JP2019514199A - 2枚の基板を接合する方法および装置 - Google Patents
2枚の基板を接合する方法および装置 Download PDFInfo
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/6834—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used to protect an active side of a device or wafer
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Abstract
Description
a) 製品基板および/またはキャリア基板上に接合接着剤を塗布して接合接着剤層を形成すること、
b) キャリア基板を接合接着剤層を介して製品基板と結合すること、
c) 接合接着剤層の部分領域だけを硬化させ、この接合接着剤層の残りの領域を硬化させないかまたは少なくとも本質的には硬化させないこと
を有する、製品基板をキャリア基板と一時的に接合する方法に関する。
a) 製品基板および/またはキャリア基板上に接合接着剤を塗布して接合接着剤層を形成する塗布手段と、
b) キャリア基板を接合接着剤層を介して製品基板と結合する結合手段と、
c) 接合接着剤層の部分領域だけを硬化させ、この接合接着剤層の残りの領域を硬化させないかまたは少なくとも本質的には硬化させない硬化装置と
を有する、製品基板をキャリア基板と一時的に接合する装置に関する。
1. 製品基板とキャリア基板との間に保護層が存在する、
2. 接合接着剤層の硬化の領域的な制御が可能である。
3. 付加的な接着防止被覆は必要ない。接着力は、付着低減層によって低下させる必要はない。それにより、より少ないプロセス工程が生じるか、または製品基板および/またはキャリア基板は前処理する必要がない。
2 構造
3,3′ 接合接着剤
4 キャリア基板
5 マスク
5a 透過性領域
5b 不透過性領域
6 積層体
7 UV光
8,8′ 外側領域
9,9′ 内側領域
10,10′ UV光源
11 未被覆領域
B リング幅
Claims (14)
- 次の手順:
a) 製品基板(1)および/またはキャリア基板(4)上に接合接着剤(3,3′)を塗布して接合接着剤層(3,3′)を形成すること、
b) 前記キャリア基板(4)を前記接合接着剤層(3,3′)を介して前記製品基板(1)と結合すること、
c) 前記接合接着剤層(3)の部分領域(8)だけを硬化させ、前記接合接着剤層(3)の残りの領域(9,9′)を硬化させないかまたは少なくとも本質的には硬化させないこと
を有する、製品基板(1)をキャリア基板(4)と一時的に接合する方法。 - 前記接合接着剤(3)を前記製品基板(1)および/または前記キャリア基板(4)上の全面に塗布する、請求項1記載の方法。
- 前記接合接着剤(3′)を前記製品基板(1)および/または前記キャリア基板(4)上の部分領域に、ことに前記製品基板(1)および/または前記キャリア基板(4)の外側縁部に環状に塗布する、請求項1または2記載の方法。
- 前記接合接着剤(3,3′)を前記製品基板(1)の構造(2)上に塗布する、請求項1から3までのいずれか1項記載の方法。
- 前記部分領域(8,8′)の硬化を照射(7)、ことにUV照射(7)により行う、請求項1から4までのいずれか1項記載の方法。
- 前記残りの領域(9,9′)を遮光するために、放射線源(10)と前記基板(1,4)との間にマスク(5)を配置する、請求項1から5までのいずれか1項記載の方法。
- 前記部分領域(8,8′)の硬化を、互いに並んだ光源、ことにUV光源を有する光源アレイを用いて照射することにより行い、前記光源はことに個別に制御することができる、請求項1から6までのいずれか1項記載の方法。
- 前記接合接着剤層(3,3′)の最も外側の縁部領域(8,8′)だけを硬化させる、請求項1から7までのいずれか1項記載の方法。
- 前記接合接着剤層(3,3′)の内側の残りの領域(9,9′)は、硬化されないかまたは少なくとも本質的には硬化されない、請求項1から8までのいずれか1項記載の方法。
- a) 製品基板(1)および/またはキャリア基板(4)上に接合接着剤(3,3′)を塗布して接合接着剤層(3,3′)を形成する塗布手段と、
b) 前記キャリア基板(4)を前記接合接着剤層(3,3′)を介して前記製品基板(1)と結合する結合手段と、
c) 前記接合接着剤層(3,3′)の部分領域(8,8′)だけを硬化させ、前記接合接着剤層(3,3′)の残りの領域(9,9′)を硬化させないかまたは少なくとも本質的には硬化させない硬化装置(10,10′)と
を有する、製品基板(1)をキャリア基板(4)と一時的に接合する装置。 - 前記硬化装置(10,10′)は、放射線源(10)、ことにUV光源(10)を含む、請求項10記載の装置。
- 前記残りの領域(9,9′)の遮光のために、前記放射線源(10)と前記基板(1,4)との間にマスク(5)を有する、請求項10または11記載の装置。
- 前記マスク(5)は、前記放射線源(10)の放射線に対して透過性の領域(5a)と不透過性の領域(5b)とを有する、請求項10から12までのいずれか1項記載の装置。
- 前記硬化装置(10,10′)は、互いに並んだ、ことに個別に制御可能な光源を有する光源アレイ(10′)を含む、請求項10から13までのいずれか1項記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102016106351.7 | 2016-04-07 | ||
DE102016106351.7A DE102016106351A1 (de) | 2016-04-07 | 2016-04-07 | Verfahren und Vorrichtung zum Bonden zweier Substrate |
PCT/EP2017/057969 WO2017174570A1 (de) | 2016-04-07 | 2017-04-04 | Verfahren und vorrichtung zum bonden zweier substrate |
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JP2019514199A true JP2019514199A (ja) | 2019-05-30 |
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JP2018549496A Pending JP2019514199A (ja) | 2016-04-07 | 2017-04-04 | 2枚の基板を接合する方法および装置 |
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Country | Link |
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US (1) | US20190109034A1 (ja) |
EP (1) | EP3440695B1 (ja) |
JP (1) | JP2019514199A (ja) |
KR (1) | KR20180133848A (ja) |
CN (1) | CN108886015A (ja) |
DE (1) | DE102016106351A1 (ja) |
SG (1) | SG11201808444VA (ja) |
TW (1) | TWI774671B (ja) |
WO (1) | WO2017174570A1 (ja) |
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FR3052098B1 (fr) * | 2016-06-03 | 2019-08-09 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Procede de fabrication d’un dispositif de manipulation, dispositif de manipulation et procede de collage reversible utilisant un tel dispositif |
DE102016122803A1 (de) * | 2016-11-25 | 2018-05-30 | Osram Oled Gmbh | Verfahren zum herstellen eines optoelektronischen bauelementes und optoelektronisches bauelement |
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- 2017-04-04 WO PCT/EP2017/057969 patent/WO2017174570A1/de active Application Filing
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KR20180133848A (ko) | 2018-12-17 |
TW201802989A (zh) | 2018-01-16 |
WO2017174570A1 (de) | 2017-10-12 |
EP3440695B1 (de) | 2019-10-02 |
TWI774671B (zh) | 2022-08-21 |
CN108886015A (zh) | 2018-11-23 |
EP3440695A1 (de) | 2019-02-13 |
SG11201808444VA (en) | 2018-10-30 |
US20190109034A1 (en) | 2019-04-11 |
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