JP2020157172A - Nozzle, coating device and coating method as well as manufacturing method for member for display - Google Patents
Nozzle, coating device and coating method as well as manufacturing method for member for display Download PDFInfo
- Publication number
- JP2020157172A JP2020157172A JP2019055847A JP2019055847A JP2020157172A JP 2020157172 A JP2020157172 A JP 2020157172A JP 2019055847 A JP2019055847 A JP 2019055847A JP 2019055847 A JP2019055847 A JP 2019055847A JP 2020157172 A JP2020157172 A JP 2020157172A
- Authority
- JP
- Japan
- Prior art keywords
- coating
- nozzle
- coating liquid
- discharge port
- outflow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 289
- 239000011248 coating agent Substances 0.000 title claims abstract description 276
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000007788 liquid Substances 0.000 claims abstract description 122
- 238000011144 upstream manufacturing Methods 0.000 claims abstract description 27
- 239000000758 substrate Substances 0.000 claims description 72
- 239000000463 material Substances 0.000 claims description 53
- 238000000034 method Methods 0.000 claims description 7
- 125000006850 spacer group Chemical group 0.000 description 59
- 239000010408 film Substances 0.000 description 44
- 239000002585 base Substances 0.000 description 24
- 239000011324 bead Substances 0.000 description 10
- 229920001721 polyimide Polymers 0.000 description 10
- 239000000123 paper Substances 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 238000007599 discharging Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000003780 insertion Methods 0.000 description 3
- 230000037431 insertion Effects 0.000 description 3
- 230000009194 climbing Effects 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000001154 acute effect Effects 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
本発明は、金属、ガラス、フィルム、紙等の基材に、ストライプ状に塗布液を塗布してストライプ塗布膜を形成するノズル、塗布装置および塗布方法並びにディスプレイ用部材の製造方法の改良に関する。 The present invention relates to a nozzle, a coating device and a coating method for forming a striped coating film by applying a coating liquid in a stripe shape to a base material such as metal, glass, film or paper, and an improvement in a method for manufacturing a display member.
金属、ガラス、フィルム、紙等の基材に、塗布膜を所望の幅とピッチでストライプ状に多数形成するストライプ塗布膜形成方法が注目されている。そして、このストライプ塗布膜を簡便かつ精度よく形成する手段として、ストライプノズルが知られている（例えば、特許文献１、図２参照）。 Attention has been paid to a method for forming a striped coating film in which a large number of coating films are formed in stripes with a desired width and pitch on a base material such as metal, glass, film, or paper. A stripe nozzle is known as a means for forming the stripe coating film easily and accurately (see, for example, Patent Document 1 and FIG. 2).
このストライプノズルは、内部に塗布液が供給される流入流路と、ノズルの長手方向である塗布幅方向に延在するマニホールドと、塗布幅方向にストライプ塗布膜のピッチＬＲで設けられた複数の流出流路と、を備えている。そして、ノズルの外部には、各流出流路の流出側がノズル本体より基材側に突き出るように複数の突出部を備え、各突出部は流出側先端が平面に形成されており、該平面に吐出口が形成されている。流入流路に投入された塗布液は、マニホールドに流入して塗布幅方向に拡幅された後、各流出流路に均等に分配されて、流出流路の出口である吐出口から、流出流路の本数だけストライプ状に吐出される。 The striped nozzle is provided with an inflow flow path in which the coating liquid is supplied, a manifold extending in the coating width direction which is the longitudinal direction of the nozzle, and a plurality of stripe coating film pitch LRs in the coating width direction. It is equipped with an outflow flow path. The outside of the nozzle is provided with a plurality of protrusions so that the outflow side of each outflow flow path protrudes from the nozzle body toward the base material, and each protrusion has a flat end on the outflow side. A discharge port is formed. The coating liquid charged into the inflow flow path flows into the manifold, is widened in the coating width direction, is evenly distributed to each outflow flow path, and is distributed from the discharge port, which is the outlet of the outflow flow path, to the outflow flow path. It is discharged in a striped shape by the number of lines.
そのため、吐出口のある突出部の流出側先端の平面（以下、吐出口先端面という）の塗布幅方向の長さは、吐出口の幅ＬＥより少し大きな幅ＬＤとなっている。また、隣り合う突出部間には、谷となる凹部形状の切欠きがあり、この切欠きが各吐出口ごとにある吐出口先端面を形状的に分離し、その結果吐出口先端面両側に、塗布方向に延びるエッジを形成する。このエッジは通常は９０度よりも大きな鈍角の角（かど）となる。そして、このような塗布幅方向両側にエッジのある吐出口先端面を基材と一定の隙間を設けて対向させ、各吐出口からストライプ状に塗布液を吐出させながら、基材をノズルに対して一定速度Ｖで相対移動させる。すると吐出口から吐出された塗布液は、幅ＬＤの吐出口先端面両側のエッジまで広がりそこで一旦留まった後に、幅ＬＤで基材上に落下して、幅ＬＢでピッチＬＲのストライプ塗布膜を形成する。ストライプ塗布膜の幅ＬＢは、基材の相対移動速度Ｖに依存し、速度Ｖが大きければ吐出口先端面の塗布液を引きこむことになるので幅ＬＢは幅ＬＤより小さくなり、速度Ｖが小さければその反対の関係となる。 Therefore, the length in the coating width direction of the flat surface of the outflow side tip of the protruding portion having the discharge port (hereinafter referred to as the discharge port tip surface) is a width LD slightly larger than the width LE of the discharge port. In addition, there is a concave notch in the shape of a valley between adjacent protrusions, and this notch separates the tip surface of the discharge port for each discharge port in a shape, and as a result, on both sides of the tip surface of the discharge port. , Form an edge extending in the coating direction. This edge is usually an obtuse angle greater than 90 degrees. Then, the tip surface of the discharge port having edges on both sides in the coating width direction is made to face the base material with a certain gap provided, and the base material is applied to the nozzle while discharging the coating liquid in a striped shape from each discharge port. And move relative to each other at a constant speed V. Then, the coating liquid discharged from the discharge port spreads to the edges on both sides of the tip surface of the discharge port of the width LD, stays there once, and then falls on the base material in the width LD to form a stripe coating film having a pitch LR in the width LB. Form. The width LB of the stripe coating film depends on the relative moving speed V of the base material, and if the speed V is large, the coating liquid on the tip surface of the discharge port is drawn in, so that the width LB is smaller than the width LD and the speed V becomes smaller. If it is small, the opposite relationship is obtained.
しかしながら、以上の状況はすべての塗布液や塗布条件に対して成り立つものではない。例えば塗布液が１００ｍＰａｓ以上の粘度で、ストライプ塗布膜の厚さが２０μｍ以下と小さく、ノズルからの吐出速度や吐出量が小さい場合は、移動速度Ｖが大きくても、図６に示すように、ストライプ塗布膜の幅ＷＤ（特許文献１のＬＢに相当）は、吐出口先端面の幅ＷＥ（特許文献１のＬＤに相当）よりもかなり大きくなり、厚さも狙い厚さよりも相当小さくなる。これは、吐出口から吐出された塗布液が、壁面作用により吐出口先端面両側のエッジまで広がった後も移動してエッジを乗り越え、エッジの先にある斜面をはい上がることの結果として起こる。すなわち、斜面をはい上がる塗布液が一定量溜まってから重力により落下して基材上にストライプ塗布膜が形成されるので、ストライプ塗布膜の幅ＷＤは、吐出口先端面両側のエッジを乗り越えて形成される塗布液の溜まり部分の最大幅（塗布幅方向長さ）に依存するようになり、吐出口先端面の幅ＷＥよりもかなり大きくなる。そして、吐出口からの塗布液吐出量は同じであることから、ストライプ塗布膜の幅ＷＤが吐出口先端面の幅ＷＥよりもかなり大きいときの膜厚は、幅ＷＥより少し大きい時の膜厚よりも減少する。 However, the above situation does not hold for all coating liquids and coating conditions. For example, when the coating liquid has a viscosity of 100 mPas or more, the thickness of the stripe coating film is as small as 20 μm or less, and the discharge speed and the discharge amount from the nozzle are small, even if the moving speed V is large, as shown in FIG. The width WD of the stripe coating film (corresponding to LB of Patent Document 1) is considerably larger than the width WE of the tip surface of the discharge port (corresponding to LD of Patent Document 1), and the thickness is also considerably smaller than the target thickness. This occurs as a result of the coating liquid discharged from the discharge port moving even after spreading to the edges on both sides of the tip surface of the discharge port due to the wall surface action, overcoming the edge, and climbing up the slope at the tip of the edge. That is, since a certain amount of the coating liquid that rises up the slope is accumulated and then falls by gravity to form a stripe coating film on the base material, the width WD of the stripe coating film overcomes the edges on both sides of the tip surface of the discharge port. It depends on the maximum width (length in the coating width direction) of the pooled portion of the coating liquid to be formed, and is considerably larger than the width WE of the tip surface of the discharge port. Since the amount of the coating liquid discharged from the discharge port is the same, the film thickness when the width WD of the stripe coating film is considerably larger than the width WE of the tip surface of the discharge port is the film thickness when it is slightly larger than the width WE. Less than.
以上のことを改善するために、吐出された塗布液が吐出口先端面両側のエッジで留まるように、エッジを鈍角ではなく、例えば特許文献２に記載されるように９０度の角にしたり、さらには鋭角の角にすることが対策として考えられるが、全く改善効果がない。 In order to improve the above, the edge is not an acute angle but an angle of 90 degrees as described in Patent Document 2, for example, so that the discharged coating liquid stays at the edges on both sides of the tip surface of the discharge port. Furthermore, it is conceivable to make the angle sharp, but there is no improvement effect at all.
以上、塗布液の粘度や塗布条件に制約されずに、所望の小さな幅と厚さでストライプ塗布膜を形成できるノズルがないというのが現状である。 As described above, the current situation is that there is no nozzle capable of forming a striped coating film with a desired small width and thickness without being restricted by the viscosity of the coating liquid and the coating conditions.
本発明は、上述のような従来技術の問題点を解決するためになされたものであり、その目的とするところは、いかなる粘度の塗布液や塗布条件であっても、所望の小さな幅と厚さでストライプ塗布膜を形成できるノズルとそれを使用した塗布装置および塗布方法を提供することにある。本発明はまた、上記の塗布方法を使用して、低コストで高品質のディスプレイ用部材を製造できるディスプレイ用部材の製造方法を提供することも目的としている。 The present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is a desired small width and thickness regardless of the coating liquid and coating conditions of any viscosity. It is an object of the present invention to provide a nozzle capable of forming a stripe coating film, a coating apparatus using the nozzle, and a coating method. It is also an object of the present invention to provide a method for manufacturing a display member, which can manufacture a high quality display member at low cost by using the above coating method.
本発明の目的は、以下のいずれかに述べる手段によって達成される。
（１）塗布液が供給される塗布液供給口と、塗布液供給口から内部に流入する塗布液を塗布幅方向に拡幅するマニホールドと、該マニホールドに連通して塗布液が下流に向かって流れる流出流路と、該流出流路の下流側端部で開口して塗布液が外部に吐出される吐出口と、を有するノズルであって、前記吐出口を含む吐出口先端面と、前記吐出口の塗布幅方向両端で上流側に向けて連なる外側斜面とで、下流側に突き出る突出部を外部に形成するとともに、前記流出流路の塗布幅方向両端に存在する両端流出面と前記外側斜面とで、塗布方向に延びる線状のエッジを形成し、かつ、前記両端流出面と前記外側斜面とがなす角度は６０度以上９０度以下であることを特徴とするノズル。
（２）前記吐出口を含む平面と前記外側斜面とがなす角度は５度以上８５度以下であることを特徴とする、前記（１）に記載のノズル。
（３）前記吐出口を含む平面と前記両端流出面とがなす角度は１５度以上９０度以下であることを特徴とする、前記（１）または（２）に記載のノズル。
（４）前記（１）〜（３）のいずれかに記載のノズルと、該ノズルに定量の塗布液を供給する塗布液供給装置と、基材を保持する基材載置台と、前記ノズルおよび前記基材載置台のうちの少なくとも一方を相対的に移動させる移動装置と、前記ノズルを基材に近接させる近接装置と、前記ノズルの吐出口を前記基材上の任意の場所に位置合わせをする位置合わせ装置と、を備えている塗布装置。
（５）前記（１）〜（３）のいずれかに記載のノズルを所望する場所で基材に近接させ、前記ノズルに塗布液を供給して前記ノズルの吐出口から塗布液を吐出するとともに、前記基材の前記ノズルに対する相対移動を行って、前記基材上にストライプ塗布膜を形成することを特徴とする塗布方法。
（６）前記（５）に記載の塗布方法を用いて、ディスプレイ用部材を製造することを特徴とするディスプレイ用部材の製造方法。
An object of the present invention is achieved by any of the following means.
(1) A coating liquid supply port to which the coating liquid is supplied, a manifold that widens the coating liquid flowing into the inside from the coating liquid supply port in the coating width direction, and a manifold that communicates with the manifold and the coating liquid flows downstream. A nozzle having an outflow flow path and a discharge port that opens at the downstream end of the outflow flow path to discharge the coating liquid to the outside, and has a discharge port tip surface including the discharge port and the discharge port. The outer slopes that are continuous toward the upstream side at both ends in the coating width direction of the outlet form protrusions protruding to the downstream side, and the outflow surfaces at both ends and the outer slopes that exist at both ends in the coating width direction of the outflow flow path. The nozzle is characterized in that a linear edge extending in the coating direction is formed, and the angle formed by the outflow surfaces at both ends and the outer slope is 60 degrees or more and 90 degrees or less.
(2) The nozzle according to (1) above, wherein the angle formed by the plane including the discharge port and the outer slope is 5 degrees or more and 85 degrees or less.
(3) The nozzle according to (1) or (2) above, wherein the angle formed by the plane including the discharge port and the outflow surfaces at both ends is 15 degrees or more and 90 degrees or less.
(4) The nozzle according to any one of (1) to (3), a coating liquid supply device for supplying a fixed amount of coating liquid to the nozzle, a base material mounting table for holding a base material, the nozzle, and the nozzle. Align the moving device that relatively moves at least one of the base material mounting tables, the proximity device that brings the nozzle close to the base material, and the discharge port of the nozzle at an arbitrary position on the base material. Alignment device and a coating device.
(5) The nozzle according to any one of (1) to (3) is brought close to the base material at a desired location, the coating liquid is supplied to the nozzle, and the coating liquid is discharged from the discharge port of the nozzle. , A coating method characterized by forming a stripe coating film on the substrate by moving the substrate relative to the nozzle.
(6) A method for manufacturing a display member, which comprises manufacturing a display member by using the coating method according to (5) above.
本発明のノズルは、吐出口を含む吐出口先端面と、前記吐出口の塗布幅方向両端で上流側に向けて連なる外側斜面とで、ノズルの下流側に突き出る突出部を外部に形成するとともに、流出流路の塗布幅方向両端に存在する両端流出面と前記外側斜面とで、塗布方向に延びる線状のエッジを形成し、かつ、前記両端流出面と前記外側斜面とがなす角度、すなわちエッジの角度を６０度以上９０度以下の鋭い角になるようにしたので、両端流出面に沿って下流側に向かって流れる塗布液は、エッジの位置で上流側に急激に反転する外側斜面に沿って流れることが難しくなって、エッジを乗り越えることが困難となる。そしてその位置で塗布液が落下して基材に塗布されるため、吐出口両端のエッジ間長さがほぼそのまま幅となる、小さな幅のストライプ塗布膜を安定して形成することができる。また吐出口から吐出される塗布液量を制御することにより、それがそのまま、基材上に塗布されるストライプ塗布膜の厚さを制御することになり、この厚さを所望の値にすることができる。以上のことは塗布液の粘度や塗布条件に関係なく実現することができる。 The nozzle of the present invention has a discharge port tip surface including a discharge port and an outer slope that is continuous toward the upstream side at both ends in the coating width direction of the discharge port, and forms a protruding portion that protrudes to the downstream side of the nozzle to the outside. The outflow surfaces at both ends existing at both ends in the coating width direction of the outflow flow path and the outer slope form a linear edge extending in the coating direction, and the angle formed by the outflow surfaces at both ends and the outer slope, that is, Since the edge angle is set to a sharp angle of 60 degrees or more and 90 degrees or less, the coating liquid flowing toward the downstream side along the outflow surfaces at both ends is on the outer slope that rapidly reverses to the upstream side at the edge position. It becomes difficult to flow along and it becomes difficult to get over the edge. Then, since the coating liquid drops at that position and is applied to the base material, it is possible to stably form a stripe coating film having a small width in which the length between the edges at both ends of the discharge port has almost the same width. Further, by controlling the amount of the coating liquid discharged from the discharge port, the thickness of the stripe coating film applied on the base material can be controlled as it is, and this thickness can be set to a desired value. Can be done. The above can be realized regardless of the viscosity of the coating liquid and the coating conditions.
さらに本発明の塗布装置、塗布方法は上記のすぐれたノズルを使用しているので、いかなる粘度の塗布液や塗布条件であっても、所望の小さな幅と厚さでストライプ塗布膜を形成することができる。 Furthermore, since the coating apparatus and coating method of the present invention use the above-mentioned excellent nozzles, a striped coating film can be formed with a desired small width and thickness regardless of the coating liquid and coating conditions of any viscosity. Can be done.
または本発明のディスプレイ用部材の製造方法は上記のすぐれた塗布方法を用いているので、低コストで高品質のディスプレイ用部材を容易に製造することができる。 Alternatively, since the method for manufacturing the display member of the present invention uses the above-mentioned excellent coating method, it is possible to easily manufacture a high-quality display member at low cost.
以下、本発明の実施形態の一例を図面に基づいて説明する。 Hereinafter, an example of the embodiment of the present invention will be described with reference to the drawings.
まず図１を参照すると、塗布液を基材上にストライプ状に塗布してストライプ塗布膜を形成できる塗布装置１が示されている。この塗布装置１は、基材である基板Ａに塗布液を塗布するノズル３０と、ノズル３０と基板Ａが取りつけられてこれらを自在に移動させるＸＹＺステージ１０と、ノズル３０に定量の塗布液を供給する塗布液供給手段である塗布液供給装置５０と、ＸＹＺステージ１０と塗布液供給装置５０の動作を統括的に制御する制御装置８０と、より構成されている。 First, referring to FIG. 1, a coating device 1 capable of forming a striped coating film by coating a coating liquid on a substrate in a stripe shape is shown. In this coating device 1, a nozzle 30 for applying a coating liquid to a substrate A which is a base material, an XYZ stage 10 to which the nozzle 30 and the substrate A are attached and move them freely, and a fixed amount of a coating liquid are applied to the nozzle 30. It is composed of a coating liquid supply device 50 which is a coating liquid supply means to be supplied, and a control device 80 which comprehensively controls the operation of the XYZ stage 10 and the coating liquid supply device 50.
ＸＹＺステージ１０の吸着盤１４には基板Ａが載置され、Ｚ軸リニア駆動装置１２にはノズル３０が固定保持されている。吸着盤１４の上面には図示されていない吸着孔が多数配置されており、図示されていない真空源からの真空圧によって基板Ａを吸着保持することができる。すなわち吸着盤１４は、基板Ａを保持する基材載置台となっている。この吸着盤１４はその中央部で図示しない回転軸を介してＸ−ψ駆動装置１６に取り付けられている。Ｘ−ψ駆動装置１６は、ベース２６上に固定されており、吸着盤１４のＸ−Ｙ平面内での回転とＸ方向（基板Ａの長手に平行な方向）の往復動を自在に行なうことができる。以上よりＸ−ψ駆動装置１６は、Ｘ方向にノズル３０と吸着盤１４を相対的に移動させる移動装置となる。なおＸ、Ｙ、Ｚの方向については、図１に示される通りで、ＸＹＺステージ１０の左下隅にＸ、Ｙ、Ｚ各軸の原点Ｏが設けられているとともに、原点Ｏでの矢印の方向が正方向である。またＸ−Ｙ平面内での回転方向がψ方向となっている。 The substrate A is placed on the suction plate 14 of the XYZ stage 10, and the nozzle 30 is fixedly held on the Z-axis linear drive device 12. A large number of suction holes (not shown) are arranged on the upper surface of the suction plate 14, and the substrate A can be sucked and held by a vacuum pressure from a vacuum source (not shown). That is, the suction plate 14 is a base material mounting table for holding the substrate A. The suction plate 14 is attached to the X-ψ drive device 16 via a rotation shaft (not shown) at the center thereof. The X-ψ drive device 16 is fixed on the base 26, and can freely rotate the suction plate 14 in the XY plane and reciprocate in the X direction (direction parallel to the length of the substrate A). Can be done. From the above, the X-ψ drive device 16 is a moving device that relatively moves the nozzle 30 and the suction plate 14 in the X direction. As for the directions of X, Y, and Z, as shown in FIG. 1, the origin O of each axis of X, Y, and Z is provided in the lower left corner of the XYZ stage 10, and the direction of the arrow at the origin O. Is in the positive direction. The direction of rotation in the XY plane is the ψ direction.
ノズル３０を保持するＺ軸リニア駆動装置１２は、ノズル３０をＺ方向すなわち上下方向に自在に昇降することができるもので、ブラケット１８に固定されている。ブラケット１８はさらにＹ軸リニア駆動装置２０に保持されている。Ｙ軸リニア駆動装置２０は、ベース２６上の一端に配置されている門型ベース２８上に固定されており、ブラケット１８をＹ方向に自在に往復動させることができる。その結果ブラケット１８に固定されているノズル３０をＹ方向にも自在に往復動させることができる。以上より、Ｙ軸リニア駆動装置２０は、Ｙ方向にノズル３０と吸着盤１４を相対的に移動させる移動装置となる。 The Z-axis linear drive device 12 that holds the nozzle 30 can freely raise and lower the nozzle 30 in the Z direction, that is, in the vertical direction, and is fixed to the bracket 18. The bracket 18 is further held by the Y-axis linear drive device 20. The Y-axis linear drive device 20 is fixed on a portal base 28 arranged at one end on the base 26, and the bracket 18 can be freely reciprocated in the Y direction. As a result, the nozzle 30 fixed to the bracket 18 can be freely reciprocated in the Y direction. From the above, the Y-axis linear drive device 20 is a moving device that relatively moves the nozzle 30 and the suction plate 14 in the Y direction.
さらに吸着盤１４の上方のブラケット１８には、ＣＣＤカメラ２２と高さセンサー２４も装着されている。ＣＣＤカメラ２２は制御装置８０に電気的に連結されており、基板Ａのアライメントマークの位置を検知して、それを制御装置８０に伝える。そして制御装置８０がＸ−ψ駆動装置１６やＹ軸リニア駆動装置２０を駆動することによって、ノズル３０の吐出口１１０に対する基板Ａの位置合わせや、ψ方向の相対回転角度設定を行うことができる。以上より、ＣＣＤカメラ２２、Ｘ−ψ駆動装置１６、Ｙ軸リニア駆動装置２０、制御装置８０が、ノズル３０の吐出口１１０を基板Ａ上の任意の場所に位置合わせをする位置合わせ装置を構成している。一方高さセンサー２４は、基板Ａの上面の位置を検知、すなわち基板Ａの厚さを検知し、それを電気的に接続されている制御装置８０に伝える。その信号に基づいて制御装置８０がＺ軸リニア駆動装置１２を駆動することによって、ノズル３０の最下面と基板Ａ上面とのすきま、すなわちクリアランスを所定値に設定することができる。以上よりＺ軸リニア駆動装置１２が、基材である基板Ａに近接させる近接装置となる。 Further, a CCD camera 22 and a height sensor 24 are also mounted on the bracket 18 above the suction plate 14. The CCD camera 22 is electrically connected to the control device 80, detects the position of the alignment mark on the substrate A, and transmits the position to the control device 80. Then, by driving the X-ψ drive device 16 and the Y-axis linear drive device 20 by the control device 80, it is possible to align the substrate A with respect to the discharge port 110 of the nozzle 30 and set the relative rotation angle in the ψ direction. .. Based on the above, the CCD camera 22, the X-ψ drive device 16, the Y-axis linear drive device 20, and the control device 80 constitute an alignment device that aligns the discharge port 110 of the nozzle 30 at an arbitrary location on the substrate A. are doing. On the other hand, the height sensor 24 detects the position of the upper surface of the substrate A, that is, detects the thickness of the substrate A, and transmits it to the electrically connected control device 80. By driving the Z-axis linear drive device 12 by the control device 80 based on the signal, the clearance between the lowermost surface of the nozzle 30 and the upper surface of the substrate A, that is, the clearance can be set to a predetermined value. From the above, the Z-axis linear drive device 12 becomes a proximity device that brings the Z-axis linear drive device 12 close to the substrate A that is the base material.
再びノズル３０を見ると、塗布液供給装置５０に連なる供給ホース６８とノズル３０が常時接続されており、これによりノズル３０へは塗布液供給装置５０から塗布液を供給することができる。ノズル３０へ供給された塗布液は、ノズル３０の内部通路を経て基板Ａに向かってノズル３０より吐出される。 Looking at the nozzle 30 again, the supply hose 68 connected to the coating liquid supply device 50 and the nozzle 30 are always connected, so that the coating liquid can be supplied to the nozzle 30 from the coating liquid supply device 50. The coating liquid supplied to the nozzle 30 is discharged from the nozzle 30 toward the substrate A via the internal passage of the nozzle 30.
なお、塗布液供給装置５０は、供給ホース６８の上流側に、フィルター５６、供給バルブ５２、シリンジポンプ６０、吸引ホース７０、吸引バルブ５４、タンク７２を備えている。ここで供給ホース６８はノズル３０〜シリンジポンプ６０までを連通し、吸引ホース７０はシリンジポンプ６０〜タンク７２までを連通している。供給ホース６８は、ノズル３０が移動するのにあわせて追従できるように樹脂製としており、耐薬品性等も考慮して、テフロン（登録商標）等を使用するのが好ましい。最も上流にあるタンク７２には塗布液７４が蓄えられており、圧空源７６に連結されて任意の大きさの背圧を塗布液７４に付加することができる。タンク７２内の塗布液７４は、吸引ホース７０を通じてシリンジポンプ６０に供給される。シリンジポンプ６０では、シリンジ６２、ピストン６４が本体６６に取り付けられている。ここでピストン６４は図示しない駆動源によって上下方向に自在に往復動できる。シリンジポンプ６０は、一定の内径を有するシリンジ６２内に塗布液７４を充填し、それをピストン６４により押し出して、ノズル３０に一定容量の塗布液を供給できる間欠型定容量ポンプである。シリンジ６２内に塗布液７４を充填するときは、シリンジポンプ６０の上流側の開閉バルブである吸引バルブ５４を開、下流側の開閉バルブである供給バルブ５２を閉として、ピストン６４を下方に移動させる。またシリンジ６２内に充填された塗布液をノズル３０に向かって供給するときは、吸引バルブ５４を閉、供給バルブ５２を開とし、ピストン６４を上方に移動させることで、ピストン６４でシリンジ６２内部の塗布液７４を押し上げ排出する。 The coating liquid supply device 50 includes a filter 56, a supply valve 52, a syringe pump 60, a suction hose 70, a suction valve 54, and a tank 72 on the upstream side of the supply hose 68. Here, the supply hose 68 communicates with the nozzle 30 to the syringe pump 60, and the suction hose 70 communicates with the syringe pump 60 to the tank 72. The supply hose 68 is made of resin so that it can follow the movement of the nozzle 30, and it is preferable to use Teflon (registered trademark) or the like in consideration of chemical resistance and the like. The coating liquid 74 is stored in the tank 72 which is the most upstream, and can be connected to the compressed air source 76 to apply back pressure of any size to the coating liquid 74. The coating liquid 74 in the tank 72 is supplied to the syringe pump 60 through the suction hose 70. In the syringe pump 60, the syringe 62 and the piston 64 are attached to the main body 66. Here, the piston 64 can freely reciprocate in the vertical direction by a drive source (not shown). The syringe pump 60 is an intermittent constant-capacity pump capable of filling a syringe 62 having a constant inner diameter with a coating liquid 74 and pushing it out by a piston 64 to supply a constant volume of the coating liquid to the nozzle 30. When filling the syringe 62 with the coating liquid 74, the suction valve 54, which is an on-off valve on the upstream side of the syringe pump 60, is opened, the supply valve 52, which is an on-off valve on the downstream side, is closed, and the piston 64 is moved downward. Let me. When the coating liquid filled in the syringe 62 is supplied toward the nozzle 30, the suction valve 54 is closed, the supply valve 52 is opened, and the piston 64 is moved upward, so that the piston 64 inside the syringe 62. The coating liquid 74 of the above is pushed up and discharged.
次に、以上の塗布液供給装置５０から塗布液７４が供給されるノズル３０の詳細について、図２、図３を用いて説明する。 Next, the details of the nozzle 30 to which the coating liquid 74 is supplied from the coating liquid supply device 50 will be described with reference to FIGS. 2 and 3.
まず、ノズル３０は、図２に示すように、ノズル３０の長手方向である塗布幅方向（Ｘ方向）に延在する第１リップ３１、第２リップ４１と、それらに挟まれる第１スペーサ１２０、流出スペーサ１００、第２スペーサ１４０と、リップ締結用の複数の組立ボルト４２と、で構成されている。第１リップ３１と第２リップ４１は、それぞれの内面３４と内面４４が対向する状態で配置され、その間に、３種のスペーサを挟み込んで、複数の組立ボルト４２で締結固定することで、ノズル３０として一体化されている。 First, as shown in FIG. 2, the nozzle 30 includes a first lip 31 and a second lip 41 extending in the coating width direction (X direction), which is the longitudinal direction of the nozzle 30, and a first spacer 120 sandwiched between them. , The outflow spacer 100, the second spacer 140, and a plurality of assembly bolts 42 for fastening the lip. The first lip 31 and the second lip 41 are arranged so that their inner surfaces 34 and 44 face each other, and three types of spacers are sandwiched between them and fastened and fixed with a plurality of assembly bolts 42 to form a nozzle. It is integrated as 30.
また第１リップ３１の内面３４には、供給される塗布液を塗布幅方向に拡幅するためのマニホールド３２が、塗布幅方向に延在して形成されている。そして、マニホールド３２の塗布幅方向の中央には、塗布液が外部から供給される流入流路３３が第１リップ３１の外部にある塗布液供給口（図示されていない）と連通するように設けられている。すなわち、塗布液供給口から流入流路３３を介して内部に流入する塗布液が、マニホールド３２に供給される。なお塗布液が供給される塗布液供給口は、流入流路３３が上流側にある第１リップ３１の外側面で開口したものとなる。ここで、流入流路３３は、塗布液供給口から供給される塗布液をマニホールド３２の塗布幅方向に一様に拡幅するために、マニホールド３２の塗布幅方向の中央部に設けることが好ましいが、中央部以外に設けてもよい。 Further, on the inner surface 34 of the first lip 31, a manifold 32 for widening the supplied coating liquid in the coating width direction is formed so as to extend in the coating width direction. Then, at the center of the manifold 32 in the coating width direction, an inflow flow path 33 to which the coating liquid is supplied from the outside is provided so as to communicate with a coating liquid supply port (not shown) outside the first lip 31. Has been done. That is, the coating liquid flowing into the inside from the coating liquid supply port via the inflow flow path 33 is supplied to the manifold 32. The coating liquid supply port to which the coating liquid is supplied is opened on the outer surface of the first lip 31 on which the inflow flow path 33 is on the upstream side. Here, it is preferable that the inflow flow path 33 is provided at the center of the manifold 32 in the coating width direction in order to uniformly widen the coating liquid supplied from the coating liquid supply port in the coating width direction of the manifold 32. , May be provided in a place other than the central part.
次に、ノズル３０の内部に含まれる３種のスペーサはいずれも薄板であり、厚さ方向であるＹ方向に、第１スペーサ１２０、流出スペーサ１００、第２スペーサ１４０の順に重ねられて構成されている。これら３種のスペーサが重ねられることで、図３に示すように、マニホールド３２に連通する流出流路（第１流出流路１０１および第２流出流路１０２）、さらには吐出口１１０が形成される。またこれら３種のスペーサは、吐出口１１０を含む吐出口先端面１１１とそれらの外側斜面１０６Ａ、１０６Ｂとで、ノズルの下流側外側に突き出る突出部を形成する。なお、ここでいう吐出口先端面１１１とは、細かい破線で位置が示されているように、重ねられた流出スペーサ１００、第１スペーサ１２０、第２スペーサ１４０それぞれの流出流路最下流側端部によって形成される、吐出口１１０を含む面であり、塗布幅方向においてはエッジ１０５Ａ、１０５Ｂの間の領域である。 Next, all three types of spacers contained inside the nozzle 30 are thin plates, and are configured by stacking the first spacer 120, the outflow spacer 100, and the second spacer 140 in this order in the Y direction, which is the thickness direction. ing. By stacking these three types of spacers, as shown in FIG. 3, an outflow flow path (first outflow flow path 101 and second outflow flow path 102) communicating with the manifold 32 and a discharge port 110 are formed. To. Further, these three types of spacers form a protrusion protruding outward on the downstream side of the nozzle at the discharge port tip surface 111 including the discharge port 110 and their outer slopes 106A and 106B. The discharge port tip surface 111 referred to here is the most downstream end of the outflow flow path of each of the overlapped outflow spacer 100, the first spacer 120, and the second spacer 140, as shown by the fine broken line. It is a surface formed by the portions including the discharge port 110, and is a region between the edges 105A and 105B in the coating width direction.
図２に示すように、第１スペーサ１２０の外周部または外形となる外形輪郭１２２と第２スペーサ１４０の外周部または外形となる外形輪郭１４２は、重ね方向であるＹ方向に見て同一であることが好ましい。これにより、第１スペーサ１２０と第２スペーサ１４０は、Ｙ方向に重ねた状態で外形輪郭１２２と外形輪郭１４２を同時加工によって形成することができる。また、第１リップ３１、第１スペーサ１２０、流出スペーサ１００、第２スペーサ１４０、第２リップ４１には、同じ位置で貫通している組立ボルト４２の挿入用穴４５が複数個設けられているが、この挿入用穴４５も、第１リップ３１、３種のスペーサ、第２リップ４１をＹ方向に重ねた状態で同時加工によって形成することが好ましい。なお第１スペーサ１２０と第２スペーサ１４０の相違は、第１スペーサ１２０の内部に第１リップ３１のマニホールド３２からの塗布液が通過する開口部１２４が設けられていることだけである。また、Ｙ方向に見て、開口部１２４とマニホールド３２は、形状が略一致していることが好ましい。 As shown in FIG. 2, the outer peripheral portion or outer outer shape contour 122 of the first spacer 120 and the outer peripheral portion or outer outer shape contour 142 of the second spacer 140 are the same when viewed in the Y direction, which is the overlapping direction. Is preferable. As a result, the outer contour 122 and the outer contour 142 can be formed by simultaneous processing of the first spacer 120 and the second spacer 140 in a state of being overlapped in the Y direction. Further, the first lip 31, the first spacer 120, the outflow spacer 100, the second spacer 140, and the second lip 41 are provided with a plurality of insertion holes 45 for assembly bolts 42 penetrating at the same positions. However, it is preferable that the insertion hole 45 is also formed by simultaneous processing with the first lip 31, the three types of spacers, and the second lip 41 being overlapped in the Y direction. The only difference between the first spacer 120 and the second spacer 140 is that the opening 124 through which the coating liquid from the manifold 32 of the first lip 31 passes is provided inside the first spacer 120. Further, when viewed in the Y direction, it is preferable that the openings 124 and the manifold 32 have substantially the same shape.
つづいて、第１スペーサ１２０と第２スペーサ１４０の間に位置する流出スペーサ１００については、図３を用いて詳細に説明する。図３はノズル３０による基材への塗布状況を示す拡大正面断面図であるが、断面は流出スペーサ１００をＹ方向に、第２リップ４１側から見たもので表している。図中、パターン模様をつけている部分は塗布液７４を示し、破線は、塗布液７４や流出スペーサ１００越しに見える開口部１２４、流入流路３３を示している。 Subsequently, the outflow spacer 100 located between the first spacer 120 and the second spacer 140 will be described in detail with reference to FIG. FIG. 3 is an enlarged front sectional view showing a state of application to the base material by the nozzle 30, and the cross section shows the outflow spacer 100 viewed from the second lip 41 side in the Y direction. In the figure, the portion with the pattern pattern indicates the coating liquid 74, and the broken line indicates the coating liquid 74, the opening 124 seen through the outflow spacer 100, and the inflow flow path 33.
図３を見ると、流出スペーサ１００の内部には、第１流出流路１０１とそれに連通する第２流出流路１０２が、Ｘ方向にピッチＰで６個配置されている。ノズル３０の塗布液供給口に供給された塗布液は、第１リップ３１の流入流路３３、マニホールド３２、第１スペーサ１２０の開口部１２４を経て、第１流出流路１０１の一部に流れ込み、そこから第２流出流路１０２と流れ、第２流出流路１０２が下流側端部で開口して形成される吐出口１１０からノズル３０外部に向かって吐出され、基板Ａに塗布される。このことから、第１流出流路１０１と第２流出流路１０２は、マニホールド３２に連通して塗布液が下流に向かって流れる流出流路となる。また吐出口１１０は、第２流出流路１０２の下流側端部で開口して塗布液が外部に吐出される部分となる。なお吐出口１１０の塗布幅方向両端には、塗布方向に線状に延びるエッジ１０５Ａ、１０５Ｂが形成されている。 Looking at FIG. 3, inside the outflow spacer 100, six first outflow flow paths 101 and six second outflow flow paths 102 communicating with the first outflow flow path 101 are arranged at a pitch P in the X direction. The coating liquid supplied to the coating liquid supply port of the nozzle 30 flows into a part of the first outflow flow path 101 through the inflow flow path 33 of the first lip 31, the manifold 32, and the opening 124 of the first spacer 120. The second outflow flow path 102 flows from there to the outside of the nozzle 30 from the discharge port 110 formed by opening the second outflow flow path 102 at the downstream end, and is applied to the substrate A. For this reason, the first outflow flow path 101 and the second outflow flow path 102 are outflow flow paths that communicate with the manifold 32 and allow the coating liquid to flow downstream. Further, the discharge port 110 is a portion that opens at the downstream end of the second outflow flow path 102 to discharge the coating liquid to the outside. Edges 105A and 105B extending linearly in the coating direction are formed at both ends of the discharge port 110 in the coating width direction.
つづいて流出スペーサ１００における第１流出流路１０１以降での塗布状況をより詳細に、図４を用いて説明する。図４は、流出スペーサ１００での基材への塗布状況を詳細に示す部分拡大正面断面図である。ここで第１流出流路１０１はＸ方向に幅ＷＡ、Ｚ方向に長さＬＢの矩形状となっている。一方第２流出流路１０２については、第１流出流路１０１との接続点を起点として下流側の吐出口１１０までの全長ＬＤのうち、前半の長さＬＥの区間で、第１両端流出面１０３Ａ、１０３ＢがＸ方向に幅ＷＢのスリットを形成している。そして後半の吐出口１１０まで及ぶ長さＬＦの区間では、下流側に向かうに従って互いに離れる第２両端流出面１０４Ａ、１０４Ｂによって、スリットの幅ＷＢが吐出口１１０のＸ方向に幅ＷＣまで拡大している。すなわち第２流出流路１０２は、吐出口１１０近くで、塗布幅方向であるＸ方向に拡大して吐出口１１０に至っている。このため第２流出流路１０２の塗布幅方向両端に形成されている第２両端流出面１０４Ａ、１０４Ｂが、一点鎖線で示されている吐出口１１０を含む平面となす角度αＡ、αＢは、９０度より小さくなる。 Subsequently, the coating state of the outflow spacer 100 in the first outflow flow path 101 and thereafter will be described in more detail with reference to FIG. FIG. 4 is a partially enlarged front sectional view showing in detail the coating state of the outflow spacer 100 on the base material. Here, the first outflow flow path 101 has a rectangular shape having a width WA in the X direction and a length LB in the Z direction. On the other hand, regarding the second outflow flow path 102, of the total length LD from the connection point with the first outflow flow path 101 to the discharge port 110 on the downstream side, the first half length LE section is the first both end outflow surface. 103A and 103B form a slit having a width WB in the X direction. Then, in the section of the length LF extending to the discharge port 110 in the latter half, the width WB of the slit is expanded to the width WC in the X direction of the discharge port 110 by the second both end outflow surfaces 104A and 104B which are separated from each other toward the downstream side. There is. That is, the second outflow flow path 102 is close to the discharge port 110 and expands in the X direction, which is the coating width direction, to reach the discharge port 110. Therefore, the angles αA and αB formed by the second both end outflow surfaces 104A and 104B formed at both ends of the second outflow flow path 102 in the coating width direction are 90 with respect to the plane including the discharge port 110 indicated by the alternate long and short dash line. Less than a degree.
ここで、第１両端流出面１０３Ａ、１０３Ｂと第２両端流出面１０４Ａ、１０４Ｂは、ともに第２流出流路１０２の塗布幅方向両端に形成されるものである。そして第２両端流出面１０４Ａ、１０４Ｂは、吐出口１１０のＸ方向両端でそれぞれ外側斜面１０６Ａ、１０６Ｂと接続し、その結果、吐出口１１０の塗布幅方向両端にエッジ１０５Ａ、１０５Ｂが形成される。このエッジ１０５Ａ、１０５Ｂは、紙面に垂直な方向、すなわち塗布方向（Ｙ方向）に線状に延びている。以上より、第２流出流路１０２の塗布幅方向両端に形成されて下流の吐出口１１０に至る第２両端流出面１０４Ａ、１０４Ｂと、外部に形成されて、吐出口１１０の塗布幅方向両端から上流側に延びていく外側斜面１０６Ａ、１０６Ｂとによって、塗布方向に線状のエッジ１０５Ａ、１０５Ｂが形成される。なお上記したように、各スペーサの流出流路最下流側端部によって形成され、かつ、塗布幅方向においてはエッジ１０５Ａ、１０５Ｂで挟まれる領域が、吐出口１１０を含む吐出口先端面１１１となる。したがって以上の構成により、吐出口１１０を含む吐出口先端面１１１と、吐出口１１０の塗布幅方向両端で上流側に向けて連なる外側斜面１０６Ａ、１０６Ｂとで、下流側に突き出る突出部１０９Ａ、１０９Ｂを外部に形成する。 Here, the first both end outflow surfaces 103A and 103B and the second both end outflow surfaces 104A and 104B are both formed at both ends of the second outflow flow path 102 in the coating width direction. The second both end outflow surfaces 104A and 104B are connected to the outer slopes 106A and 106B at both ends in the X direction of the discharge port 110, and as a result, edges 105A and 105B are formed at both ends of the discharge port 110 in the coating width direction. The edges 105A and 105B extend linearly in the direction perpendicular to the paper surface, that is, in the coating direction (Y direction). From the above, the second both ends outflow surfaces 104A and 104B formed on both ends of the second outflow flow path 102 in the coating width direction and reaching the downstream discharge port 110, and the second both ends outflow surfaces 104A and 104B formed on the outside from both ends in the coating width direction of the discharge port 110 The outer slopes 106A and 106B extending to the upstream side form linear edges 105A and 105B in the coating direction. As described above, the region formed by the most downstream end of the outflow flow path of each spacer and sandwiched between the edges 105A and 105B in the coating width direction is the discharge port tip surface 111 including the discharge port 110. .. Therefore, according to the above configuration, the discharge port tip surface 111 including the discharge port 110 and the outer slopes 106A and 106B which are continuous toward the upstream side at both ends in the coating width direction of the discharge port 110 and projecting portions 109A and 109B protruding to the downstream side. Is formed on the outside.
ここで、第２両端流出面１０４Ａ、１０４Ｂと外側斜面１０６Ａ、１０６Ｂとがなす角度θＡ、θＢは、６０度以上９０度以下、好ましくは７０度以上９０度以下とする。すなわち、第２両端流出面１０４Ａ、１０４Ｂと外側斜面１０６Ａ、１０６Ｂとで形成される角度６０度以上９０度以下の角が、エッジ１０５Ａ、１０５Ｂとなる。なお角度θＡ、θＢが６０度未満であると、エッジ１０５Ａ、１０５Ｂが塗布方向（Ｙ方向）に一直線状とならず、波打ち形状となり好ましくない。 Here, the angles θA and θB formed by the second both end outflow surfaces 104A and 104B and the outer slopes 106A and 106B are 60 degrees or more and 90 degrees or less, preferably 70 degrees or more and 90 degrees or less. That is, the angles of 60 degrees or more and 90 degrees or less formed by the second both end outflow surfaces 104A and 104B and the outer slopes 106A and 106B are the edges 105A and 105B. If the angles θA and θB are less than 60 degrees, the edges 105A and 105B do not become linear in the coating direction (Y direction), which is not preferable because of the wavy shape.
さらにノズル３０の外部に配置されている外側斜面１０６Ａ、１０６Ｂは、図４中一点鎖線で示す、吐出口１１０を含む平面（吐出口先端面１１１の延長面）に対して、それぞれ角度φＡ、φＢをなしている。すなわち角度φＡ、φＢは、一点鎖線で示す吐出口１１０を含む平面と上流側に延びていく外側斜面１０６Ａ、１０６Ｂとがなす角度である。これによって、外側斜面１０６Ａ、１０６Ｂは、吐出口１１０を基準として、吐出口１１０の塗布幅方向両端にあるエッジ１０５Ａ、１０５Ｂから上流側に延びている。この結果、本発明においては、吐出口１１０の塗布幅方向両側に吐出口と平行な平面は形成されない。 Further, the outer slopes 106A and 106B arranged outside the nozzle 30 have angles φA and φB with respect to the plane including the discharge port 110 (extension surface of the discharge port tip surface 111) shown by the alternate long and short dash line in FIG. 4, respectively. Is doing. That is, the angles φA and φB are angles formed by the plane including the discharge port 110 indicated by the alternate long and short dash line and the outer slopes 106A and 106B extending upstream. As a result, the outer slopes 106A and 106B extend upstream from the edges 105A and 105B at both ends of the discharge port 110 in the coating width direction with reference to the discharge port 110. As a result, in the present invention, planes parallel to the discharge port are not formed on both sides of the discharge port 110 in the coating width direction.
なお、外側斜面１０６Ａ、１０６Ｂは、エッジ１０５Ａ、１０５Ｂから上流側に向かって立上ってから、吐出口１１０と平行な平面である底面１０７と接続している。そして吐出口１１０に塗布幅方向（Ｘ方向）に隣接する外側斜面１０６Ａ、１０６Ｂ、底面１０７で囲まれる部分は、凹型形状の切欠き１０８を形成している。すなわち、吐出口１１０の塗布幅方向両端部に隣接して切欠き１０８が設けられる。また、底面１０７、外側斜面１０６Ａ、吐出口先端面１１１、外側斜面１０６Ｂと、流出スペーサ１００のその他の外形輪郭１１２は、第１スペーサ１２０の外形輪郭１２２、第２スペーサ１４０の外形輪郭１４２と全く一致させている。 The outer slopes 106A and 106B rise from the edges 105A and 105B toward the upstream side, and then are connected to the bottom surface 107 which is a plane parallel to the discharge port 110. A portion surrounded by the outer slopes 106A and 106B and the bottom surface 107 adjacent to the discharge port 110 in the coating width direction (X direction) forms a concave notch 108. That is, notches 108 are provided adjacent to both ends of the discharge port 110 in the coating width direction. Further, the bottom surface 107, the outer slope 106A, the discharge port tip surface 111, the outer slope 106B, and the other outer contour 112 of the outflow spacer 100 are completely the same as the outer contour 122 of the first spacer 120 and the outer contour 142 of the second spacer 140. Matching.
さらに、第１流出流路１０１の幅ＷＡは、第２流出流路１０２の上流側の幅ＷＢよりも大きくしているが、これは塗布液の粘度が高く、第１流出流路１０１での圧力損失を小さくしたい場合に有効である。塗布液の粘度が低い場合は、幅ＷＡと幅ＷＢを略同一にしてもよいし、第１流出流路１０１そのものを省略してもよい。 Further, the width WA of the first outflow flow path 101 is larger than the width WB on the upstream side of the second outflow flow path 102, but this is because the viscosity of the coating liquid is high and the width WA of the first outflow flow path 101 is large. This is effective when you want to reduce the pressure loss. When the viscosity of the coating liquid is low, the width WA and the width WB may be substantially the same, or the first outflow flow path 101 itself may be omitted.
つづいて図３と図４を用いて、ストライプ塗布膜の塗布形成状況について説明する。 Subsequently, the coating formation state of the stripe coating film will be described with reference to FIGS. 3 and 4.
塗布液供給装置５０からノズル３０に供給される塗布液７４は、第１リップ３１にある塗布液供給口から流入流路３３、マニホールド３２、第１スペーサの開口部１２４を経て、流出スペーサ１００に複数（例えば図３の場合は６個）ある第１流出流路１０１に分配された後、それぞれの第２流出流路１０２の第１両端流出面１０３Ａ、１０３Ｂおよび第２両端流出面１０４Ａ、１０４Ｂに沿って下流側に向かって流れ、最終的に吐出口１１０から下向きに、クリアランスＣだけ離れている基板Ａに向かって吐出される。吐出口１１０に至る第２両端流出面１０４Ａ、１０４Ｂに沿って下流側に流れる塗布液７４は、吐出口１１０ではその塗布幅方向両端にあるエッジ１０５Ａ、１０５Ｂによって位置規制されて幅ＷＣよりも広がることなく落下し、移動速度ＶでＹ方向（紙面に垂直な方向）に走行する基板Ａ上に幅ＷＤで着地してビードＢＤを形成し、それによって基板Ａに幅ＷＤのストライプ塗布膜が形成される。このように、本発明においては塗布液７４が吐出口１１０の塗布幅方向両端にあるエッジ１０５Ａ、１０５Ｂで幅ＷＣに位置規制されるが、これは、塗布液が下流側に沿って流れる第２両端流出面１０４Ａ、１０４Ｂが、エッジ１０５Ａ、１０５Ｂの位置で反転して上流側に向かって延びる外側斜面１０６Ａ、１０６Ｂとなるために、沿って流れる面の急激な変化に塗布液７４が追従できない結果である。 The coating liquid 74 supplied from the coating liquid supply device 50 to the nozzle 30 passes through the inflow flow path 33, the manifold 32, and the opening 124 of the first spacer from the coating liquid supply port on the first lip 31, and reaches the outflow spacer 100. After being distributed to a plurality of (for example, 6 in the case of FIG. 3) first outflow flow paths 101, the first both end outflow surfaces 103A and 103B and the second both end outflow surfaces 104A and 104B of each of the second outflow flow paths 102. It flows toward the downstream side along the above, and is finally discharged downward from the discharge port 110 toward the substrate A separated by the clearance C. The coating liquid 74 flowing downstream along the second both end outflow surfaces 104A and 104B leading to the discharge port 110 is positioned and regulated by the edges 105A and 105B at both ends in the coating width direction at the discharge port 110 and is wider than the width WC. A bead BD is formed by landing on the substrate A having a width WD and traveling in the Y direction (direction perpendicular to the paper surface) at a moving speed V, thereby forming a stripe coating film having a width WD on the substrate A. Will be done. As described above, in the present invention, the coating liquid 74 is positioned at the widths WC at the edges 105A and 105B at both ends of the discharge port 110 in the coating width direction, but this is because the coating liquid flows along the downstream side. As the outflow surfaces 104A and 104B at both ends are inverted at the positions of the edges 105A and 105B to become the outer slopes 106A and 106B extending toward the upstream side, the coating liquid 74 cannot follow the sudden change in the surface flowing along the edges. Is.
塗布液が沿って流れる面をエッジ１０５Ａ、１０５Ｂの位置で反転するために、角度αＡ、αＢを好ましくは１５度以上９０度以下、より好ましくは３０度以上８５度以下にする。また、同様の理由から、角度φＡ、φＢを好ましくは、５度以上８５度以下、より好ましくは１５度以上７５度以下にする。なお図４では、実際に角度θＡ、θＢ＝７５度、角度φＡ、φＢ＝４５度、角度αＡ、αＢ＝６０度で記載している。 The angles αA and αB are preferably 15 degrees or more and 90 degrees or less, and more preferably 30 degrees or more and 85 degrees or less in order to invert the surface through which the coating liquid flows at the positions of the edges 105A and 105B. For the same reason, the angles φA and φB are preferably 5 degrees or more and 85 degrees or less, and more preferably 15 degrees or more and 75 degrees or less. In FIG. 4, the angles θA and θB = 75 degrees, the angles φA and φB = 45 degrees, and the angles αA and αB = 60 degrees are actually shown.
本発明において、角度θＡと角度θＢは、６０度以上９０度以下の範囲にあるならば、同じでもよいし、異なっていてもよい。角度φＡと角度φＢ、角度αＡと角度αＢについても同様である。 In the present invention, the angle θA and the angle θB may be the same or different as long as they are in the range of 60 degrees or more and 90 degrees or less. The same applies to the angle φA and the angle φB, and the angle αA and the angle αB.
また上記のストライプ塗布膜の幅ＷＤは基板Ａの移動速度Ｖに依存し、移動速度Ｖが小さいと幅ＷＤ≧幅ＷＣとなり、移動速度Ｖが大きいと塗布液７４が吐出口１１０を起点に引っ張られることになるので、幅ＷＤ＜幅ＷＣとなる。ただし、移動速度Ｖが大きくなるとビードＢＤが小さくなって塗布膜が切れやすくなる。したがって塗布液の物性や塗布条件によっては、幅ＷＤ＜幅ＷＣとなる前の移動速度で膜切れが生じて、幅ＷＤ＜幅ＷＣが実現できないこともある。 Further, the width WD of the stripe coating film depends on the moving speed V of the substrate A, and when the moving speed V is small, the width WD ≥ the width WC, and when the moving speed V is large, the coating liquid 74 pulls the coating liquid 74 from the discharge port 110. Therefore, the width WD <width WC. However, when the moving speed V becomes large, the bead BD becomes small and the coating film is easily cut. Therefore, depending on the physical properties of the coating liquid and the coating conditions, the film may break at the moving speed before the width WD <width WC, and the width WD <width WC may not be realized.
さらにストライプ膜の厚さについて、本発明においては、吐出口１１０から吐出される塗布液がエッジ１０５Ａ、１０５Ｂを乗り越えて外側斜面１０６Ａ、１０６Ｂをはい上がることなく、吐出される全量が基板Ａに塗布されるので、吐出口からの単位時間当たりの吐出量を幅ＷＤと移動速度Ｖで除算すれば、厚さが算出される。 Further, regarding the thickness of the stripe film, in the present invention, the entire amount of the coating liquid discharged from the discharge port 110 is applied to the substrate A without overcoming the edges 105A and 105B and climbing up the outer slopes 106A and 106B. Therefore, the thickness is calculated by dividing the discharge amount per unit time from the discharge port by the width WD and the moving speed V.
次に本発明のノズル３０と、従来ノズルとの形状と作用の相違点について、図４と図６を参照して詳細に説明する。図６は公知となる従来ノズル３００の流出スペーサ３１０での基材への塗布状況を詳細に示す部分拡大正面断面図である。例えば本発明の一実施形態に係る図４に示すノズル３０では、吐出口１１０の塗布幅方向両端であるエッジ１０５Ａ、１０５Ｂにおいて、角度φＡ、φＢで上流側に向かう外側斜面１０６Ａ、１０６Ｂが第２両端流出面１０４Ａ、１０４Ｂに接続している。これによって吐出口１１０を含む平面と外側斜面１０６Ａ、１０６Ｂとがなす角度φＡ、φＢは上記したように４５度で、上記した好ましい範囲にある。一方図６に示す従来ノズル３００の流出スペーサ３１０では、吐出口３２０の塗布幅方向両端である内側エッジ３１５Ａ、３１５Ｂで、第２流出流路３１２の塗布幅方向両端に存在する両端流出面３１３Ａ、３１３Ｂに、吐出口３２０と平行な吐出口先端延在面３１９Ａ、３１９Ｂが接続している。そして、吐出口先端延在面３１９Ａ、３１９Ｂは、その外側にある外側エッジ３２１Ａ、３２１Ｂまでは水平に延在し、外側エッジ３２１Ａ、３２１Ｂで上流側に延びる外側斜面３１６Ａ、３１６Ｂに接続している。このような構成のため、吐出口先端延在面３１９Ａ、３１９Ｂは、吐出口３２０の塗布幅方向両端で上流側に向けて連なる外側斜面とはなっていない。すなわち吐出口先端延在面３１９Ａ、３１９Ｂは、下流側に向う両端流出面３１３Ａ、３１３Ｂに反転して上流側に向けて連なる平面になっていない。それゆえ吐出口３２０を含む平面と吐出口先端延在面３１９Ａ、３１９Ｂとがなす角度である角度φＡ、φＢも０度となり、本発明の好ましい範囲外の角度となる。 Next, the difference in shape and action between the nozzle 30 of the present invention and the conventional nozzle will be described in detail with reference to FIGS. 4 and 6. FIG. 6 is a partially enlarged front sectional view showing in detail the coating state of the known conventional nozzle 300 with the outflow spacer 310 on the base material. For example, in the nozzle 30 shown in FIG. 4 according to the embodiment of the present invention, at the edges 105A and 105B at both ends in the coating width direction of the discharge port 110, the outer slopes 106A and 106B facing upstream at angles φA and φB are second. It is connected to the outflow surfaces 104A and 104B at both ends. As a result, the angles φA and φB formed by the plane including the discharge port 110 and the outer slopes 106A and 106B are 45 degrees as described above, which is within the above-mentioned preferable range. On the other hand, in the outflow spacer 310 of the conventional nozzle 300 shown in FIG. 6, both end outflow surfaces 313A existing at both ends in the coating width direction of the second outflow flow path 312 at the inner edges 315A and 315B which are both ends in the coating width direction of the discharge port 320. A discharge port tip extending surface 319A and 319B parallel to the discharge port 320 are connected to the 313B. The discharge port tip extending surfaces 319A and 319B extend horizontally to the outer outer edges 321A and 321B, and are connected to the outer slopes 316A and 316B extending upstream at the outer edges 321A and 321B. .. Due to such a configuration, the discharge port tip extending surfaces 319A and 319B are not outer slopes that are continuous toward the upstream side at both ends of the discharge port 320 in the coating width direction. That is, the discharge port tip extending surfaces 319A and 319B are not flat so as to be inverted on both end outflow surfaces 313A and 313B facing the downstream side and continuous toward the upstream side. Therefore, the angles φA and φB formed by the plane including the discharge port 320 and the discharge port tip extending surfaces 319A and 319B are also 0 degrees, which is outside the preferable range of the present invention.
以上より本発明のノズル３０と従来ノズル３００との形状での本質的な相違点は、流出流路の下流側の吐出口に向かう両端流出面が、吐出口の塗布幅方向両端で反転して上流側に延びる（向かう）平面と接続されているか、いないかである。 From the above, the essential difference in shape between the nozzle 30 of the present invention and the conventional nozzle 300 is that the outflow surfaces at both ends toward the discharge port on the downstream side of the outflow flow path are inverted at both ends in the coating width direction of the discharge port. It may or may not be connected to a plane that extends (towards) the upstream side.
すなわち、従来ノズル３００では、第２流出流路３１２の両端流出面３１３Ａ、３１３Ｂに内側エッジ３１５Ａ、３１５Ｂで接続される吐出口先端延在面３１９Ａ、３１９Ｂが、反転して上流側に向かうのでなく吐出口３２０と平行な方向に延びており、その結果、第２流出流路３１２の両端流出面３１３Ａ、３１３Ｂに沿って下流側の吐出口３２０に向かう塗布液は、壁面効果により内側エッジ３１５Ａ、３１５Ｂで容易に９０度曲がって吐出口先端延在面３１９Ａ、３１９Ｂの方に伝わって行く。一旦吐出口先端延在面３１９Ａ、３１９Ｂを伝わって流れ出した塗布液は、その後も伝わって行く方向が反転する曲がりがない限り、その先の幅ＷＥの位置にある外側エッジ３２１Ａ、３２１Ｂを乗り越えて、外側斜面３１６Ａ、３１６Ｂにも伝わって流れ、この外側斜面３１６Ａ、３１６Ｂ上で塗布液が落下してビードＢＤを形成する。そのため従来ノズル３００では、幅ＷＥや幅ＷＣよりかなり大きな幅ＷＤで基板Ａ上にストライプ塗布膜を形成することになる。すなわち、従来ノズル３００では、小さな幅のストライプ塗布膜を形成するのは困難である。 That is, in the conventional nozzle 300, the discharge port tip extending surfaces 319A and 319B connected to the outflow surfaces 313A and 313B at both ends of the second outflow flow path 312 by the inner edges 315A and 315B are not inverted and head toward the upstream side. The coating liquid extends in a direction parallel to the discharge port 320, and as a result, the coating liquid directed to the discharge port 320 on the downstream side along the outflow surfaces 313A and 313B at both ends of the second outflow flow path 312 has an inner edge 315A due to the wall surface effect. At 315B, it easily bends 90 degrees and travels toward the discharge port tip extending surface 319A and 319B. The coating liquid that once flowed out along the discharge port tip extending surfaces 319A and 319B overcomes the outer edges 321A and 321B at the position of the width WE beyond that, unless there is a bend in which the direction of transmission is reversed. , It also flows along the outer slopes 316A and 316B, and the coating liquid falls on the outer slopes 316A and 316B to form a bead BD. Therefore, in the conventional nozzle 300, the stripe coating film is formed on the substrate A with a width WD considerably larger than the width WE and the width WC. That is, it is difficult to form a strip coating film having a small width with the conventional nozzle 300.
一方、本発明にかかるノズル３０では、上記したように、下流側に塗布液を案内する第２両端流出面１０４Ａ、１０４Ｂが、吐出口１１０の塗布幅方向両端となるエッジ１０５Ａ、１０５Ｂで、反転して上流側に向かう外側斜面１０６Ａ、１０６Ｂに接続されている。これによって第２両端流出面１０４Ａ、１０４Ｂに沿って下流側に向かって流れる塗布液は、エッジ１０５Ａ、１０５Ｂで上流側に急激に反転する外側斜面１０６Ａ、１０６Ｂに沿って流れることができないので、エッジ１０５Ａ、１０５Ｂを乗り越えることができず、その位置で幅ＷＣにて落下して、ビードＢＤを形成する。以降は塗布条件にてビードＢＤの大きさが定まって、幅ＷＣに近い幅ＷＤで基板Ａ上にストライプ状の塗布膜を形成することができる。すなわち、本発明のノズル３０では、小さな幅のストライプ塗布膜を容易に形成できる。 On the other hand, in the nozzle 30 according to the present invention, as described above, the second both end outflow surfaces 104A and 104B for guiding the coating liquid to the downstream side are inverted at the edges 105A and 105B which are both ends in the coating width direction of the discharge port 110. It is connected to the outer slopes 106A and 106B toward the upstream side. As a result, the coating liquid flowing toward the downstream side along the second both end outflow surfaces 104A and 104B cannot flow along the outer slopes 106A and 106B that rapidly reverse to the upstream side at the edges 105A and 105B. It cannot get over 105A and 105B and falls at the position with a width WC to form a bead BD. After that, the size of the bead BD is determined by the coating conditions, and a striped coating film can be formed on the substrate A with a width WD close to the width WC. That is, in the nozzle 30 of the present invention, a strip coating film having a small width can be easily formed.
次に本発明に係る別の実施態様例であるノズル２００について、図５を用いて説明する。ここで図５はノズル２００の流出スペーサ２１０での基材への塗布状況を詳細に示す部分拡大正面断面図である。 Next, the nozzle 200, which is another embodiment of the present invention, will be described with reference to FIG. Here, FIG. 5 is a partially enlarged front sectional view showing in detail the coating state of the nozzle 200 with the outflow spacer 210 on the base material.
図５と図４の比較から、ノズル２００はノズル３０と以下の点で異なっている他は全く同じである。（１）流出スペーサ２１０では、流出流路の塗布幅方向両端に存在する両端流出面間が一定の幅となるように、流出スペーサ１００の第２両端流出面１０４Ａ、１０４Ｂに相当する部分を有しておらず、また、底面１０７に相当する部分も有していない。（２）流出スペーサ２１０で角度αＡ、αＢが９０度（ノズル３０は６０度）、角度φＡ、φＢが１５度（ノズル３０は４５度）である。なお角度θＡ、θＢについては７５度と同じである。（３）流出スペーサ２１０の外形輪郭に対応した第１スペーサと第２スペーサ（いずれも図示せず）を用いている。 From the comparison of FIGS. 5 and 4, the nozzle 200 is exactly the same as the nozzle 30 except that it differs from the nozzle 30 in the following points. (1) The outflow spacer 210 has portions corresponding to the second both end outflow surfaces 104A and 104B of the outflow spacer 100 so that the width between the outflow surfaces at both ends existing at both ends in the coating width direction of the outflow flow path is constant. It does not have a portion corresponding to the bottom surface 107. (2) The outflow spacer 210 has angles αA and αB of 90 degrees (nozzle 30 is 60 degrees) and angles φA and φB of 15 degrees (nozzle 30 is 45 degrees). The angles θA and θB are the same as 75 degrees. (3) A first spacer and a second spacer (neither shown) corresponding to the outer contour of the outflow spacer 210 are used.
このようにノズル２００は、以上の相違点や流出スペーサの見た目上の形状の相違があるものの、吐出口２２０に向かって塗布液を下流側に案内する第２流出流路２１２の両端流出面２１３Ａ、２１３Ｂが、吐出口２２０の塗布幅方向両端となるエッジ２１５Ａ、２１５Ｂで、反転して上流側に延びる外側斜面２１６Ａ、２１６Ｂに接続されているという本質的な点で、ノズル３０と相違はない。すなわち、ノズル２００においては、吐出口２２０を含む吐出口先端面と、吐出口２２０の塗布幅方向両端で上流側に向けて連なる外側斜面２１６Ａ、２１６Ｂとで突出部２１７Ａ、２１７Ｂが形成されるとともに、流出流路の塗布幅方向両端に存在する両端流出面２１３Ａ、２１３Ｂと外側斜面２１６Ａ、２１６Ｂとで塗布方向に延びる線状のエッジ２１５Ａ、２１５Ｂが形成され、かつ、そのエッジの角度が６０度以上９０度以下である。そして、このようなノズル２００において、両端流出面２１３Ａ、２１３Ｂに沿って下流側の吐出口２２０に向かって流れる塗布液は、エッジ２１５Ａ、２１５Ｂで上流側に急激に反転する外側斜面２１６Ａ、２１６Ｂに沿って流れることができないので、エッジ２１５Ａ、２１５Ｂを乗り越えることができず、その位置で幅ＷＣにて落下して、ビードＢＤを形成する。以降は塗布条件にてビードＢＤの大きさが定まって、幅ＷＣに近い幅ＷＤで基板Ａ上にストライプ状の塗布膜を形成することができる。なお、ノズル２００においても、角度θＡ、θＢ、角度φＡ、φＢ、角度αＡ、αＢは、上記した好ましい範囲が適用されている。 As described above, although the nozzle 200 has the above differences and the difference in the appearance of the outflow spacer, the outflow surfaces 213A at both ends of the second outflow flow path 212 that guide the coating liquid downstream toward the discharge port 220. , 213B is not different from the nozzle 30 in that it is connected to the outer slopes 216A and 216B which are inverted and extend to the upstream side at the edges 215A and 215B which are both ends in the coating width direction of the discharge port 220. .. That is, in the nozzle 200, the protrusions 217A and 217B are formed by the discharge port tip surface including the discharge port 220 and the outer slopes 216A and 216B which are continuous toward the upstream side at both ends in the coating width direction of the discharge port 220. The linear edges 215A and 215B extending in the coating direction are formed by the outflow surfaces 213A and 213B at both ends and the outer slopes 216A and 216B existing at both ends in the coating width direction of the outflow flow path, and the angle of the edges is 60 degrees. It is 90 degrees or more and 90 degrees or less. Then, in such a nozzle 200, the coating liquid flowing toward the discharge port 220 on the downstream side along the outflow surfaces 213A and 213B at both ends is applied to the outer slopes 216A and 216B that rapidly reverse to the upstream side at the edges 215A and 215B. Since it cannot flow along the edges, it cannot get over the edges 215A and 215B and falls at that position with a width WC to form a bead BD. After that, the size of the bead BD is determined by the coating conditions, and a striped coating film can be formed on the substrate A with a width WD close to the width WC. Also in the nozzle 200, the above-mentioned preferable ranges are applied to the angles θA and θB, the angles φA and φB, and the angles αA and αB.
次に、ノズル３０と塗布装置１を用いた塗布液７４の基板Ａへのストライプ塗布膜の塗布方法について図１を用いて説明する。 Next, a method of applying the stripe coating film to the substrate A of the coating liquid 74 using the nozzle 30 and the coating device 1 will be described with reference to FIG.
まず準備作業として、図１のタンク７２〜ノズル３０までを塗布液７４で充満して残留空気を排出する作業は既に終了しているものとする。そして塗布液供給装置５０の状態は、シリンジ６２に塗布液７４が充填、吸引バルブ５４は閉、供給バルブ５２は開、そしてピストン６４は最下端の位置にあり、いつでも塗布液７４をノズル３０に供給できるようになっている。また吸着盤１４、ノズル３０もそれぞれ初期位置で待機している。すなわち吸着盤１４はＸ方向には原点位置、Ｘ−Ｙ平面内の回転方向（ψ方向）には吸着盤１４の短手側両端部がＸ方向と平行になるように配置されている。ノズル３０はＹ方向には原点位置、Ｚ方向には一番高い位置にある原点位置に配置されている。 First, as a preparatory work, it is assumed that the work of filling the tank 72 to the nozzle 30 of FIG. 1 with the coating liquid 74 and discharging the residual air has already been completed. The state of the coating liquid supply device 50 is that the syringe 62 is filled with the coating liquid 74, the suction valve 54 is closed, the supply valve 52 is open, and the piston 64 is at the lowermost position, and the coating liquid 74 is always sent to the nozzle 30. It can be supplied. The suction plate 14 and the nozzle 30 are also on standby at their initial positions. That is, the suction plate 14 is arranged so that the origin position is in the X direction and both ends of the suction plate 14 on the short side are parallel to the X direction in the rotation direction (ψ direction) in the XY plane. The nozzle 30 is arranged at the origin position in the Y direction and at the origin position at the highest position in the Z direction.
つづいて塗布装置１の動作開始信号が操作盤８２から制御装置８０に伝えられると、吸着盤１４の表面に図示しないリフトピンが上昇し、図示しない移載装置から基板Ａがリフトピン上部に載置される。そしてリフトピンを下降させて基板Ａを吸着盤１４上に載置し、同時に吸着保持する。次いで高さセンサー２４によって基板Ａの高さを検知するとともに、ＣＣＤカメラ２２で２ヶ所設けられているアライメントマークを検知して、アライメントマークで定められる塗布方向とＹ方向が一致するように吸着盤１４を回転させる。次いで予め定めた基板Ａの塗布開始位置直上にノズル３０の吐出口１１０が位置するように、Ｘ−ψ駆動装置１６を駆動して吸着盤１４をＸ方向に移動させるとともに、Ｙ軸リニア装置２０を駆動してノズル３０をＹ方向に移動させる。ノズル３０が基板Ａ上の塗布開始位置直上に来たら停止させるとともに、測定した基板Ａの高さに応じて、基板Ａとノズル３０の吐出口１１０の両側にあるエッジ１０５Ａ、１０５Ｂとの間のすきまが所定のクリアランスＣの値になるように、Ｚ軸リニア駆動装置１２を駆動してノズル３０をＺ方向に下降停止させる。 Subsequently, when the operation start signal of the coating device 1 is transmitted from the operation panel 82 to the control device 80, a lift pin (not shown) rises on the surface of the suction panel 14, and the substrate A is placed on the lift pin from a transfer device (not shown). To. Then, the lift pin is lowered to place the substrate A on the suction plate 14, and at the same time, the substrate A is sucked and held. Next, the height sensor 24 detects the height of the substrate A, and the CCD camera 22 detects the alignment marks provided at two places, and the suction plate so that the coating direction and the Y direction defined by the alignment marks match. 14 is rotated. Next, the X-ψ drive device 16 is driven to move the suction plate 14 in the X direction so that the discharge port 110 of the nozzle 30 is located directly above the coating start position of the substrate A, which is determined in advance, and the Y-axis linear device 20 is used. To move the nozzle 30 in the Y direction. When the nozzle 30 comes directly above the coating start position on the substrate A, the nozzle 30 is stopped, and depending on the measured height of the substrate A, between the substrate A and the edges 105A and 105B on both sides of the discharge port 110 of the nozzle 30. The Z-axis linear drive device 12 is driven to stop the nozzle 30 from descending in the Z direction so that the clearance becomes a predetermined clearance C value.
基板Ａとノズル３０の間のすきまがクリアランスＣで静止している状態で、塗布液供給装置５０のシリンジポンプ６０を駆動して一定供給速度で塗布液７４を供給し、ノズル３０から基板Ａ上に塗布液を吐出する。この吐出開始を基点に一定時間ｔｓ後に、Ｙ軸リニア駆動装置２０を駆動してノズル３０の一定速度での移動を開始して塗布を開始する。この時のノズル３０の移動の一定速度は塗布速度より与えられ、シリンジポンプ６０の一定供給速度は、塗布するウェット膜厚と塗布速度より与えられる。以上の動作によって、ノズル３０の吐出口１１０と基板Ａの間にビードＢＤが形成され、基板Ａ上に幅ＷＤのストライプ状の塗布膜が形成される。なお一定時間ｔｓは好ましくは０〜１秒、より好ましくは０〜０．５秒とする。 With the gap between the substrate A and the nozzle 30 stationary at the clearance C, the syringe pump 60 of the coating liquid supply device 50 is driven to supply the coating liquid 74 at a constant supply speed, and the coating liquid 74 is supplied from the nozzle 30 onto the substrate A. Discharge the coating liquid to. After a certain period of time ts from the start of this discharge, the Y-axis linear drive device 20 is driven to start the movement of the nozzle 30 at a constant speed to start coating. The constant speed of movement of the nozzle 30 at this time is given by the coating speed, and the constant supply speed of the syringe pump 60 is given by the wet film thickness to be coated and the coating speed. By the above operation, a bead BD is formed between the discharge port 110 of the nozzle 30 and the substrate A, and a striped coating film having a width WD is formed on the substrate A. The constant time ts is preferably 0 to 1 second, more preferably 0 to 0.5 second.
基板Ａの塗布終了位置がノズル３０の吐出口１１０の位置にきたらシリンジポンプ６０の一定供給速度での塗布液７４の供給を停止し、つづいてＺ軸リニア駆動装置１２を駆動して、ノズル３０を上昇させる。これによって基板Ａとノズル３０間に形成されたビードＢＤが断ち切られ、ストライプ状の塗布が終了する。ノズル３０は上昇により原点位置（初期位置）に復帰する。塗布終了後もＹ軸リニア駆動装置２０は動きつづけ、終点位置にきたらノズル３０は一旦停止する。続いて初期位置である原点位置に向かって逆方向にＹ軸リニア駆動装置２０を駆動してノズル３０を移動開始するとともに、Ｘ−ψ駆動装置１６を駆動して吸着盤１４も初期位置に向かってＸ方向に移動開始させる。そしてノズル３０がＹ方向の原点位置、吸着盤１４がＸ方向の初期位置である原点位置に達して静止したら、吸着盤１４の基板Ａの吸着を解除し、リフトピンを上昇させて基板Ａを持ち上げる。この時図示されない移載装置によって基板Ａの下面が保持され、次の工程に基板Ａを搬送する。そして供給バルブ５２を閉、吸引バルブ５４は開としてから、シリンジポンプ６０を逆方向に駆動して一定速度でタンク７２の塗布液７４をシリンジ６２に充填開始する。充填完了後、シリンジポンプ６０を停止させ、吸引バルブ５４を閉として、次の基板Ａが来るのを待ち、同じ動作をくりかえす。 When the coating end position of the substrate A reaches the position of the discharge port 110 of the nozzle 30, the supply of the coating liquid 74 at a constant supply speed of the syringe pump 60 is stopped, and then the Z-axis linear drive device 12 is driven to drive the nozzle 30. To raise. As a result, the bead BD formed between the substrate A and the nozzle 30 is cut off, and the striped coating is completed. The nozzle 30 returns to the origin position (initial position) by ascending. The Y-axis linear drive device 20 continues to move even after the coating is completed, and the nozzle 30 temporarily stops when the end point is reached. Subsequently, the Y-axis linear drive device 20 is driven in the opposite direction toward the origin position, which is the initial position, to start moving the nozzle 30, and the X-ψ drive device 16 is driven to move the suction plate 14 toward the initial position. And start moving in the X direction. When the nozzle 30 reaches the origin position in the Y direction and the suction plate 14 reaches the origin position which is the initial position in the X direction and stands still, the suction of the substrate A of the suction plate 14 is released, and the lift pin is raised to lift the substrate A. .. At this time, the lower surface of the substrate A is held by a transfer device (not shown), and the substrate A is conveyed to the next step. Then, after closing the supply valve 52 and opening the suction valve 54, the syringe pump 60 is driven in the opposite direction to start filling the syringe 62 with the coating liquid 74 of the tank 72 at a constant speed. After the filling is completed, the syringe pump 60 is stopped, the suction valve 54 is closed, the next substrate A is waited for, and the same operation is repeated.
以上の塗布方法で、塗布終了時に塗布液７４がシリンジ６２内に十分残っているなら、塗布液７４の充填は省略してもよい。またノズル３０で塗布できる範囲が、基板ＡのＸ方向寸法より小さく、ノズル３０の塗布位置を変えて所定回数塗布する場合は、１回の塗布終了ごとに、Ｘ−ψ駆動装置１６を駆動して基板ＡをＸ方向に所定量移動させた後、１回目の塗布と同じ塗布動作を繰り返す。 In the above coating method, if sufficient coating liquid 74 remains in the syringe 62 at the end of coating, filling of the coating liquid 74 may be omitted. Further, when the range that can be applied by the nozzle 30 is smaller than the dimension of the substrate A in the X direction and the application position of the nozzle 30 is changed to apply a predetermined number of times, the X-ψ drive device 16 is driven after each application is completed. After moving the substrate A by a predetermined amount in the X direction, the same coating operation as the first coating is repeated.
また以上の塗布方法を実行することにより、本発明のノズル３０を、所望する定められた場所で基材である基板Ａに近接させ、塗布液供給装置５０からノズル３０に塗布液を供給してノズル３０の吐出口１１０から塗布液を吐出するとともに、基板Ａのノズル３０に対する相対移動を行って、基板Ａ上にストライプ塗布膜を形成することを実現する。 Further, by executing the above coating method, the nozzle 30 of the present invention is brought close to the substrate A which is the base material at a desired predetermined place, and the coating liquid is supplied from the coating liquid supply device 50 to the nozzle 30. The coating liquid is discharged from the discharge port 110 of the nozzle 30, and the substrate A is moved relative to the nozzle 30 to form a stripe coating film on the substrate A.
以下実施例により本発明の具体的態様の例を説明する。 Examples of specific embodiments of the present invention will be described below with reference to examples.
図１〜４に示すノズル３０および塗布装置１を用いて、ディスプレイ用途の波長変換フィルターを作成する。 Using the nozzle 30 and the coating device 1 shown in FIGS. 1 to 4, a wavelength conversion filter for display is produced.
まず２６５×３００ｍｍで厚さ０．７ｍｍの無アルカリガラス基板に、厚さ２０μｍ、幅４０μｍ、基板長手方向（Ｙ方向）の長さ２５０ｍｍのポリイミド膜がバンクとして基板短手方向（Ｘ方向）にピッチ３００μｍで７５１本配置されている波長変換フィルターのパターン基板を用意した。なおポリイミド膜は基板中央にあり、基板長手方向の両側２５ｍｍ、基板短手方向の両側２０ｍｍがストライプ状のポリイミド膜のない非製品領域であった。 First, on a non-alkali glass substrate measuring 265 x 300 mm and a thickness of 0.7 mm, a polyimide film having a thickness of 20 μm, a width of 40 μm, and a length of 250 mm in the longitudinal direction (Y direction) of the substrate is used as a bank in the lateral direction (X direction) of the substrate. A pattern substrate of a wavelength conversion filter in which 751 lines were arranged at a pitch of 300 μm was prepared. The polyimide film was located in the center of the substrate, and 25 mm on both sides in the longitudinal direction of the substrate and 20 mm on both sides in the lateral direction of the substrate were non-product areas without the striped polyimide film.
次にバンク間にＲ、Ｇの発光材をストライプ状に塗布すべく、ＲとＧの発光材を準備した。Ｒ発光材は固形分濃度５０％で粘度が２００ｍＰａｓ、Ｇ発光材は固形分濃度５０％で粘度が２５０ｍＰａｓ、であった。図１に示すストライプ塗布装置１でストライプ状の塗布を行うべく、専用のノズル３０を準備した。 Next, R and G light emitting materials were prepared in order to apply R and G light emitting materials in a striped manner between the banks. The R light emitting material had a solid content concentration of 50% and a viscosity of 200 mPas, and the G light emitting material had a solid content concentration of 50% and a viscosity of 250 mPas. A dedicated nozzle 30 was prepared in order to perform striped coating with the stripe coating device 1 shown in FIG.
このノズル３０における流出スペーサ１００（厚さ０．５ｍｍ）は、図４に示すものであり、各部形状は次の通りである。第１流出流路１０１の幅ＷＡ＝０．５ｍｍ、長さＬＢ＝１０ｍｍ、第２流出流路１０２の幅ＷＢ＝０．１ｍｍ、長さＬＥ＝１．９ｍｍ、幅ＷＣ＝０．２２ｍｍ、長さＬＦ＝０．１ｍｍ、吐出口１１０を含む平面と第２両端流出面１０４Ａ、１０４Ｂがなす角度αＡ、αＢ＝６０度、長さＬＤ＝２ｍｍ、長さＬＡ＝１２ｍｍ、エッジ１０５Ａ、１０５Ｂを形成する第２両端流出面１０４Ａ、１０４Ｂと外側斜面１０６Ａ、１０６Ｂがなす角度θＡ、θＢ＝７５度、吐出口１１０を含む平面と外側斜面１０６Ａ、１０６Ｂがなす角度φＡ、φＢ＝４５度、ピッチＰ＝０．９ｍｍ、である。以上によって、幅ＷＣ＝０．２２ｍｍで塗布方向長さ０．５ｍｍの矩形状の吐出口１１０が、ピッチＰ＝０．９ｍｍで２５０個配置されている。 The outflow spacer 100 (thickness 0.5 mm) in the nozzle 30 is shown in FIG. 4, and the shape of each part is as follows. Width WA = 0.5 mm, length LB = 10 mm of the first outflow flow path 101, width WB = 0.1 mm, length LE = 1.9 mm, width WC = 0.22 mm, length of the second outflow flow path 102. LF = 0.1 mm, the angle formed by the flat surface including the discharge port 110 and the second both end outflow surfaces 104A and 104B, αA, αB = 60 degrees, length LD = 2 mm, length LA = 12 mm, edges 105A and 105B. Angles θA, θB = 75 degrees formed by the second both end outflow surfaces 104A, 104B and the outer slopes 106A, 106B, angles φA, φB = 45 degrees, pitch P = formed by the plane including the discharge port 110 and the outer slopes 106A, 106B. It is 0.9 mm. As described above, 250 rectangular discharge ports 110 having a width WC = 0.22 mm and a coating direction length 0.5 mm are arranged at a pitch P = 0.9 mm.
このノズル３０を塗布装置１にとりつけ、上記のＲ発光材をタンク７２〜ノズル３０まで充填した。上記のポリイミド膜がバンクとしてストライプ状に形成された基板を吸着盤１４に吸着後、基板上のアライメントマークをＣＣＤカメラ２２で検知して、ノズル３０を基板の塗布開始位置の直上に配置した。 The nozzle 30 was attached to the coating device 1, and the above R light emitting material was filled from the tank 72 to the nozzle 30. After adsorbing the substrate on which the above-mentioned polyimide film was formed in a stripe shape as a bank on the adsorption plate 14, the alignment mark on the substrate was detected by the CCD camera 22, and the nozzle 30 was placed directly above the coating start position of the substrate.
なお塗布開始位置は、塗布幅方向であるＸ方向には、原点に一番近いバンク間の溝が、ノズル３０の一番原点に近い吐出口と一致する位置、塗布方向であるＹ方向には、基板端部から２０ｍｍの位置であり、ポリイミド膜のバンクの５ｍｍ手前であった。また塗布方向（Ｙ方向）と、ポリイミド膜がストライプとなって伸びる方向とが平行となるように、基板ＡのＸ−Ｙ平面内の回転角度ψをＸ−ψ駆動装置１６により調整をした。高さセンサー２４で測定した基板高さに基づいて、吐出口１１０の両側にあるエッジ１０５Ａ、１０５Ｂと基板Ａ間のすきまであるクリアランスＣが１００μｍとなるように、ノズル３０を下降させた。 The coating start position is in the X direction, which is the coating width direction, at a position where the groove between the banks closest to the origin coincides with the discharge port closest to the origin of the nozzle 30, and in the Y direction, which is the coating direction. It was located 20 mm from the edge of the substrate and 5 mm before the bank of the polyimide film. Further, the rotation angle ψ in the XY plane of the substrate A was adjusted by the X-ψ drive device 16 so that the coating direction (Y direction) and the direction in which the polyimide film stretches as a stripe are parallel. Based on the substrate height measured by the height sensor 24, the nozzle 30 was lowered so that the clearance C between the edges 105A and 105B on both sides of the discharge port 110 and the substrate A was 100 μm.
そして供給バルブ５２が開、吸引バルブ５４が閉であることを確認してから、供給速度６５μｌ／ｓでシリンジポンプ６０を駆動してノズル３０よりＲ発光材を吐出開始するともに、この吐出開始より０．２秒後にＹ軸リニア駆動装置を駆動開始して、ノズル３０をＹ方向に５０ｍｍ／ｓで移動開始した。そして基板長手方向の塗布開始位置から２５５ｍｍの位置でシリンジポンプ６０を停止させるとともに、Ｚ軸リニア駆動装置を駆動して、塗布開始位置から２６０ｍｍの位置でノズル３０を上昇させた。これらの動作によって基板端部から２０ｍｍの塗布開始位置から２６０μｍ幅でＷｅｔ厚さ２０μｍの２６０ｍｍ長のストライプ状塗布膜が２５０本形成され、ポリイミド膜のバンク間にもＲ発光材が充填された。これによって必要な２５０箇所となるポリイミド膜のバンク間にすべてＲ発光材を充填した。この時、バンク上に乗り上げるＲ発光材はなく、Ｒ発光材が充填されていない部分もなかった。 After confirming that the supply valve 52 is open and the suction valve 54 is closed, the syringe pump 60 is driven at a supply speed of 65 μl / s to start discharging the R light emitting material from the nozzle 30, and from this discharge start. After 0.2 seconds, the Y-axis linear drive device was started to be driven, and the nozzle 30 was started to move in the Y direction at 50 mm / s. Then, the syringe pump 60 was stopped at a position 255 mm from the coating start position in the longitudinal direction of the substrate, and the Z-axis linear drive device was driven to raise the nozzle 30 at a position 260 mm from the coating start position. By these operations, 250 striped coating films having a width of 260 μm and a Wet thickness of 20 μm and a length of 260 mm were formed from the coating start position 20 mm from the edge of the substrate, and the R light emitting material was also filled between the banks of the polyimide films. As a result, the R light emitting material was filled between the required 250 banks of the polyimide film. At this time, there was no R light emitting material running on the bank, and there was no portion not filled with the R light emitting material.
以上のＲ発光材の塗布が完了した基板を取り出し、ホットプレートで１２０℃、１０分の乾燥を行った。乾燥後に膜厚を測定したところ、塗布開始から５ｍｍで１０μｍとなっており、塗布開始と終了部から５ｍｍずつ除いた２５０ｍｍの範囲、すなわちポリイミド膜のバンクが形成されている範囲で、膜厚むらは±５％以下となって非常に良好であった。 The substrate to which the above R light emitting material had been applied was taken out and dried on a hot plate at 120 ° C. for 10 minutes. When the film thickness was measured after drying, it was 10 μm at 5 mm from the start of coating, and the film thickness was uneven within the range of 250 mm excluding 5 mm each from the start and end of coating, that is, the range where the bank of the polyimide film was formed. Was ± 5% or less, which was very good.
引き続いてＧ発光材についても同様のストライプ状塗布を行った。Ｇ発光材についてはＲ発光材のすぐ隣のバンク間に塗布できるように位置決めをし、すべてＲ発光材と同じ条件にて塗布と乾燥を行った。以上の塗布と乾燥を行った結果、Ｇ発光材についても、基板端部から２０ｍｍの位置から、厚さ１０μｍ、２６０μｍ幅で２６０ｍｍ長のストライプ状塗布膜が２５０本形成され、Ｇ発光材用のポリイミド膜のバンク間がＧ発光材で規則正しく充填され、塗布欠陥もなかった。なお、Ｇ発光材の膜厚むらは、塗布両端から５ｍｍを除外した２５０ｍｍ長の製品領域で、±５％以下で、非常に良好であった。 Subsequently, the same striped coating was applied to the G light emitting material. The G light emitting material was positioned so that it could be applied between the banks immediately adjacent to the R light emitting material, and all were applied and dried under the same conditions as the R light emitting material. As a result of the above coating and drying, 250 striped coating films having a thickness of 10 μm and a width of 260 μm and a length of 260 mm were formed from a position 20 mm from the edge of the substrate for the G light emitting material. The spaces between the banks of the polyimide film were regularly filled with the G light emitting material, and there were no coating defects. The film thickness unevenness of the G light emitting material was ± 5% or less in the 250 mm long product region excluding 5 mm from both ends of the coating, which was very good.
本発明は、有機ＥＬ、プラズマディスプレイ、カラーフィルター、波長変換フィルター等の基板上の面に、ストライプ状の塗布膜を形成する各種ディスプレイ用部材の製造に利用可能である。 The present invention can be used for manufacturing various display members that form a striped coating film on a surface on a substrate such as an organic EL, a plasma display, a color filter, and a wavelength conversion filter.
１ 塗布装置
１０ ＸＹＺステージ
１２ Ｚ軸リニア駆動装置
１４ 吸着盤
１６ Ｘ−ψ駆動装置
１８ ブラケット
２０ Ｙ軸リニア駆動装置
２２ ＣＣＤカメラ
２４ 高さセンサー
２６ ベース
２８ 門型ベース
３０ ノズル
３１ 第１リップ
３２ マニホールド
３３ 流入流路
３４ 内面
４１ 第２リップ
４２ 組立ボルト
４４ 内面
４５ 挿入用孔
５０ 塗布液供給装置
５２ 供給バルブ
５４ 吸引バルブ
５６ フィルター
６０ シリンジポンプ
６２ シリンジ
６４ ピストン
６６ 本体
６８ 供給ホース
７０ 吸引ホース
７２ タンク
７４ 塗布液
７６ 圧空源
８０ 制御装置
８２ 操作盤
１００ 流出スペーサ
１０１ 第１流出流路
１０２ 第２流出流路
１０３Ａ、１０３Ｂ 第１両端流出面
１０４Ａ、１０４Ｂ 第２両端流出面
１０５Ａ、１０５Ｂ エッジ
１０６Ａ、１０６Ｂ 外側斜面
１０７ 底面
１０８ 切欠き
１０９Ａ、１０９Ｂ 突出部
１１０ 吐出口
１１１ 吐出口先端面
１１２ 外形輪郭
１２０ 第１スペーサ
１２２ 外形輪郭
１２４ 開口部
１４０ 第２スペーサ
１４２ 外形輪郭
２００ ノズル
２１０ 流出スペーサ
２１１ 第１流出流路
２１２ 第２流出流路
２１３Ａ、２１３Ｂ 両端流出面
２１５Ａ、２１５Ｂ エッジ
２１６Ａ、２１６Ｂ 外側斜面
２１７Ａ、２１７Ｂ 突出部
２２０ 吐出口
３００ 従来ノズル
３１０ 流出スペーサ
３１２ 第２流出流路
３１３Ａ、３１３Ｂ 両端流出面
３１５Ａ、３１５Ｂ 内側エッジ
３１６Ａ、３１６Ｂ 外側斜面
３１９Ａ、３１９Ｂ 吐出口先端延在面
３２０ 吐出口
３２１Ａ、３２１Ｂ 外側エッジ
Ａ 基板
ＢＤ ビード
Ｃ クリアランス
ＬＡ、ＬＢ、ＬＤ、ＬＥ、ＬＦ 長さ
Ｐ ピッチ
ＷＡ、ＷＢ、ＷＣ、ＷＤ、ＷＥ 幅
αＡ、αＢ 吐出口を含む平面と両端流出面がなす角度
θＡ、θＢ エッジで接続する両端流出面と外側斜面がなす角度
φＡ、φＢ 吐出口を含む平面と外側斜面がなす角度
1 Coating device 10 XYZ stage 12 Z-axis linear drive device 14 Suction board 16 X-ψ drive device 18 Bracket 20 Y-axis linear drive device 22 CCD camera 24 Height sensor 26 Base 28 Portal type base 30 Nozzle 31 1st lip 32 Manifold 33 Inflow flow path 34 Inner surface 41 Second lip 42 Assembly bolt 44 Inner surface 45 Insertion hole 50 Coating liquid supply device 52 Supply valve 54 Suction valve 56 Filter 60 Syringe pump 62 Syringe 64 Piston 66 Main body
68 Supply hose 70 Suction hose 72 Tank 74 Coating liquid 76 Compressed air source
80 Control device 82 Operation panel 100 Outflow spacer 101 First outflow flow path 102 Second outflow flow path 103A, 103B First end outflow surface 104A, 104B Second end outflow surface 105A, 105B Edge 106A, 106B Outer slope 107 Bottom surface 108 Notch 109A, 109B Protruding portion 110 Discharge port 111 Discharge port tip surface 112 External contour 120 First spacer 122 External contour 124 Opening 140 Second spacer 142 External contour 200 Nozzle 210 Outflow spacer 211 First outflow flow path 212 Second outflow Road 213A, 213B Both ends outflow surface 215A, 215B Edge 216A, 216B Outer slope 217A, 217B Protrusion part 220 Discharge port 300 Conventional nozzle 310 Outflow spacer 312 Second outflow flow path 313A, 313B Both ends outflow surface 315A, 315B Inner edge 316A, 316B Outer slope 319A, 319B Discharge port tip extending surface 320 Discharge port 321A, 321B Outer edge A Substrate BD bead C Clearance LA, LB, LD, LE, LF Length P Pitch WA, WB, WC, WD, WE Width αA, Angle between the plane including the αB discharge port and the outflow surfaces at both ends θA, θB The angle between the outflow surfaces at both ends connected by the edges and the outer slope φA, φB The angle between the plane including the discharge port and the outer slope
Claims (6)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019055847A JP7234729B2 (en) | 2019-03-25 | 2019-03-25 | NOZZLE, COATING APPARATUS, COATING METHOD, AND METHOD FOR MANUFACTURING DISPLAY MEMBER |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019055847A JP7234729B2 (en) | 2019-03-25 | 2019-03-25 | NOZZLE, COATING APPARATUS, COATING METHOD, AND METHOD FOR MANUFACTURING DISPLAY MEMBER |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2020157172A true JP2020157172A (en) | 2020-10-01 |
| JP7234729B2 JP7234729B2 (en) | 2023-03-08 |
Family
ID=72640835
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019055847A Active JP7234729B2 (en) | 2019-03-25 | 2019-03-25 | NOZZLE, COATING APPARATUS, COATING METHOD, AND METHOD FOR MANUFACTURING DISPLAY MEMBER |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7234729B2 (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008264782A (en) * | 2008-07-02 | 2008-11-06 | Hirano Tecseed Co Ltd | Coating apparatus |
| JP2011177707A (en) * | 2010-02-08 | 2011-09-15 | Toray Ind Inc | Coating method, coating apparatus and method for manufacturing member for display |
| JP2013192983A (en) * | 2012-03-16 | 2013-09-30 | Toray Ind Inc | Coating method, coating apparatus, and method for manufacturing display member |
-
2019
- 2019-03-25 JP JP2019055847A patent/JP7234729B2/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008264782A (en) * | 2008-07-02 | 2008-11-06 | Hirano Tecseed Co Ltd | Coating apparatus |
| JP2011177707A (en) * | 2010-02-08 | 2011-09-15 | Toray Ind Inc | Coating method, coating apparatus and method for manufacturing member for display |
| JP2013192983A (en) * | 2012-03-16 | 2013-09-30 | Toray Ind Inc | Coating method, coating apparatus, and method for manufacturing display member |
Also Published As
| Publication number | Publication date |
|---|---|
| JP7234729B2 (en) | 2023-03-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP6121203B2 (en) | Coating device, pattern coating device, and pattern coating method | |
| JP6490409B2 (en) | Coating apparatus, coating method, and manufacturing method of display member | |
| US8387554B2 (en) | Coating nozzle, coating method, and inner volume control valve | |
| US7416608B2 (en) | Process and related apparatus for block coating | |
| JP2014180604A (en) | Intermittent coating apparatus and intermittent coating method and method for manufacturing displaying member | |
| KR101357979B1 (en) | Device for spreading fine coating film uniformly | |
| JP7234729B2 (en) | NOZZLE, COATING APPARATUS, COATING METHOD, AND METHOD FOR MANUFACTURING DISPLAY MEMBER | |
| KR20080102943A (en) | Deposition apparatus | |
| JP5924871B2 (en) | Device for discharging fluid onto the base layer | |
| JP5405061B2 (en) | Coating equipment | |
| JP2011177707A (en) | Coating method, coating apparatus and method for manufacturing member for display | |
| KR101357988B1 (en) | Device for spreading fine coating film uniformly | |
| JP2022156187A (en) | Nozzle, coating device, coating method, and display component manufacturing method | |
| KR101393211B1 (en) | Device for spreading fine coating film uniformly | |
| JP2013192983A (en) | Coating method, coating apparatus, and method for manufacturing display member | |
| JP2011183291A (en) | Nozzle, coating apparatus, coating method, and method for manufacturing display member | |
| KR101807598B1 (en) | Dual dispenser | |
| JP2020512189A (en) | Slot die coating apparatus and slot die coating method | |
| TW201534403A (en) | Method and apparatus for preventing liquid condensation in dispenser | |
| JP3541467B2 (en) | Single wafer coating apparatus and method | |
| CN211989436U (en) | Adhesive dispensing device and adhesive dispensing equipment with same | |
| JPH09173939A (en) | Coating applicator and coating method as well as device for producing color filter and its production method | |
| JP5023565B2 (en) | Coating apparatus and coating method, and display member manufacturing method and manufacturing apparatus | |
| KR102131298B1 (en) | Slot-die Head for Pixel formation | |
| US20220008951A1 (en) | Adhesive dispenser with slotted nozzle assembly |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211213 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20221013 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221018 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20221121 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230124 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230206 |
|
| R151 | Written notification of patent or utility model registration |
Ref document number: 7234729 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |