JP2020527781A - 高分子膜の分析方法 - Google Patents
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Abstract
Description
本出願は、2017年7月14日に出願された大韓民国特許出願第10−2017−0089864号に基づく優先権の利益を主張し、該当大韓民国特許出願の文献に開示されたすべての内容は本明細書の一部として組み込まれる。
本出願は、高分子膜の分析方法に関する。
トレンチ基板は、下記の方式で製造した。基板としては、シリコンウェハが適用された。前記基板上に公知の蒸着方式でSiOの層を約200nm程度の厚さで形成した。その後、上記のSiOの層上にBARC(bottom anti reflective coating)を約60nm程度の厚さでコーティングし、更にその上部にPR(photoresist、KrF用、positive−tone resist)層を約400nm程度の厚さでコーティングした。その後、前記PR層をKrFステッパー(stepper)露光方式でパターン化した。その後、RIE(re active ion etching)方式で前記パターン化されたPR層をマスクとして、その下部のBARC層とSiO層をエッチングし、残余物を除去することでトレンチ構造を形成した。
実施例1で言及された方法で製作されたトレンチ内部に、化合物(DPMC12)とペンタフルオロスチレンのブロック共重合体をトルエン(toluene)に1.5重量%の固形分濃度で希釈して製造したコーティング液をスピンコーティングし、常温で約1時間の間乾燥した後に、更に約160〜250℃の温度で約1時間の間熱的熟成(thermal annealing)して自己組織化された膜を形成した。
前記図1のイメージにブラーリング処理を行えず、フーリエ変換された図2のイメージに対する積分を行ったこと以外は、実施例1と同一の条件で実験を行った。図7は、図2のイメージを画像解釈ソフトウェア(アメリカ国立衛生研究所[NIH]オープンソース、[Image J])を用いて0゜〜360゜の範囲で半径方向積分を行った結果を示す。図7から分かるように、ブラーリング処理をしないイメージを変換した結果、ピークが形成されなかった。これは基板上に形成されたトレンチ構造とブロック共重合体の自己組織化構造が形成している垂直配向されたラメラ構造が同じ方向に整列されているから発生するノイズによることで、垂直配向されたラメラ構造のピッチを計算することができない結果を示す。
前記図8のイメージにブラーリング処理を行えず、フーリエ変換された図9のイメージに対する積分を行ったこと以外は、実施例2と同一の条件で実験を行った。図14は、図9のイメージを画像解釈ソフトウェア(アメリカ国立衛生研究所[NIH]オープンソース、[Image J])を用いて0゜〜360゜の範囲で半径方向積分を行った結果を示す。図14から分かるように、ブラーリング処理をしないイメージを変換した結果、ピークが形成されなかった。これは基板上に形成されたトレンチ構造とブロック共重合体の自己組織化構造が形成している垂直配向されたラメラ構造が同じ方向に整列されているから発生するノイズによることで、垂直配向されたラメラ構造のピッチを計算することができない結果を示す。
Claims (8)
- 一定間隔に配置されたトレンチ内に形成されており、
自己組織化されたブロック共重合体を有する高分子膜の原本イメージをブラーリングするステップを含む、
高分子膜の分析方法。 - 原本イメージ及びブラーリング処理されたイメージをフーリエ変換するステップをさらに含む、
請求項1に記載の高分子膜の分析方法。 - フーリエ変換によって生成されたイメージからノイズを除去するステップをさらに含む、
請求項2に記載の高分子膜の分析方法。 - ノイズを除去するステップは、原本イメージのフーリエ変換結果及びブラーリング処理されたイメージのフーリエ変換結果の重畳される範囲を除去するステップである、
請求項3に記載の高分子膜の分析方法。 - ノイズが除去された原本イメージのフーリエ変換された結果から高分子膜の表面に形成されたパターンのピッチを測定するステップをさらに含む、
請求項3または4に記載の高分子膜の分析方法。 - ピッチを測定するステップは、フーリエ変換された高分子膜のイメージを0゜〜360゜の範囲で半径方向積分して形成されたピークを測定するステップである、
請求項5に記載の高分子膜の分析方法。 - ブロック共重合体の自己組織化構造は、シリンダー、スフィア又はラメラ構造である、
請求項1から6のいずれか1項に記載の高分子膜の分析方法。 - 高分子膜の原本イメージは、走査電子顕微鏡(SEM)、原子間力顕微鏡(AFM)又は透過電子顕微鏡(TEM)を通じて収得されたイメージである、
請求項1から7のいずれか1項に記載の高分子膜の分析方法。
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KR10-2017-0089864 | 2017-07-14 | ||
KR1020170089864A KR102176230B1 (ko) | 2017-07-14 | 2017-07-14 | 고분자 막의 분석 방법 |
PCT/KR2018/008019 WO2019013603A1 (ko) | 2017-07-14 | 2018-07-16 | 고분자 막의 분석 방법 |
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CN110785665A (zh) | 2020-02-11 |
EP3637366A4 (en) | 2020-07-08 |
JP6874948B2 (ja) | 2021-05-19 |
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CN110785665B (zh) | 2022-05-10 |
EP3637366A1 (en) | 2020-04-15 |
US11145049B2 (en) | 2021-10-12 |
US20200402224A1 (en) | 2020-12-24 |
KR102176230B1 (ko) | 2020-11-09 |
WO2019013603A1 (ko) | 2019-01-17 |
EP3637366B1 (en) | 2022-05-25 |
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