JP2020089935A - 基台付きブレード - Google Patents
基台付きブレード Download PDFInfo
- Publication number
- JP2020089935A JP2020089935A JP2018227442A JP2018227442A JP2020089935A JP 2020089935 A JP2020089935 A JP 2020089935A JP 2018227442 A JP2018227442 A JP 2018227442A JP 2018227442 A JP2018227442 A JP 2018227442A JP 2020089935 A JP2020089935 A JP 2020089935A
- Authority
- JP
- Japan
- Prior art keywords
- base
- blade
- recess
- adhesive
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000853 adhesive Substances 0.000 claims abstract description 51
- 230000001070 adhesive effect Effects 0.000 claims abstract description 51
- 238000005520 cutting process Methods 0.000 claims abstract description 24
- 230000002093 peripheral effect Effects 0.000 claims description 15
- 230000003746 surface roughness Effects 0.000 claims description 6
- 238000001125 extrusion Methods 0.000 abstract 1
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 230000004048 modification Effects 0.000 description 6
- 238000012986 modification Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 239000006061 abrasive grain Substances 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 239000003082 abrasive agent Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000012811 non-conductive material Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
- B28D5/022—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by cutting with discs or wheels
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D7/00—Details of apparatus for cutting, cutting-out, stamping-out, punching, perforating, or severing by means other than cutting
- B26D7/26—Means for mounting or adjusting the cutting member; Means for adjusting the stroke of the cutting member
- B26D7/2614—Means for mounting the cutting member
- B26D7/2621—Means for mounting the cutting member for circular cutters
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/0006—Cutting members therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B26—HAND CUTTING TOOLS; CUTTING; SEVERING
- B26D—CUTTING; DETAILS COMMON TO MACHINES FOR PERFORATING, PUNCHING, CUTTING-OUT, STAMPING-OUT OR SEVERING
- B26D1/00—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor
- B26D1/01—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work
- B26D1/12—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis
- B26D1/14—Cutting through work characterised by the nature or movement of the cutting member or particular materials not otherwise provided for; Apparatus or machines therefor; Cutting members therefor involving a cutting member which does not travel with the work having a cutting member moving about an axis with a circular cutting member, e.g. disc cutter
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Forests & Forestry (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Dicing (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
4 基台
4a 第1面
4b 第2面
4c 開口部
4d 凸部
4e 凹部
4f 接触面
4g 底面
4h 側面
4i 側面
4j 溝(アンカー部)
6 ブレード
6a 第1面
6b 第2面
6c 開口部
6d 外周
12 切削装置
14 基台
16 カバー
18 切削ユニット
20 チャックテーブル
22 カセット支持台
24 カセット
26 モニタ
32 スピンドル(回転軸)
34 スピンドルハウジング
36 ワッシャー
38 ボルト
40 ブレードマウント
42 フランジ部
42a 第1面
42b 凸部
42c 先端面
44 ボス部
44a 外周面
46 固定ナット
46a 開口部
11 被加工物
Claims (3)
- 回転軸に装着して使用される切削用の基台付きブレードであって、
第1面側から第2面側に貫通する開口部が中央に形成された円盤状の基台と、
該基台の該第1面側に固定される環状のブレードと、を含み、
該基台の該第1面側には、該開口部を囲む環状に形成され該ブレードを該基台に固定するための接着剤が塗布される凹部と、該凹部より該基台の外周側で該ブレードに接する接触面と、が設けられており、
該基台の外周側に位置する該凹部の側面は、該凹部の底面から該凹部の縁へと向かって該凹部の外径が大きくなるように該接触面に対して傾斜していることを特徴とする基台付きブレード。 - 該凹部の該底面には、該基台に対する該接着剤の接着力を高めるアンカー部が設けられていることを特徴とする請求項1に記載の基台付きブレード。
- 該凹部の該底面の表面粗さは、該接触面の表面粗さよりも大きいことを特徴とする請求項1に記載の基台付きブレード。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018227442A JP7184460B2 (ja) | 2018-12-04 | 2018-12-04 | 基台付きブレード |
KR1020190154460A KR20200067753A (ko) | 2018-12-04 | 2019-11-27 | 베이스 부착 블레이드 |
CN201911211428.XA CN111267252B (zh) | 2018-12-04 | 2019-12-02 | 带基台的刀具 |
TW108143949A TWI850289B (zh) | 2018-12-04 | 2019-12-02 | 附基台刀片 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018227442A JP7184460B2 (ja) | 2018-12-04 | 2018-12-04 | 基台付きブレード |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020089935A true JP2020089935A (ja) | 2020-06-11 |
JP7184460B2 JP7184460B2 (ja) | 2022-12-06 |
Family
ID=70993598
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018227442A Active JP7184460B2 (ja) | 2018-12-04 | 2018-12-04 | 基台付きブレード |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP7184460B2 (ja) |
KR (1) | KR20200067753A (ja) |
CN (1) | CN111267252B (ja) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000505008A (ja) * | 1996-12-18 | 2000-04-25 | ノートン カンパニー | 使用寿命の長い改良ホイールハブ |
JP2016221637A (ja) * | 2015-06-01 | 2016-12-28 | 株式会社ディスコ | 基台付きブレード |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08184322A (ja) * | 1994-12-28 | 1996-07-16 | Ntn Corp | 軸受の接着固定部構造および固定方法 |
JPH10203063A (ja) * | 1997-01-24 | 1998-08-04 | Dainippon Printing Co Ltd | Icカード |
DE10200811B4 (de) * | 2002-01-11 | 2009-06-04 | Ab Skf | Verfahren zur Herstellung eines Wälzlagerrings, sowie danach hergestellter Wälzlagerring |
JP5690581B2 (ja) * | 2010-12-27 | 2015-03-25 | 株式会社ディスコ | 切削ブレード |
KR20120135833A (ko) | 2011-06-07 | 2012-12-17 | 한국과학기술연구원 | 태양전지용 광흡수층 제조 방법, 이를 이용한 박막형 태양전지의 제조 방법 및 이를 이용한 박막형 태양전지 |
JP6079248B2 (ja) * | 2013-01-15 | 2017-02-15 | オムロン株式会社 | Rfタグ、その製造方法、およびrfタグ用一次成形体 |
DE102014206428A1 (de) * | 2014-04-03 | 2015-10-08 | Schaeffler Technologies AG & Co. KG | Verfahren zur Herstellung eines Wälzlagers sowie Wälzlager |
-
2018
- 2018-12-04 JP JP2018227442A patent/JP7184460B2/ja active Active
-
2019
- 2019-11-27 KR KR1020190154460A patent/KR20200067753A/ko active IP Right Grant
- 2019-12-02 CN CN201911211428.XA patent/CN111267252B/zh active Active
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000505008A (ja) * | 1996-12-18 | 2000-04-25 | ノートン カンパニー | 使用寿命の長い改良ホイールハブ |
JP2016221637A (ja) * | 2015-06-01 | 2016-12-28 | 株式会社ディスコ | 基台付きブレード |
Also Published As
Publication number | Publication date |
---|---|
CN111267252B (zh) | 2023-03-10 |
JP7184460B2 (ja) | 2022-12-06 |
CN111267252A (zh) | 2020-06-12 |
TW202023746A (zh) | 2020-07-01 |
KR20200067753A (ko) | 2020-06-12 |
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