JP2022018624A - Pressure sensor - Google Patents

Pressure sensor Download PDF

Info

Publication number
JP2022018624A
JP2022018624A JP2020121856A JP2020121856A JP2022018624A JP 2022018624 A JP2022018624 A JP 2022018624A JP 2020121856 A JP2020121856 A JP 2020121856A JP 2020121856 A JP2020121856 A JP 2020121856A JP 2022018624 A JP2022018624 A JP 2022018624A
Authority
JP
Japan
Prior art keywords
pressure
sensor
base portion
receiving diaphragm
mounting seat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2020121856A
Other languages
Japanese (ja)
Inventor
里奈 小笠原
Rina Ogasawara
興仁 結城
Koji Yuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azbil Corp
Original Assignee
Azbil Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Azbil Corp filed Critical Azbil Corp
Priority to JP2020121856A priority Critical patent/JP2022018624A/en
Priority to KR1020210080066A priority patent/KR20220009871A/en
Priority to CN202110746466.6A priority patent/CN113945318A/en
Publication of JP2022018624A publication Critical patent/JP2022018624A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0007—Fluidic connecting means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G01L13/02—Devices or apparatus for measuring differences of two or more fluid pressure values using elastically-deformable members or pistons as sensing elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
    • G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
    • G01L7/08—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges of the flexible-diaphragm type

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

To provide a pressure sensor that is hard to receive an influence due to mounting, and can be downsized.SOLUTION: A pressure sensor is equipped with a base portion 14 that is laminated on a sensor mounting seat 5 having a pressure introducing port 6 to which the pressure of a measured fluid 3 is transmitted, through a seal member 11. The base portion 14 is equipped with a pressure chamber portion 17 that is supported through a cylindrical connecting portion 16, and includes a pressure chamber 20 having a pressure-receiving diaphragm 19 as a part of a wall. A pressure introducing portion 22 is provided, which is connected with the pressure chamber portion 17 at one end, is connected with a sensor element 13 for detecting pressure at the other end, and transmits pressure from the pressure-receiving diaphragm 19 to the sensor element 13 by a pressure transmission liquid 21. The connecting portion 16 functions as a pressure introducing path 24 filled with the measured fluid 3 or the pressure transmission liquid 21 to transmit pressure. An outer diameter of the connecting portion 16 is smaller than an outer diameter of the pressure-receiving diaphragm 19.SELECTED DRAWING: Figure 1

Description

本発明は、被測定流体の圧力を受ける受圧ダイアフラムを備えた圧力センサに関する。 The present invention relates to a pressure sensor provided with a pressure receiving diaphragm that receives the pressure of the fluid to be measured.

従来の圧力センサとしては、被測定流体の圧力を受圧ダイアフラムで受け、この圧力を受圧ダイアフラムから圧力伝達用の液体を介してセンサ素子に伝達する構成のものがある。この種の圧力センサは、被測定流体の圧力が伝達される導圧ポートにボルト締結などによって取付けられる。この圧力センサにおいては、ボルトを締め付ける際に締付力が受圧ダイアフラムに伝達され、０点がシフトして特性が悪化する場合がある。 As a conventional pressure sensor, there is a configuration in which the pressure of the fluid to be measured is received by a pressure receiving diaphragm and this pressure is transmitted from the pressure receiving diaphragm to a sensor element via a liquid for pressure transmission. This type of pressure sensor is attached to a pressure guiding port through which the pressure of the fluid under test is transmitted, such as by bolting. In this pressure sensor, when the bolt is tightened, the tightening force is transmitted to the pressure receiving diaphragm, and the 0 point may shift and the characteristics may deteriorate.

このような締付力の影響を少なく抑えた従来の圧力センサとしては、例えば特許文献１や特許文献２に記載されている。特許文献１に記載された圧力センサにおいては、導圧ポートに接続されるシール面から離れた位置に受圧ダイアフラムを配設することで、締め付けの影響を低減している。特許文献２に記載された圧力センサにおいては、受圧ダイアフラムと同一面内において、受圧ダイアフラムとシール部との間に応力吸収部を設けることで、締め付けの影響を低減している。 As a conventional pressure sensor that suppresses the influence of such a tightening force to a small extent, for example, Patent Document 1 and Patent Document 2 are described. In the pressure sensor described in Patent Document 1, the influence of tightening is reduced by disposing the pressure receiving diaphragm at a position away from the sealing surface connected to the pressure guiding port. In the pressure sensor described in Patent Document 2, the influence of tightening is reduced by providing a stress absorbing portion between the pressure receiving diaphragm and the seal portion in the same plane as the pressure receiving diaphragm.

特開２００３－２９４５６３号公報Japanese Patent Application Laid-Open No. 2003-294563 特開２０１１－２５２７３９号公報Japanese Unexamined Patent Publication No. 2011-252739

特許文献１に示す圧力センサにおいて、受圧ダイアフラムが締付力の影響を受けないようにするためには、受圧ダイアフラムをシール面から十分に離す必要があり、他の機構部の配設位置や寸法の制約によっては、小型化が困難になる。また、受圧ダイアフラムが設けられている部材を大きく形成しなければならない。特許文献２に示す圧力センサにおいて、受圧ダイアフラムが締付力の影響を受けないようにするためには、受圧ダイアフラム、もしくは、受圧ダイアフラムの面内方向外側に十分に大きな応力吸収部を形成しなければならない。このため、特許文献１に示す圧力センサと特許文献２に示す圧力センサの両方とも締付力の影響を受けないようにすると小型化が困難になる。
近年の半導体市場向け差圧式マスフローコントローラにおいては、高精度化および小型化のニーズが高まっており、そのコンポーネントの一つである圧力センサに対しても更なる高精度化および小型化が要請されている。 In the pressure sensor shown in Patent Document 1, in order to prevent the pressure receiving diaphragm from being affected by the tightening force, it is necessary to sufficiently separate the pressure receiving diaphragm from the sealing surface, and the arrangement position and dimensions of other mechanical parts are required. Depending on the restrictions, miniaturization becomes difficult. In addition, the member provided with the pressure receiving diaphragm must be formed large. In the pressure sensor shown in Patent Document 2, in order to prevent the pressure receiving diaphragm from being affected by the tightening force, a sufficiently large stress absorbing portion must be formed on the pressure receiving diaphragm or the outside of the pressure receiving diaphragm in the in-plane direction. Must be. Therefore, if both the pressure sensor shown in Patent Document 1 and the pressure sensor shown in Patent Document 2 are not affected by the tightening force, it becomes difficult to reduce the size.
In recent years, there is an increasing need for high precision and miniaturization of differential pressure type mass flow controllers for the semiconductor market, and further high precision and miniaturization are required for the pressure sensor, which is one of its components. There is.

本発明の目的は、取付けによる影響を受け難く小型化可能な圧力センサを提供することである。 An object of the present invention is to provide a pressure sensor that is not easily affected by mounting and can be miniaturized.

この目的を達成するために本発明に係る圧力センサは、被測定流体の圧力が伝達される導圧口を有するセンサ用取付座にシール部材を介して重ねて取付けられたベース部と、前記ベース部に筒状の接続部を介して支持され、前記被測定流体の圧力を受ける受圧ダイアフラムが壁の一部となるように形成されて前記被測定流体とは仕切られた圧力室を含む圧力室部と、前記圧力室部が一端に接続されるとともに他端に圧力検出用のセンサ素子が接続され、前記受圧ダイアフラムから前記センサ素子に圧力伝達用の液体によって圧力を伝達する導圧部とを備え、前記接続部は、内部が前記被測定流体または前記圧力伝達用の液体で満たされて圧力を伝達する導圧路として機能し、前記接続部の外径は、前記受圧ダイアフラムの外径より小さいものである。 In order to achieve this object, the pressure sensor according to the present invention has a base portion mounted on a mounting seat for a sensor having a pressure guiding port through which the pressure of the fluid to be measured is transmitted, via a seal member, and the base. A pressure chamber including a pressure chamber that is supported by the portion via a tubular connection portion and is formed so that a pressure receiving diaphragm that receives the pressure of the measured fluid becomes a part of the wall and is separated from the measured fluid. A pressure guiding section is connected to one end of the pressure chamber and a pressure sensing sensor element is connected to the other end of the pressure chamber, and pressure is transmitted from the pressure receiving diaphragm to the sensor element by a pressure transmitting liquid. The connection portion is filled with the fluid under test or the liquid for pressure transmission and functions as a pressure guiding path for transmitting pressure, and the outer diameter of the connection portion is larger than the outer diameter of the pressure receiving diaphragm. It's a small one.

本発明は、前記圧力センサにおいて、前記圧力室部は、前記受圧ダイアフラムが前記導圧口内の前記被測定流体から圧力を受けるように前記導圧口の中に配置され、前記接続部は、前記ベース部における前記センサ用取付座と対向するシール面から前記センサ用取付座に向けて突出するように形成され、前記センサ素子は、前記ベース部に支持され、前記導圧部は、前記圧力室部および前記接続部の内部と、前記接続部から前記センサ素子まで延びるように前記ベース部内に形成された通路孔とを満たす前記圧力伝達用の液体によって圧力が伝達されるように構成されていてもよい。 In the present invention, in the pressure sensor, the pressure chamber portion is arranged in the pressure guiding port so that the pressure receiving diaphragm receives pressure from the measured fluid in the pressure guiding port, and the connecting portion is arranged in the pressure guiding port. The base portion is formed so as to project from the sealing surface facing the sensor mounting seat toward the sensor mounting seat, the sensor element is supported by the base portion, and the pressure guiding portion is the pressure chamber. The pressure is transmitted by the pressure transmitting liquid that fills the inside of the portion and the connection portion and the passage hole formed in the base portion so as to extend from the connection portion to the sensor element. May be good.

本発明は、前記圧力センサにおいて、前記接続部は、前記ベース部に一体に形成されていてもよい。 In the present invention, in the pressure sensor, the connection portion may be integrally formed with the base portion.

本発明は、前記圧力センサにおいて、前記接続部は、前記ベース部とは別体に形成され、前記ベース部に固着されていてもよい。 In the present invention, in the pressure sensor, the connection portion may be formed separately from the base portion and may be fixed to the base portion.

本発明は、前記圧力センサにおいて、前記圧力室部は、前記ベース部に対して前記センサ用取付座とは反対側に配置され、前記接続部は、前記ベース部から前記センサ用取付座とは反対方向に突出するように形成され、前記センサ素子は、前記圧力室部に支持され、前記導圧部は、前記圧力室部の壁を貫通する貫通孔によって圧力が伝達されるように構成され、前記ベース部は、前記センサ用取付座と対向するシール面から前記接続部に延びる導圧孔を有し、前記被測定流体の圧力が前記導圧孔と前記接続部の内部とを介して前記受圧ダイアフラムに伝達されていてもよい。 In the present invention, in the pressure sensor, the pressure chamber portion is arranged on the side opposite to the sensor mounting seat with respect to the base portion, and the connecting portion is from the base portion to the sensor mounting seat. The sensor element is formed so as to project in the opposite direction, the sensor element is supported by the pressure chamber portion, and the pressure guiding portion is configured such that pressure is transmitted by a through hole penetrating the wall of the pressure chamber portion. The base portion has a pressure guiding hole extending from a sealing surface facing the sensor mounting seat to the connecting portion, and the pressure of the fluid to be measured passes through the pressure guiding hole and the inside of the connecting portion. It may be transmitted to the pressure receiving diaphragm.

本発明は、前記圧力センサにおいて、前記受圧ダイアフラムが前記シール面に対して垂直となるように構成されていてもよい。 In the present invention, in the pressure sensor, the pressure receiving diaphragm may be configured to be perpendicular to the sealing surface.

本発明は、前記圧力センサにおいて、前記接続部の突出側端部が前記シール面に対して垂直となる方向に延びるように形成されて前記圧力室部に接続されていてもよい。 In the present invention, in the pressure sensor, the protruding side end portion of the connecting portion may be formed so as to extend in a direction perpendicular to the sealing surface and connected to the pressure chamber portion.

本発明においては、ベース部の変形が接続部で遮られるようになって受圧ダイアフラムに伝わり難くなるから、受圧ダイアフラムとシール面との距離を大きくとる必要がなく、また、ベース部を大型に形成することなく受圧ダイアフラムへの締付力の影響を防ぐことができる。この受圧ダイアフラムもしくは受圧ダイアフラムの面内方向外側には、変形吸収構造を設ける必要はない。したがって、本発明によれば、ベース部をセンサ用取付座に取付ける際の影響を受け難く、小型化可能な圧力センサを提供することができる。 In the present invention, since the deformation of the base portion is blocked by the connecting portion and is difficult to be transmitted to the pressure receiving diaphragm, it is not necessary to increase the distance between the pressure receiving diaphragm and the sealing surface, and the base portion is formed to be large. It is possible to prevent the influence of the tightening force on the pressure receiving diaphragm without doing so. It is not necessary to provide a deformation absorbing structure on the pressure receiving diaphragm or the outside of the pressure receiving diaphragm in the in-plane direction. Therefore, according to the present invention, it is possible to provide a pressure sensor that is not easily affected by mounting the base portion on the sensor mounting seat and can be miniaturized.

図１は、第１の実施の形態による圧力センサの断面図である。FIG. 1 is a cross-sectional view of a pressure sensor according to the first embodiment. 図２は、接続部の変形例を示す断面図である。FIG. 2 is a cross-sectional view showing a modified example of the connecting portion. 図３は、第２の実施の形態による圧力センサの断面図である。FIG. 3 is a cross-sectional view of the pressure sensor according to the second embodiment. 図４は、第３の実施の形態による圧力センサの断面図である。FIG. 4 is a cross-sectional view of the pressure sensor according to the third embodiment. 図５は、第３の実施の形態による圧力センサの断面図である。FIG. 5 is a cross-sectional view of the pressure sensor according to the third embodiment. 図６は、接続部の変形例を示す断面図である。FIG. 6 is a cross-sectional view showing a modified example of the connecting portion.

（第１の実施の形態）
以下、本発明に係る圧力センサの一実施の形態を図１を参照して詳細に説明する。図１に示す圧力センサは、請求項１～３に記載した発明を適用したものである。
図１に示す圧力センサ１は、図１において最も下に描いてある圧力ポート２に取付けて圧力ポート２内の被測定流体３の圧力を検出するためのものである。圧力ポート２は、金属材料によって所定の形状に形成されており、被測定流体３が流れる流路（図示せず）から分岐した導圧用通路４と、圧力センサ１を取付けるための平坦なセンサ用取付座５とを有している。導圧用通路４の内部は、被測定流体３で満たされている。被測定流体３は、図１においては液体として描いてあるが、気体でもよい。センサ用取付座５は、導圧用通路４の開口からなる導圧口６を有している。 (First Embodiment)
Hereinafter, an embodiment of the pressure sensor according to the present invention will be described in detail with reference to FIG. The pressure sensor shown in FIG. 1 is to which the invention described in claims 1 to 3 is applied.
The pressure sensor 1 shown in FIG. 1 is attached to the pressure port 2 drawn at the bottom in FIG. 1 to detect the pressure of the fluid to be measured 3 in the pressure port 2. The pressure port 2 is formed of a metal material into a predetermined shape, and is used for a pressure guiding passage 4 branched from a flow path (not shown) through which the fluid to be measured 3 flows, and a flat sensor for mounting the pressure sensor 1. It has a mounting seat 5. The inside of the pressure guiding passage 4 is filled with the fluid to be measured 3. The fluid to be measured 3 is drawn as a liquid in FIG. 1, but may be a gas. The sensor mounting seat 5 has a pressure guiding port 6 formed by an opening of the pressure guiding passage 4.

この実施の形態による圧力センサ１は、センサ用取付座５にシール部材１１を介して重ねられたベース部材１２を備えている。ベース部材１２は、金属材料によって所定の形状に形成されており、センサ用取付座５と対向するシール面１２ａと、シール面１２ａとは反対側のセンサ取付面１２ｂとを有している。シール部材１１は、Ｏリングからなり、シール面１２ａとセンサ用取付座５との間に挟まれている。センサ取付面１２ｂには、圧力検出用のセンサ素子１３が接着されている。センサ素子１３は、一方の面および他方の面に受ける圧力差に応じた信号を出力するセンサダイアフラムを用いた素子、例えば歪式、静電容量式、磁歪式、光学式等が適用できる。この実施の形態によるベース部材１２のシール面１２ａとセンサ取付面１２ｂとの間の部分は、円板状に形成されている。以下においては、この円板状の部分をベース部１４という。ベース部１４の形状は円板状に限らず、角板状であってもよい。 The pressure sensor 1 according to this embodiment includes a base member 12 that is superposed on the sensor mounting seat 5 via the seal member 11. The base member 12 is formed of a metal material into a predetermined shape, and has a sealing surface 12a facing the sensor mounting seat 5 and a sensor mounting surface 12b on the opposite side of the sealing surface 12a. The seal member 11 is composed of an O-ring and is sandwiched between the seal surface 12a and the sensor mounting seat 5. A sensor element 13 for pressure detection is adhered to the sensor mounting surface 12b. As the sensor element 13, an element using a sensor diaphragm that outputs a signal corresponding to a pressure difference between one surface and the other surface, for example, a strain type, a capacitance type, a magnetostrictive type, an optical type, or the like can be applied. The portion between the sealing surface 12a and the sensor mounting surface 12b of the base member 12 according to this embodiment is formed in a disk shape. In the following, this disk-shaped portion will be referred to as a base portion 14. The shape of the base portion 14 is not limited to a disk shape, but may be a square plate shape.

ベース部材１２は、シール部材１１がシール面１２ａとセンサ用取付座５との間で圧縮されるように、複数の取付用ボルト１５によってセンサ用取付座５に取付けられている。取付用ボルト１５は、シール部材１１より外側に配置されている。取付方法はボルト締結に限らず、クランプ、ねじ込み等により取付ける構造にしてもよい。
ベース部材１２の中央部には、シール面１２ａからセンサ用取付座５に向けて突出する接続部１６と、接続部１６の突出端に接続された圧力室部１７とが設けられている。
接続部１６は、筒状に形成されており、内部に貫通孔１６ａを有している。この実施の形態による接続部１６は、断面円形のパイプ状となるようにベース部１４に一体に形成されている。なお、接続部１６の形状は、断面円形のパイプ状に限定されることはなく、例えば角筒状に形成することができる。 The base member 12 is attached to the sensor mounting seat 5 by a plurality of mounting bolts 15 so that the sealing member 11 is compressed between the sealing surface 12a and the sensor mounting seat 5. The mounting bolt 15 is arranged outside the sealing member 11. The mounting method is not limited to bolt fastening, and a structure may be used for mounting by clamping, screwing, or the like.
At the center of the base member 12, a connecting portion 16 protruding from the sealing surface 12a toward the sensor mounting seat 5 and a pressure chamber portion 17 connected to the protruding end of the connecting portion 16 are provided.
The connecting portion 16 is formed in a cylindrical shape and has a through hole 16a inside. The connecting portion 16 according to this embodiment is integrally formed with the base portion 14 so as to have a pipe shape having a circular cross section. The shape of the connecting portion 16 is not limited to the shape of a pipe having a circular cross section, and can be formed into, for example, a square cylinder.

圧力室部１７は、接続部１６を介してベース部１４に支持されている。この実施の形態による圧力室部１７は、ベース部１４とは反対方向に向けて開口する有底円筒状のハウジング１８と、ハウジング１８の開口部を閉塞する受圧ダイアフラム１９とによって構成されている。この圧力室部１７の中には、ハウジング１８と受圧ダイアフラム１９とによって囲まれた圧力室２０が形成されている。圧力室２０は、受圧ダイアフラム１９が壁の一部となるように形成されて被測定流体３とは仕切られている。 The pressure chamber portion 17 is supported by the base portion 14 via the connecting portion 16. The pressure chamber portion 17 according to this embodiment is composed of a bottomed cylindrical housing 18 that opens in a direction opposite to the base portion 14, and a pressure receiving diaphragm 19 that closes the opening of the housing 18. A pressure chamber 20 surrounded by a housing 18 and a pressure receiving diaphragm 19 is formed in the pressure chamber portion 17. The pressure chamber 20 is formed so that the pressure receiving diaphragm 19 becomes a part of the wall, and is separated from the fluid to be measured 3.

圧力室２０内は、圧力伝達用の液体２１で満たされており、ベース部材１２の中央部に設けられた後述する導圧部２２によってセンサ素子１３に接続されている。
受圧ダイアフラム１９は、金属製の板材によって円板状に形成されており、被測定流体３の圧力を受けて変形し、圧力室２０の容積を変える。このため、被測定流体３の圧力が受圧ダイアフラム１９を介して圧力室２０内の圧力伝達用の液体２１に伝達される。この実施の形態による圧力室部１７は、受圧ダイアフラム１９が導圧口６内の被測定流体３から圧力を受けるように導圧口６の中に配置されている。 The inside of the pressure chamber 20 is filled with the liquid 21 for pressure transmission, and is connected to the sensor element 13 by a pressure guiding portion 22 to be described later provided in the central portion of the base member 12.
The pressure receiving diaphragm 19 is formed in a disk shape by a metal plate material, and is deformed by receiving the pressure of the fluid to be measured 3 to change the volume of the pressure chamber 20. Therefore, the pressure of the fluid to be measured 3 is transmitted to the pressure transfer liquid 21 in the pressure chamber 20 via the pressure receiving diaphragm 19. The pressure chamber portion 17 according to this embodiment is arranged in the pressure guiding port 6 so that the pressure receiving diaphragm 19 receives pressure from the fluid to be measured 3 in the pressure guiding port 6.

この実施の形態による導圧部２２は、ハウジング１８の貫通孔１８ａと、接続部１６の内部の貫通孔１６ａと、接続部１６からセンサ素子１３まで延びるようにベース部１４内に形成された通路孔２３と、これらの孔に満たされた圧力伝達用の液体２１によって構成されている。この導圧部２２は、圧力室部１７が一端に接続されるとともに他端に圧力検出用のセンサ素子１３が接続され、受圧ダイアフラム１９からセンサ素子１３に圧力伝達用の液体２１によって圧力を伝達する。詳述すると、導圧部２２は、圧力室部１７および接続部１６の内部と、接続部１６からセンサ素子１３まで延びるようにベース部１４内に形成された通路孔２３とを満たす圧力伝達用の液体２１によって圧力が伝達されるように構成されている。封入液を充填するための封入孔は、例えばベース部１４、圧力室部１７、センサ素子１３に設け、鋼球の溶接や半田等により封止することができる。この実施の形態による接続部１６は、内部が圧力伝達用の液体２１で満たされて圧力を伝達する導圧路２４として機能する。この接続部１６の外径は、受圧ダイアフラム１９の外径より小さい。 The pressure guiding portion 22 according to this embodiment has a through hole 18a of the housing 18, a through hole 16a inside the connecting portion 16, and a passage formed in the base portion 14 so as to extend from the connecting portion 16 to the sensor element 13. It is composed of holes 23 and a pressure transfer liquid 21 filled in these holes. In the pressure guiding portion 22, the pressure chamber portion 17 is connected to one end and the sensor element 13 for pressure detection is connected to the other end, and the pressure is transmitted from the pressure receiving diaphragm 19 to the sensor element 13 by the liquid 21 for pressure transmission. do. More specifically, the pressure guiding portion 22 is for pressure transmission that fills the inside of the pressure chamber portion 17 and the connecting portion 16 and the passage hole 23 formed in the base portion 14 so as to extend from the connecting portion 16 to the sensor element 13. The pressure is transmitted by the liquid 21 of the above. The filling holes for filling the filling liquid are provided in, for example, the base portion 14, the pressure chamber portion 17, and the sensor element 13, and can be sealed by welding steel balls, soldering, or the like. The connection portion 16 according to this embodiment functions as a pressure guiding path 24 whose inside is filled with the liquid 21 for pressure transmission to transmit pressure. The outer diameter of the connecting portion 16 is smaller than the outer diameter of the pressure receiving diaphragm 19.

このように構成された圧力センサ１においては、被測定流体３の圧力が受圧ダイアフラム１９から圧力伝達用の液体２１を介してセンサ素子１３に伝達され、センサ素子１３によって圧力が検出される。この圧力センサ１は、ベース部材１２に全ての部品を組み付けて圧力伝達用の液体２１が内部に封入された状態で圧力ポート２のセンサ用取付座５に取付けられる。この取付けを行うために取付用ボルト１５を締め込むと、ベース部１４のシール部材１１より外側の部分がセンサ用取付座５に向けて押圧され、ベース部１４が図１において上方に向けて凸になるように変形するおそれがある。従来の圧力センサのようにベース部に受圧ダイアフラムが設けられている場合は、ベース部の変形に伴って受圧ダイアフラムが変形するから、受圧ダイアフラムを締結部から大きく離れるようにベース部材を大きく形成する必要があった。 In the pressure sensor 1 configured in this way, the pressure of the fluid to be measured 3 is transmitted from the pressure receiving diaphragm 19 to the sensor element 13 via the liquid 21 for pressure transmission, and the pressure is detected by the sensor element 13. The pressure sensor 1 is attached to the sensor mounting seat 5 of the pressure port 2 in a state where all the parts are assembled to the base member 12 and the liquid 21 for pressure transmission is sealed inside. When the mounting bolt 15 is tightened for this mounting, the portion of the base portion 14 outside the seal member 11 is pressed toward the sensor mounting seat 5, and the base portion 14 is convex upward in FIG. There is a risk of deformation so that it becomes. When the pressure receiving diaphragm is provided on the base portion as in the conventional pressure sensor, the pressure receiving diaphragm is deformed as the base portion is deformed. Therefore, the base member is formed large so that the pressure receiving diaphragm is largely separated from the fastening portion. I needed it.

しかし、この実施の形態による圧力センサ１においては、受圧ダイアフラム１９を有する圧力室部１７が細い接続部１６を介してベース部１４に支持されているから、ベース部１４の変形が接続部１６で遮られるようになって受圧ダイアフラム１９には伝わり難くなる。すなわち、ベース部１４が変形するような場合であっても受圧ダイアフラム１９は変形することがない。 However, in the pressure sensor 1 according to this embodiment, since the pressure chamber portion 17 having the pressure receiving diaphragm 19 is supported by the base portion 14 via the thin connecting portion 16, the deformation of the base portion 14 is caused by the connecting portion 16. It becomes obstructed and becomes difficult to be transmitted to the pressure receiving diaphragm 19. That is, even if the base portion 14 is deformed, the pressure receiving diaphragm 19 is not deformed.

このため、この圧力センサ１においては、従来の圧力センサと較べてベース部１４を大型に形成することなく、受圧ダイアフラム１９への締付力の影響を防ぐことができる。この受圧ダイアフラム１９には、変形吸収構造を設ける必要はない。したがって、この実施の形態によれば、ベース部１４をセンサ用取付座５に取付ける際の影響を受け難く、小型化可能な圧力センサ１を提供することができる。 Therefore, in this pressure sensor 1, it is possible to prevent the influence of the tightening force on the pressure receiving diaphragm 19 without forming the base portion 14 to be larger than that of the conventional pressure sensor. It is not necessary to provide the pressure receiving diaphragm 19 with a deformation absorbing structure. Therefore, according to this embodiment, it is possible to provide a pressure sensor 1 that is not easily affected by mounting the base portion 14 on the sensor mounting seat 5 and can be miniaturized.

この実施の形態による圧力センサ１の圧力室部１７は、受圧ダイアフラム１９が導圧口６内の被測定流体３から圧力を受けるように導圧口６の中に配置されている。接続部１６は、ベース部１４におけるセンサ用取付座５と対向するシール面１２ａからセンサ用取付座５に向けて突出するように形成されている。センサ素子１３は、ベース部１４に支持されている。導圧部２２は、圧力室部１７および接続部１６の内部と、接続部１６からセンサ素子１３まで延びるようにベース部１４内に形成された通路孔２３とを満たす圧力伝達用の液体２１によって圧力が伝達されるように構成されている。
このため、この実施の形態によれば、受圧ダイアフラム１９を有する圧力室部１７を導圧口６の中に収容できるから、センサ用取付座５から突出する部分が小さくコンパクトな圧力センサを実現できる。 The pressure chamber portion 17 of the pressure sensor 1 according to this embodiment is arranged in the pressure guiding port 6 so that the pressure receiving diaphragm 19 receives pressure from the fluid to be measured 3 in the pressure guiding port 6. The connection portion 16 is formed so as to project from the seal surface 12a of the base portion 14 facing the sensor mounting seat 5 toward the sensor mounting seat 5. The sensor element 13 is supported by the base portion 14. The pressure guiding portion 22 is provided with a pressure transmitting liquid 21 that fills the inside of the pressure chamber portion 17 and the connecting portion 16 and the passage hole 23 formed in the base portion 14 so as to extend from the connecting portion 16 to the sensor element 13. It is configured to transmit pressure.
Therefore, according to this embodiment, since the pressure chamber portion 17 having the pressure receiving diaphragm 19 can be accommodated in the pressure guiding port 6, a compact pressure sensor can be realized with a small portion protruding from the sensor mounting seat 5. ..

この実施の形態による接続部１６は、ベース部材１２のベース部１４に一体に形成されている。このような接続部１６は、機械加工によって簡単に形成することができるため、圧力室部１７がベース部材１２から離れている構造の圧力センサ１を容易に製造することができる。 The connecting portion 16 according to this embodiment is integrally formed with the base portion 14 of the base member 12. Since such a connecting portion 16 can be easily formed by machining, a pressure sensor 1 having a structure in which the pressure chamber portion 17 is separated from the base member 12 can be easily manufactured.

（接続部の変形例）
接続部は図２に示すように構成することができる。図２において、図１によって説明したものと同一もしくは同等の部材については、同一符号を付し詳細な説明を適宜省略する。図２に示す圧力センサ３１は、請求項４に記載した発明を適用したものである。図２に示す接続部１６は、ベース部１４とは別体に形成されたパイプ３２によって構成されており、ベース部１４に固着されている。この実施の形態による接続部１６は、ベース部１４に溶接されている。また、この実施の形態による圧力室部１７のハウジング１８は、ベース部１４および接続部１６とは別体に形成され、接続部１６に溶接されている。接合方法は、溶接以外に、ろう付、半田、拡散接合、圧入、かしめ、接着等が適用できる。
この実施の形態に示すように接続部１６をベース部１４とは別体に形成する場合は、接続部１６を形成する材料をベース部１４の材料と較べて剛性が低い材料とすることができる。このように剛性が低い材料によって接続部１６が形成された場合は、ベース部１４の変形がより一層受圧ダイアフラム１９に伝達され難くなる。また、ベース部１４や圧力室部１７の形状により接続部１６の一体加工が困難な場合には、別体に形成して接合することが好ましい。 (Modification example of connection part)
The connection can be configured as shown in FIG. In FIG. 2, the same or equivalent members as those described with reference to FIG. 1 are designated by the same reference numerals, and detailed description thereof will be omitted as appropriate. The pressure sensor 31 shown in FIG. 2 is an application of the invention described in claim 4. The connection portion 16 shown in FIG. 2 is composed of a pipe 32 formed separately from the base portion 14, and is fixed to the base portion 14. The connection portion 16 according to this embodiment is welded to the base portion 14. Further, the housing 18 of the pressure chamber portion 17 according to this embodiment is formed separately from the base portion 14 and the connecting portion 16 and is welded to the connecting portion 16. In addition to welding, brazing, soldering, diffusion joining, press fitting, caulking, bonding, and the like can be applied as the joining method.
When the connecting portion 16 is formed separately from the base portion 14 as shown in this embodiment, the material forming the connecting portion 16 can be made of a material having lower rigidity than the material of the base portion 14. .. When the connecting portion 16 is formed of such a material having low rigidity, the deformation of the base portion 14 is more difficult to be transmitted to the pressure receiving diaphragm 19. Further, when it is difficult to integrally process the connecting portion 16 due to the shape of the base portion 14 and the pressure chamber portion 17, it is preferable to form them as separate bodies and join them.

（第２の実施の形態）
本発明に係る圧力センサは、図３に示すように構成することができる。図３において、図１によって説明したものと同一もしくは同等の部材については、同一符号を付し詳細な説明を適宜省略する。図３に示す圧力センサは、請求項５に記載した発明を適用したものである。 (Second embodiment)
The pressure sensor according to the present invention can be configured as shown in FIG. In FIG. 3, the same or equivalent members as those described with reference to FIG. 1 are designated by the same reference numerals, and detailed description thereof will be omitted as appropriate. The pressure sensor shown in FIG. 3 is an application of the invention described in claim 5.

図３に示す圧力センサ４１は、圧力室部１７の位置が第１の実施の形態による圧力センサとは異なっている。この実施の形態による圧力室部１７は、ベース部１４に対してセンサ用取付座５とは反対側に配置されている。この圧力室部１７のハウジング１８は、受圧ダイアフラム側を接続部１６に接続するために、受圧ダイアフラム１９を覆う円環状の蓋４２を有している。
接続部１６は、ベース部１４からセンサ用取付座５とは反対方向に突出するように形成され、蓋４２とベース部１４とを接続している。図３に示す接続部１６は、ベース部１４およびハウジング１８と一体に形成されているように描いてあるが、図２に示すようにベース部１４やハウジング１８とは別体に形成することができる。この実施の形態による接続部１６は、内部の貫通孔１６ａが被測定流体３で満たされて圧力を伝達する導圧路４３として機能する。 In the pressure sensor 41 shown in FIG. 3, the position of the pressure chamber portion 17 is different from that of the pressure sensor according to the first embodiment. The pressure chamber portion 17 according to this embodiment is arranged on the side opposite to the sensor mounting seat 5 with respect to the base portion 14. The housing 18 of the pressure chamber portion 17 has an annular lid 42 that covers the pressure receiving diaphragm 19 in order to connect the pressure receiving diaphragm side to the connecting portion 16.
The connecting portion 16 is formed so as to project from the base portion 14 in the direction opposite to the sensor mounting seat 5, and connects the lid 42 and the base portion 14. The connection portion 16 shown in FIG. 3 is drawn so as to be integrally formed with the base portion 14 and the housing 18, but may be formed separately from the base portion 14 and the housing 18 as shown in FIG. can. The connection portion 16 according to this embodiment functions as a pressure guiding path 43 in which the internal through hole 16a is filled with the fluid to be measured 3 to transmit pressure.

この実施の形態によるセンサ素子１３は、圧力室部１７のハウジング１８に支持されている。ハウジング１８には、圧力室２０内からセンサ素子１３に圧力が伝達されるように、センサ素子１３と対応する位置に貫通孔４４が形成されている。この実施の形態による導圧部２２は、ハウジング１８の貫通孔４４（圧力室部１７の壁を貫通する貫通孔）を含む導圧路４５によって圧力が伝達されるように構成されている。
ベース部１４は、センサ用取付座５と対向するシール面１２ａから接続部１６に延びる導圧孔４６を有している。この場合、被測定流体３の圧力が導圧孔４６と接続部１６の内部の貫通孔１６ａとを介して受圧ダイアフラム１９に伝達される。 The sensor element 13 according to this embodiment is supported by the housing 18 of the pressure chamber portion 17. A through hole 44 is formed in the housing 18 at a position corresponding to the sensor element 13 so that the pressure is transmitted from the pressure chamber 20 to the sensor element 13. The pressure guiding portion 22 according to this embodiment is configured such that pressure is transmitted by a pressure guiding passage 45 including a through hole 44 (a through hole penetrating the wall of the pressure chamber portion 17) of the housing 18.
The base portion 14 has a pressure guiding hole 46 extending from the sealing surface 12a facing the sensor mounting seat 5 to the connecting portion 16. In this case, the pressure of the fluid to be measured 3 is transmitted to the pressure receiving diaphragm 19 through the pressure guiding hole 46 and the through hole 16a inside the connecting portion 16.

このように圧力室部１７がベース部１４に対してセンサ用取付座５とは反対側に位置する構成を採る場合であっても、ベース部１４をセンサ用取付座５に取付ける際の影響を受け難く、小型化可能な圧力センサ４１を提供することができる。 Even when the pressure chamber portion 17 is located on the side opposite to the sensor mounting seat 5 with respect to the base portion 14 in this way, the influence when the base portion 14 is mounted on the sensor mounting seat 5 is affected. It is possible to provide a pressure sensor 41 that is difficult to receive and can be miniaturized.

（第３の実施の形態）
本発明に係る圧力センサは、図４および図５に示すように構成することができる。図４および図５において、図１によって説明したものと同一もしくは同等の部材については、同一符号を付し詳細な説明を適宜省略する。図４および図５に示す圧力センサは、請求項６に記載した発明を適用したものである。図５の破断位置は、図４中にV－V線で示す位置である。 (Third embodiment)
The pressure sensor according to the present invention can be configured as shown in FIGS. 4 and 5. In FIGS. 4 and 5, the same or equivalent members as those described with reference to FIG. 1 are designated by the same reference numerals, and detailed description thereof will be omitted as appropriate. The pressure sensor shown in FIGS. 4 and 5 is the one to which the invention described in claim 6 is applied. The breaking position in FIG. 5 is the position indicated by the VV line in FIG.

図４および図５に示す圧力センサ５１は、圧力室部１７の構成が第１の実施の形態で示した圧力センサ１とは異なっている。この実施の形態による圧力室部１７は、ベース部１４に対してセンサ用取付座５とは反対側に配置されており、受圧ダイアフラム１９がベース部１４のシール面１２ａに対して垂直となるように構成されている。
圧力室部１７のハウジング１８は、中空の円板状に形成され、圧力室２０とは受圧ダイアフラム１９を挟んで対向する受圧室５２を有している。受圧室５２は、接続部１６の内部を介してベース部１４の導圧孔５３に接続されている。導圧孔５３は、ベース部１４のシール面１２ａから接続部１６に延びている。この場合、被測定流体３の圧力が導圧孔５３と、接続部１６の内部の貫通孔１６ａと、受圧室５２とを介して受圧ダイアフラム１９に伝達される。 The pressure sensor 51 shown in FIGS. 4 and 5 has a different structure of the pressure chamber portion 17 from the pressure sensor 1 shown in the first embodiment. The pressure chamber portion 17 according to this embodiment is arranged on the side opposite to the sensor mounting seat 5 with respect to the base portion 14, so that the pressure receiving diaphragm 19 is perpendicular to the sealing surface 12a of the base portion 14. It is configured in.
The housing 18 of the pressure chamber portion 17 is formed in the shape of a hollow disk, and has a pressure receiving chamber 52 facing the pressure chamber 20 with the pressure receiving diaphragm 19 interposed therebetween. The pressure receiving chamber 52 is connected to the pressure guiding hole 53 of the base portion 14 via the inside of the connecting portion 16. The pressure guiding hole 53 extends from the sealing surface 12a of the base portion 14 to the connecting portion 16. In this case, the pressure of the fluid to be measured 3 is transmitted to the pressure receiving diaphragm 19 via the pressure guiding hole 53, the through hole 16a inside the connecting portion 16, and the pressure receiving chamber 52.

この実施の形態によるセンサ素子１３は、圧力室部１７のハウジング１８に導圧用のパイプ５４を介して支持されている。導圧用のパイプ５４の一端はハウジング１８の貫通孔５５を介して圧力室２０に接続され、他端はセンサ素子１３に接続されている。このため、この実施の形態による導圧部２２は、ハウジング１８の貫通孔５５（圧力室部１７の壁を貫通する貫通孔）を含む導圧路５６によって圧力が伝達されるように構成されている。 The sensor element 13 according to this embodiment is supported by the housing 18 of the pressure chamber portion 17 via a pressure guiding pipe 54. One end of the pressure guiding pipe 54 is connected to the pressure chamber 20 through the through hole 55 of the housing 18, and the other end is connected to the sensor element 13. Therefore, the pressure guiding portion 22 according to this embodiment is configured so that the pressure is transmitted by the pressure guiding passage 56 including the through hole 55 (the through hole penetrating the wall of the pressure chamber portion 17) of the housing 18. There is.

このように構成された圧力センサ５１においては、取付用ボルト１５でベース部１４がセンサ用取付座５に締結されることにより、ベース部１４が図４中に矢印で示す方向に変形するようになる。変形方向は、センサ用取付座５に近づきつつベース部材１２の側方に向かうような斜め方向である。 In the pressure sensor 51 configured in this way, the base portion 14 is fastened to the sensor mounting seat 5 with the mounting bolts 15 so that the base portion 14 is deformed in the direction indicated by the arrow in FIG. Become. The deformation direction is an oblique direction so as to approach the sensor mounting seat 5 and toward the side of the base member 12.

この場合、接続部１６が径方向の外側に向けて拡がる方向にベース部１４によって引っ張られるようになる。この接続部１６を引っ張る力の方向、言い換えれば、ハウジング１８を変形させるように接続部１６からハウジング１８に伝達される力の方向は、受圧ダイアフラム１９の面に沿う方向とは異なる。このため、締付けにより生じる力は、受圧ダイアフラム１９にこれを変形させるように作用することはない。
したがって、この実施の形態を採ることにより、ベース部１４をセンサ用取付座５に取付ける際の影響をより一層受け難くなる。 In this case, the connecting portion 16 is pulled by the base portion 14 in the direction in which the connecting portion 16 expands outward in the radial direction. The direction of the force pulling the connection portion 16, in other words, the direction of the force transmitted from the connection portion 16 to the housing 18 so as to deform the housing 18, is different from the direction along the surface of the pressure receiving diaphragm 19. Therefore, the force generated by the tightening does not act on the pressure receiving diaphragm 19 to deform it.
Therefore, by adopting this embodiment, it becomes more difficult to be affected when the base portion 14 is attached to the sensor mounting seat 5.

（接続部の変形例）
図４および図５に示すように圧力室部１７を配置する場合、接続部１６を図６に示すように構成することができる。図６において、図１、図４および図５によって説明したものと同一もしくは同等の部材については、同一符号を付し詳細な説明を適宜省略する。図６に示す圧力センサは、請求項６に記載した発明を適用したものである。 (Modification example of connection part)
When the pressure chamber portion 17 is arranged as shown in FIGS. 4 and 5, the connecting portion 16 can be configured as shown in FIG. In FIG. 6, the same or equivalent members as those described with reference to FIGS. 1, 4 and 5 are designated by the same reference numerals and detailed description thereof will be omitted as appropriate. The pressure sensor shown in FIG. 6 is the one to which the invention described in claim 6 is applied.

図６に示す圧力センサ６１の接続部１６は、ベース部１４からセンサ用取付座５とは反対方向に延びる基部６２と、基部６２の先端からベース部１４のシール面１２ａに対して垂直となる方向に延びる突出側端部６３とを有している。突出側端部６３の先端は、中空の円板状を呈するハウジング１８の中心部に接続されている。
この実施の形態を採ることにより、ベース部１４の変形が圧力室部１７に殆ど伝達されなくなるから、ベース部１４をセンサ用取付座５に取付ける際の影響を殆ど受けることがない圧力センサを提供することができる。 The connection portion 16 of the pressure sensor 61 shown in FIG. 6 is perpendicular to the base portion 62 extending from the base portion 14 in the direction opposite to the sensor mounting seat 5 and the sealing surface 12a of the base portion 14 from the tip of the base portion 62. It has a protruding side end portion 63 extending in the direction. The tip of the protruding side end 63 is connected to the center of the housing 18 which has a hollow disk shape.
By adopting this embodiment, since the deformation of the base portion 14 is hardly transmitted to the pressure chamber portion 17, a pressure sensor that is hardly affected when the base portion 14 is attached to the sensor mounting seat 5 is provided. can do.

１，３１，４１，５１，６１…圧力センサ、３…被測定流体、５…センサ用取付座、６…導圧口、１１…シール部材、１２ａ…シール面、１３…センサ素子、１４…ベース部、１５…取付用ボルト（締結部材）、１６…接続部、１７…圧力室部、１９…受圧ダイアフラム、２０…圧力室、２１…圧力伝達用の液体、２２…導圧部、２３…通路孔、４４，５５…貫通孔、２４，４５，５６…導圧路、４６，５３…導圧孔、６３…突出側端部。 1,31,41,51,61 ... Pressure sensor, 3 ... Fluid to be measured, 5 ... Sensor mounting seat, 6 ... Pressure guiding port, 11 ... Seal member, 12a ... Seal surface, 13 ... Sensor element, 14 ... Base Section, 15 ... Mounting bolt (fastening member), 16 ... Connection section, 17 ... Pressure chamber section, 19 ... Pressure receiving diaphragm, 20 ... Pressure chamber, 21 ... Pressure transmission liquid, 22 ... Pressure guiding section, 23 ... Passage Holes, 44, 55 ... Through holes, 24, 45, 56 ... Pressure guiding paths, 46, 53 ... Pressure guiding holes, 63 ... Protruding side ends.

Claims (7)

被測定流体の圧力が伝達される導圧口を有するセンサ用取付座にシール部材を介して重ねて取付けられたベース部と、
前記ベース部に筒状の接続部を介して支持され、前記被測定流体の圧力を受ける受圧ダイアフラムが壁の一部となるように形成されて前記被測定流体とは仕切られた圧力室を含む圧力室部と、
前記圧力室部が一端に接続されるとともに他端に圧力検出用のセンサ素子が接続され、前記受圧ダイアフラムから前記センサ素子に圧力伝達用の液体によって圧力を伝達する導圧部とを備え、
前記接続部は、内部が前記被測定流体または前記圧力伝達用の液体で満たされて圧力を伝達する導圧路として機能し、
前記接続部の外径は、前記受圧ダイアフラムの外径より小さいことを特徴とする圧力センサ。 A base part mounted on a sensor mounting seat having a pressure guiding port through which the pressure of the fluid to be measured is transmitted via a seal member, and a base portion.
A pressure chamber supported by the base portion via a tubular connection portion and having a pressure receiving diaphragm that receives the pressure of the measured fluid is formed so as to be a part of a wall and is separated from the measured fluid. The pressure chamber and
The pressure chamber portion is connected to one end and a pressure detection sensor element is connected to the other end, and the pressure receiving diaphragm is provided with a pressure guiding portion for transmitting pressure from the pressure receiving diaphragm to the sensor element by a pressure transmitting liquid.
The connection portion is filled with the fluid under test or the liquid for pressure transmission, and functions as a pressure guiding path for transmitting pressure.
A pressure sensor characterized in that the outer diameter of the connection portion is smaller than the outer diameter of the pressure receiving diaphragm. 請求項１記載の圧力センサにおいて、
前記圧力室部は、前記受圧ダイアフラムが前記導圧口内の前記被測定流体から圧力を受けるように前記導圧口の中に配置され、
前記接続部は、前記ベース部における前記センサ用取付座と対向するシール面から前記センサ用取付座に向けて突出するように形成され、
前記センサ素子は、前記ベース部に支持され、
前記導圧部は、前記圧力室部および前記接続部の内部と、前記接続部から前記センサ素子まで延びるように前記ベース部内に形成された通路孔とを満たす前記圧力伝達用の液体によって圧力が伝達されるように構成されていることを特徴とする圧力センサ。 In the pressure sensor according to claim 1,
The pressure chamber portion is arranged in the pressure guiding port so that the pressure receiving diaphragm receives pressure from the fluid to be measured in the pressure guiding port.
The connection portion is formed so as to project from the seal surface of the base portion facing the sensor mounting seat toward the sensor mounting seat.
The sensor element is supported by the base portion and is supported by the base portion.
The pressure guiding portion is pressured by the pressure transmitting liquid that fills the inside of the pressure chamber portion and the connecting portion and the passage hole formed in the base portion so as to extend from the connecting portion to the sensor element. A pressure sensor characterized by being configured to be transmitted. 請求項２記載の圧力センサにおいて、
前記接続部は、前記ベース部に一体に形成されていることを特徴とする圧力センサ。 In the pressure sensor according to claim 2,
The pressure sensor is characterized in that the connection portion is integrally formed with the base portion. 請求項２記載の圧力センサにおいて、
前記接続部は、前記ベース部とは別体に形成され、前記ベース部に固着されていることを特徴とする圧力センサ。 In the pressure sensor according to claim 2,
A pressure sensor characterized in that the connection portion is formed separately from the base portion and is fixed to the base portion. 請求項１記載の圧力センサにおいて、
前記圧力室部は、前記ベース部に対して前記センサ用取付座とは反対側に配置され、
前記接続部は、前記ベース部から前記センサ用取付座とは反対方向に突出するように形成され、
前記センサ素子は、前記圧力室部に支持され、
前記導圧部は、前記圧力室部の壁を貫通する貫通孔を含む導圧路によって圧力が伝達されるように構成され、
前記ベース部は、前記センサ用取付座と対向するシール面から前記接続部に延びる導圧孔を有し、
前記被測定流体の圧力が前記導圧孔と前記接続部の内部とを介して前記受圧ダイアフラムに伝達されることを特徴とする圧力センサ。 In the pressure sensor according to claim 1,
The pressure chamber portion is arranged on the side opposite to the sensor mounting seat with respect to the base portion.
The connection portion is formed so as to project from the base portion in the direction opposite to the sensor mounting seat.
The sensor element is supported by the pressure chamber portion and is supported by the pressure chamber portion.
The pressure guiding portion is configured to transmit pressure by a pressure guiding path including a through hole penetrating the wall of the pressure chamber portion.
The base portion has a pressure guiding hole extending from a sealing surface facing the sensor mounting seat to the connecting portion.
A pressure sensor characterized in that the pressure of the fluid to be measured is transmitted to the pressure receiving diaphragm via the pressure guiding hole and the inside of the connecting portion. 請求項５記載の圧力センサにおいて、
前記受圧ダイアフラムが前記シール面に対して垂直となるように構成されていることを特徴とする圧力センサ。 In the pressure sensor according to claim 5,
A pressure sensor characterized in that the pressure receiving diaphragm is configured to be perpendicular to the sealing surface. 請求項６記載の圧力センサにおいて、
前記接続部の突出側端部が前記シール面に対して垂直となる方向に延びるように形成されて前記圧力室部に接続されていることを特徴とする圧力センサ。 In the pressure sensor according to claim 6,
A pressure sensor characterized in that a protruding side end portion of the connecting portion is formed so as to extend in a direction perpendicular to the sealing surface and is connected to the pressure chamber portion.
JP2020121856A 2020-07-16 2020-07-16 Pressure sensor Pending JP2022018624A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2020121856A JP2022018624A (en) 2020-07-16 2020-07-16 Pressure sensor
KR1020210080066A KR20220009871A (en) 2020-07-16 2021-06-21 Pressure sensor
CN202110746466.6A CN113945318A (en) 2020-07-16 2021-07-01 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020121856A JP2022018624A (en) 2020-07-16 2020-07-16 Pressure sensor

Publications (1)

Publication Number Publication Date
JP2022018624A true JP2022018624A (en) 2022-01-27

Family

ID=79327582

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020121856A Pending JP2022018624A (en) 2020-07-16 2020-07-16 Pressure sensor

Country Status (3)

Country Link
JP (1) JP2022018624A (en)
KR (1) KR20220009871A (en)
CN (1) CN113945318A (en)

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3158913B2 (en) * 1994-12-26 2001-04-23 横河電機株式会社 Differential pressure / pressure transmitter
US6675655B2 (en) 2002-03-21 2004-01-13 Rosemount Inc. Pressure transmitter with process coupling
JP5427113B2 (en) 2010-06-01 2014-02-26 長野計器株式会社 Pressure detection device
DE102013114407A1 (en) * 2013-12-18 2015-06-18 Endress + Hauser Gmbh + Co. Kg pressure sensor
KR101583711B1 (en) * 2014-07-30 2016-01-11 세종공업 주식회사 Pressure sensor having diaphragm
KR101959150B1 (en) * 2014-10-07 2019-03-15 히타치 긴조쿠 가부시키가이샤 Pressure sensor, differential pressure sensor, and mass flow rate control device using same
JP2017116457A (en) * 2015-12-25 2017-06-29 アズビル株式会社 Pressure sensor
DE102016115197A1 (en) * 2016-08-16 2018-02-22 Endress + Hauser Gmbh + Co. Kg Packing for reducing a volume of a pressure measuring chamber

Also Published As

Publication number Publication date
CN113945318A (en) 2022-01-18
KR20220009871A (en) 2022-01-25

Similar Documents

Publication Publication Date Title
US7627943B2 (en) Method of manufacturing a pressure sensor
EP3128305B1 (en) A hermetic pressure sensor
JP5926858B2 (en) Pressure detector mounting structure
JP6106004B2 (en) Pressure sensor
JP2001296198A (en) Pressure sensor
US9316551B2 (en) Torque insensitive header assembly
JP2022018624A (en) Pressure sensor
JP6480375B2 (en) Pressure sensor
JPH0445062B2 (en)
KR20160086337A (en) Pressure sensor arrangement for detecting a pressure of a fluid medium in a measurement chamber
JP3314538B2 (en) Differential pressure transmitter
JP2005037400A (en) Sensor system
KR20180088938A (en) Pressure sensor and manufacturing thereof
JP2022034154A (en) Pressure sensor
JP2007010479A (en) Pressure detection device
JPH05346363A (en) Difference pressure transmitter
JPH07311109A (en) Differential sensor
JPH0943082A (en) Balanced differential pressure transmitter
JP2009192288A (en) Differential pressure/pressure transmitter and method for manufacturing the same
JP2022034156A (en) Pressure sensor
US8915141B2 (en) Pressure sensor having a connection housing and a sensor housing
JPH0534550U (en) Pressure sensor
JPH09189634A (en) Differential pressure and pressure transmitter
JPH08271367A (en) Pressure sensor
JPH05196529A (en) Differential pressure transmitter