JP2699476B2 - Arc lighting device - Google Patents
Arc lighting deviceInfo
- Publication number
- JP2699476B2 JP2699476B2 JP63287985A JP28798588A JP2699476B2 JP 2699476 B2 JP2699476 B2 JP 2699476B2 JP 63287985 A JP63287985 A JP 63287985A JP 28798588 A JP28798588 A JP 28798588A JP 2699476 B2 JP2699476 B2 JP 2699476B2
- Authority
- JP
- Japan
- Prior art keywords
- optical fiber
- arc
- fiber bundle
- partial optical
- partial
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、半導体及び電子回路等の形成に用いられる
露光装置における円弧照明装置に関するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an arc illuminator in an exposure apparatus used for forming semiconductors, electronic circuits, and the like.
従来の技術 近年、半導体製造におけるパターンの一括露光は反射
型投影露光装置によって行われ、その照明光学系は円弧
スリット状照明を必要とする。2. Description of the Related Art In recent years, collective exposure of a pattern in semiconductor manufacturing is performed by a reflection type projection exposure apparatus, and its illumination optical system requires arc slit illumination.
最近、円弧スリット状照明を効率良く実現するために
光ファイバーの利用が提案されている（例えば、特開昭
62−2618号公報参照）。第５図はその構成原理を示した
ものであり、１は超高圧水銀ランプ、２は楕円面反射
鏡、３は円板状入射端４と円弧状に整形した射出端５と
を備えた石英光ファイバー束、６は円弧スリット状射出
端５の像をマスク７上に投影像８の如く投影するリレー
レンズである。石英ファイバー束３は、照度ムラを解消
するために、その素線を入射端と出力端とでランダムに
配列してある。Recently, utilization of an optical fiber has been proposed for efficiently realizing arc slit illumination (for example, see
No. 62-2618). FIG. 5 shows the principle of its construction, wherein 1 is an ultra-high pressure mercury lamp, 2 is an ellipsoidal reflecting mirror, 3 is a quartz having a disc-shaped entrance end 4 and an exit end 5 shaped into an arc. The optical fiber bundle 6 is a relay lens that projects the image of the arc-shaped slit-shaped exit end 5 onto the mask 7 as a projected image 8. In the quartz fiber bundle 3, the strands are randomly arranged at an incident end and an output end in order to eliminate illuminance unevenness.
その動作は、楕円面反射鏡２の第１焦点に置かれた超
高圧水銀灯１のアーク光は光線9,10の如く反射して、楕
円面反射鏡２の第２焦点に置かれた光ファイバー束３の
円板状入射端４より入り、光ファイバーを通って円弧状
に整形した射出端５より出る。この円弧状射出端５から
出た光の投影像８がリレーレンズ６によりマスク７の上
に結像する。マスク全面の照明は、マスク７を矢印11の
方向に走査することによって行う。また投影像８はリレ
ーレンズ６の特性により円弧状射出端５を忠実に再現す
るものではなくボケを利用して照度ムラを減少させるこ
とが可能である。The operation is such that the arc light of the ultra-high pressure mercury lamp 1 placed at the first focal point of the elliptical reflecting mirror 2 is reflected as rays 9 and 10, and the optical fiber bundle placed at the second focal point of the elliptical reflecting mirror 2 3 enters through the disc-shaped entrance end 4 and exits through the exit end 5 shaped into an arc through an optical fiber. The projected image 8 of the light emitted from the arc-shaped exit end 5 is formed on the mask 7 by the relay lens 6. Illumination of the entire mask is performed by scanning the mask 7 in the direction of arrow 11. Further, the projection image 8 does not faithfully reproduce the arc-shaped exit end 5 due to the characteristics of the relay lens 6, but can reduce the illuminance unevenness by using blur.
発明が解決しようとする課題 しかしながら、上記のような構成によっては、実際上
光ファイバー３の入射端４と射出端５とで光ファイバー
素線を完全にランダムに配列することは難かしく、入射
端面上での光量ムラが射出端面上での光量ムラを引き起
すものであった。また、円弧状射出端５の像をボカして
マスク７上に投影することは、必然的に照明光量の低下
を招くものでもあった。However, according to the above-described configuration, it is actually difficult to completely randomly arrange the optical fiber wires between the input end 4 and the output end 5 of the optical fiber 3, and thus it is difficult to arrange the optical fibers on the input end face. The uneven light amount caused uneven light amount on the emission end face. Further, blurring the image of the arc-shaped exit end 5 and projecting it on the mask 7 inevitably causes a reduction in the amount of illumination light.
課題を解決するための手段 上記課題を解決するために本発明の円弧照明装置は、
光ファイバー束が複数の部分光ファイバー束から成り、
その出射端は円弧の長さ方向に列状に並べた部分光ファ
イバー束の出射端を積層して構成し、光ファイバー束の
入射端は部分光ファイバー束の束ねた入射端をさらに束
ねて構成したものである。Means for Solving the Problems In order to solve the above problems, the arc lighting device of the present invention is
The optical fiber bundle comprises a plurality of partial optical fiber bundles;
The output end is formed by laminating the output ends of the partial optical fiber bundles arranged in a line in the length direction of the arc, and the incident end of the optical fiber bundle is formed by further bundling the incident end of the partial optical fiber bundle. is there.
作用 本発明は上記した構成によって、光ファイバー束の入
射端上で光量にムラがあっても、射出端においては、円
弧の長さ方向には光量ムラは極小となり、露光ムラを解
消することができる。Effect of the Invention With the above configuration, even when the light amount is uneven on the incident end of the optical fiber bundle, the light amount unevenness is minimized in the length direction of the arc at the exit end, and the exposure unevenness can be eliminated by the above configuration. .
実 施 例 以下、本発明の一実施例の円弧照明装置について図面
を参照しながら説明する。Embodiment Hereinafter, an arc illuminating device according to an embodiment of the present invention will be described with reference to the drawings.
第１図は本発明の第１の実施例における円弧照明装置
の部分光ファイバー束の斜視図である。第１図におい
て、21は光ファイバー素線であり、Ａは射出端22におい
てこれを円弧の長さ方向に一列に並べ、入射端23におい
て一束に束ねた部分光ファイバー束である。第２図は、
部分光ファイバー束Ａ〜Ｔを射出端22において積層した
様子を示す模式図である。全体で円弧スリット状射出端
24を形成している。第３図は、部分光ファイバー束Ａ〜
Ｔを入射端23側において、束ねた様子を示す模式図であ
る。全体で円板状入射端25を形成している。第２図の射
出端24の部分光ファイバー束Ａ〜Ｔは、第３図の入射端
25の部分光ファイバー束Ａ〜Ｔに連なっている。FIG. 1 is a perspective view of a partial optical fiber bundle of an arc illuminating device according to a first embodiment of the present invention. In FIG. 1, reference numeral 21 denotes an optical fiber strand, and A denotes a partial optical fiber bundle which is arranged in a line in the length direction of an arc at an emission end 22 and bundled at an incidence end 23. Fig. 2
FIG. 6 is a schematic diagram showing a state in which partial optical fiber bundles A to T are stacked at an emission end 22. Arc-shaped slit-shaped exit end as a whole
Forming 24. FIG. 3 shows partial optical fiber bundles A to
FIG. 9 is a schematic diagram showing a state in which T is bundled at the incident end 23 side. A disk-shaped incident end 25 is formed as a whole. The partial optical fiber bundles A to T at the exit end 24 in FIG.
It is connected to 25 partial optical fiber bundles A to T.
以上のように構成された光ファイバー束26を有する円
弧照明装置の動作は、第３図の円板状入射端25に入った
点光源ランプからの光は、部分光ファイバー束Ａ〜Ｔに
入り、第２図に示す円弧スリット状射出端25より、各部
分光ファイバー束Ａ〜Ｔ毎に円弧の長さ方向に１列に引
き延ばされた光束となって射出し、全体としてその積層
した円弧スリット照明となる。仮に第３図の入射端25に
おいて光量ムラがあったとしても第２図の射出端24にお
いては、部分光ファイバー束Ａ〜Ｔの各層内において
は、円弧の長さ方向には照度分布の差は極小となり、円
弧の露光走査方向矢印27の方向には各層Ａ〜Ｔの間の光
量の差となって現われる。しかし、実露光時において
は、走査方向の照度分布ムラは露光走査によって加算さ
れて合計露光光量として実効するので問題とはならな
い。The operation of the arc illuminating device having the optical fiber bundle 26 configured as described above is as follows. The light from the point light source lamp entering the disk-shaped incident end 25 in FIG. 3 enters the partial optical fiber bundles A to T, and From the arc-slit-shaped exit end 25 shown in FIG. 2, each partial optical fiber bundle A to T is emitted as a light beam extended in one row in the length direction of the arc for each of the partial optical fiber bundles A to T. Becomes Even if the light quantity unevenness occurs at the incident end 25 in FIG. 3, at the emitting end 24 in FIG. 2, the difference in the illuminance distribution in the length direction of the arc in each layer of the partial optical fiber bundles A to T It becomes a minimum and appears as a difference in light amount between the respective layers A to T in the direction of the arc scanning exposure direction arrow 27. However, at the time of actual exposure, there is no problem because the illuminance distribution unevenness in the scanning direction is added by the exposure scanning and becomes effective as the total exposure light amount.
第４図は本発明の第２の実施例における光ファイバー
束26の入射端を示し、前記部分光ファイバー束Ａ〜Ｔの
束ね方を同心円環状にして円環状入射端28を構成したも
のであり、他の部分の形状は第１の実施例におけるもの
と同一である。これは、第５図に示すような楕円面反射
鏡を用いたような中央部の暗い照明光束を入射させるの
に効果的である。FIG. 4 shows an incident end of an optical fiber bundle 26 according to a second embodiment of the present invention, in which the bundle of the partial optical fiber bundles A to T is concentrically annular to form an annular incident end 28. The shape of the portion is the same as that in the first embodiment. This is effective for causing a dark illumination light beam at the center to enter as in the case of using an elliptical reflecting mirror as shown in FIG.
発明の効果 以上のように本発明は、複数の部分光ファイバー束の
円弧状の出射端を積層して成る射出端と、複数の部分光
ファイバーの束をさらに束ねた入射端を備えていること
により、反射型投影露光装置のための照度ムラが極小で
ある円弧照明装置を提供することができる。Effect of the Invention As described above, the present invention includes an emission end formed by laminating arc-shaped emission ends of a plurality of partial optical fiber bundles, and an incidence end obtained by further bundling a plurality of partial optical fiber bundles, An arc illuminating device with minimal illuminance unevenness for a reflective projection exposure apparatus can be provided.
第１図は本発明の第１の実施例における部分光ファイバ
ー束の斜視図、第２図は本発明の照明装置の光ファイバ
ー束の射出端の構造を示す構成図、第３図は同入射端の
構造を示す構成図、第４図は本発明の第２の実施例にお
ける光ファイバー束の入射端の構造を示す構成図、第５
図は従来の円弧スリット状照明装置の構成図である。 21……光ファイバー素線、22……部分光ファイバー束の
射出端、23……部分光ファイバー束の入射端、24……円
弧スリット状射出端、25……円板状入射端、26……光フ
ァイバー束、28……円環状入射端、Ａ〜Ｔ……部分光フ
ァイバー束。FIG. 1 is a perspective view of a partial optical fiber bundle according to a first embodiment of the present invention, FIG. 2 is a configuration diagram showing the structure of the exit end of the optical fiber bundle of the illumination device of the present invention, and FIG. FIG. 4 is a structural diagram showing the structure of the incident end of the optical fiber bundle according to the second embodiment of the present invention.
FIG. 1 is a configuration diagram of a conventional arc slit illumination device. 21: Optical fiber strand, 22: Output end of partial optical fiber bundle, 23: Input end of partial optical fiber bundle, 24: Arc slit exit end, 25: Disk-shaped incident end, 26: Optical fiber bundle , 28... Annular entrance end, A to T... Partial optical fiber bundle.
Claims (2)
状に整形した光の射出端とを備えた、光ファイバー束を
有し、点光源から円弧スリット状照明を作るようにした
円弧照明装置において、前記光ファイバー束が複数の部
分光ファイバー束から成り、その出射端は円弧の長さ方
向に列状に並べた部分光ファイバー束の出射端を積層し
て構成し、光ファイバー束の入射端は部分光ファイバー
束の束ねた入射端をさらに束ねて構成したことを特徴と
する円弧照明装置。An arc illuminating device having an optical fiber bundle having an incident end of light bundled with optical fibers and an emitting end of light shaped in an arc, wherein an arc slit illumination is produced from a point light source. Wherein the optical fiber bundle comprises a plurality of partial optical fiber bundles, the output end of which is formed by laminating the output ends of the partial optical fiber bundles arranged in a line in the length direction of the arc, and the input end of the optical fiber bundle is a partial optical fiber. An arc illuminator, wherein the bundled entrance ends are further bundled.
バー束を束円環状に束ねたことを特徴とする請求項１記
載の円弧照明装置。2. The arc illuminating device according to claim 1, wherein the input end of the optical fiber bundle is formed by bundling the partial optical fiber bundle into a ring shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63287985A JP2699476B2 (en) | 1988-11-15 | 1988-11-15 | Arc lighting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63287985A JP2699476B2 (en) | 1988-11-15 | 1988-11-15 | Arc lighting device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02133914A JPH02133914A (en) | 1990-05-23 |
| JP2699476B2 true JP2699476B2 (en) | 1998-01-19 |
Family
ID=17724302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63287985A Expired - Fee Related JP2699476B2 (en) | 1988-11-15 | 1988-11-15 | Arc lighting device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2699476B2 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62115719A (en) * | 1985-11-14 | 1987-05-27 | Canon Inc | Light optical system |
-
1988
- 1988-11-15 JP JP63287985A patent/JP2699476B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02133914A (en) | 1990-05-23 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |