JP2019507883A - 流体が充填された細長い圧力センサ - Google Patents
流体が充填された細長い圧力センサ Download PDFInfo
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- JP2019507883A JP2019507883A JP2018547875A JP2018547875A JP2019507883A JP 2019507883 A JP2019507883 A JP 2019507883A JP 2018547875 A JP2018547875 A JP 2018547875A JP 2018547875 A JP2018547875 A JP 2018547875A JP 2019507883 A JP2019507883 A JP 2019507883A
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- JP
- Japan
- Prior art keywords
- pressure sensor
- sensor
- pressure
- fluid
- deformation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0002—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L7/00—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements
- G01L7/02—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges
- G01L7/04—Measuring the steady or quasi-steady pressure of a fluid or a fluent solid material by mechanical or fluid pressure-sensitive elements in the form of elastically-deformable gauges in the form of flexible, deformable tubes, e.g. Bourdon gauges
- G01L7/041—Construction or mounting of deformable tubes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0007—Fluidic connecting means
- G01L19/0046—Fluidic connecting means using isolation membranes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/04—Means for compensating for effects of changes of temperature, i.e. other than electric compensation
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
Description
Claims (22)
- 印加される圧力に応じて撓む細長い本体であってその中に形成されたキャビティを有する、細長い本体と、
前記キャビティをプロセス流体からシールする隔離ダイヤフラムであって、前記プロセス流体からの印加されるプロセス圧力に応じて撓むように構成された、隔離ダイヤフラムと、
前記キャビティ内の隔離充填流体であって、前記隔離ダイヤフラムの撓みに応じて前記細長い本体に圧力を印加し、それにより前記細長い本体の変形を引き起こす、隔離充填流体と、
前記細長い本体に結合された変形センサであって、前記細長い本体の変形に応じたセンサ出力を有し、前記センサ出力は前記プロセス圧力を示す、変形センサと、
を含む、圧力センサ。 - 前記変形センサは歪みゲージを含む、請求項1に記載の圧力センサ。
- 前記歪みゲージはホイートストンブリッジ内に構成されている、請求項2に記載の圧力センサ。
- 前記細長い本体に結合された基準センサを含む、請求項1に記載の圧力センサ。
- 前記基準センサ及び変形センサはホイートストンブリッジ内に配置されている、請求項4に記載の圧力センサ。
- 前記隔離ダイヤフラムに近接したねじ山付きプロセス結合部であって、前記細長い本体をプロセス流体に結合するように構成された、ねじ山付きプロセス結合部を含む、請求項1に記載の圧力センサ。
- 前記細長い本体はプロセス結合部に結合されている、請求項1に記載の圧力センサ。
- 前記細長い本体は前記プロセス結合部に溶接されている、請求項7に記載の圧力センサ。
- 前記隔離ダイヤフラムは前記プロセス結合部に取り付けられている、請求項7に記載の圧力センサ。
- 前記プロセス結合部は、毛細管であってその中で前記隔離充填流体を運ぶ、毛細管を含む、請求項7に記載の圧力センサ。
- 前記プロセス結合部は、前記隔離充填流体を受け入れるように構成された充填流体ポートを含む、請求項10に記載の圧力センサ。
- 前記プロセス結合部はねじ山付きである、請求項7に記載の圧力センサ。
- 前記キャビティは補償インサートを含む、請求項1に記載の圧力センサ。
- 前記補償インサートは温度変化を補償するための熱特性を有する、請求項13に記載の圧力センサ。
- 補償部材は前記キャビティの容積を減らす、請求項13に記載の圧力センサ。
- 前記変形センサに結合された電気的コネクタを含む、請求項1に記載の圧力センサ。
- 請求項1に記載の圧力センサと、
前記圧力センサによって感知された圧力に関連する出力を提供するように構成された回路と、
を含む、プロセス流体の圧力を感知するためのプロセス変数トランスミッタ。 - 前記圧力センサの前記変形センサはホイートストンブリッジ内に配置されている、請求項17に記載のプロセス変数トランスミッタ。
- 前記ホイートストンブリッジに電流を印加するように構成された電流源と、前記ホイートストンブリッジの両端に結果として生じる電圧を感知するように構成された増幅器とを含む、請求項18に記載のプロセス変数トランスミッタ。
- 前記圧力センサに関連する補償情報を記憶するように構成されたメモリを含む、請求項17に記載のプロセス変数トランスミッタ。
- 前記隔離ダイヤフラムは前記プロセス流体をシールする第1のシールを提供し、細長い本体は前記プロセス流体をシールする第2のシールを提供する、請求項1に記載の圧力センサ。
- 前記補償インサートはセラミックを含む、請求項13に記載の圧力センサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/070,318 US10060814B2 (en) | 2016-03-15 | 2016-03-15 | Fluid filled elongate pressure sensor |
US15/070,318 | 2016-03-15 | ||
PCT/US2017/017115 WO2017160426A1 (en) | 2016-03-15 | 2017-02-09 | Fluid filled elongate pressure sensor |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019507883A true JP2019507883A (ja) | 2019-03-22 |
JP6564145B2 JP6564145B2 (ja) | 2019-08-21 |
Family
ID=57930056
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018547875A Active JP6564145B2 (ja) | 2016-03-15 | 2017-02-09 | 流体が充填された細長い圧力センサ |
Country Status (7)
Country | Link |
---|---|
US (1) | US10060814B2 (ja) |
EP (1) | EP3430365A1 (ja) |
JP (1) | JP6564145B2 (ja) |
CN (2) | CN107192498B (ja) |
CA (1) | CA3013073C (ja) |
RU (1) | RU2696353C1 (ja) |
WO (1) | WO2017160426A1 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10060814B2 (en) * | 2016-03-15 | 2018-08-28 | Rosemount Inc. | Fluid filled elongate pressure sensor |
US20170350782A1 (en) * | 2016-06-03 | 2017-12-07 | Honeywell International Inc. | Fill fluid thermal expansion compensation for pressure sensors |
US10620071B2 (en) * | 2016-06-29 | 2020-04-14 | Danfoss A/S | Pressure sensor and method for manufacturing a pressure sensor |
GB2558871B (en) * | 2016-10-28 | 2021-01-06 | Datum Electronics Ltd | Strain gauge |
US10598559B2 (en) * | 2017-06-29 | 2020-03-24 | Rosemount Inc. | Pressure sensor assembly |
US11371899B2 (en) | 2018-05-17 | 2022-06-28 | Rosemount Inc. | Measuring element with an extended permeation resistant layer |
Family Cites Families (34)
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DE102004047959A1 (de) | 2004-10-01 | 2006-04-06 | Siemens Ag | Verfahren und Vorrichtung zur Bestimmung des Drucks in Rohren |
DE102004053672A1 (de) * | 2004-11-03 | 2006-05-04 | Endress + Hauser Gmbh + Co. Kg | Hydraulische Druckübertragungsvorrichtung, insbesondere für einen Druckaufnehmer |
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RU2512142C1 (ru) | 2012-09-20 | 2014-04-10 | Открытое акционерное общество "Научно-исследовательский институт физических измерений" | Способ изготовления тензорезисторного датчика давления на основе тонкопленочной нано- и микроэлектромеханической системы |
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US10060814B2 (en) * | 2016-03-15 | 2018-08-28 | Rosemount Inc. | Fluid filled elongate pressure sensor |
-
2016
- 2016-03-15 US US15/070,318 patent/US10060814B2/en active Active
- 2016-06-29 CN CN201610498440.3A patent/CN107192498B/zh active Active
- 2016-06-29 CN CN201620668650.8U patent/CN205940850U/zh not_active Expired - Fee Related
-
2017
- 2017-02-09 CA CA3013073A patent/CA3013073C/en active Active
- 2017-02-09 WO PCT/US2017/017115 patent/WO2017160426A1/en active Application Filing
- 2017-02-09 RU RU2018136109A patent/RU2696353C1/ru active
- 2017-02-09 EP EP17706088.6A patent/EP3430365A1/en active Pending
- 2017-02-09 JP JP2018547875A patent/JP6564145B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
JP6564145B2 (ja) | 2019-08-21 |
CA3013073C (en) | 2020-09-22 |
US20170268949A1 (en) | 2017-09-21 |
EP3430365A1 (en) | 2019-01-23 |
CN107192498B (zh) | 2021-01-15 |
CN107192498A (zh) | 2017-09-22 |
US10060814B2 (en) | 2018-08-28 |
CN205940850U (zh) | 2017-02-08 |
CA3013073A1 (en) | 2017-09-21 |
WO2017160426A1 (en) | 2017-09-21 |
RU2696353C1 (ru) | 2019-08-01 |
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