JP2624597B2 - Clean oven - Google Patents
Clean ovenInfo
- Publication number
- JP2624597B2 JP2624597B2 JP3346224A JP34622491A JP2624597B2 JP 2624597 B2 JP2624597 B2 JP 2624597B2 JP 3346224 A JP3346224 A JP 3346224A JP 34622491 A JP34622491 A JP 34622491A JP 2624597 B2 JP2624597 B2 JP 2624597B2
- Authority
- JP
- Japan
- Prior art keywords
- filter
- temperature
- gas
- article
- hood
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Drying Of Solid Materials (AREA)
- Devices For Use In Laboratory Experiments (AREA)
Description
【０００１】[0001]
【産業上の利用分野】本発明は熱処理用のクリーンオー
ブンに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean oven for heat treatment.
【０００２】[0002]
【従来の技術】熱処理用クリーンオーブンは例えば液晶
ディスプレイにおけるガラス基板上の配向膜やカラーフ
ィルタ生成のために塗布された液状樹脂材料の焼成、各
種精密材料等の乾燥、熱処理等に用いられる。かかる従
来クリーンオーブンは、図３に例示するように、断熱壁
で形成された熱処理槽２を有し、その開口が断熱扉１に
よって開閉されるようになっており、熱処理槽２内には
温度調節部２１と物品を収容する物品収容部２２とが設
けられ、温度調節部２１には加熱用のヒータ２１１及び
モータＭによって回転駆動される空気循環用のファン２
１２が配置されている。温度調節部２１からの出口には
ＨＥＰＡフィルタ（ヘパフィルタ）と呼ばれている高集
塵性フィルタ３が配置されている。また、扉１の内面に
は物品収容部２２内の空気を温度調節部２１へ導くダク
ト部１１が形成されている。2. Description of the Related Art A clean oven for heat treatment is used, for example, for baking a liquid resin material applied for forming an alignment film or a color filter on a glass substrate in a liquid crystal display, for drying various kinds of precision materials, and for heat treatment. As shown in FIG. 3, such a conventional clean oven has a heat treatment tank 2 formed of a heat insulating wall, and an opening thereof is opened and closed by a heat insulating door 1. An adjustment section 21 and an article storage section 22 for storing articles are provided. The temperature adjustment section 21 includes a heater 211 for heating and a fan 2 for air circulation rotated by a motor M.
12 are arranged. A high dust collecting filter 3 called a HEPA filter (hepa filter) is arranged at an outlet from the temperature control unit 21. Further, on the inner surface of the door 1, a duct portion 11 for guiding the air in the article storage portion 22 to the temperature control portion 21 is formed.
【０００３】この従来クリーンオーブンによると、温度
調節部２１においてヒータ２１１により所定温度まで加
熱された温調気体は、ファン２１２の運転によりＨＥＰ
Ａフィルタ３を通って浄化されたのち、物品収容部２２
へ送り出され、そこの棚板２２１に載置した被加熱物品
Ｗを加熱し、扉１のダクト部１１を通って再び温度調節
部２１へ吸い込まれるように循環する。According to this conventional clean oven, the temperature control gas heated to a predetermined temperature by the heater 211 in the temperature control unit 21 is supplied to the HEP by the operation of the fan 212.
After being purified through the A filter 3, the article storage unit 22
Is heated, and the article to be heated W placed on the shelf 221 therein is heated and circulated through the duct section 11 of the door 1 so as to be sucked into the temperature control section 21 again.
【０００４】[0004]
【発明が解決しようとする課題】しかし、前記従来クリ
ーンオーブンによると、熱処理槽２内の風速は約０．５
ｍ／ｓｅｃ程度であり、このように風速が小さいので、
例えば被加熱物品Ｗが図２に示すようなラック４、即
ち、両端が開口した枠体４１の中に複数段に液晶ディス
プレイガラス基板Ｇを搭載したもののような場合、物品
収容部２２を流れる空気はこのラック４を避けるように
して流れてしまう。その結果、各ガラス基板Ｇの温度変
化は、ＨＥＰＡフィルタ３の空気吹き出し口における空
気温度の変化に対し遅れてしまい、しかも、各ガラス基
板Ｇにおいてフィルタに近い部分と、遠い部分でも温度
変化に時間的ずれが生じ、定値温度運転を行っても、各
ガラス基板Ｇの各部が所定温度まで十分、均一に上昇し
きれない場合が生じる。また、所定の熱処理パターンで
運転を行った場合、各ガラス基板Ｇの各部がそのパター
ンに一様に追随できず、所望の熱処理を行えないことも
ある。However, according to the conventional clean oven, the wind speed in the heat treatment tank 2 is about 0.5.
m / sec, and since the wind speed is small like this,
For example, when the article to be heated W is a rack 4 as shown in FIG. 2, that is, a frame 41 having both ends opened, and a plurality of liquid crystal display glass substrates G mounted on the frame 41, air flowing through the article accommodating section 22. Flows in such a way as to avoid the rack 4. As a result, the change in the temperature of each glass substrate G is delayed with respect to the change in the air temperature at the air outlet of the HEPA filter 3. There is a case where a target shift occurs and each part of each glass substrate G cannot be sufficiently and uniformly raised to a predetermined temperature even when the constant temperature operation is performed. In addition, when the operation is performed in a predetermined heat treatment pattern, each part of each glass substrate G cannot uniformly follow the pattern, and a desired heat treatment may not be performed.
【０００５】例えば、図３に示すクリーンオーブンにお
いて、物品収容部２２に収容したガラス基板Ｇを定値運
転で熱処理すべく、温度調節部２１におけるヒータ２１
１をフル運転すると、図４の（Ａ）図に示すように、フ
ィルタ３の空気吹き出し口温度はラインで示すように
速やかに上昇するにも拘らず、ガラス基板は、フィルタ
に近い部分ではラインＡに示すように温度上昇し、フ
ィルタから遠い部分ではラインに示すように遅れて温
度上昇し、ガラス基板の各部が同時的に均一に目的の温
度に達し得ないという状態が発生する。また、所定の熱
処理温度より少し低い温度からゆっくり温度上昇させて
熱処理時間のスタート時のガラス基板上各部の温度バラ
つきを少なくしようとして、定値運転に至る前にランプ
運転を挿入し、当初、所定の時間、ヒータ２１１をフル
運転して温度上昇させ、その後、予め定めた温度勾配
（例えば０．５℃／分）でランプ運転を行うと、図４の
（Ｂ）図にラインで示すように、フィルタ３の出口部
分では速やかに温度上昇し、ランプ運転も正常に行える
が、ガラス基板Ｇの温度上昇は、フィルタに近い部分で
はラインＡのようになり、フィルタから遠い部分では
ラインで示すように遅れ、しかも目的の温度に到達し
得ない。For example, in a clean oven shown in FIG. 3, a heater 21 in a temperature control unit 21 is used to heat-treat a glass substrate G stored in an article storage unit 22 by a constant operation.
As shown in FIG. 4 (A), when the full operation of the filter 1 is performed, the glass substrate is kept in a line near the filter although the temperature of the air outlet of the filter 3 rapidly rises as shown by the line. The temperature rises as shown in A, and the temperature rises later in the portion far from the filter, as shown by the line, and a state occurs in which each portion of the glass substrate cannot simultaneously reach the target temperature uniformly and uniformly. Also, in order to reduce the temperature variation of each part on the glass substrate at the start of the heat treatment time by gradually increasing the temperature from a temperature slightly lower than the predetermined heat treatment temperature, a lamp operation is inserted before reaching a fixed value operation, and initially, a predetermined operation is performed. For a period of time, the heater 211 is fully operated to raise the temperature, and then the lamp is operated at a predetermined temperature gradient (for example, 0.5 ° C./min), as shown by a line in FIG. Although the temperature rises quickly at the outlet of the filter 3 and the lamp operation can be performed normally, the temperature rise of the glass substrate G is as indicated by a line A in a portion close to the filter and as indicated by a line in a portion far from the filter. Delayed and unable to reach target temperature.
【０００６】以上の結果、各ガラス基板において、その
各部で温度にバラつきが生じ、さらにはガラス基板間に
おいても温度にバラつきが生じ、各ガラス基板温度を同
一の所定温度で、且つ、一つ一つの基板において各部で
温度のバラつきが無い状態で、全体を同一の熱処理スタ
ート時点から所定時間熱処理するということが困難とな
り、品質にバラつきが生じる。[0006] As a result, in each glass substrate, the temperature varies in each part, and the temperature also varies between the glass substrates, so that the temperature of each glass substrate is kept at the same predetermined temperature and one by one. It is difficult to heat-treat the entire substrate for a predetermined time from the start of the same heat treatment in a state where there is no temperature variation in each part of the substrate, resulting in variation in quality.
【０００７】かくしてかかる従来オーブンによると、各
被加熱物品に所定の熱処理を一様に、確実に実施し難い
という問題がある。この問題を解決する方法として、フ
ァン２１２として大風量タイプの送風ファンを採用し
て、物品収容部２２における風速を上げることが考えら
れるが、大風量送風ファンを採用すると、大容量のモー
タも必要になり、全体がそれだけコスト高につくし、大
風量処理のＨＥＰＡフィルタも必要になるが、その場
合、ＨＥＰＡフィルタの厚みを大きくすることになり、
しかし、そのように厚いＨＥＰＡフィルタは今日、一般
に入手できず、きわめてコスト高につくし、製造上の制
限もうける。Thus, according to the conventional oven, there is a problem that it is difficult to uniformly and reliably perform a predetermined heat treatment on each article to be heated. As a method of solving this problem, it is conceivable to increase the wind speed in the article storage unit 22 by employing a large air volume type blower fan as the fan 212, but if a large air volume blower fan is employed, a large capacity motor is also required. , And the overall cost increases accordingly, and a HEPA filter for large air volume processing is required. In that case, the thickness of the HEPA filter is increased,
However, such thick HEPA filters are not commonly available today and are extremely costly and have manufacturing limitations.
【０００８】以上のほか、空気流れの低圧力損の構造に
することも考えられるが、それでは装置全体が大型化
し、装置設置スペースが大きくなり、特に、クリーンオ
ーブンがクリーンルーム内に設置、使用され、該クリー
ンルームが高価であることを考えると、大型化は問題が
多い。そこで本発明は、温度調節部で温調した気体を気
体浄化フィルタを通して物品収容部へ吹き出し、再び前
記温度調節部へ戻すように循環させるクリーンオーブン
において、前記気体浄化フィルタの出口気体温度に、各
被加熱物品の、そして各被加熱物の各部の温度を従来よ
り正確に追従させて所定の熱処理を行える信頼性の高
い、それでいて従来オーブンと比べて大型化せず、格別
高価にもならず、また、従来クリーンオーブン同様の清
浄度も得られるクリーンオーブンを提供することを目的
とする。In addition to the above, it is conceivable to adopt a structure in which the air flow has a low pressure loss. However, in this case, the entire apparatus becomes large and the installation space for the apparatus becomes large. In particular, a clean oven is installed and used in a clean room. Considering that the clean room is expensive, upsizing is problematic. Therefore, the present invention provides a clean oven in which a gas whose temperature has been adjusted by a temperature adjustment unit is blown out to an article storage unit through a gas purification filter and circulated again to return to the temperature adjustment unit. It is highly reliable to perform a predetermined heat treatment by making the temperature of each part of the article to be heated, and each part of the object to be heated more accurately than before, but it does not become larger than the conventional oven and does not become particularly expensive, It is another object of the present invention to provide a clean oven that can obtain the same cleanliness as a conventional clean oven.
【０００９】[0009]
【課題を解決するための手段】本発明は前記目的に従
い、温度調節部で温調した気体を気体浄化フィルタを通
して物品収容部へ吹き出し、再び前記温度調節部へ戻す
ように循環させるクリーンオーブンにおいて、前記フィ
ルタの気体吹き出し口に該フィルタから出た気体を前記
物品収容部に配置される物品に向け案内するフードを設
け、該フードの気体吹き出し口面積を前記フィルタの気
体通過面積より小さく、且つ、該物品収容部内における
前記物品を含む所定の限定領域の、前記フードからの気
体吹き出し方向に垂直な断面積とほぼ同程度に設定し、
前記気体が前記フィルタを通過したのち、該フードを通
って該物品に向かって集中的に吹き出すようにしたこと
を特徴とするクリーンオーブンを提供するものである。According to the present invention, there is provided a clean oven which, in accordance with the above object, circulates a gas whose temperature has been controlled by a temperature control section through a gas purification filter to an article storage section and returns the gas to the temperature control section again. The file
Gas discharged from the filter into the gas outlet of the filter
A hood for guiding the articles placed in the article storage
The area of the gas outlet of the hood is
Smaller than the body passage area, and in the article storage section
Air from the hood in a predetermined limited area including the article
Set the cross-sectional area perpendicular to the body blowing direction to approximately the same,
After the gas passes through the filter, it passes through the hood.
The present invention provides a clean oven characterized by intensively blowing toward the article .
【００１０】この本発明クリーンオーブンにおいて、前
記フードの吹き出し口面積は、前記の大きさに設定する
であるが、その場合、そのフードから吹き出す気体が、
該フードに対し配置される全ての被加熱物品に沿って一
様に又は略一様に流れるように決定すればよい。また、
物品に対する気体の流れを円滑にするため、物品収容部
における棚板に物品を載置するにあたっては、該棚板と
物品の間に風が通る空間を設けるためのスペーサ部材を
配置してもよい。[0010] In the present invention a clean oven, outlet area of the hood is set to the size of the
However, in that case, the gas blown out of the hood is
What is necessary is just to determine so that it may flow uniformly or substantially uniformly along all the heated articles arranged with respect to the hood . Also,
In order to smooth the flow of gas to the articles, when placing the articles on the shelf board in the article storage section, a spacer member for providing a space through which the wind passes between the shelf board and the articles may be arranged. .
【００１１】[0011]
【作用】本発明クリーンオーブンによると、温度調節部
で温調された気体は気体浄化フィルタを通過することで
浄化され、物品収容部へ吹き出される。気体浄化フィル
タから物品収容部へ吹き出された気体は、該フィルタの
出口に設けたフードを通り、該フードの、前記フィルタ
の気体通過面積より小さく設定されて絞られた気体吹き
出し口から物品に向け、従来より速い風速で集中的に吹
き出される。さらに該気体は、該フードの気体吹き出し
口面積を該物品を含む限定領域の断面積とほぼ同程度に
設定してあるので、各物品に沿って円滑に流れる。かく
して、各物品が、そして各物品の各部が所定温度に同時
的に均一に加熱され、所望の熱処理が実施される。According to the clean oven of the present invention, the gas whose temperature has been adjusted by the temperature control section is purified by passing through the gas purification filter, and is blown out to the article storage section. The gas blown out from the gas purification filter to the article storage section passes through a hood provided at an outlet of the filter, and the
Gas passage area smaller than the set with throttled gas blown toward the <br/> spout to the article, Ru is intensively blown at a faster wind speeds than before. Further, the gas is blown out of the hood.
Make the mouth area approximately the same as the cross-sectional area of the limited area containing the article
Since it is set, it flows smoothly along each article. Thus, each article and each part of each article are simultaneously and uniformly heated to a predetermined temperature, and a desired heat treatment is performed.
【００１２】[0012]
【実施例】以下本発明の実施例を図１及び図２を参照し
て説明する。図１は本発明の一実施例の概略断面図であ
り、図２はその物品収容部に収容される液晶ディスプレ
イのガラス基板Ｇとこれを複数段に支持するラック４の
正面図である。このクリーンオーブンは、図３に示す従
来クリーンオーブンを改良したものであり、次の点を除
いて実質上同構造である。即ち異なる点は、ＨＥＰＡ
フィルタ３の空気吹き出し口にフード５を設けた点及び
扉１内側の空気ダクト部をダクト部１１０とした点で
ある。図３に示す参照符号と同じ参照符号を付してある
部品は図３における部品と同一部品である。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a schematic sectional view of one embodiment of the present invention, and FIG. 2 is a front view of a glass substrate G of a liquid crystal display accommodated in the article accommodating portion and a rack 4 supporting the glass substrate G in a plurality of stages. This clean oven is an improvement of the conventional clean oven shown in FIG. 3, and has substantially the same structure except for the following points. That is, the difference is that HEPA
The point is that the hood 5 is provided at the air outlet of the filter 3 and the air duct portion inside the door 1 is a duct portion 110. Components denoted by the same reference numerals as those shown in FIG. 3 are the same as the components in FIG.
【００１３】フード５は各ＨＥＰＡフィルタ３の空気吹
き出し口側に連設され、物品収容部２２の棚板２２０上
に載置される物品に向け集中的に空気を流すようにその
吹き出し口面積Ｓを絞ってある。さらに説明すると、フ
ード５の気体吹き出し口面積Ｓはフィルタ５の気体通過
面積より小さく、且つ、棚板２２０上の物品が配置され
る所定の限定領域（ここでは後述するラック４を載置す
る領域）の、フード５からの気体吹き出し方向に垂直な
断面積とほぼ同程度に設定してあり、これにより、気体
がフィルタ３を通過したのち、フード５を通って該棚板
２２０上の物品（ここでは後述するラック４内のガラス
基板Ｇ）に向かって集中的に吹き出すようにしてある。
また、扉１内側のダクト１１０はフード５から吹き出
された空気が棚板２２０上の各被加熱物に沿って円滑に
流れ、再び温度調節部２１へ円滑に戻るように形成して
ある。The hood 5 is connected to the air outlet side of each HEPA filter 3 and has an outlet area S such that air flows intensively toward the articles placed on the shelf 220 of the article storage section 22. Has been squeezed. To explain further,
The gas outlet area S of the filter 5 is equal to the gas passage of the filter 5.
An article smaller than the area and on the shelf 220 is placed
A predetermined limited area (here, a rack 4 described later
Area) perpendicular to the direction in which the gas is blown out of the hood 5.
It is set to be almost the same as the cross-sectional area.
After passing through the filter 3, the shelves
220 (the glass in the rack 4 described later)
It is blown intensively toward the substrate G).
The duct 110 inside the door 1 is formed so that the air blown out of the hood 5 flows smoothly along each object to be heated on the shelf 220 and returns to the temperature control section 21 again smoothly.
【００１４】各棚板２２０上には図１及び図２に示すよ
うに、スペーサ２２２を介してラック４が載置され、各
ラック４には熱処理されるべき液晶ディスプレイ装置の
ガラス基板Ｇを間隔を開けて複数段に搭載してある。各
ラック４はフード５の吹き出し口及びダクト１１０に向
かう面がそれぞれ開口され、ラック４内を空気が自由に
通過できるように形成してある。As shown in FIGS. 1 and 2, racks 4 are mounted on each shelf 220 via spacers 222, and a glass substrate G of a liquid crystal display device to be heat-treated is placed on each rack 4 at intervals. Is opened and mounted on multiple stages. Each of the racks 4 has an opening on the surface facing the outlet of the hood 5 and the duct 110, and is formed so that air can freely pass through the rack 4.
【００１５】各フード５の吹き出し口の面積Ｓは一つの
ラック４に搭載されている全ガラス基板を覆うに十分な
大きさであり、且つ、フィルタ３を出てきた空気を集中
的にラック４内に通過させることができる大きさを有し
ている。以上説明したクリーンオーブンによると、従来
装置同様、温度調節部２１においてヒータ２１１により
所定温度に加熱された空気がファン２１２の運転により
温度調節部からＨＥＰＡフィルタ３を通って浄化された
のち吹き出され、さらに出口を絞ったフード５からラッ
ク４に、従来より速い風速で吹き出され、該ラック４内
を通過し、その中の各ガラス基板Ｇを、全体的にフィル
タ３の吹き出し口温度に追随させて変化させるように通
過し、扉ダクト１１０から再び温度調節部２１へ戻る。The area S of the outlet of each hood 5 is large enough to cover all the glass substrates mounted on one rack 4, and the air coming out of the filter 3 is concentrated on the rack 4. It has a size that allows it to pass through. According to the clean oven described above, similarly to the conventional apparatus, the air heated to a predetermined temperature by the heater 211 in the temperature control unit 21 is purified by the operation of the fan 212 from the temperature control unit through the HEPA filter 3, and then blown out. Further, the outlet 5 is blown out of the hood 5 to the rack 4 at a higher wind speed than the conventional one, passes through the rack 4, and causes each glass substrate G in the whole to follow the outlet temperature of the filter 3. It passes through so as to change, and returns to the temperature control unit 21 from the door duct 110 again.
【００１６】かくして各ガラス基板Ｇはその各部が同時
的に均一に所定温度に変化し、所定時間で熱処理を受け
ることができる。特に、所定温度の熱処理スタート前
に、ランプ運転を挿入し、該所定温度より低めの温度か
らゆっくり温度上昇させて所定温度へもって行くように
すると、一層確実に、各ガラス基板の各部が一様に、同
時的に所定の温度に達し、所定温度による熱処理スター
ト時の温度のバラつきを小さくでき、各ガラス基板に対
し、均一な温度と時間で熱処理を行える。Thus, each portion of each glass substrate G is simultaneously and uniformly changed to a predetermined temperature, and can be subjected to a heat treatment for a predetermined time. In particular, before the start of the heat treatment at the predetermined temperature, a lamp operation is inserted, and the temperature is gradually increased from a temperature lower than the predetermined temperature to the predetermined temperature, so that each part of each glass substrate is more reliably uniform. In addition, the temperature reaches the predetermined temperature at the same time, the temperature variation at the start of the heat treatment at the predetermined temperature can be reduced, and the heat treatment can be performed on each glass substrate at a uniform temperature and time.
【００１７】このようなフード５を採用し、全体構造を
大幅に大型化しないことで送風能力を向上させることが
でき、従来物品収容部において０．５ｍ／ｓｅｃ程度の
風速しか得られなかったものが、ここでは２．５ｍ／ｓ
ｅｃ程度の風速を得ることが可能となっている。なお、
前記実施例では、ラック４内の各ガラス基板Ｇに対して
全体に一様に熱気を供給するため、ラック４の下にスペ
ーサ２２２を配置したが、各物品に対し一様な気流が生
じる場合には、必ずしもこのようなスペーサは必要では
ない。By adopting such a hood 5, it is possible to improve the blowing capacity by not greatly increasing the overall structure, and it was possible to obtain only a wind speed of about 0.5 m / sec in the conventional article storage section. But here, 2.5m / s
It is possible to obtain a wind speed of about ec. In addition,
In the above-described embodiment, the spacer 222 is disposed under the rack 4 in order to uniformly supply hot air to each glass substrate G in the rack 4. Does not necessarily require such a spacer.
【００１８】以上説明したオーブンは、従来オーブンと
比べて、フード５を設けている点が特に代わっているだ
けであるから、従来オーブンと比べて大型化せず、格別
高価にもならず、また、従来クリーンオーブン同様の清
浄度も得られる。The oven described above is different from the conventional oven only in that the hood 5 is provided, and therefore, does not increase in size and is not particularly expensive compared to the conventional oven. The same cleanliness as that of the conventional clean oven can be obtained.
【００１９】[0019]
【発明の効果】以上説明したように本発明によると、温
度調節部で温調した気体を気体浄化フィルタを通して物
品収容部へ吹き出し、再び前記温度調節部へ戻すように
循環させるクリーンオーブンであって、前記気体浄化フ
ィルタの出口気体温度に各被加熱物品の、そして各被加
熱物品の各部の温度を従来より正確に追従させて所定の
熱処理を行える信頼性の高い、それでいて従来オーブン
と比べて大型化せず、格別高価にもならず、また、従来
クリーンオーブン同様の清浄度も得られるクリーンオー
ブンを提供することができる。As described above, according to the present invention, there is provided a clean oven in which gas whose temperature has been controlled by a temperature control section is blown out to an article storage section through a gas purification filter and circulated again to return to the temperature control section. Highly reliable, capable of performing a predetermined heat treatment by accurately following the temperature of each heated article, and the temperature of each part of each heated article to the outlet gas temperature of the gas purification filter as compared with the conventional oven, and yet being larger than the conventional oven It is possible to provide a clean oven which does not become expensive, is not particularly expensive, and has a cleanness similar to that of a conventional clean oven.
【図１】本発明の一実施例の概略断面図である。FIG. 1 is a schematic sectional view of one embodiment of the present invention.
【図２】図１に示すクリーンオーブン内に収容されるラ
ックとそれに複数段に搭載されたガラス基板の正面図で
ある。FIG. 2 is a front view of a rack housed in the clean oven shown in FIG. 1 and glass substrates mounted on the rack in a plurality of stages.
【図３】従来例の概略断面図である。FIG. 3 is a schematic sectional view of a conventional example.
【図４】図３に示す従来例におけるフィルタ吹き出し口
及び各被加熱物品の温度変化状態例を示すグラフであ
る。4 is a graph showing an example of a temperature change state of a filter outlet and each article to be heated in the conventional example shown in FIG. 3;
１ 断熱扉 １１０ 空気ダクト部 ２ 熱処理槽 ２１ 温度調節部 ２１１ ヒータ ２１２ ファン ２２ 物品収容部 ２２０ 棚板 ２２２ スペーサ ３ ＨＥＰＡフィルタ ４ ラック Ｇ ガラス基板 ５ フード Ｓ フードの吹き出し面積 DESCRIPTION OF SYMBOLS 1 Heat insulation door 110 Air duct part 2 Heat treatment tank 21 Temperature control part 211 Heater 212 Fan 22 Article storage part 220 Shelf 222 Spacer 3 HEPA filter 4 Rack G Glass substrate 5 Hood S Hood blowing area
───────────────────────────────────────────────────── フロントページの続き (72)発明者 矢埜 舜三 大阪市北区天神橋３丁目５番６号 タバ イエスペック株式会社内 (72)発明者 金森 郁夫 大阪市北区天神橋３丁目５番６号 タバ イエスペック株式会社内 (56)参考文献 特開 平３−113221（ＪＰ，Ａ) 実開 平２−30829（ＪＰ，Ｕ) ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Shunzo Yano 3-5-6 Tenjinbashi, Kita-ku, Osaka City Inside Taba Ispec Co., Ltd. (72) Inventor Ikuo Kanamori 3-5-6, Tenjinbashi, Kita-ku, Osaka City (56) References JP-A-3-113221 (JP, A) JP-A-2-30829 (JP, U)
Claims (1)
ィルタを通して物品収容部へ吹き出し、再び前記温度調
節部へ戻すように循環させるクリーンオーブンにおい
て、前記フィルタの気体吹き出し口に該フィルタから出
た気体を前記物品収容部に配置される物品に向け案内す
るフードを設け、該フードの気体吹き出し口面積を前記
フィルタの気体通過面積より小さく、且つ、該物品収容
部内における前記物品を含む所定の限定領域の、前記フ
ードからの気体吹き出し方向に垂直な断面積とほぼ同程
度に設定し、前記気体が前記フィルタを通過したのち、
該フードを通って該物品に向かって集中的に吹き出すよ
うにしたことを特徴とするクリーンオーブン。1. A balloon at a temperature regulating unit temperature control and gas to the article storage portion through the gas purifying filter, in a clean oven to circulate so returned again to the temperature adjusting portion, out the filter to a gas outlet of the filter
To the articles placed in the article storage section.
Hood is provided, and the gas outlet area of the hood is
Smaller than the gas passage area of the filter and containing the article
Of the predetermined limited area including the article in the unit.
About the same as the cross-sectional area perpendicular to the gas blowing direction
And after the gas has passed through the filter,
Intensively blows through the hood towards the article
Clean oven characterized by the fact that it is finished .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3346224A JP2624597B2 (en) | 1991-12-27 | 1991-12-27 | Clean oven |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3346224A JP2624597B2 (en) | 1991-12-27 | 1991-12-27 | Clean oven |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH05177145A JPH05177145A (en) | 1993-07-20 |
| JP2624597B2 true JP2624597B2 (en) | 1997-06-25 |
Family
ID=18381954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3346224A Expired - Lifetime JP2624597B2 (en) | 1991-12-27 | 1991-12-27 | Clean oven |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2624597B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4981543B2 (en) * | 2007-06-27 | 2012-07-25 | エスペック株式会社 | Heat treatment equipment |
| JP6291109B1 (en) * | 2017-04-20 | 2018-03-14 | 中外炉工業株式会社 | filter |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0225650A (en) * | 1988-07-12 | 1990-01-29 | Hitachi Plant Eng & Constr Co Ltd | Disassembly type clean unit |
| JPH0636430Y2 (en) * | 1988-08-19 | 1994-09-21 | タバイエスペック株式会社 | Circulating clean incubator |
| JPH03113221A (en) * | 1989-09-28 | 1991-05-14 | Hitachi Reinetsu Kk | Local cleaning air flow control device |
-
1991
- 1991-12-27 JP JP3346224A patent/JP2624597B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH05177145A (en) | 1993-07-20 |
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