JP2019085614A - Heat treatment facility - Google Patents

Heat treatment facility Download PDF

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JP2019085614A
JP2019085614A JP2017214531A JP2017214531A JP2019085614A JP 2019085614 A JP2019085614 A JP 2019085614A JP 2017214531 A JP2017214531 A JP 2017214531A JP 2017214531 A JP2017214531 A JP 2017214531A JP 2019085614 A JP2019085614 A JP 2019085614A
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heat
treated
chamber
heat treatment
heat exchange
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JP6827685B2 (en
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利生 嶋田
Toshio Shimada
利生 嶋田
基之 柳本
Motoyuki Yanagimoto
基之 柳本
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Chugai Ro Co Ltd
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Abstract

To effectively utilize heat of a high-temperature treating object subjected to a heat treatment when heating a low-temperature treating object before the heat treatment while cooling the heat-treated high-temperature treating object.SOLUTION: A heat treatment facility is provided with, as a treatment chamber for heat-treating a treating object W, a heating chamber 10 for heat-treating the treating object W, a heat exchange chamber 20 for housing a high-temperature treating object W2 which is heat-treated in the heating chamber together with a low-temperature treating object W1 which is not heat-treated and for performing heat exchange between the high-temperature treating object and the low-temperature treating object, a cooling chamber 30 for cooling the heat-treated object W after the heat exchange, and a transfer unit 40 for carrying in and out the treating object W to the chambers. The treating object W is carried in and out in a state of sealing between the transfer unit and at least the heating chamber and the heat exchange chamber.SELECTED DRAWING: Figure 11

Description

本発明は、被処理物を熱処理させる処理室と、被処理物を前記の処理室に対して搬入・搬出させる搬送ユニットとを備えた熱処理設備に関するものである。特に、被処理物を加熱処理させる加熱室において加熱処理された高温の被処理物を冷却させる一方、加熱処理させる前の低温の被処理物を加熱させるにあたり、加熱処理された高温の被処理物の熱を有効に利用して加熱処理させる前の低温の被処理物を加熱させるようにした点に特徴を有するものである。   The present invention relates to a heat treatment facility provided with a treatment chamber for heat treating an object to be treated, and a transfer unit for carrying the object to be treated into and out of the treatment chamber. In particular, while heating the high temperature treated object in the heating chamber for heat treatment of the object while heating the low temperature object before the heat treatment, the high temperature treated object being heated It is characterized in that the low temperature object to be treated before the heat treatment is heated by effectively utilizing the heat of

従来から、各種の熱処理を行う熱処理設備としては、被処理物を長い連続処理炉内に順々に導入させ、この連続処理炉内において被処理物を順々に移動させて、被処理物に対して加熱、均熱、冷却等の熱処理を連続的に行うようにした連続式の熱処理設備と、独立したバッチ式の熱処理室内に被処理物を導入させ、この熱処理室内において、前記の被処理物に対して、加熱、均熱、冷却等の熱処理を個別に行うようにしたバッチ式の熱処理設備とが知られている。   Conventionally, as heat treatment equipment for performing various heat treatments, an object to be treated is sequentially introduced into a long continuous treatment furnace, and the object to be treated is sequentially moved in the continuous treatment furnace to be treated. The object to be treated is introduced into a continuous heat treatment equipment for continuously performing heat treatment such as heating, soaking and cooling, and a batch heat treatment chamber independent of each other, and the above-mentioned treatment is performed in the heat treatment chamber. There is known a batch-type heat treatment facility in which heat treatments such as heating, soaking, and cooling are individually performed on objects.

ここで、連続式の熱処理設備の場合、被処理物を一定した熱処理パターンで連続して熱処理するため、生産性は良好であるが、昇温，降温等の熱処理パターンが一定化し、近年のように様々な種類の製品を少量生産するという要請に対しては柔軟に対応することができないという問題があった。   Here, in the case of the continuous heat treatment equipment, the heat treatment pattern such as temperature rise and temperature drop becomes constant although the productivity is good because the object to be treated is continuously heat treated with a constant heat treatment pattern, as in recent years There is a problem that it is not possible to flexibly respond to the demand for producing various types of products in small quantities.

一方、前記のバッチ式の熱処理設備においては、前記のように独立したバッチ式の熱処理室内に被処理物を導入させ、この熱処理室内において、被処理物に対して加熱、均熱、冷却等の熱処理を順々に個別に行うため、１つの被処理物を熱処理させるのに多くの時間が必要になって、生産性が悪くなるという問題があった。   On the other hand, in the above-mentioned batch-type heat treatment equipment, the object to be treated is introduced into the independent batch-type heat treatment chamber as described above, and the object to be treated is heated, equalized, cooled, etc. in the heat treatment chamber. In order to heat-process separately one by one, it took much time to heat-process one to-be-processed object, and there existed a problem that productivity fell.

また、近年においては、特許文献１〜３等に示されるように、被処理物を熱処理させる熱処理室として、被処理物を加熱処理させる加熱室と、加熱処理された被処理物を冷却させる冷却室等を分離して設けると共に、被処理物を加熱室や冷却室等に搬送させる搬送ユニットを設けた熱処理設備が示されている。   Further, in recent years, as shown in Patent Documents 1 to 3 and the like, as a heat treatment chamber for subjecting an object to heat treatment, a heating chamber for subjecting the object to heat treatment and cooling for subjecting the heat treated object to cooling There is shown a heat treatment facility provided with a transfer unit for transferring an object to be processed to a heating chamber, a cooling chamber and the like while separately providing the chamber and the like.

そして、前記の熱処理設備においては、搬入部等から被処理物を搬送ユニット内に搬入させて、この搬送ユニットを加熱室の位置に移動させて加熱室に連結させ、前記の被処理物を搬送ユニットから加熱室内に搬入させて、この加熱室内で被処理物を所定の温度に均一に加熱させて処理させるようにしている。   And in said heat processing installation, a to-be-processed object is carried in in a conveyance unit from a carrying-in part etc., This conveyance unit is moved to the position of a heating chamber, It connects with a heating chamber, The said to-be-processed object is conveyed The object is carried into the heating chamber from the unit, and the object to be treated is uniformly heated to a predetermined temperature in the heating chamber.

その後、前記の搬送ユニットを加熱室の位置に移動させて、搬送ユニットを加熱室に連結させ、加熱室において適切に加熱された被処理物をこの搬送ユニット内に搬入させた後、この搬送ユニットを冷却室の位置に移動させて冷却室に連結させ、加熱された被処理物を搬送ユニットから冷却室に搬入させて冷却させるようにしている。   Thereafter, the transfer unit is moved to the position of the heating chamber, the transfer unit is connected to the heating chamber, and the object appropriately heated in the heating chamber is carried into the transfer unit, and then the transfer unit is transferred. Are moved to the position of the cooling chamber and connected to the cooling chamber, and the heated object is carried from the transport unit to the cooling chamber and cooled.

そして、前記のように新たな被処理物を搬送ユニット内に搬入させ、前記のような操作を繰り返して行って、被処理物を順々に熱処理するようにしている。   Then, as described above, a new object to be treated is carried into the transport unit, and the operation as described above is repeated to sequentially heat treat the object to be treated.

ここで、前記のように加熱室において所定の温度に加熱させて処理させた被処理物を搬送ユニットにより冷却室内に搬入させて冷却させるようにした場合、加熱処理された被処理物を短時間で冷却させることができるようになる。   Here, in the case where the object to be treated which has been heated to a predetermined temperature in the heating chamber as described above is carried into the cooling chamber by the transfer unit and is cooled, the object to be treated with heat treatment is shortened for a short time Can be cooled by

しかし、前記のように加熱処理させた被処理物を短時間で冷却させる必要がない場合や、加熱処理させた被処理物をゆっくり冷却させて、炭素を鉄粒子等にゆっくり浸炭させ、鉄炭化物粒子等を球状化させるような場合等において、所定の温度に加熱処理された被処理物の熱を有効に利用することができず、例えば、所定の温度に加熱処理された被処理物の熱を新たな被処理物を加熱させるのに有効に利用して、新たな被処理物を加熱室内に搬入させて所定の温度に加熱させて処理させる時間を短縮させたりすることはできなかった。   However, when it is not necessary to cool the heat-treated object in a short time as described above, or the heat-treated object is slowly cooled to carburize carbon into iron particles etc. In the case where particles etc. are spheroidized, the heat of the object to be treated which has been heat-treated to a predetermined temperature can not be effectively utilized. For example, the heat of the object to be treated which has been heat-treated to a predetermined temperature It has not been possible to reduce the time required to bring a new object into the heating chamber and heat it to a predetermined temperature for processing, by effectively using the new object to heat the object.

特開２０１３−６４１８４号公報JP, 2013-64184, A 特開２００６−６３３６３号公報JP, 2006-63363, A 特開２０１６−３３７２号公報JP, 2016-3372, A

本発明は、被処理物を熱処理させる処理室と、被処理物を前記の処理室に対して搬入・搬出させる搬送ユニットとを備えた熱処理設備における前記のような問題を解決することを課題とするものである。   An object of the present invention is to solve the above-mentioned problems in a heat treatment facility provided with a treatment chamber for heat treating an object to be treated and a transfer unit for carrying the object into and out of the treatment chamber. It is

すなわち、本発明においては、被処理物を加熱処理させる加熱室において加熱処理された高温の被処理物を冷却させる一方、加熱処理させる前の低温の被処理物を加熱させるにあたり、加熱処理された高温の被処理物の熱を有効に利用できるようにすることを課題とするものである。   That is, in the present invention, while the high-temperature object to be treated which has been subjected to the heat treatment is cooled in the heating chamber for subjecting the object to be treated to heat treatment, the heat treatment is applied to heat the low-temperature object to be treated before the heat treatment. It is an object of the present invention to make it possible to effectively use the heat of a high temperature object to be treated.

本発明における第１の熱処理設備においては、前記のような課題を解決するため、被処理物を熱処理する処理室として、少なくとも、被処理物を加熱処理させる加熱室と、加熱室で加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを一緒に収容させて高温の被処理物と低温の被処理物との間で熱交換を行う熱交換室と、加熱処理されて熱交換された後の被処理物を冷却させる冷却室とを設けると共に、前記の被処理物を各処理室に対して搬入・搬出させる搬送ユニットを設け、前記の搬送ユニットと、少なくとも前記の加熱室及び熱交換室との間を密封させた状態で、被処理物を搬入・搬出させるようにした。   In the first heat treatment equipment of the present invention, in order to solve the problems as described above, at least a heating chamber for heating the object to be treated and a heating chamber for heat treatment are used as a treatment chamber to heat the object to be treated. A heat exchange chamber for storing heat exchange between the high temperature object and the low temperature object by storing together the high temperature object and the low temperature object which is not heat treated; And a transfer unit for transferring the object to be processed into and out of each processing chamber, and a cooling unit for cooling the object after heat exchange. The object to be treated is carried in and out while the space between the heating chamber and the heat exchange chamber is sealed.

そして、前記の第１の熱処理設備のように、加熱室において加熱処理された高温の被処理物と、加熱処理されていない低温の被処理物とを前記の熱交換室内に一緒に収容させると、この熱交換室内において高温の被処理物と低温の被処理物との間で熱交換され、加熱処理された高温の被処理物から放熱された熱により、加熱処理されていない低温の被処理物が加熱されて熱交換されるようになる。このようにすると、加熱処理された高温の被処理物の熱が有効に利用されて、加熱処理されていない低温の被処理物を、加熱室において加熱させる時間を短縮させることもできるようになる。   Then, as in the first heat treatment facility, when the high-temperature object to be treated which has been subjected to the heat treatment in the heating chamber and the low-temperature object to be treated which has not been subjected to the heat treatment are accommodated together in the heat exchange chamber. In the heat exchange chamber, heat is exchanged between the high-temperature object and the low-temperature object in the heat exchange chamber, and the low-temperature object is not heat-treated by the heat radiated from the heat-treated high-temperature object. An object is heated and heat is exchanged. In this way, the heat of the heat-treated high-temperature object can be effectively used, and the time for heating the low-temperature object not heated can also be shortened in the heating chamber. .

また、前記の第１の熱処理設備のように、前記の搬送ユニットと、少なくとも前記の加熱室及び熱交換室との間を密封させた状態で、被処理物を搬入・搬出させるようにすると、搬送ユニットと加熱室や熱交換室との間で加熱処理された高温の被処理物を搬入・搬出させる場合等に、加熱室や熱交換室における熱が外部に漏れ出したり、また加熱処理された高温の被処理物が空気と接触して酸化されたりするのを防止できる。   Further, as in the case of the first heat treatment facility, when the object to be treated is carried in and out in a state where the space between the transfer unit and at least the heating chamber and the heat exchange chamber is sealed, The heat in the heating chamber or the heat exchange chamber may leak to the outside, or it may be heat treated, for example, when carrying in / out a high temperature object to be treated which has been subjected to heat treatment between the transfer unit and the heating chamber or heat exchange chamber. It is possible to prevent the high temperature object from being oxidized in contact with air.

また、前記の第１の熱処理設備においては、前記の熱交換室内に、加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを、水平方向又は垂直方向に並べて収容させることができる。   In the first heat treatment facility, the high temperature object to be treated which has been subjected to the heat treatment and the low temperature object which has not to be subjected to the heat treatment are arranged horizontally or vertically in the heat exchange chamber. It can be done.

ここで、前記の熱交換室内に、加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを垂直方向に並べて収容させる場合、加熱処理された高温の被処理物を、加熱処理されていない低温の被処理物の下側に収容させると、下側に収容された高温の被処理物の熱が上昇して、上側に収容された低温の被処理物に向けて十分に放熱され、高温の被処理物と低温の被処理物との間での熱交換が短時間で適切に行われるようになる。   Here, when the heat-treated high-temperature object to be treated and the low-temperature object to be heat-treated are accommodated in the vertical direction in the heat exchange chamber, the high-temperature object to be heat-treated is selected. When the lower-temperature object to be treated which is not heat-treated is accommodated under the low-temperature object, the heat of the high-temperature object which is accommodated on the lower side is increased and directed to the low-temperature object which is accommodated on the upper side. The heat is sufficiently dissipated, and heat exchange between the high temperature object and the low temperature object can be properly performed in a short time.

また、本発明における第２の熱処理設備においては、前記のような課題を解決するため、被処理物を熱処理する処理室として、少なくとも、被処理物を加熱処理させる加熱室と、加熱処理された被処理物を冷却させる冷却室とを設けると共に、前記の被処理物を各処理室に対して搬入・搬出させる搬送ユニットを設け、前記の搬送ユニット内に、加熱室において加熱処理された高温の被処理物と、加熱処理されていない低温の被処理物とを一緒に収容させて、高温の被処理物と低温の被処理物との間で熱交換を行い、前記の搬送ユニットと、少なくとも前記の加熱室との間を密封させた状態で、被処理物を搬入・搬出させるようにした。   Further, in the second heat treatment equipment in the present invention, in order to solve the problems as described above, at least a heating chamber for heat treating the object to be treated and a heat treatment as a treatment chamber to heat the object to be treated There is provided a cooling chamber for cooling the object to be processed, and a transfer unit for transferring the object to be processed into and out of each processing chamber, and a high temperature heat treated in the heating chamber is provided in the transfer unit. An object to be treated and an object to be treated at low temperature which has not been subjected to heat treatment are accommodated together, and heat exchange is carried out between the object to be treated at high temperature and the object to be treated at low temperature. The object to be treated was carried in and out while the space between the heating chamber and the above was kept sealed.

そして、前記の第２の熱処理設備のように、搬送ユニット内に、加熱室において加熱処理された高温の被処理物と、加熱処理されていない低温の被処理物とを一緒に収容させて、高温の被処理物と低温の被処理物との間で熱交換を行うようにすると、前記の第１の熱処理設備と同様に、加熱処理された高温の被処理物から放熱された熱により、加熱処理されていない低温の被処理物が加熱され、加熱処理された高温の被処理物の熱が有効に利用されて、加熱処理されていない低温の被処理物を、加熱室において加熱させる時間を短縮させることもできるようになる。   Then, as in the above-mentioned second heat treatment equipment, a high temperature object to be treated heated in the heating chamber and a low temperature object not subjected to heat treatment are accommodated together in the transfer unit, When heat exchange is performed between the high-temperature object and the low-temperature object, the heat radiated from the high-temperature object which has been heat-treated, as in the first heat treatment facility, The time for which the low temperature object which has not been heat treated is heated and the heat of the heat treated high temperature object is effectively used to heat the low temperature object which is not heat treated in the heating chamber Can be shortened.

また、前記の第２の熱処理設備のように、前記の搬送ユニットと、少なくとも前記の加熱室との間を密封させた状態で、被処理物を搬入・搬出させるようにすると、搬送ユニットと加熱室との間で加熱処理された高温の被処理物を搬入・搬出させる場合等に、加熱室における熱が外部に漏れ出したり、また加熱処理された高温の被処理物が空気と接触して酸化されたりするのを防止できる。   Further, as in the case of the second heat treatment facility, when the object to be treated is carried in and out in a state where the space between the transfer unit and at least the heating chamber is sealed, the transfer unit and the heating are performed. In the case where a high-temperature object to be heat treated with a room is carried in and out, etc., the heat in the heating chamber leaks to the outside, or the high temperature object to be treated with heat contacts air. It can be prevented from being oxidized.

また、前記の第２の熱処理設備においては、前記の搬送ユニット内に、加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを水平方向又は垂直方向に並べて収容させることができる。   Further, in the second heat treatment facility, the heat-treated high-temperature object and the non-heat-treated low-temperature object are aligned and accommodated in the horizontal direction or the vertical direction in the transfer unit. be able to.

ここで、前記の搬送ユニット内に、加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを垂直方向に並べて収容させる場合、加熱処理された高温の被処理物を、加熱処理されていない低温の被処理物の下側に収容させると、下側に収容された高温の被処理物の熱が上昇し、上側に収容された低温の被処理物に向けて十分に放熱されて、高温の被処理物と低温の被処理物との間での熱交換が短時間で適切に行われるようになる。   Here, in the case where the heat-treated high-temperature object and the low-temperature object not subjected to heat treatment are vertically arranged in the transport unit, the heat-treated object having high temperature is treated. If the heat treatment is carried out on the lower side of the low temperature object which has not been heat-treated, the heat of the high temperature object stored on the lower side rises, and the heat is sufficiently directed toward the low temperature object received on the upper side. The heat is dissipated, and heat exchange between the high-temperature object and the low-temperature object can be properly performed in a short time.

本発明における第１の熱処理設備においては、加熱室において加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを熱交換室内に一緒に収容させ、この熱交換室内において、加熱処理された高温の被処理物から放熱された熱により、加熱処理されていない低温の被処理物を加熱させて熱交換させるようにし、また第２の熱処理設備においては、搬送ユニット内に、加熱室において加熱処理された高温の被処理物と、加熱処理されていない低温の被処理物とを一緒に収容させ、この搬送ユニット内において、加熱処理された高温の被処理物から放熱された熱により、加熱処理されていない低温の被処理物を加熱させて熱交換させるようにした。   In the first heat treatment equipment of the present invention, a high temperature object to be treated which has been subjected to heat treatment in the heating chamber and a low temperature object to be treated which has not been subjected to heat treatment are accommodated together in the heat exchange chamber. And heat exchange is performed by heating the low-temperature object which has not been heat-treated by heat radiated from the high-temperature object which has been heat-treated, and in the second heat treatment facility, in the transport unit In the heating chamber, the high-temperature object to be heat-treated and the low-temperature object to be unheated are accommodated together, and in the transfer unit, the heat is dissipated from the high-temperature object to be treated. The heat produced was used to heat the heat-exchanged low temperature object which was not heat-treated.

この結果、前記の第１及び第２の熱処理設備においては、加熱室において加熱処理された高温の被処理物を冷却させる一方、加熱処理させる前の低温の被処理物を加熱させるにあたり、加熱処理された高温の被処理物の熱を有効に利用することができ、加熱処理されていない低温の被処理物を、加熱室において加熱させる時間や、加熱処理された高温の被処理物を冷却室において冷却させる時間を短縮させることもできるようになる。   As a result, in the first and second heat treatment equipments, the heat treatment is performed while the high temperature treatment object heated in the heating chamber is cooled, while the low temperature treatment object before the heat treatment is heated. The heat of the high-temperature object to be treated can be effectively utilized, the time for which the low-temperature object to be treated which has not been heat-treated is heated in the heating chamber, or the heat-treated object to be treated high-temperature is a cooling chamber The time for cooling can be shortened.

本発明の第１の実施形態に係る熱処理設備において、被処理物を搬送ユニットに搬入させる搬入部と、被処理物を加熱処理させる加熱室と、加熱室内で加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを一緒に収容させて高温の被処理物と低温の被処理物との間で熱交換を行う熱交換室と、加熱処理された被処理物を冷却させる冷却室と、冷却室で冷却された被処理物搬出させる搬出部とを、走行レールに沿って走行する搬送ユニットと対向するようにして、搬送ユニットの走行方向に順々に配置させた状態を示した概略平面図である。In the heat treatment equipment according to the first embodiment of the present invention, a high-temperature object which has been subjected to heat treatment in the heating chamber, a carrying-in unit for carrying the object to be carried into the transport unit, a heating chamber for heating the object to be treated, And a heat exchange chamber in which heat exchange is performed between a high-temperature object and a low-temperature object by storing together a low-temperature object which is not heat-treated, and the heat-treated object The cooling chamber to be cooled and the unloading portion for unloading the object cooled by the cooling chamber are sequentially arranged in the traveling direction of the transport unit so as to face the transport unit traveling along the traveling rail. It is the schematic plan view which showed the state. 前記の第１の実施形態に係る熱処理設備において、搬入部から加熱処理前の被処理物を搬送ユニット内に搬入させる状態を示した概略平面図である。The heat processing installation which concerns on said 1st Embodiment WHEREIN: It is the schematic plan view which showed the state which carries in the to-be-processed object before heat processing from a carrying-in part in a conveyance unit. 前記の第１の実施形態に係る熱処理設備において、被処理物が搬入された搬送ユニットを加熱室の位置に導き、この搬送ユニットの連結部と加熱室の連結部とを密封させた状態で連結させ、搬送ユニット内に搬入された被処理物を加熱室内に搬入させる一方、新たな被処理物を搬入部に導く状態を示した概略平面図である。In the heat treatment equipment according to the first embodiment, the transfer unit carrying the object to be processed is introduced to the position of the heating chamber, and the connection of the transfer unit and the connection of the heating chamber are connected in a sealed state It is the outline top view which showed the state which guides a new to-be-processed object to a carrying-in part while making it carry in and carry in the to-be-processed object carried in in the conveyance unit in a heating chamber. 前記の第１の実施形態に係る熱処理設備において、被処理物が搬入された搬送ユニットを加熱室と対向する位置に導いた状態を示した概略断面説明図である。The heat processing installation which concerns on said 1st Embodiment WHEREIN: It is a schematic cross-section explanatory drawing which showed the state which guide | induced the conveyance unit by which the to-be-processed object was carried in to the position facing a heating chamber. 前記の第１の実施形態に係る熱処理設備において、被処理物が搬入された搬送ユニットを加熱室と対向する位置に導いた状態で、搬送ユニットの連結部と加熱室の連結部とを密封させた状態で連結させ、搬送ユニットと加熱室とにおける開閉扉を開けて、搬送ユニット内における前記の被処理物を加熱室内に搬入させる状態を示した概略断面説明図である。In the heat treatment equipment according to the first embodiment, the connection portion of the transfer unit and the connection portion of the heating chamber are sealed in a state in which the transfer unit into which the object to be processed is carried is guided to a position facing the heating chamber. FIG. 10 is a schematic cross-sectional explanatory view showing a state in which the object to be processed in the transfer unit is carried into the heating chamber by connecting in the closed state and opening the opening and closing door in the transfer unit and the heating chamber. 前記の第１の実施形態に係る熱処理設備において、搬送ユニット内における被処理物を加熱室内に搬入させた後、搬送ユニットと加熱室とにおける開閉扉を閉じ、搬送ユニットを加熱室から離間させると共に、加熱室内に搬入された被処理物を加熱処理させる状態を示した概略断面説明図である。In the heat treatment equipment according to the first embodiment, after the object to be treated in the transfer unit is carried into the heating chamber, the opening / closing door in the transfer unit and the heating chamber is closed, and the transfer unit is separated from the heating chamber. It is a schematic cross-section explanatory drawing which showed the state which heat-processes the to-be-processed object carried in in the heating chamber. 前記の第１の実施形態に係る熱処理設備において、搬入部に導かれた新たな被処理物を搬送ユニット内に搬入させ、この搬送ユニットを熱交換室と対向する位置に移動させ、この搬送ユニット内に搬入された被処理物を、熱交換室の一方の連結部を通して熱交換室内に搬入させた状態を示した概略平面図である。In the heat treatment equipment according to the first embodiment, a new object to be treated guided to the loading unit is carried into the transport unit, and the transport unit is moved to a position facing the heat exchange chamber, and the transport unit It is the schematic plan view which showed the state which carried in to the heat exchange chamber the to-be-processed object carried in inside through one connection part of a heat exchange chamber. 前記の第１の実施形態に係る熱処理設備において、被処理物が収容された搬送ユニットを熱交換室と対向する位置に導いた状態を示した概略断面説明図である。The heat processing installation which concerns on said 1st Embodiment WHEREIN: It is a schematic cross-section explanatory drawing which showed the state which guide | induced the conveyance unit in which the to-be-processed object was accommodated to the position facing a heat exchange chamber. 前記の第１の実施形態に係る熱処理設備において、搬送ユニットを熱交換室と対向する位置に導いた状態で、搬送ユニットの連結部と熱交換室の連結部とを密封させた状態で連結させ、搬送ユニットと熱交換室とにおける開閉扉を開けて、搬送ユニット内における被処理物を熱交換室内に搬入させる状態を示した概略断面説明図である。In the heat treatment equipment according to the first embodiment, in a state where the transfer unit is guided to a position facing the heat exchange chamber, the connection portion of the transfer unit and the connection portion of the heat exchange chamber are connected in a sealed state FIG. 14 is a schematic cross-sectional explanatory view showing a state in which the object in the transport unit is carried into the heat exchange chamber by opening the opening and closing door in the transport unit and the heat exchange chamber. 前記の第１の実施形態に係る熱処理設備において、搬送ユニット内における被処理物を熱交換室内に搬入させ、搬送ユニットと加熱室とにおける開閉扉を閉じた後、搬送ユニットを加熱室から離間させる状態を示した概略断面説明図である。In the heat treatment equipment according to the first embodiment, the object to be treated in the transfer unit is carried into the heat exchange chamber, and after the opening and closing door of the transfer unit and the heating chamber is closed, the transfer unit is separated from the heating chamber It is a schematic cross-section explanatory drawing which showed the state. 前記の第１の実施形態に係る熱処理設備において、加熱室内において加熱処理された高温の被処理物を搬送ユニット内に搬入させた後、この搬送ユニットを前記の熱交換室における他方の連結部と対向する位置に移動させ、前記の搬送ユニット内に搬入された加熱処理された被処理物を、この他方の連結部を通して熱交換室内に搬入させた状態を示した概略平面図である。In the heat treatment equipment according to the first embodiment, after the high-temperature object to be treated which has been heat-treated in the heating chamber is carried into the conveyance unit, the conveyance unit is connected to the other connecting portion in the heat exchange chamber. It is the schematic plan view which showed the state which moved to the position which opposed and carried in the heat exchange chamber through the other connection part the heat-treated to-be-processed object carried in in the said conveyance unit. 前記の第１の実施形態に係る熱処理設備において、前記の熱交換室内に加熱処理されていない被処理物と加熱処理された高温の被処理物とを搬入させた状態で、熱交換室内におけるファンを回転させて、加熱処理されていない被処理物と加熱処理された高温の被処理物との間で熱交換させて、加熱処理された被処理物を適当な温度まで冷却させる一方、先に搬入されていた加熱処理前の被処理物を適当な温度まで加熱させる状態を示した概略断面説明図である。In the heat treatment equipment according to the first embodiment, the fan in the heat exchange chamber is carried in a state in which the object not to be heat treated and the object to be heat treated at high temperature are carried into the heat exchange chamber. And heat exchange between the non-heat-treated object and the heat-treated high-temperature object to cool the heat-treated object to a suitable temperature, while It is a schematic cross-section explanatory drawing which showed the state to which the to-be-processed object before the heat processing which has been carried in is heated to a suitable temperature. 前記の第１の実施形態に係る熱処理設備において、熱交換室内において適当な温度まで加熱された加熱処理前の被処理物を一方の連結部を通して搬送ユニット内に搬入させ、この搬送ユニットを加熱室の位置に導き、この搬送ユニット内から前記の加熱処理前の被処理物を加熱室内に搬入させて、適当な温度まで加熱された加熱処理前の被処理物を、加熱室内においてさらに加熱処理する状態を示した概略平面図である。In the heat treatment equipment according to the first embodiment, the object to be treated which has been heated to an appropriate temperature in the heat exchange chamber is carried into the transport unit through one of the connection portions, and the transport unit is heated in the heating chamber. The object to be treated before the heat treatment is carried from the inside of the transfer unit into the heating chamber, and the object to be treated which has been heated to an appropriate temperature is further heated in the heating chamber. It is the schematic plan view which showed the state. 前記の第１の実施形態に係る熱処理設備において、熱交換室内において適当な温度まで冷却された加熱処理後の被処理物を他方の連結部を通して搬送ユニット内に搬入させ、この搬送ユニットを冷却室の位置に導き、この搬送ユニット内から前記の加熱処理後の被処理物を冷却室内に搬入させて、加熱処理後の適当な温度まで冷却された被処理物を冷却室内においてさらに冷却させる一方、新たな被処理物を搬入部に導く状態を示した概略平面図である。In the heat treatment equipment according to the first embodiment, the heat-treated object cooled to an appropriate temperature in the heat exchange chamber is carried into the transport unit through the other connecting portion, and the transport unit is cooled in the cooling chamber. While the object after heat treatment is carried into the cooling chamber from the inside of the transfer unit, and the object cooled to an appropriate temperature after heat treatment is further cooled in the cooling chamber; It is the schematic plan view which showed the state which guides a new to-be-processed object to a carrying in part. 前記の第１の実施形態に係る熱処理設備において、適当な温度まで冷却された加熱処理後の被処理物が搬入された搬送ユニットを冷却室と対向する位置に導いた状態を示した概略断面説明図である。In the heat treatment equipment according to the first embodiment, a schematic cross-sectional view showing a state where the transport unit to which the heat-treated object cooled to an appropriate temperature is carried is brought to a position facing the cooling chamber. FIG. 前記の第１の実施形態に係る熱処理設備において、適当な温度まで冷却された加熱処理後の被処理物を搬入させた搬送ユニットを冷却室と対向する位置に導いた状態で、搬送ユニットの連結部と冷却室の連結部とを密封させた状態で連結させ、搬送ユニットと冷却室とにおける開閉扉を開けて、搬送ユニット内における前記の被処理物を冷却室内に搬入させる状態を示した概略断面説明図である。In the heat treatment equipment according to the first embodiment, the conveyance unit is connected in a state in which the conveyance unit carrying the heat-treated object cooled to an appropriate temperature is introduced to a position facing the cooling chamber. The connection between the cooling unit and the cooling chamber is connected in a sealed state, the opening / closing door of the transfer unit and the cooling chamber is opened, and the object in the transfer unit is carried into the cooling chamber. FIG. 前記の第１の実施形態に係る熱処理設備において、搬送ユニット内から適当な温度まで冷却された加熱処理後の被処理物を冷却室内に搬入させた後、搬送ユニットと冷却室とにおける開閉扉を閉じ、搬送ユニットを冷却室から離間させると共に、冷却室内に搬入された被処理物をさらに冷却させる状態を示した概略断面説明図である。In the heat treatment equipment according to the first embodiment, after the object after heat treatment which has been cooled to an appropriate temperature from the inside of the conveyance unit is carried into the cooling chamber, the opening / closing door in the conveyance unit and the cooling chamber is It is a schematic cross-sectional explanatory view showing a state in which the processing unit carried into the cooling chamber is further cooled while the transport unit is closed and separated from the cooling chamber. 前記の第１の実施形態に係る熱処理設備の変更例において、熱処理設備において、加熱処理される前の低温の被処理物と加熱処理された後の高温の被処理物とを熱交換室内に上下方向に配置させるようにし、加熱処理される前の被処理物を収容させた搬送ユニットを熱交換室に密封状態で連結させると共に、搬送ユニットと熱交換室との開閉扉を開けて搬送ユニットと熱交換室とを連通させ、この状態で、搬送ユニット内における前記の被処理物を、熱交換室内に搬入させて保持台に保持させた状態を示した概略断面説明図である。In the modification of the heat treatment equipment according to the first embodiment, in the heat treatment equipment, the low-temperature object before being heat-treated and the high-temperature object after being heat-treated are moved up and down in the heat exchange chamber. The transfer unit containing the object to be treated before being heat-treated is connected in a sealed state to the heat exchange chamber, and the opening and closing door of the transfer unit and the heat exchange chamber is opened. FIG. 14 is a schematic cross-sectional explanatory view showing a state in which the object to be treated in the transfer unit is carried into the heat exchange chamber and held by the holding table in communication with the heat exchange chamber. 前記の第１の実施形態に係る熱処理設備の変更例において、搬送ユニットと熱交換室とにおける開閉扉とを閉じ、搬送ユニットを熱交換室から離間させると共に、熱交換室の保持台に保持され加熱処理される前の被処理物を、熱交換室の上に設けた昇降装置により昇降される昇降部材に保持させて上昇させ、前記の保持台の上方に保持させた状態を示した概略断面説明図である。In the modification of the heat treatment equipment according to the first embodiment, the transfer unit and the open / close door in the heat exchange chamber are closed, and the transfer unit is separated from the heat exchange chamber and held by the holding table of the heat exchange chamber. A schematic cross section showing a state in which the object to be treated before being subjected to the heat treatment is held and raised by a raising and lowering member raised and lowered by a raising and lowering device provided above the heat exchange chamber and held above the holding table. FIG. 前記の変更例における熱処理設備において、加熱室において加熱処理された高温の被処理物が搬入された搬送ユニットを熱交換室に密封状態で連結させると共に、搬送ユニットと熱交換室との開閉扉を開けて搬送ユニットと熱交換室とを連通させ、この状態で、搬送ユニット内における前記の加熱処理された高温の被処理物を、熱交換室内に搬入させて保持台に保持させた状態を示した概略断面説明図である。In the heat treatment equipment according to the above-mentioned modification, the transport unit into which the high-temperature object heat-treated in the heating chamber is carried is connected in a sealed state to the heat exchange chamber, and the opening / closing door of the transport unit and the heat exchange chamber In this state, the heat-treated high-temperature object in the transport unit is carried into the heat exchange chamber and held by the holding table. FIG. 前記の変更例における熱処理設備において、搬送ユニットと熱交換室とにおける開閉扉とを閉じ、搬送ユニットを熱交換室から離間させ後、熱交換室内におけるファンを回転させて、熱交換室内の保持台に保持された加熱処理された高温の被処理物と、昇降部材によって保持台の上方に保持させた加熱処理される前の被処理物との間で熱交換させて、加熱処理後における被処理物を適当な温度まで冷却させる一方、加熱処理前の被処理物を適当な温度まで加熱させる状態を示した概略断面説明図である。In the heat treatment equipment in the above modification, the transfer unit and the open / close door in the heat exchange chamber are closed, and after the transfer unit is separated from the heat exchange chamber, the fan in the heat exchange chamber is rotated to hold the heat exchange chamber. Heat exchange between the heat-treated high-temperature object held by and the object before heat treatment held above the holding table by the elevating member It is a schematic cross-sectional explanatory drawing which showed the state which makes it heat the thing to be processed to a suitable temperature while cooling a thing to a suitable temperature. 本発明の第２の実施形態に係る熱処理設備において、被処理物を搬送ユニットに搬入させる搬入部と、被処理物を加熱処理させる加熱室と、加熱処理された被処理物を冷却させる冷却室と、冷却室で冷却された被処理物を搬出させる搬出部とを、走行レールに沿って走行する搬送ユニットと対向するようにして、搬送ユニットの走行方向に順々に配置させ、前記の搬送ユニット内に加熱処理される前の低温の被処理物と加熱処理された後の高温の被処理物とを上下方向に配置させて搬入させるにあたり、前記の搬入部から加熱処理前の被処理物を前記の搬送ユニット内に搬入させる状態を示した概略平面図である。In a heat treatment facility according to a second embodiment of the present invention, a carry-in unit for carrying in an object to be processed to a transport unit, a heating chamber for heat-treating the object to be heated, and a cooling chamber for cooling the object to be heat-treated. And a carry-out unit for carrying out the object to be treated cooled in the cooling chamber, arranged in order in the traveling direction of the conveyance unit, so as to face the conveyance unit traveling along the traveling rail, The object to be treated before the heat treatment from the carry-in portion is disposed in the case where the object to be treated at low temperature before the heat treatment and the object to be treated at high temperature after the heat treatment are vertically arranged and carried in the unit. Is a schematic plan view showing a state of carrying in the above-mentioned transport unit. 前記の第２の実施形態に係る熱処理設備において、加熱処理前の被処理物が搬入された搬送ユニットを加熱室の位置に導き、この搬送ユニットと加熱室とを密封させた状態で連結させ、搬送ユニット内に搬入された加熱処理前の被処理物を加熱室内に搬入させる一方、新たな被処理物を搬入部に導く状態を示した概略平面図である。In the heat treatment equipment according to the second embodiment, the transport unit carrying the object to be treated before the heat treatment is introduced to the position of the heating chamber, and the transport unit and the heating chamber are connected in a sealed state. It is the schematic plan view which showed the state which leads the new to-be-processed object to a carrying-in part while making the to-be-processed object before the heat processing carried in in the conveyance unit carry in in a heating chamber. 前記の第２の実施形態に係る熱処理設備において、加熱室と対向する位置に導かれた搬送ユニット内における加熱処理前の被処理物を加熱室内に搬入させて、前記の被処理物を加熱処理する状態を示した概略断面説明図である。In the heat treatment equipment according to the second embodiment, the object to be treated before the heat treatment in the transfer unit guided to the position facing the heating chamber is carried into the heating chamber to heat the object to be treated. It is a schematic cross-sectional explanatory drawing which showed the state to be. 前記の第２の実施形態に係る熱処理設備において、搬入部に導かれた新たな被処理物を搬送ユニット内に搬入させると共に、この搬送ユニット内に搬入された加熱処理前の被処理物を、搬送ユニットの上に設けた昇降装置によって昇降される昇降部材に保持させて上昇させ、搬送ユニット内における搬入・搬出用部材の上方に保持させると共に、この搬送ユニットを、前記のように被処理物を加熱処理させた加熱室と対向する位置に導いた状態を示した概略断面説明図である。In the heat treatment equipment according to the second embodiment, the new object to be treated introduced to the introduction unit is carried into the transport unit, and the object to be treated before the heat treatment carried into the transport unit is The elevating member is moved up and down by the elevating device provided on the transport unit to lift and lift it, and the transport unit is held above the loading / unloading member in the transport unit, and the transport unit is the object to be treated as described above. It is a schematic cross-section explanatory drawing which showed the state which guide | induced to the position facing the heating chamber which was made to heat-process. 前記の第２の実施形態に係る熱処理設備において、前記の搬送ユニットを加熱室に連通させ、前記の加熱室内において加熱処理された被処理物を、前記の搬送ユニット内における搬入・搬出用部材により搬送ユニット内に搬入させた状態を示した概略断面説明図である。In the heat treatment equipment according to the second embodiment, the transfer unit is communicated with the heating chamber, and the object to be treated which has been heat-treated in the heating chamber is carried by the loading / unloading member in the transfer unit. It is a schematic cross-section explanatory drawing which showed the state carried in in the conveyance unit. 前記の第２の実施形態に係る熱処理設備において、前記の搬送ユニットと加熱室とにおける開閉扉を閉じて、搬送ユニットを加熱室から離間させた状態で、搬送ユニット内におけるファンを回転させて、搬送ユニット内の搬入・搬出用部材に保持された加熱処理された高温の被処理物と、昇降部材によって搬入・搬出用部材の上方に保持された加熱処理される前の被処理物との間で熱交換させ、加熱処理後における被処理物を適当な温度まで冷却させる一方、加熱処理前の被処理物を適当な温度まで加熱させる状態を示した概略断面説明図である。In the heat treatment equipment according to the second embodiment, the open / close door in the transfer unit and the heating chamber is closed, and the fan in the transfer unit is rotated while the transfer unit is separated from the heating chamber, Between the heat-treated high-temperature object held by the loading / unloading member in the transport unit and the heat-treated object held above the loading / unloading member by the elevating member FIG. 6 is a schematic cross-sectional explanatory view showing a state in which the heat treatment is performed to exchange heat and the object to be treated after the heat treatment is cooled to an appropriate temperature, and the object to be treated before heat treatment is heated to an appropriate temperature. 前記の第２の実施形態に係る熱処理設備において、前記の搬送ユニットを冷却室と対向する位置に導いて、この搬送ユニットと冷却室とを連通させ、搬送ユニット内において適当な温度まで冷却された加熱処理後の被処理物を、搬入・搬出用部材により冷却室内に搬入させた状態を示した概略断面説明図である。In the heat treatment equipment according to the second embodiment, the transfer unit is led to a position facing the cooling chamber, the transfer unit and the cooling chamber are communicated with each other, and the transfer unit is cooled to an appropriate temperature. It is a schematic cross-section explanatory drawing which showed the state which carried in the cooling chamber with the to-be-processed object after heat processing by the member for carrying in / out. 前記の第２の実施形態に係る熱処理設備において、前記の搬送ユニットと冷却室とにおける開閉扉を閉じて、搬送ユニットを冷却室から離間させた状態で、前記の加熱処理後の被処理物を冷却室内においてさらに冷却させる一方、前記の搬送ユニット内において適当な温度まで加熱された加熱処理前の被処理物を前記の昇降部材によって下降させて、搬入・搬出用部材の上に保持させた状態を示した概略断面説明図である。In the heat treatment equipment according to the second embodiment, the object to be treated after the heat treatment is performed in a state in which the opening and closing door in the transfer unit and the cooling chamber is closed and the transfer unit is separated from the cooling chamber. A state in which the object to be treated which has been heated to an appropriate temperature in the transport unit is lowered by the elevating member and held on the loading / unloading member while being further cooled in the cooling chamber FIG. 6 is a schematic cross-sectional explanatory view showing FIG. 前記の第２の実施形態に係る熱処理設備において、前記の搬送ユニットを前記の加熱室と対向する位置に導いて、搬送ユニットを加熱室に連通させた状態で、前記の搬入・搬出用部材の上に保持させた適当な温度まで加熱された加熱処理前の被処理物を、搬送ユニット内から加熱室内に搬入させた状態を示した概略断面説明図である。In the heat treatment equipment according to the second embodiment, the transport unit is guided to a position facing the heating chamber, and the transport unit is in communication with the heating chamber. It is a schematic cross-section explanatory drawing which showed the state which carried in into the heating chamber the to-be-processed object heated before the heat processing hold | maintained to the suitable temperature hold | maintained above from the conveyance unit.

以下、本発明の実施形態に係る熱処理設備を、添付図面に基づいて具体的に説明する。なお、本発明に係る熱処理設備は、下記の実施形態に示したものに限定されず、発明の要旨を変更しない範囲において、適宜変更して実施できるものである。   Hereinafter, the heat treatment equipment concerning an embodiment of the present invention is concretely explained based on an accompanying drawing. In addition, the heat processing installation which concerns on this invention is not limited to what was shown to the following embodiment, In the range which does not change the summary of invention, it can change suitably and can implement.

（第１の実施形態）
第１の実施形態に係る熱処理設備においては、図１等に示すように、被処理物Ｗを搬入させる搬入部１と、被処理物Ｗを非酸化雰囲気中で所定の温度に加熱させて加熱処理する加熱室１０と、加熱室１０内において加熱処理された高温の被処理物Ｗと加熱処理されていない低温の被処理物Ｗとを一緒に収容させて、高温の被処理物Ｗと低温の被処理物Ｗとの間で熱交換を行う熱交換室２０と、加熱処理されて熱交換された後の被処理物Ｗを冷却させる冷却室３０と、冷却室３０において冷却された被処理物Ｗを搬出させる搬出部２とを、走行レールＬに沿って走行する搬送ユニット４０と対向するようにして、搬送ユニット４０の走行方向に順々に配置させている。 First Embodiment
In the heat treatment equipment according to the first embodiment, as shown in FIG. 1 and the like, the carrying-in portion 1 for carrying in the object W to be processed and the object W to be heated are heated to a predetermined temperature in a non-oxidizing atmosphere. A high temperature object W and a low temperature are accommodated by accommodating together the heating chamber 10 to be processed, the high temperature object W heated in the heating chamber 10 and the low temperature object W not subjected to heat treatment. Heat exchange chamber 20 for heat exchange with the object W to be treated, a cooling chamber 30 for cooling the object W to be treated after being subjected to heat treatment and heat exchange, and the object to be treated cooled in the cooling chamber 30 The delivery unit 2 for delivering the object W is disposed in order in the traveling direction of the transport unit 40 so as to face the transport unit 40 traveling along the travel rail L.

ここで、この実施形態における搬送ユニット４０においては、図１等に示すように、前記の加熱室１０や熱交換室２０や冷却室３０と対向する部分に、この搬送ユニット４０を加熱室１０や熱交換室２０や冷却室３０に密封状態で連結させる連結部４１を設けると共に、この連結部４１を通して被処理物Ｗを搬入・搬出させる開口部分を開閉させる開閉扉４２を設けている。また、この搬送ユニット４０内には、図４等に示すように、被処理物Ｗを搬送ユニット４０内に搬入・搬出させる伸縮可能な搬入・搬出用部材４３を設けている。   Here, in the conveyance unit 40 in this embodiment, as shown in FIG. 1 etc., the conveyance unit 40 is disposed in a portion facing the heating chamber 10, the heat exchange chamber 20 and the cooling chamber 30. A connecting portion 41 connected in a sealed state to the heat exchange chamber 20 and the cooling chamber 30 is provided, and an open / close door 42 for opening and closing an opening portion for carrying in / out the object W through the connecting portion 41 is provided. Further, as shown in FIG. 4 and the like, an expandable loading / unloading member 43 for loading / unloading the object W into / from the transport unit 40 is provided in the transport unit 40.

ここで、この実施形態においては、前記の被処理物Ｗが加熱室１０で加熱処理される前であるか、加熱処理された後であるかを明確にするため、加熱処理前の被処理物Ｗを被処理物Ｗ１と、加熱処理後の被処理物Ｗを被処理物Ｗ２として示した。   Here, in this embodiment, in order to clarify whether the to-be-processed object W is before being subjected to the heat treatment in the heating chamber 10 or after being subjected to the heat treatment, the object to be treated before the heat treatment is W is shown as the object to be treated W1 and the object to be treated W after the heat treatment is as the object to be treated W2.

そして、この実施形態においては、図２に示すように、前記の搬送ユニット４０を前記の搬入部１の位置に導き、図示していないが、搬送ユニット４０における前記の開閉扉４２を開閉させて、搬送ユニット４０内に設けた前記の搬入・搬出用部材４３により、前記の加熱処理する前の被処理物Ｗ１を搬入部１から搬送ユニット４０内に搬入させるようにする。   And in this embodiment, as shown in FIG. 2, the above-mentioned conveyance unit 40 is led to the position of the above-mentioned carrying-in part 1, and although not illustrated, the above-mentioned opening and closing door 42 in conveyance unit 40 is opened and closed. The loading / unloading member 43 provided in the transport unit 40 causes the workpiece W1 to be loaded from the loading unit 1 into the transport unit 40 before the heating process.

次いで、このように被処理物Ｗ１が搬入された搬送ユニット４０を、図３に示すように、走行レールＬに沿って加熱室１０と対向する位置に移動させ、この搬送ユニット４０内に搬入された前記の被処理物Ｗ１を、搬送ユニット４０内から搬出させて加熱室１０内に搬入させるようにしている。また、前記の搬入部１に適当なタイミングで次の被処理物Ｗ１を導くようにしている。   Then, as shown in FIG. 3, the transport unit 40 into which the object to be processed W1 has been carried in is moved to a position facing the heating chamber 10 along the traveling rail L and carried into the transport unit 40. The object to be processed W1 is carried out of the transfer unit 40 and carried into the heating chamber 10. Further, the next object to be processed W1 is introduced to the loading unit 1 at an appropriate timing.

ここで、前記の加熱室１０においては、図３〜図６に示すように、前記の搬送ユニット４０における前記の連結部４１と対応するようにして、搬送ユニット４０の連結部４１と密封状態で連結させる連結部１１を設け、この連結部１１を通して被処理物Ｗ（Ｗ１，Ｗ２）を搬入・搬出させる開口部分を開閉させる開閉扉１２を設けると共に、この加熱室１０内において被処理物Ｗ（Ｗ１，Ｗ２）を保持する保持台１３を設け、またこの加熱室１０内において加熱処理前の被処理物被処理物Ｗ１を加熱させる電熱ヒーター等の加熱装置（図示せず）を設けている。   Here, in the heating chamber 10, as shown in FIG. 3 to FIG. 6, it is made to correspond to the connecting portion 41 in the transfer unit 40 and in a sealed state with the connecting portion 41 of the transfer unit 40. A connecting portion 11 to be connected is provided, and an open / close door 12 for opening and closing an opening portion for carrying in / out the object W (W1, W2) through the connecting portion 11 is provided. A holder 13 for holding W1 and W2) is provided, and a heating device (not shown) such as an electric heater for heating the object to be treated W1 before the heating process in the heating chamber 10 is provided.

そして、前記のように加熱処理する前の被処理物Ｗ１を搬送ユニット４０内から搬出させて加熱室１０内に搬入させるにあたっては、図４に示すように、搬送ユニット４０を加熱室１０と対向する位置に移動させた後、図５に示すように、前記の搬送ユニット４０における連結部４１を加熱室１０における連結部１１に密封状態で連結させ、搬送ユニット４０の開閉扉４２と加熱室１０の開閉扉１２とを開けて、搬送ユニット４０と加熱室１０とを連通させ、この状態で、搬送ユニット４０内における加熱処理する前の被処理物Ｗ１を、前記の搬入・搬出用部材４３によって搬送ユニット４０内から搬出させて加熱室１０内に搬入させ、加熱室１０内に設けた前記の保持台１３の上に前記の被処理物Ｗ１を保持させるようにする。   Then, when the object W1 to be treated before being subjected to the heat treatment is carried out from the inside of the conveyance unit 40 and carried into the heating chamber 10 as described above, the conveyance unit 40 faces the heating chamber 10 as shown in FIG. 5, the connection portion 41 of the transfer unit 40 is connected to the connection portion 11 of the heating chamber 10 in a sealed state, and the opening / closing door 42 of the transfer unit 40 and the heating chamber 10 are moved. The transfer unit 40 and the heating chamber 10 are communicated with each other by opening the open / close door 12, and in this state, the object W1 to be treated before being subjected to the heat treatment in the transfer unit 40 is transferred by the loading / unloading member 43. The workpiece W1 is carried out of the transport unit 40 and carried into the heating chamber 10, and the object W1 is held on the holding table 13 provided in the heating chamber 10.

また、このようにして被処理物Ｗ１を加熱室１０内の保持台１３の上に保持させた後は、図６に示すように、搬送ユニット４０の開閉扉４２と加熱室１０の開閉扉１２とを閉じた後、加熱室１０に密封状態で連結された搬送ユニット４０を加熱室１０から離間させると共に、加熱室１０に設けた前記の加熱装置（図示せず）により、前記の保持台１３に保持された前記の加熱処理させる前の被処理物Ｗ１を、加熱室１０内において所定温度に加熱させ所定時間かけて加熱処理し、加熱処理された被処理物Ｗ２を得るようにする。   Further, after holding the object to be treated W1 on the holding base 13 in the heating chamber 10 in this manner, as shown in FIG. 6, the opening / closing door 42 of the transfer unit 40 and the opening / closing door 12 of the heating chamber 10 And the transfer unit 40 connected in a sealed state to the heating chamber 10 is separated from the heating chamber 10 and the holding table 13 is provided by the heating device (not shown) provided in the heating chamber 10. The to-be-processed object W1 before being subjected to the heat treatment is heated to a predetermined temperature in the heating chamber 10 and heated for a predetermined time to obtain the to-be-heat-treated object W2.

次いで、図７に示すように、前記の搬入部１に導かれた次の加熱処理する前の被処理物Ｗ１を、前記のようにして搬入部１から搬送ユニット４０内に搬入させた後、この搬送ユニット４０を走行レールＬに沿って熱交換室２０と対向する位置に移動させ、この搬送ユニット４０内に搬入された前記の被処理物Ｗ１を、搬送ユニット４０内から搬出させて熱交換室２０内に搬入させるようにする。   Next, as shown in FIG. 7, after the object W1 to be treated before the next heat treatment introduced to the loading unit 1 is carried from the loading unit 1 into the transport unit 40 as described above, The transport unit 40 is moved along the travel rail L to a position facing the heat exchange chamber 20, and the object W1 carried into the transport unit 40 is carried out of the transport unit 40 for heat exchange. It is carried into the chamber 20.

ここで、この実施形態における熱交換室２０においては、図８〜図１０等に示すように、前記の搬送ユニット４０における連結部４１と密封状態で連結させる連結部２１として、前記の搬送ユニット４０の移動方向に沿った水平方向に２つの連結部２１ａ，２１ｂを並列して設け、前記の搬送ユニット４０から被処理物Ｗ（Ｗ１，Ｗ２）を前記の連結部２１を通して熱交換室２０内に搬入・搬出させる開口部分を開閉させる開閉扉２２として、前記の各連結部２１ａ，２１ｂに対応して水平方向に２つの開閉扉２２ａ，２２ｂを並列して設けると共に、この熱交換室２０内において被処理物Ｗを保持する保持台２３として、熱交換させる２つの被処理物Ｗ（Ｗ１，Ｗ２）を保持する２つの保持台２３ａ，２３ｂを設け、さらにこの熱交換室２０の上に設けられた回転装置２４によって回転されるファン２５を熱交換室２０内に設けている。   Here, in the heat exchange chamber 20 in this embodiment, as shown in FIGS. 8 to 10 and the like, the transfer unit 40 is used as the connecting portion 21 to be connected in a sealed state with the connecting portion 41 of the transfer unit 40. The two connecting portions 21a and 21b are provided in parallel in the horizontal direction along the moving direction of the object, and the object W (W1, W2) is transferred from the transport unit 40 into the heat exchange chamber 20 through the connecting portions 21. In the heat exchange chamber 20, two open / close doors 22a and 22b are provided in parallel in the horizontal direction corresponding to the connection portions 21a and 21b as the open / close door 22 for opening / closing the opening portion for carrying in / out. Two holding bases 23 a and 23 b for holding two objects to be treated W (W 1 and W 2) to be heat-exchanged are provided as a holding base 23 for holding the object to be treated W, and further this heat exchange chamber 2 The fan 25 which is rotated by a rotating device 24 which is provided on the are arranged in the heat exchange chamber 20.

そして、前記のように搬入部１から搬送ユニット４０内に搬入された加熱処理する前の被処理物Ｗ１を熱交換室２０内に搬入させるにあたり、この実施形態においては、図７に示すように、前記の搬送ユニット４０における連結部４１が熱交換室２０における一方の連結部２１ａと対向するように搬送ユニット４０を移動させ、図８に示すように、搬送ユニット４０における連結部４１を熱交換室２０における一方の連結部２１ａに密封状態で連結させた後、図９に示すように、搬送ユニット４０の開閉扉４２と熱交換室２０における一方の開閉扉２２ａとを開けて搬送ユニット４０と熱交換室２０とを連通させ、この状態で、搬送ユニット４０内における前記の被処理物Ｗ１を、前記の搬入・搬出用部材４３によって搬送ユニット４０内から搬出させて熱交換室２０内に搬入させ、熱交換室２０内に設けた一方の保持台２３ａの上に保持させるようにする。   Then, in order to carry in the object to be treated W1 which has been carried into the transport unit 40 from the carry-in unit 1 as described above and which is to be treated before being subjected to the heat treatment into the heat exchange chamber 20, in this embodiment, as shown in FIG. The transfer unit 40 is moved so that the connecting portion 41 in the transfer unit 40 faces the one connecting portion 21a in the heat exchange chamber 20, and the connecting portion 41 in the transfer unit 40 is heat-exchanged as shown in FIG. After being connected in a sealed state to one connecting portion 21a in the chamber 20, as shown in FIG. 9, the opening / closing door 42 of the transfer unit 40 and the opening / closing door 22a in the heat exchange chamber 20 are opened to In this state, the object to be treated W1 in the transfer unit 40 can be communicated with the heat exchange chamber 20 by the loading / unloading member 43 It is carried out by carrying the heat exchange chamber 20 so as to be retained on one of the holder 23a provided in the heat exchange chamber 20.

また、このようにして加熱処理する前の被処理物Ｗ１を熱交換室２０内に設けた一方の保持台２３ａの上に保持させた後は、図１０に示すように、搬送ユニット４０における開閉扉４２と熱交換室２０における前記の開閉扉２２ａとを閉じた後、熱交換室２０に連結された搬送ユニット４０を熱交換室２０から離間させるようにする。   Further, after holding the object to be treated W1 before the heat treatment in this manner on the one holding stand 23a provided in the heat exchange chamber 20, as shown in FIG. After closing the door 42 and the open / close door 22 a in the heat exchange chamber 20, the transport unit 40 connected to the heat exchange chamber 20 is separated from the heat exchange chamber 20.

次いで、図１１に示すように、前記のように加熱室１０に設けた加熱装置によって被処理物Ｗ２が加熱処理された加熱室１０の位置に前記の搬送ユニット４０を導き、前記のように搬送ユニット４０における連結部４１を加熱室１０における連結部１１に密封状態で連結させ、搬送ユニット４０の開閉扉４２と加熱室１０の開閉扉１２とを開けて搬送ユニット４０と加熱室１０とを連通させ、この状態で、加熱室１０において加熱処理された高温の被処理物Ｗ２を、搬送ユニット４０内における前記の搬入・搬出用部材４３によって加熱室１０内から搬送ユニット４０内に搬入させた後、搬送ユニット４０の開閉扉４２と加熱室１０の開閉扉１２とを閉じて、加熱処理された高温の被処理物Ｗ２が搬入された搬送ユニット４０を前記のように加熱室１０から離間させる。   Next, as shown in FIG. 11, the transfer unit 40 is guided to the position of the heating chamber 10 in which the object W2 is heated by the heating device provided in the heating chamber 10 as described above, and the transfer is performed as described above. The connecting portion 41 of the unit 40 is connected to the connecting portion 11 of the heating chamber 10 in a sealed state, and the opening and closing door 42 of the transfer unit 40 and the opening and closing door 12 of the heating chamber 10 are opened to communicate the transfer unit 40 and the heating chamber 10 In this state, after the high-temperature object to be treated W2 heat-treated in the heating chamber 10 is carried in from the heating chamber 10 into the conveyance unit 40 by the loading / unloading member 43 in the conveyance unit 40 As described above, the transport unit 40 into which the high-temperature object to be processed W2 having been subjected to the heating process is carried by closing the open / close door 42 of the transport unit 40 and the open / close door 12 of the heating chamber 10 It is moved away from the heat chamber 10.

そして、このように加熱処理された高温の被処理物Ｗ２が搬入された搬送ユニット４０を、前記の図１１に示すように、搬送ユニット４０における連結部４１が前記の熱交換室２０における他方の連結部２１ｂと対向するように移動させ、前記のように搬送ユニット４０における連結部４１を熱交換室２０における他方の連結部２１ｂに密封状態で連結させ、搬送ユニット４０の開閉扉４２と熱交換室２０における他方の開閉扉２２ｂとを開けて搬送ユニット４０と熱交換室２０とを連通させ、この状態で、搬送ユニット４０内における加熱処理された高温の被処理物Ｗ２を、前記の搬入・搬出用部材４３によって搬送ユニット４０内から搬出させて熱交換室２０内に搬入させ、熱交換室２０内に設けた他方の保持台２３ｂの上に保持させるようにする。   Then, as shown in FIG. 11, the transport unit 40 into which the high-temperature object to be processed W2 thus heat-treated is carried in, the connecting portion 41 in the transport unit 40 is the other in the heat exchange chamber 20. It moves so as to face the connecting part 21b, and connects the connecting part 41 of the transfer unit 40 in a sealed state to the other connecting part 21b of the heat exchange chamber 20 as described above, and exchanges heat with the open / close door 42 of the transfer unit 40. The other opening / closing door 22b in the chamber 20 is opened to communicate the transfer unit 40 with the heat exchange chamber 20, and in this state, the high-temperature object to be processed W2 in the transfer unit 40 is carried The transfer member 40 is carried out of the transfer unit 40 by the carry-out member 43, carried in the heat exchange chamber 20, and held on the other holding table 23b provided in the heat exchange chamber 20. Unisuru.

次いで、このように加熱処理された高温の被処理物Ｗ２を熱交換室２０内に設けた他方の保持台２３ｂの上に保持させた後は、搬送ユニット４０における開閉扉４２と熱交換室２０における前記の開閉扉２２ｂとを閉じた後、熱交換室２０に連結された搬送ユニット４０を熱交換室２０から離間させる。   Next, after the high-temperature object to be treated W2 thus heated is held on the other holding table 23b provided in the heat exchange chamber 20, the open / close door 42 and the heat exchange chamber 20 in the transfer unit 40 are After closing the open / close door 22 b in the above, the transfer unit 40 connected to the heat exchange chamber 20 is separated from the heat exchange chamber 20.

そして、このように熱交換室２０内に、加熱処理する前の被処理物Ｗ１と加熱処理された高温の被処理物Ｗ２とを収容させた状態で、図１２に示すように、熱交換室２０内に設けたファン２５を回転装置２４によって回転させて、熱交換室２０内に気流を生じさせ、熱交換室２０内に搬入された加熱処理された高温の被処理物Ｗ２と先に搬入されていた前記の被処理物Ｗ１との間で熱交換させて、加熱処理された被処理物Ｗ２を適当な温度まで冷却させる一方、先に搬入されていた加熱処理前の被処理物Ｗ１を適当な温度まで加熱させるようにする。   Then, as shown in FIG. 12, with the heat exchange chamber 20 containing the object to be treated W1 before heat treatment and the high temperature object to be treated W2 that has been subjected to heat treatment, as shown in FIG. A fan 25 provided in 20 is rotated by the rotation device 24 to generate an air flow in the heat exchange chamber 20, and the heat-treated high-temperature object W2 carried in the heat exchange chamber 20 is carried in first. Heat exchange is performed with the to-be-processed object W1 which has been carried out, and the heat-treated object to be processed W2 is cooled to an appropriate temperature, while the to-be-treated object W1 before the heat treatment carried in earlier is Allow to heat to a suitable temperature.

そして、このように加熱処理された高温の被処理物Ｗ２と先に搬入されていた前記の被処理物Ｗ１との間で熱交換を行った後は、図１３に示すように、加熱処理する前の被処理物Ｗ１を搬入させた熱交換室２０における一方の連結部２１ａと前記の搬送ユニット４０における連結部４１とが対向するように搬送ユニット４０を移動させ、前記のように搬送ユニット４０における連結部４１を熱交換室２０における一方の連結部２１ａに密封状態で連結させた後、搬送ユニット４０の開閉扉４２と熱交換室２０における一方の開閉扉２２ａとを開けて搬送ユニット４０と熱交換室２０とを連通させ、この熱交換室２０内において熱交換されて適当な温度まで加熱された加熱処理前の被処理物Ｗ１を熱交換室２０内から搬出させて搬送ユニット４０内に搬入させる。   Then, after heat exchange is performed between the high-temperature object to be treated W2 thus heat-treated and the object to be treated W1 previously carried in, the heat treatment is performed as shown in FIG. The transfer unit 40 is moved so that the one connecting portion 21a in the heat exchange chamber 20 into which the object to be processed W1 has been carried in and the connecting portion 41 in the transfer unit 40 face each other, as described above. The connection portion 41 in the case is connected in a sealed state to one of the connection portions 21a in the heat exchange chamber 20, and then the open / close door 42 of the transfer unit 40 and the open / close door 22a in the heat exchange chamber 20 are opened. The heat exchange chamber 20 is communicated with the heat exchange chamber 20, and the object to be treated W1 which has been subjected to heat exchange in the heat exchange chamber 20 and is heated to an appropriate temperature is carried out of the heat exchange chamber 20 to be transported. To be carried into the inside.

次いで、前記の図１３に示すように、この搬送ユニット４０を前記の加熱室１０の位置に導き、前記のように搬送ユニット４０における連結部４１を加熱室１０における連結部１１に密封状態で連結させ、搬送ユニット４０の開閉扉４２と加熱室１０の開閉扉１２とを開けて搬送ユニット４０と加熱室１０とを連通させ、この状態で、搬送ユニット４０内における適当な温度まで加熱された加熱処理前の被処理物Ｗ１を加熱室１０内に搬入させる。   Next, as shown in FIG. 13, the transfer unit 40 is guided to the position of the heating chamber 10, and the connecting portion 41 of the transfer unit 40 is connected in a sealed state to the connecting portion 11 of the heating chamber 10 as described above. Opening the open / close door 42 of the transfer unit 40 and the open / close door 12 of the heating chamber 10 to allow the transfer unit 40 and the heating chamber 10 to communicate with each other. The to-be-processed object W1 before a process is carried in in the heating chamber 10.

その後、前記のように搬送ユニット４０の開閉扉４２と加熱室１０の開閉扉１２とを閉じて、この搬送ユニット４０を前記のように加熱室１０から離間させると共に、前記のように適当な温度まで加熱された加熱処理前の被処理物Ｗ１を、加熱室１０内において所定温度に加熱させて加熱処理させる。   Thereafter, as described above, the open / close door 42 of the transfer unit 40 and the open / close door 12 of the heating chamber 10 are closed to separate the transfer unit 40 from the heating chamber 10 as described above. The to-be-processed object W1 before the heat treatment which has been heated up to the predetermined temperature is heated to a predetermined temperature in the heating chamber 10 to perform the heat treatment.

また、図１４に示すように、加熱処理された被処理物Ｗ２を搬入させた熱交換室２０における一方の連結部２１ｂと前記の搬送ユニット４０における連結部４１とが対向するように搬送ユニット４０を移動させ、前記のように搬送ユニット４０における連結部４１を熱交換室２０における一方の連結部２１ｂに密封状態で連結させた後、搬送ユニット４０の開閉扉４２と熱交換室２０における一方の開閉扉２２ｂとを開けて搬送ユニット４０と熱交換室２０とを連通させ、この熱交換室２０内において熱交換されて適当な温度まで冷却された加熱処理後の被処理物Ｗ２を熱交換室２０内から搬出させて搬送ユニット４０内に搬入させる。   Further, as shown in FIG. 14, the transfer unit 40 is arranged such that one connecting portion 21 b of the heat exchange chamber 20 into which the heat-treated object W2 is carried in is opposed to the connecting portion 41 of the transfer unit 40. Are moved in a sealed state to one connecting portion 21b of the heat exchange chamber 20 as described above, and then one of the opening / closing door 42 of the transfer unit 40 and the heat exchange chamber 20 is moved. The transfer unit 40 and the heat exchange chamber 20 are communicated with each other by opening the opening / closing door 22b, and the object to be treated W2 which has been subjected to heat exchange in the heat exchange chamber 20 and cooled to an appropriate temperature is transferred to the heat exchange chamber. 20 to carry out the inside of the transfer unit 40.

その後、前記の図１４に示すように、この搬送ユニット４０を前記の冷却室３０の位置に導き、適当な温度まで冷却された加熱処理後の被処理物Ｗ２を前記の搬送ユニット４０内から冷却室３０内に搬入させ、この冷却室３０内において、適当な温度まで冷却された加熱処理後の被処理物Ｗ２をさらに冷却させる。   Thereafter, as shown in FIG. 14, the transfer unit 40 is guided to the position of the cooling chamber 30, and the object to be treated W2 which has been cooled to an appropriate temperature is cooled from the inside of the transfer unit 40. It is carried into the chamber 30, and in the cooling chamber 30, the object to be treated W2 cooled to an appropriate temperature is further cooled.

ここで、前記の冷却室３０においては、図１５〜図１７に示すように、前記の搬送ユニット４０における前記の連結部４１と対応するようにして、搬送ユニット４０の連結部４１と密封状態で連結させる連結部３１を設け、この連結部３１を通して適当な温度まで冷却された加熱処理後の被処理物Ｗ２を搬入・搬出させる開口部分を開閉させる開閉扉３２を設けると共に、この冷却室３０内において前記の被処理物Ｗ２を保持する保持台３３を設けている。   Here, in the cooling chamber 30, as shown in FIGS. 15 to 17, in a sealed state with the connection portion 41 of the transfer unit 40, the connection portion 41 corresponds to the connection portion 41 in the transfer unit 40. A connecting portion 31 to be connected is provided, and an opening / closing door 32 for opening and closing an opening portion for carrying in / out the object to be processed W2 cooled to an appropriate temperature through the connecting portion 31 is provided. The holder 33 is provided to hold the object W2 to be processed.

そして、前記のように適当な温度まで冷却された加熱処理後の被処理物Ｗ２を搬送ユニット４０内から搬出させて冷却室３０内に搬入させるにあたっては、図１５に示すように、搬送ユニット４０を冷却室３０と対向する位置に移動させた後、図１６に示すように、前記の搬送ユニット４０における連結部４１を冷却室３０における連結部３１に密封状態で連結させ、搬送ユニット４０の開閉扉４２と冷却室３０の開閉扉３２とを開けて搬送ユニット４０と冷却室３０とを連通させ、この状態で、搬送ユニット４０内における前記の被処理物Ｗ２を、前記の搬入・搬出用部材４３によって搬送ユニット４０内から搬出させて冷却室３０内に搬入させ、冷却室３０内に設けた前記の保持台３３の上に前記の被処理物Ｗ２を保持させるようにする。   Then, when carrying out the object to be treated W2 after the heat treatment, which has been cooled to an appropriate temperature as described above, from the inside of the conveyance unit 40 and carried into the cooling chamber 30, as shown in FIG. Is moved to a position facing the cooling chamber 30, and then the connecting portion 41 of the transfer unit 40 is connected in a sealed state to the connecting portion 31 of the cooling chamber 30, as shown in FIG. The door 42 and the open / close door 32 of the cooling chamber 30 are opened to communicate the transfer unit 40 with the cooling chamber 30, and in this state, the object W2 in the transfer unit 40 is the loading / unloading member 43 is carried out of the transport unit 40 and carried into the cooling chamber 30 by 43, and the object W2 is held on the holding table 33 provided in the cooling chamber 30.

また、このようにして被処理物Ｗ２を冷却室３０内の保持台３３の上に保持させた後は、図１７に示すように、搬送ユニット４０の開閉扉４２と冷却室３０の開閉扉３２とを閉じ、その後、冷却室３０に密封状態で連結された搬送ユニット４０を冷却室３０から離間させ、この冷却室３０内において、適当な温度まで冷却された被処理物Ｗ２をさらに冷却させる。   Further, after holding the object to be treated W2 on the holding base 33 in the cooling chamber 30 in this manner, as shown in FIG. 17, the opening / closing door 42 of the transport unit 40 and the opening / closing door 32 of the cooling chamber 30 And the transport unit 40 sealingly connected to the cooling chamber 30 is separated from the cooling chamber 30, and the object W2 cooled to an appropriate temperature is further cooled in the cooling chamber 30.

次いで、このように加熱処理された後の被処理物Ｗ２を冷却室３０内において冷却させた後は、図示していないが、前記の搬送ユニット４０を前記の冷却室３０の位置に導き、冷却室３０内においてさらに冷却された前記の加熱処理後の被処理物Ｗ２を冷却室３０内から搬送ユニット４０内に搬入し、その後、この搬送ユニット４０を搬出部２の位置に導き、この搬送ユニット４０内から冷却室３０でさらに冷却された加熱処理後の被処理物Ｗ２を搬出部２に搬出させる。   Then, after the object W2 thus heat-treated is cooled in the cooling chamber 30, although not shown, the transfer unit 40 is introduced to the position of the cooling chamber 30, and the cooling is performed. The object W2 after the heat treatment, which is further cooled in the chamber 30, is carried from the inside of the cooling chamber 30 into the transport unit 40, and then the transport unit 40 is guided to the position of the unloading portion 2, and the transport unit The to-be-processed object W2 after the heat processing further cooled by the cooling chamber 30 from 40 inside is taken out to the discharge part 2. As shown in FIG.

ここで、この実施形態においては、加熱室１０や熱交換室２０を１つ設けるようにしただけであるが、加熱室１０において、被処理物Ｗ１を所定温度に加熱させて加熱処理させる時間が長い一方、熱交換室２０において、加熱処理された後の高温の被処理物Ｗ２と加熱処理される前の低温の被処理物Ｗ１との間で熱交換を行う時間が短い場合には、１つの熱交換室２０に対して複数の加熱室１０を設けるようにすることができる。このようにすると、熱交換室２０内において熱交換されて適当な温度まで加熱された加熱処理前の被処理物Ｗ１を、別の加熱室１０に搬入させて、前記の被処理物Ｗ１を所定温度に加熱させて加熱処理させるようにしたり、別の加熱室１０において所定温度に加熱処理された高温の被処理物Ｗ２を、加熱処理される前の低温の被処理物Ｗ１を収容させた熱交換室２０内に搬入させて熱交換させたりすることができる。   Here, in this embodiment, only one heating chamber 10 and one heat exchange chamber 20 are provided, but in the heating chamber 10, the time for which the object W1 is heated to a predetermined temperature and heat-treated is provided. On the other hand, in the heat exchange chamber 20, when the time for performing heat exchange between the high temperature object W2 after heat treatment and the low temperature object W1 before heat treatment is short, 1 A plurality of heating chambers 10 can be provided for one heat exchange chamber 20. Then, the object to be treated W1 which has been subjected to heat exchange in the heat exchange chamber 20 and has been heated to an appropriate temperature is carried into another heating chamber 10, and the object to be treated W1 is subjected to a predetermined process. A thermal object containing a low temperature object to be treated W1 before being subjected to a heat treatment, wherein a high temperature object to be treated W2 which has been heated to a temperature to be subjected to heat treatment or which has been heat treated to a predetermined temperature in another heating chamber 10 It can be carried into the exchange chamber 20 for heat exchange.

また、この実施形態においては、熱交換室２０内に、加熱処理される前の低温の被処理物Ｗ１と加熱処理された後の高温の被処理物Ｗ２とを水平方向に配置させるようにしたが、加熱処理される前の低温の被処理物Ｗ１と加熱処理された後の高温の被処理物Ｗ２とを、熱交換室２０内に収容させる状態はこのようなものに限定されない。   Further, in this embodiment, in the heat exchange chamber 20, the low-temperature object W1 before being heat-treated and the high-temperature object W2 after being heat-treated are disposed in the horizontal direction. However, the state in which the low temperature object W1 before the heat treatment and the high temperature object W2 after the heat treatment are accommodated in the heat exchange chamber 20 is not limited to this.

例えば、図１８〜図２１に示すように、加熱処理される前の低温の被処理物Ｗ１と加熱処理された後の高温の被処理物Ｗ２とを、熱交換室２０内に上下方向に配置させるようにすることもできる。   For example, as shown in FIG. 18 to FIG. 21, the low temperature object W1 before heat treatment and the high temperature object W2 after heat treatment are vertically disposed in the heat exchange chamber 20. It can also be made to

ここで、このように加熱処理される前の低温の被処理物Ｗ１と加熱処理された後の高温の被処理物Ｗ２とを熱交換室２０内に上下方向に配置させる場合、前記の実施形態とは異なり、搬送ユニット４０の連結部４１と連結される熱交換室２０における連結部２１と、熱交換室２０における開口部分を開閉させる開閉扉２２とを夫々一つ設けるようにすると共に、前記の熱交換室２０内に１つの保持台２３を設けるようにしている。また、この場合においては、前記の実施形態とは異なり、熱交換室２０内においてファン２５を回転させる回転装置２４を前記の連結部２１と反対側における壁部に設けると共に、この熱交換室２０の上に昇降装置２６を設け、この昇降装置２６により昇降部材２７を熱交換室２０内において昇降させて、前記の保持台２３の上に保持された被処理物Ｗを昇降させるようにしている。   Here, in the case where the low-temperature object W1 before being heat-treated and the high-temperature object W2 after being heat-treated are arranged in the heat exchange chamber 20 in the vertical direction, the embodiment described above In contrast to the above, one connecting portion 21 in the heat exchange chamber 20 connected to the connecting portion 41 of the transfer unit 40 and one open / close door 22 for opening and closing the opening portion in the heat exchange chamber 20 are provided. One holder 23 is provided in the heat exchange chamber 20 of FIG. Further, in this case, unlike the above embodiment, a rotation device 24 for rotating the fan 25 in the heat exchange chamber 20 is provided on the wall on the opposite side to the connection portion 21, and the heat exchange chamber 20. An elevating device 26 is provided on the upper and lower surfaces of the heat exchange chamber 20 so that the object W held on the holding table 23 is moved up and down. .

そして、このように熱交換室２０内において、加熱処理される前の低温の被処理物Ｗ１と加熱処理された後の高温の被処理物Ｗ２とを熱交換室２０内に上下方向に配置させるにあたっては、図１８に示すように、加熱処理される前の被処理物Ｗ１を収容させた搬送ユニット４０の連結部４１を前記の熱交換室２０の連結部２１に密封状態で連結させると共に、搬送ユニット４０の開閉扉４２と熱交換室２０の開閉扉２２とを開けて搬送ユニット４０と熱交換室２０とを連通させ、この状態で、搬送ユニット４０内における加熱処理される前の低温の被処理物Ｗ１を、前記の搬入・搬出用部材４３によって搬送ユニット４０内から搬出させて熱交換室２０における保持台２３の上に保持させる。   Thus, in the heat exchange chamber 20, the low temperature object W1 before being heat-treated and the high temperature object W2 after being heat-treated are arranged vertically in the heat exchange chamber 20. In this case, as shown in FIG. 18, the connecting portion 41 of the transfer unit 40 containing the object to be treated W1 before being heat-treated is connected to the connecting portion 21 of the heat exchange chamber 20 in a sealed state, The open / close door 42 of the transfer unit 40 and the open / close door 22 of the heat exchange chamber 20 are opened to allow the transfer unit 40 and the heat exchange chamber 20 to communicate with each other. The workpiece W1 is carried out of the inside of the transport unit 40 by the loading / unloading member 43 and held on the holding table 23 in the heat exchange chamber 20.

その後、図１９に示すように、搬送ユニット４０における開閉扉４２と熱交換室２０における開閉扉２２とを閉じ、搬送ユニット４０を熱交換室２０から離間させると共に、熱交換室２０の保持台２３の上に保持された加熱処理される前の被処理物Ｗ１を、熱交換室２０の上に設けた前記の昇降装置２６により昇降される昇降部材２７に保持させて上昇させ、加熱処理される前の被処理物Ｗ１を前記の保持台２３の上方に保持させた状態にする。   Thereafter, as shown in FIG. 19, the opening / closing door 42 of the transfer unit 40 and the opening / closing door 22 of the heat exchange chamber 20 are closed to separate the transfer unit 40 from the heat exchange chamber 20. Is held and raised by the elevating member 27 moved up and down by the elevating device 26 provided above the heat exchange chamber 20. The front object W1 is held above the holding table 23.

次いで、前記の実施形態に示したように、前記の搬送ユニット４０を被処理物Ｗ２が加熱処理された加熱室１０の位置に導き、前記のようにして加熱室１０において加熱処理された高温の被処理物Ｗ２を、搬送ユニット４０内における前記の搬入・搬出用部材４３によって加熱室１０内から搬送ユニット４０内に搬入させた後、加熱処理された高温の被処理物Ｗ２が搬入された搬送ユニット４０を前記の熱交換室２０の位置に導くようにする。   Next, as shown in the above embodiment, the transfer unit 40 is introduced to the position of the heating chamber 10 where the object W2 is heated, and the high temperature heat treated in the heating chamber 10 as described above. After the workpiece W2 is carried from the inside of the heating chamber 10 into the transport unit 40 by the loading / unloading member 43 in the transport unit 40, the high-temperature workpiece W2 subjected to the heating processing is carried The unit 40 is introduced to the position of the heat exchange chamber 20.

そして、図２０に示すように、前記のように加熱処理された被処理物Ｗ２を収容させた搬送ユニット４０の連結部４１を、前記のように加熱処理される前の被処理物Ｗ１を保持台２３の上方に保持させた熱交換室２０の連結部２１に密封状態で連結させると共に、搬送ユニット４０の開閉扉４２と熱交換室２０の開閉扉２２とを開けて搬送ユニット４０と熱交換室２０とを連通させ、この状態で、搬送ユニット４０内における加熱処理された高温の被処理物Ｗ２を、前記の搬入・搬出用部材４３によって搬送ユニット４０内から搬出させて熱交換室２０における保持台２３の上に保持させる。   And as shown in FIG. 20, the connection part 41 of the conveyance unit 40 which accommodated the to-be-processed object W2 heat-processed as mentioned above hold | maintains the to-be-processed object W1 before heat-processing as mentioned above The connecting portion 21 of the heat exchange chamber 20 held above the platform 23 is connected in a sealed state, and the opening / closing door 42 of the transfer unit 40 and the opening / closing door 22 of the heat exchange chamber 20 are opened to exchange heat with the transfer unit 40 In this state, the high-temperature object to be treated W2 in the transfer unit 40 is carried out from the inside of the transfer unit 40 by the loading / unloading member 43 in the heat exchange chamber 20 in communication with the chamber 20. It is held on the holding stand 23.

その後、図２１に示すように、前記の搬送ユニット４０の開閉扉４２と熱交換室２０における開閉扉２２とを閉じて、搬送ユニット４０を熱交換室２０から離間させ、この状態で、熱交換室２０内に設けられた前記のファン２５を回転装置２４によって回転させて熱交換室２０内に気流を生じさせ、熱交換室２０内における保持台２３の上に保持された加熱処理後の高温の被処理物Ｗ２と、昇降部材２７によって保持台２３の上方に保持された加熱処理前の被処理物Ｗ１との間で熱交換させて、加熱処理後における被処理物Ｗ２を適当な温度まで冷却させる一方、加熱処理前の被処理物Ｗ１を適当な温度まで加熱させる。   Thereafter, as shown in FIG. 21, the open / close door 42 of the transfer unit 40 and the open / close door 22 in the heat exchange chamber 20 are closed to separate the transfer unit 40 from the heat exchange chamber 20. The fan 25 provided in the chamber 20 is rotated by the rotating device 24 to generate an air flow in the heat exchange chamber 20, and the high temperature after the heat treatment held on the holding table 23 in the heat exchange chamber 20 Heat exchange between the object W2 to be processed and the object W1 before heat treatment held above the holding table 23 by the lift member 27 until the temperature of the object W2 after heat treatment is appropriate While cooling, the object to be treated W1 before the heat treatment is heated to an appropriate temperature.

そして、このように熱交換室２０内において、加熱処理後における被処理物Ｗ２を適当な温度まで冷却させる一方、加熱処理前の被処理物Ｗ１を適当な温度まで加熱させた後は、図示していないが、前記の搬送ユニット４０を熱交換室２０の位置に導き、前記のように適当な温度まで冷却された加熱処理後の被処理物Ｗ２を前記の熱交換室２０内から搬出させて搬送ユニット４０内に搬入させ、その後、この搬送ユニット４０を前記の冷却室３０の位置に導き、前記のように適当な温度まで冷却された加熱処理後の被処理物Ｗ２を、この搬送ユニット４０内から冷却室３０内に搬入させる。また、前記のように冷却室３０内において前記の加熱処理後の被処理物Ｗ２をさらに冷却させた後は、この被処理物Ｗ２を前記のように冷却室３０内から搬送ユニット４０内に搬入し、この搬送ユニット４０から前記の被処理物Ｗ２を搬出部２に搬出させる。   Then, while the object to be treated W2 after the heat treatment is cooled to an appropriate temperature in the heat exchange chamber 20 as described above, after the object to be treated W1 before the heat treatment is heated to an appropriate temperature, Although not, the above-mentioned transfer unit 40 is led to the position of the heat exchange chamber 20, and the object to be treated W2 after the heat treatment cooled to the appropriate temperature as described above is carried out from the inside of the heat exchange chamber 20 Then, the transfer unit 40 is introduced to the position of the cooling chamber 30, and the object to be treated W2 which has been cooled to an appropriate temperature as described above is transferred to the transfer unit 40. It is carried into the cooling chamber 30 from the inside. Further, after the object W2 after the heat treatment is further cooled in the cooling chamber 30 as described above, the object W2 is carried from the inside of the cooling chamber 30 into the transfer unit 40 as described above. Then, the object to be processed W2 is unloaded from the transport unit 40 to the unloading unit 2.

また、前記のように適当な温度まで冷却された加熱処理後の被処理物Ｗ２を熱交換室２０内から搬出させて搬送ユニット４０内に搬入させた後は、この熱交換室２０内における前記の昇降部材２７により保持台２３の上方に保持されて、適当な温度まで加熱された状態にある加熱処理前の被処理物Ｗ１を、前記の昇降装置２６により昇降部材２７を下降させ、この被処理物Ｗ１を前記の保持台２３の上に保持させると共に、前記の搬送ユニット４０を熱交換室２０の位置に導き、前記のように適当な温度まで加熱された加熱処理前の被処理物Ｗ１を、前記の熱交換室２０内から搬出させて搬送ユニット４０内に搬入させる。その後、この搬送ユニット４０を前記の加熱室１０の位置に導き、前記のように適当な温度まで加熱された加熱処理前の被処理物Ｗ１を、この搬送ユニット４０内から加熱室１０内に搬入させ、この加熱室１０内において、前記の被処理物Ｗ１を所定温度に加熱させて加熱処理させる。   Further, after the object to be treated W2 which has been cooled to an appropriate temperature as described above is carried out of the heat exchange chamber 20 and carried into the transfer unit 40, the above-mentioned heat exchange in the heat exchange chamber 20 is performed. The lifting member 27 is lowered by the lifting device 26 to move the object W1 to be treated before being heated and held to a suitable temperature by the lifting member 27 of the An object to be treated W1 before the heat treatment which is heated to an appropriate temperature as described above while holding the treatment object W1 on the holding table 23 and guiding the conveyance unit 40 to the position of the heat exchange chamber 20 Are transported out of the heat exchange chamber 20 and transported into the transport unit 40. Thereafter, the transfer unit 40 is guided to the position of the heating chamber 10, and the object to be treated W1 heated to an appropriate temperature as described above is carried from the inside of the transfer unit 40 into the heating chamber 10. In the heating chamber 10, the object W1 is heated to a predetermined temperature for heat treatment.

なお、この第１の実施形態においては便宜上、加熱室１０や熱交換室２０や冷却室３０をそれぞれ１つ設けたものについて説明したが、これらを複数にして搬送ユニット４０の走行方向に順々に配置してもよい。そのようにすれば、被処理物Ｗを大量に処理できるようになる。   In the first embodiment, for convenience, one heating chamber 10, one heat exchange chamber 20 and one cooling chamber 30 are described, but a plurality of these may be provided to sequentially move the conveyance unit 40 in the traveling direction. It may be located at By doing so, the object W can be processed in large quantities.

（第２の実施形態）
第２の実施形態に係る熱処理設備においては、図２２等に示すように、被処理物Ｗを搬入させる搬入部１と、被処理物Ｗを非酸化雰囲気中で所定の温度に加熱させて加熱処理する加熱室１０と、加熱処理されて熱交換された後の被処理物Ｗを冷却させる冷却室３０と、冷却室３０において冷却された被処理物Ｗを搬出させる搬出部２とを、走行レールＬに沿って走行される搬送ユニット４０と対向するようにして搬送ユニット４０の走行方向に順々に配置させるようにし、前記の第１の実施形態における熱交換室２０をなくし、前記の搬送ユニット４０内に加熱処理されていない低温の被処理物Ｗ１と加熱処理されて高温になった被処理物Ｗ２とを一緒に収容させ、搬送ユニット４０内において、高温になった加熱処理後の被処理物Ｗ２と加熱処理されていない低温の被処理物Ｗ１との間で熱交換させるようにしている。なお、この実施形態の説明においては、前記の第１の実施形態のものと同様の構成や動作等に関しては簡略して説明する。 Second Embodiment
In the heat treatment equipment according to the second embodiment, as shown in FIG. 22 and the like, the carrying-in unit 1 for carrying the object W to be processed and the object W to be heated are heated to a predetermined temperature in a non-oxidizing atmosphere. The heating chamber 10 to be processed, the cooling chamber 30 for cooling the object to be treated W after the heat treatment and heat exchange, and the unloading part 2 for unloading the object to be treated W cooled in the cooling chamber 30 The heat exchange chamber 20 according to the first embodiment is eliminated by arranging the heat exchange chamber 20 in the traveling direction of the conveyance unit 40 so as to face the conveyance unit 40 traveling along the rail L, and the above-described conveyance A low temperature object to be treated W1 which has not been subjected to heat treatment and an object to be treated W2 which has been subjected to heat treatment to become high temperature are accommodated together in the unit 40, and the object to be subjected to heat treatment which has become high temperature in the transport unit 40. Add the processed product W2 And so as to heat exchange between the low temperature of the object W1 that has not been processed. In the description of this embodiment, the same configuration and operation as those of the first embodiment will be briefly described.

ここで、この実施形態における搬送ユニット４０においては、前記の実施形態と同様に、加熱室１０や冷却室３０と対向する部分に、この搬送ユニット４０を加熱室１０の連結部１１や冷却室３０の連結部３１に密封状態で連結させる連結部４１を設けると共に、この連結部４１を通して被処理物Ｗ（Ｗ１，Ｗ２）を搬入・搬出させる開口部分を開閉させる開閉扉４２を設け、また搬送ユニット４０内には、図４等に示すように、被処理物Ｗ（Ｗ１，Ｗ２）を搬送ユニット４０内に搬入・搬出させる伸縮可能な搬入・搬出用部材４３を設けている。   Here, in the transport unit 40 in this embodiment, the transport unit 40 is connected to the connecting portion 11 of the heating chamber 10 or the cooling chamber 30 in a portion facing the heating chamber 10 or the cooling chamber 30 as in the above embodiment. And the opening / closing door 42 for opening / closing the opening portion for carrying in / out the processing object W (W1, W2) through the connection portion 41, and the conveyance unit In 40, as shown in FIG. 4 etc., the expandable loading / unloading member 43 for loading / unloading the workpiece W (W1, W2) into / from the transport unit 40 is provided.

さらに、この実施形態における搬送ユニット４０においては、加熱処理される前の低温の被処理物Ｗ１と加熱処理された後の高温の被処理物Ｗ２とを、搬送ユニット４０内に上下方向に配置させて熱交換させるようにしており、前記の搬送ユニット４０において、加熱室１０の連結部１１や冷却室３０の連結部３１に連結させる連結部４１と反対側における壁部に、回転装置４４によって搬送ユニット４０内で回転されるファン４５を設けると共に、この搬送ユニット４０の上に昇降装置４６を設け、この昇降装置４６により昇降部材４７を搬送ユニット４０内において昇降させて、前記の搬入・搬出用部材４３に保持された被処理物Ｗ（Ｗ１，Ｗ２）を昇降させるようにしている。   Furthermore, in the transport unit 40 in this embodiment, the low-temperature object W1 before being heat-treated and the high-temperature object W2 after being heat-treated are arranged in the transport unit 40 in the vertical direction. Heat is transferred by the rotating device 44 to the wall on the opposite side of the connecting portion 41 to be connected to the connecting portion 11 of the heating chamber 10 and the connecting portion 31 of the cooling chamber 30 in the transfer unit 40. A fan 45 rotated in the unit 40 is provided, and an elevating device 46 is provided on the transfer unit 40, and the elevating member 47 is moved up and down in the transfer unit 40 by the elevating device 46 to carry out the loading and unloading. The object to be treated W (W1, W2) held by the member 43 is moved up and down.

そして、この実施形態においては、図２２に示すように、前記の搬送ユニット４０を前記の搬入部１の位置に導き、図示していないが、搬送ユニット４０における前記の開閉扉４２を開閉させて、搬送ユニット４０内に設けた前記の搬入・搬出用部材４３により、前記の加熱処理する前の被処理物Ｗ１を搬入部１から搬送ユニット４０内に搬入させるようにする。   And in this embodiment, as shown in FIG. 22, the above-mentioned conveyance unit 40 is led to the position of the above-mentioned carrying-in part 1, and although not illustrated, the above-mentioned opening and closing door 42 in conveyance unit 40 is opened and closed. The loading / unloading member 43 provided in the transport unit 40 causes the workpiece W1 to be loaded from the loading unit 1 into the transport unit 40 before the heating process.

次いで、このように被処理物Ｗ１が搬入された搬送ユニット４０を、図２３に示すように、走行レールＬに沿って加熱室１０と対向する位置に移動させて、この搬送ユニット４０と加熱室１０とを密封状態で連結させ、搬送ユニット４０内に搬入された加熱処理する前の被処理物Ｗ１を、前記の搬入・搬出用部材４３により搬送ユニット４０内から搬出させて加熱室１０内に搬入させ、加熱室１０内における保持台１３の上に保持させる一方、前記の搬入部１に適当なタイミングで次の被処理物Ｗ１を導くようにしている。   Next, as shown in FIG. 23, the transport unit 40 carrying the object W1 is moved to a position facing the heating chamber 10 along the traveling rail L, and the transport unit 40 and the heating chamber are moved. 10 in a sealed state, the object to be treated W1 carried into the transfer unit 40 before being subjected to heat treatment is carried out of the inside of the transfer unit 40 by the carry-in / out member 43 and introduced into the heating chamber 10 While being carried in and held on the holding table 13 in the heating chamber 10, the next object to be treated W1 is guided to the carrying in portion 1 at an appropriate timing.

そして、前記のように加熱処理する前の被処理物Ｗ１を加熱室１０内に搬入させた後、図２４に示すように、加熱室１０の開閉扉１２と搬送ユニット４０の開閉扉４２とを閉じ、搬送ユニット４０を加熱室１０から離間させ、この状態で、加熱室１０内に搬入された加熱処理する前の被処理物Ｗ１を加熱処理させるようにする。   Then, after the object to be treated W1 before being subjected to the heat treatment is carried into the heating chamber 10 as described above, as shown in FIG. 24, the opening / closing door 12 of the heating chamber 10 and the opening / closing door 42 of the transfer unit 40 are After closing, the transport unit 40 is separated from the heating chamber 10, and in this state, the object W1 which has been carried into the heating chamber 10 prior to the heating process is subjected to the heating process.

次に、前記の搬送ユニット４０を前記の搬入部１の位置に導き、この搬入部１に導かれた次の被処理物Ｗ１を、前記のように搬入・搬出用部材４３によって搬入部１から搬送ユニット４０内に搬入させた後、図２５に示すように、この搬送ユニット４０を前記のように加熱処理させた被処理物Ｗ２が収容された加熱室１０の位置に導くと共に、搬送ユニット４０内における搬入・搬出用部材４３に保持された前記の被処理物Ｗ１を、搬送ユニット４０の上に設けた前記の昇降装置４６により昇降される昇降部材４７に保持させて上昇させ、加熱処理される前の被処理物Ｗ１を前記の搬入・搬出用部材４３の上方に保持させた状態にする。   Next, the transport unit 40 is guided to the position of the loading unit 1, and the next object W1 guided to the loading unit 1 is transferred from the loading unit 1 by the loading / unloading member 43 as described above. After being carried into the conveyance unit 40, as shown in FIG. 25, the conveyance unit 40 is guided to the position of the heating chamber 10 in which the object to be treated W2 subjected to the heat treatment is stored. The object to be treated W1 held by the loading / unloading member 43 in the inside is held by the raising and lowering member 47 raised and lowered by the raising and lowering device 46 provided on the conveyance unit 40 and raised and heated. The object to be treated W1 before holding is held above the loading / unloading member 43.

そして、図２６に示すように、搬送ユニット４０と加熱室１０とを密封状態で連結させ、加熱室１０における開閉扉１２と搬送ユニット４０における開閉扉４２とを開けて、加熱室１０と搬送ユニット４０とを連通させ、加熱室１０において加熱処理された高温の被処理物Ｗ２を、搬送ユニット４０内における前記の搬入・搬出用部材４３により加熱室１０内における保持台１３の上から搬送ユニット４０内に搬入させて、前記の昇降部材４７によって保持された加熱処理される前の被処理物Ｗ１の下において、加熱処理された高温の被処理物Ｗ２を前記の搬入・搬出用部材４３に保持させる。   Then, as shown in FIG. 26, the transfer unit 40 and the heating chamber 10 are connected in a sealed state, and the open / close door 12 in the heating chamber 10 and the open / close door 42 in the transfer unit 40 are opened. The high temperature object to be processed W2 heated in the heating chamber 10 is communicated with the transfer unit 40 from above the holding table 13 in the heating chamber 10 by the loading / unloading member 43 in the transfer unit 40. The high-temperature object to be treated W2 which has been subjected to the heat treatment is held by the member 43 for carrying in / out under the object to be treated W1 held by the elevating member 47 before being subjected to the heat treatment. Let

その後、図２７に示すように、前記の搬送ユニット４０における開閉扉４２と加熱室１０における開閉扉１２とを閉じて、搬送ユニット４０を加熱室１０から離間させ、この状態で、搬送ユニット４０内に設けられた前記のファン４５を回転装置４４により回転させて、搬送ユニット４０内に気流を生じさせ、搬送ユニット４０内における搬入・搬出用部材４３に保持された加熱処理された高温の被処理物Ｗ２と、昇降部材４７によって搬入・搬出用部材４３の上方に保持された加熱処理される前の被処理物Ｗ１との間で熱交換させて、加熱処理後における被処理物Ｗ２を適当な温度まで冷却させる一方、加熱処理前の被処理物Ｗ１を適当な温度まで加熱させる。   Thereafter, as shown in FIG. 27, the open / close door 42 of the transfer unit 40 and the open / close door 12 of the heating chamber 10 are closed to separate the transfer unit 40 from the heating chamber 10. The fan 45 provided in the above is rotated by the rotating device 44 to generate an air flow in the transfer unit 40, and the heat-treated, high-temperature processed object held by the loading / unloading member 43 in the transfer unit 40 Heat exchange is performed between the object W2 and the object to be treated W1 held by the elevating member 47 above the loading / unloading member 43 before being subjected to the heat treatment, and the object to be treated W2 after the heat treatment is appropriately While being cooled to the temperature, the object to be treated W1 before the heat treatment is heated to an appropriate temperature.

そして、このように搬送ユニット４０内において、加熱処理後における被処理物Ｗ２を適当な温度まで冷却させる一方、加熱処理前の被処理物Ｗ１を適当な温度まで加熱させた後は、図２８に示すように、前記の搬送ユニット４０を冷却室３０の位置に導き、前記の搬送ユニット４０における連結部４１を冷却室３０における連結部３１に密封状態で連結させ、搬送ユニット４０の開閉扉４２と冷却室３０の開閉扉３２とを開けて、搬送ユニット４０と冷却室３０とを連通させた状態で、前記の搬入・搬出用部材４３に保持されて適当な温度まで冷却された加熱処理後の被処理物Ｗ２を、搬入・搬出用部材４３によって搬送ユニット４０内から搬出させて冷却室３０内に搬入させ、冷却室３０内における保持台３３の上に保持させるようにする。   Then, after the object to be treated W2 after the heat treatment is cooled to an appropriate temperature in the transport unit 40 as described above, and after the object to be treated W1 before the heat treatment is heated to an appropriate temperature, FIG. As shown, the transfer unit 40 is guided to the position of the cooling chamber 30, and the connection portion 41 of the transfer unit 40 is connected in a sealed state to the connection portion 31 of the cooling chamber 30, and the opening / closing door 42 of the transfer unit 40 In the state where the opening / closing door 32 of the cooling chamber 30 is opened and the transfer unit 40 and the cooling chamber 30 are in communication, the heat treatment is performed so that the temperature is reduced to an appropriate temperature. The workpiece W2 is carried out of the transfer unit 40 by the carry-in / out member 43, carried in the cooling chamber 30, and held on the holding table 33 in the cooling chamber 30. .

その後、図２９に示すように、搬送ユニット４０の開閉扉４２と冷却室３０の開閉扉３２とを閉じて、冷却室３０に連結された前記の搬送ユニット４０を冷却室３０から離間させ、この冷却室３０内において、適当な温度まで冷却された加熱処理後の被処理物Ｗ２をさらに冷却させる。また、このように加熱処理後の被処理物Ｗ２をさらに冷却させた後は、図示していないが、前記の実施形態と同様に、冷却された加熱処理後の被処理物Ｗ２を冷却室３０内から搬送ユニット４０内に搬入し、この搬送ユニット４０から前記の被処理物Ｗ２を搬出部２に搬出させる。   Thereafter, as shown in FIG. 29, the open / close door 42 of the transfer unit 40 and the open / close door 32 of the cooling chamber 30 are closed to separate the transfer unit 40 connected to the cooling chamber 30 from the cooling chamber 30. In the cooling chamber 30, the object to be treated W2 which has been cooled to a suitable temperature is further cooled. Further, after further cooling the object to be treated W2 after the heat treatment as described above, although not shown, the object to be treated W2 after the heat treatment which has been cooled is cooled in the cooling chamber 30 as in the above embodiment. From the inside, the inside of the transport unit 40 is carried in, and the object to be processed W2 is carried out of the transport unit 40 to the unloading unit 2.

また、前記のように適当な温度まで冷却された加熱処理後の被処理物Ｗ２を、搬入・搬出用部材４３により搬送ユニット４０内から冷却室３０内に搬入させた後は、図２９に示すように、搬送ユニット４０内において、前記のように昇降部材４７により搬入・搬出用部材４３の上方に保持されて、適当な温度まで加熱された状態にある加熱処理前の被処理物Ｗ１を、前記の昇降装置４６により昇降部材４７を下降させ、この被処理物Ｗ１を前記の搬入・搬出用部材４３の上に保持させる。   Further, after the object to be treated W2 which has been cooled to an appropriate temperature as described above is carried in from the inside of the transport unit 40 into the cooling chamber 30 by the carrying in / out member 43, it is shown in FIG. As described above, in the transport unit 40, the object W1 to be treated before being subjected to the heating process is held above the loading / unloading member 43 by the elevating member 47 and is heated to an appropriate temperature. The elevating member 47 is lowered by the elevating device 46 to hold the object to be processed W1 on the loading / unloading member 43.

次いで、この搬送ユニット４０を前記の加熱室１０の位置に導き、図３０に示すように、この搬送ユニット４０と加熱室１０とを密封状態で連結させ、搬送ユニット４０の開閉扉４２と加熱室１０の開閉扉１２とを開けて搬送ユニット４０と加熱室１０とを連通させた状態で、搬送ユニット４０内において適当な温度まで加熱された加熱処理前の被処理物Ｗ１を、前記の搬入・搬出用部材４３によりこの搬送ユニット４０内から加熱室１０内に搬入させて、加熱室１０内における保持台１３の上に保持させる。   Next, the transfer unit 40 is guided to the position of the heating chamber 10, and as shown in FIG. 30, the transfer unit 40 and the heating chamber 10 are connected in a sealed state, and the opening / closing door 42 of the transfer unit 40 and the heating chamber 10 with the opening / closing door 12 open to communicate the transfer unit 40 with the heating chamber 10, the object W1 to be treated before being heated which has been heated to an appropriate temperature in the transfer unit 40 is carried in as described above. It is carried into the heating chamber 10 from the inside of the transfer unit 40 by the carrying-out member 43 and held on the holding stand 13 in the heating chamber 10.

その後は、適当な温度まで加熱された加熱処理前の被処理物Ｗ１を、この加熱室１０内において所定温度に加熱させて加熱処理させ、前記のような操作を繰り返して行うようにする。   Thereafter, the object to be treated W1 heated to an appropriate temperature is heated to a predetermined temperature in the heating chamber 10 to perform heat treatment, and the above-described operation is repeated.

なお、この第２の実施形態においては便宜上、加熱室１０と冷却室３０をそれぞれ１つ設けたものについて説明したが、これらを複数にして搬送ユニット４０の走行方向に順々に配置してもよい。そのようにすれば、被処理物Ｗを大量に処理できるようになる。   In the second embodiment, although one heating chamber 10 and one cooling chamber 30 are provided for the sake of convenience, a plurality of these may be provided and arranged in order in the traveling direction of the transport unit 40. Good. By doing so, the object W can be processed in large quantities.

１ ：搬入部
２ ：搬出部
１０ ：加熱室
１１ ：連結部
１２ ：開閉扉
１３ ：保持台
２０ ：熱交換室
２１ ：連結部
２１ａ ：第１の連結部
２１ｂ ：第２の連結部
２２ ：開閉扉
２２ａ ：第１の開閉扉
２２ｂ ：第２の開閉扉
２３ ：保持台
２３ａ ：第１の保持台
２３ｂ ：第２の保持台
２４ ：回転装置
２５ ：ファン
２６ ：昇降装置
２７ ：昇降部材
３０ ：冷却室
３１ ：連結部
３２ ：開閉扉
３３ ：保持台
４０ ：搬送ユニット
４１ ：連結部
４２ ：開閉扉
４３ ：搬入・搬出用部材
４４ ：回転装置
４５ ：ファン
４６ ：昇降装置
４７ ：昇降部材
Ｌ ：走行レール
Ｗ ：被処理物
Ｗ１ ：加熱処理前の被処理物
Ｗ２ ：加熱処理後の被処理物
1: Loading in 2: Loading out 10: Heating chamber 11: Connecting part 12: Opening and closing door 13: Holding stand 20: Heat exchange room 21: Connecting part 21a: First connecting part 21b: Second connecting part 22: Opening and closing Door 22a: first open / close door 22b: second open / close door 23: holding stand 23a: first holding stand 23b: second holding stand 24: rotating device 25: fan 26: lifting device 27: lifting member 30: Cooling chamber 31: Coupling portion 32: Opening / closing door 33: Holding stand 40: Transport unit 41: Coupling portion 42: Opening / closing door 43: Loading / unloading member 44: Rotating device 45: Fan 46: Lifting device 47: Lifting member L: Lifting member L: Traveling rail W: object to be treated W1: object to be treated before heat treatment W2: object to be treated after heat treatment

Claims (6)

被処理物を熱処理する処理室として、少なくとも、被処理物を加熱処理させる加熱室と、加熱室内で加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを一緒に収容させて高温の被処理物と低温の被処理物との間で熱交換を行う熱交換室と、加熱処理されて熱交換された後の被処理物を冷却させる冷却室とを設けると共に、前記の被処理物を各処理室に対して搬入・搬出させる搬送ユニットを設け、前記の搬送ユニットと、少なくとも前記の加熱室及び熱交換室との間を密封させた状態で、被処理物を搬入・搬出させることを特徴する熱処理設備。   At least a heating chamber for heat-treating the object, a high-temperature object heat-treated in the heating chamber, and a low-temperature object not heat-treated as a treatment chamber for heat-treating the object. A heat exchange chamber for storing and exchanging heat between a high temperature object and a low temperature object, and a cooling chamber for cooling the object after heat treatment and heat exchange are provided. A transport unit is provided for loading and unloading the above-mentioned object to and from each processing chamber, and the object is processed in a state where the space between the above-mentioned transfer unit and at least the above-mentioned heating chamber and heat exchange chamber is sealed. A heat treatment facility characterized by carrying in and out. 請求項１に記載した熱処理設備において、前記の熱交換室内に、加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを、水平方向又は垂直方向に並べて収容させることを特徴する熱処理設備。   The heat treatment equipment according to claim 1, wherein the heat-treated high-temperature object and the low-temperature object not subjected to heat treatment are accommodated side by side in the horizontal direction or in the vertical direction in the heat exchange chamber. Heat treatment equipment featuring. 請求項２に記載の熱処理設備において、前記の熱交換室内に、加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを垂直方向に並べて収容させるにあたり、加熱処理された高温の被処理物を、加熱処理されていない低温の被処理物の下側に収容させることを特徴する熱処理設備。   The heat treatment facility according to claim 2, wherein the heat-treated material and the low-temperature material which are not heat-treated are arranged in the vertical direction in the heat exchange chamber. A heat treatment facility characterized in that a high temperature object to be treated is accommodated below a low temperature object which is not heat treated. 被処理物を熱処理する処理室として、少なくとも、被処理物を加熱処理させる加熱室と、加熱処理された被処理物を冷却させる冷却室とを設けると共に、前記の被処理物を各処理室に対して搬入・搬出させる搬送ユニットを設け、前記の搬送ユニット内に、加熱室において加熱処理された高温の被処理物と、加熱処理されていない低温の被処理物とを一緒に収容させて、高温の被処理物と低温の被処理物との間で熱交換を行い、前記の搬送ユニットと、少なくとも前記の加熱室との間を密封させた状態で、被処理物を搬入・搬出させることを特徴する熱処理設備。   As a processing chamber for heat-treating the object, at least a heating chamber for heat-treating the object and a cooling chamber for cooling the heat-treated object are provided. A transport unit for carrying in and out is provided, and the high temperature object heated in the heating chamber and the low temperature object not heated are accommodated together in the above transfer unit, Heat exchange is performed between the high temperature object and the low temperature object, and the object is carried in and out while the transfer unit and at least the heating chamber are sealed. Heat treatment equipment featuring. 請求項４に記載の熱処理設備において、前記の搬送ユニット内に、加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを水平方向又は垂直方向に並べて収容させることを特徴する熱処理設備。   The heat treatment equipment according to claim 4, wherein the heat-treated high-temperature object and the non-heat-treated low-temperature object are arranged horizontally or vertically in the transport unit. Characteristic heat treatment equipment. 請求項５に記載した熱処理設備において、前記の搬送ユニット内に、加熱処理された高温の被処理物と加熱処理されていない低温の被処理物とを垂直方向に並べて収容させるにあたり、加熱処理された高温の被処理物を、加熱処理されていない低温の被処理物の下側に収容させることを特徴する熱処理設備。
The heat treatment facility according to claim 5, wherein the heat treatment is performed in order to vertically arrange the heat-treated high-temperature object and the non-heat-treated low-temperature object in the transport unit. A heat treatment facility characterized in that a high temperature object to be treated is accommodated below a low temperature object which is not heat treated.
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