JP3474087B2 - Heat treatment equipment for uniformly heating flat workpieces - Google Patents
Heat treatment equipment for uniformly heating flat workpiecesInfo
- Publication number
- JP3474087B2 JP3474087B2 JP25276797A JP25276797A JP3474087B2 JP 3474087 B2 JP3474087 B2 JP 3474087B2 JP 25276797 A JP25276797 A JP 25276797A JP 25276797 A JP25276797 A JP 25276797A JP 3474087 B2 JP3474087 B2 JP 3474087B2
- Authority
- JP
- Japan
- Prior art keywords
- article
- heat treatment
- chamber
- temperature
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C21—METALLURGY OF IRON
- C21D—MODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
- C21D9/00—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor
- C21D9/46—Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor for sheet metals
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D99/00—Subject matter not provided for in other groups of this subclass
- F27D99/0001—Heating elements or systems
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27M—INDEXING SCHEME RELATING TO ASPECTS OF THE CHARGES OR FURNACES, KILNS, OVENS OR RETORTS
- F27M2003/00—Type of treatment of the charge
- F27M2003/01—Annealing
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Engineering & Computer Science (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
- Furnace Details (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は、加熱された気体が
通過する入口及び出口を備えた熱処理部に前記入口から
前記出口の方向に置かれる平板状の物品を前記気体で加
熱して熱処理する熱処理装置に関し、特に、LCD(液
晶ディスプレイ)ガラス基板等の生産設備において配向
膜やカラーフィルタのポストベーク等の熱風加熱可能な
焼成工程に組み入れられる熱処理装置に有効に利用され
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention heats and heats a flat article placed in the direction from the inlet to the outlet in a heat treatment section having an inlet and an outlet through which heated gas is heated by the gas. The present invention relates to a heat treatment apparatus, and in particular, it is effectively used for a heat treatment apparatus incorporated in a baking process capable of hot air heating such as post-baking of an alignment film or a color filter in a production facility such as an LCD (liquid crystal display) glass substrate.
【0002】[0002]
【従来の技術】LCDガラス基板等の熱処理装置として
は、従来、空気循環加熱式の装置(例えば特開平6−3
17514号公報参照)及びホットプレート加熱式の装
置(例えば特開平6−97269号公報参照)が多用さ
れている。空気循環式熱処理装置では、所定温度に制御
された熱風をガラス表面と平行に一方向に流していた。
そのため、ガラス板の温度上昇が風上で速く風下で遅く
なり、ガラス板に発生する温度分布が焼成品質にバラツ
キを与えるという結果になっていた。この場合、ガラス
板が従来のような通常サイズのものであれば、風上側と
風下側間のガラス板の温度差も比較的小さく、焼成品質
のバラツキが許容できる範囲内にあった。2. Description of the Related Art Conventionally, as a heat treatment apparatus for LCD glass substrates, an air circulation heating type apparatus (for example, JP-A-6-3) is used.
17514) and a hot plate heating type device (see, for example, Japanese Patent Application Laid-Open No. 6-97269). In the air circulation type heat treatment apparatus, hot air controlled to a predetermined temperature is flown in one direction parallel to the glass surface.
As a result, the temperature rise of the glass plate becomes faster in the windward and slower in the leeward, and the temperature distribution generated in the glass plate gives variations in the firing quality. In this case, if the glass plate had a conventional size, the temperature difference between the glass plate on the windward side and the glass plate on the leeward side was relatively small, and variations in firing quality were within an allowable range.
【0003】しかし最近では、液晶ディスプレイの大画
面化やコストダウンのために、一度に多数の画面取りを
可能にすべく、マザーガラスを大版化する傾向にあり、
1メートル角を越えるような大版マザーガラスの技術開
発も進められている。このように1メートル角を越える
大版ガラス板を焼成すると、風上側が昇温して熱処理す
べき所定温度に到達しても、風下側では所定温度よりも
数10℃低い温度になるという大きな昇温遅れが生じ、
焼成品質のバラツキが許容限度を越えることになる。However, recently, in order to increase the screen size of a liquid crystal display and reduce the cost, there is a tendency to increase the size of mother glass in order to enable a large number of screens at one time.
Technical development of large-sized mother glass that exceeds 1 meter square is also underway. When a large-sized glass plate exceeding 1 meter square is thus fired, even if the temperature rises on the windward side and reaches a predetermined temperature to be heat-treated, the temperature on the leeward side becomes several tens of degrees lower than the predetermined temperature. Temperature rise delay occurs,
The variation in firing quality exceeds the allowable limit.
【0004】このような温度差を小さくする方法として
は、ガラス面を流れる熱風の風速を上げて風量を多くす
ることが考えられる。しかし、熱風の風速をある程度以
上に上げると、ガラス面に形成されている感光樹脂パタ
ーン等に悪影響を与えるおそれがある。又、装置の大型
化やコストアップを招くという問題がある。即ち、ガラ
スに供給する空気としては塵埃のないクリーンエアーを
必要とするので、大きな抵抗を持つ濾材を使用した高性
能フィルタを通過させて送風するため、風速を速くする
と、送風機の風圧を上げる必要がある。As a method for reducing such a temperature difference, it is considered that the air velocity of the hot air flowing on the glass surface is increased to increase the air volume. However, if the wind speed of the hot air is increased to a certain level or higher, the photosensitive resin pattern or the like formed on the glass surface may be adversely affected. In addition, there is a problem that the size of the device is increased and the cost is increased. In other words, since clean air without dust is required as the air to be supplied to the glass, the air is passed through a high-performance filter that uses a filter medium with a large resistance, so if the wind speed is increased, it is necessary to increase the wind pressure of the blower. There is.
【0005】更に、このようなフィルタでは、濾過性能
から濾材の最大通過風速が定められているため、風量を
多くして風速を上げるには、濾材面積、従って高性能フ
ィルターの大きさや、送風機の容量を大きくする必要が
ある。又、このようなフィルターでは通過後の風が層流
になり、その後もガラス面即ち伝熱面に平行に流れるた
め、熱交換効率も良くなかった。Further, in such a filter, the maximum passing wind speed of the filter medium is determined from the filtering performance. Therefore, in order to increase the air volume by increasing the air volume, the area of the filter medium, and hence the size of the high-performance filter, and the blower It is necessary to increase the capacity. Further, in such a filter, the wind after passing becomes a laminar flow and then flows in parallel to the glass surface, that is, the heat transfer surface, so that the heat exchange efficiency is not good.
【0006】一方、ホットプレート加熱式の装置では、
熱処理時のガラスの温度分布を良くするために、プレー
トの温度分布を十分小さい値に維持する必要があるが、
ガラスサイズが大版になると、そのような温度分布の維
持が極めて難しくなると共に、極めて高精度の表面加工
をする必要があるためにコストの高い装置になる。更
に、ホットプレート加熱方式では、プレートとガラスと
を殆ど接触する程度に接近させるので、大版ガラスで
は、帯電によるガラス上の基板回路の破壊防止等が難し
い問題となる。On the other hand, in the hot plate heating type device,
In order to improve the temperature distribution of the glass during heat treatment, it is necessary to maintain the temperature distribution of the plate at a sufficiently small value,
When the glass size becomes large, it becomes extremely difficult to maintain such temperature distribution, and it is necessary to perform surface processing with extremely high accuracy, which makes the apparatus expensive. Further, in the hot plate heating method, since the plate and the glass are brought close to each other so that they are almost in contact with each other, it is difficult to prevent destruction of the substrate circuit on the glass due to electrification in the large size glass.
【0007】[0007]
【発明が解決しようとする課題】本発明は従来技術に於
ける上記問題を解決し、装置の構成機器を大型化させた
りコストを上昇させることなく、熱交換効率を良くして
平板状物品の温度上昇時の温度分布を均一化し、熱処理
性能を向上させると共に、大型の物品でも熱処理可能な
熱処理装置を提供することを課題とする。SUMMARY OF THE INVENTION The present invention solves the above problems in the prior art, improves heat exchange efficiency without increasing the size of the components of the apparatus and increasing the cost, and improves the flat article shape. It is an object of the present invention to provide a heat treatment apparatus which makes the temperature distribution uniform when the temperature rises, improves the heat treatment performance, and can heat treat even a large article.
【0008】[0008]
【課題を解決するための手段】本発明は上記課題を解決
するために、請求項1の発明は、複数段に仕切られて形
成され該仕切られた各段の両側に加熱された気体が通過
する入口及び出口を備えた熱処理部の前記各段に置かれ
る角形のLCDガラス基板から成る平板状の物品であっ
て該物品の一端側から他端側の方向が前記入口から前記
出口の方向になるように置かれる前記物品を前記気体で
加熱して熱処理する熱処理装置において、複数の開口と
該開口に設けられたガイド板とを備えていて前記各段に
設けられた偏向板からなる分流手段を有し、該分流手段
は、前記入口から前記出口の方向に少なくとも前記物品
の片面側に前記物品と並設されていて一方側が前記入口
の少なくとも大部分と導通し他方側が前記出口と導通し
前記入口と前記出口との間を仕切って前記気体を導入す
る第1室であって前記入口の側が広く前記出口の側が狭
くなっている第1室と前記気体が排出される第2室であ
って前記入口の側が狭く前記出口の側が広くなっている
第2室とを形成するように配置されていて、前記物品は
前記分流手段と対向するように前記第2室に置かれてい
て、前記開口と前記ガイド板とは、前記第1室から前記
開口を通過して分離された前記気体が前記第2室に入っ
て前記物品の少なくとも前記片面側の全域にほぼ直角方
向に吹き出して前記片面側の方向に流れるように形成さ
れていて、前記第2室は該第2室に入った前記気体が前
記片面側の方向に流れた後前記物品の前記一端側から前
記他端側の方向に流れるように形成されている、
ことを特徴とする。SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention according to claim 1 is such that a heated gas passes through both sides of each of the divided stages. A flat plate-like article made of a rectangular LCD glass substrate placed at each stage of the heat treatment section having an inlet and an outlet, and the direction from one end side to the other end side of the article is from the inlet to the outlet. In the heat treatment apparatus for heating the article placed as described above with the gas for heat treatment, the flow dividing means is provided with a plurality of openings and a guide plate provided in the openings, and the deflecting plates are provided in each of the stages. The flow dividing means is arranged in parallel with the article on at least one side of the article in the direction from the inlet to the outlet, and one side is electrically connected to at least most of the inlet and the other side is electrically connected to the outlet. The entrance and the exit A first chamber for partitioning the space between the first chamber and the second chamber for introducing the gas, the inlet side being wide and the outlet side being narrow, and the second chamber for discharging the gas, the inlet side being A second chamber that is narrow and wide on the side of the outlet, and the article is placed in the second chamber so as to face the flow dividing means, and the opening And the guide plate from the first chamber to the
The gas separated through the opening enters the second chamber.
Wherein at least said one surface formed of such blows in a direction substantially perpendicular to the entire flow in the direction of the one side of the article Te
And the gas entering the second chamber is in front of the second chamber.
After flowing in the direction of one side, from the one end side of the article to the front
It is characterized in that it is formed so as to flow in the direction of the other end side .
【0009】請求項2の発明は、上記に加えて、前記一
方側に前記開口を通過する気体を再加熱する加熱手段を
有することを特徴とする。In addition to the above, the invention of claim 2 is characterized in that the one side has heating means for reheating the gas passing through the opening.
【0010】請求項3の発明は、請求項1の発明の特徴
に加えて、前記物品の熱容量より十分大きい熱容量を持
つ蓄熱手段を前記物品の前記片面側の反対面側に有する
ことを特徴とする。According to a third aspect of the present invention, in addition to the features of the first aspect, a heat storage means having a heat capacity sufficiently larger than that of the article is provided on the opposite side of the one side. To do.
【0011】請求項4の発明は、請求項1の発明の特徴
に加えて、前記分流手段は前記物品の両側に設けられて
いることを特徴とする。According to a fourth aspect of the present invention, in addition to the features of the first aspect, the flow dividing means is provided on both sides of the article.
【0012】[0012]
【発明の実施の形態】図1は本発明を適用した熱処理装
置の構成例を示す。熱処理装置は、断熱壁1に囲われて
密閉された容器状を成す本体2内に熱処理部3を備え、
主加熱器4で加熱された気体である熱風を送風機5で循
環供給して熱処理部3の入口6から出口7を通過させ、
その中に入口から出口の方向に置かれる平板状の物品で
あるLCDガラス基板等のワークWを熱風で加熱して熱
処理する装置であり、入口6から出口7の方向に本例で
はワークWの片面側である上面側に配設された分流手段
としての偏向板8を有する。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows a structural example of a heat treatment apparatus to which the present invention is applied. The heat treatment apparatus is provided with a heat treatment section 3 in a main body 2 which is surrounded by a heat insulating wall 1 and is hermetically sealed.
Hot air, which is a gas heated by the main heater 4, is circulated and supplied by the blower 5 to pass from the inlet 6 to the outlet 7 of the heat treatment unit 3,
It is a device for heating a work W such as an LCD glass substrate, which is a flat article placed in the direction from the entrance to the exit, with hot air and heat-treating the work, and in the direction from the entrance 6 to the exit 7 of the work W in this example. It has a deflecting plate 8 as a flow dividing unit disposed on the upper surface side which is one surface side.
【0013】矢印で示す熱風循環経路には、熱処理部3
の上流側に塵埃除去用の高性能フィルタ9及びこれに熱
風を導く風路10が設けられ、熱処理部3を通過した熱
風は風路11で再び主加熱器4に導びかれる。熱処理部
3は1段でもよいが、処理能率を上げるため本例では6
段に仕切られて形成されている。なお、図示しないが、
前面部である紙面の手前側にはワーク出入り用の開口部
及びこれを開閉するための扉が各段毎に設けられる。
又、諸機器の運転操作や制御を行う操作制御盤も適当な
位置に設けられる。In the hot air circulation path indicated by the arrow, the heat treatment section 3
A high-performance filter 9 for removing dust and an air passage 10 for guiding hot air thereto are provided on the upstream side of, and the hot air that has passed through the heat treatment section 3 is led again to the main heater 4 in the air passage 11. The heat treatment section 3 may have a single stage, but in this example, it is 6
It is divided into steps. Although not shown,
An opening for entering and exiting the work and a door for opening and closing the work are provided for each step on the front side of the front surface of the paper.
An operation control panel for operating and controlling various equipment is also provided at an appropriate position.
【0014】偏向板8は、一方側が入口6と導通し他方
側が出口7と導通し、本例ではワークWの上面側の方向
に分割された空気が流れるように複数の開口8a及びガ
イド板8bを備えている。この偏向板8により、熱処理
部3の各段は高性能フィルタ9を通過した熱風を導入す
る第1室31とワークWを収容し熱風が排出される第2
室32とに仕切られていて、ワークWに平行に第一室3
1に流入した熱風は、小区画に分流されて流れ方向を9
0°偏向して第二室32に収容したワークWの上面の全
域にほぼ直角に吹き出すことができる。なお、後述する
ように偏向板8はワーク昇温時の温度分布の均一化を目
的としているので、上流側の温度上昇が遅れるようであ
れば、入口6を延長して少量の熱風を第2室に直接導入
するようにしてもよい。The deflecting plate 8 is electrically connected to the inlet 6 on one side and to the outlet 7 on the other side, and in this example, a plurality of openings 8a and guide plates 8b are provided so that the divided air flows in the direction toward the upper surface of the work W. Is equipped with. Due to the deflecting plate 8, each stage of the heat treatment unit 3 accommodates the first chamber 31 for introducing the hot air that has passed through the high-performance filter 9 and the work W and discharges the hot air.
It is divided into a chamber 32 and the first chamber 3 parallel to the work W.
The hot air that flowed into 1 was split into small sections and flowed in the direction of 9
The work W can be blown out at a substantially right angle over the entire upper surface of the work W deflected by 0 ° and accommodated in the second chamber 32. As will be described later, the deflecting plate 8 is intended to make the temperature distribution uniform when the workpiece is heated. Therefore, if the temperature rise on the upstream side is delayed, the inlet 6 is extended and a small amount of hot air is supplied to the second side. It may be introduced directly into the room.
【0015】開口8aは、碁盤目状やハニカム状等の適
当な形状になっていて、開口率は例えば50%程度であ
る。このような形状及び開口率は、循環風量、熱処理部
3の形状や大きさ等の諸条件から、ワークWを熱交換効
率良く且つ均一的に温度上昇できるように定められる。
例えば、第1室31の容積が十分大きければ、熱風は室
内の静圧によって開口8aから吹き出され、偏向板8に
対して直角に近い吹き出し方向になるが、一方では装置
が大型化することになる。従って、開口8aからの熱風
の吹き出し方向は通常動圧の影響を受けことになるが、
この場合、ガイド板8bはその吹き出し方向を修正する
作用をする。The opening 8a has an appropriate shape such as a grid or honeycomb shape, and the opening ratio is, for example, about 50%. Such a shape and an opening ratio are determined so that the temperature of the work W can be efficiently increased with heat exchange efficiency and uniformly based on various conditions such as the amount of circulating air and the shape and size of the heat treatment section 3.
For example, if the volume of the first chamber 31 is sufficiently large, the hot air is blown out from the opening 8a due to the static pressure inside the chamber and becomes a blowing direction close to a right angle with respect to the deflecting plate 8, but on the other hand, the device becomes large. Become. Therefore, although the blowing direction of the hot air from the opening 8a is usually affected by the dynamic pressure,
In this case, the guide plate 8b acts to correct the blowing direction.
【0016】なお、ワークの効率的均一加熱のために、
熱風の吹き出し角度は90°に近いことが望ましいが、
例えば90°から45°程度傾斜した方向であってもよ
い。この場合にも、乱流を発生させ、かなり熱交換効率
を向上させる効果がある。又、例えば壁面近傍の開口部
分では壁面の摩擦抵抗によって熱風の流速が低下した
り、入口から出口に向かって進行するに従って風量が累
積されこと等、ワークWの表面上の各部分で風の流れ条
件やワーク加熱の効果が異なることから、偏向板8の開
口率を部分的に変化させて通過風量を変え、ワーク表面
に供給する熱量分布を適度に調整するようにすれば、一
層の均熱化を図ることができる。For efficient and uniform heating of the work,
It is desirable that the blowing angle of hot air be close to 90 °,
For example, the direction may be inclined from 90 ° to 45 °. Also in this case, turbulent flow is generated, which has the effect of considerably improving the heat exchange efficiency. In addition, for example, the flow velocity of the hot air decreases at the opening near the wall due to the frictional resistance of the wall, and the air volume accumulates as it progresses from the inlet to the outlet. Since the conditions and the effect of heating the work are different, if the aperture ratio of the deflection plate 8 is partially changed to change the amount of passing air and the distribution of the amount of heat supplied to the surface of the work is adjusted appropriately, further uniform heating can be achieved. Can be realized.
【0017】更に、偏向板8の開口部分をスライド可能
な板で形成し、開口率や開口形状を変えられるようにし
てもよい。又、開口8aを通過する熱風の風速や開口8
aの大きさ等によっては、ガイド板8bを省略すること
も可能である。この反対に、ガイド板8bを大き目にし
て、開口率を100%近くにする分流方法も可能であ
る。更に、乱流効果の程度等によっては、碁盤目のよう
な開口でなく、ガイド板8bの長さ方向には連通した開
口にすることも可能である。Further, the opening portion of the deflection plate 8 may be formed of a slidable plate so that the aperture ratio and the aperture shape can be changed. Also, the wind speed of the hot air passing through the opening 8a and the opening 8
The guide plate 8b may be omitted depending on the size of a or the like. On the contrary, it is possible to use a flow dividing method in which the guide plate 8b is made large and the aperture ratio is close to 100%. Further, depending on the degree of the turbulent flow effect and the like, it is possible to form not the openings like the grids but the openings communicating with each other in the length direction of the guide plate 8b.
【0018】本例では更に、偏向板8の一方側である第
一室31側に開口8aを通過する熱風を再加熱する加熱
手段としてのワーク昇温用加熱器12が設けられてい
る。この加熱器12は、全体的に一体形成されていても
よいが、本例では分割型になっている。なお、分割され
たワーク昇温用加熱器12のそれぞれを異なった容量に
すれば、部分的に加熱温度を変えて、ワークWをより均
一に昇温させることが可能になる。In the present example, a work temperature raising heater 12 is further provided on the side of the first chamber 31, which is one side of the deflecting plate 8, as a heating means for reheating the hot air passing through the opening 8a. The heater 12 may be integrally formed as a whole, but is a split type in this example. If each of the divided heaters 12 for raising the temperature of the work is made to have a different capacity, the heating temperature can be partially changed to raise the temperature of the work W more uniformly.
【0019】又ワークWの熱容量より十分大きい熱容量
を持つ蓄熱手段としての蓄熱板13がワークWの上面側
の反対面側である下面側に設けられている。ワークW
は、図示しないが蓄熱板13から複数のピンを突出させ
て適当な高さ位置で支持される。なお、熱処理装置の起
動時に蓄熱板13の昇温時間を短縮する必要があれば、
昇温時のための簡単なヒータを蓄熱板に内蔵させるよう
にしてもよい。Further, a heat storage plate 13 as a heat storage means having a heat capacity sufficiently larger than that of the work W is provided on the lower surface side of the work W opposite to the upper surface side. Work W
Although not shown, a plurality of pins are projected from the heat storage plate 13 to be supported at an appropriate height position. In addition, if it is necessary to shorten the temperature rising time of the heat storage plate 13 when starting the heat treatment apparatus,
A simple heater for raising the temperature may be built in the heat storage plate.
【0020】以上のような熱処理装置は次のように使用
される。主加熱器4及び送風機5が運転され、本体2の
内部では熱処理すべき所定温度として例えば温度230
°C程度の熱風が循環される。この状態で、熱処理装置
外部に配設されるロボット等の適当なワーク搬入搬出装
置により、熱処理すべきワークが熱処理部3内に搬入さ
れる。これと連動して、ワークの入れられた段のワーク
昇温用加熱器12が作動し、第一室31に流入する所定
温度の熱風は更に数℃高く再加熱され、偏向板8を通過
してワークの上面にほぼ直角に吹きつけられる。The heat treatment apparatus as described above is used as follows. The main heater 4 and the blower 5 are operated, and inside the main body 2, a predetermined temperature for heat treatment, for example, a temperature of 230
Hot air of about ° C is circulated. In this state, the work to be heat-treated is carried into the heat treatment section 3 by an appropriate work carry-in / carry-out device such as a robot provided outside the heat treatment apparatus. In conjunction with this, the work temperature raising heater 12 in the stage in which the work is put into operation is operated, and the hot air of a predetermined temperature flowing into the first chamber 31 is reheated a few degrees higher and passes through the deflection plate 8. And is sprayed on the top surface of the workpiece almost at right angles.
【0021】このような熱風加熱により、ワークは小さ
い温度分布差の範囲内で各部が均一的に温度上昇する。
図2は、昇温過程においてワークを温度上昇させる要因
の概略傾向を推定したものである。図において横軸はワ
ークの入口から出口の方向(L方向)の位置を示し、
(A)乃至(D)は本発明の熱処理装置もので、(a)
乃至(d)は従来の熱処理装置ものである。By such hot air heating, the temperature of each part of the work uniformly rises within a small temperature distribution difference range.
FIG. 2 is an estimation of the general tendency of factors that raise the temperature of the work in the temperature rising process. In the figure, the horizontal axis indicates the position in the direction from the work inlet to the work outlet (L direction),
(A) to (D) are the heat treatment apparatus of the present invention.
(D) is a conventional heat treatment apparatus.
【0022】ワークを昇温させるため熱風からワークに
伝達される単位時間当たりの熱量qi (iは偏向板8の
入口6から出口7方向におけるi番目に相当するワーク
部分で以下同じ)は、一般に、
qi =Ki Fi θi=C(ti−tj)gi (Kcal/h
r)
で表される。ここで、Kは熱伝達率( Kcal/m2・hr・°
C ) 、Fは伝熱面積 ( m2 ) 、θは熱風とワークとの温
度差( °C ) 、Cは熱風の比熱( Kcal/kg・°C)、t
は熱風の温度、gは熱風の流量(kg/ hr) である。図2
では、このような伝達熱量及びこれを決定する要因並び
に昇温到達時の温度分布を無段階にワークの長さL方向
に示している。又、昇温開始時の状態を実線で示し、昇
温到達に近い時期の状態を鎖線で示す。太線はワーク内
の何れかの部分が熱処理温度に到達した時のワーク内の
温度分布を示す。The amount of heat qi transferred from the hot air to the work per unit time to raise the temperature of the work (i is the i-th work part corresponding to the i-th direction from the inlet 6 to the outlet 7 of the deflection plate 8) is generally , Qi = Ki Fi θi = C (ti-tj) gi (Kcal / h
r). Where K is the heat transfer coefficient (Kcal / m 2 · hr · °
C), F is the heat transfer area (m 2 ), θ is the temperature difference between the hot air and the work (° C), C is the specific heat of the hot air (Kcal / kg ・ ° C), t
Is the temperature of hot air and g is the flow rate of hot air (kg / hr). Figure 2
In the above, the amount of transferred heat, the factors that determine the amount of transferred heat, and the temperature distribution when the temperature rises are continuously shown in the length L direction of the work. Also, the state at the start of temperature rise is shown by a solid line, and the state at the time when the temperature rise is almost reached is shown by a chain line. The thick line shows the temperature distribution in the work when any part of the work reaches the heat treatment temperature.
【0023】図2では伝熱能力に関連する要因の特性を
示している。熱伝達率Kは、従来の装置では、熱風がワ
ークに対して平行層流で流れるため、入口近傍で流れに
多少の乱れが起こって高くなる他、L方向でほぼ一定で
低い値であるが、本装置では、熱風がワーク面に向かっ
て流れ、衝突して乱流状態となって出口方向に流れるた
め、高い値で且つL方向に流速増に伴って大きくなる。
なお、入口近傍では流量が少ないのでKが低下するが、
熱風が直接ワークに当たることと相対的に開口率を上げ
ることでその低下を抑制できる。温度差θは、従来の装
置では、熱風の全量が順次放熱するだけであるため、L
方向に入口の近傍で低下が大きくその後次第に低下する
が、本装置では、新たな熱風が順次補給されるため、そ
の低下の度合いが小さくなる。鎖線の昇温到達時の近傍
では、共に小さい値になる。但し、本例の装置ではワー
ク昇温用加熱器を設けられているので、昇温到達時の近
傍でもある程度の温度差が得られる。FIG. 2 shows characteristics of factors related to the heat transfer ability. In the conventional device, the heat transfer coefficient K is high because the hot air flows in a parallel laminar flow with respect to the work, so that the flow is slightly disturbed near the inlet and becomes high, and it is almost constant and low in the L direction. In the present apparatus, the hot air flows toward the work surface, collides, and becomes a turbulent state to flow in the outlet direction, so that the value is high and increases in the L direction as the flow velocity increases.
In addition, since the flow rate is small near the inlet, K decreases,
It is possible to suppress the decrease by directly contacting the work with hot air and by relatively increasing the aperture ratio. In the conventional device, the temperature difference θ is equal to L
Although the amount of decrease in the direction is large near the inlet and gradually decreases thereafter, in the present apparatus, new hot air is sequentially replenished, so the degree of decrease is small. Both values are small in the vicinity of reaching the temperature rise of the chain line. However, since the apparatus for heating the workpiece is provided in the apparatus of this example, a certain temperature difference can be obtained even in the vicinity of the time when the temperature rise is reached.
【0024】上記K、θの傾向から、ワークに供給可能
な伝達熱量は、昇温開始時において、従来装置では上流
側で大きく下流側で小さくなるのに対して、本装置では
同程度で推移する。その結果、昇温開始時から昇温到達
時までのワークに供給できる総熱量は、従来装置では上
流側で大きく下流側で小さくなるのに対して、本装置で
は同程度になる。そして、これを反映したワークの温度
分布は、共に太線で示す如く、従来装置では上流側と下
流側とで大きな差を生ずるのに対して、本装置では均一
化する。なお、前式の右辺は熱風の放熱能力を示すが、
この式でも当然同じ結果が得られる。From the above K and θ tendencies, the amount of heat transfer that can be supplied to the workpiece is large on the upstream side in the conventional apparatus and small on the downstream side at the start of temperature rise, while it is about the same in this apparatus. To do. As a result, the total amount of heat that can be supplied to the workpiece from the start of temperature increase to the time when temperature rise reaches is large on the upstream side in the conventional device and small on the downstream side, but is about the same in this device. The temperature distribution of the work that reflects this, as shown by the thick line, has a large difference between the upstream side and the downstream side in the conventional apparatus, but is uniform in this apparatus. The right side of the previous equation shows the heat radiation capacity of hot air,
Of course, the same result can be obtained with this formula.
【0025】以上のように、本発明の装置では、従来の
装置に較べてワークの温度分布を大幅に改善することが
できる。この場合、所定温度の熱風加熱だけでは、ワー
クが所定温度に近づくに従って前記の如く熱風との温度
差が小さくなり、交換熱量が減少してワークの温度上昇
が極めて遅くなり、熱処理のために必要とされる下限温
度に到達するのに長時間を要することになるが、本例の
如くワーク昇温用加熱器12で所定温度より数℃高い熱
風を供給することにより、ワークの下限温度への到達時
間を大幅に短縮することができる。As described above, the apparatus of the present invention can greatly improve the temperature distribution of the work as compared with the conventional apparatus. In this case, if only the hot air at the predetermined temperature is heated, the temperature difference between the work and the hot air becomes smaller as described above, the heat exchange amount decreases, and the temperature rise of the work becomes extremely slow, which is necessary for heat treatment. It takes a long time to reach the lower limit temperature, which is set to the lower limit temperature of the work by supplying hot air several degrees higher than the predetermined temperature by the work temperature raising heater 12 as in this example. The arrival time can be greatly shortened.
【0026】以上のようにワークが昇温して所定温度に
到達すると予測されると、ワーク昇温用加熱器12の作
動を停止させ、その後は、所定温度に制御された熱風が
昇温過程で僅かに残るワークの温度分布を整定させ、均
一な焼成を行う。When it is predicted that the temperature of the work rises to reach the predetermined temperature as described above, the operation of the work temperature raising heater 12 is stopped, and thereafter, the hot air controlled to the predetermined temperature is heated. The temperature distribution of the work that remains slightly is settled, and uniform baking is performed.
【0027】1つの段のワークの熱処理が完了すると、
その段のワークが搬出され、新たなワークが搬入され
る。この場合、本体2内に熱処理部3を多段に構成した
熱処理装置では、各段が蓄熱板13で仕切られているた
め、特定段のワークの出し入れが他の段の温度を乱すこ
とながない。又、蓄熱板13は、その下の段のワーク昇
温用加熱器12がその上段のワークに及ぼす熱的影響を
吸収すると共に、新たなワークの搬入時の室内温度の乱
れを抑制し、更に、新たに搬入された低温ワークへ放熱
してその昇温を助勢する効果を持つ。When the heat treatment of the work on one stage is completed,
The work on that stage is unloaded and a new work is loaded. In this case, in the heat treatment apparatus in which the heat treatment section 3 is configured in multiple stages in the main body 2, since each stage is partitioned by the heat storage plate 13, the work of the particular stage does not disturb the temperature of the other stages. . Further, the heat storage plate 13 absorbs the thermal influence of the work piece temperature raising heater 12 in the lower stage on the work piece in the upper stage, and suppresses the turbulence in the room temperature when a new work is carried in. , Has the effect of radiating heat to the newly loaded low temperature work and assisting its temperature rise.
【0028】図3は、偏向板8をワークWの両側に設け
た熱処理装置の例である。この例では、図1の例の蓄熱
板13は設けられていなく、格子状棚14が設けられて
いて、蓄熱板13の場合と同様に、ワークWは棚14か
ら図示しない複数のピンで支持されている。格子状棚1
4は、目が荒く熱風の通り抜けを可能にしている。これ
により、ワークWはその表裏両面にほぼ直角に熱風を供
給されて熱処理される。多段に構成された熱処理部3の
各段の間は、仕切板15で分離され、各段のワーク昇温
用加熱器12の相互干渉が防止されている。FIG. 3 shows an example of a heat treatment apparatus in which the deflection plates 8 are provided on both sides of the work W. In this example, the heat storage plate 13 of the example of FIG. 1 is not provided, but the lattice-shaped shelf 14 is provided, and like the case of the heat storage plate 13, the work W is supported from the shelf 14 by a plurality of pins (not shown). Has been done. Lattice shelf 1
4 has rough eyes and allows passage of hot air. As a result, the work W is heat-treated by supplying hot air to the front and back surfaces thereof at substantially right angles. A partition plate 15 separates the stages of the multi-stage heat treatment section 3 from each other to prevent mutual interference of the work temperature raising heaters 12 of the stages.
【0029】ワーク昇温用加熱器12の発停制御として
は、図1の例のように、ワーク投入に連動させ昇温する
までの時間的制御を用いることもできるが、本例では、
第二室32の熱風の下流側に温度センサ16を設けて下
流部の熱風温度を検出し、搬入した低温ワークの吸熱に
よって熱風温度が所定の低温になるとワーク昇温用加熱
器12を作動させ、ワークが昇温して熱風の温度降下が
小さくなって検出温度が所定の高温に復帰すると加熱器
12を停止させるように制御している。但し、加熱器1
2の温度制御としては、図1で説明した制御方法を用い
ることもできる。又、図1の例の装置に対して図3の例
の温度制御を用いることも当然可能である。なお、この
例の熱処理装置でも、ワーク昇温時の温度分布を均一化
させる効果があることは勿論である。As the start / stop control of the heater 12 for raising the temperature of the work, as in the example of FIG. 1, time control until the temperature is raised in association with the introduction of the work can be used, but in this example,
A temperature sensor 16 is provided on the downstream side of the hot air in the second chamber 32 to detect the hot air temperature at the downstream portion, and when the hot air temperature reaches a predetermined low temperature due to the heat absorption of the low-temperature work carried in, the work temperature raising heater 12 is activated. When the temperature of the work rises and the temperature drop of the hot air decreases and the detected temperature returns to a predetermined high temperature, the heater 12 is controlled to stop. However, heater 1
As the temperature control of 2, the control method described in FIG. 1 can be used. It is also possible to use the temperature control of the example of FIG. 3 for the apparatus of the example of FIG. It is needless to say that the heat treatment apparatus of this example also has the effect of making the temperature distribution uniform when the workpiece is heated.
【0030】[0030]
【発明の効果】以上の如く本発明によれば、請求項1の
発明においては、加熱された気体が通過する入口から出
口の方向で少なくとも平板状物品の片面側に配設された
分流手段を設けるので、分流手段は例えば平板状物品の
片面側にこれと並設される形にになる。この分流手段
は、その一方側が気体入口の少なくとも大部分と導通
し、その他方側が気体出口と導通しているので、入口と
出口との間を仕切る形になる。そして、物品の片面側の
方向に分離された空気が流れるように複数の開口を備え
ているので、気体は、入口から熱処理部に入り、分離さ
れて開口を通過して物品の方向に流れ、その後出口に至
ることになる。As described above, according to the present invention, in the invention of claim 1, the flow dividing means is provided at least on one side of the flat article in the direction from the inlet through which the heated gas passes to the outlet. Since the flow dividing means is provided, the flow dividing means is arranged, for example, in parallel with one side of the flat article. Since one side of the flow dividing means is electrically connected to at least most of the gas inlet and the other side thereof is electrically connected to the gas outlet, the flow dividing means forms a partition between the inlet and the outlet. Then, since the plurality of openings are provided so that the air separated in the direction of the one side of the article flows, the gas enters the heat treatment section from the inlet, is separated and flows through the opening in the direction of the article, Then you will reach the exit.
【0031】このような気体流れより、物品の入口側か
ら出口側の方向の各部分には、既に分流されて物品側を
流れている気体と新たに分流された気体とが衝突・混合
して乱流状態になり、物品との間の熱伝達率が大きくな
ると共に、加熱され温度低下していない気体が新たな分
流によって常に追加供給されるため、物品へ熱を移動さ
せた後の気体温度の低下が緩和される。Due to such a gas flow, the gas that has already been split and flows on the article side and the newly split gas collide and mix with each other in the direction from the inlet side to the outlet side of the article. A turbulent state occurs, the heat transfer coefficient with the article increases, and the gas that has been heated and has not decreased in temperature is always additionally supplied by a new shunt, so the gas temperature after transferring heat to the article Is reduced.
【0032】その結果、物品における気体の上流側位置
から下流側位置にかけて、熱伝達率の上昇、物品との熱
交換による気体の温度低下の減少、これに伴う気体と物
品との間の温度差減少の抑制、新たな熱量補給、等の諸
現象が好都合に作用し、気体から物品の各部分への熱伝
達量が均一化し、物品が熱処理温度に到達したときの物
品内の温度分布差を十分小さくすることができる。従っ
て、物品の熱処理品質を向上させることができる。そし
て、このような熱処理装置では、気体を循環させる送風
機の風量や風圧を大幅に大きくする必要がなく、又、通
常設けられる高性能フィルターをサイズアップする必要
もないため、装置の構成機器を大型化させたりそれに伴
うコスト上昇がない。As a result, the heat transfer coefficient increases from the upstream position to the downstream position of the gas in the article, the decrease in the temperature of the gas due to heat exchange with the article decreases, and the temperature difference between the gas and the article accompanying this decreases. Phenomena such as suppression of decrease, replenishment of new amount of heat, etc. act favorably, the heat transfer amount from the gas to each part of the article becomes uniform, and the temperature distribution difference in the article when the article reaches the heat treatment temperature is reduced. It can be made small enough. Therefore, the heat treatment quality of the article can be improved. Further, in such a heat treatment apparatus, there is no need to significantly increase the air volume or pressure of the blower that circulates the gas, and it is not necessary to upsize the high-performance filter that is usually provided, so that the component equipment of the apparatus is large. There is no increase or cost increase.
【0033】請求項2の発明においては、入口と導通す
る分流手段の一方側に開口を通過する気体を再加熱する
加熱手段を設けるので、熱処理部に常温の物品が入れら
れて熱処理温度に到達するまでの物品吸熱の大きいとき
に加熱手段を作動させ、熱処理部に導入された加熱気体
を再加熱して熱処理温度以上に昇温させることにより、
物品の迅速な温度上昇を補助することができる。その結
果、熱処理能率を上げることができる。又、物品昇温時
の熱量をある程度見込んで定められる通常の加熱器の能
力を押さえることができる。According to the second aspect of the present invention, since the heating means for reheating the gas passing through the opening is provided on one side of the flow dividing means that is in communication with the inlet, the article at room temperature is put in the heat treatment section and the heat treatment temperature is reached. By operating the heating means when the heat absorption of the article is large, and by reheating the heated gas introduced into the heat treatment section to raise the temperature to the heat treatment temperature or higher,
It can assist the rapid temperature rise of the article. As a result, the heat treatment efficiency can be increased. Further, it is possible to suppress the ability of an ordinary heater, which is determined in consideration of the amount of heat when the article is heated.
【0034】請求項3の発明においては、物品の熱容量
より十分大きい熱容量を持つ蓄熱手段を設けるので、物
品が新たに熱処理部に搬入されたときの熱処理部内の温
度乱れを抑制できると共に、その後の物品の均一的昇温
を助勢することができる。その結果、熱処理温度に到達
したときの物品の温度分布を一層良くすることができ
る。又、加熱され循環される気体に温度の変動等があっ
ても、物品温度を安定化させ、熱処理品質を向上させる
ことができる。In the third aspect of the present invention, since the heat storage means having a heat capacity sufficiently larger than that of the article is provided, it is possible to suppress temperature disturbance in the heat treatment section when the article is newly carried into the heat treatment section, and thereafter A uniform temperature rise of the article can be assisted. As a result, the temperature distribution of the article when the heat treatment temperature is reached can be further improved. Further, even if the temperature of the heated and circulated gas fluctuates, the article temperature can be stabilized and the heat treatment quality can be improved.
【0035】請求項4の発明においては、分流手段を物
品の両側に設けるので、物品を一層迅速に昇温させ、熱
処理能率を上げることができる。又、物品表面の気体の
流速を下げ、表面に形成された回路等に対する気体流れ
の影響を軽減することができる。In the invention of claim 4, since the flow dividing means is provided on both sides of the article, the article can be heated more quickly and the heat treatment efficiency can be improved. Further, the flow velocity of the gas on the surface of the article can be reduced to reduce the influence of the gas flow on the circuit and the like formed on the surface.
【図1】本発明を適用した熱処理装置の一例を示す説明
図である。FIG. 1 is an explanatory diagram showing an example of a heat treatment apparatus to which the present invention is applied.
【図2】(A)乃至(D)及び(a)乃至(d)は、そ
れぞれ、上記熱処理装置及び従来の熱処理装置の作用効
果の概略傾向を示す曲線図である。2 (A) to (D) and (a) to (d) are curve diagrams showing the general tendency of the action and effect of the heat treatment apparatus and the conventional heat treatment apparatus, respectively.
【図3】本発明を適用した熱処理装置の他の例を示す説
明図である。FIG. 3 is an explanatory diagram showing another example of the heat treatment apparatus to which the present invention is applied.
3 熱処理部 6 入口 7 出口 8 偏向板(分流手段) 8a 開口 12 ワーク昇温用加熱器(加熱手段) 13 蓄熱板(蓄熱手段) W ワーク(平板状の物品) 3 heat treatment department 6 entrance 7 exit 8 Deflecting plate 8a opening 12 Heater for heating work (heating means) 13 Heat storage plate (heat storage means) W work (flat article)
フロントページの続き (56)参考文献 特開 平9−28565(JP,A) 特開 平6−317514(JP,A) 特開 昭62−272539(JP,A) 特開 昭61−105843(JP,A) 実開 昭60−156399(JP,U) (58)調査した分野(Int.Cl.7,DB名) F27B 17/00 Continuation of front page (56) Reference JP-A-9-28565 (JP, A) JP-A-6-317514 (JP, A) JP-A-62-172539 (JP, A) JP-A-61-105843 (JP , A) Actual development Sho 60-156399 (JP, U) (58) Fields investigated (Int.Cl. 7 , DB name) F27B 17/00
Claims (4)
た各段の両側に加熱された気体が通過する入口及び出口
を備えた熱処理部の前記各段に置かれる角形のLCDガ
ラス基板から成る平板状の物品であって該物品の一端側
から他端側の方向が前記入口から前記出口の方向になる
ように置かれる前記物品を前記気体で加熱して熱処理す
る熱処理装置において、 複数の開口と該開口に設けられたガイド板とを備えてい
て前記各段に設けられた偏向板からなる分流手段を有
し、 該分流手段は、前記入口から前記出口の方向に少なくと
も前記物品の片面側に前記物品と並設されていて一方側
が前記入口の少なくとも大部分と導通し他方側が前記出
口と導通し前記入口と前記出口との間を仕切って前記気
体を導入する第1室であって前記入口の側が広く前記出
口の側が狭くなっている第1室と前記気体が排出される
第2室であって前記入口の側が狭く前記出口の側が広く
なっている第2室とを形成するように配置されていて、 前記物品は前記分流手段と対向するように前記第2室に
置かれていて、 前記開口と前記ガイド板とは、前記第1室から前記開口
を通過して分離された前記気体が前記第2室に入って前
記物品の少なくとも前記片面側の全域にほぼ直角方向に
吹き出して前記片面側の方向に流れるように形成されて
いて、 前記第2室は該第2室に入った前記気体が前記片面側の
方向に流れた後前記物品の前記一端側から前記他端側の
方向に流れるように形成されている、 ことを特徴とする熱処理装置。 1. A rectangular LCD glass substrate placed in each stage of a heat treatment unit having an inlet and an outlet through which heated gas passes on both sides of each of the stages formed by dividing into a plurality of stages. In a heat treatment apparatus for heating the article by the gas, the flat article being formed so that the direction from one end side to the other end side of the article is from the inlet to the outlet, The flow dividing means comprises a deflecting plate provided in each of the stages, the flow dividing means having an opening and a guide plate provided in the opening, and the flow dividing means includes at least one surface of the article in a direction from the inlet to the outlet. A first chamber that is arranged in parallel with the article on one side and has one side that communicates with at least most of the inlet and the other side that communicates with the outlet and partitions the inlet and the outlet to introduce the gas. The entrance side is wide Wide side of the second chamber is a by the inlet side is narrow the outlet of the first chamber and the gas side of the outlet is narrower is discharged
Is in the second chamber has been arranged to form, the article is not placed in the second chamber so as to face the diverter means, and said opening and said guide plate, said first From the chamber to the opening
The gas separated by passing through is formed to flow in a direction of at least the one side the one side is blown in a direction substantially perpendicular to the entire area of the front <br/> Symbol article contained in said second chamber to
In the second chamber, the gas that has entered the second chamber is on the one surface side.
After flowing in the direction from the one end side of the article to the other end side
A heat treatment apparatus , which is formed so as to flow in a direction .
再加熱する加熱手段を有することを特徴とする請求項1
に記載の熱処理装置。2. The heating means for reheating the gas passing through the opening is provided on the one side.
The heat treatment apparatus according to.
を持つ蓄熱手段を前記物品の前記片面側の反対面側に有
することを特徴とする請求項1に記載の熱処理装置。3. The heat treatment apparatus according to claim 1, further comprising a heat storage unit having a heat capacity sufficiently larger than that of the article, on the side opposite to the one side of the article.
れていることを特徴とする請求項1に記載の熱処理装
置。4. The heat treatment apparatus according to claim 1, wherein the flow dividing means is provided on both sides of the article.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25276797A JP3474087B2 (en) | 1997-09-01 | 1997-09-01 | Heat treatment equipment for uniformly heating flat workpieces |
KR1019980033934A KR100346361B1 (en) | 1997-09-01 | 1998-08-21 | Thermal treatment unit for uniform heating of plate type work |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP25276797A JP3474087B2 (en) | 1997-09-01 | 1997-09-01 | Heat treatment equipment for uniformly heating flat workpieces |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH1185063A JPH1185063A (en) | 1999-03-30 |
JP3474087B2 true JP3474087B2 (en) | 2003-12-08 |
Family
ID=17242021
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP25276797A Expired - Fee Related JP3474087B2 (en) | 1997-09-01 | 1997-09-01 | Heat treatment equipment for uniformly heating flat workpieces |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP3474087B2 (en) |
KR (1) | KR100346361B1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5538740B2 (en) * | 2009-03-18 | 2014-07-02 | 光洋サーモシステム株式会社 | Heat treatment equipment |
KR101448546B1 (en) * | 2014-04-16 | 2014-10-14 | 주식회사 이엔씨 테크놀로지 | Air circulation unit having a flat display panel, a heat treatment apparatus and a heat treatment method |
KR101718732B1 (en) * | 2014-07-02 | 2017-03-22 | (주)에이치디피 | Pressure Chamber |
KR20220026760A (en) | 2020-08-26 | 2022-03-07 | 주식회사 씨엘피에스 | Knob for kitchen containers |
-
1997
- 1997-09-01 JP JP25276797A patent/JP3474087B2/en not_active Expired - Fee Related
-
1998
- 1998-08-21 KR KR1019980033934A patent/KR100346361B1/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
JPH1185063A (en) | 1999-03-30 |
KR100346361B1 (en) | 2002-11-18 |
KR19990029333A (en) | 1999-04-26 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US6380518B2 (en) | Heat treatment apparatus and substrate processing system | |
JP3833439B2 (en) | Multistage heating furnace for large substrates, double-sided heating type far-infrared panel heater, and air supply / exhaust method in the heating furnace | |
US5440101A (en) | Continuous oven with a plurality of heating zones | |
JPH03224217A (en) | Heat-treating device | |
JP2008002766A (en) | Air supply and exhaust system for substrate calcination furnace | |
JP4331784B2 (en) | Supply and exhaust method for substrate firing furnace | |
KR100346360B1 (en) | Thermal treatment unit for heating plate type work under windless condition of one surface | |
JP2010216753A (en) | Heat treatment device | |
JP3474087B2 (en) | Heat treatment equipment for uniformly heating flat workpieces | |
JP4097872B2 (en) | Semiconductor wafer processing system | |
US5203487A (en) | Reflow soldering method and system therefor | |
JP3373413B2 (en) | Heat treatment equipment for uniformly heating flat workpieces by changing the wind speed | |
JP3402713B2 (en) | Heat treatment equipment | |
JPH10141868A (en) | Heat treatment device provided with sublimate measures | |
WO2008038880A1 (en) | Annealing apparatus | |
KR101237126B1 (en) | Substrate processing apparatus | |
JP2005064242A (en) | Processing system of substrate and heat-treatment method of substrate | |
CA1070951A (en) | Method and tunnel furnace for the thermal treatment of glass products, in particular envelopes for display tubes | |
KR100346358B1 (en) | Thermal treatment unit for windless heating of plate type work | |
KR100598430B1 (en) | Thermal treatment unit with removing capability of particles generated by filter | |
JP2000208053A (en) | Baking furnace for plasma display panel | |
JP2002195762A (en) | Heat treatment apparatus | |
KR102423268B1 (en) | Apparatus for processing substrate | |
US3673983A (en) | High capacity deposition reactor | |
JPH05208112A (en) | Clean oven fitted with backup temperature control part |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080919 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080919 Year of fee payment: 5 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090919 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090919 Year of fee payment: 6 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100919 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20100919 Year of fee payment: 7 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20110919 Year of fee payment: 8 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120919 Year of fee payment: 9 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130919 Year of fee payment: 10 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
LAPS | Cancellation because of no payment of annual fees |