JP2020188195A - 研削装置 - Google Patents
研削装置 Download PDFInfo
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- JP2020188195A JP2020188195A JP2019092862A JP2019092862A JP2020188195A JP 2020188195 A JP2020188195 A JP 2020188195A JP 2019092862 A JP2019092862 A JP 2019092862A JP 2019092862 A JP2019092862 A JP 2019092862A JP 2020188195 A JP2020188195 A JP 2020188195A
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- wafer
- suction
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- outer peripheral
- plate
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- 230000002093 peripheral effect Effects 0.000 claims abstract description 54
- 238000003825 pressing Methods 0.000 claims description 8
- 235000012431 wafers Nutrition 0.000 claims 12
- 238000012545 processing Methods 0.000 abstract description 18
- 238000012856 packing Methods 0.000 description 31
- 238000004891 communication Methods 0.000 description 16
- 230000003028 elevating effect Effects 0.000 description 14
- 238000004140 cleaning Methods 0.000 description 9
- 238000003860 storage Methods 0.000 description 8
- 238000005452 bending Methods 0.000 description 3
- 238000003672 processing method Methods 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000007665 sagging Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B19/00—Single-purpose machines or devices for particular grinding operations not covered by any other main group
- B24B19/22—Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/02—Frames; Beds; Carriages
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J11/00—Manipulators not otherwise provided for
- B25J11/0095—Manipulators transporting wafers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
- B25J15/0616—Gripping heads and other end effectors with vacuum or magnetic holding means with vacuum
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Robotics (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Dicing (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
Description
したがって、ウェーハが湾曲していても、仮置きテーブル上のウェーハを良好に保持し、チャックテーブルの保持面に適切に搬送することが可能となる。このため、本研削装置では、ウェーハを適切に搬送するために、ウェーハに対して湾曲を抑制するための加工を実施する必要がない。その結果、ウェーハの加工時間を短縮することが可能となる。
ウェーハWの表面Waは、図1においては下方を向いており、保護テープTが貼着されることによって保護されている。ウェーハWの裏面Wbは、研削加工が施される被加工面となる。
なお、本実施形態では、ウェーハWは、図3に示すように、裏面Wb側が凹むように湾曲しており、外周部分が反り上がっている。
位置合わせ手段63による位置合わせの際には、図3に示すように、第1エアバルブ64および第1吸引バルブ65の双方ともが閉じられている。
ホイールマウント73は、円板状に形成されており、スピンドル70の下端(先端)に固定されている。ホイールマウント73は、研削ホイール74を支持する。
また、制御手段3は、搬入機構31による、チャックテーブル30の保持面300に対するウェーハWの搬送処理を制御する。
図4に示すように、搬入機構31は、吸引面82を有する吸引パッド81、複数の外周吸引保持部89、吸引パッド81および外周吸引保持部89を支持するプレート83、プレート83を支持する支持部84、支持部84を有するアーム85、および、アーム85を昇降させる昇降手段86を備えている。
さらに、固定板94の上面とアーム85の下面85aとの間には、コイルバネ95が配設されている。コイルバネ95は、シャフト80の延びる方向、すなわち、吸引パッド81の吸引面82に垂直な方向に伸縮することが可能となっている。
その後、制御手段3は、昇降手段86を制御して、アーム85とともにプレート83を上昇させる。これにより、図6に示すように、ウェーハWが、仮置きテーブル61から離反される。
これにより、図8に示すように、固定板94の上面とアーム85の下面85aとの間に配されたコイルバネ95が収縮する。
そして、プレート83の下面83aに設けられた外周吸引保持部89および第1環状パッキン87が、ウェーハWの裏面Wbの反り上がった外周部分に接触するとともに、第2環状パッキン88が、保持面300におけるウェーハWよりも外側に接触する。
また、このとき、外周吸引保持部89は、ウェーハWに下方から押されて、外周吸引パッド89aがプレート83の下面83aに接近する。
31:搬入機構、3:制御手段、
80:シャフト、80a:貫通路、81:吸引パッド、89:外周吸引保持部、
83:プレート、87:第1環状パッキン、88:第2環状パッキン、
84:支持部、85:アーム、86:昇降手段、
96:連通路、96a:下面開口部、96c:空間、
97:開閉弁、97a:プレート接続路、97b:弁接続路、
30:チャックテーブル、300:保持面
S:環状空間、
W:ウェーハ
Claims (1)
- 表面における分割予定ラインによって区画された領域にデバイスが形成され、該表面にテープが貼着され、該分割予定ラインに沿って内部に改質層が形成され、裏面側が凹むように反ったウェーハを、該テープを介してチャックテーブルの保持面によって保持し、ウェーハの裏面を研削砥石によって研削する研削装置であって、
ウェーハを仮置きするための仮置きテーブルと、
該テープを介してウェーハを保持する保持面を有するチャックテーブルと、
該仮置きテーブルから該チャックテーブルにウェーハを搬送する搬送手段と、を少なくとも備え、
該搬送手段は、
ウェーハの裏面の中央部分を吸引保持する中央吸引保持部と、
該中央吸引保持部に吸引保持されたウェーハの外周部分を吸引保持する外周吸引保持部と、
該保持面に中央部分を接触させたウェーハの外周部分を該保持面に押し付けるリング状の押し付け部と、を備え、
該搬送手段が該仮置きテーブルからウェーハを吸引保持する際には、該中央吸引保持部と該外周吸引保持部とが吸引源に連通され、
該搬送手段が該チャックテーブルの該保持面にウェーハを搬送した際には、該中央吸引保持部と該外周吸引保持部とがエア供給源に連通されて吸引保持力を無くし、該押し付け部がウェーハの外周部分を該保持面に押し付け、該保持面が吸引源に連通され、
該保持面に吸引保持されたウェーハを研削砥石で研削する、研削装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019092862A JP7256685B2 (ja) | 2019-05-16 | 2019-05-16 | 研削装置 |
KR1020200050712A KR20200132692A (ko) | 2019-05-16 | 2020-04-27 | 연삭 장치 |
CN202010385633.4A CN111941213B (zh) | 2019-05-16 | 2020-05-09 | 磨削装置 |
TW109115700A TW202044365A (zh) | 2019-05-16 | 2020-05-12 | 研削裝置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019092862A JP7256685B2 (ja) | 2019-05-16 | 2019-05-16 | 研削装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020188195A true JP2020188195A (ja) | 2020-11-19 |
JP7256685B2 JP7256685B2 (ja) | 2023-04-12 |
Family
ID=73222504
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019092862A Active JP7256685B2 (ja) | 2019-05-16 | 2019-05-16 | 研削装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7256685B2 (ja) |
KR (1) | KR20200132692A (ja) |
CN (1) | CN111941213B (ja) |
TW (1) | TW202044365A (ja) |
Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001284434A (ja) * | 2000-03-29 | 2001-10-12 | Lintec Corp | 半導体ウェハの移載装置 |
JP2008270579A (ja) * | 2007-04-23 | 2008-11-06 | Nachi Fujikoshi Corp | 薄厚ウエハ搬送用吸着ハンド |
JP2009107097A (ja) * | 2007-10-31 | 2009-05-21 | Disco Abrasive Syst Ltd | 加工装置 |
JP2012191051A (ja) * | 2011-03-11 | 2012-10-04 | Fuji Electric Co Ltd | 半導体製造方法および半導体製造装置 |
JP2015098073A (ja) * | 2013-11-20 | 2015-05-28 | 株式会社ディスコ | 加工装置 |
US20150155196A1 (en) * | 2013-12-04 | 2015-06-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Transfer Module for Bowed Wafers |
JP2016004909A (ja) * | 2014-06-17 | 2016-01-12 | 株式会社ディスコ | 搬送装置 |
JP2016042500A (ja) * | 2014-08-14 | 2016-03-31 | 株式会社ディスコ | 搬送装置 |
JP2018074118A (ja) * | 2016-11-04 | 2018-05-10 | 株式会社東京精密 | ウエハの搬送保持装置 |
JP2018142615A (ja) * | 2017-02-27 | 2018-09-13 | 株式会社東京精密 | ウエハ搬送保持装置 |
JP2018176323A (ja) * | 2017-04-07 | 2018-11-15 | 株式会社ディスコ | 加工装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05315434A (ja) * | 1992-05-07 | 1993-11-26 | Nec Yamagata Ltd | 半導体ウェーハ保持具 |
JP2004153157A (ja) * | 2002-10-31 | 2004-05-27 | Seiko Epson Corp | 真空ピンセット及び半導体ウェハ搬送方法 |
JP4733934B2 (ja) | 2004-06-22 | 2011-07-27 | 株式会社ディスコ | ウエーハの加工方法 |
JP2011135026A (ja) * | 2009-11-27 | 2011-07-07 | Disco Abrasive Syst Ltd | ワークユニットの保持方法および保持機構 |
JP5846734B2 (ja) * | 2010-11-05 | 2016-01-20 | 株式会社ディスコ | 搬送装置 |
JP6008541B2 (ja) | 2012-04-02 | 2016-10-19 | 株式会社ディスコ | ウェーハの加工方法 |
JP6295154B2 (ja) | 2014-07-18 | 2018-03-14 | 株式会社ディスコ | ウェーハの分割方法 |
-
2019
- 2019-05-16 JP JP2019092862A patent/JP7256685B2/ja active Active
-
2020
- 2020-04-27 KR KR1020200050712A patent/KR20200132692A/ko unknown
- 2020-05-09 CN CN202010385633.4A patent/CN111941213B/zh active Active
- 2020-05-12 TW TW109115700A patent/TW202044365A/zh unknown
Patent Citations (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001284434A (ja) * | 2000-03-29 | 2001-10-12 | Lintec Corp | 半導体ウェハの移載装置 |
JP2008270579A (ja) * | 2007-04-23 | 2008-11-06 | Nachi Fujikoshi Corp | 薄厚ウエハ搬送用吸着ハンド |
JP2009107097A (ja) * | 2007-10-31 | 2009-05-21 | Disco Abrasive Syst Ltd | 加工装置 |
JP2012191051A (ja) * | 2011-03-11 | 2012-10-04 | Fuji Electric Co Ltd | 半導体製造方法および半導体製造装置 |
JP2015098073A (ja) * | 2013-11-20 | 2015-05-28 | 株式会社ディスコ | 加工装置 |
US20150155196A1 (en) * | 2013-12-04 | 2015-06-04 | Taiwan Semiconductor Manufacturing Co., Ltd. | Transfer Module for Bowed Wafers |
JP2016004909A (ja) * | 2014-06-17 | 2016-01-12 | 株式会社ディスコ | 搬送装置 |
JP2016042500A (ja) * | 2014-08-14 | 2016-03-31 | 株式会社ディスコ | 搬送装置 |
JP2018074118A (ja) * | 2016-11-04 | 2018-05-10 | 株式会社東京精密 | ウエハの搬送保持装置 |
JP2018142615A (ja) * | 2017-02-27 | 2018-09-13 | 株式会社東京精密 | ウエハ搬送保持装置 |
JP2018176323A (ja) * | 2017-04-07 | 2018-11-15 | 株式会社ディスコ | 加工装置 |
Also Published As
Publication number | Publication date |
---|---|
TW202044365A (zh) | 2020-12-01 |
KR20200132692A (ko) | 2020-11-25 |
JP7256685B2 (ja) | 2023-04-12 |
CN111941213B (zh) | 2024-02-13 |
CN111941213A (zh) | 2020-11-17 |
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