JP2020080359A - 成膜装置及び成膜方法 - Google Patents
成膜装置及び成膜方法 Download PDFInfo
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- 238000000034 method Methods 0.000 title claims abstract description 33
- 239000002994 raw material Substances 0.000 claims abstract description 36
- 239000000758 substrate Substances 0.000 claims abstract description 31
- 239000007789 gas Substances 0.000 claims description 488
- 239000010408 film Substances 0.000 claims description 140
- 239000012495 reaction gas Substances 0.000 claims description 45
- 230000002093 peripheral effect Effects 0.000 claims description 40
- 239000010409 thin film Substances 0.000 claims description 15
- 238000006243 chemical reaction Methods 0.000 claims description 12
- 239000007795 chemical reaction product Substances 0.000 claims description 8
- 230000002401 inhibitory effect Effects 0.000 claims description 8
- 238000009826 distribution Methods 0.000 abstract description 13
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 description 108
- 235000012431 wafers Nutrition 0.000 description 93
- 230000008569 process Effects 0.000 description 21
- 239000000460 chlorine Substances 0.000 description 18
- 230000008859 change Effects 0.000 description 16
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- 230000001965 increasing effect Effects 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 8
- 238000000926 separation method Methods 0.000 description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 238000001179 sorption measurement Methods 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 238000002407 reforming Methods 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 230000003028 elevating effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
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Abstract
Description
前記基板が載置される載置部と、
前記載置部に載置された基板に原料ガスを供給して吸着させるために設けられ、前記載置部の基板の載置面を分割して設定された複数の被ガス供給領域に向けて、各々、前記原料ガスを独立して供給する複数の分割供給部を含んだ原料ガス供給部と、
前記原料ガス供給部へ向けて原料ガスの供給を行う原料ガス供給源に対し、前記複数の分割供給部を並列に接続し、各々、前記原料ガス供給源から供給された原料ガスを予め設定された流量比で分流するための流量比調節部を備えた複数の原料ガス供給ラインと、
前記原料ガス供給部へ向けて原料ガスの濃度調節用の濃度調節ガスの供給を行う濃度調節ガス供給源に対し、前記複数の分割供給部を並列に接続し、各々、前記複数の分割部の一部を選択して前記濃度調節ガスの供給を実行するための給断弁を備えた複数の濃度調節ガス供給ラインと、
前記基板に吸着した原料ガスと反応させ、前記薄膜を構成する反応生成物を生成させるための反応ガスを供給する反応ガス供給部と、を備えた。
第1の実施の形態に係る成膜装置について説明する。この成膜装置は、図1及び図2に示すように、平面形状が概ね円形である真空容器1と、この真空容器1内に設けられ、当該真空容器1の中心に回転中心Cを有すると共に、この回転中心Cの周りにウエハWを公転させるための載置部である例えば石英製の回転テーブル2と、を備えている。真空容器1は、天板部11及び容器本体12を備えており、天板部11が容器本体12から着脱できるように構成されている。天板部11の上面側における中央部には、真空容器1内の中央部において互いに異なる処理ガス同士が混ざり合うことを抑制するために、窒素(N2)ガスを分離ガスとして供給するための分離ガス供給管74が接続されている。
またガス給排気ユニット4もウエハWの通過領域と交差するように分離ガスのカーテンを形成することができることから、反応ガスノズル51から供給されるガスが、改質ガスノズル52から供給されるガスにより希釈されることを防いでいると言える。
この結果、各DCSガス供給ライン401〜411に設けられているオリフィス9によって調節された圧力損失に応じて、各分割供給部Z1〜Z11には、予め設定された流量比でDCSガスが分流される。図7に示した開閉シーケンスの例では、この状態で882秒間成膜処理を行う。
さらにその後、DCSガスの供給が停止されると同時に、外部シーケンサ105は、ArガスバルブV11のバルブをオフにする信号を出力する。これにより、DCSガス、反応ガス、改質ガス、及び濃度調節用のArガスのいずれもが停止され、真空容器10内が排気される。
また本実施の形態は、各分割供給部Z1〜Z11に供給するArガスの給断の切り替えのみでウエハWの面内に成膜される膜厚を調節している。そのため、各分割供給部Z1〜Z11に夫々ガスを供給するラインに流量調整部を設けるなどの複雑な構造とする必要がなく、簡素な構成とすることができる。
また上述の実施の形態では、分割供給部Z1〜Z11を11区画としているが、分割供給部を2つ以上の区画とした成膜装置であれば、Arガスの給断による濃度調節を活用した膜厚分布の制御を適用することができる。
反応阻害ガスは、DSCガスと競合して、ウエハWに吸着する一方、NH3ガスが供給されても反応生成物を生成しないガスである。反応阻害ガスとしては、例えばClガスを挙げることができる。
そして既述の実施の形態と同様に成膜処理を行い、さらにArガスバルブV1〜V11の開閉のタイミングに合わせて、バルブV101〜V111を開閉し、対応するガス供給パッド701〜711からClガスを供給する。
次いで、回転テーブル2の回転角度に従って、Arガスの供給と停止を切り替えて、ウエハWの公転方向における成膜量を調節する第2の実施の形態について説明する。
例えば図11に示す例では、図1、2に示したガス給排気ユニット4に代えて、下面にガス吐出口41が形成された棒状の原料ガス供給部であるガス供給ノズル4Aが設けられている。ガス供給ノズル4Aは、回転テーブル2の上方に、回転テーブル2の外周側からウエハWの公転領域を径方向に横断するように配置され、ウエハWの公転領域に向けてガスを吐出するように設けられている。言い換えると、ガス供給ノズル4Aは、ウエハWの載置面側から見て、当該載置面の公転中心の内周側から外周側に向かって径方向に伸びる棒状に形成されている。そして例えばガス供給ノズル4Aは長さ方向に2分されて、先端側の分割供給部Z101と、分割供給部Z102が形成されている。分割供給部Z101に設けられたガス吐出口41からは、回転テーブルの中心寄りの被ガス供給領域に向けてDCSガスが供給される。また、分割供給部Z102に設けられたガス吐出口41からは、回転テーブル2の外周側の領域に向けてDCSガスが供給される。
例えばまずガス供給ノズル4AからDCSガスのみを供給しながら既述の実施の形態と同様に成膜処理を行う。この場合、既述のようにウエハWには、膜厚が薄い領域200、201が夫々形成される。
実施例1、2とも5つの分割供給部ZA〜ZEのうち2つの分割供給部ZD、ZEを島状に構成し、回転テーブルの内周側と外周側とに夫々配置した。
(実施例1)2つの島状の分割供給部ZD、ZEを回転テーブル2の回転中心Cを中心とした5°の角度の範囲に亘ってガスを吐出するように設けている。
(実施例2)2つの島状の分割供給部ZD、ZEを回転テーブル2の回転中心Cを中心とした14°の角度の範囲に亘ってガスを吐出するように設けている。
DCSガス、NH3ガス及びH2ガスの流量は実施の形態と同様に設定し、回転テーブル2の回転数を10rpmとし、15分間成膜処理を行った。そのとき各島状の分割供給部ZD、ZEにおいては、Arガス供給しながらDCSガスを供給して成膜処理を行った。Arガスの流量は、Arガス供給管440に設けられたMFC49により0、3、6、12、20、50及び75sccmに設定して夫々のArガスの流量にて成膜処理を行った。
4 ガス給排気ユニット
9 オリフィス
46 DCSガス供給源
48 Arガス供給源
51 反応ガスノズル
100 制御部
401A〜411A Arガス供給ライン
401〜411 DCSガス供給ライン
V1〜V11 Arガスバルブ
W ウエハ
Z1〜Z11 分割供給部
Claims (11)
- 基板に原料ガスと反応ガスとを交互に繰り返し供給して薄膜を生成する成膜装置において、
前記基板が載置される載置部と、
前記載置部に載置された基板に原料ガスを供給して吸着させるために設けられ、前記載置部の基板の載置面を分割して設定された複数の被ガス供給領域に向けて、各々、前記原料ガスを独立して供給する複数の分割供給部を含んだ原料ガス供給部と、
前記原料ガス供給部へ向けて原料ガスの供給を行う原料ガス供給源に対し、前記複数の分割供給部を並列に接続した複数の原料ガス供給ラインと、
前記原料ガス供給部へ向けて原料ガスの濃度調節用の濃度調節ガスの供給を行う濃度調節ガス供給源に対し、前記複数の分割供給部を並列に接続し、各々、前記複数の分割部の一部を選択して前記濃度調節ガスの供給を実行するための給断弁を備えた複数の濃度調節ガス供給ラインと、
前記基板に吸着した原料ガスと反応させ、前記薄膜を構成する反応生成物を生成させるための反応ガスを供給する反応ガス供給部と、を備えた成膜装置。 - 前記原料ガス供給ラインは各々、前記原料ガス供給源から供給された原料ガスを予め設定された流量比で分流するための流量比調節部を備えた請求項1に記載の成膜装置。
- 前記載置部は、載置面に沿って公転するように構成され、
前記複数の分割供給部は、前記載置面の公転中心の内周側から外周側に向かって径方向に分割され、
前記原料ガス供給部と前記反応ガス供給部とは、前記公転の方向に離れて配置された、請求項1または2に記載の成膜装置。 - 前記原料ガス供給部は、前記載置面側から見て、前記公転中心の内周側から外周側に向かって広がる扇型に形成された、請求項3に記載の成膜装置。
- 前記径方向に沿って互いに隣り合う位置に配置された2つの分割供給部の間に挟まれて、島状に形成された分割供給部が設けられている、請求項4に記載の成膜装置。
- 前記原料ガス供給部は、前記載置面側から見て、前記公転中心の内周側から外周側に向かって径方向に伸びる棒状に形成された、請求項3に記載の成膜装置。
- 前記載置部に載置された基板が、当該載置部の公転によって前記原料ガス供給部から原料ガスの供給を受ける位置に進入する手前側の領域であって、前記径方向の異なる位置には、前記反応ガスが供給されても前記反応生成物を生成しない反応阻害ガスを前記基板に吸着させて前記薄膜の膜厚を調節するための複数の反応阻害ガス供給部が設けられた、請求項3ないし6のいずれか一つに記載の成膜装置。
- 前記手前側の位置には、前記複数の反応阻害ガス供給部の一部に替えて、前記原料ガスを供給する原料ガス予備供給部が設けられた、請求項7に記載の成膜装置。
- 基板に原料ガスと反応ガスとを交互に繰り返し供給して薄膜を生成する成膜方法において、
前記基板を載置部に載置する工程と、
前記載置部の基板の載置面を分割して設定された複数の被ガス供給領域に向けて、各々、前記原料ガスを独立して供給する複数の分割供給部を含んだ原料ガス供給部を用い、前記載置部に載置された基板に原料ガスを供給して吸着させる工程と、
前記基板に吸着した原料ガスと反応させ、前記薄膜を構成する反応生成物を生成させるための反応ガスを供給する工程と、を含み、
前記基板に供給される原料ガスは、前記原料ガス供給部へ向けて原料ガスの供給を行う原料ガス供給源に対し、前記複数の分割供給部が並列に接続された複数の原料ガス供給ラインを介して、各々、予め設定された流量比で分流されて前記原料ガス供給源から供給されることと、
前記原料ガス供給部へ向けて原料ガスの濃度調節用の濃度調節ガスの供給を行う濃度調節ガス供給源に対し、前記複数の分割供給部が並列に接続され、給断弁を備えた複数の濃度調節ガス供給ラインを介し、前記複数の分割供給部の一部を選択して供給される前記濃度調節ガスにより濃度が調節されることと、を含む成膜方法。 - 前記載置部は、載置面に沿って公転するように構成され、
前記複数の分割供給部は、前記載置面の公転中心の内周側から外周側に向かって径方向に分割され、
前記原料ガスと前記反応ガスとは、前記公転方向に離れた位置に供給される請求項9に記載の成膜方法。 - 前記載置部に載置された基板が、当該載置部の公転によって前記原料ガス供給部から原料ガスの供給を受ける位置に進入する手前側の領域であって、前記径方向の異なる位置にて、前記反応ガスが供給されても前記反応生成物を生成しない反応阻害ガスを前記基板に吸着させて前記薄膜の膜厚を調節する請求項10に記載の成膜方法。
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