JP2020104094A5 - - Google Patents

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JP2020104094A5
JP2020104094A5 JP2019122806A JP2019122806A JP2020104094A5 JP 2020104094 A5 JP2020104094 A5 JP 2020104094A5 JP 2019122806 A JP2019122806 A JP 2019122806A JP 2019122806 A JP2019122806 A JP 2019122806A JP 2020104094 A5 JP2020104094 A5 JP 2020104094A5
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liquid
holding
discharge
discharge port
port surface
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JP2019122806A
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JP2020104094A (en
JP7378983B2 (en
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Priority to US16/524,300 priority Critical patent/US11097545B2/en
Priority to KR1020190093603A priority patent/KR102543499B1/en
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Publication of JP2020104094A5 publication Critical patent/JP2020104094A5/ja
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そのため本発明の液体吐出装置は、液体を収容する収容容器と、前記収容容器に収容されている液体を吐出口面に設けられた吐出口から吐出する吐出手段と、前記吐出口面との間で液柱をなした液体を保持可能な保持手段と、前記吐出口面と、前記保持手段との間に液体を供給して液柱を形成する形成手段と、前記保持手段が保持する液体を回収する回収手段と、を備えた液体吐出装置であって、前記保持手段が保持する液体を振動させる加振手段を更に備え、前記加振手段は、前記吐出手段の内部に備えられていることを特徴とする。 Therefore, in the liquid discharge device of the present invention, between the storage container for storing the liquid, the discharge means for discharging the liquid contained in the storage container from the discharge port provided on the discharge port surface, and the discharge port surface. A holding means capable of holding a liquid forming a liquid column, a forming means for supplying a liquid between the discharge port surface and the holding means to form a liquid column, and a liquid held by the holding means. A liquid discharge device including a recovery means for collecting, further including a vibration means for vibrating the liquid held by the holding means , and the vibration means is provided inside the discharge means . It is characterized by.

Claims (17)

液体を収容する収容容器と、
前記収容容器に収容されている液体を吐出口面に設けられた吐出口から吐出する吐出手段と、
前記吐出口面との間で液柱をなした液体を保持可能な保持手段と、
前記吐出口面と、前記保持手段との間に液体を供給して液柱を形成する形成手段と、
前記保持手段が保持する液体を回収する回収手段と、
を備えた液体吐出装置であって、
前記保持手段が保持する液体を振動させる加振手段を更に備え
前記加振手段は、前記吐出手段の内部に備えられていることを特徴とする液体吐出装置。
A storage container for storing liquids and
A discharge means for discharging the liquid contained in the storage container from a discharge port provided on the discharge port surface, and a discharge means.
A holding means capable of holding a liquid forming a liquid column between the discharge port surface and the liquid.
A forming means for forming a liquid column by supplying a liquid between the discharge port surface and the holding means.
A recovery means for recovering the liquid held by the holding means, and a recovery means.
It is a liquid discharge device equipped with
Further provided with a vibrating means for vibrating the liquid held by the holding means ,
The vibrating means is a liquid discharging device provided inside the discharging means .
前記加振手段は、前記吐出手段が液体を吐出する際に用いる吐出エネルギによって液体を加振する請求項に記載の液体吐出装置。 The liquid discharge device according to claim 1 , wherein the vibration means vibrates the liquid by the discharge energy used when the discharge means discharges the liquid. 前記保持手段は、前記回収手段を兼ねており、所定の間隔で配列された複数の櫛歯を有し、前記櫛歯の間から液体を回収する請求項1または2に記載の液体吐出装置。 The liquid discharge device according to claim 1 or 2 , wherein the holding means also serves as the collecting means, has a plurality of comb teeth arranged at predetermined intervals, and collects liquid from between the comb teeth. 前記形成手段は、前記吐出手段から吐出された液体を供給して液柱を形成する請求項1ないし請求項のいずれか1項に記載の液体吐出装置。 The liquid discharge device according to any one of claims 1 to 3 , wherein the forming means supplies the liquid discharged from the discharge means to form a liquid column. 前記加振手段は、前記保持手段が備えている請求項1に記載の液体吐出装置。 The liquid discharging device according to claim 1, wherein the vibrating means is provided with the holding means. 前記加振手段は、超音波発生手段が発生する超音波によって前記保持手段に保持された液体を振動させる請求項に記載の液体吐出装置。 The liquid discharge device according to claim 5 , wherein the vibrating means vibrates the liquid held by the holding means by the ultrasonic waves generated by the ultrasonic wave generating means. 前記形成手段は、前記保持手段と接続された供給手段から液体を供給して液柱を形成する請求項または請求項に記載の液体吐出装置。 The liquid discharge device according to claim 5 or 6 , wherein the forming means supplies a liquid from a supply means connected to the holding means to form a liquid column. 前記吐出手段は第1液体を吐出し、前記供給手段は第2液体を供給し、前記第2液体は、前記吐出手段が吐出する前記第1液体の増粘状態を緩和させる請求項に記載の液体吐出装置。 The seventh aspect of claim 7 , wherein the discharge means discharges the first liquid, the supply means supplies the second liquid, and the second liquid relaxes the thickening state of the first liquid discharged by the discharge means. Liquid discharge device. 前記吐出手段は第1液体を吐出し、前記供給手段は第2液体を供給し、前記第1液体と前記第2液体とは、同一種の液体である請求項に記載の液体吐出装置。 The liquid discharge device according to claim 7 , wherein the discharge means discharges a first liquid, the supply means supplies a second liquid, and the first liquid and the second liquid are the same type of liquid. 前記回収手段は、前記保持手段と接続された負圧発生手段が発生する負圧によって液体を回収する請求項1ないしのいずれか1項に記載の液体吐出装置。 The liquid discharge device according to any one of claims 1 to 9 , wherein the recovery means recovers the liquid by the negative pressure generated by the negative pressure generating means connected to the holding means. 前記回収手段は、前記吐出口面と前記保持手段との間に供給された液体を回収する第1回収手段と、前記吐出口面に付着した液体を吸引して回収する第2回収手段と、を有している請求項1ないし10のいずれか1項に記載の液体吐出装置。 The recovery means includes a first recovery means for recovering the liquid supplied between the discharge port surface and the holding means, and a second recovery means for sucking and recovering the liquid adhering to the discharge port surface. The liquid discharge device according to any one of claims 1 to 10 . 前記液体はインプリント材である請求項1ないし11のいずれか1項に記載の液体吐出装置。 The liquid discharge device according to any one of claims 1 to 11 , wherein the liquid is an imprint material. 前記吐出口面と、前記保持手段とは、非接触である請求項1ないし12のいずれか1項に記載の液体吐出装置。 The liquid discharge device according to any one of claims 1 to 12 , wherein the discharge port surface and the holding means are not in contact with each other. 前記液柱は、前記吐出口面の全面に形成される請求項1ないし13のいずれか1項に記載の液体吐出装置。 The liquid discharge device according to any one of claims 1 to 13 , wherein the liquid column is formed on the entire surface of the discharge port surface. 前記液柱は、前記吐出口面の一部に形成される請求項1ないし13のいずれか1項に記載の液体吐出装置。 The liquid discharge device according to any one of claims 1 to 13 , wherein the liquid column is formed on a part of the discharge port surface. 吐出口から液体を吐出するモジュール基板を洗浄する洗浄装置であって、
前記モジュール基板の前記吐出口が形成された吐出口面との間で、液柱を形成した液体を保持可能な保持手段と、
前記吐出口面と前記保持手段との間に液体を供給する供給手段と、
前記吐出口面と、前記保持手段との間に前記供給手段から供給された液体で液柱を形成する形成手段と、
前記保持手段で保持された液体を振動させる加振手段と、
前記保持手段で保持された液体を回収する回収手段と、
を備え
前記加振手段は前記モジュール基板の内部に備えられていることを特徴とする洗浄装置。
A cleaning device that cleans the module board that discharges liquid from the discharge port.
A holding means capable of holding the liquid forming the liquid column between the discharge port surface on which the discharge port is formed of the module substrate, and a holding means.
A supply means for supplying a liquid between the discharge port surface and the holding means,
A forming means for forming a liquid column with the liquid supplied from the supply means between the discharge port surface and the holding means, and a forming means.
A vibration means for vibrating the liquid held by the holding means, and a vibration means.
A recovery means for recovering the liquid held by the holding means, and a recovery means.
Equipped with
The cleaning device , wherein the vibration means is provided inside the module substrate .
吐出口から液体を吐出するモジュール基板の洗浄方法であって、
前記モジュール基板の前記吐出口が形成された吐出口面と、前記吐出口面との間で液体を保持可能な保持部材の保持部と、を所定の距離で対向して配置する配置工程と、
前記吐出口面と前記保持部との間に液体を供給し液柱を形成することで液体を保持する保持工程と、
前記保持工程で保持された液体を振動させる加振工程と、
前記吐出口面と前記保持部との間に供給された液体を回収する回収工程と、
を備え
前記加振工程では、前記モジュール基板の内部の液体を振動させることを特徴とするモジュール基板の洗浄方法。
A method of cleaning a module board that discharges liquid from a discharge port.
An arrangement step of arranging a discharge port surface on which the discharge port of the module substrate is formed and a holding portion of a holding member capable of holding a liquid between the discharge port surfaces so as to face each other at a predetermined distance.
A holding step of holding a liquid by supplying a liquid between the discharge port surface and the holding portion to form a liquid column,
A vibration step that vibrates the liquid held in the holding step, and a vibration step.
A recovery step of recovering the liquid supplied between the discharge port surface and the holding portion,
Equipped with
The method for cleaning a module substrate , which comprises vibrating the liquid inside the module substrate in the vibration step .
JP2019122806A 2018-08-09 2019-07-01 liquid discharge device Active JP7378983B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US16/524,300 US11097545B2 (en) 2018-08-09 2019-07-29 Liquid ejection device, cleaning apparatus and cleaning method for module substrate
KR1020190093603A KR102543499B1 (en) 2018-08-09 2019-08-01 Liquid ejection device, cleaning apparatus and cleaning method for module substrate

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2018245000 2018-12-27
JP2018245000 2018-12-27

Publications (3)

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JP2020104094A JP2020104094A (en) 2020-07-09
JP2020104094A5 true JP2020104094A5 (en) 2022-06-29
JP7378983B2 JP7378983B2 (en) 2023-11-14

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Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4138981B2 (en) * 1998-01-16 2008-08-27 オセ−テクノロジーズ・ベー・ヴエー Method and apparatus for cleaning an inkjet printhead
JP2006347000A (en) 2005-06-16 2006-12-28 Seiko Epson Corp Liquid droplet delivering device with cleaning function and method of cleaning liquid droplet delivering device
JP6537243B2 (en) 2013-11-22 2019-07-03 キヤノン株式会社 Liquid discharge apparatus, method of controlling liquid discharge apparatus, imprint apparatus and method of manufacturing parts

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