JP2020123677A - Work-piece mounting table - Google Patents
Work-piece mounting table Download PDFInfo
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- JP2020123677A JP2020123677A JP2019014917A JP2019014917A JP2020123677A JP 2020123677 A JP2020123677 A JP 2020123677A JP 2019014917 A JP2019014917 A JP 2019014917A JP 2019014917 A JP2019014917 A JP 2019014917A JP 2020123677 A JP2020123677 A JP 2020123677A
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- 238000013459 approach Methods 0.000 claims abstract description 8
- 230000005489 elastic deformation Effects 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 12
- 239000000835 fiber Substances 0.000 description 9
- 239000000126 substance Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- 239000000470 constituent Substances 0.000 description 4
- 239000004696 Poly ether ether ketone Substances 0.000 description 3
- 239000004734 Polyphenylene sulfide Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 229920002530 polyetherether ketone Polymers 0.000 description 3
- 229920000069 polyphenylene sulfide Polymers 0.000 description 3
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 3
- 239000004810 polytetrafluoroethylene Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 230000006866 deterioration Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000010828 elution Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000012447 hatching Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
本発明は、ワークを載置するワーク載置台に関するものである。 The present invention relates to a work placing table on which a work is placed.
従来より、半導体ウェハ等のワークの製造装置では、機器間でワークを移送する際に、ワークをワーク載置台に仮置きする構成が知られている。 2. Description of the Related Art Conventionally, in a device for manufacturing a work such as a semiconductor wafer, a structure is known in which a work is temporarily placed on a work mounting table when the work is transferred between devices.
例えば、特許文献１には、ロード・アンロード部３と研磨ヘッド４２との間でウェハ１０を移送する際に、ウェハ１０を仮置きするウェーハ転置台４３１、４３２を備えたウェハ研磨装置１が開示されている。なお、符号は特許文献１における符号である。 For example, Patent Document 1 discloses a wafer polishing apparatus 1 including wafer transfer tables 431 and 432 for temporarily placing the wafer 10 when the wafer 10 is transferred between the load/unload unit 3 and the polishing head 42. It is disclosed. The reference numerals are those in Patent Document 1.
ところで、ワーク載置台には、ワークが載置されているか否かを判定する在荷センサが設けられている。このような在荷センサとしては、反射型又は透過型のものが一般的である。 By the way, the work placement table is provided with an on-board sensor that determines whether or not a work is placed. A reflective type or a transmissive type is generally used as such an on-board sensor.
図５（ａ）、（ｂ）に示すように、ワーク１００の在荷検知を反射型の在荷センサで行う場合、トレイ１０１に一対のファイバーセンサ１０２、１０３を設け、一方のファイバーセンサ１０２から照射された光がワーク１００で反射し、この反射光を他方のファイバーセンサ１０３で受光し、受光光量が所定閾値を超えたときに、ワーク１００がトレイ１０１に載置されていることを検知する。 As shown in FIGS. 5A and 5B, when the load detection of the work 100 is performed by the reflection type load sensor, a pair of fiber sensors 102 and 103 are provided on the tray 101, and one fiber sensor 102 The irradiated light is reflected by the work 100, the reflected light is received by the other fiber sensor 103, and when the received light amount exceeds a predetermined threshold value, it is detected that the work 100 is placed on the tray 101. ..
一方、図５（ｃ）に示すように、ワーク１００がトレイ１０１に載置されていない場合には、ファイバーセンサ１０３の受光光量が所定閾値を超えないため、ワーク１００がトレイ１０１に載置されていないと判断する。 On the other hand, as shown in FIG. 5C, when the work 100 is not placed on the tray 101, the amount of light received by the fiber sensor 103 does not exceed the predetermined threshold, so the work 100 is placed on the tray 101. Judge not to.
また、図６（ａ）、（ｂ）に示すように、ワーク１００の在荷検知を透過型の在荷センサで行う場合、トレイ１０４に設けられたファイバーセンサ１０５に向けて光を照射する照明１０６を配置し、照明１０６から照射された光がワークＷで遮られ、受光光量が所定閾値を下回ったときに、ワーク１００がトレイ１０４に載置されていることを検知する。 Further, as shown in FIGS. 6A and 6B, in the case where the load detection of the work 100 is performed by a transmission type load sensor, illumination that irradiates the fiber sensor 105 provided on the tray 104 with light. 106 is arranged, and when the light emitted from the illumination 106 is blocked by the work W and the received light amount falls below a predetermined threshold value, it is detected that the work 100 is placed on the tray 104.
一方、図６（ｃ）に示すように、ワーク１００がトレイ１０４に載置されていない場合には、ファイバーセンサ１０５の受光光量が所定閾値を超えて、ワーク１００がトレイ１０４に載置されていないと判断する。 On the other hand, as shown in FIG. 6C, when the work 100 is not placed on the tray 104, the received light amount of the fiber sensor 105 exceeds a predetermined threshold value, and the work 100 is placed on the tray 104. Judge that there is no.
しかしながら、上述したような反射型の在荷センサを用いる場合には、ワーク１００が梨地面を有していたりワーク１００に水やスラリー等の薬液が付着する等してワーク１００で反射した反射光が乱反射すると、反射光がファイバーセンサ１０３に戻らず、また、図５（ｄ）に示すように、ワーク１００とファイバーセンサ１０２との間が水で満たされていると、光が界面で反射せずにワーク１００を透過してしまい、ワーク１００がトレイ１０１に載置されているにもかかわらず、ワークの在荷を検知できないという問題があった。 However, in the case of using the reflection type load sensor as described above, the reflected light reflected by the work 100 due to the work 100 having a satin surface or a chemical liquid such as water or slurry adhering to the work 100. Is diffusely reflected, the reflected light does not return to the fiber sensor 103. Further, as shown in FIG. 5D, when the space between the work 100 and the fiber sensor 102 is filled with water, the light is reflected at the interface. However, there is a problem that the workpiece 100 is not transmitted and the presence of the workpiece cannot be detected even though the workpiece 100 is placed on the tray 101.
また、透過型の在荷センサを用いる場合には、透過性を有するワーク１００に対しては、照明１０６から照射された光がワーク１００を透過してしまい、また、図６（ｄ）に示すように、ワーク１００とファイバーセンサ１０５との間が水で満たされていると、透過光の光量が増えてしまうため、ワーク１００がトレイ１０４に載置されているにもかかわらず、ワークの在荷を検知できないという問題があった。 Further, in the case of using the transmission type load sensor, the light emitted from the illumination 106 is transmitted through the work 100 having the transparency, and is also shown in FIG. As described above, when the space between the work 100 and the fiber sensor 105 is filled with water, the amount of transmitted light increases, so that the work 100 is placed on the tray 104 even if the work is present. There was a problem that the load could not be detected.
そこで、多種多様なワークの在荷検知に対応するために解決すべき技術的課題が生じてくるのであり、本発明はこの課題を解決することを目的とする。 Therefore, there arises a technical problem to be solved in order to cope with the presence detection of a wide variety of works, and an object of the present invention is to solve this problem.
上記目的を達成するために、本発明に係るワーク載置台は、ワークがトレイに載置されたことを検知する在荷検知手段を備えたワーク載置台であって、前記在荷検知手段は、前記ワークを支持する支持部材と、前記支持部材と前記トレイとの間に介装され、前記ワークの自重に応じて弾性変形可能な接続部材と、前記接続部材の弾性変形に追従して移動する被検知体と、前記被検知体が所定距離まで接近したことを検知する近接センサと、を備えた支持機構と、前記近接センサが前記被検知体の接近を検知すると、前記ワークが前記トレイ及び支持部材に載置されていると判定する制御部と、を備えている。 In order to achieve the above-mentioned object, the work placing table according to the present invention is a work placing table provided with a presence detecting means for detecting that a work is placed on a tray, wherein the presence detecting means is A support member that supports the work, a connection member that is interposed between the support member and the tray, and that is elastically deformable according to the weight of the work, and moves following the elastic deformation of the connection member. A support mechanism including a detected object and a proximity sensor that detects that the detected object has approached a predetermined distance, and when the proximity sensor detects the approach of the detected object, the work is And a control unit that determines that the control unit is mounted on the support member.
この構成によれば、ワークが支持部材に載置されると、ワークの自重によって接続部材が下方に弾性変形することにより、近接センサが被検知体の接近を検知するため、ワークの種類やトレイの使用環境にかかわらず、ワークの自重に応じてワークの在荷検知を行うことができる。 According to this configuration, when the work is placed on the support member, the connection member elastically deforms downward due to the weight of the work, and the proximity sensor detects the approach of the detected object. The presence of the work can be detected according to the weight of the work regardless of the use environment of the work.
また、本発明に係るワーク載置台は、前記近接センサが、前記トレイを挟んで前記支持機構の反対側に埋設されていることが好ましい。 Further, in the work mounting table according to the present invention, it is preferable that the proximity sensor is embedded on the opposite side of the support mechanism with the tray interposed therebetween.
この構成によれば、水や薬品が付着することに起因する近接センサの劣化や故障を抑制することができる。 According to this configuration, it is possible to suppress deterioration or failure of the proximity sensor due to the adhesion of water or chemicals.
また、本発明に係るワーク載置台は、前記支持機構が、前記トレイの径方向に移動可能に設けられていることが好ましい。 Further, in the work mounting table according to the present invention, it is preferable that the support mechanism is provided so as to be movable in a radial direction of the tray.
この構成によれば、支持機構がワークの外径に応じてトレイの径方向に移動可能に構成することにより、異なる径のワークに対応することができる。 According to this configuration, the support mechanism is configured to be movable in the radial direction of the tray according to the outer diameter of the work, so that it is possible to handle works of different diameters.
また、本発明に係るワーク載置台は、前記接続部材が、基端が前記トレイに固定され、先端に前記支持部材が設けられた板バネであることが好ましい。 Further, in the work mounting table according to the present invention, it is preferable that the connection member is a leaf spring having a base end fixed to the tray and the support member provided at a front end.
この構成によれば、ワークの自重に応じた板バネの弾性変形量が簡便に調節可能なため、ワークの軽重に応じて被検知体の移動量を適切に設定することができる。 According to this configuration, since the elastic deformation amount of the leaf spring according to the weight of the work can be easily adjusted, the movement amount of the detection target can be appropriately set according to the weight of the work.
また、本発明に係るワーク載置台は、前記支持部材の前記ワークに接触する支持面が、上方に向かって凸状に湾曲して形成されていることが好ましい。 Further, in the workpiece mounting table according to the present invention, it is preferable that a supporting surface of the supporting member that contacts the workpiece is formed so as to be convexly curved upward.
この構成によれば、支持部材がワークを省面積で接触するため、ワークの損傷を抑制することができる。 According to this configuration, the supporting member contacts the work in a small area, and thus damage to the work can be suppressed.
本発明は、ワークが支持部材に載置されると、ワークの自重によって接続部材が下方に弾性変形することにより、近接センサが被検知体の接近を検知するため、ワークの種類やトレイの使用環境にかかわらず、ワークの自重に応じてワークの在荷検知を行うことができる。 According to the present invention, when the work is placed on the support member, the connection member elastically deforms downward due to the weight of the work, and the proximity sensor detects the approach of the object to be detected. The presence of a work can be detected according to the weight of the work regardless of the environment.
本発明の実施形態について図面に基づいて説明する。なお、以下では、構成要素の数、数値、量、範囲等に言及する場合、特に明示した場合及び原理的に明らかに特定の数に限定される場合を除き、その特定の数に限定されるものではなく、特定の数以上でも以下でも構わない。 Embodiments of the present invention will be described with reference to the drawings. In addition, below, when referring to the number, numerical value, amount, range, etc. of the constituent elements, unless otherwise specified or in principle limited to a specific number, the number is limited to the specific number. The number is not limited to a specific number, and may be a certain number or more.
また、構成要素等の形状、位置関係に言及するときは、特に明示した場合及び原理的に明らかにそうでないと考えられる場合等を除き、実質的にその形状等に近似又は類似するもの等を含む。 Also, when referring to the shapes and positional relationships of constituent elements, etc., unless otherwise specified, or in principle, it is considered that the shape and the like are substantially similar or similar to the shape, etc. Including.
また、図面は、特徴を分かり易くするために特徴的な部分を拡大する等して誇張する場合があり、構成要素の寸法比率等が実際と同じであるとは限らない。また、断面図では、構成要素の断面構造を分かり易くするために、一部の構成要素のハッチングを省略することがある。 In addition, in the drawings, characteristic portions may be exaggerated by enlarging the characteristic portions in order to make the characteristics easy to understand, and the dimensional ratios of the constituent elements are not always the same as the actual ones. Also, in the cross-sectional views, hatching of some of the components may be omitted in order to make the cross-sectional structure of the components easier to understand.
図１は、本発明の第１の実施形態に係るワーク載置台１を模式的に示す斜視図である。ワーク載置台１は、半導体製造装置においてワークを移送する際に、ワークを仮置きするものであり、例えば、搬送ロボットと研磨装置との間に設けられるワーク転置台や、複数の搬送ロボットの間でワークを受け渡しする際に用いられるワーク受け台等である。 FIG. 1 is a perspective view schematically showing a work mounting table 1 according to the first embodiment of the present invention. The work placing table 1 is for temporarily placing the work when the work is transferred in the semiconductor manufacturing apparatus. For example, the work placing table is provided between the transfer robot and the polishing device, or between the plurality of transfer robots. It is a work cradle or the like used when handing over the work.
ワーク載置台１は、トレイ２と、支持機構３と、を備えている。トレイ２は、被検知体３３が近接センサ３４に近接した際に検出可能な樹脂材料からなり、円板状に形成される。トレイ２の表面側には、ワークＷの裏面周縁を受ける３つの受け部２１が設けられている。 The work mounting table 1 includes a tray 2 and a support mechanism 3. The tray 2 is made of a resin material that can be detected when the detected body 33 approaches the proximity sensor 34, and is formed in a disc shape. On the front surface side of the tray 2, three receiving portions 21 for receiving the back surface peripheral edge of the work W are provided.
支持機構３は、ワークＷの自重でワークＷの在荷検知を行うものである。支持機構３と３つの受け部２１とは、平面から視て同心円状に互いに等間隔に離間して配置されている。支持機構３は、支持部材３１と、接続部材３２と、被検知体３３と、近接センサ３４と、を備えている。 The support mechanism 3 detects the presence of the work W by the weight of the work W. The support mechanism 3 and the three receiving portions 21 are arranged concentrically in a plan view and spaced apart from each other at equal intervals. The support mechanism 3 includes a support member 31, a connection member 32, a detected body 33, and a proximity sensor 34.
支持部材３１は、接続部材３２の先端に設けられており、ワークＷの裏面周縁を支持する。支持部材３１の支持面３１ａは、上方に向かって凸状に湾曲して形成されている。これにより、支持部材３１は、ワークＷと省面積で支持可能である。支持部材３１は、樹脂製であり、特に発塵性の低く耐薬品性を示すものが好ましく、例えば、ポリテトラフルオロエチレン（ＰＴＦＥ）、ポリエーテルエーテルケトン（ＰＥＥＫ）、ポリフェニレンサルファイド（ＰＰＳ）等が考えられる。 The support member 31 is provided at the tip of the connection member 32, and supports the back surface peripheral edge of the work W. The support surface 31a of the support member 31 is formed so as to curve upward in a convex shape. As a result, the support member 31 can support the work W with a small area. The support member 31 is made of resin, and particularly preferably has low dust generation and shows chemical resistance, and examples thereof include polytetrafluoroethylene (PTFE), polyether ether ketone (PEEK), and polyphenylene sulfide (PPS). Conceivable.
接続部材３２は、基端側をトレイ２に接合されている。具体的には、トレイ２の外周に設けられた上下一対の把持部２２に接続部材３２の基端側が把持された状態で、把持部２２及び接続部材３２をボルト３５で締結することにより、接続部材３２がトレイ２に一体化されている。一対の把持部２２には、クサビ状の空間Ａが形成されている。 The connecting member 32 is joined to the tray 2 at the base end side. Specifically, by connecting the gripping portion 22 and the connecting member 32 with bolts 35 while the base end side of the connecting member 32 is gripped by the pair of upper and lower gripping portions 22 provided on the outer periphery of the tray 2, connection is achieved. The member 32 is integrated with the tray 2. A wedge-shaped space A is formed in the pair of grips 22.
接続部材３２は、金属又は樹脂製であり、特に耐薬品性を示し膨潤し難いものが好ましく、例えば、ＰＴＦＥ、ＰＥＥＫ、ＰＰＳ等が考えられる。接続部材３２は、ワークＷの重量に応じて適切に弾性変形するように構成されている。これにより、接続部材３２は、支持部材３１にワークＷが載置されると、空間Ａ内において把持部２２に把持された部分を中心として下方に撓むように弾性変形する。 The connecting member 32 is preferably made of metal or resin, and particularly preferably has chemical resistance and does not easily swell. For example, PTFE, PEEK, PPS, etc. are conceivable. The connection member 32 is configured to appropriately elastically deform according to the weight of the work W. Accordingly, when the work W is placed on the support member 31, the connection member 32 elastically deforms so as to bend downward around the portion gripped by the grip portion 22 in the space A.
例えば、数ｇ程度のワークＷであれば、接続部材３２の厚みを０．２ｍｍ程度とすることが考えられる。接続部材３２の追従性を確保するためには、一枚の接続部材３２の厚みは０．２〜０．４ｍｍ程度が好ましく、それ以上の厚みでは剛性が過度に増大し、ワークＷの自重で変形しにくくなる。したがって、比較的重いワークＷに応じて接続部材のバネ定数を変更する場合には、一枚の肉厚の接続部材３２を適用するよりも、複数の薄い接続部材３２を重ねるように構成するのが好ましい。 For example, if the work W is about several g, the thickness of the connecting member 32 may be about 0.2 mm. In order to ensure the followability of the connecting member 32, the thickness of one connecting member 32 is preferably about 0.2 to 0.4 mm, and if the thickness is more than that, the rigidity is excessively increased, and the weight of the work W is reduced. It becomes difficult to deform. Therefore, when the spring constant of the connecting member is changed according to the relatively heavy work W, a plurality of thin connecting members 32 are stacked instead of applying one thick connecting member 32. Is preferred.
被検知体３３は、接続部材３２を挟んで支持部材３１の反対側に設けられている。また、被検知体３３は、接続部材３２の先端に固着されており、ワークＷの自重に応じて接続部材３２と一体で上下動可能に構成されている。被検知体３３は、近接センサ３４で検知可能な金属体である。被検知体３３は、ステンレス等の錆びにくい金属が好ましい。また、金属イオンの溶出を抑制するために、被検知体３３の表面をテフロンで被覆しても構わない。 The detected body 33 is provided on the opposite side of the support member 31 with the connection member 32 interposed therebetween. Further, the detected body 33 is fixed to the tip of the connection member 32, and is configured to be vertically movable integrally with the connection member 32 according to the weight of the work W. The detected body 33 is a metal body that can be detected by the proximity sensor 34. The object 33 to be detected is preferably made of metal such as stainless steel which does not easily rust. Further, in order to suppress the elution of metal ions, the surface of the detected body 33 may be coated with Teflon.
近接センサ３４は、被検知体３３の下方でトレイ２に埋設されている。具体的には、近接センサ３４は、接続部材３２がワークＷの自重で下限まで弾性変形した際に被検知体３３を検知可能な位置に設けられている。なお、近接センサ３４の検知範囲は、回転式の調節トリマ等で任意に変更可能である。近接センサ３４は、トレイ２の裏面側に埋設されており、水や薬品の付着に起因する近接センサ３４の劣化や故障を抑制することができる。近接センサ３４は、被検知体３３の接近を検知すると、検知信号を制御部４に送る。 The proximity sensor 34 is embedded in the tray 2 below the detected body 33. Specifically, the proximity sensor 34 is provided at a position where the detected body 33 can be detected when the connection member 32 elastically deforms to the lower limit due to the weight of the work W. The detection range of the proximity sensor 34 can be arbitrarily changed by a rotary adjustment trimmer or the like. The proximity sensor 34 is embedded in the back surface side of the tray 2 and can suppress deterioration or failure of the proximity sensor 34 due to adhesion of water or chemicals. When the proximity sensor 34 detects the approach of the detected body 33, the proximity sensor 34 sends a detection signal to the control unit 4.
ワーク載置台１の動作は、制御部４によって制御される。制御部４は、ワーク載置台１を構成する構成要素をそれぞれ制御するものである。制御部４は、例えばコンピュータであり、ＣＰＵ、メモリ等により構成される。なお、制御部４の機能は、ソフトウェアを用いて制御することにより実現されても良く、ハードウェアを用いて動作するものにより実現されても良い。 The operation of the work mounting table 1 is controlled by the control unit 4. The control unit 4 controls each of the constituent elements of the work mounting table 1. The control unit 4 is, for example, a computer and includes a CPU, a memory, and the like. The function of the control unit 4 may be realized by controlling using software, or may be realized by using hardware.
また、制御部４は、近接センサ３４に接続されており、近接センサ３４の検知信号（センサＯＮ）を受信すると、ワークＷがワーク載置台１に載置されているとして在荷を検知する。 Further, the control unit 4 is connected to the proximity sensor 34, and upon receiving a detection signal (sensor ON) from the proximity sensor 34, detects that the work W is placed on the work placing table 1 and detects the presence of a load.
これにより、ワーク載置台１は、ワークＷが支持部材３１に載置されると、ワークＷの自重によって接続部材３２が下方に弾性変形することにより、近接センサ３４が被検知体３３の接近を検知するため、ワークＷの種類やトレイの使用環境にかかわらず、ワークＷの自重に応じてワークＷの在荷検知を行うことができる。 Thereby, when the work W is placed on the support member 31, the connection member 32 elastically deforms downward due to the weight of the work W, so that the proximity sensor 34 moves the detection target 33 closer to the detection target 33. Since the detection is performed, the presence of the work W can be detected according to the weight of the work W regardless of the type of the work W and the usage environment of the tray.
次に、本実施形態の変形例に係るワーク載置台１について、図３に基づいて説明する。本変形に係るワーク載置台１は、上述したワーク載置台１の構成と比較して、接続部材３２がコイルバネ状に形成されている点で相違する。以下では、第１の実施形態に係るワーク載置台１と共通する構成については、同一の符号を付し、重複する説明を省略する。 Next, a work mounting table 1 according to a modified example of this embodiment will be described based on FIG. The work mounting table 1 according to this modification is different from the structure of the work mounting table 1 described above in that the connection member 32 is formed in a coil spring shape. In the following, the same components as those of the work mounting table 1 according to the first embodiment will be denoted by the same reference numerals, and overlapping description will be omitted.
本変形例に係るワーク載置台１では、支持部材３１、被検知体３３及び接続部材３２がこの順で上から重ねるように設けられている。接続部材３２の上端部は、被検知体３３に接合され、接続部材３２の下端部は、トレイ２に取り付けられている。 In the work mounting table 1 according to this modification, the support member 31, the detected body 33, and the connection member 32 are provided so as to be superposed in this order from above. The upper end of the connecting member 32 is joined to the detected body 33, and the lower end of the connecting member 32 is attached to the tray 2.
ワークＷが支持部材３１に載置されると、ワークＷの自重で接続部材３２が縮み、近接センサ３４が、被検知体３３の接近を検知する。そして、制御部４が、近接センサ３４の検知信号（センサＯＮ）を受信すると、ワークＷがワーク載置台１に載置されているとして在荷を検知する。 When the work W is placed on the support member 31, the connection member 32 contracts due to the weight of the work W, and the proximity sensor 34 detects the approach of the detected body 33. Then, when the control unit 4 receives the detection signal (sensor ON) of the proximity sensor 34, the work W is detected as being mounted on the work mounting table 1.
このような構成のワーク載置台１は、上述した板バネ状のものと比較して、コイルバネ状の接続部材３２は弾性変形し難いため、重たいワークＷに好適である。 The work mounting table 1 having such a configuration is suitable for a heavy work W because the coil spring-shaped connecting member 32 is less likely to be elastically deformed as compared with the above-described plate spring-shaped one.
次に、本発明の第２の実施形態に係るワーク載置台１について、図４に基づいて説明する。本実施形態に係るワーク載置台１は、上述した実施形態に係るワーク載置台１の構成と比較して、異なる外径のワークＷに対応可能に構成されている点で相違する。以下では、第１の実施形態に係るワーク載置台１と共通する構成については、同一の符号を付し、重複する説明を省略する。 Next, a work mounting table 1 according to a second embodiment of the present invention will be described based on FIG. The work mounting table 1 according to the present embodiment is different from the structure of the work mounting table 1 according to the above-described embodiment in that the work mounting table 1 is configured to be compatible with a work W having a different outer diameter. In the following, the same components as those of the work mounting table 1 according to the first embodiment will be denoted by the same reference numerals, and overlapping description will be omitted.
ワーク載置台１は、トレイ２の中央に脱着自在なアダプター３６を備えている。アダプター３６は、トレイ２より小径のリング状に形成されている。例えば、トレイ２が８インチのワークＷに対応する場合、アダプター３６は、６インチのワークＷに対応する。アダプター３６は、ワークＷを支持する３つの受け部３７を備えている。 The work mounting table 1 includes a removable adapter 36 at the center of the tray 2. The adapter 36 is formed in a ring shape having a smaller diameter than the tray 2. For example, when the tray 2 corresponds to the 8-inch work W, the adapter 36 corresponds to the 6-inch work W. The adapter 36 includes three receiving portions 37 that support the work W.
支持機構３は、トレイ２に対してトレイ２の径方向に移動可能に構成されている。具体的には、把持部２２がトレイ２に対して径方向に摺動可能に構成され、近接センサ３４が、把持部２２の裏面側に埋設されている。これにより、把持部２２がアダプター３６まで摺動すれば、支持機構３は把持部２２と一体となって径方向に移動可能である。したがって、アダプター３６の脱着及び把持部２２の摺動によって、異なる径のワークＷに対応することができる。 The support mechanism 3 is configured to be movable in the radial direction of the tray 2 with respect to the tray 2. Specifically, the grip portion 22 is configured to be slidable in the radial direction with respect to the tray 2, and the proximity sensor 34 is embedded in the back surface side of the grip portion 22. Accordingly, when the grip portion 22 slides to the adapter 36, the support mechanism 3 can move in the radial direction integrally with the grip portion 22. Therefore, by attaching and detaching the adapter 36 and sliding the grip portion 22, it is possible to deal with works W having different diameters.
また、本発明は、本発明の精神を逸脱しない限り、上記以外にも種々の改変を為すことができ、そして、本発明が該改変されたものに及ぶことは当然である。 In addition, the present invention can be modified in various ways other than the above without departing from the spirit of the present invention, and it goes without saying that the present invention extends to the modified one.
１ ・・・ワーク載置台
２ ・・・トレイ
２１ ・・・受け部
２２ ・・・把持部
３ ・・・支持機構
３１ ・・・支持部材
３１ａ ・・・支持面
３２ ・・・接続部材
３３ ・・・被検知体
３４ ・・・近接センサ
３５ ・・・ボルト
３６ ・・・アダプター
３７ ・・・受け部
４ ・・・制御部
Ａ ・・・空間
Ｗ ・・・ワーク
1... Work placement table 2... Tray 21... Receiving part 22... Gripping part 3... Support mechanism 31... Support member 31a... Support surface 32... Connection member 33.・・・Detected body 34 ・・・Proximity sensor 35 ・・・Bolt 36 ・・・Adapter 37 ・・・Receiving part 4 ・・・Control part A ・・・Space W ・・・Work
Claims (5)
前記在荷検知手段は、
前記ワークを支持する支持部材と、
前記支持部材と前記トレイとの間に介装され、前記ワークの自重に応じて弾性変形可能な接続部材と、
前記接続部材の弾性変形に追従して移動する被検知体と、
前記被検知体が所定距離まで接近したことを検知する近接センサと、
を備えた支持機構と、
前記近接センサが前記被検知体の接近を検知すると、前記ワークが前記トレイ及び支持部材に載置されていると判定する制御部と、
を備えていることを特徴とするワーク載置台。 A work placing table having a presence detecting means for detecting that a work is placed on a tray,
The presence detection means,
A support member for supporting the work,
A connection member that is interposed between the support member and the tray and that is elastically deformable in accordance with the weight of the work.
A detected object that moves following the elastic deformation of the connection member,
A proximity sensor that detects that the detected object has approached a predetermined distance,
With a support mechanism,
When the proximity sensor detects the approach of the detected object, a control unit that determines that the work is placed on the tray and the support member,
A work mounting table characterized by being equipped with.
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