JP2020191450A - エッジパージを用いる基材サセプタ - Google Patents
エッジパージを用いる基材サセプタ Download PDFInfo
- Publication number
- JP2020191450A JP2020191450A JP2020087134A JP2020087134A JP2020191450A JP 2020191450 A JP2020191450 A JP 2020191450A JP 2020087134 A JP2020087134 A JP 2020087134A JP 2020087134 A JP2020087134 A JP 2020087134A JP 2020191450 A JP2020191450 A JP 2020191450A
- Authority
- JP
- Japan
- Prior art keywords
- workpiece
- susceptor body
- susceptor
- radial
- contact zone
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010926 purge Methods 0.000 title claims description 103
- 239000000758 substrate Substances 0.000 title abstract description 25
- 238000006243 chemical reaction Methods 0.000 claims abstract description 47
- 238000012545 processing Methods 0.000 claims abstract description 35
- 239000007789 gas Substances 0.000 claims description 69
- 238000000034 method Methods 0.000 claims description 60
- 239000012530 fluid Substances 0.000 claims description 38
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 32
- 238000004891 communication Methods 0.000 claims description 17
- 239000011261 inert gas Substances 0.000 claims description 15
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 8
- 239000001257 hydrogen Substances 0.000 claims description 8
- 229910052739 hydrogen Inorganic materials 0.000 claims description 8
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 4
- 230000008021 deposition Effects 0.000 abstract description 9
- 230000003993 interaction Effects 0.000 abstract description 2
- 239000000126 substance Substances 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 description 19
- 230000008569 process Effects 0.000 description 16
- 239000000376 reactant Substances 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 10
- 238000000151 deposition Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 230000008901 benefit Effects 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 238000000926 separation method Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052750 molybdenum Inorganic materials 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000003908 quality control method Methods 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000004146 energy storage Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- XJDNKRIXUMDJCW-UHFFFAOYSA-J titanium tetrachloride Chemical compound Cl[Ti](Cl)(Cl)Cl XJDNKRIXUMDJCW-UHFFFAOYSA-J 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 239000012636 effector Substances 0.000 description 1
- -1 etc.) Chemical compound 0.000 description 1
- 238000011010 flushing procedure Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910001510 metal chloride Inorganic materials 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 230000010399 physical interaction Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/6875—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a plurality of individual support members, e.g. support posts or protrusions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/005—Vacuum work holders
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45502—Flow conditions in reaction chamber
- C23C16/45504—Laminar flow
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/458—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for supporting substrates in the reaction chamber
- C23C16/4582—Rigid and flat substrates, e.g. plates or discs
- C23C16/4583—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally
- C23C16/4584—Rigid and flat substrates, e.g. plates or discs the substrate being supported substantially horizontally the substrate being rotated
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67248—Temperature monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68735—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by edge profile or support profile
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68792—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the construction of the shaft
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Fluid Mechanics (AREA)
- Chemical Vapour Deposition (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Description
本出願は、SUBSTRATE SUSCEPTOR USING EDGE PURGINGと題する2019年5月22日出願の米国仮特許出願第62/851414号の優先権を主張し、その全体が参照により本明細書に組み込まれる。本出願とともに提出された出願データシートにおいて外国または国内における優先権主張が特定される全ての出願は、米国特許法施行規則(37 CFR)1.57の下で参照により本明細書に組み込まれる。
半導体製造プロセスは、通常は、制御されたプロセス条件下でサセプタ上の反応チャンバー内に支持される基材を用いて行われる。多くのプロセスでは、半導体基材(例えば、ウェーハ)は反応チャンバー内で加熱される。基材とサセプタとの間の物理的な相互作用に関連するいくつかの品質管理の問題は、処理中に発生する可能性がある。
本態様および実施形態は、機能ブロック構成要素および様々な処理工程に関して説明されることができる。このような機能ブロックは、指定された機能を実行し様々な結果を達成するように構成される様々なハードウェアまたはソフトウェア構成要素によって実現されることができる。例えば、本態様は、様々な機能を実行することができる様々なセンサー、検出器、流量制御装置、ヒーターなどを使用することができる。さらに、本態様および実施形態は任意の数の処理方法と共に実施されることができ、記載の装置およびシステムは様々な処理方法を使用することができ、記載の装置およびシステムは本発明の用途の単なる実施例である。
Claims (20)
- ワークピースサセプタ本体であって、
ワークピースを支持するように構成される前面と、
前記前面の反対側の背面と、
前記前面の内側部分の周りに支持境界を少なくとも部分的に形成するワークピース接触ゾーンであって、前記ワークピース接触ゾーンは処理構成において、前記前面上に配置されるワークピースの外側のエッジの半径方向内側方向に配置されるように構成される、ワークピース接触ゾーンと、
前記サセプタ本体内に配置される一つまたは複数の軸方向チャネルであって、前記軸方向チャネルは前記前面の外側部分内へ延在する一つまたは複数の開口部に連結し、前記開口部のそれぞれは前記サセプタ本体の前記ワークピース接触ゾーンの半径方向外側方向に配置される、一つまたは複数の軸方向チャネルと、を備え、
前記ワークピース接触ゾーンは、前記面の前記外側部分よりも高い高さにあり、前記ワークピース接触ゾーンの半径方向外側方向に、および前記サセプタ本体の前記面と前記ワークピースとの間で軸方向にギャップを形成する、ワークピースサセプタ本体。 - 前記ワークピース接触ゾーンは前記前面から延在する周方向リブを備える、請求項1に記載のワークピースサセプタ本体。
- 前記ワークピースをさらに備える、請求項1に記載のワークピースサセプタ本体。
- 前記開口部から半径方向外側方向に配置されるワークピース保持部分をさらに備え、前記ワークピース保持部分は前記ワークピースの半径方向の移動を防止するように構成される、請求項1に記載のワークピースサセプタ本体。
- 前記ワークピース保持部分は、前記ワークピース接触ゾーンよりも高い高さに配置される、請求項4に記載のワークピースサセプタ本体。
- 前記軸方向チャネルは、前記ワークピースサセプタ本体および前記背面を通って延在する、請求項1に記載のワークピースサセプタ本体。
- 前記前面と前記背面との間に配置され、複数の軸方向チャネルのうちの少なくとも一つから延在して流体連通する複数の半径方向チャネルをさらに備える、請求項1に記載のワークピースサセプタ本体。
- 前記背面を支持するように構成されるペデスタルと、
前記ペデスタルを通って延在し、複数の半径方向チャネルのうちの少なくとも一つと流体連通するように構成される少なくとも一つの長手方向パージチャネルと、をさらに備える、請求項7のワークピースサセプタ本体。 - 前記前面の前記内側部分内へ延在する一つまたは複数の開口部をさらに備え、前記複数の開口部は真空と流体連通するように構成される、請求項8のワークピースサセプタ本体。
- 前記ペデスタルを通って延在し、前記複数の開口部のうちの少なくとも一つと流体連通するように構成される、少なくとも一つの長手方向真空チャネルをさらに備える、請求項9に記載のワークピースサセプタ本体。
- 前記前面内へ延在する複数の半径方向溝をさらに備え、前記複数の半径方向溝のそれぞれは、前記複数の開口部のうちの少なくとも一つと流体連通している、請求項10に記載のワークピースサセプタ本体。
- 前記複数の半径方向溝と流体連通する周方向溝をさらに備える、請求項11に記載のワークピースサセプタ本体。
- 前記周方向溝は前記前面上に内側真空領域を形成し、前記内側真空領域内の前記前面から延在する複数の突出部をさらに備える、請求項12に記載のワークピースサセプタ本体。
- 前記複数の半径方向チャネルは複数の半径方向流体チャネルを備え、前記複数の半径方向流体チャネルは、前記前面と前記背面との間に配置される少なくとも一つの半径方向熱電対チャネルをさらに備え、前記半径方向熱電対チャネルは熱電対を受け入れるように構成される、請求項7に記載のワークピースサセプタ本体。
- 前記複数の半径方向チャネルは、複数の半径方向流体チャネルを備え、前記前面と前記背面との間に配置される少なくとも一つの半径方向熱電対チャネルをさらに備え、前記ペデスタルを通って延在する少なくとも一つの長手方向熱電対チャネルをさらに備え、前記少なくとも一つの半径方向熱電対チャネルおよび長手方向熱電対チャネルは熱電対を受け入れるように構成される、請求項8に記載のワークピースサセプタ本体。
- ワークピースサセプタをパージする方法であって、前記方法は、
前記ワークピースの外側のエッジがワークピース接触ゾーンから半径方向外側方向に配置されるように、サセプタ本体の前面上のワークピース接触ゾーン上へワークピースを装填することと、
前記サセプタ本体の前記前面が反応チャンバーと流体連通し、前記サセプタ本体の背面が装填チャンバーと流体連通する処理構成にワークピースを配置することと、
前記反応チャンバー内に第1の圧力を提供することと、
前記サセプタ本体内の一つまたは複数のチャネルからギャップへパージガスを第2の圧力で、前記ワークピース接触ゾーンの半径方向外側方向に、およびサセプタプレートの前記前面と前記ワークピースとの間で軸方向に、前記反応チャンバーまで流すことにより、前記ワークピースの前記外側のエッジの裏面をパージすることであって、前記第2の圧力は前記第1の圧力よりも高い、パージすることと、を含む、方法。 - 前記ワークピースを前記ワークピース接触ゾーン上に装填することは、前記ワークピース接触ゾーンから半径方向外側方向に配置されるワークピース保持部分の半径方向内側方向に前記ワークピースを装填することを含み、前記ワークピース保持部分は前記ワークピースの半径方向の移動を防止するように構成される、請求項16に記載の方法。
- 前記ワークピースの前記外側のエッジの前記裏面をパージすることは、前記サセプタ本体内に配置される一つまたは複数の軸方向チャネルを通してパージガスを流すことを含み、前記軸方向チャネルは前記ワークピースサセプタ本体および前記裏面を通って延在する、請求項17に記載の方法。
- 前記パージガスは不活性ガスおよび反応性ガスを含む、請求項16に記載の方法。
- 前記不活性ガスはアルゴンを含み、前記反応性ガスは水素を含む、請求項19に記載の方法。
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11961756B2 (en) | 2019-01-17 | 2024-04-16 | Asm Ip Holding B.V. | Vented susceptor |
USD920936S1 (en) | 2019-01-17 | 2021-06-01 | Asm Ip Holding B.V. | Higher temperature vented susceptor |
US11404302B2 (en) | 2019-05-22 | 2022-08-02 | Asm Ip Holding B.V. | Substrate susceptor using edge purging |
US11764101B2 (en) | 2019-10-24 | 2023-09-19 | ASM IP Holding, B.V. | Susceptor for semiconductor substrate processing |
CN115142046B (zh) * | 2021-03-31 | 2024-03-12 | 中微半导体设备(上海)股份有限公司 | 基片承载组件、化学气相沉积设备及吹扫方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5792304A (en) * | 1993-09-16 | 1998-08-11 | Hitachi, Ltd. | Method of holding substrate and substrate holding system |
JP2007522681A (ja) * | 2004-02-13 | 2007-08-09 | エーエスエム アメリカ インコーポレイテッド | オートドーピングおよび裏面堆積を減少させるための基板支持システム |
JP2008198739A (ja) * | 2007-02-09 | 2008-08-28 | Tokyo Electron Ltd | 載置台構造、これを用いた処理装置及びこの装置の使用方法 |
JP2016122837A (ja) * | 2014-12-12 | 2016-07-07 | ラム リサーチ コーポレーションLam Research Corporation | キャリアリング構造及びこれを含むチャンバシステム |
JP2018026547A (ja) * | 2016-07-22 | 2018-02-15 | ラム リサーチ コーポレーションLam Research Corporation | ウエハエッジにおける方位角方向の厚さの均一性を向上させるためのポケット内ウエハのセンタリング |
US20180138074A1 (en) * | 2016-11-11 | 2018-05-17 | Samsung Electronics Co., Ltd. | Carrier ring and chemical vapor deposition apparatus including the same |
Family Cites Families (148)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3407783A (en) | 1964-08-31 | 1968-10-29 | Emil R. Capita | Vapor deposition apparatus |
US3549847A (en) | 1967-04-18 | 1970-12-22 | Gen Electric | Graphite susceptor |
JPS4930319B1 (ja) | 1969-08-29 | 1974-08-12 | ||
US3796182A (en) | 1971-12-16 | 1974-03-12 | Applied Materials Tech | Susceptor structure for chemical vapor deposition reactor |
US5242501A (en) | 1982-09-10 | 1993-09-07 | Lam Research Corporation | Susceptor in chemical vapor deposition reactors |
US4499354A (en) | 1982-10-06 | 1985-02-12 | General Instrument Corp. | Susceptor for radiant absorption heater system |
US4522149A (en) | 1983-11-21 | 1985-06-11 | General Instrument Corp. | Reactor and susceptor for chemical vapor deposition process |
US4560420A (en) | 1984-06-13 | 1985-12-24 | At&T Technologies, Inc. | Method for reducing temperature variations across a semiconductor wafer during heating |
JPS6169116A (ja) | 1984-09-13 | 1986-04-09 | Toshiba Ceramics Co Ltd | シリコンウエハ−の連続cvdコ−テイング用サセプター |
NL8602356A (nl) | 1985-10-07 | 1987-05-04 | Epsilon Ltd Partnership | Inrichting en werkwijze voor een axiaal symmetrische reactor voor het chemische uit damp neerslaan. |
US5200157A (en) | 1986-02-17 | 1993-04-06 | Toshiba Ceramics Co., Ltd. | Susceptor for vapor-growth deposition |
US5000113A (en) | 1986-12-19 | 1991-03-19 | Applied Materials, Inc. | Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process |
JPS63186422A (ja) | 1987-01-28 | 1988-08-02 | Tadahiro Omi | ウエハサセプタ装置 |
US4821674A (en) | 1987-03-31 | 1989-04-18 | Deboer Wiebe B | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
US5198034A (en) | 1987-03-31 | 1993-03-30 | Epsilon Technology, Inc. | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment |
US4978567A (en) | 1988-03-31 | 1990-12-18 | Materials Technology Corporation, Subsidiary Of The Carbon/Graphite Group, Inc. | Wafer holding fixture for chemical reaction processes in rapid thermal processing equipment and method for making same |
KR0155545B1 (ko) | 1988-06-27 | 1998-12-01 | 고다까 토시오 | 기판의 열처리 장치 |
US5306699A (en) | 1988-08-31 | 1994-04-26 | Superconductor Technologies, Inc. | Reactor vessel for manufacture of superconducting films |
US4986215A (en) | 1988-09-01 | 1991-01-22 | Kyushu Electronic Metal Co., Ltd. | Susceptor for vapor-phase growth system |
JPH0834187B2 (ja) | 1989-01-13 | 1996-03-29 | 東芝セラミックス株式会社 | サセプタ |
JP2731855B2 (ja) | 1989-02-14 | 1998-03-25 | アネルバ株式会社 | 減圧気相成長装置 |
US5156820A (en) | 1989-05-15 | 1992-10-20 | Rapro Technology, Inc. | Reaction chamber with controlled radiant energy heating and distributed reactant flow |
US5119540A (en) | 1990-07-24 | 1992-06-09 | Cree Research, Inc. | Apparatus for eliminating residual nitrogen contamination in epitaxial layers of silicon carbide and resulting product |
US4990374A (en) | 1989-11-28 | 1991-02-05 | Cvd Incorporated | Selective area chemical vapor deposition |
US5108792A (en) | 1990-03-09 | 1992-04-28 | Applied Materials, Inc. | Double-dome reactor for semiconductor processing |
EP0448346B1 (en) | 1990-03-19 | 1997-07-09 | Kabushiki Kaisha Toshiba | Vapor-phase deposition apparatus |
US5098198A (en) | 1990-04-19 | 1992-03-24 | Applied Materials, Inc. | Wafer heating and monitor module and method of operation |
US5094885A (en) | 1990-10-12 | 1992-03-10 | Genus, Inc. | Differential pressure cvd chuck |
JPH0410529A (ja) | 1990-04-27 | 1992-01-14 | Shin Etsu Handotai Co Ltd | サセプタ及びウエーハ自動脱着装置 |
US5071670A (en) | 1990-06-11 | 1991-12-10 | Kelly Michael A | Method for chemical vapor deposition under a single reactor vessel divided into separate reaction chambers each with its own depositing and exhausting means |
US5121531A (en) | 1990-07-06 | 1992-06-16 | Applied Materials, Inc. | Refractory susceptors for epitaxial deposition apparatus |
US5620525A (en) | 1990-07-16 | 1997-04-15 | Novellus Systems, Inc. | Apparatus for supporting a substrate and introducing gas flow doximate to an edge of the substrate |
US5044943A (en) | 1990-08-16 | 1991-09-03 | Applied Materials, Inc. | Spoked susceptor support for enhanced thermal uniformity of susceptor in semiconductor wafer processing apparatus |
US5298465A (en) | 1990-08-16 | 1994-03-29 | Applied Materials, Inc. | Plasma etching system |
US5304248A (en) | 1990-12-05 | 1994-04-19 | Applied Materials, Inc. | Passive shield for CVD wafer processing which provides frontside edge exclusion and prevents backside depositions |
US5356486A (en) | 1991-03-04 | 1994-10-18 | Applied Materials, Inc. | Combined wafer support and temperature monitoring device |
US5199483A (en) | 1991-05-15 | 1993-04-06 | Applied Materials, Inc. | Method and apparatus for cooling wafers |
US5393349A (en) | 1991-08-16 | 1995-02-28 | Tokyo Electron Sagami Kabushiki Kaisha | Semiconductor wafer processing apparatus |
US5332442A (en) | 1991-11-15 | 1994-07-26 | Tokyo Electron Kabushiki Kaisha | Surface processing apparatus |
US5455069A (en) | 1992-06-01 | 1995-10-03 | Motorola, Inc. | Method of improving layer uniformity in a CVD reactor |
US5370739A (en) | 1992-06-15 | 1994-12-06 | Materials Research Corporation | Rotating susceptor semiconductor wafer processing cluster tool module useful for tungsten CVD |
US5461214A (en) | 1992-06-15 | 1995-10-24 | Thermtec, Inc. | High performance horizontal diffusion furnace system |
US5308645A (en) | 1992-08-07 | 1994-05-03 | Delco Electronics Corporation | Method and apparatus for through hole substrate printing |
US5803977A (en) | 1992-09-30 | 1998-09-08 | Applied Materials, Inc. | Apparatus for full wafer deposition |
US5292554A (en) | 1992-11-12 | 1994-03-08 | Applied Materials, Inc. | Deposition apparatus using a perforated pumping plate |
US5343938A (en) | 1992-12-24 | 1994-09-06 | Vlsi Technology, Inc. | Method and apparatus for thermally insulating a wafer support |
EP0606751B1 (en) | 1993-01-13 | 2002-03-06 | Applied Materials, Inc. | Method for depositing polysilicon films having improved uniformity and apparatus therefor |
US5444217A (en) | 1993-01-21 | 1995-08-22 | Moore Epitaxial Inc. | Rapid thermal processing apparatus for processing semiconductor wafers |
DE59406900D1 (de) | 1993-02-08 | 1998-10-22 | Sez Semiconduct Equip Zubehoer | Träger für scheibenförmige Gegenstände |
US5421893A (en) | 1993-02-26 | 1995-06-06 | Applied Materials, Inc. | Susceptor drive and wafer displacement mechanism |
NL9300389A (nl) | 1993-03-04 | 1994-10-03 | Xycarb Bv | Substraatdrager. |
US5800686A (en) * | 1993-04-05 | 1998-09-01 | Applied Materials, Inc. | Chemical vapor deposition chamber with substrate edge protection |
US5738165A (en) | 1993-05-07 | 1998-04-14 | Nikon Corporation | Substrate holding apparatus |
JPH0711446A (ja) | 1993-05-27 | 1995-01-13 | Applied Materials Inc | 気相成長用サセプタ装置 |
DE69404397T2 (de) | 1993-07-13 | 1997-11-13 | Applied Materials Inc | Verbesserte Suszeptor Ausführung |
JPH0758039A (ja) | 1993-08-20 | 1995-03-03 | Toshiba Ceramics Co Ltd | サセプタ |
US5588827A (en) | 1993-12-17 | 1996-12-31 | Brooks Automation Inc. | Passive gas substrate thermal conditioning apparatus and method |
US5549756A (en) | 1994-02-02 | 1996-08-27 | Applied Materials, Inc. | Optical pyrometer for a thin film deposition system |
US5467220A (en) | 1994-02-18 | 1995-11-14 | Applied Materials, Inc. | Method and apparatus for improving semiconductor wafer surface temperature uniformity |
US5645646A (en) | 1994-02-25 | 1997-07-08 | Applied Materials, Inc. | Susceptor for deposition apparatus |
EP0669640A1 (en) | 1994-02-25 | 1995-08-30 | Applied Materials, Inc. | Susceptor for deposition apparatus |
JPH0878347A (ja) | 1994-09-06 | 1996-03-22 | Komatsu Electron Metals Co Ltd | エピタキシャル成長装置のサセプタ |
US5514439A (en) | 1994-10-14 | 1996-05-07 | Sibley; Thomas | Wafer support fixtures for rapid thermal processing |
US5558717A (en) | 1994-11-30 | 1996-09-24 | Applied Materials | CVD Processing chamber |
NL9500614A (nl) | 1995-03-30 | 1996-11-01 | Helpman Intellectual Propertie | Warmtewisselaar. |
JP3028462B2 (ja) | 1995-05-12 | 2000-04-04 | 東京エレクトロン株式会社 | 熱処理装置 |
FR2735238B1 (fr) | 1995-06-09 | 1997-09-05 | Cis Bio Int | Utilisation d'un complexe phycobiliproteine-peptide de liaison en tant que traceur fluorescent |
US5700725A (en) | 1995-06-26 | 1997-12-23 | Lucent Technologies Inc. | Apparatus and method for making integrated circuits |
JPH0936049A (ja) | 1995-07-21 | 1997-02-07 | Mitsubishi Electric Corp | 気相成長装置およびこれによって製造された化合物半導体装置 |
US6093252A (en) | 1995-08-03 | 2000-07-25 | Asm America, Inc. | Process chamber with inner support |
JP3430277B2 (ja) | 1995-08-04 | 2003-07-28 | 東京エレクトロン株式会社 | 枚葉式の熱処理装置 |
US5551985A (en) | 1995-08-18 | 1996-09-03 | Torrex Equipment Corporation | Method and apparatus for cold wall chemical vapor deposition |
US6086680A (en) | 1995-08-22 | 2000-07-11 | Asm America, Inc. | Low-mass susceptor |
US6113702A (en) | 1995-09-01 | 2000-09-05 | Asm America, Inc. | Wafer support system |
JPH09181155A (ja) | 1995-09-29 | 1997-07-11 | Applied Materials Inc | 堆積装置のサセプタ |
US5584936A (en) | 1995-12-14 | 1996-12-17 | Cvd, Incorporated | Susceptor for semiconductor wafer processing |
US5895530A (en) | 1996-02-26 | 1999-04-20 | Applied Materials, Inc. | Method and apparatus for directing fluid through a semiconductor processing chamber |
US5656093A (en) | 1996-03-08 | 1997-08-12 | Applied Materials, Inc. | Wafer spacing mask for a substrate support chuck and method of fabricating same |
US5761023A (en) | 1996-04-25 | 1998-06-02 | Applied Materials, Inc. | Substrate support with pressure zones having reduced contact area and temperature feedback |
US6001183A (en) | 1996-06-10 | 1999-12-14 | Emcore Corporation | Wafer carriers for epitaxial growth processes |
US6395363B1 (en) | 1996-11-05 | 2002-05-28 | Applied Materials, Inc. | Sloped substrate support |
JPH10284360A (ja) | 1997-04-02 | 1998-10-23 | Hitachi Ltd | 基板温度制御装置及び方法 |
US6077357A (en) | 1997-05-29 | 2000-06-20 | Applied Materials, Inc. | Orientless wafer processing on an electrostatic chuck |
TW524873B (en) * | 1997-07-11 | 2003-03-21 | Applied Materials Inc | Improved substrate supporting apparatus and processing chamber |
US6090212A (en) | 1997-08-15 | 2000-07-18 | Micro C Technologies, Inc. | Substrate platform for a semiconductor substrate during rapid high temperature processing and method of supporting a substrate |
USD404370S (en) | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Cap for use in a semiconductor wafer heat processing apparatus |
US5960159A (en) | 1997-10-14 | 1999-09-28 | Kokusai Electric Co., Ltd. | Heat treatment of semiconductor wafers where upper heater directly heats upper wafer in its entirety and lower heater directly heats lower wafer in its entirety |
WO1999023276A1 (en) | 1997-11-03 | 1999-05-14 | Asm America, Inc. | Long life high temperature process chamber |
WO1999023691A2 (en) | 1997-11-03 | 1999-05-14 | Asm America, Inc. | Improved low mass wafer support system |
US6293749B1 (en) | 1997-11-21 | 2001-09-25 | Asm America, Inc. | Substrate transfer system for semiconductor processing equipment |
US6068441A (en) | 1997-11-21 | 2000-05-30 | Asm America, Inc. | Substrate transfer system for semiconductor processing equipment |
KR19990069084A (ko) | 1998-02-04 | 1999-09-06 | 윤종용 | 반도체소자 제조용 서셉터 |
KR100460338B1 (ko) | 1998-02-04 | 2005-01-17 | 삼성전자주식회사 | 반도체소자 제조용 서셉터 |
US6219219B1 (en) | 1998-09-30 | 2001-04-17 | Applied Materials, Inc. | Cathode assembly containing an electrostatic chuck for retaining a wafer in a semiconductor wafer processing system |
JP2000269310A (ja) | 1999-03-15 | 2000-09-29 | Toshiba Corp | 半導体ウェハ支持装置 |
US6331023B1 (en) | 2000-01-14 | 2001-12-18 | Asm America, Inc. | Gridded substrate transport spatula |
US7166165B2 (en) | 2000-04-06 | 2007-01-23 | Asm America, Inc. | Barrier coating for vitreous materials |
JP2002184843A (ja) | 2000-12-13 | 2002-06-28 | Sharp Corp | 半導体基板保持装置 |
US6634882B2 (en) | 2000-12-22 | 2003-10-21 | Asm America, Inc. | Susceptor pocket profile to improve process performance |
KR100389449B1 (ko) | 2001-06-26 | 2003-06-27 | 주성엔지니어링(주) | 대칭형 유로블럭을 가지는 진공판 |
JP2003124167A (ja) | 2001-10-10 | 2003-04-25 | Sumitomo Heavy Ind Ltd | ウエハ支持部材及びこれを用いる両頭研削装置 |
US7033445B2 (en) | 2001-12-27 | 2006-04-25 | Asm America, Inc. | Gridded susceptor |
US20030168174A1 (en) * | 2002-03-08 | 2003-09-11 | Foree Michael Todd | Gas cushion susceptor system |
US7704327B2 (en) | 2002-09-30 | 2010-04-27 | Applied Materials, Inc. | High temperature anneal with improved substrate support |
US7921802B2 (en) | 2002-12-09 | 2011-04-12 | Nxp B.V. | System and method for suppression of wafer temperature drift in cold-wall CVD systems |
USD496008S1 (en) | 2002-12-12 | 2004-09-14 | Tokyo Electron Limited | Exhaust ring for manufacturing semiconductors |
US6709267B1 (en) | 2002-12-27 | 2004-03-23 | Asm America, Inc. | Substrate holder with deep annular groove to prevent edge heat loss |
US8366830B2 (en) | 2003-03-04 | 2013-02-05 | Cree, Inc. | Susceptor apparatus for inverted type MOCVD reactor |
JP4058364B2 (ja) | 2003-03-18 | 2008-03-05 | 株式会社日立製作所 | 半導体製造装置 |
US20040229002A1 (en) | 2003-05-15 | 2004-11-18 | 3D Systems, Inc. | Stereolithographic seal and support structure for semiconductor wafer |
US20050092439A1 (en) | 2003-10-29 | 2005-05-05 | Keeton Tony J. | Low/high temperature substrate holder to reduce edge rolloff and backside damage |
USD525127S1 (en) | 2004-03-01 | 2006-07-18 | Kraft Foods Holdings, Inc. | Susceptor ring |
US20060005767A1 (en) | 2004-06-28 | 2006-01-12 | Applied Materials, Inc. | Chamber component having knurled surface |
JP2006228802A (ja) | 2005-02-15 | 2006-08-31 | Dainippon Screen Mfg Co Ltd | ウエハ端面保護装置 |
EP1772901B1 (en) | 2005-10-07 | 2012-07-25 | Rohm and Haas Electronic Materials, L.L.C. | Wafer holding article and method for semiconductor processing |
KR20070098025A (ko) | 2006-03-30 | 2007-10-05 | 삼성전자주식회사 | 반도체 소자 제조용 장비 |
US7602224B2 (en) | 2007-05-16 | 2009-10-13 | Hynix Semiconductor, Inc. | Semiconductor device having delay locked loop and method for driving the same |
US20090280248A1 (en) | 2008-05-06 | 2009-11-12 | Asm America, Inc. | Porous substrate holder with thinned portions |
US8394229B2 (en) | 2008-08-07 | 2013-03-12 | Asm America, Inc. | Susceptor ring |
USD600223S1 (en) | 2008-08-07 | 2009-09-15 | Ravinder Aggarwal | Susceptor ring |
US8801857B2 (en) | 2008-10-31 | 2014-08-12 | Asm America, Inc. | Self-centering susceptor ring assembly |
US20100107974A1 (en) | 2008-11-06 | 2010-05-06 | Asm America, Inc. | Substrate holder with varying density |
US8287648B2 (en) * | 2009-02-09 | 2012-10-16 | Asm America, Inc. | Method and apparatus for minimizing contamination in semiconductor processing chamber |
US10242890B2 (en) * | 2011-08-08 | 2019-03-26 | Applied Materials, Inc. | Substrate support with heater |
US11085112B2 (en) | 2011-10-28 | 2021-08-10 | Asm Ip Holding B.V. | Susceptor with ring to limit backside deposition |
WO2013143081A1 (en) * | 2012-03-28 | 2013-10-03 | Acm Research (Shanghai) Inc. | Vacuum chuck |
US9682398B2 (en) | 2012-03-30 | 2017-06-20 | Applied Materials, Inc. | Substrate processing system having susceptorless substrate support with enhanced substrate heating control |
USD743357S1 (en) | 2013-03-01 | 2015-11-17 | Asm Ip Holding B.V. | Susceptor |
US9633889B2 (en) * | 2013-03-06 | 2017-04-25 | Applied Materials, Inc. | Substrate support with integrated vacuum and edge purge conduits |
US10068791B2 (en) | 2013-03-08 | 2018-09-04 | Semiconductor Components Industries, Llc | Wafer susceptor for forming a semiconductor device and method therefor |
USD784276S1 (en) | 2013-08-06 | 2017-04-18 | Applied Materials, Inc. | Susceptor assembly |
US20160002778A1 (en) * | 2014-07-03 | 2016-01-07 | Applied Materials, Inc. | Substrate support with more uniform edge purge |
US10269614B2 (en) | 2014-11-12 | 2019-04-23 | Applied Materials, Inc. | Susceptor design to reduce edge thermal peak |
JP1547357S (ja) | 2015-07-27 | 2016-04-11 | ||
USD807481S1 (en) | 2016-04-08 | 2018-01-09 | Applied Materials, Inc. | Patterned heater pedestal |
JP1570747S (ja) | 2016-04-27 | 2018-02-19 | ||
JP1570748S (ja) | 2016-04-27 | 2018-02-19 | ||
US10876205B2 (en) | 2016-09-30 | 2020-12-29 | Asm Ip Holding B.V. | Reactant vaporizer and related systems and methods |
JP6766893B2 (ja) | 2017-02-02 | 2020-10-14 | 株式会社Sumco | リフトピン、該リフトピンを用いたエピタキシャル成長装置およびシリコンエピタキシャルウェーハの製造方法 |
JP1587815S (ja) | 2017-03-31 | 2017-10-10 | ||
USD830981S1 (en) | 2017-04-07 | 2018-10-16 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate processing apparatus |
US11018047B2 (en) | 2018-01-25 | 2021-05-25 | Asm Ip Holding B.V. | Hybrid lift pin |
USD864134S1 (en) | 2018-10-24 | 2019-10-22 | Asm Ip Holding B.V. | Susceptor |
USD920936S1 (en) | 2019-01-17 | 2021-06-01 | Asm Ip Holding B.V. | Higher temperature vented susceptor |
USD914620S1 (en) | 2019-01-17 | 2021-03-30 | Asm Ip Holding B.V. | Vented susceptor |
US11961756B2 (en) | 2019-01-17 | 2024-04-16 | Asm Ip Holding B.V. | Vented susceptor |
US11404302B2 (en) | 2019-05-22 | 2022-08-02 | Asm Ip Holding B.V. | Substrate susceptor using edge purging |
US11764101B2 (en) | 2019-10-24 | 2023-09-19 | ASM IP Holding, B.V. | Susceptor for semiconductor substrate processing |
-
2020
- 2020-05-15 US US16/875,088 patent/US11404302B2/en active Active
- 2020-05-15 TW TW109116162A patent/TW202110587A/zh unknown
- 2020-05-19 JP JP2020087134A patent/JP2020191450A/ja active Pending
- 2020-05-20 KR KR1020200060086A patent/KR20200135734A/ko not_active Application Discontinuation
- 2020-05-21 CN CN202010433169.1A patent/CN111979529A/zh active Pending
-
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- 2022-07-29 US US17/816,052 patent/US20220380895A1/en active Pending
-
2024
- 2024-01-12 JP JP2024003562A patent/JP2024054122A/ja active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5792304A (en) * | 1993-09-16 | 1998-08-11 | Hitachi, Ltd. | Method of holding substrate and substrate holding system |
JP2007522681A (ja) * | 2004-02-13 | 2007-08-09 | エーエスエム アメリカ インコーポレイテッド | オートドーピングおよび裏面堆積を減少させるための基板支持システム |
JP2008198739A (ja) * | 2007-02-09 | 2008-08-28 | Tokyo Electron Ltd | 載置台構造、これを用いた処理装置及びこの装置の使用方法 |
JP2016122837A (ja) * | 2014-12-12 | 2016-07-07 | ラム リサーチ コーポレーションLam Research Corporation | キャリアリング構造及びこれを含むチャンバシステム |
JP2018026547A (ja) * | 2016-07-22 | 2018-02-15 | ラム リサーチ コーポレーションLam Research Corporation | ウエハエッジにおける方位角方向の厚さの均一性を向上させるためのポケット内ウエハのセンタリング |
US20180138074A1 (en) * | 2016-11-11 | 2018-05-17 | Samsung Electronics Co., Ltd. | Carrier ring and chemical vapor deposition apparatus including the same |
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US11404302B2 (en) | 2022-08-02 |
JP2024054122A (ja) | 2024-04-16 |
KR20200135734A (ko) | 2020-12-03 |
CN111979529A (zh) | 2020-11-24 |
US20200373187A1 (en) | 2020-11-26 |
US20220380895A1 (en) | 2022-12-01 |
TW202110587A (zh) | 2021-03-16 |
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