JP2020537341A - 半導体デバイスにおけるプレモールドリードフレーム - Google Patents
半導体デバイスにおけるプレモールドリードフレーム Download PDFInfo
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- JP2020537341A JP2020537341A JP2020519681A JP2020519681A JP2020537341A JP 2020537341 A JP2020537341 A JP 2020537341A JP 2020519681 A JP2020519681 A JP 2020519681A JP 2020519681 A JP2020519681 A JP 2020519681A JP 2020537341 A JP2020537341 A JP 2020537341A
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- openings
- lead frame
- bumps
- metal strip
- semiconductor package
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- H01L2924/19103—Disposition of discrete passive components in a stacked assembly with the semiconductor or solid state device interposed between the semiconductor or solid-state device and the die mounting substrate, i.e. chip-on-passive
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/36—Material effects
- H01L2924/365—Metallurgical effects
- H01L2924/3656—Formation of Kirkendall voids
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- Condensed Matter Physics & Semiconductors (AREA)
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- Lead Frames For Integrated Circuits (AREA)
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Abstract
Description
Claims (26)
- 半導体パッケージを形成するための方法であって、
前記半導体パッケージのためのリードフレームを形成することを含み、
前記リードフレームを形成することが、
第1の側、及び前記第1の側とは反対側の第2の側を有する金属ストリップを提供することと、
第1の複数のチャネルを形成するため、切断パターンに従って前記金属ストリップの前記第1の側を深さD1まで切断することであって、前記深さD1が前記金属ストリップの高さHより小さい、前記第1の側を切断することと、
第2の複数のチャネルを形成するため、フォトレジストパターンに従って前記金属ストリップの前記第2の側を深さD2までエッチングすることであって、前記深さD2が前記金属ストリップの前記高さHより浅く、前記高さHが前記金属ストリップの前記第1の側と前記第2の側との間である、前記第2の側をエッチングすることと、
前記第2の複数のチャネルにプレモールド化合物を挿入することであって、
前記リードフレーム上に複数のリードを形成するため、前記第1の複数のチャネルが、前記第2の複数のチャネルにおける前記プレモールド化合物まで、又は、少なくとも部分的に前記プレモールド化合物へ延在し、
前記第1の複数のチャネルの少なくとも幾つかが、前記第2の複数のチャネルの少なくとも幾つかと流体連通する、
前記プレモールド化合物を挿入することと、
半導体ダイと前記リードフレームの複数のリード上の複数のバンプランディングサイトとの間で複数のバンプを結合することであって、前記複数のリードの少なくとも1つに沿う端部から見たとき、前記複数のバンプの少なくとも幾つかが重なり合って見える、前記複数のバンプを結合することと、
前記半導体パッケージを形成するため、前記半導体ダイの少なくとも一部及び前記リードフレームの少なくとも一部をモールディング化合物で覆うことと、
を含む、方法。 - 請求項1に記載の方法であって、前記金属ストリップの前記第1の側を前記切断することが、レーザ、精密ウォータージェット、又はプラズマカッターを用いることを含む、方法。
- 請求項1に記載の方法であって、前記プレモールド化合物を前記第2の複数のチャネルに挿入することが、前記第2の複数のチャネルを前記プレモールド化合物で実質的に充填することを含む、方法。
- 請求項1に記載の方法であって、前記切断パターンが前記フォトレジストパターンと少なくとも部分的に整合され、前記金属ストリップの前記第1の側を前記切断することが、前記高さHの少なくとも50%が前記金属ストリップの前記第2の側からエッチングされた場所と整合される、方法。
- 請求項1に記載の方法であって、前記第2の側から前記エッチングすることが、前記金属ストリップの前記高さHの50〜80%が除去されるまで継続される、方法。
- 請求項1に記載の方法であって、前記金属ストリップの前記第1の側を前記切断することが、50ミクロンより小さい横方向の幅W1を有する切り込みを形成することを含む、方法。
- 請求項1に記載の方法であって、前記プレモールド化合物がエポキシ樹脂を含む、方法。
- 請求項1に記載の方法であって、前記金属ストリップの一部を第1の方向及び第2の方向に分離して1つ又は複数のアイランドを形成するように、前記金属ストリップを切断することをさらに含む、方法。
- 請求項1に記載の方法であって、前記切断パターンが非線形である、方法。
- 請求項9に記載の方法であって、前記フォトレジストパターンが実質的に線形である、方法。
- 半導体パッケージを形成する方法であって、
前記半導体パッケージのためのリードフレームを形成することを含み、
前記リードフレームを形成することが、
第1の側、及び前記第1の側の反対側にある第2の側を有する金属ストリップを提供することであって、前記金属ストリップが前記第1の側と前記第2の側との間の高さHを有する、前記金属ストリップを提供することと、
第1の複数の開口を形成するため、切断パターンに従って前記金属ストリップの前記第1の側を深さD1まで切断することであって、前記深さD1が前記高さHより小さい、前記第1の側を切断することと、
前記金属ストリップの前記第2の側にフォトレジストを適用することと、
第2の複数の開口を形成するため、フォトレジストパターンに従って前記金属ストリップの前記第2の側に化学エッチングを適用することであって、前記第2の複数の開口の深さD2が前記金属ストリップの前記高さHより小さい、前記第2の側に化学エッチングを適用することと、
前記金属ストリップの前記第2の側から前記フォトレジストを除去することと、
前記第2の複数の開口内に絶縁材料を適用することであって、
前記リードフレームに複数のリードを形成するため、前記第1の複数の開口が前記第2の複数の開口内に延在する、前記絶縁材料を適用することと、
半導体ダイと前記リードフレームの複数のリード上の複数のバンプランディングサイトとの間で複数のバンプを結合することであって、前記複数のリードが前記絶縁材料によって少なくとも部分的に支持される、前記複数のバンプを結合することと、
前記半導体パッケージを形成するため、前記半導体ダイの少なくとも一部及び前記リードフレームの少なくとも一部をモールディング化合物で覆うことと、
を含む、方法。 - 請求項11に記載の方法であって、前記複数のリードの少なくとも1つに沿う端部から見たとき、前記複数のバンプの少なくとも幾つかが重なり合って見える、方法。
- 請求項11に記載の方法であって、前記化学エッチングが、前記第2の複数の開口の前記深さD2が前記金属ストリップの前記高さHの50〜80%になるまで適用される、方法。
- 請求項11に記載の方法であって、前記金属ストリップの前記第1の側を切断することが、レーザ、精密ウォータージェット、又はプラズマカッターを用いることを含む、方法。
- 請求項11に記載の方法であって、前記絶縁材料を前記第2の複数の開口に挿入することが、前記第2の複数の開口を前記絶縁材料で実質的に充填することを含む、方法。
- 請求項11に記載の方法であって、前記金属ストリップの前記第1の側を切断することが、50ミクロンより小さい横方向の幅W1を有する切断を形成することを含む、方法。
- 請求項11に記載の方法であって、前記絶縁材料がモールディング化合物である、方法。
- 請求項11に記載の方法であって、前記第1の側を切断することが、前記金属ストリップの一部を完全に分離して絶縁アイランドにすること含む、方法。
- 請求項1に記載の方法であって、前記切断パターンが非線形である、方法。
- 半導体パッケージであって、
第1の側及び前記第1の側とは反対側の第2の側を有する金属リードフレームを含み、
前記金属リードフレームが、
前記第1の側から前記リードフレーム内に部分的に延在し、横方向の幅W1を有する第1の複数の開口と、
前記第2の側から前記リードフレーム内に部分的に延在する第2の複数の開口であって、前記第2の複数の開口が前記幅W1より大きい横方向の幅W2を有し、前記第1の複数の開口が前記第2の複数の開口と交差して前記リードフレームに複数のリードを形成する、前記第2の複数の開口と、
前記第2の複数の開口内に配置される絶縁材料であって、前記複数のリードを少なくとも部分的に支持する、前記絶縁材料と、
前記リードフレームの前記第1の側の前記第1の複数の開口間の複数のランディングサイトと、
前記ランディングサイトから半導体ダイまで延在する複数のバンプと、
前記複数のバンプ及び前記金属リードフレームを少なくとも部分的に覆うモールディング化合物と、
を含む半導体パッケージ。 - 請求項20に記載の半導体パッケージであって、前記絶縁材料が前記第2の複数の開口を実質的に充填する、半導体パッケージ。
- 請求項20に記載の半導体パッケージであって、前記第1の複数の開口が非線形であり、前記第2の複数の開口が線形である、半導体パッケージ。
- 請求項20に記載の半導体パッケージであって、少なくとも1つの軸に沿う端部から見たとき、前記複数のバンプの幾つかが前記複数のバンプの他のバンプと重なり合う、半導体パッケージ。
- 請求項20に記載の半導体パッケージであって、前記複数のバンプの各々が、前記複数のバンプの各バンプの長手方向軸に沿って前記リードフレームから離れるにつれて先細りとなっている、半導体パッケージ。
- 請求項20に記載の半導体パッケージであって、前記第2の複数の開口の深さD2が前記金属リードフレームの深さD3の50〜80%であり、前記深さD3が前記リードフレームの前記第1の側から前記リードフレームの前記第2の側までの距離である、半導体パッケージ。
- 請求項20に記載の半導体パッケージであって、前記リードフレームの一部を完全に分離するように、前記第1の複数の開口及び前記第2の複数の開口が整合される、半導体パッケージ。
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CN204992803U (zh) * | 2015-09-01 | 2016-01-20 | 德昌电机(深圳)有限公司 | 单相永磁电机及其定子磁芯 |
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2018
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EP3692574A1 (en) | 2020-08-12 |
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US11444048B2 (en) | 2022-09-13 |
US11152322B2 (en) | 2021-10-19 |
WO2019070995A1 (en) | 2019-04-11 |
US20220037277A1 (en) | 2022-02-03 |
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US20190109110A1 (en) | 2019-04-11 |
US20210210453A1 (en) | 2021-07-08 |
CN111357098A (zh) | 2020-06-30 |
EP3692574A4 (en) | 2020-12-02 |
CN111295748A (zh) | 2020-06-16 |
JP2020537340A (ja) | 2020-12-17 |
EP3692569A4 (en) | 2020-12-09 |
JP7197849B2 (ja) | 2022-12-28 |
WO2019071072A1 (en) | 2019-04-11 |
US10957666B2 (en) | 2021-03-23 |
US20190109016A1 (en) | 2019-04-11 |
JP2020537342A (ja) | 2020-12-17 |
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