JP2598736Y2 - Grinding head for magneto-optical disk - Google Patents

Grinding head for magneto-optical disk

Info

Publication number
JP2598736Y2
JP2598736Y2 JP1993022693U JP2269393U JP2598736Y2 JP 2598736 Y2 JP2598736 Y2 JP 2598736Y2 JP 1993022693 U JP1993022693 U JP 1993022693U JP 2269393 U JP2269393 U JP 2269393U JP 2598736 Y2 JP2598736 Y2 JP 2598736Y2
Authority
JP
Japan
Prior art keywords
magneto
optical disk
grinding
grinding head
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1993022693U
Other languages
Japanese (ja)
Other versions
JPH0684521U (en
Inventor
豪 京田
久雄 有宗
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP1993022693U priority Critical patent/JP2598736Y2/en
Publication of JPH0684521U publication Critical patent/JPH0684521U/en
Application granted granted Critical
Publication of JP2598736Y2 publication Critical patent/JP2598736Y2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【考案の詳細な説明】[Detailed description of the invention]

【0001】[0001]

【産業上の利用分野】本考案は、光磁気ディスク表面を
被覆する樹脂保護層の表面に生じた突起を研削するため
の光磁気ディスク用研削ヘッドに関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a grinding head for a magneto-optical disk for grinding protrusions formed on the surface of a resin protective layer covering the surface of a magneto-optical disk.

【0002】[0002]

【従来の技術とその問題点】従来、浮上式磁気ヘッドを
用いた磁界変調方式に用いられる光磁気ディスクとし
て、光磁気記録層の上に形成する樹脂保護層にフィラー
を混入させ、樹脂保護層表面を粗面化すること(特開平
2-40149号公報) 、あるいは表面を粗面化したスタンパ
ーを用いて樹脂保護層にパターン転写し樹脂保護層表面
を粗面化すること(特開平2-232836 号公報) 等が提案
されている。これらの技術により、浮上式磁気ヘッドが
樹脂保護層表面に吸着することが防止される。
2. Description of the Related Art Conventionally, as a magneto-optical disk used in a magnetic field modulation method using a floating magnetic head, a filler is mixed into a resin protective layer formed on a magneto-optical recording layer, and a resin protective layer is formed. Roughening the surface (Japanese Unexamined Patent Publication No. 2-40149), or transferring the pattern to the resin protective layer using a roughened stamper to roughen the surface of the resin protective layer (Japanese Unexamined Patent Publication No. 2-140149). No. 232836) has been proposed. These techniques prevent the floating magnetic head from adsorbing to the surface of the resin protective layer.

【0003】しかしながら、光磁気ディスク表面に樹脂
保護層を形成する際に、ほこり等の異物の混入やフィラ
ーの凝集等により、樹脂保護層に10μm 程度以上の突起
が局部的に発生することがある。そして、この突起に浮
上式磁気ヘッドが衝突して浮上特性を妨げ、光磁気ディ
スクの記録特性を著しく低下させることがあった。
However, when the resin protective layer is formed on the surface of the magneto-optical disk, projections of about 10 μm or more may be locally formed on the resin protective layer due to the entry of foreign matter such as dust and aggregation of the filler. . In some cases, the flying magnetic head collides with the projections, hindering the flying characteristics, and significantly reducing the recording characteristics of the magneto-optical disk.

【0004】そこで、このような突起を取り除くため
に、研削ヘッドで樹脂保護層表面を研削することが考え
られるが、研削ヘッドの構造が適切でなければ、このよ
うな突起を充分に研削することはできないし、たとえ突
起を除去することができても、その突起があった箇所は
研削ヘッドの研削時に、研削ヘッドが異物を基板に押し
つけることで、基板に複屈折異常が発生してエンベロー
プ変動に異常を来したり、信頼性試験等で光磁気記録層
に亀裂が発生するという問題が生じやすい。
In order to remove such protrusions, it is conceivable to grind the surface of the resin protective layer with a grinding head. If the structure of the grinding head is not appropriate, such protrusions must be sufficiently ground. Can not be removed, and even if the protrusions can be removed, the portion where the protrusions are located is pressed by a foreign matter against the substrate during grinding of the grinding head. Problems tend to occur, and cracks are generated in the magneto-optical recording layer in a reliability test or the like.

【0005】[0005]

【考案の目的】本考案は、上述した諸問題を解消する光
磁気ディスク用研削ヘッドの最適な構造を提供すること
を目的とする。
SUMMARY OF THE INVENTION An object of the present invention is to provide an optimum structure of a grinding head for a magneto-optical disk which can solve the above-mentioned problems.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に、本考案の光磁気ディスク用研削ヘッドは、光磁気デ
ィスク表面に存在する突起を研削する光磁気ディスク用
研削ヘッドであって、前記光磁気ディスク表面に対向す
る下面が平坦であり、且つ先端部に刃先を形成するとと
もに、該刃先が前記光磁気ディスク表面に対し50〜80度
の角度を成していることを特徴とする。
To achieve the above object, a magneto-optical disk grinding head according to the present invention is a magneto-optical disk grinding head for grinding protrusions present on the surface of a magneto-optical disk. A lower surface facing the surface of the magneto-optical disk is flat, and a cutting edge is formed at the tip, and the cutting edge forms an angle of 50 to 80 degrees with respect to the surface of the magneto-optical disk.

【0007】[0007]

【作用】光磁気ディスクの樹脂保護層表面に生じた突起
を研削する刃先の成す角度を50乃至80度の最適範囲とす
ることにより、研削時の基板への複屈折異常の発生を極
力防止し、光磁気ディスクのエンベロープ変動の増加を
防止することができる。
[Function] By minimizing the birefringence on the substrate during grinding, the angle formed by the cutting edge for grinding the protrusions formed on the surface of the resin protective layer of the magneto-optical disk is within the range of 50 to 80 degrees. In addition, it is possible to prevent an increase in envelope fluctuation of the magneto-optical disk.

【0008】[0008]

【実施例】本考案に係る光磁気ディスク用研削ヘッド
(以下、研削ヘッドともいう)の一実施例について、図
面に基づき詳細に説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of a grinding head for a magneto-optical disk (hereinafter also referred to as a grinding head) according to the present invention will be described in detail with reference to the drawings.

【0009】まず、次のようにして光磁気ディスクを作
製した。図1に示すように、ポリカーボネート製の基板
1の主面上に、光磁気記録層2をスパッタリング法で形
成し、さらにスピンコーティング法により樹脂保護層3
を形成した。
First, a magneto-optical disk was manufactured as follows. As shown in FIG. 1, a magneto-optical recording layer 2 is formed on a main surface of a polycarbonate substrate 1 by a sputtering method, and a resin protective layer 3 is formed by a spin coating method.
Was formed.

【0010】ここで、光磁気記録層2は、窒化珪素の第
1誘電体層、Gd-Dy-Fe系の光磁気記録層、窒化珪素の第
2誘電体層、及びAlの反射層を順次積層したものであ
り、樹脂保護層3はアクリルウレタン系の紫外線硬化型
樹脂から成る第1樹脂層3aと、アクリル系紫外線硬化
型樹脂にSiO 2 フィラー(平均粒径約4 μm ) を混入さ
せて成る第2樹脂層3bとを順次積層させ、さらに、こ
の第2樹脂層3bにフィラー4を混入させて10〜20μm
程度の高さの突起5を形成させるようにした。この突起
5は主としてフィラー4の凝集により生じたものである
が、塵埃等の異物の混入によっても同様な突起5が発生
する。なお、この突起5の高さは樹脂保護層3の表面を
表面粗さ計で走査して測定して得られた最大高さを意味
する。
The magneto-optical recording layer 2 includes a first dielectric layer of silicon nitride, a Gd-Dy-Fe-based magneto-optical recording layer, a second dielectric layer of silicon nitride, and a reflective layer of Al. The resin protective layer 3 is formed by laminating a first resin layer 3a made of an acrylic urethane-based UV-curable resin and an acrylic UV-curable resin mixed with a SiO 2 filler (average particle size of about 4 μm). The second resin layer 3b is sequentially laminated, and a filler 4 is mixed into the second resin layer 3b to form a 10 to 20 μm
The projections 5 of about the same height are formed. The projections 5 are mainly generated by the aggregation of the fillers 4. However, the same projections 5 are generated by mixing foreign matters such as dust. The height of the projection 5 means the maximum height obtained by scanning the surface of the resin protective layer 3 with a surface roughness meter.

【0011】また、本実施例で使用した研削ヘッドは、
図2に示すような簡単な構造を有するものであり、本体
全体がサファイアで作製された略直方体を成すものであ
って、光磁気ディスクMの表面に対向させる側の面(下
面)が単一の平坦面H1となっており、研削ヘッドHの
走行方向Dに形成された角度θの刃先H2が形成されて
いる。ここで、平坦面H1と刃先H2の面仕上げは、仕
上げ記号で▽▽▽▽である。なお、この面仕上げは仕上
げ記号で▽▽▽でもよく、▽▽▽から▽▽▽▽程度が適
当である。
The grinding head used in this embodiment is
It has a simple structure as shown in FIG. 2, the entire body forms a substantially rectangular parallelepiped made of sapphire, and the surface (lower surface) on the side facing the surface of the magneto-optical disk M is a single And a cutting edge H2 having an angle θ formed in the traveling direction D of the grinding head H is formed. Here, the surface finish of the flat surface H1 and the cutting edge H2 is represented by a finish symbol ▽▽▽▽. In addition, this surface finish may be a finish symbol of ▽▽▽, and a range of ▽▽▽ to ▽▽▽▽ is appropriate.

【0012】次に、刃先H2の角度θが60度, 80度, 90
度, 100 度の各研削ヘッドを作製し、ヘッド荷重が研削
ヘッドHの光磁気ディスクMに接する面に対して1.1gf/
mm2、ディスク回転が3600rpm の研削条件で、光磁気デ
ィスクMの樹脂保護層3の表面に形成された突起5の最
大高さが約3 μm 以下となるように研削を行った。すな
わち、図1に示すように、回転する光磁気ディスクMの
表面上を、研削ヘッドHを光磁気ディスクMの半径方向
Dへ移動させ、このとき、研削ヘッドHの刃先H2が光
磁気ディスクMの突起5を削り落として研削を行うので
ある。
Next, the angle θ of the cutting edge H2 is 60 degrees, 80 degrees, 90 degrees.
And grinding heads with a head load of 1.1 gf / g against the surface of the grinding head H in contact with the magneto-optical disk M.
The grinding was performed so that the maximum height of the protrusions 5 formed on the surface of the resin protective layer 3 of the magneto-optical disk M was about 3 μm or less under the grinding conditions of mm 2 and a disk rotation of 3600 rpm. That is, as shown in FIG. 1, the grinding head H is moved on the surface of the rotating magneto-optical disk M in the radial direction D of the magneto-optical disk M. At this time, the cutting edge H2 of the grinding head H The grinding is performed by shaving off the projections 5 of.

【0013】その後、光磁気ディスクの電気特性の一つ
であるエンベロープ変動を測定した結果、図3に示すよ
うに、刃先の角度θが80度を越えると、研削時に突起中
の異物を基板に押しつけることになり、この圧力により
基板に複屈折異常が発生し、光学顕微鏡による表面観察
では、基板に複屈折異常が認められた。
Thereafter, as a result of measuring the envelope fluctuation, which is one of the electric characteristics of the magneto-optical disk, as shown in FIG. 3, when the angle θ of the blade edge exceeds 80 degrees, the foreign matter in the projections is ground on the substrate during grinding. The pressure caused the birefringence abnormality on the substrate, and the substrate was observed to have birefringence abnormality by surface observation with an optical microscope.

【0014】一方、刃先の角度θが80度以下であれば、
矢印で示す樹脂保護層に生じた突起の存在箇所において
もエンベロープ変動に異常は全く認められず、複屈折異
常も認められなかった。
On the other hand, if the angle θ of the cutting edge is 80 degrees or less,
No abnormality was observed in the envelope fluctuation even at the location of the protrusions generated in the resin protective layer indicated by the arrow, and no abnormal birefringence was observed.

【0015】また、角度θが50度未満では鋭角になり過
ぎ強度的に弱くなるので、研削ヘッドの製造加工の際や
研削作業の際に刃先が欠ける等の問題が発生した。
If the angle θ is less than 50 degrees, the angle becomes too acute and the strength is weakened, so that a problem such as chipping of the cutting edge during the manufacturing processing of the grinding head or the grinding operation occurs.

【0016】なお、図において縦軸は磁気ヘッドで光磁
気ディスクの信号を読み取った際の差動電圧信号を、横
軸は時間を示し、θが90度及び 100度での矢印位置(突
起の存在位置)における波形はノイズを示し、研削によ
るエンベロープ変動の異常を示すものである。
In the figure, the vertical axis indicates the differential voltage signal when the signal of the magneto-optical disk is read by the magnetic head, and the horizontal axis indicates the time. The positions of the arrows (θ of 90 ° and 100 °) The waveform at the position (existing position) indicates noise, and indicates an abnormality in envelope fluctuation due to grinding.

【0017】次に、研削条件における最適のヘッド荷重
を求めるために、ヘッド荷重を0.4,0.5, 1.1gf/mm2
し、ディスク回転を3600rpm として、光磁気ディスクの
樹脂保護層表面の突起の最大高さが約3 μm 以下となる
ように研削を行った。
Next, in order to determine the optimum head load under the grinding conditions, the head load was set to 0.4, 0.5, 1.1 gf / mm 2 , the disk rotation was set to 3600 rpm, and the maximum of the protrusion on the resin protective layer surface of the magneto-optical disk was set. Grinding was performed so that the height was about 3 μm or less.

【0018】その後、それぞれの研削条件で研削した各
光磁気ディスクに対して、80℃, 90%RHの信頼性試験を
1000時間行い、各光磁気ディスクの樹脂保護層表面の突
起部分の光磁気記録層を光学顕微鏡で観察した。
Thereafter, a reliability test at 80 ° C. and 90% RH was performed on each of the magneto-optical disks ground under the respective grinding conditions.
The measurement was performed for 1000 hours, and the magneto-optical recording layer at the protrusion on the surface of the resin protective layer of each magneto-optical disk was observed with an optical microscope.

【0019】ここで、ヘッド荷重が0.4gf/mm2 で研削し
た光磁気ディスクでは、研削能力が弱いために、突起中
の異物に研削ヘッドが接触する回数が多くなり、研削ヘ
ッドの光磁気記録層へ与える衝撃が多くなるので、信頼
性試験において光磁気記録層に亀裂が認められた。一
方、ヘッド荷重が0.5gf/mm2 以上の研削条件で研削した
光磁気ディスクではこのような異常は全く見られなかっ
た。
Here, in the case of a magneto-optical disk ground with a head load of 0.4 gf / mm 2 , the grinding ability is weak, so that the number of times the grinding head comes into contact with foreign matter in the projections increases, and the magneto-optical recording of the grinding head is performed. Due to the increased impact on the layer, cracks were observed in the magneto-optical recording layer in the reliability test. On the other hand, no such abnormalities were observed at all on a magneto-optical disk ground under a grinding condition with a head load of 0.5 gf / mm 2 or more.

【0020】以上の結果により、研削ヘッドHの刃先H
2のなす角度θは、研削ヘッドHの平坦面H1(すなわ
ち、光磁気ディスク表面)から角度50〜80度開いたもの
が最適であり、ヘッド荷重の研削条件は0.5gf/mm2 以上
がよいことが判明した。
From the above results, the cutting edge H of the grinding head H
2 is optimally an angle 50-80 degrees from the flat surface H1 of the grinding head H (that is, the surface of the magneto-optical disk), and the grinding condition of the head load is preferably 0.5 gf / mm 2 or more. It has been found.

【0021】なお、本実施例では研削ヘッドの平坦面は
単一の面で構成したものについて説明したが、2面以上
の平坦面を有するものでもよく、全体の形状も方形状に
限定されず適宜変更し実施しうる。また、刃先とヘッド
側面とで適宜角度を成すものでもよい。また、研削ヘッ
ドの材質についてもハードディスク等で使用される研削
ヘッドと同様なものでよく、例えばAlTiC 、ダイヤモン
ド等を適用することができる。
In this embodiment, the flat surface of the grinding head is described as a single surface. However, the grinding head may have two or more flat surfaces, and the overall shape is not limited to a square shape. It can be changed and implemented as appropriate. Further, the blade edge and the side surface of the head may form an appropriate angle. The material of the grinding head may be the same as that of the grinding head used for a hard disk or the like. For example, AlTiC, diamond, or the like can be used.

【0022】[0022]

【考案の効果】以上詳述したように本考案の研削ヘッド
によれば、下面が平坦で、先端に形成した刃先の角度を
最適にすることでもって、フィラーの凝集や異物の混入
等により生じた突起を効果的に取り除くことができると
ともに、研削時の基板の複屈折異常によるエンベロープ
変動の異常を極力防止でき、ひいては光磁気ディスクの
特性を改善することができる。また特に、研削条件にお
けるヘッド荷重を最適とすることで、信頼性を向上した
光磁気ディスクを提供することができる。
As described above in detail, according to the grinding head of the present invention, the lower surface is flat, and the angle of the cutting edge formed at the tip is optimized, so that the agglomeration of the filler or the mixing of foreign matter causes the grinding head. In addition to effectively removing the projections, abnormalities in envelope fluctuation due to abnormal birefringence of the substrate during grinding can be prevented as much as possible, and the characteristics of the magneto-optical disk can be improved. In particular, a magneto-optical disk with improved reliability can be provided by optimizing the head load under grinding conditions.

【図面の簡単な説明】[Brief description of the drawings]

【図1】光磁気ディスクの樹脂保護層を光磁気ディスク
用研削ヘッドで研削する様子を説明する断面図である。
FIG. 1 is a cross-sectional view illustrating how a resin protective layer of a magneto-optical disk is ground by a magneto-optical disk grinding head.

【図2】本考案に係る一実施例の光磁気ディスク用研削
ヘッドの斜視図である。
FIG. 2 is a perspective view of a magneto-optical disk grinding head according to one embodiment of the present invention;

【図3】光磁気ディスク用研削ヘッドの刃先の成す角度
θとエンベロープ変動との関係を説明する図である。
FIG. 3 is a diagram illustrating a relationship between an angle θ formed by a blade edge of a grinding head for a magneto-optical disk and envelope fluctuation.

【符号の説明】[Explanation of symbols]

1 ・・・ 基板 2 ・・・ 光記録層 3 ・・・ 樹脂保護層 4 ・・・ フィラー 5 ・・・ 突起 H ・・・ 研削ヘッド M ・・・ 光磁気デ
ィスク H1・・・ 平坦面 H2・・・ 刃先
DESCRIPTION OF SYMBOLS 1 ... Substrate 2 ... Optical recording layer 3 ... Resin protective layer 4 ... Filler 5 ... Projection H ... Grinding head M ... Magneto-optical disk H1 ... Flat surface H2 .. Cutting edge

Claims (1)

(57)【実用新案登録請求の範囲】(57) [Scope of request for utility model registration] 【請求項1】 光磁気ディスク表面に存在する突起を研
削する光磁気ディスク用研削ヘッドであって、前記光磁
気ディスク表面に対向する下面が平坦であり、且つ先端
部に刃先を形成するとともに、該刃先が前記光磁気ディ
スク表面に対し50〜80度の角度を成していることを特徴
とする光磁気ディスク用研削ヘッド。
1. A grinding head for a magneto-optical disc for grinding a projection present in the magneto-optical disk surface, the optical magnetic
The lower surface facing the disk surface is flat and the tip is
A cutting edge is formed in the portion, and the cutting edge is
A grinding head for a magneto-optical disk, wherein the grinding head forms an angle of 50 to 80 degrees with the disk surface .
JP1993022693U 1993-04-28 1993-04-28 Grinding head for magneto-optical disk Expired - Fee Related JP2598736Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1993022693U JP2598736Y2 (en) 1993-04-28 1993-04-28 Grinding head for magneto-optical disk

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1993022693U JP2598736Y2 (en) 1993-04-28 1993-04-28 Grinding head for magneto-optical disk

Publications (2)

Publication Number Publication Date
JPH0684521U JPH0684521U (en) 1994-12-02
JP2598736Y2 true JP2598736Y2 (en) 1999-08-16

Family

ID=12089959

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1993022693U Expired - Fee Related JP2598736Y2 (en) 1993-04-28 1993-04-28 Grinding head for magneto-optical disk

Country Status (1)

Country Link
JP (1) JP2598736Y2 (en)

Also Published As

Publication number Publication date
JPH0684521U (en) 1994-12-02

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