JP2022078369A - Pressure-sensitive member and pressure detection device - Google Patents

Pressure-sensitive member and pressure detection device Download PDF

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JP2022078369A
JP2022078369A JP2019057498A JP2019057498A JP2022078369A JP 2022078369 A JP2022078369 A JP 2022078369A JP 2019057498 A JP2019057498 A JP 2019057498A JP 2019057498 A JP2019057498 A JP 2019057498A JP 2022078369 A JP2022078369 A JP 2022078369A
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pressure
electrode
sensitive
substrate
elastic
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義尚 谷口
Yoshinao Taniguchi
邦明 鈴木
Kuniaki Suzuki
恭志 北村
Yasushi Kitamura
広之 管野
Hiroyuki Kanno
弘也 渡部
Hiroya Watabe
直之 徳地
Naoyuki Tokuchi
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Alps Alpine Co Ltd
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Alps Alpine Co Ltd
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Priority to JP2019057498A priority Critical patent/JP2022078369A/en
Priority to PCT/JP2020/007489 priority patent/WO2020195461A1/en
Publication of JP2022078369A publication Critical patent/JP2022078369A/en
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress

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  • General Physics & Mathematics (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)

Abstract

To provide a pressure-sensitive member which can stably detect a resistance value over a wide range of pressing force with a simple configuration.SOLUTION: A pressure-sensitive member according to the present invention comprises: a plurality of substrates having at least one electrode; and a pressure-sensitive conductive member which is arranged between the plurality of substrates and is in contact with the electrode. The electrode comprises: a pair of first electrodes which is formed on one surface side of the substrate; and second electrodes which are formed with the pressure-sensitive conductive member held therebetween. At least one of the plurality of substrates has an elastic substrate that is elastically deformed with the action of the pressing force. The pressure-sensitive conductive member is elastically deformed with the elastic deformation of the elastic substrate. The electric resistance value between the pair of first electrodes changes and the electric resistance value between the first electrode and the second electrode changes.SELECTED DRAWING: Figure 1

Description

本発明は、感圧部材及び圧力検出装置に関する。 The present invention relates to a pressure sensitive member and a pressure detecting device.

押圧力が加えられることにより抵抗値（電気抵抗値）が変化する抵抗変化検出型の感圧部材等を備える検出装置が広く知られている。このような検出装置は、構成が簡便であり、触れた時の感触も良いため、感圧センサとして、ロボットの触覚センサや携帯情報端末等の電子機器のタッチパネル等への応用が検討されている。 A detection device including a resistance change detection type pressure-sensitive member whose resistance value (electrical resistance value) changes when a pressing force is applied is widely known. Since such a detection device has a simple configuration and a good feel when touched, application to a touch panel of an electronic device such as a tactile sensor of a robot or a mobile information terminal is being studied as a pressure sensor. ..

このような抵抗変化検出型の感圧部材として、感圧性の導電ゴムの表面側に電極を形成した検出装置がある（例えば、特許文献１参照）。特許文献１には、裏面に検出電圧を設けた電極基盤と、高抵抗ゴム層及び低抵抗ゴム層により構成される感圧抵抗体と、基材とを、押圧される側から基材順に積層したものが開示されている。感圧抵抗体を構成する高抵抗ゴム層及び低抵抗ゴム層は、導電性粒子を分散させたゴムにより構成され、柔軟性や弾力性を有しつつ導電性を備える。感圧抵抗体は、高抵抗ゴム層の少なくとも一部を低抵抗ゴム層よりも検出電極側に突出するように構成し、荷重に応じた抵抗値の変化率を好適としている。 As such a resistance change detection type pressure sensitive member, there is a detection device in which an electrode is formed on the surface side of the pressure sensitive conductive rubber (see, for example, Patent Document 1). In Patent Document 1, an electrode substrate provided with a detection voltage on the back surface, a pressure sensitive resistor composed of a high resistance rubber layer and a low resistance rubber layer, and a base material are laminated in the order of the base material from the pressed side. Is disclosed. The high-resistance rubber layer and the low-resistance rubber layer constituting the pressure-sensitive resistance thermometer are made of rubber in which conductive particles are dispersed, and have conductivity while having flexibility and elasticity. The pressure sensitive resistor is configured so that at least a part of the high resistance rubber layer protrudes toward the detection electrode side from the low resistance rubber layer, and the rate of change of the resistance value according to the load is suitable.

特開２０１７－９６６５８号公報Japanese Unexamined Patent Publication No. 2017-96658

しかしながら、特許文献１の技術では、感圧抵抗体を、高抵抗ゴム層の体積抵抗値が低抵抗ゴム層の体積抵抗値よりも高くなるように設定して作製したり、高抵抗ゴム層と低抵抗ゴム層との高さが異なるように調整する等、感圧抵抗体の製造が複雑である。そのため、製造時の歩留まりが低くなり易く、広範囲に亘って抵抗値の変化を安定して検出できない可能性がある。 However, in the technique of Patent Document 1, the pressure-sensitive resistor may be manufactured by setting the volume resistance value of the high resistance rubber layer to be higher than the volume resistance value of the low resistance rubber layer, or may be formed as a high resistance rubber layer. The production of the pressure-sensitive resistor is complicated, for example, the height is adjusted so as to be different from the low resistance rubber layer. Therefore, the yield at the time of manufacturing tends to be low, and there is a possibility that changes in the resistance value cannot be stably detected over a wide range.

本発明の一態様は、簡易な構成で、抵抗値を広い押圧力の範囲に亘って安定して検出することができる感圧部材を提供することを目的とする。 One aspect of the present invention is to provide a pressure-sensitive member capable of stably detecting a resistance value over a wide range of pressing force with a simple configuration.

本発明に係る感圧部材の一態様は、少なくとも１つの電極を備える複数の基板と、前記複数の基板同士の間に配置され、前記電極と接触する感圧導電性部材と、を備え、前記電極は、前記基板の一面側に形成された一対の第１電極と、前記感圧導電性部材を挟んで形成された第２電極と、を有し、複数の前記基板の少なくとも１つが押圧力の作用で弾性変形する弾性基板を有し、前記感圧導電性部材は、前記弾性基板の弾性変形により弾性変形し、前記一対の第１電極間の電気抵抗値が変化すると共に、前記第１電極と前記第２電極との間の電気抵抗値が変化する。 One aspect of the pressure-sensitive member according to the present invention comprises a plurality of substrates including at least one electrode, and a pressure-sensitive conductive member arranged between the plurality of substrates and in contact with the electrodes. The electrode has a pair of first electrodes formed on one surface side of the substrate and a second electrode formed by sandwiching the pressure-sensitive conductive member, and at least one of the plurality of substrates has a pressing force. The pressure-sensitive conductive member has an elastic substrate that is elastically deformed by the action of the above, and the pressure-sensitive conductive member is elastically deformed by the elastic deformation of the elastic substrate, the electric resistance value between the pair of first electrodes changes, and the first. The electric resistance value between the electrode and the second electrode changes.

本発明に係る感圧部材の一態様は、抵抗値を広い押圧力の範囲に亘って安定して検出することができる。 In one aspect of the pressure-sensitive member according to the present invention, the resistance value can be stably detected over a wide range of pressing force.

一実施形態に係る弾性基板の構成の一例を示す斜視図である。It is a perspective view which shows an example of the structure of the elastic substrate which concerns on one Embodiment. 一実施形態に係る弾性基板を分解斜視図である。It is an exploded perspective view of the elastic substrate which concerns on one Embodiment. 図１のI－I断面図である。FIG. 1 is a cross-sectional view taken along the line I-I of FIG. 感圧部材が押圧されている状態の一例を示す説明図である。It is explanatory drawing which shows an example of the state which a pressure sensitive member is pressed. 感圧導電性部材の下側に電極が配置された感圧部材が押圧されている状態の一例を示す説明図である。It is explanatory drawing which shows an example of the state in which the pressure-sensitive member in which an electrode is arranged under the pressure-sensitive conductive member is pressed. 感圧部材を適用した圧力検出装置の斜視図である。It is a perspective view of the pressure detection device to which a pressure sensitive member was applied. 感圧部材を適用した圧力検出装置の斜視図である。It is a perspective view of the pressure detection device to which a pressure sensitive member was applied. 図７のII－II断面図である。FIG. 7 is a cross-sectional view taken along the line II-II of FIG. 感圧部材の他の構成の一例を示す断面図である。It is sectional drawing which shows an example of another structure of a pressure sensitive member. 感圧部材の他の構成の一例を示す分解斜視図である。It is an exploded perspective view which shows an example of another structure of a pressure sensitive member. 第２の実施形態に係る感圧部材の構成の一例を示す分解斜視図である。It is an exploded perspective view which shows an example of the structure of the pressure sensitive member which concerns on 2nd Embodiment. 図１１において、感圧部材の各部材を積層した状態のII－II断面図である。FIG. 11 is a cross-sectional view taken along the line II-II in which the pressure-sensitive members are laminated. 押し込み試験を説明する図である。It is a figure explaining the indentation test. 実施例１の圧力と抵抗との関係を示す図である。It is a figure which shows the relationship between the pressure and resistance of Example 1. FIG.

以下、本発明の実施の形態について、図面を参照しながら詳細に説明する。なお、説明の理解を容易にするため、各図面において同一の構成要素に対しては同一の符号を付して、重複する説明は省略する。図面における各部材の縮尺は実際とは異なる場合がある。本明細書では、３軸方向（Ｘ軸方向、Ｙ軸方向、Ｚ軸方向）の３次元直交座標系を用い、感圧部材の長さ方向をＸ軸方向、感圧部材の幅方向をＹ軸方向とし、感圧部材の高さ方向をＺ軸方向とする。感圧部材の弾性基板側を＋Ｚ軸方向とし、その反対方向を－Ｚ軸方向とする。以下の説明において、＋Ｚ軸方向を上といい、－Ｚ軸方向を下という場合がある。本明細書において数値範囲を示すチルダ「～」は、別段の断わりがない限り、その前後に記載された数値を下限値及び上限値として含むことを意味する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, in order to facilitate understanding of the description, the same reference numerals are given to the same components in each drawing, and duplicate description is omitted. The scale of each member in the drawing may differ from the actual scale. In the present specification, a three-dimensional Cartesian coordinate system in the three-axis directions (X-axis direction, Y-axis direction, Z-axis direction) is used, the length direction of the pressure-sensitive member is the X-axis direction, and the width direction of the pressure-sensitive member is Y. The axial direction is used, and the height direction of the pressure-sensitive member is the Z-axis direction. The elastic substrate side of the pressure-sensitive member is the + Z-axis direction, and the opposite direction is the −Z-axis direction. In the following description, the + Z-axis direction may be referred to as "up" and the-Z-axis direction may be referred to as "down". In the present specification, the tilde "-" indicating a numerical range means that the numerical values described before and after the tilde are included as the lower limit value and the upper limit value unless otherwise specified.

［第１の実施形態］
＜感圧部材＞
第１の実施形態に係る弾性基板について説明する。図１は、一実施形態に係る弾性基板の構成の一例を示す斜視図であり、図２は、一実施形態に係る弾性基板を分解斜視図であり、図３は、図１のI－I断面図である。図１～図３に示すように、感圧部材１０Ａは、基板である弾性基板１１Ａ及び１１Ｂと、接着層１２Ａ及び１２Ｂと、第１電極１３Ａ及び第２電極１３Ｂと、粘着層１４と、感圧導電性部材１５とを備える。以下、感圧部材１０Ａを構成する各部材について説明する。 [First Embodiment]
<Pressure sensitive member>
The elastic substrate according to the first embodiment will be described. FIG. 1 is a perspective view showing an example of the configuration of the elastic substrate according to the embodiment, FIG. 2 is an exploded perspective view of the elastic substrate according to the embodiment, and FIG. 3 is FIG. 1I-I. It is a cross-sectional view. As shown in FIGS. 1 to 3, the pressure-sensitive member 10A feels like the elastic substrates 11A and 11B, the adhesive layers 12A and 12B, the first electrodes 13A and the second electrodes 13B, and the adhesive layer 14. A pressure conductive member 15 is provided. Hereinafter, each member constituting the pressure-sensitive member 10A will be described.

弾性基板１１Ａ及び１１Ｂは、図１及び図２に示すように、平面視において矩形状に形成された板状部材である。弾性基板１１Ａ及び１１Ｂは、押圧力で弾性変形可能な基板であり、押圧力が作用することによって変形し、押圧力が除荷されると元の形状に回復する弾性を有する基板である。本実施形態では、弾性基板１１Ａは感圧部材１０Ａの上面側に設置されるので、第１弾性基板とし、弾性基板１１Ｂは感圧部材１０Ａの下面側に配置されるので、第２弾性基板とする。弾性基板１１Ａ及び１１Ｂは、互いに平行な一対の主面を有する。弾性基板１１Ａでは、押圧力の作用する主面が作用面１１１Ａであり、作用面１１１Ａとは反対側の主面が押圧力を伝える伝達面１１２Ａである。弾性基板１１Ｂでは、押圧力を伝える主面が伝達面１１１Ｂであり、伝達面１１１Ｂとは反対側の主面が支持面１１２Ｂである。 As shown in FIGS. 1 and 2, the elastic substrates 11A and 11B are plate-shaped members formed in a rectangular shape in a plan view. The elastic substrates 11A and 11B are substrates that can be elastically deformed by the pressing force, and are elastic substrates that are deformed by the action of the pressing force and recover to the original shape when the pressing force is unloaded. In the present embodiment, since the elastic substrate 11A is installed on the upper surface side of the pressure-sensitive member 10A, it is used as the first elastic substrate, and the elastic substrate 11B is arranged on the lower surface side of the pressure-sensitive member 10A. do. The elastic substrates 11A and 11B have a pair of main surfaces parallel to each other. In the elastic substrate 11A, the main surface on which the pressing force acts is the acting surface 111A, and the main surface opposite to the acting surface 111A is the transmission surface 112A that transmits the pressing force. In the elastic substrate 11B, the main surface for transmitting the pressing force is the transmission surface 111B, and the main surface on the side opposite to the transmission surface 111B is the support surface 112B.

弾性基板１１Ａ及び１１Ｂは、エラストマーや合成樹脂を用いて形成することができる。エラストマーを形成する材料としては、例えば、天然ゴム、シリコーンゴム、クロロプレンゴム、イソプレンゴム、ブチルゴム、アクリルゴム、ニトリルゴム、ウレタンゴム、ポリイソブチレンゴム、ブタジエンゴム、スチレン－ブタジエンゴム、エチレン－プロピレンゴム、クロロスルホン化ポリエチレンゴム、エピクロルヒドリンゴム、ポリエステルゴム、フッ素ゴム、及びこれらの変性体等を用いることができる。合成樹脂としては、柔軟性エポキシ樹脂等を用いることができる。これらは、１種を単独で用いてもよいし、２種以上を組み合わせて用いてもよい。中でも、シリコーンゴムが好ましい。シリコーンゴムを用いることで、弾性基板１１Ａ及び１１Ｂは、弾性が高く、接着層１２Ａ及び１２Ｂとの密着性を良好とすることができる。また、弾性基板１１Ａは、押圧力の作用点で弾性基板１１Ａが変形し、作用点が移動することなく押圧力を受け止めることができるので、押圧力は伝達面１１２Ａから第１電極１３Ａ及び第２電極１３Ｂと感圧導電性部材１５に的確に伝達される。 The elastic substrates 11A and 11B can be formed by using an elastomer or a synthetic resin. Examples of the material forming the elastomer include natural rubber, silicone rubber, chloroprene rubber, isoprene rubber, butyl rubber, acrylic rubber, nitrile rubber, urethane rubber, polyisobutylene rubber, butadiene rubber, styrene-butadiene rubber, and ethylene-propylene rubber. Chlorosulfonated polyethylene rubber, epichlorohydrin rubber, polyester rubber, fluororubber, modified products thereof and the like can be used. As the synthetic resin, a flexible epoxy resin or the like can be used. These may be used individually by 1 type, or may be used in combination of 2 or more type. Of these, silicone rubber is preferable. By using silicone rubber, the elastic substrates 11A and 11B have high elasticity and can have good adhesion to the adhesive layers 12A and 12B. Further, since the elastic substrate 11A is deformed at the point of action of the pressing force and can receive the pressing force without moving the point of action, the pressing force can be applied to the first electrode 13A and the second electrode 13A from the transmission surface 112A. It is accurately transmitted to the electrode 13B and the pressure-sensitive conductive member 15.

弾性基板１１Ａ及び１１Ｂの厚さは、１０μｍ～１００μｍであることが好ましく、２０μｍ～７５μｍであることがより好ましく、２５μｍ～５０μｍであることがさらに好ましい。弾性基板１１Ａ及び１１Ｂの厚さが１０μｍ～１００μｍの範囲内であれば、弾性基板１１Ａ及び１１Ｂは十分な強度を有すると共に、弾性を有することができる。 The thickness of the elastic substrates 11A and 11B is preferably 10 μm to 100 μm, more preferably 20 μm to 75 μm, and even more preferably 25 μm to 50 μm. When the thickness of the elastic substrates 11A and 11B is in the range of 10 μm to 100 μm, the elastic substrates 11A and 11B have sufficient strength and can have elasticity.

接着層１２Ａ及び１２Ｂは、図３に示すように、弾性基板１１Ａ及び１１Ｂの伝達面１１２Ａ及び１１１Ｂに設けられる。接着層１２Ａは、弾性基板１１Ａと第１電極１３Ａとの間に設けられ、接着層１２Ｂは、弾性基板１１Ｂと第２電極１３Ｂとの間に設けられる。接着層１２Ａ及び１２Ｂは、弾性基板１１Ａ及び１１Ｂと第１電極１３Ａ及び第２電極１３Ｂとの接着力を高める機能を有し、第１電極１３Ａ及び第２電極１３Ｂを固着する。 As shown in FIG. 3, the adhesive layers 12A and 12B are provided on the transmission surfaces 112A and 111B of the elastic substrates 11A and 11B. The adhesive layer 12A is provided between the elastic substrate 11A and the first electrode 13A, and the adhesive layer 12B is provided between the elastic substrate 11B and the second electrode 13B. The adhesive layers 12A and 12B have a function of increasing the adhesive force between the elastic substrates 11A and 11B and the first electrode 13A and the second electrode 13B, and fix the first electrode 13A and the second electrode 13B.

接着層１２Ａ及び１２Ｂは、トリアジン系化合物を含む。接着層１２Ａ及び１２Ｂとしては、トリアジン系化合物を含む分子接着剤を用いて形成される。 The adhesive layers 12A and 12B contain a triazine-based compound. The adhesive layers 12A and 12B are formed by using a molecular adhesive containing a triazine-based compound.

トリアジン系化合物としては、トリアジンチオール化合物を用いることができる。トリアジンチオール化合物として、例えば、トリアジン環にチオール基（－ＳＨ基）又はチオール基のアルカリ金属塩がついたものを用いることができる。官能基の何れか一つは、ジブチルアミノ基、アニリノ基等の他の構造を有していてもよい。トリアジンチオール化合物の具体例としては、例えば、２－トリエトキイシルプロオピラミイノ－４－チオール－６－チオール－１，３，５－トリアジン、２－トリエトキイシルプロオピラミイノ－４－アジド－６－アジド－１，３，５－トリアジン、２－トリエトキイシルプロオピラミイノ－４－アミノエチラミノ－６－アミノエチラミノ－１，３，５－トリアジン、２－トリヒドロキシルプロオピラミイノ－４－チオール－６－チオール－１，３，５－トリアジン、２－トリヒドロキシルプロオピラミイノ－４－アジド－６－アジド－１，３，５－トリアジン、２－トリヒドロキシルプロオピラミイノ－４－アミノエチラミノ－６－アミノエチラミノ－１，３，５－トリアジン、２－（４－メトキシフェニル）－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－（４－メトキシナフチル）－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－（４－エトキシナフチル）－４，６－ビス（トリクロロメチル）一１，３，５－トリアジン、２－（４－エトキシカルボニルナフチル）－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２，４，６－トリス（モノクロロメチル）－１，３，５－トリアジン、２，４，６－トリス（ジクロロメチル）－１，３，５－トリアジン、２，４，６－トリス（トリクロロメチル）－１，３，５－トリアジン、２－メチル－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－ｎ－プロピル－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－（α，α，β－トリクロロエチル）－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－フェニル－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－（ｐ－メトキシフェニル）－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－（３，４－エポキシフェニル）－４、６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－（ｐ－クロロフェニル）－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－〔１－（ｐ－メトキシフェニル）－２，４－ブタジエニル〕－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－スチリル－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－（ｐ－メトキシスチリル）－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－（ｐ－ｉ－プロピルオキシスチリル）－４、６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－（ｐ－トリル）－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－（４－メトキシナフチル）－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－フェニルチオ－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、２－ベンジルチオ－４，６－ビス（トリクロロメチル）－１，３，５－トリアジン、４－（ｏ－ブロモ－ｐ－Ｎ，Ｎ－（ジエトキシカルボニルアミノ）－フェニル）－２，６－ジ（トリクロロメチル）－１，３，５－トリアジン、２，４，６－トリス（ジブロモメチル）－ｓ－トリアジン、２，４，６－トリス（トリブロモメチル）－１，３，５－トリアジン、２－メチル－４，６－ビス（トリブロモメチル）－ｓ－トリアジン、２－メトキシ－４，６－ビス（トリブロモメチル）－１，３，５－トリアジン、２，４，６－トリメルカプト－１，３，５－トリアジン、２－ジブチルアミノ－４，６－ジメルカプト－ｓ－トリアジン、２－アニリノ－４，６－ジメルカプト－ｓ－トリアジン、２，４，６－トリメルカプト－１，３，５－トリアジンモノナトリウム塩及び２，４，６－トリメルカプト－１，３，５－トリアジンナトリム塩等が挙げられる。なお、１，３，５－トリアジンは、ｓ－トリアジンともいう。これらは、一種単独で用いてもよいし、二種以上を併用してもよい。 As the triazine-based compound, a triazine thiol compound can be used. As the triazine thiol compound, for example, a triazine ring having a thiol group (-SH group) or an alkali metal salt of a thiol group can be used. Any one of the functional groups may have another structure such as a dibutylamino group and an anirino group. Specific examples of the triazinethiol compound include, for example, 2-trietkiisylproopiramiino-4-thiol-6-thiol-1,3,5-triazine and 2-trietkiisylproopiramiino-4-azide. -6-Azido-1,3,5-triazine, 2-trietkiisylproopiramiino-4-aminoethylamino-6-aminoethylamino-1,3,5-triazine, 2-trihydroxylproopiramiino-4- Thiol-6-thiol-1,3,5-triazine, 2-trihydroxylproopiramiino-4-azido-6-azido-1,3,5-triazine, 2-trihydroxylproopiramiino-4- Aminoethyramino-6-aminoethylamino-1,3,5-triazine, 2- (4-methoxyphenyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-methoxynaphthyl)- 4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (4-ethoxynaphthyl) -4,6-bis (trichloromethyl) 1,3,5-triazine, 2- (4-) Ethoxycarbonylnaphthyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2,4,6-tris (monomonolomethyl) -1,3,5-triazine, 2,4,6-tris (Dichloromethyl) -1,3,5-triazine, 2,4,6-tris (trichloromethyl) -1,3,5-triazine, 2-methyl-4,6-bis (trichloromethyl) -1,3 , 5-Triazine, 2-n-propyl-4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (α, α, β-trichloroethyl) -4,6-bis (trichloromethyl) )-1,3,5-Triazine, 2-phenyl-4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (p-methoxyphenyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (3,4-epoxyphenyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (p-chlorophenyl) -4,6- Bis (trichloromethyl) -1,3,5-triazine, 2- [1- (p-methoxyphenyl) -2,4-butazineyl] -4,6-bis (trichloromethyl) -1,3,5-triazine , 2-Styril-4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (p-methoxystyryl) -4,6-bis (trichloromethyl)- 1,3,5-Triazine, 2- (pi-propyloxystyryl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2- (p-tolyl) -4,6- Bis (trichloromethyl) -1,3,5-triazine, 2- (4-methoxynaphthyl) -4,6-bis (trichloromethyl) -1,3,5-triazine, 2-phenylthio-4,6-bis (Trichloromethyl) -1,3,5-triazine, 2-benzylthio-4,6-bis (trichloromethyl) -1,3,5-triazine, 4- (o-bromo-p-N, N- (di Ethoxycarbonylamino) -phenyl) -2,6-di (trichloromethyl) -1,3,5-triazine, 2,4,6-tris (dibromomethyl) -s-triazine, 2,4,6-tris ( Tribromomethyl) -1,3,5-triazine, 2-methyl-4,6-bis (tribromomethyl) -s-triazine, 2-methoxy-4,6-bis (tribromomethyl) -1,3 , 5-Triazine, 2,4,6-Trimercapto-1,3,5-Triazine, 2-dibutylamino-4,6-Dimercapto-s-Triazine, 2-Anilino-4,6-Dimercapto-s-Triazine , 2,4,6-Trimercapto-1,3,5-triazine monosodium salt, 2,4,6-trimercapto-1,3,5-triazinenatrim salt and the like. In addition, 1,3,5-triazine is also referred to as s-triazine. These may be used alone or in combination of two or more.

接着層１２Ａ及び１２Ｂは、トリアジン系化合物を含む分子接着剤を用いて形成する場合には、接着層１２Ａ及び１２Ｂの厚さは、１ｎｍ～１００ｎｍ程度が好ましい。なお、接着層１２Ａ及び１２Ｂは、一般的な接着剤を用いて形成してもよい。この場合、接着層１２Ａ及び１２Ｂの厚さは、１μｍ～２０μｍであることが好ましく、３μｍ～１５μｍであることがより好ましく、５μｍ～１０μｍであることがさらに好ましい。 When the adhesive layers 12A and 12B are formed by using a molecular adhesive containing a triazine compound, the thickness of the adhesive layers 12A and 12B is preferably about 1 nm to 100 nm. The adhesive layers 12A and 12B may be formed by using a general adhesive. In this case, the thicknesses of the adhesive layers 12A and 12B are preferably 1 μm to 20 μm, more preferably 3 μm to 15 μm, and even more preferably 5 μm to 10 μm.

一対の第１電極１３Ａ及び第２電極１３Ｂは、図１及び図２に示すように、弾性基板１１Ａ及び１１Ｂとの間に設けられる。図３に示すように、第１電極１３Ａは、接着層１２Ａの下面（－Ｚ軸方向の面）に設けられ、弾性基板１１Ａの伝達面１１２Ａに接着層１２Ａを介して設けられる。第２電極１３Ｂは、接着層１２Ｂの上面（＋Ｚ軸方向の面）に設けられ、弾性基板１１Ｂの伝達面１１１Ｂに接着層１２Ｂを介して設けられる。 The pair of first electrodes 13A and second electrodes 13B are provided between the elastic substrates 11A and 11B as shown in FIGS. 1 and 2. As shown in FIG. 3, the first electrode 13A is provided on the lower surface (the surface in the −Z axis direction) of the adhesive layer 12A, and is provided on the transmission surface 112A of the elastic substrate 11A via the adhesive layer 12A. The second electrode 13B is provided on the upper surface (the surface in the + Z axis direction) of the adhesive layer 12B, and is provided on the transmission surface 111B of the elastic substrate 11B via the adhesive layer 12B.

第１電極１３Ａは、図１及び図２に示すように、互いに絶縁されて対向して設けられた一対の第１電極１３Ａ－１及び１３Ａ－２で構成されている。 As shown in FIGS. 1 and 2, the first electrode 13A is composed of a pair of first electrodes 13A-1 and 13A-2 which are insulated from each other and provided opposite to each other.

一対の第１電極１３Ａ－１及び１３Ａ－２は、互いに絶縁された状態で対向して設けられており、その先端が櫛歯状に形成された櫛歯電極を有している。第１電極１３Ａ－１及び１３Ａ－２は、Ｘ軸方向に直線状に形成された本体部１３１Ａ－１及び１３１Ａ－２と、櫛歯状に形成された先端部１３２Ａ－１及び１３２Ａ－２（櫛歯電極）と、外部の配線が連結される端子部１３３Ａ－１及び１３３Ａ－２とを有する。 The pair of first electrodes 13A-1 and 13A-2 are provided so as to face each other in a state of being insulated from each other, and have a comb tooth electrode having a tip formed in a comb tooth shape. The first electrodes 13A-1 and 13A-2 have a main body portion 131A-1 and 131A-2 formed linearly in the X-axis direction and a tip portion 132A-1 and 132A-2 formed in a comb-teeth shape. It has a comb tooth electrode) and terminal portions 133A-1 and 133A-2 to which external wiring is connected.

本体部１３１Ａ－１及び１３１Ａ－２は、細長いパターン状に形成され、弾性基板１１ＡのＹ軸方向の辺の中間を通り、かつ弾性基板１１ＡのＸ軸方向の辺（Ｙ軸方向の辺に直交する辺）に平行な中心線に対して略対称となるように設けられている。その両端側には、先端部１３２Ａ－１及び１３２Ａ－２と端子部１３３Ａ－１及び１３３Ａ－２とが電気的に接続されて形成されている。 The main body portions 131A-1 and 131A-2 are formed in an elongated pattern, pass through the middle of the Y-axis direction side of the elastic substrate 11A, and are orthogonal to the X-axis direction side of the elastic substrate 11A (orthogonal to the Y-axis direction side). It is provided so as to be substantially symmetrical with respect to the center line parallel to the side). The tip portions 132A-1 and 132A-2 and the terminal portions 133A-1 and 133A-2 are electrically connected to each other on both ends thereof.

先端部１３２Ａ－１及び１３２Ａ－２は、平面視において＋Ｘ軸方向側であって感圧導電性部材１５の位置に設けられ、先端部１３２Ａ－１及び１３２Ａ－２の、複数の櫛歯がＸ軸方向に沿って、交互に配列されて、互いに絶縁されるように配置されている。この櫛歯間のギャップは狭い間隔となっている。 The tip portions 132A-1 and 132A-2 are provided at the position of the pressure-sensitive conductive member 15 on the + X-axis direction side in a plan view, and the plurality of comb teeth of the tip portions 132A-1 and 132A-2 are X. They are arranged alternately along the axial direction so as to be isolated from each other. The gap between the comb teeth is narrow.

端子部１３３Ａ－１及び１３３Ａ－２は、矩形の形状に形成され、平面視において、－Ｘ軸方向側の弾性基板１１Ａの端部の位置に設けられる。この端子部１３３Ａ－１及び１３３Ａ－２には、粘着層１４が被覆されていない。 The terminal portions 133A-1 and 133A-2 are formed in a rectangular shape and are provided at the positions of the end portions of the elastic substrate 11A on the −X-axis direction side in a plan view. The terminal portions 133A-1 and 133A-2 are not covered with the adhesive layer 14.

本体部１３１Ａ－１及び１３１Ａ－２の大部分は、弾性基板１１Ａと粘着層１４との間に配置され、先端部１３２Ａ－１及び１３２Ａ－２は、弾性基板１１Ａと感圧導電性部材１５との間に配置される。すなわち、第１電極１３Ａ－１及び１３Ａ－２の本体部１３１Ａ－１及び１３１Ａ－２の大部分と先端部１３２Ａ－１及び１３２Ａ－２は、これらを挟持するように弾性基板１１Ａと粘着層１４又は感圧導電性部材１５との間に配置されている。 Most of the main body portions 131A-1 and 131A-2 are arranged between the elastic substrate 11A and the adhesive layer 14, and the tip portions 132A-1 and 132A-2 are the elastic substrate 11A and the pressure-sensitive conductive member 15. Placed between. That is, most of the main bodies 131A-1 and 131A-2 of the first electrodes 13A-1 and 13A-2 and the tip portions 132A-1 and 132A-2 hold the elastic substrate 11A and the adhesive layer 14 so as to sandwich them. Alternatively, it is arranged between the pressure-sensitive conductive member 15 and the pressure-sensitive conductive member 15.

第２電極１３Ｂは、Ｘ軸方向に直線状に形成された本体部１３１Ｂと、先端部１３２Ｂと、外部の配線が連結される端子部１３３Ｂとを有する。 The second electrode 13B has a main body portion 131B formed linearly in the X-axis direction, a tip portion 132B, and a terminal portion 133B to which external wiring is connected.

本体部１３１Ｂは、細長いパターン状に形成され、弾性基板１１ＡのＹ軸方向の辺の中間を通り、かつ弾性基板１１ＡのＸ軸方向の辺（Ｙ軸方向の辺に直交する辺）に平行な中心線を通るように設けられている。その両端側には、先端部１３２Ｂと端子部１３３Ｂとが電気的に接続されて形成されている。 The main body 131B is formed in an elongated pattern, passes through the middle of the Y-axis side of the elastic substrate 11A, and is parallel to the X-axis side (the side orthogonal to the Y-axis side) of the elastic substrate 11A. It is provided so as to pass through the center line. The tip portion 132B and the terminal portion 133B are electrically connected to each other on both ends.

先端部１３２Ｂは、平面視において＋Ｘ軸方向側であって感圧導電性部材１５の位置に設けられ、平面視において略矩形にされ、角部が面取りされている。 The tip portion 132B is provided at the position of the pressure-sensitive conductive member 15 on the + X-axis direction side in a plan view, is substantially rectangular in a plan view, and has a chamfered corner portion.

端子部１３３Ｂは、矩形の形状に形成され、平面視において－Ｘ軸方向側の弾性基板１１Ｂの端部の位置に設けられる。この端子部１３３Ｂには、粘着層１４が被覆されていない。 The terminal portion 133B is formed in a rectangular shape and is provided at the position of the end portion of the elastic substrate 11B on the −X-axis direction side in a plan view. The terminal portion 133B is not covered with the adhesive layer 14.

本体部１３１Ｂの一部及び端子部１３３Ｂは、弾性基板１１Ｂの伝達面１１１Ｂに接着層１２Ｂを介して設けられ、端子部１３３Ｂの大部分と及び先端部１３２Ｂは、弾性基板１１Ｂと感圧導電性部材１５との間に配置される。すなわち、本体部１３１Ｂの大部分は、弾性基板１１Ｂと粘着層１４との間に弾性基板１１Ｂ及び粘着層１４に挟持されるように配置される。先端部１３２Ｂは粘着層１４と感圧導電性部材１５との間に粘着層１４及び感圧導電性部材１５に挟持されるように配置される。 A part of the main body 131B and the terminal 133B are provided on the transmission surface 111B of the elastic substrate 11B via the adhesive layer 12B, and most of the terminal 133B and the tip 132B are pressure-sensitive with the elastic substrate 11B. It is arranged between the member 15 and the member 15. That is, most of the main body portion 131B is arranged so as to be sandwiched between the elastic substrate 11B and the adhesive layer 14 between the elastic substrate 11B and the adhesive layer 14. The tip portion 132B is arranged so as to be sandwiched between the adhesive layer 14 and the pressure-sensitive conductive member 15 between the adhesive layer 14 and the pressure-sensitive conductive member 15.

第１電極１３Ａ及び第２電極１３Ｂを形成する材料としては、金（Ａｕ）、銀（Ａｇ）、銅（Ｃｕ）、ニッケル（Ｎｉ）、鉄（Ｆｅ）、アルミニウム（Ａｌ）、錫（Ｓｎ）、鉛（Ｐｂ）、クロム（Ｃｒ）及びコバルト（Ｃｏ）等の各種金属；これらの合金；カーボンブラック、グラファイト（黒鉛）、カーボンナノチューブ、カーボンファイバー（炭素繊維）、及びフラーレン等の炭素系材料等が挙げられる。第１電極１３Ａ及び第２電極１３Ｂを形成する材料は、これらを、一種単独で用いてもよいし、二種以上を併用してもよい。これらの中でも、接続の安定性、製造コストの低減、及び作製のし易さ等の点から、第１電極１３Ａ及び第２電極１３Ｂを形成する材料としては、Ａｇ又はＣｕを用いることが好ましい。第１電極１３Ａ及び第２電極１３Ｂは、１つの金属層で形成されていてもよいし、複数の金属層を積層して構成されていてもよい。 The materials forming the first electrode 13A and the second electrode 13B include gold (Au), silver (Ag), copper (Cu), nickel (Ni), iron (Fe), aluminum (Al), and tin (Sn). , Various metals such as lead (Pb), chromium (Cr) and cobalt (Co); alloys thereof; carbon-based materials such as carbon black, graphite (graphite), carbon nanotubes, carbon fiber (carbon fiber), and fullerene. Can be mentioned. As the materials forming the first electrode 13A and the second electrode 13B, these may be used alone or in combination of two or more. Among these, Ag or Cu is preferably used as the material for forming the first electrode 13A and the second electrode 13B from the viewpoints of connection stability, reduction of manufacturing cost, ease of manufacturing, and the like. The first electrode 13A and the second electrode 13B may be formed of one metal layer, or may be formed by laminating a plurality of metal layers.

また、第１電極１３Ａ及び第２電極１３Ｂは、第１電極１３Ａ及び第２電極１３Ｂを形成する材料を導電性部材として用い、合成樹脂等のバインダーに分散させたコンポジット皮膜で構成してもよい。その際に、バインダーとして合成樹脂を用いる場合は、弾性基板１１Ａ及び１１Ｂと同様なエラストマーを用いるのが好適である。これにより、弾性基板１１Ａ及び１１Ｂの局所的な変形に追従し易い先端部１３２Ａ－１及び１３２Ａ－２、または先端部１３２Ｂを有する第１電極１３Ａ及び第２電極１３Ｂが得られる。 Further, the first electrode 13A and the second electrode 13B may be formed of a composite film in which the material forming the first electrode 13A and the second electrode 13B is used as a conductive member and dispersed in a binder such as a synthetic resin. .. At that time, when a synthetic resin is used as the binder, it is preferable to use the same elastomer as the elastic substrates 11A and 11B. As a result, the first electrode 13A and the second electrode 13B having the tip portions 132A-1 and 132A-2 or the tip portions 132B that easily follow the local deformation of the elastic substrates 11A and 11B can be obtained.

第１電極１３Ａ及び第２電極１３Ｂの厚さは、１μｍ～５０μｍであることが好ましく、５μｍ～３０μｍであることがより好ましく、１０μｍ～２０μｍであることがさらに好ましい。第１電極１３Ａ及び第２電極１３Ｂの厚さが１μｍ～５０μｍの範囲内であれば、導電性を十分確保できる。また、第１電極１３Ａ及び第２電極１３Ｂの厚さは、流す電流の大きさに対応して決められるが、５０μｍ以上にしてもよい。 The thickness of the first electrode 13A and the second electrode 13B is preferably 1 μm to 50 μm, more preferably 5 μm to 30 μm, and further preferably 10 μm to 20 μm. When the thickness of the first electrode 13A and the second electrode 13B is within the range of 1 μm to 50 μm, sufficient conductivity can be ensured. The thickness of the first electrode 13A and the second electrode 13B is determined according to the magnitude of the flowing current, but may be 50 μm or more.

粘着層１４は、弾性基板１１Ａの伝達面１１２Ａと弾性基板１１Ｂの伝達面１１１Ｂとの間に設けられる。粘着層１４は、感圧導電性部材１５が貫通可能な貫通孔１４ａを有する。 The adhesive layer 14 is provided between the transmission surface 112A of the elastic substrate 11A and the transmission surface 111B of the elastic substrate 11B. The adhesive layer 14 has a through hole 14a through which the pressure-sensitive conductive member 15 can penetrate.

粘着層１４としては、例えば、シリコーン系粘着剤、アクリル系粘着剤、及びウレタン系粘着剤等を用いることができる。粘着層１４は、上記の何れかの粘着材を用いて形成された両面粘着シートや上記の何れかの粘着材と不織布からなる両面粘着テープ等を用いることが好ましい。粘着層１４を両面粘着シートや両面粘着テープとすることで、弾性基板１１Ａの伝達面１１２Ａと弾性基板１１Ｂの伝達面１１１Ｂとの密着性を向上させることができる。 As the adhesive layer 14, for example, a silicone-based adhesive, an acrylic-based adhesive, a urethane-based adhesive, or the like can be used. For the pressure-sensitive adhesive layer 14, it is preferable to use a double-sided pressure-sensitive adhesive sheet formed by using any of the above-mentioned pressure-sensitive adhesive materials, a double-sided pressure-sensitive adhesive tape made of any of the above-mentioned pressure-sensitive adhesive materials and a non-woven fabric, or the like. By using the adhesive layer 14 as a double-sided adhesive sheet or double-sided adhesive tape, the adhesion between the transmission surface 112A of the elastic substrate 11A and the transmission surface 111B of the elastic substrate 11B can be improved.

感圧導電性部材１５は、第１電極１３Ａ及び第２電極１３Ｂの間に配置される。感圧導電性部材１５は、第１電極１３Ａ－１及び１３Ａ－２の先端部１３２Ａ－１及び１３２Ａ－２と第２電極１３Ｂの先端部１３２Ｂとの間に設けられ、その部分の抵抗値が低下する機能を有する。そして、この感圧導電性部材１５に接触している第１電極１３Ａ－１及び１３Ａ－２同士が通電するようになると共に、第１電極１３Ａと第２電極１３Ｂが通電するようになる。すなわち、押圧力の変化に応じて、感圧導電性部材１５の抵抗値が変化すると共に、感圧導電性部材１５と第１電極１３Ａ及び第２電極１３Ｂとの接触抵抗も変化するので、押圧力の変化を抵抗値変化として捉えることができる。 The pressure-sensitive conductive member 15 is arranged between the first electrode 13A and the second electrode 13B. The pressure-sensitive conductive member 15 is provided between the tip portions 132A-1 and 132A-2 of the first electrodes 13A-1 and 13A-2 and the tip portion 132B of the second electrode 13B, and the resistance value of the portion is increased. It has the function of lowering. Then, the first electrodes 13A-1 and 13A-2 in contact with the pressure-sensitive conductive member 15 are energized, and the first electrode 13A and the second electrode 13B are energized. That is, the resistance value of the pressure-sensitive conductive member 15 changes according to the change in the pressing force, and the contact resistance between the pressure-sensitive conductive member 15 and the first electrode 13A and the second electrode 13B also changes. The change in pressure can be regarded as the change in resistance value.

すなわち、感圧導電性部材１５は、弾性変形可能であり、押圧力の変化により弾性変形して、第１電極１３Ａ－１及び１３Ａ－２の間と、第１電極１３Ａ及び第２電極１３Ｂの間の電気抵抗値が変化する。これにより、感圧導電性部材１５は、第１電極１３Ａ－１及び１３Ａ－２同士を通電すると共に、第１電極１３Ａ及び第２電極１３Ｂ同士を通電する機能を有する。 That is, the pressure-sensitive conductive member 15 is elastically deformable, and is elastically deformed by the change of the pressing force, and is between the first electrodes 13A-1 and 13A-2 and between the first electrode 13A and the second electrode 13B. The electrical resistance value between them changes. As a result, the pressure-sensitive conductive member 15 has a function of energizing the first electrodes 13A-1 and 13A-2 and energizing the first electrodes 13A and the second electrodes 13B.

感圧導電性部材１５は、円錐台形（切頭円錐形）に形成され、大きい面が第１電極１３Ａと接し、小さい面が第２電極１３Ｂと接するように配置されている。これにより、押圧力が加えられる面積を広くできると共に、第２電極１３Ｂの先端部１３２Ｂへの単位面積当たりの荷重が強まる。 The pressure-sensitive conductive member 15 is formed in a truncated cone shape (truncated cone shape), and is arranged such that a large surface is in contact with the first electrode 13A and a small surface is in contact with the second electrode 13B. As a result, the area to which the pressing force is applied can be widened, and the load per unit area of the second electrode 13B on the tip portion 132B is increased.

感圧導電性部材１５は、平面視においてその上面が第１電極１３Ａ－１及び１３Ａ－２の先端部１３２Ａ－１及び１３２Ａ－２を覆う大きさとなるように形成される。感圧導電性部材１５の上面が先端部１３２Ａ及び１３２Ｂの全面を覆うように形成されることで、弾性基板１１Ａに加えられた押圧力を感圧導電性部材１５に確実に伝えられる。 The pressure-sensitive conductive member 15 is formed so that the upper surface thereof covers the tip portions 132A-1 and 132A-2 of the first electrodes 13A-1 and 13A-2 in a plan view. By forming the upper surface of the pressure-sensitive conductive member 15 so as to cover the entire surfaces of the tip portions 132A and 132B, the pressing force applied to the elastic substrate 11A is reliably transmitted to the pressure-sensitive conductive member 15.

感圧導電性部材１５は、粒子状の導電性材料１５１をエラストマー１５２に含有する導電性エラストマーを用いて形成できる。感圧導電性部材１５が、導電性材料１５１を含有する導電性エラストマーであれば、導電性材料１５１による導通に加え、押圧力に対して変形及び復元がし易い。感圧導電性部材１５は、導電性材料１５１をエラストマー１５２中にほぼ均一に分散させて含むことが好ましい。 The pressure-sensitive conductive member 15 can be formed by using a conductive elastomer containing a particulate conductive material 151 in the elastomer 152. If the pressure-sensitive conductive member 15 is a conductive elastomer containing the conductive material 151, it is easily deformed and restored by a pressing force in addition to the conduction by the conductive material 151. The pressure-sensitive conductive member 15 preferably contains the conductive material 151 dispersed substantially uniformly in the elastomer 152.

導電性材料１５１としては、金属粒子や炭素系材料等の導電性を有する材料を用いることができる。金属粒子や炭素系材料としては、上述の第１電極１３Ａ及び第２電極１３Ｂと同様の材料を用いることができる。 As the conductive material 151, a material having conductivity such as metal particles or a carbon-based material can be used. As the metal particles and the carbon-based material, the same materials as those of the above-mentioned first electrode 13A and second electrode 13B can be used.

導電性材料１５１の平均粒子径としては、０．０５μｍ～２００μｍが好ましく、０．５μｍ～６０μｍがより好ましく、１．０μｍ～３０μｍがさらに好ましい。導電性材料１５１の平均粒子径が０．０５μｍ～２００μｍの範囲内であれば、導電性材料１５１の凝集を抑えてエラストマー１５２内での分散性を高めることができる。また、感圧導電性部材１５が弾性変形した際に、導電性材料１５１の感圧導電性部材１５内での移動が相対的に小さくなることを抑えることで、弾性変形による抵抗の変化が緩慢になるのを低減できる。なお、平均粒子径とは、有効径による体積平均粒径をいい、平均粒子径は、例えば、レーザ回折・散乱法又は動的光散乱法等によって測定される。 The average particle size of the conductive material 151 is preferably 0.05 μm to 200 μm, more preferably 0.5 μm to 60 μm, and even more preferably 1.0 μm to 30 μm. When the average particle size of the conductive material 151 is in the range of 0.05 μm to 200 μm, the aggregation of the conductive material 151 can be suppressed and the dispersibility in the elastomer 152 can be enhanced. Further, when the pressure-sensitive conductive member 15 is elastically deformed, the movement of the conductive material 151 in the pressure-sensitive conductive member 15 is suppressed to be relatively small, so that the change in resistance due to the elastic deformation is slowed down. Can be reduced. The average particle size means a volume average particle size based on an effective diameter, and the average particle size is measured by, for example, a laser diffraction / scattering method or a dynamic light scattering method.

エラストマー１５２としては、弾性基板１１Ａ及び１１Ｂと同様のエラストマーを用いることができる。 As the elastomer 152, the same elastomers as the elastic substrates 11A and 11B can be used.

感圧導電性部材１５は、図４に示すように、押圧部材等による押圧力が作用していない状態では、互いに接触する導電性材料１５１の数は少なく、導電経路がほとんど形成されていない（図４中、白丸参照）ので、感圧導電性部材１５は、非常に大きな抵抗値を有する。そして、感圧導電性部材１５に押圧力が作用すると、感圧導電性部材１５の上面側には圧縮応力が生じる。この圧縮応力により、導電性材料１５１は互いに接近し、互いに接触する導電性材料１５１の数が多くなるので、感圧導電性部材１５の平面方向及び垂直方向等に導電経路（図４中、黒丸参照）が形成され、感圧導電性部材１５の抵抗値が小さくなる。このように、押圧力によって感圧導電性部材１５は変形し、導電性材料１５１同士が接触又は離間することで、感圧導電性部材１５の抵抗値が変化する。 As shown in FIG. 4, the pressure-sensitive conductive member 15 has a small number of conductive materials 151 in contact with each other in a state where the pressing force by the pressing member or the like is not applied, and almost no conductive path is formed (the pressure-sensitive conductive member 15). (See white circles in FIG. 4), so that the pressure-sensitive conductive member 15 has a very large resistance value. When a pressing force acts on the pressure-sensitive conductive member 15, compressive stress is generated on the upper surface side of the pressure-sensitive conductive member 15. Due to this compressive stress, the conductive materials 151 approach each other and the number of the conductive materials 151 in contact with each other increases. (See) is formed, and the resistance value of the pressure-sensitive conductive member 15 becomes smaller. In this way, the pressure-sensitive conductive member 15 is deformed by the pressing force, and the conductive materials 151 come into contact with each other or are separated from each other, so that the resistance value of the pressure-sensitive conductive member 15 changes.

感圧導電性部材１５は、ゴム硬度が３０～７０の範囲内であることが好ましく、５０～６０の範囲内であることがより好ましい。ゴム硬度が４０～７０の範囲内であれば、感圧導電性部材１５は十分な強度を有することができ、高い復元力を発揮できる。なお、ゴム硬度とは、日本工業規格ＪＩＳ Ｋ６３０１で規定された値である。 The pressure-sensitive conductive member 15 preferably has a rubber hardness in the range of 30 to 70, and more preferably in the range of 50 to 60. When the rubber hardness is in the range of 40 to 70, the pressure-sensitive conductive member 15 can have sufficient strength and can exhibit a high restoring force. The rubber hardness is a value defined by Japanese Industrial Standards JIS K6301.

感圧導電性部材１５の厚さは、０．１ｍｍ～１０ｍｍであることが好ましく、０．５ｍｍ～５ｍｍであることがより好ましく、０．７ｍｍ～３ｍｍであることがさらに好ましい。感圧導電性部材１５の厚さが０．１ｍｍ～１０ｍｍの範囲内であれば、感圧導電性部材１５は十分な強度を有すると共に、弾性を有することができる。また、感圧導電性部材１５が弾性変形した際、厚さ方向（Ｚ軸方向）に導通が取れ、第１電極１３Ａ及び第２電極１３Ｂ間に導通を形成できる。 The thickness of the pressure-sensitive conductive member 15 is preferably 0.1 mm to 10 mm, more preferably 0.5 mm to 5 mm, and even more preferably 0.7 mm to 3 mm. When the thickness of the pressure-sensitive conductive member 15 is within the range of 0.1 mm to 10 mm, the pressure-sensitive conductive member 15 can have sufficient strength and elasticity. Further, when the pressure-sensitive conductive member 15 is elastically deformed, conduction can be taken in the thickness direction (Z-axis direction), and conduction can be formed between the first electrode 13A and the second electrode 13B.

本実施形態に係る感圧部材１０Ａの製造方法について説明する。まず、平面視において所定の大きさに切り出した弾性基板１１Ａ及び１１Ｂを準備する。準備した弾性基板１１Ａの表面を水やアルコール、アセトン等の洗浄液で洗浄し、弾性基板１１Ａの表面に付着している汚れや異物等を除去する。その後、弾性基板１１Ａの伝達面１１２Ａに、トリアジン系化合物を含む分子接着剤を塗布して乾燥することで、接着層１２Ａを形成する。その後、接着層１２Ａの表面に、Ａｇ粒子やＣｕ粒子等の導電性を有する材料を含む塗布液（ペースト）を塗布して、第１電極１３Ａを形成する。第１電極１３Ａは接着層１２Ａにより固着される。 A method of manufacturing the pressure-sensitive member 10A according to the present embodiment will be described. First, elastic substrates 11A and 11B cut out to a predetermined size in a plan view are prepared. The surface of the prepared elastic substrate 11A is washed with a cleaning liquid such as water, alcohol, or acetone to remove dirt, foreign substances, and the like adhering to the surface of the elastic substrate 11A. After that, a molecular adhesive containing a triazine-based compound is applied to the transmission surface 112A of the elastic substrate 11A and dried to form the adhesive layer 12A. Then, a coating liquid (paste) containing a conductive material such as Ag particles and Cu particles is applied to the surface of the adhesive layer 12A to form the first electrode 13A. The first electrode 13A is fixed by the adhesive layer 12A.

一方、弾性基板１１Ａと同様に、準備した弾性基板１１Ｂの表面を洗浄液で洗浄し、弾性基板１１Ｂの表面に付着している汚れや異物等を除去する。その後、弾性基板１１Ｂの伝達面１１１Ｂに、トリアジン系化合物を含む分子接着剤を塗布して乾燥することで、接着層１２Ｂを形成する。その後、接着層１２Ｂの表面に、Ａｇ粒子やＣｕ粒子等の導電性を有する材料を含む塗布液（ペースト）を塗布して、第２電極１３Ｂを形成する。第２電極１３Ｂは接着層１２Ｂにより固着される。 On the other hand, similarly to the elastic substrate 11A, the surface of the prepared elastic substrate 11B is cleaned with a cleaning liquid to remove dirt, foreign matter and the like adhering to the surface of the elastic substrate 11B. After that, a molecular adhesive containing a triazine-based compound is applied to the transmission surface 111B of the elastic substrate 11B and dried to form the adhesive layer 12B. Then, a coating liquid (paste) containing a conductive material such as Ag particles and Cu particles is applied to the surface of the adhesive layer 12B to form the second electrode 13B. The second electrode 13B is fixed by the adhesive layer 12B.

第１電極１３Ａ及び第２電極１３Ｂの形成方法としては、導電性を有する材料を含む塗布液を塗布する塗布法の他に、無電解めっき法、電気めっき法、スパッタ、又は蒸着を用いる方法等により、金属めっき皮膜を形成する方法等を用いてもよい。 As a method for forming the first electrode 13A and the second electrode 13B, in addition to a coating method in which a coating liquid containing a conductive material is applied, a electroless plating method, an electroplating method, a spatter, or a method using vapor deposition or the like is used. Therefore, a method of forming a metal plating film or the like may be used.

次に、平面視において、弾性基板１１Ａの伝達面１１２Ａに、第１電極１３Ａの一部を被覆するように粘着層１４を設ける。その後、粘着層１４の貫通孔１４ａに感圧導電性部材１５を収容して、感圧導電性部材１５を第１電極１３Ａ－１の先端部１３２Ａ－１に接触させる。その後、粘着層１４の表面（－Ｚ軸方向の面）に弾性基板１１Ｂを貼り付けて、弾性基板１１Ａと弾性基板１１Ｂとで粘着層１４及び感圧導電性部材１５を挟み込み、感圧導電性部材１５を第１電極１３Ａ－２の先端部１３２Ａ－２に接触させる。 Next, in a plan view, the adhesive layer 14 is provided on the transmission surface 112A of the elastic substrate 11A so as to cover a part of the first electrode 13A. After that, the pressure-sensitive conductive member 15 is housed in the through hole 14a of the adhesive layer 14, and the pressure-sensitive conductive member 15 is brought into contact with the tip portion 132A-1 of the first electrode 13A-1. After that, the elastic substrate 11B is attached to the surface of the adhesive layer 14 (the surface in the −Z axis direction), and the adhesive layer 14 and the pressure-sensitive conductive member 15 are sandwiched between the elastic substrate 11A and the elastic substrate 11B to obtain pressure-sensitive conductivity. The member 15 is brought into contact with the tip portion 132A-2 of the first electrode 13A-2.

これにより、本実施形態に係る感圧部材１０Ａが得られる。 As a result, the pressure-sensitive member 10A according to the present embodiment can be obtained.

感圧部材１０Ａは、上述の通り、２つの弾性基板１１Ａ及び１１Ｂと、弾性基板１１Ａ及び１１Ｂの間に配置され、第１電極１３Ａ及び第２電極１３Ｂと接触する感圧導電性部材１５とを有する。第１電極１３Ａ及び第２電極１３Ｂと感圧導電性部材１５は、弾性基板１１Ａの伝達面１１２Ａから下方向に、第１電極１３Ａ、感圧導電性部材１５、及び第２電極１３Ｂの順に積層されている。感圧導電性部材１５は、導電性材料１５１をエラストマー１５２に分散した状態で含む導電性エラストマーで構成されている。図５に示すように、感圧部材１０Ａに押圧力が作用していない状態では、第１電極１３Ａ及び第２電極１３Ｂと導電性材料１５１は殆ど電気的に接触しておらず、第１電極１３Ａ－１及び１３Ａ－２同士と、第１電極１３Ａ及び第２電極１３Ｂ同士は導通していない。そのため、感圧部材１０Ａは、高い電気抵抗値が示される。 As described above, the pressure-sensitive member 10A has the two elastic substrates 11A and 11B and the pressure-sensitive conductive member 15 arranged between the elastic substrates 11A and 11B and in contact with the first electrode 13A and the second electrode 13B. Have. The first electrode 13A, the second electrode 13B, and the pressure-sensitive conductive member 15 are laminated downward from the transmission surface 112A of the elastic substrate 11A in the order of the first electrode 13A, the pressure-sensitive conductive member 15, and the second electrode 13B. Has been done. The pressure-sensitive conductive member 15 is made of a conductive elastomer containing the conductive material 151 in a dispersed state in the elastomer 152. As shown in FIG. 5, in a state where no pressing force is applied to the pressure sensitive member 10A, the first electrode 13A and the second electrode 13B and the conductive material 151 are hardly in electrical contact with each other, and the first electrode is not in contact with each other. 13A-1 and 13A-2 and the first electrode 13A and the second electrode 13B are not conducting with each other. Therefore, the pressure-sensitive member 10A exhibits a high electric resistance value.

感圧部材１０Ａに押圧部材等により押圧力が作用すると、感圧導電性部材１５が押圧されることにより、感圧導電性部材１５中に含まれる導電性材料１５１同士が近接し始め、導電性材料１５１が密な状態となる。第１電極１３Ａ及び第２電極１３Ｂと導電性材料１５１が接触し、導通経路が形成されることで、第１電極１３Ａ－１及び１３Ａ－２同士と、第１電極１３Ａ及び第２電極１３Ｂ同士の間で感圧導電性部材１５を介して電流が流れ、感圧導電性部材１５の抵抗値は低くなる。感圧部材に作用する押圧力の大きさによって、形成される導通経路が三次元的に大きくなったり小さくなったりするため、押圧力の大きさを抵抗値により検出することができる。 When a pressing force acts on the pressure-sensitive member 10A by a pressing member or the like, the pressure-sensitive conductive member 15 is pressed, so that the conductive materials 151 contained in the pressure-sensitive conductive member 15 start to come close to each other and become conductive. The material 151 becomes dense. The first electrode 13A and the second electrode 13B come into contact with the conductive material 151 to form a conduction path, so that the first electrodes 13A-1 and 13A-2 and the first electrode 13A and the second electrode 13B are connected to each other. A current flows between the pressure-sensitive conductive members 15 and the resistance value of the pressure-sensitive conductive member 15 becomes low. Depending on the magnitude of the pressing force acting on the pressure-sensitive member, the formed conduction path becomes three-dimensionally larger or smaller, so that the magnitude of the pressing force can be detected by the resistance value.

２つの弾性基板１１Ａ及び１１Ｂのうち、押圧力が作用する弾性基板１１Ａの作用面１１１Ａに押圧力が作用すると、感圧導電性部材１５が押圧され、感圧導電性部材１５の第１電極１３Ａ－１及び１３Ａ－２との設置面側の近傍領域が潰れるように変形する。感圧導電性部材１５は押圧されることにより、感圧導電性部材１５内に高さ方向に導通経路が形成されることで、弾性基板１１Ａに設けた第１電極１３Ａと弾性基板１１Ｂに設けた第２電極１３Ｂとの間に第１電極１３Ａの設置面に垂直な電流（第１電流）を生じさせることができる。これにより、弾性基板１１Ａ及び１１Ｂ同士の間の第１電極１３Ａ及び第２電極１３Ｂを電気的に接続でき、第１電極１３Ａと第２電極１３Ｂの間の抵抗（第１抵抗）が低下する。また、感圧導電性部材１５が押圧されることにより、感圧導電性部材１５の第１電極１３Ａの設置面側に圧縮応力が生じる。この圧縮応力の作用により、感圧導電性部材１５中に含まれる導電性材料１５１同士が近接して接触する。これにより、感圧導電性部材１５内、特に感圧導電性部材１５の第１電極１３Ａの設置面側の近傍領域には導通経路が多数形成され、通電させることができる。これにより、弾性基板１１Ａの一対の第１電極１３Ａ－１及び１３Ａ－２同士の間には第１電極１３Ａの設置面に平行な電流（第２電流）を生じさせることができる。この結果、弾性基板１１Ａの一対の第１電極１３Ａ－１及び１３Ａ－２を電気的に接続でき、一対の第１電極１３Ａ－１及び１３Ａ－２同士の間の抵抗（第２抵抗）が低下する。 Of the two elastic substrates 11A and 11B, when the pressing force acts on the working surface 111A of the elastic substrate 11A on which the pressing force acts, the pressure-sensitive conductive member 15 is pressed and the first electrode 13A of the pressure-sensitive conductive member 15 is pressed. The area near the installation surface side of -1 and 13A-2 is deformed so as to be crushed. When the pressure-sensitive conductive member 15 is pressed, a conduction path is formed in the pressure-sensitive conductive member 15 in the height direction, so that the first electrode 13A and the elastic substrate 11B provided on the elastic substrate 11A are provided. A current (first current) perpendicular to the installation surface of the first electrode 13A can be generated between the second electrode 13B and the second electrode 13B. As a result, the first electrode 13A and the second electrode 13B between the elastic substrates 11A and 11B can be electrically connected, and the resistance (first resistance) between the first electrode 13A and the second electrode 13B is reduced. Further, when the pressure-sensitive conductive member 15 is pressed, a compressive stress is generated on the installation surface side of the first electrode 13A of the pressure-sensitive conductive member 15. Due to the action of this compressive stress, the conductive materials 151 contained in the pressure-sensitive conductive member 15 come into close contact with each other. As a result, a large number of conduction paths are formed in the pressure-sensitive conductive member 15, particularly in the vicinity of the region near the installation surface side of the first electrode 13A of the pressure-sensitive conductive member 15, and energization can be performed. As a result, a current (second current) parallel to the installation surface of the first electrode 13A can be generated between the pair of first electrodes 13A-1 and 13A-2 of the elastic substrate 11A. As a result, the pair of first electrodes 13A-1 and 13A-2 of the elastic substrate 11A can be electrically connected, and the resistance (second resistance) between the pair of first electrodes 13A-1 and 13A-2 decreases. do.

第１電極１３Ａと第２電極１３Ｂの間の第１抵抗の変化は、一対の第１電極１３Ａ－１及び１３Ａ－２同士の間の第２抵抗の変化に比べて、押圧力が低い状態で安定して測定できる傾向がある。一方、第２抵抗の変化は、第１抵抗の変化に比べて、押圧力が高い状態で安定して測定できる傾向がある。なお、押圧力が低いとは、弾性基板１１Ａの作用面１１１Ａに加わる押圧力が、例えば１ｋＰａ以下の範囲をいい、押圧力が高いとは、弾性基板１１Ａの作用面１１１Ａに加わる押圧力が、例えば１ｋＰａを超える範囲をいう。 The change in the first resistance between the first electrode 13A and the second electrode 13B is in a state where the pressing force is lower than the change in the second resistance between the pair of first electrodes 13A-1 and 13A-2. There is a tendency for stable measurement. On the other hand, the change in the second resistance tends to be measured more stably in a state where the pressing force is higher than the change in the first resistance. A low pressing force means that the pressing force applied to the working surface 111A of the elastic substrate 11A is, for example, in the range of 1 kPa or less, and a high pressing force means that the pressing force applied to the working surface 111A of the elastic substrate 11A. For example, it means a range exceeding 1 kPa.

これは、感圧導電性部材１５が押圧された際、感圧導電性部材１５が押圧方向に窪むように変形するため、感圧導電性部材１５の高さ方向の最大変化割合の方が横方向の最大変化割合よりも大きくなる。そのため、感圧導電性部材１５の押圧力が小さい時は、感圧導電性部材１５の高さ方向に導通経路が形成され易く、抵抗値の変化割合が大きいため、抵抗値を見る指標としては、第１抵抗の方が第２抵抗よりも好ましい。そして、感圧導電性部材１５に加わる押圧力が大きくなると、感圧導電性部材１５の高さ方向の変化量にはある程度限界があるため、感圧導電性部材１５の高さ方向に形成される導通経路はそれほど増大せず、抵抗値の変化が生じ難くなる。一方、感圧導電性部材１５に加わる押圧力が大きいほど、平面視におおける感圧導電性部材１５の押圧面の湾曲する範囲や凹み具合が大きくなり、感圧導電性部材１５の上面側に生じる圧縮応力によって、導電性材料１５１同士が接触して導通経路が多く形成され易くなる傾向がある。そのため、抵抗値を見る指標としては、第２抵抗の方が第１抵抗よりも好ましい。 This is because when the pressure-sensitive conductive member 15 is pressed, the pressure-sensitive conductive member 15 is deformed so as to be depressed in the pressing direction, so that the maximum change rate in the height direction of the pressure-sensitive conductive member 15 is the lateral direction. It is larger than the maximum rate of change of. Therefore, when the pressing force of the pressure-sensitive conductive member 15 is small, a conduction path is likely to be formed in the height direction of the pressure-sensitive conductive member 15, and the rate of change in the resistance value is large. , The first resistance is preferable to the second resistance. When the pressing force applied to the pressure-sensitive conductive member 15 becomes large, the amount of change in the pressure-sensitive conductive member 15 in the height direction is limited to some extent, so that the pressure-sensitive conductive member 15 is formed in the height direction. The conduction path does not increase so much, and the resistance value is less likely to change. On the other hand, the larger the pressing force applied to the pressure-sensitive conductive member 15, the larger the curved range and the degree of denting of the pressing surface of the pressure-sensitive conductive member 15 in a plan view, and the larger the upper surface side of the pressure-sensitive conductive member 15. Due to the compressive stress generated in the above, the conductive materials 151 tend to come into contact with each other to easily form many conduction paths. Therefore, the second resistance is preferable to the first resistance as an index for observing the resistance value.

よって、感圧部材１０Ａは、押圧力が加わった際、押圧力が低い時は、２つの弾性基板１１Ａ及び１１Ｂ同士の間の第１抵抗を用い、押圧力が高い時は、弾性基板１１Ａの一対の第１電極１３Ａ－１及び１３Ａ－２同士の間の第２抵抗を用いることにより、簡易な構成で、抵抗値を広い押圧力の範囲に亘って安定して検出することができる。 Therefore, when the pressing force is applied, the pressure sensitive member 10A uses the first resistance between the two elastic substrates 11A and 11B when the pressing force is low, and when the pressing force is high, the elastic substrate 11A By using the second resistance between the pair of first electrodes 13A-1 and 13A-2, the resistance value can be stably detected over a wide pressing force range with a simple configuration.

感圧部材１０Ａは、弾性基板１１Ａ及び１１Ｂのうち、押圧力が作用する作用面１１１Ａが設けられた弾性基板１１Ａの伝達面１１２Ａに第１電極１３Ａを備えることができる。これにより、弾性基板１１Ａに設けられる第１電極１３Ａは、感圧導電性部材１５の押圧される面側に設けることができる。図５に示すように、弾性基板１１Ａの作用面１１１Ａに押圧力が作用すると、作用面１１１Ａに加わった押圧力が減衰する前に伝達面１１２Ａから感圧導電性部材１５に作用させることができる。また、感圧導電性部材１５に作用した押圧力によって、感圧導電性部材１５の第１電極１３Ａの設置面側の近傍領域が潰れるように変形する。感圧導電性部材１５の第１電極１３Ａの設置面側に圧縮応力が働き、感圧導電性部材１５内、特に感圧導電性部材１５の第１電極１３Ａの設置面側の近傍領域を通電させることができる。これにより、一対の第１電極１３Ａ－１及び１３Ａ－２間に第２電流を生じさせ易くすることができ、第２抵抗の変化率を高めることができる。 The pressure-sensitive member 10A can be provided with the first electrode 13A on the transmission surface 112A of the elastic substrate 11A provided with the working surface 111A on which the pressing force acts among the elastic substrates 11A and 11B. As a result, the first electrode 13A provided on the elastic substrate 11A can be provided on the pressed surface side of the pressure-sensitive conductive member 15. As shown in FIG. 5, when a pressing force acts on the working surface 111A of the elastic substrate 11A, the pressing force applied to the working surface 111A can be applied to the pressure sensitive conductive member 15 from the transmission surface 112A before the pressing force is attenuated. .. Further, the pressing force acting on the pressure-sensitive conductive member 15 deforms the pressure-sensitive conductive member 15 so that the vicinity region on the installation surface side of the first electrode 13A is crushed. Compressive stress acts on the installation surface side of the first electrode 13A of the pressure-sensitive conductive member 15, and energizes the inside of the pressure-sensitive conductive member 15, particularly the region near the installation surface side of the first electrode 13A of the pressure-sensitive conductive member 15. Can be made to. As a result, it is possible to easily generate a second current between the pair of first electrodes 13A-1 and 13A-2, and it is possible to increase the rate of change of the second resistance.

一方、例えば、図６に示すように、感圧部材が、弾性基板１１Ａの伝達面１１２Ａ側から下方向に順に、粘着層１４と、第１電極１３Ａと、弾性基板１１Ｂとを積層し、粘着層１４内に設けた感圧導電性部材１５の下側に第１電極１３Ａが配置されているとする。この場合、押圧力が感圧導電性部材１５で減衰して第１電極１３Ａに伝わり、電流が流れることになる。そのため、弾性基板１１Ａの作用面１１１Ａに加わった押圧力に対する感度が高くなり難い傾向にある。また、第１電極１３Ａの感圧導電性部材１５との接触面には、感圧導電性部材１５内の導電性材料１５１同士の間隔が狭くなり難く、導通が取れ難くなる可能性がある。 On the other hand, for example, as shown in FIG. 6, the pressure-sensitive member laminates the adhesive layer 14, the first electrode 13A, and the elastic substrate 11B in this order from the transmission surface 112A side of the elastic substrate 11A in order of adhesion. It is assumed that the first electrode 13A is arranged under the pressure-sensitive conductive member 15 provided in the layer 14. In this case, the pressing force is attenuated by the pressure-sensitive conductive member 15 and transmitted to the first electrode 13A, and a current flows. Therefore, the sensitivity to the pressing force applied to the working surface 111A of the elastic substrate 11A tends to be difficult to increase. Further, on the contact surface of the first electrode 13A with the pressure-sensitive conductive member 15, the distance between the conductive materials 151 in the pressure-sensitive conductive member 15 is difficult to be narrowed, and it may be difficult to obtain conduction.

よって、感圧部材１０Ａは、上述の通り、弾性基板１１Ａの作用面１１１Ａに加わった押圧力を感圧導電性部材１５の第１電極１３Ａの設置面側に押圧力の大きさを極力維持した状態で伝えることができるので、第２電流の検出感度を高めると共に、押圧力の大きさのばらつきを抑えることができる。特に、第２電流は、比較的、押圧力が高い状態で電流の変化を安定して測定できるので、押圧力が高い状態において高い感度で第２抵抗をより安定して検出できる。 Therefore, as described above, the pressure-sensitive member 10A maintains the pressing force applied to the working surface 111A of the elastic substrate 11A as much as possible on the installation surface side of the first electrode 13A of the pressure-sensitive conductive member 15. Since it can be transmitted in a state, it is possible to increase the detection sensitivity of the second current and suppress the variation in the magnitude of the pressing force. In particular, since the second current can stably measure the change in the current in a state where the pressing force is relatively high, the second resistance can be detected more stably with high sensitivity in the state where the pressing force is high.

感圧部材１０Ａは、弾性基板１１Ａと第１電極１３Ａとの間、及び弾性基板１１Ｂと第２電極１３Ｂとの間に、トリアジン系化合物を含む接着層１２Ａ及び１２Ｂを含むことができる。これにより、感圧部材１０Ａは、弾性基板１１Ａと第１電極１３Ａとの間、及び弾性基板１１Ｂと第２電極１３Ｂとの間の接着力を高めることができる。そのため、感圧部材１０Ａは、弾性基板１１Ａに繰り返しの変形動作が加わったとしても、弾性基板１１Ａと第１電極１３Ａとの間、及び弾性基板１１Ｂと第２電極１３Ｂとの間に剥離が生じるのを抑制することができる。 The pressure-sensitive member 10A can include adhesive layers 12A and 12B containing a triazine-based compound between the elastic substrate 11A and the first electrode 13A and between the elastic substrate 11B and the second electrode 13B. As a result, the pressure-sensitive member 10A can increase the adhesive force between the elastic substrate 11A and the first electrode 13A and between the elastic substrate 11B and the second electrode 13B. Therefore, even if the elastic substrate 11A is repeatedly deformed, the pressure-sensitive member 10A is peeled off between the elastic substrate 11A and the first electrode 13A and between the elastic substrate 11B and the second electrode 13B. Can be suppressed.

感圧部材１０Ａは、２つの弾性基板１１Ａ及び１１Ｂ同士の間に粘着層１４を有することが好ましい。これにより、２つの弾性基板１１Ａ及び１１Ｂ同士を安定して接続できるので、感圧部材１０Ａは、取り扱い易さを向上させることができる。 The pressure-sensitive member 10A preferably has an adhesive layer 14 between the two elastic substrates 11A and 11B. As a result, the two elastic substrates 11A and 11B can be stably connected to each other, so that the pressure-sensitive member 10A can improve the ease of handling.

感圧部材１０Ａは、感圧導電性部材１５として、導電性材料１５１をエラストマー１５２に含有する導電性エラストマーを用いることができる。感圧導電性部材１５が、導電性エラストマーであれば、導電性材料１５１による導通に加え、押圧力に対して変形及び復元がし易いので、弾性基板１１Ａ及び１１Ｂ同士の間を感圧導電性部材１５を介して導通させることができると共に、押圧力に対する応答性を向上させることができる。また、第１電極１３Ａ及び第２電極１３Ｂ同士の間を通電させ易くすることができる。 As the pressure-sensitive member 10A, as the pressure-sensitive conductive member 15, a conductive elastomer containing the conductive material 151 in the elastomer 152 can be used. If the pressure-sensitive conductive member 15 is a conductive elastomer, it is easily deformed and restored by a pressing force in addition to being conducted by the conductive material 151, so that pressure-sensitive conductivity is provided between the elastic substrates 11A and 11B. It can be conducted through the member 15 and the responsiveness to the pressing force can be improved. Further, it is possible to easily energize between the first electrode 13A and the second electrode 13B.

感圧部材１０Ａは、第１電極１３Ａ－１及び１３Ａ－２を、平面視において、感圧導電性部材１５の位置にある先端部１３２Ａ－１及び１３２Ａ－２の形状を櫛歯状に形成できる。第１電極１３Ａ－１及び１３Ａ－２は、先端部１３２Ａ－１及び１３２Ａ－２の形状を櫛歯状に形成し、複数の櫛歯をＸ軸方向に沿って交互に配列させることで、先端部１３２Ａ－１及び１３２Ａ－２の間隔を略均等に狭い状態を維持できる。そのため、弾性基板１１Ａの作用面１１１Ａに押圧力が作用して感圧導電性部材１５が変形した際、感圧導電性部材１５の導通が取れた部分で第１電極１３Ａ－１及び１３Ａ－２同士が通電し易くなる。よって、押圧力が弾性基板１１Ａの作用面１１１Ａに加わった際に、第１電極１３Ａ－１及び１３Ａ－２同士間に導通が取り易くなる。 The pressure-sensitive member 10A can form the first electrodes 13A-1 and 13A-2 in a comb-teeth shape at the tips 132A-1 and 132A-2 located at the position of the pressure-sensitive conductive member 15 in a plan view. .. The first electrodes 13A-1 and 13A-2 have the tips 132A-1 and 132A-2 formed in a comb-like shape, and a plurality of comb teeth are alternately arranged along the X-axis direction to form the tips. It is possible to maintain a state in which the intervals between the portions 132A-1 and 132A-2 are substantially evenly narrow. Therefore, when the pressure-sensitive conductive member 15 is deformed by the pressing force acting on the working surface 111A of the elastic substrate 11A, the first electrodes 13A-1 and 13A-2 are formed at the portion where the pressure-sensitive conductive member 15 is conductive. It becomes easier for each other to energize. Therefore, when the pressing force is applied to the working surface 111A of the elastic substrate 11A, it becomes easy to establish conduction between the first electrodes 13A-1 and 13A-2.

一実施形態に係る感圧部材１０Ａは、上記にように、外部から押圧力が弾性基板１１Ａの作用面１１１Ａに加わった際、抵抗値を広い押圧力の範囲に亘って安定して検出でき、簡単な構成で、触れた時の感触も良好とすることができる。そのため、感圧部材１０Ａは、圧力検出装置（感圧センサ）として、ロボットの触覚センサ、又は電子機器のタッチパネル等に好適に用いることができる。電子機器としては、例えば、情報携帯端末、携帯電話、パーソナルコンピューター、デジタルカメラ、ビデオカメラ、カーナビゲーション、電子手帳、電卓、テレビ電話等のタッチパネルを備えた機器等が挙げられる。 As described above, the pressure-sensitive member 10A according to the embodiment can stably detect the resistance value over a wide range of pressing force when the pressing force is applied to the working surface 111A of the elastic substrate 11A from the outside. With a simple configuration, the feel when touched can be good. Therefore, the pressure-sensitive member 10A can be suitably used as a pressure detection device (pressure-sensitive sensor) for a tactile sensor of a robot, a touch panel of an electronic device, or the like. Examples of electronic devices include devices equipped with touch panels such as information mobile terminals, mobile phones, personal computers, digital cameras, video cameras, car navigation systems, electronic notebooks, calculators, and videophones.

＜圧力検出装置＞
一実施形態に係る感圧部材１０Ａを適用した圧力検出装置について説明する。図７は、感圧部材１０Ａを適用した圧力検出装置の斜視図であり、図８は、図７のII－II断面図である。図７及び図８に示すように、圧力検出装置３０は、感圧部材１０Ａと、接続部３１と、検出部３２とを備える。 <Pressure detector>
A pressure detecting device to which the pressure sensitive member 10A according to the embodiment is applied will be described. FIG. 7 is a perspective view of a pressure detecting device to which the pressure sensitive member 10A is applied, and FIG. 8 is a cross-sectional view taken along the line II-II of FIG. As shown in FIGS. 7 and 8, the pressure detecting device 30 includes a pressure sensitive member 10A, a connecting portion 31, and a detecting portion 32.

接続部３１は、感圧部材１０Ａの、弾性基板１１Ａ及び１１Ｂと、接着層１２Ａ及び１２Ｂと、第１電極１３Ａ及び第２電極１３Ｂの一端部（－Ｙ軸方向）とを挟持し、第１電極１３Ａ及び第２電極１３Ｂと電気的に接続可能に連結されている。接続部３１は、上下方向（Ｚ軸方向）に２つの挿入口３１１Ａ及び３１１Ｂを有する。一方の挿入口（＋Ｚ軸方向側の挿入口）３１１Ａには、弾性基板１１Ａと接着層１２Ａと第１電極１３Ａの一端部（－Ｙ軸方向）が挿入され、他方の挿入口（－Ｚ軸方向側の挿入口）３１１Ｂには、接着層１２Ｂと第２電極１３Ｂと弾性基板１１Ｂの一端部（－Ｙ軸方向）が挿入される。 The connecting portion 31 sandwiches the elastic substrates 11A and 11B of the pressure-sensitive member 10A, the adhesive layers 12A and 12B, and one end portions (-Y-axis direction) of the first electrode 13A and the second electrode 13B, and is the first. It is electrically connectably connected to the electrode 13A and the second electrode 13B. The connecting portion 31 has two insertion ports 311A and 311B in the vertical direction (Z-axis direction). An elastic substrate 11A, an adhesive layer 12A, and one end (-Y-axis direction) of the elastic substrate 11A, the adhesive layer 12A, and the first electrode 13A are inserted into one insertion port (insertion port on the + Z-axis direction) 311A, and the other insertion port (-Z-axis direction) is inserted. One end (-Y-axis direction) of the adhesive layer 12B, the second electrode 13B, and the elastic substrate 11B is inserted into the insertion port) 311B on the direction side.

一方の挿入口３１１Ａで第１電極１３Ａ－１及び１３Ａ－２同士を連結すると共に、他方の挿入口３１１Ｂで第１電極１３Ａと第２電極１３Ｂとを連結し、第１電極１３Ａ－１及び１３Ａ－２同士を流れる電流と、第１電極１３Ａ及び第２電極１３Ｂを流れる電流とを電気信号に変換する。 One insertion port 311A connects the first electrodes 13A-1 and 13A-2, and the other insertion port 311B connects the first electrode 13A and the second electrode 13B, so that the first electrodes 13A-1 and 13A are connected. -The current flowing between -2 and the current flowing through the first electrode 13A and the second electrode 13B is converted into an electric signal.

検出部３２は、接続部３１と配線３４を介して接続されている。検出部３２は、接続部３１から送られてきた電気信号を検知することで、感圧部材１０Ａで電流の発生の有無を検出する。 The detection unit 32 is connected to the connection unit 31 via the wiring 34. The detection unit 32 detects the presence or absence of current generation in the pressure sensitive member 10A by detecting the electric signal sent from the connection unit 31.

検出部３２は、２つの端子口を有し、一方の端子口に弾性基板１１Ａ、接着層１２Ａ、及び第１電極１３Ａが挿入され、他方の端子口に弾性基板１１Ｂ、接着層１２Ｂ、及び第２電極１３Ｂが挿入される。 The detection unit 32 has two terminal openings, one of which has an elastic substrate 11A, an adhesive layer 12A, and a first electrode 13A inserted, and the other terminal opening has an elastic substrate 11B, an adhesive layer 12B, and a first electrode. Two electrodes 13B are inserted.

感圧部材１０Ａの弾性基板１１Ａが押圧されて、第１電極１３Ａ－１及び１３Ａ－２同士の間と、第１電極１３Ａ及び第２電極１３Ｂの間に電流が流れると、電流は、接続部３１に送られ、電気信号に変換される。変換された電気信号は配線３４を通って、検出部３２に送られ、感圧部材１０Ａで電流を検知して抵抗値を算出する。 When the elastic substrate 11A of the pressure-sensitive member 10A is pressed and a current flows between the first electrodes 13A-1 and 13A-2 and between the first electrode 13A and the second electrode 13B, the current is transferred to the connection portion. It is sent to 31 and converted into an electric signal. The converted electric signal is sent to the detection unit 32 through the wiring 34, and the pressure-sensitive member 10A detects the current to calculate the resistance value.

圧力検出装置３０は、感圧部材１０Ａを備えているので、感圧部材１０Ａが外部から押圧された際、抵抗値を広い押圧力の範囲に亘って安定して検出できる Since the pressure detecting device 30 includes the pressure sensitive member 10A, when the pressure sensitive member 10A is pressed from the outside, the resistance value can be stably detected over a wide range of pressing force.

（変形例）
本実施形態では、押圧力を受ける作用面を有しない弾性基板１１Ｂは、弾性変形しなくてもよいので、第１基板である剛性基材としてもよい。図９に、感圧部材１０Ａの他の構成の一例を示す。図９に示すように、感圧部材１０Ａは、弾性基板１１Ｂに代えて第１基板である剛性基材１６を備えることができる。すなわち、感圧部材１０Ａは、弾性基板１１Ａと、弾性基板１１Ａと対向して配設された剛性基材１６とを有し、弾性基板１１Ａと剛性基材１６との間に感圧導電性部材１５が配設され、第１電極１３Ａが弾性基板１１Ａの伝達面１１２Ａに設けられ、第２電極１３Ｂが剛性基材１６の上面（＋Ｚ軸方向）に設けられる。 (Modification example)
In the present embodiment, the elastic substrate 11B, which does not have an action surface that receives a pressing force, does not have to be elastically deformed, and therefore may be a rigid substrate that is the first substrate. FIG. 9 shows an example of another configuration of the pressure sensitive member 10A. As shown in FIG. 9, the pressure-sensitive member 10A can include a rigid substrate 16 which is a first substrate instead of the elastic substrate 11B. That is, the pressure-sensitive member 10A has an elastic substrate 11A and a rigid base material 16 disposed so as to face the elastic substrate 11A, and the pressure-sensitive conductive member is located between the elastic substrate 11A and the rigid base material 16. 15 is arranged, the first electrode 13A is provided on the transmission surface 112A of the elastic substrate 11A, and the second electrode 13B is provided on the upper surface (+ Z axis direction) of the rigid base material 16.

感圧部材１０Ａは、粘着層１４及び感圧導電性部材１５を弾性基板１１Ａと剛性基材１６との間に挟み込んだ状態で配置できるので、押圧力を剛性基材１６で受け止めて感圧導電性部材１５に確実に伝えることができる。そのため、感圧部材１０Ａは、感圧導電性部材１５に押圧力を安定して伝えることができる。また、感圧部材１０Ａは、剛性基材１６を備えることで、強度が向上し、形状が保持し易くなるため、感圧部材１０Ａの取り扱い易さを向上させることができる。 Since the pressure-sensitive member 10A can be arranged with the adhesive layer 14 and the pressure-sensitive conductive member 15 sandwiched between the elastic substrate 11A and the rigid base material 16, the pressure-sensitive member 10A receives the pressing force by the rigid base material 16 and is pressure-sensitive. It can be reliably transmitted to the sex member 15. Therefore, the pressure-sensitive member 10A can stably transmit the pressing force to the pressure-sensitive conductive member 15. Further, since the pressure-sensitive member 10A is provided with the rigid base material 16, the strength is improved and the shape is easily maintained, so that the ease of handling of the pressure-sensitive member 10A can be improved.

剛性基材１６は、粘着層１４を弾性基板１１Ａと狭持するように設けられ、押圧力を確実に受け止めて感圧導電性部材１５の変形が確実に行われるための機能を有している。剛性基材１６は、例えば、板状のものである。なお、図９に示す形態では、感圧部材１０Ａは、剛性基材１６を備えるが、例えば、何かの筐体に貼り付けて使用する場合は、感圧部材１０Ａは、剛性基材１６を備えていなくてもよい。 The rigid base material 16 is provided so as to sandwich the adhesive layer 14 with the elastic substrate 11A, and has a function of reliably receiving the pressing force and reliably deforming the pressure-sensitive conductive member 15. .. The rigid base material 16 is, for example, a plate-shaped one. In the form shown in FIG. 9, the pressure-sensitive member 10A includes the rigid base material 16, but for example, when the pressure-sensitive member 10A is used by being attached to some housing, the pressure-sensitive member 10A has the rigid base material 16. It does not have to be prepared.

剛性基材１６を形成する材料としては、ポリアミド（ＰＡ）、ポリイミド（ＰＩ）、ポリブチレンテレフタレート（ＰＥＴ）、ポリエチレンナフタレート（ＰＥＮ）、ポリエーテルイミド（ＰＥＩ）、ポリエーテルサルフォン（ＰＥＳ）、ポリスチレン（ＰＳ）、ポリメチルメタクリレート（ＰＭＭＡ）、ポリエチレンニトリル、ポリエーテルエーテルケトン（ＰＥＥｋ）、ポリフェニレンサルファイド（ＰＰＳ）、フェノール、エポキシ（ガラスフィラー入り）及びポリカーボネート（ＰＣ）等の合成樹脂を用いることができる。これらは、一種単独で用いてもよいし、二種以上を併用してもよい。これらの中でも、耐熱性等の観点から、ポリイミド、又はポリエチレンテレフタレート等を用いることが好ましい。 Examples of the material forming the rigid base material 16 include polyamide (PA), polyimide (PI), polycarbonate terephthalate (PET), polyethylene naphthalate (PEN), polyetherimide (PEI), and polyether sulfone (PES). Synthetic resins such as polystyrene (PS), polymethylmethacrylate (PMMA), polyethylenenitrile, polyether ether ketone (PEEk), polyphenylene sulfide (PPS), phenol, epoxy (with glass filler) and polycarbonate (PC) can be used. can. These may be used alone or in combination of two or more. Among these, it is preferable to use polyimide, polyethylene terephthalate, or the like from the viewpoint of heat resistance and the like.

剛性基材１６を形成する材料としては、上記の合成樹脂以外に、Ａｌ、Ｍｇ、Ｃｕ、Ｎｉ、Ｃｏ、Ｃｒ、Ｆｅ、Ｚｎ、Ｐｂ、及びＴｉ等の金属、及びこれらの合金；Ａｌ、Ｍｇ、Ｓｉ、Ｇｅ、及びＢｅ等の金属酸化物；窒化珪素（Ｓｉ３Ｎ４）、窒化ボロン（ＢＮ）、及び炭化珪素（ＳｉＣ）等の金属窒化物；ガラス材料等を用いることもできる。 As the material for forming the rigid base material 16, in addition to the above synthetic resin, metals such as Al, Mg, Cu, Ni, Co, Cr, Fe, Zn, Pb, and Ti, and alloys thereof; Al, Mg. , Si, Ge, Be, and the like; metal nitrides such as silicon nitride (Si 3N 4 ) , boron nitride (BN), and silicon carbide (SiC); glass materials and the like can also be used.

剛性基材１６の厚さは、適宜設計可能であり、材料の種類にもよるが、剛性の弱い合成樹脂材料であれば、０．５ｍｍ～１．５ｍｍであることが好ましく、剛性の強い金属材料であれば、０．１ｍｍ～０．５ｍｍであることが好ましい。この範囲内であれば、剛性基材１６は十分な強度を有することができる。 The thickness of the rigid base material 16 can be appropriately designed and depends on the type of material, but if it is a synthetic resin material having low rigidity, it is preferably 0.5 mm to 1.5 mm, and it is a metal having high rigidity. If it is a material, it is preferably 0.1 mm to 0.5 mm. Within this range, the rigid base material 16 can have sufficient strength.

なお、本実施形態では、弾性基板１１Ａ又は弾性基板１１Ｂのいずれか一方のみに、第１電極１３Ａ及び第２電極１３Ｂを設けてもよい。例えば、感圧部材１０Ａは、図１０に示すように、弾性基板１１Ａの伝達面１１２Ａに第１電極１３Ａ及び第２電極１３Ｂを設けてもよい。 In this embodiment, the first electrode 13A and the second electrode 13B may be provided on only one of the elastic substrate 11A and the elastic substrate 11B. For example, as shown in FIG. 10, the pressure-sensitive member 10A may be provided with the first electrode 13A and the second electrode 13B on the transmission surface 112A of the elastic substrate 11A.

本実施形態では、弾性基板１１Ｂは、布等で形成されていてもよい。 In this embodiment, the elastic substrate 11B may be made of cloth or the like.

本実施形態では、接着層１２Ａ又は１２Ｂが特になくても、伝達面１１２Ａ又は１１１Ｂに第１電極１３Ａ及び第２電極１３Ｂを固着できる場合等には、感圧部材１０Ａは接着層１２Ａ又は１２Ｂを備えなくてもよい。 In the present embodiment, when the first electrode 13A and the second electrode 13B can be fixed to the transmission surface 112A or 111B even if the adhesive layer 12A or 12B is not particularly provided, the pressure-sensitive member 10A attaches the adhesive layer 12A or 12B. You don't have to prepare.

本実施形態では、接着層１２Ａ及び１２Ｂは、第１電極１３Ａ及び第２電極１３Ｂを固着できれば、伝達面１１２Ａ及び１１１Ｂのうちの、第１電極１３Ａ及び第２電極１３Ｂと接する部分の少なくとも一部に形成されていてもよい。 In the present embodiment, the adhesive layers 12A and 12B are at least a part of the transmission surfaces 112A and 111B in contact with the first electrode 13A and the second electrode 13B if the first electrode 13A and the second electrode 13B can be fixed. It may be formed in.

本実施形態では、電極の数は、４つ以上でもよい。この場合、感圧部材１０Ａは、弾性基板１１Ａ又は１１Ｂに４つ以上の電極を備えてもよいし、弾性基板１１Ａ及び１１Ｂ以外の弾性基板に、電極を備えてもよい。 In this embodiment, the number of electrodes may be four or more. In this case, the pressure-sensitive member 10A may be provided with four or more electrodes on the elastic substrates 11A or 11B, or may be provided on elastic substrates other than the elastic substrates 11A and 11B.

本実施形態では、第１電極１３Ａ－１及び１３Ａ－２は、先端部１３２Ａ－１及び１３２Ａ－２を櫛歯電極とし、それぞれ対向させているが、これに限るものでは無い。例えば、第１電極１３Ａ－１及び１３Ａ－２は、先端部１３２Ａ－１及び１３２Ａ－２を平面視において渦巻き状に形成し、それぞれ絶縁性を保ちながら対向して配置させてもよいし、ミアンダ形状に形成された電極をそれぞれ絶縁性を保ちながら対向して配置させてもよい。 In the present embodiment, the first electrodes 13A-1 and 13A-2 have the tip portions 132A-1 and 132A-2 as comb tooth electrodes and face each other, but the present invention is not limited to this. For example, in the first electrodes 13A-1 and 13A-2, the tip portions 132A-1 and 132A-2 may be formed in a spiral shape in a plan view and may be arranged so as to face each other while maintaining insulation. The electrodes formed in the shape may be arranged so as to face each other while maintaining the insulating property.

［第２の実施形態］
＜感圧部材＞
第２の実施形態に係る感圧部材１０Ｂについて説明する。本実施形態に係る感圧部材１０Ｂは、上記図１～図３に示す第１の実施形態に係る感圧部材１０Ａに、第２基板を設けて、弾性基板１１Ｂと第２基板との間にさらに感圧導電性部材を設けたものである。 [Second Embodiment]
<Pressure sensitive member>
The pressure-sensitive member 10B according to the second embodiment will be described. In the pressure-sensitive member 10B according to the present embodiment, a second substrate is provided on the pressure-sensitive member 10A according to the first embodiment shown in FIGS. 1 to 3 above, and a second substrate is provided between the elastic substrate 11B and the second substrate. Further, a pressure-sensitive conductive member is provided.

図１１は、第２の実施形態に係る感圧部材の構成の一例を示す分解斜視図であり、図１２は、図１１において、感圧部材の各部材を積層した状態のII－II断面図である。図１１及び図１２に示すように、感圧部材１０Ｂは、弾性基板１１Ｂの下側に弾性基板１１Ｂと対向して配設された第２基板４１と、第２基板４１に設けられる第３電極１３Ｃと、２つの感圧導電性部材１５Ａ及び１５Ｂを有する。 FIG. 11 is an exploded perspective view showing an example of the configuration of the pressure-sensitive member according to the second embodiment, and FIG. 12 is a sectional view taken along line II-II in a state in which each member of the pressure-sensitive member is laminated in FIG. Is. As shown in FIGS. 11 and 12, the pressure-sensitive member 10B has a second substrate 41 arranged on the lower side of the elastic substrate 11B facing the elastic substrate 11B, and a third electrode provided on the second substrate 41. It has 13C and two pressure-sensitive conductive members 15A and 15B.

感圧部材１０Ｂは、弾性基板１１Ａ及び１１Ｂと第２基板４１とを、平面視において、感圧導電性部材１５Ａ及び１５Ｂの設置位置を中心として、９０℃回転した位置に、それぞれ配置している。 The pressure-sensitive member 10B arranges the elastic substrates 11A and 11B and the second substrate 41 at positions rotated by 90 ° C. around the installation positions of the pressure-sensitive conductive members 15A and 15B in a plan view. ..

第２基板４１は、弾性基板１１Ａ及び１１Ｂと第２基板４１と同様の材料を用いて形成できる。 The second substrate 41 can be formed by using the elastic substrates 11A and 11B and the same material as the second substrate 41.

接着層１２Ａ～１２Ｃは、弾性基板１１Ａ及び１１Ｂと第２基板４１とにそれぞれ設けられる。接着層１２Ａは、弾性基板１１Ａの伝達面１１２Ａに設けられ、接着層１２Ｂは、弾性基板１１Ｂの伝達面１１１Ｂに設けられ、接着層１２Ｃは、第２基板４１の伝達面４１１に設けられる。 The adhesive layers 12A to 12C are provided on the elastic substrates 11A and 11B and the second substrate 41, respectively. The adhesive layer 12A is provided on the transmission surface 112A of the elastic substrate 11A, the adhesive layer 12B is provided on the transmission surface 111B of the elastic substrate 11B, and the adhesive layer 12C is provided on the transmission surface 411 of the second substrate 41.

第１電極１３Ａ、第２電極１３Ｂ、及び第３電極１３Ｃは、弾性基板１１Ａ及び１１Ｂと第２基板４１の接着層１２Ａ～１２Ｃの表面にそれぞれ設けられる。第１電極１３Ａは、弾性基板１１Ａの接着層１２Ａ上に設けられる。第２電極１３Ｂは、弾性基板１１Ｂと第２基板４１との間に設けられ、弾性基板１１Ｂの接着層１２Ｂ上に設けられる。第３電極１３Ｃは、弾性基板１１Ｂと第２基板４１との間に設けられ、第２基板４１の伝達面４１１に形成した接着層１２Ｃ上に設けられる。 The first electrode 13A, the second electrode 13B, and the third electrode 13C are provided on the surfaces of the adhesive layers 12A to 12C of the elastic substrates 11A and 11B and the second substrate 41, respectively. The first electrode 13A is provided on the adhesive layer 12A of the elastic substrate 11A. The second electrode 13B is provided between the elastic substrate 11B and the second substrate 41, and is provided on the adhesive layer 12B of the elastic substrate 11B. The third electrode 13C is provided between the elastic substrate 11B and the second substrate 41, and is provided on the adhesive layer 12C formed on the transmission surface 411 of the second substrate 41.

粘着層１４Ａ及び１４Ｂは、弾性基板１１Ａ及び１１Ｂと第２基板４１との何れかの間に設けられる。粘着層１４Ａは、弾性基板１１Ａの伝達面１１２Ａと弾性基板１１Ｂの伝達面１１１Ｂの間に設けられ、感圧導電性部材１５Ａが貫通可能な貫通孔１４ａを有する。粘着層１４Ｂは、弾性基板１１Ｂの伝達面１１２Ｂと第２基板４１の伝達面４１１の間に設けられ、感圧導電性部材１５Ｂが貫通可能な貫通孔１４ａを有する。 The adhesive layers 14A and 14B are provided between the elastic substrates 11A and 11B and the second substrate 41. The adhesive layer 14A is provided between the transmission surface 112A of the elastic substrate 11A and the transmission surface 111B of the elastic substrate 11B, and has a through hole 14a through which the pressure-sensitive conductive member 15A can penetrate. The adhesive layer 14B is provided between the transmission surface 112B of the elastic substrate 11B and the transmission surface 411 of the second substrate 41, and has a through hole 14a through which the pressure-sensitive conductive member 15B can penetrate.

感圧導電性部材１５Ａ及び１５Ｂは、第１電極１３Ａ～第３電極１３Ｃの何れかの間に設けられる。感圧導電性部材１５Ａは、弾性基板１１Ａ及び１１Ｂ同士の間に設けられ、第１電極１３Ａ－１及び１３Ａ－２の先端部１３２Ａ－１及び１３２Ａ－２と第３電極１３Ｃの先端部１３２Ｃの間に設けられる。感圧導電性部材１５Ｂは、弾性基板１１Ｂと第２基板４１との間に設けられ、第２電極１３Ｂの先端部１３２Ｂと第３電極１３Ｃの先端部１３２Ｃの間に設けられる。 The pressure-sensitive conductive members 15A and 15B are provided between any of the first electrodes 13A to 13C. The pressure-sensitive conductive member 15A is provided between the elastic substrates 11A and 11B, and the tip portions 132A-1 and 132A-2 of the first electrodes 13A-1 and 13A-2 and the tip portions 132C of the third electrode 13C are provided. It is provided in between. The pressure-sensitive conductive member 15B is provided between the elastic substrate 11B and the second substrate 41, and is provided between the tip portion 132B of the second electrode 13B and the tip portion 132C of the third electrode 13C.

感圧部材１０Ｂは、上述の通り、２つの弾性基板１１Ａ及び１１Ｂと、第２基板４１と、２つの感圧導電性部材１５Ａ及び１５Ｂとを有し、第１電極１３Ａを弾性基板１１Ａの伝達面１１２Ａに設け、第２電極１３Ｂを第２基板４１の伝達面４１１に設ける。２つの弾性基板１１Ｂと第２基板４１との間に第１電流を生じさせ、感圧部材１０Ｂは、押圧力が加わった際、弾性基板１１Ａに第２電流を生じさせることができる。そのため、感圧部材１０Ｂは、押圧力が加わった際、押圧力が低い時は、弾性基板１１Ｂと第２基板４１との間の第１抵抗を用い、押圧力が高い時は、弾性基板１１Ａの第２抵抗を用いることにより、簡易な構成で、抵抗値を広範囲の押圧力の大きさに亘って安定して検出することができる。 As described above, the pressure-sensitive member 10B has two elastic substrates 11A and 11B, a second substrate 41, and two pressure-sensitive conductive members 15A and 15B, and transmits the first electrode 13A to the elastic substrate 11A. The second electrode 13B is provided on the surface 112A, and the second electrode 13B is provided on the transmission surface 411 of the second substrate 41. A first current is generated between the two elastic substrates 11B and the second substrate 41, and the pressure sensitive member 10B can generate a second current in the elastic substrate 11A when a pressing force is applied. Therefore, when the pressing force is applied, the pressure sensitive member 10B uses the first resistance between the elastic substrate 11B and the second substrate 41 when the pressing force is low, and when the pressing force is high, the elastic substrate 11A By using the second resistance of the above, the resistance value can be stably detected over a wide range of pressing force with a simple configuration.

また、感圧部材１０Ｂは、一組の弾性基板１１Ａの伝達面１１２Ｂと第２基板４１の伝達面４１１との間に第１電流を生じさせ、弾性基板１１Ａの伝達面１１２Ａに一対の第１電極１３Ａ－１及び１３Ａ－２を設けて第２電流を生じさせている。そのため、感圧部材１０Ｂは、第１電流を生じさせる一組の基板と、第２電流を生じさせる一対の電極を備える基板とを分けることができる。よって、感圧部材１０Ｂは、第１電流を生じさせて第１抵抗を測定する位置と第２電流を生じさせて第２抵抗を測定する位置を任意に設計することができる。 Further, the pressure-sensitive member 10B generates a first current between the transmission surface 112B of the set of elastic substrates 11A and the transmission surface 411 of the second substrate 41, and a pair of first currents are generated on the transmission surface 112A of the elastic substrate 11A. Electrodes 13A-1 and 13A-2 are provided to generate a second current. Therefore, the pressure-sensitive member 10B can be separated into a set of substrates that generate a first current and a substrate that includes a pair of electrodes that generate a second current. Therefore, the pressure-sensitive member 10B can arbitrarily design a position where the first current is generated and the first resistance is measured and a position where the second current is generated and the second resistance is measured.

以下、実施例及び比較例を示して実施形態を更に具体的に説明するが、実施形態はこれらの実施例及び比較例により限定されるものではない。 Hereinafter, embodiments will be described in more detail with reference to Examples and Comparative Examples, but the embodiments are not limited to these Examples and Comparative Examples.

＜実施例１＞
［感圧部材の作製］
シリコーンゴム（「極薄ＳＲシート」、アズワン社製、厚さ０．１ｍｍ）から所定の大きさに切り出した弾性基板１１Ａ及び１１Ｂ（図１参照）を２つ準備した。この準備した一方の弾性基板１１Ａをエタノール溶液に浸漬して３０秒間洗浄して、コロナ放電を２０秒行った後、弾性基板１１Ａの一方の主面に分子接着剤を塗布して乾燥することで、接着層１２Ａ（図３参照）を形成した。その後、接着層１２Ａの表面に、Ａｇインク（「ＳＳＰ２８０１」、東洋紡社製）を塗布して、先端が櫛歯状となるように配置された一対の第１電極１３Ａ（図１参照）を形成した。その後、粘着層１４（図１参照）として両面粘着テープ（「Ｎｏ．７０８２」、寺岡製作所社製）の一部を円形にくり抜いて貫通孔１４ａ（図１参照）を形成した後、貫通孔１４ａの部分が一対の第１電極１３Ａの先端部分に位置するように、両面粘着テープを一対の第１電極１３Ａを形成した弾性基板１１Ａ上に貼り付けた。 <Example 1>
[Manufacturing of pressure sensitive member]
Two elastic substrates 11A and 11B (see FIG. 1) cut out from silicone rubber (“ultra-thin SR sheet”, manufactured by AS ONE Corporation, thickness 0.1 mm) to a predetermined size were prepared. One of the prepared elastic substrates 11A is immersed in an ethanol solution, washed for 30 seconds, subjected to corona discharge for 20 seconds, and then a molecular adhesive is applied to one main surface of the elastic substrate 11A and dried. , The adhesive layer 12A (see FIG. 3) was formed. After that, Ag ink (“SSP2801”, manufactured by Toyobo Co., Ltd.) is applied to the surface of the adhesive layer 12A to form a pair of first electrodes 13A (see FIG. 1) arranged so that the tips are comb-shaped. did. Then, as the adhesive layer 14 (see FIG. 1), a part of the double-sided adhesive tape (“No.7082”, manufactured by Teraoka Seisakusho Co., Ltd.) is hollowed out in a circular shape to form a through hole 14a (see FIG. 1), and then the through hole 14a is formed. A double-sided adhesive tape was attached onto the elastic substrate 11A on which the pair of first electrodes 13A was formed so that the portion of the first electrode 13A was located at the tip portion of the pair of first electrodes 13A.

一方、準備した他方の弾性基板１１Ｂの一方の表面（主面）に接着層１２Ｂ（図３参照）を形成した後、接着層１２Ｂの表面に、Ａｇインク（「ＳＳＰ２８０１」、東洋紡社製）を塗布して、一つの第２電極１３Ｂ（図１参照）を形成した。 On the other hand, after forming the adhesive layer 12B (see FIG. 3) on one surface (main surface) of the other prepared elastic substrate 11B, Ag ink (“SSP2801”, manufactured by Toyobo Co., Ltd.) is applied to the surface of the adhesive layer 12B. The coating was applied to form one second electrode 13B (see FIG. 1).

両面粘着テープの貫通孔１４ａに感圧導電性部材１５（図１参照）を配置した後、両面粘着テープを貼り付けてある弾性基板１１Ａの上に、一つの第２電極１３Ｂを形成した弾性基板１１Ｂを第１電極１３Ａと第２電極１３Ｂとが向き合うように貼り合わせた。これにより、図１に示す感圧部材１０Ａを作製した。 After arranging the pressure-sensitive conductive member 15 (see FIG. 1) in the through hole 14a of the double-sided adhesive tape, an elastic substrate in which one second electrode 13B is formed on the elastic substrate 11A to which the double-sided adhesive tape is attached. 11B was bonded so that the first electrode 13A and the second electrode 13B face each other. As a result, the pressure-sensitive member 10A shown in FIG. 1 was manufactured.

［押し込み時の圧力及び抵抗値の評価］
図１３に示すように、感圧部材１０Ａを試験台５１の上に設置した後、感圧部材１０Ａの一対の電極１３Ａを配線５２で測定機５３につなぎ、感圧部材５０の弾性基板１１Ａの上に圧子５４を載せた。その後、圧子５４にピン５５を当てて荷重計５６で押し込み速度０．１ｍｍ／分として押し込み、押し込んでいる時の時間と圧力及び抵抗値との関係を測定し、圧力と抵抗値との関係を求めた。測定された、圧力と抵抗値との関係（Ｆ－Ｒ特性）を図１４に示す。 [Evaluation of pressure and resistance during pushing]
As shown in FIG. 13, after the pressure-sensitive member 10A is installed on the test table 51, the pair of electrodes 13A of the pressure-sensitive member 10A are connected to the measuring machine 53 by wiring 52, and the elastic substrate 11A of the pressure-sensitive member 50 is connected. The indenter 54 was placed on top. After that, the pin 55 is applied to the indenter 54 and pushed in with a load meter 56 at a pushing speed of 0.1 mm / min, the relationship between the time during pushing and the pressure and the resistance value is measured, and the relationship between the pressure and the resistance value is measured. I asked. The measured relationship between the pressure and the resistance value (FR characteristics) is shown in FIG.

図１４に示すように、実施例１では、第１電極と第２電極との間の抵抗は、圧力が約１ｋＰａ以下の低圧領域では、抵抗の変化率が高かったが、圧力が約１ｋＰａを超える高圧領域では、抵抗の変化率が低く、抵抗値の変化を測定することは困難であった。一方、一対の第１電極同士の間の抵抗は、圧力が約１ｋＰａ以下の低圧領域では第１電極と第２電極との間の抵抗に比べると、抵抗の変化率が低かったが、圧力が約１ｋＰａを超える高圧領域では、抵抗値が一定の割合で安定して低下しており、抵抗値の変化を測定できた。 As shown in FIG. 14, in the first embodiment, the resistance between the first electrode and the second electrode has a high rate of change in the low pressure region where the pressure is about 1 kPa or less, but the pressure is about 1 kPa. In the high voltage region above, the rate of change in resistance was low, and it was difficult to measure the change in resistance value. On the other hand, the resistance between the pair of first electrodes was lower in the low voltage region where the pressure was about 1 kPa or less than the resistance between the first electrode and the second electrode, but the pressure was higher. In the high voltage region exceeding about 1 kPa, the resistance value stably decreased at a constant rate, and the change in the resistance value could be measured.

よって、実施例１では、圧力が約１ｋＰａ以下の低圧領域では、第１電極と第２電極との間の抵抗値を測定し、圧力が約１ｋＰａを超える高圧領域では一対の第１電極同士の抵抗を測定することで、押圧力に応じた抵抗値の変化を、広い押圧力の範囲に亘って安定して測定できることが確認された。 Therefore, in Example 1, the resistance value between the first electrode and the second electrode is measured in the low pressure region where the pressure is about 1 kPa or less, and the pair of first electrodes are paired in the high pressure region where the pressure exceeds about 1 kPa. By measuring the resistance, it was confirmed that the change in the resistance value according to the pressing force can be stably measured over a wide range of pressing force.

したがって、一実施形態の感圧部材は、押圧力を広範囲に亘って安定して検出することができるといえる。 Therefore, it can be said that the pressure-sensitive member of one embodiment can stably detect the pressing force over a wide range.

以上の通り、実施形態を説明したが、上記各実施形態は、例として提示したものであり、上記実施形態により本発明が限定されるものではない。上記実施形態は、その他の様々な形態で実施されることが可能であり、発明の要旨を逸脱しない範囲で、種々の組み合わせ、省略、置き換え、変更等を行うことが可能である。これら実施形態やその変形は、発明の範囲や要旨に含まれると共に、特許請求の範囲に記載された発明とその均等の範囲に含まれる。 As described above, the embodiments have been described, but each of the above embodiments is presented as an example, and the present invention is not limited to the above embodiments. The above embodiment can be implemented in various other embodiments, and various combinations, omissions, replacements, changes, etc. can be made without departing from the gist of the invention. These embodiments and modifications thereof are included in the scope and gist of the invention, and are also included in the scope of the invention described in the claims and the equivalent scope thereof.

１０Ａ、１０Ｂ、５０ 感圧部材
１１Ａ、１１Ｂ 弾性基板
１１１Ａ 作用面
１１２Ａ、１１１Ｂ、４１１ 伝達面
１１２Ｂ 支持面
１２Ａ、１２Ｂ 接着層
１３Ａ 第１電極
１３１Ａ－１、１３１Ａ－２ 本体部
１３２Ａ－１、１３２Ａ－２ 先端部
１３３Ａ－１、１３３Ａ－２ 端子部
１３Ｂ 第２電極
１３Ｃ 第３電極
１４Ａ～１４Ｃ 粘着層
１５Ａ、１５Ｂ 感圧導電性部材
１６ 剛性基材（第１基板）
３０ 圧力検出装置
３１ 接続部
３２ 検出部
３４ 配線
４１ 第２基板 10A, 10B, 50 Pressure-sensitive members 11A, 11B Elastic substrate 111A Working surface 112A, 111B, 411 Transmission surface 112B Support surface 12A, 12B Adhesive layer 13A First electrode 131A-1, 131A-2 Main body 132A-1, 132A- 2 Tip part 133A-1, 133A-2 Terminal part 13B 2nd electrode 13C 3rd electrode 14A-14C Adhesive layer 15A, 15B Pressure-sensitive conductive member 16 Rigid base material (1st substrate)
30 Pressure detector 31 Connection part 32 Detection part 34 Wiring 41 Second board

Claims (9)

少なくとも１つの電極を備える複数の基板と、
前記複数の基板同士の間に配置され、前記電極と接触する感圧導電性部材と、を備え、
前記電極は、前記基板の一面側に形成された一対の第１電極と、前記感圧導電性部材を挟んで形成された第２電極と、を有し、
複数の前記基板の少なくとも１つが押圧力の作用で弾性変形する弾性基板を有し、
前記感圧導電性部材は、前記弾性基板の弾性変形により弾性変形し、
前記一対の第１電極間の電気抵抗値が変化すると共に、前記第１電極と前記第２電極との間の電気抵抗値が変化することを特徴とする感圧部材。 Multiple substrates with at least one electrode and
A pressure-sensitive conductive member arranged between the plurality of substrates and in contact with the electrodes is provided.
The electrode has a pair of first electrodes formed on one surface side of the substrate and a second electrode formed by sandwiching the pressure-sensitive conductive member.
At least one of the plurality of substrates has an elastic substrate that is elastically deformed by the action of pressing force.
The pressure-sensitive conductive member is elastically deformed by the elastic deformation of the elastic substrate.
A pressure-sensitive member, characterized in that the electric resistance value between the pair of first electrodes changes and the electric resistance value between the first electrode and the second electrode changes. 前記弾性基板と、前記弾性基板と対向して配設された前記基板の第１基板と、を少なくとも１組有し、
前記弾性基板と前記第１基板との間に前記感圧導電性部材が配設され、
前記第１電極と前記第２電極が、前記弾性基板と前記第１基板との何れかに設けられていることを特徴とする請求項１に記載の感圧部材。 It has at least one set of the elastic substrate and the first substrate of the substrate disposed so as to face the elastic substrate.
The pressure-sensitive conductive member is disposed between the elastic substrate and the first substrate, and the pressure-sensitive conductive member is arranged.
The pressure-sensitive member according to claim 1, wherein the first electrode and the second electrode are provided on any of the elastic substrate and the first substrate. 少なくとも前記弾性基板を２つ有し、
複数の前記基板の少なくとも１つが前記弾性基板と対向して配設された第２基板であり、
前記弾性基板同士の間に前記感圧導電性部材が配設されると共に、前記弾性基板と前記第２基板との間に前記感圧導電性部材が配設され、
前記第１電極と前記第２電極が、前記弾性基板と前記第２基板との何れかに設けられていることを特徴とする請求項１に記載の感圧部材。 Having at least two of the elastic substrates
At least one of the plurality of the substrates is a second substrate arranged to face the elastic substrate.
The pressure-sensitive conductive member is disposed between the elastic substrates, and the pressure-sensitive conductive member is disposed between the elastic substrate and the second substrate.
The pressure-sensitive member according to claim 1, wherein the first electrode and the second electrode are provided on any of the elastic substrate and the second substrate. 前記弾性基板のうち、前記押圧力が作用する作用面が設けられた第１弾性基板であって、
前記第１弾性基板の前記作用面と反対側の伝達面には、前記第１電極を備えることを特徴とする請求項１～３の何れか一項に記載の感圧部材。 Among the elastic substrates, the first elastic substrate provided with an action surface on which the pressing force acts.
The pressure-sensitive member according to any one of claims 1 to 3, wherein the transmission surface on the side opposite to the working surface of the first elastic substrate is provided with the first electrode. 前記基板と前記電極との間にトリアジン系化合物を含む接着層を含むことを特徴とする請求項１～４の何れか一項に記載の感圧部材。 The pressure-sensitive member according to any one of claims 1 to 4, wherein an adhesive layer containing a triazine-based compound is contained between the substrate and the electrode. 前記複数の基板同士の間に粘着層を有することを特徴とする請求項１～５の何れか一項に記載の感圧部材。 The pressure-sensitive member according to any one of claims 1 to 5, wherein an adhesive layer is provided between the plurality of substrates. 前記感圧導電性部材が、エラストマーに導電性材料を含有する導電性エラストマーであることを特徴とする請求項１～６の何れか一項に記載の感圧部材。 The pressure-sensitive member according to any one of claims 1 to 6, wherein the pressure-sensitive conductive member is a conductive elastomer containing a conductive material in the elastomer. 前記第１電極は、平面視において、前記感圧導電性部材の位置における形状が櫛歯状に形成されていることを特徴とする請求項１～７の何れか一項に記載の感圧部材。 The pressure-sensitive member according to any one of claims 1 to 7, wherein the first electrode is formed in a comb-teeth shape at a position of the pressure-sensitive conductive member in a plan view. .. 請求項１～８の何れか一項に記載の感圧部材と、
前記感圧部材からの信号を取り出す端子部と、
前記端子部に接続されて、前記信号を処理する検出部と、
を備えたことを特徴とする圧力検出装置。 The pressure-sensitive member according to any one of claims 1 to 8.
The terminal part that takes out the signal from the pressure-sensitive member and
A detection unit connected to the terminal unit and processing the signal,
A pressure detector characterized by being equipped with.
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