JP2020147841A - Vacuum degrease washing method and vacuum degrease washing station - Google Patents

Vacuum degrease washing method and vacuum degrease washing station Download PDF

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JP2020147841A
JP2020147841A JP2019049227A JP2019049227A JP2020147841A JP 2020147841 A JP2020147841 A JP 2020147841A JP 2019049227 A JP2019049227 A JP 2019049227A JP 2019049227 A JP2019049227 A JP 2019049227A JP 2020147841 A JP2020147841 A JP 2020147841A
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cleaned
cleaning
organic solvent
vacuum
cleaning chamber
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JP7232395B2 (en
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勝 園部
Masaru Sonobe
園部　　勝
昇 宮腰
Noboru Miyakoshi
昇 宮腰
匡彦 武部
Masahiko Takebe
匡彦 武部
篤司 山下
Tokuji Yamashita
篤司 山下
幸広 庄司
Yukihiro Shoji
幸広 庄司
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Nachi Fujikoshi Corp
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Abstract

To provide a vacuum degrease washing method and a vacuum degrease washing station that incline, wash and dry a washed thing in a decompressed washing room with any washing system.SOLUTION: A vacuum degrease washing method washing a washed thing W with an organic solvent L in a decompressed washing room 100 includes: a first step of carrying the washed thing W into the washing room 100; a second step of decompressing the cleaning room 100 after the first step; a third step of washing the washed thing W with an organic solvent L after the second step; and a fourth step of carrying out the washed thing W from the washing room 100 after the third step. In the third step, the washed thing W is washed while being inclined.SELECTED DRAWING: Figure 11

Description

本発明は、油分が付着した被洗浄物を減圧雰囲気下で洗浄する真空脱脂洗浄方法およびそれに用いる真空脱脂洗浄装置に関する。 The present invention relates to a vacuum degreasing cleaning method for cleaning an object to be cleaned with oil attached under a reduced pressure atmosphere, and a vacuum degreasing cleaning device used therefor.

自動車部品などの鋼製品は、射出成型または鋳造後に余分な部分を切削加工により切断する工程を得て、製造される。その後に、切削加工により付着した潤滑材や切削油を有機溶剤で除去する（洗浄する）工程が必要になる。 Steel products such as automobile parts are manufactured by obtaining a process of cutting an excess portion by cutting after injection molding or casting. After that, a step of removing (cleaning) the lubricating material and cutting oil adhering by the cutting process with an organic solvent is required.

洗浄する工程で有機溶剤を使用する場合、一般的には洗浄室内が減圧された雰囲気で行なう。また、洗浄する方式は、洗浄室内の被洗浄物に対して有機溶剤を噴霧したり、散水方式（シャワー）で洗浄したり、または被洗浄物を有機溶剤中に浸漬させる方式など様々な方法がある。 When an organic solvent is used in the cleaning step, it is generally performed in a decompressed atmosphere in the cleaning chamber. In addition, there are various cleaning methods such as spraying an organic solvent on the object to be cleaned in the cleaning chamber, cleaning with a watering method (shower), or immersing the object to be cleaned in the organic solvent. is there.

被洗浄物には種々の形態が存在するが、断面形状が複雑に入り組んだ形状の製品や開口部が狭くて内部に大きな空洞を有している様な製品である場合、切削加工中の潤滑油などの液体が製品の内部に一旦侵入すると、それらを完全に取り除くことは非常に困難である。 There are various forms of the object to be cleaned, but if the product has a complicated cross-sectional shape or a product with a narrow opening and a large cavity inside, lubrication during cutting Once liquids such as oil have entered the product, it is very difficult to remove them completely.

また、鋼製品を洗浄する場合には一度に多量の製品を洗浄する必要があり、多量の製品をカゴなどの容器に積み上げてからシャワーで洗浄したり、洗浄液中に浸漬することで洗浄される。その場合、鋼製品は容器内で設置される箇所により、製品間で洗浄の効果が大きく異なるという問題があった。 In addition, when cleaning steel products, it is necessary to wash a large number of products at once, and the large number of products are washed by stacking them in a container such as a basket and then washing them in a shower or by immersing them in a cleaning liquid. .. In that case, there is a problem that the cleaning effect of the steel product differs greatly between the products depending on the place where the steel product is installed in the container.

これの問題に対して、例えば特許文献１ないし３では洗浄室内に容器を傾動させる装置を設置することで被洗浄物を揺動しながら洗浄する方式や洗浄室外に揺動装置を設置することで洗浄室全体を上下方向や左右方向に動かしながら洗浄する方式が開示されている。 To solve this problem, for example, in Patent Documents 1 to 3, a method of cleaning the object to be cleaned while swinging by installing a device for tilting the container in the cleaning chamber or installing a swinging device outside the cleaning chamber is used. A method of cleaning while moving the entire cleaning chamber in the vertical direction or the horizontal direction is disclosed.

特開平５−２６１３４７号公報Japanese Unexamined Patent Publication No. 5-261347 特開平８−２９９９２５号公報Japanese Unexamined Patent Publication No. 8-299925 特許第５５３７７８４号公報Japanese Patent No. 5537784

しかし、特許文献１ないし３に開示された洗浄方式では、洗浄室全体を傾斜させるための大掛かりな装置が必要となり、傾斜させるための電力も過大になる。特に、被洗浄物を洗浄液中に浸漬して洗浄する場合には、洗浄室の重量だけでなく、洗浄液自体の重量も加わるので、これらの重量を傾動させることは非常に困難である。 However, the cleaning method disclosed in Patent Documents 1 to 3 requires a large-scale device for tilting the entire cleaning chamber, and the electric power for tilting is also excessive. In particular, when the object to be cleaned is immersed in the cleaning liquid for cleaning, not only the weight of the cleaning chamber but also the weight of the cleaning liquid itself is added, so that it is very difficult to tilt these weights.

さらに、洗浄液として有機溶剤を使用する場合には、洗浄室を減圧された雰囲気で行なうので、モータや油圧シリンダーなど電気を動力源とする部品を洗浄室内に設置することは困難である。 Further, when an organic solvent is used as the cleaning liquid, the cleaning chamber is operated in a depressurized atmosphere, so that it is difficult to install parts powered by electricity such as a motor and a hydraulic cylinder in the cleaning chamber.

そこで、本発明は減圧された洗浄室内にて如何なる洗浄方式であっても、被洗浄物を傾斜させながら洗浄および乾燥させる真空脱脂洗浄方法および真空脱脂洗浄装置を提供することを課題とする。 Therefore, an object of the present invention is to provide a vacuum degreasing cleaning method and a vacuum degreasing cleaning apparatus for cleaning and drying an object to be cleaned while tilting it, regardless of the cleaning method in a depressurized cleaning chamber.

本発明は、内部が減圧された（減圧雰囲気）洗浄室内で有機溶媒により被洗浄物を洗浄する真空脱脂洗浄方法を以下の第１ないし第４工程から構成した。すなわち、被洗浄物を洗浄室内へ搬入する第１工程，その後に洗浄室内を減圧する第２工程，その後に被洗浄物に対して有機溶媒を用いて洗浄する第３工程，その後に洗浄室内から被洗浄物を搬出する第４工程を有すると共に、第３工程で被洗浄物を傾斜させた状態で有機溶媒を噴霧または散水する真空脱脂洗浄方法とした。なお、第２工程では洗浄室内を減圧しながら、被洗浄物を徐々に傾斜させても構わない。 The present invention comprises the following first to fourth steps as a vacuum degreasing cleaning method for cleaning an object to be cleaned with an organic solvent in a cleaning chamber in which the inside is depressurized (decompressed atmosphere). That is, the first step of bringing the object to be cleaned into the cleaning chamber, the second step of reducing the pressure in the cleaning chamber, the third step of cleaning the object to be cleaned with an organic solvent, and then from the cleaning chamber. In addition to having a fourth step of carrying out the object to be cleaned, the vacuum degreasing cleaning method of spraying or sprinkling an organic solvent with the object to be cleaned tilted in the third step was used. In the second step, the object to be cleaned may be gradually tilted while depressurizing the cleaning chamber.

また、第３工程においては、有機溶剤を噴霧または散水することで被洗浄物を洗浄したり、第２工程後に洗浄室内へ有機溶媒を導入して被洗浄物を浸漬することで洗浄する方式でも構わない。 Further, in the third step, the object to be cleaned may be washed by spraying or sprinkling an organic solvent, or after the second step, the organic solvent may be introduced into the cleaning chamber to immerse the object to be cleaned. I do not care.

なお、第２工程では洗浄室内を減圧しながら被洗浄物を徐々に傾斜させたり、もしくは第３工程では有機溶媒中に浸漬された被洗浄物を上下方向に揺動しながら洗浄する方法であっても構わない。 In the second step, the object to be cleaned is gradually tilted while depressurizing the cleaning chamber, or in the third step, the object to be cleaned immersed in the organic solvent is washed while swinging in the vertical direction. It doesn't matter.

これらの洗浄方法を行なう真空脱脂洗浄装置については、被洗浄物を内部に収容できる洗浄室、洗浄室内を減圧雰囲気にする真空ポンプ、洗浄室内へ有機溶媒を供給する洗浄タンクを備えて、洗浄室には被洗浄物を設置する積荷台を有しており、積荷台の下方にベローズが設置した真空脱脂洗浄装置とする。また、積荷台の下方には複数のベローズを設置したり、ベローズの内部に不活性ガスを導入する配管を洗浄室の底部に設けても構わない。 The vacuum degreasing cleaning device that performs these cleaning methods is equipped with a cleaning chamber that can accommodate the object to be cleaned, a vacuum pump that creates a decompressed atmosphere in the cleaning chamber, and a cleaning tank that supplies organic solvent to the cleaning chamber. Has a loading platform on which the object to be cleaned is installed, and is a vacuum degreasing cleaning device installed by bellows below the loading platform. Further, a plurality of bellows may be installed below the loading platform, or a pipe for introducing the inert gas may be provided at the bottom of the cleaning chamber inside the bellows.

本発明の真空脱脂洗浄方法は、減圧された洗浄室内にて如何なる洗浄方式であっても、被洗浄物を傾斜させながら洗浄および乾燥させるという効果を奏する。また、本発明の真空脱脂洗浄装置は従来の洗浄装置のような大掛かりな装置を用いることなく、簡易な装置（ベローズ）のみで洗浄中や乾燥中などに被洗浄物を傾動させて、複雑な形状の被洗浄物でも洗浄できるという効果を奏する。 The vacuum degreasing cleaning method of the present invention has the effect of cleaning and drying the object to be cleaned while inclining the object to be cleaned, regardless of the cleaning method in the decompressed cleaning chamber. Further, the vacuum degreasing cleaning device of the present invention is complicated because the object to be cleaned is tilted during cleaning or drying with only a simple device (bellows) without using a large-scale device such as a conventional cleaning device. It has the effect of being able to clean even the shape of the object to be cleaned.

本発明の真空脱脂洗浄方法に用いる傾動機器１０の正面図である。It is a front view of the tilting apparatus 10 used for the vacuum degreasing cleaning method of this invention. 本発明の真空脱脂洗浄方法に用いる傾動機器１０の平面図である。It is a top view of the tilting apparatus 10 used in the vacuum degreasing cleaning method of this invention. 第２実施形態の傾動機器２０の正面図である。It is a front view of the tilting apparatus 20 of the 2nd Embodiment. 第２実施形態の傾動機器２０の平面図である。It is a top view of the tilting apparatus 20 of the 2nd Embodiment. 被洗浄物Ｗを設置した場合の傾動機器３０，４０の正面図である。It is a front view of the tilting apparatus 30, 40 when the object W to be cleaned is installed. 被洗浄物Ｗを設置した場合の傾動機器３０，４０の左側面図である。It is a left side view of the tilting apparatus 30, 40 when the object W to be cleaned is installed. 被洗浄物Ｗを設置した場合の傾動機器３０，４０の平面図である。It is a top view of the tilting devices 30 and 40 when the object W to be cleaned is installed. 図１に示す傾動機器１０が作動した場合の正面図である。It is a front view when the tilting device 10 shown in FIG. 1 is operated. 本発明の真空脱脂洗浄方法における第１工程の状態を示す模式図である。It is a schematic diagram which shows the state of the 1st step in the vacuum degreasing cleaning method of this invention. 本発明の真空脱脂洗浄方法における第２工程の状態を示す模式図である。It is a schematic diagram which shows the state of the 2nd step in the vacuum degreasing cleaning method of this invention. 本発明の真空脱脂洗浄方法における第３工程（シャワー方式）の状態を示す模式図である。It is a schematic diagram which shows the state of the 3rd step (shower method) in the vacuum degreasing cleaning method of this invention. 本発明の真空脱脂洗浄方法における第３工程（浸漬方式：水平）の状態を示す模式図である。It is a schematic diagram which shows the state of the 3rd step (immersion method: horizontal) in the vacuum degreasing cleaning method of this invention. 本発明の真空脱脂洗浄方法における第３工程（浸漬方式：傾動）の状態を示す模式図である。It is a schematic diagram which shows the state of the 3rd step (immersion method: tilting) in the vacuum degreasing cleaning method of this invention. 本発明の真空脱脂洗浄方法における第４工程前の状態を示す模式図である。It is a schematic diagram which shows the state before the 4th step in the vacuum degreasing cleaning method of this invention.

本発明を実施するための形態について、図面を用いて説明する。本発明の真空脱脂洗浄方法を実施する傾動機器（第１実施形態）１０の正面図を図１、平面図を図２に示す。また、異なる形態の傾動機器（第２実施形態）２０の正面図を図３、平面図を図４に示す。複数の傾動機器３０，４０を用いて被洗浄物Ｗを積載台５０上に載置した状態の正面図を図５、左側面図を図６、平面図を図７に示す。また、図１に示す傾動機器１０が作動した状態の正面図を図８に示す。 A mode for carrying out the present invention will be described with reference to the drawings. FIG. 1 shows a front view and FIG. 2 shows a plan view of a tilting device (first embodiment) 10 that implements the vacuum degreasing cleaning method of the present invention. Further, a front view of a tilting device (second embodiment) 20 having a different form is shown in FIG. 3, and a plan view is shown in FIG. A front view of a state in which the object to be cleaned W is placed on the loading platform 50 using the plurality of tilting devices 30 and 40 is shown in FIG. 5, a left side view is shown in FIG. 6, and a plan view is shown in FIG. Further, FIG. 8 shows a front view of the state in which the tilting device 10 shown in FIG. 1 is operated.

傾動機器（第１実施形態）１０は、図１および図２に示すように長方形状のテーブル１１とその下方に４個のベローズ（蛇腹）１２ａ〜１２ｄがほぼ等間隔で配置されており、ベローズ１２ａ〜１２ｄがテーブル１１を支持している。また、テーブル１１の両端にはストッパー部材１３と押し上げ部材１４が設置されている。 In the tilting device (first embodiment) 10, as shown in FIGS. 1 and 2, a rectangular table 11 and four bellows (bellows) 12a to 12d are arranged below the rectangular table 11 at substantially equal intervals. 12a-12d support the table 11. Further, stopper members 13 and push-up members 14 are installed at both ends of the table 11.

また、別の実施形態である傾動機器（第２実施形態）２０は、図３および図４に示すように図１等に示す傾動機器（第１実施形態）１０と同様に長方形状のテーブル２１とその下方に３個のベローズ（蛇腹）２２ａ〜２２ｃが等間隔で配置されている。テーブル２１の両端にはストッパー部品２３と２枚の押し上げ部材２４（２４ａ，２４ｂ）が並んで設置されている。 Further, the tilting device (second embodiment) 20 which is another embodiment is a rectangular table 21 similar to the tilting device (first embodiment) 10 shown in FIG. 1 and as shown in FIGS. 3 and 4. And three bellows (bellows) 22a to 22c are arranged at equal intervals below the bellows. A stopper component 23 and two push-up members 24 (24a, 24b) are installed side by side at both ends of the table 21.

次に、傾動装置が洗浄室内の減圧雰囲気下で作用した場合について説明する。傾動装置を洗浄室内で使用する場合には、図５ないし図７に示す様に傾動装置３０，４０上に積載台５０を設置した上で被洗浄物（ワーク）Ｗを積載する。 Next, a case where the tilting device operates in a reduced pressure atmosphere in the washing chamber will be described. When the tilting device is used in the cleaning chamber, the object to be cleaned (work) W is loaded after installing the loading platform 50 on the tilting devices 30 and 40 as shown in FIGS. 5 to 7.

傾動装置３０，４０が洗浄室内において、大気圧から徐々に減圧された雰囲気になるに従い、ベローズ３２，４２（４２ａ〜４２ｄ）内の雰囲気は大気圧のままであるため、ベローズ３２，４２が徐々に膨張を始める。ベローズ３２，４２が膨張することでテーブル３１，４１が上方に持ち上がる。 As the tilting devices 30 and 40 gradually decompress from the atmospheric pressure in the cleaning chamber, the atmosphere inside the bellows 32, 42 (42a to 42d) remains at the atmospheric pressure, so that the bellows 32, 42 gradually become the atmosphere. Starts to expand. As the bellows 32 and 42 expand, the tables 31 and 41 are lifted upward.

テーブル３１，４１が持ち上がると、テーブル３１，４１の端部に設置された押し上げ部材３４，４４が被洗浄物Ｗを載置した積載台５０に接触すると、その積載台５０が傾き始める。このときに、積載台５０の端部はテーブル３１，４１上のストッパー部品３３，４３と接触しているので、積載台５０が斜め方向に滑り落ちることを阻止する。 When the tables 31 and 41 are lifted, when the push-up members 34 and 44 installed at the ends of the tables 31 and 41 come into contact with the loading platform 50 on which the object W to be cleaned is placed, the loading platform 50 begins to tilt. At this time, since the end portion of the loading platform 50 is in contact with the stopper parts 33 and 43 on the tables 31 and 41, the loading platform 50 is prevented from sliding down in the oblique direction.

また、各ベローズの底部に外部から窒素やアルゴン等の不活性ガスを供給できる配管（図示なし）が接続されている場合には、ベローズの膨張量（上昇量）が不足して被洗浄物Ｗを載置した積載台５０に接触できない場合でも、不活性ガスをベローズ内に追加で供給することでベローズの上昇量を補うことができる。 If a pipe (not shown) capable of supplying an inert gas such as nitrogen or argon from the outside is connected to the bottom of each bellows, the amount of expansion (rise) of the bellows is insufficient and the object to be cleaned W Even when the loading platform 50 on which the is placed cannot be contacted, the rising amount of the bellows can be supplemented by additionally supplying the inert gas into the bellows.

次に、これらの傾動装置（第１実施形態）１０を利用した洗浄工程について、図面を用いて説明する。傾動装置（第１実施形態）１０による洗浄工程の模式図を図９〜図１４に示す。まず、第１工程では、真空脱脂洗浄装置における洗浄室１００内に被洗浄物（ワーク）Ｗを搬入する（図９）。その際の装置内は大気圧下であるので、被洗浄物Ｗの搬入が完了すると、同装置内の圧力を減圧する、いわゆる真空引きを行なう。洗浄室１００内の雰囲気が減圧されると（第２工程）、ベローズ４２内は大気圧と同じ１気圧であるため、ベローズ４２内の空気が膨張することでベローズ４２が上方に伸びる（図１０）。その結果、テーブル４１が上昇して積載台５０が傾くので被洗浄物Ｗも傾斜して上面に残存していた切削油が流れ落ちる。 Next, a cleaning process using these tilting devices (first embodiment) 10 will be described with reference to the drawings. 9 to 14 show schematic views of the cleaning process by the tilting device (first embodiment) 10. First, in the first step, the object to be cleaned (work) W is carried into the cleaning chamber 100 of the vacuum degreasing cleaning device (FIG. 9). Since the inside of the device at that time is under atmospheric pressure, when the loading of the object to be cleaned W is completed, the pressure inside the device is reduced, so-called vacuuming. When the atmosphere in the cleaning chamber 100 is decompressed (second step), the inside of the bellows 42 is 1 atm, which is the same as the atmospheric pressure. Therefore, the air in the bellows 42 expands and the bellows 42 expands upward (FIG. 10). ). As a result, the table 41 rises and the loading platform 50 tilts, so that the object to be cleaned W also tilts and the cutting oil remaining on the upper surface flows down.

次の工程（第３工程）では、被洗浄物Ｗが傾いた状態で洗浄室１００の天井に設置された配管Ｐ１から有機溶剤Ｓを散水（シャワー）する（図１１）。それにより、被洗浄物Ｗの凹部に残存した切削油を洗い流す。その工程（第３工程）においては、有機溶剤Ｓの散水に替えて、被洗浄物Ｗを有機溶剤内に浸漬させる場合には、大気圧の状態で洗浄室内に有機溶剤Ｌを導入する（図１２）。その後、ベローズ４２内に窒素ガスなどの不活性ガスを床下に設けられた配管Ｐ２を介して送り込むことでベローズ４２を上昇させる（図１３）。 In the next step (third step), the organic solvent S is sprinkled (showered) from the pipe P1 installed on the ceiling of the cleaning chamber 100 with the object W to be cleaned tilted (FIG. 11). As a result, the cutting oil remaining in the recess of the object W to be cleaned is washed away. In that step (third step), when the object to be cleaned W is immersed in the organic solvent instead of sprinkling the organic solvent S, the organic solvent L is introduced into the cleaning chamber under atmospheric pressure (FIG. 12). After that, the bellows 42 is raised by sending an inert gas such as nitrogen gas into the bellows 42 through the pipe P2 provided under the floor (FIG. 13).

その結果、図１１に示す状態と同様に被洗浄物Ｗが傾くので、被洗浄物Ｗの底面に滞留している気泡を外部に放出するされて、底面を有機溶剤Ｌに接触することで洗浄が可能となる。また、被洗浄物Ｗを有機溶剤Ｌ中に浸漬した状態で洗浄する場合には、窒素ガス等の導入量を変化させることで被洗浄物Ｗの傾きを自在に調整できる。そのため、被洗浄物Ｗを有機溶剤Ｌ中で揺動することで被洗浄物Ｗの全域にわたり有機溶剤Ｌと接触させることができる。 As a result, since the object to be cleaned W is tilted as in the state shown in FIG. 11, air bubbles staying on the bottom surface of the object to be cleaned W are released to the outside, and the bottom surface is cleaned by contacting with the organic solvent L. Is possible. Further, when cleaning the object W to be cleaned while being immersed in the organic solvent L, the inclination of the object W to be cleaned can be freely adjusted by changing the amount of nitrogen gas or the like introduced. Therefore, by swinging the object W to be cleaned in the organic solvent L, the object W to be cleaned can be brought into contact with the organic solvent L over the entire area.

散水や浸漬による洗浄が終了した後、洗浄室１００内を大気圧に戻し、有機溶剤Ｌを洗浄室１００外へ排出する。その後、再び洗浄室１００を減圧し、傾動機器４０のベローズ４２を上昇させると、被洗浄物Ｗが傾くので、被洗浄物Ｗの上面に残存した有機溶剤Ｌを外部に排出できる（図１４）。洗浄室内における有機溶剤Ｌの排出が完了し、傾動機器４０のベローズ４２がすべて収縮することで被洗浄物Ｗが水平に保持されていることを確認して、洗浄室１００から被洗浄物Ｗを搬出する（第４工程）。 After cleaning by sprinkling water or immersion is completed, the inside of the cleaning chamber 100 is returned to atmospheric pressure, and the organic solvent L is discharged to the outside of the cleaning chamber 100. After that, when the cleaning chamber 100 is depressurized again and the bellows 42 of the tilting device 40 is raised, the object W to be cleaned is tilted, so that the organic solvent L remaining on the upper surface of the object W to be cleaned can be discharged to the outside (FIG. 14). .. After confirming that the discharge of the organic solvent L in the cleaning chamber is completed and all the bellows 42 of the tilting device 40 are contracted to hold the object W to be cleaned horizontally, the object W to be cleaned is removed from the cleaning chamber 100. Carry out (4th step).

１０，２０，３０，４０ 傾動機器
１１，２１，３１，４１ テーブル
１２，２２，３２，４２ ベローズ（蛇腹）
１３，２３，３３，４３ ストッパー部材
１４，２４，３４，４４ 押し上げ部材
５０ 積載台
１００ 洗浄室
Ｌ，Ｓ 有機溶剤
Ｐ１，Ｐ２ 配管

10, 20, 30, 40 Tilt equipment 11,21,31,41 Table 12,22,32,42 Bellows (bellows)
13, 23, 33, 43 Stopper member 14, 24, 34, 44 Push-up member 50 Loading platform 100 Cleaning room L, S Organic solvent P1, P2 Piping

Claims (8)

内部が減圧された洗浄室内で有機溶媒により被洗浄物を洗浄する真空脱脂洗浄方法において、前記被洗浄物を前記洗浄室内へ搬入する第１工程と、前記第１工程後に前記洗浄室内を減圧する第２工程と、前記第２工程後に前記被洗浄物に対して前記有機溶媒を用いて洗浄する第３工程と、前記第３工程後に前記洗浄室内から前記被洗浄物を搬出する第４工程と、を含み、前記第３工程にて前記被洗浄物を傾斜させた状態で前記有機溶媒を用いて洗浄することを特徴とする真空脱脂洗浄方法。 In a vacuum degreasing cleaning method in which an object to be cleaned is cleaned with an organic solvent in a cleaning chamber in which the inside is depressurized, the first step of bringing the object to be cleaned into the cleaning chamber and the first step of carrying the object to be decompressed are reduced in pressure. A second step, a third step of cleaning the object to be cleaned with the organic solvent after the second step, and a fourth step of carrying out the object to be cleaned from the cleaning chamber after the third step. A vacuum degreasing cleaning method comprising, and cleaning the object to be cleaned with the organic solvent in a state where the object to be cleaned is tilted in the third step. 前記第３工程では、前記被洗浄物に対して前記有機溶媒を噴霧または散水することで洗浄することを特徴とする請求項１に記載の真空脱脂洗浄方法。 The vacuum degreasing cleaning method according to claim 1, wherein in the third step, the object to be cleaned is cleaned by spraying or sprinkling the organic solvent on the object to be cleaned. 前記第３工程では、前記洗浄室内へ前記有機溶媒を導入して前記被洗浄物を浸漬することで洗浄することを特徴とする請求項１に記載の真空脱脂洗浄方法。 The vacuum degreasing cleaning method according to claim 1, wherein in the third step, the organic solvent is introduced into the cleaning chamber and the object to be cleaned is immersed to perform cleaning. 前記第２工程では、前記洗浄室内を減圧しながら前記被洗浄物を徐々に傾斜させることを特徴とする請求項１ないし請求項３のいずれか１項に記載の真空脱脂洗浄方法。 The vacuum degreasing cleaning method according to any one of claims 1 to 3, wherein in the second step, the object to be cleaned is gradually tilted while depressurizing the cleaning chamber. 前記第３工程では、前記有機溶媒中に浸漬された前記被洗浄物を上下方向に揺動することを特徴とする請求項３または４に記載の真空脱脂洗浄方法。 The vacuum degreasing cleaning method according to claim 3 or 4, wherein in the third step, the object to be cleaned immersed in the organic solvent is shaken in the vertical direction. 被洗浄物を内部に収容できる洗浄室と、前記洗浄室内を減圧雰囲気にする真空ポンプと、前記洗浄室内へ有機溶媒を供給する洗浄タンクと、を備える真空脱脂洗浄装置において、前記洗浄室には、前記被洗浄物を設置する積荷台と、前記積荷台を下方から支持するベローズと、を有する傾動機器が設置されていることを特徴とする真空脱脂洗浄装置。 In a vacuum degreasing cleaning apparatus including a cleaning chamber capable of accommodating an object to be cleaned, a vacuum pump for creating a decompressed atmosphere in the cleaning chamber, and a cleaning tank for supplying an organic solvent to the cleaning chamber, the cleaning chamber has a cleaning chamber. A vacuum degreasing cleaning device comprising a loading platform on which the object to be cleaned is installed and a bellows that supports the loading platform from below. 前記積荷台の下方には、複数のベローズが設置されていることを特徴とする請求項６に記載の真空脱脂洗浄装置。 The vacuum degreasing cleaning device according to claim 6, wherein a plurality of bellows are installed below the loading platform. 前記洗浄室の底部には、前記ベローズの内部に不活性ガスを導入する配管をさらに備えていることを特徴とする請求項６または７に記載の真空脱脂洗浄装置。 The vacuum degreasing cleaning apparatus according to claim 6 or 7, wherein the bottom of the cleaning chamber is further provided with a pipe for introducing an inert gas inside the bellows.
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JPH07275816A (en) * 1994-04-13 1995-10-24 Uchinami Techno Clean:Kk One chamber type underwater cleaning and draining device
JP2001038310A (en) * 1999-07-30 2001-02-13 Matsushita Electric Ind Co Ltd Sheet-fed rinsing by liquid chemical and its device
JP2010012417A (en) * 2008-07-03 2010-01-21 Mitsubishi Materials Techno Corp Cleaning apparatus and cleaning method

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03109982A (en) * 1989-09-25 1991-05-09 Brother Ind Ltd Method and device for ultrasonic washing
JPH05261347A (en) * 1992-01-22 1993-10-12 Japan Field Kk Washing apparatus
JPH05267264A (en) * 1992-03-19 1993-10-15 Nec Kagoshima Ltd Manufacture of liquid-crystal display device
JPH06226217A (en) * 1993-02-03 1994-08-16 World Kiko:Kk Washing method and washing device
JPH06306658A (en) * 1993-04-22 1994-11-01 Koyo Rindobaagu Kk Degreasing and washing method and its equipment
JPH07275816A (en) * 1994-04-13 1995-10-24 Uchinami Techno Clean:Kk One chamber type underwater cleaning and draining device
JP2001038310A (en) * 1999-07-30 2001-02-13 Matsushita Electric Ind Co Ltd Sheet-fed rinsing by liquid chemical and its device
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