state in which a quartz crucible is taken out.
１０：石英ルツボ製造装置、２０：モールド形成部分、
２１：モールド、２１ａ：周壁、２１ｂ：底部、２１
ｃ:内周面、２１ｄ：凸部、２１ｅ：嵌合溝 ２２：モールドホルダー、２２ａ：周壁、２２ｂ：底
部、２３：減圧室、２４：排気孔、２５：通気孔10: quartz crucible manufacturing apparatus, 20: mold forming part,
21: mold, 21a: peripheral wall, 21b: bottom, 21
c: inner peripheral surface, 21d: convex portion, 21e: fitting groove 22: mold holder, 22a: peripheral wall, 22b: bottom portion, 23: decompression chamber, 24: exhaust hole, 25: vent hole
───────────────────────────────────────────────────── フロントページの続き (72)発明者 武下 臣 秋田県秋田市茨島５−14−３ 日本高純 度石英株式会社秋田工場内 (72)発明者 渡辺 乃扶也 秋田県秋田市茨島３−１−18 三菱金属 株式会社秋田製錬所内 (72)発明者 立野 信之 秋田県秋田市茨島５−14−３ 日本高純 度石英株式会社秋田工場内 (72)発明者 ジョン・アレキサンダー・ウインターバ ン イギリス国、ノース・シールズ、エヌイ ー30・30ピーイー、タインマウス、エラ スマー・ガーデンズ ７ (56)参考文献 特開 平１−160836（ＪＰ，Ａ) 特開 平１−157426（ＪＰ，Ａ) 特開 平１−157427（ＪＰ，Ａ) 特開 平１−157428（ＪＰ，Ａ) ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Minoru Takeshita 5-14-3 Ibarjima, Akita-shi, Akita Japan High Purity Quartz Co., Ltd. Akita Plant (72) Inventor Nobuya Watanabe 3 Ibarjima, Akita-shi, Akita −1-18 Mitsubishi Metal Corporation Akita Smelter & Refinery (72) Inventor Nobuyuki Tateno 5-14-3 Ibarjima, Akita City, Akita Japan High Purity Quartz Co., Ltd. Akita Plant (72) Inventor John Alexander Winterba United Kingdom, North Shields, N 30.30 P.E., Tynemouth, Erasmer Gardens 7 (56) References JP-A 1-160836 (JP, A) JP-A 1-157426 (JP, A) JP-A-1-157427 (JP, A) JP-A-1-157428 (JP, A)
Claims (2)
の回転手段、該モールドの減圧手段、該モールドの内側
に挿入される出し入れ自在な加熱手段を有する石英ルツ
ボ製造装置において、石英粉が装入されるモールドと該
モールドを支持するモールドホルダーによってモールド
部分が形成されており、該モールドの底部がモールドホ
ルダー上端に着脱自在に嵌合され、これによりモールド
底部とモールドホルダーの間に気密な減圧室が形成さ
れ、モールドに設けた該減圧室に通じる複数の排気孔を
通じてモールドが減圧されると共にモールドが交換可能
であることを特徴とする石英ルツボ製造装置。1. A quartz crucible manufacturing apparatus comprising a rotatable hollow mold, a rotating means for the mold, a depressurizing means for the mold, and a heating means which can be inserted and removed inside the mold, wherein quartz powder is charged. A mold portion is formed by a mold to be molded and a mold holder for supporting the mold, and the bottom of the mold is detachably fitted to the upper end of the mold holder, whereby an airtight vacuum chamber is provided between the mold bottom and the mold holder. Wherein the mold is decompressed through a plurality of exhaust holes communicating with the decompression chamber provided in the mold and the mold is replaceable.
上端が挿入する嵌合溝が形成されていると共に、該モー
ルド底部の外周縁部にモールドホルダー上部内周面に密
着する凸部が形成されている請求項１に記載の石英ルツ
ボ製造装置。2. A fitting groove into which an upper end of a mold holder is inserted is formed on an outer periphery of a bottom of the mold, and a convex portion which is in close contact with an inner peripheral surface of an upper portion of the mold holder is formed on an outer peripheral edge of the bottom of the mold. The quartz crucible manufacturing apparatus according to claim 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9067778A JP2736969B2 (en) | 1997-03-21 | 1997-03-21 | Quartz crucible manufacturing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9067778A JP2736969B2 (en) | 1997-03-21 | 1997-03-21 | Quartz crucible manufacturing equipment |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20477888A Division JPH0255285A (en) | 1988-08-19 | 1988-08-19 | Method and appartus for producing quartz crucible |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1017391A JPH1017391A (en) | 1998-01-20 |
| JP2736969B2 true JP2736969B2 (en) | 1998-04-08 |
Family
ID=13354763
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9067778A Expired - Lifetime JP2736969B2 (en) | 1997-03-21 | 1997-03-21 | Quartz crucible manufacturing equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2736969B2 (en) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4482567B2 (en) * | 1998-05-25 | 2010-06-16 | 信越石英株式会社 | Method for producing quartz glass crucible for pulling silicon single crystal |
| US6546754B1 (en) | 2000-10-27 | 2003-04-15 | General Electric Company | Apparatus for silica crucible manufacture |
| JP4493067B2 (en) * | 2001-07-09 | 2010-06-30 | コバレントマテリアル株式会社 | Quartz glass crucible manufacturing equipment |
| JP4300333B2 (en) | 2002-03-14 | 2009-07-22 | ジャパンスーパークォーツ株式会社 | Manufacturing method and apparatus for quartz glass crucible by ring arc and quartz glass crucible |
| JP4300334B2 (en) | 2002-08-15 | 2009-07-22 | ジャパンスーパークォーツ株式会社 | Recycling method of quartz glass crucible |
| JP5273512B2 (en) | 2007-10-25 | 2013-08-28 | 株式会社Ｓｕｍｃｏ | Quartz glass crucible and its manufacturing method and application |
| US20110023773A1 (en) | 2008-03-31 | 2011-02-03 | Japan Super Quartz Corporation | Vitreous silica crucible and method of manufacturing the same |
| KR101097097B1 (en) | 2008-07-10 | 2011-12-22 | 쟈판 스파 쿼츠 가부시키가이샤 | Method for producing quartz glass crucible |
-
1997
- 1997-03-21 JP JP9067778A patent/JP2736969B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1017391A (en) | 1998-01-20 |
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