JP2019015719A - アクチュエータセンサモジュール - Google Patents
アクチュエータセンサモジュール Download PDFInfo
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- JP2019015719A JP2019015719A JP2018108339A JP2018108339A JP2019015719A JP 2019015719 A JP2019015719 A JP 2019015719A JP 2018108339 A JP2018108339 A JP 2018108339A JP 2018108339 A JP2018108339 A JP 2018108339A JP 2019015719 A JP2019015719 A JP 2019015719A
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- 239000012530 fluid Substances 0.000 claims abstract description 79
- 239000000725 suspension Substances 0.000 claims description 35
- 239000007789 gas Substances 0.000 claims description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 6
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 3
- 238000005452 bending Methods 0.000 claims description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 3
- 230000032258 transport Effects 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims 1
- -1 temperature sensor Substances 0.000 claims 1
- 230000004044 response Effects 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 description 12
- 238000009413 insulation Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000035484 reaction time Effects 0.000 description 3
- 239000012855 volatile organic compound Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000012620 biological material Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 230000036541 health Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000001743 silencing effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
- G01N1/2273—Atmospheric sampling
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0039—O3
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/004—CO or CO2
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
- G01N33/0047—Organic compounds
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0073—Control unit therefor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
- F04B19/006—Micropumps
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Pathology (AREA)
- Immunology (AREA)
- Physics & Mathematics (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Food Science & Technology (AREA)
- Medicinal Chemistry (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Biomedical Technology (AREA)
- Molecular Biology (AREA)
- Reciprocating Pumps (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
Description
11 キャリア
12 センサ
13 アクチュエータ装置、流体アクチュエータ
130 第一チャンバ
131 吸気板
131a 吸気口
131b 合流ガイド
131c 中心凹部
132 共振片
132a 可動部
132b 固定部
132c 中空孔洞
133 圧電アクチュエータ
1331 懸吊板
1331a 凸部
1331b 第二表面
1331c 第一表面
1332 外枠
1332a 第二表面
1332b 第一表面
1332c 導電ピン
1333 フレーム
1333a 第二表面
1333b 第一表面
1334 圧電片
1335 間隙
134a、134b 絶縁盤
135 導電片
135a 導電ピン
h 間隙
14 通路
Claims (10)
- 少なくとも一つのセンサと、
前記センサの一側に設置し、並びに少なくとも一つの通路を設け、駆動を受けて前記通路から流体を輸送し、前記センサを通すことで、前記センサが前記流体の測定をするアクチュエータと、を包含することを特徴とするアクチュエータセンサモジュール。 - 前記アクチュエータは、更に流体アクチュエータを包含することを特徴とする請求項1に記載のアクチュエータセンサモジュール。
- 前記アクチュエータは、更にキャリアを包含することを特徴とする請求項2に記載のアクチュエータセンサモジュール。
- 前記キャリアは、回路基板であり、前記センサと、前記流体アクチュエータと、を並んで取り付けることを特徴とする請求項3に記載のアクチュエータセンサモジュール。
- 前記キャリアは、特定用途向け集積回路、システム・オン・チップと、することができ、前記センサと、前記流体アクチュエータとは、その上に封をするように組み付けられていることを特徴とする請求項3に記載のアクチュエータセンサモジュール。
- 前記センサは、気体センサ、液体センサ、臭気センサ、光センサ、マイクロセンサ、揮発性有機物センサのうちの一つ、或いは、いずれの組み合わせであることを特徴とする請求項1に記載のアクチュエータセンサモジュール。
- 前記センサは、酸素センサ、一酸化炭素センサ、二酸化炭素、温度センサ、液体センサ、湿度センサのうちの一つ、或いは、いずれかの組み合わせであることを特徴とする請求項1に記載のアクチュエータセンサモジュール。
- 前記流体アクチュエータは、
少なくとも一つの吸気孔と、少なくとも一つの合流ガイドと、合流チャンバを構成する中心凹部を有し、そのうち、前記吸気孔は流体を導入し、前記合流ガイドは前記吸気孔に対応し、且つ前記吸気孔の流体を前記中心凹部に構成する合流チャンバに引導する吸気板と、
中空孔洞が対応する前記合流チャンバと、且つ、前記中空孔洞の周辺は可動部を有する共振片と、
前記共振片に相対して設置される圧電アクチュエータと、を包含しており、
そのうち、前記共振片と、前記圧電アクチュエータと、の間に第一チャンバを形成する間隙を有し、前記圧電アクチュエータが駆動した際、流体は前記吸気板にある少なくとも一つの前記吸気孔より導入され、少なくとも一つの前記合流ガイドを経て、前記中心凹部に集合し、前記共振片にある前記中空孔洞を通して、前記第一チャンバ内へ進入し、前記圧電アクチュエータと、前記共振片にある可動部により、共振を発生し、流体を輸送することを特徴とする請求項2に記載のアクチュエータセンサモジュール。 - 前記圧電アクチュエータは、
第一表面と、第二表面と、を有し、且つ湾曲振動ができる懸吊板と、
前記懸吊板の外側を囲繞する外枠と、
前記懸吊板と、前記外枠と、の間を連接し、弾性支持を提供する少なくとも一つのフレームと、
長辺と有し、前記長辺が前記懸吊板の長辺より、小さい或いは同等であり、且つ、前記懸吊板の前記第一表面上に張り付き、電圧を加えることで前記懸吊板を駆動して湾曲振動する圧電片と、を包含することを特徴とする請求項8に記載のアクチュエータセンサモジュール。 - 前記懸吊板は、正方形であって、並びに凸部を有し、前記流体アクチュエータは、更に、導電片と、第一絶縁片と、第二絶縁片と、を包含し、そのうち、前記吸気板、前記共振片、前記圧電アクチュエータ、前記第一絶縁片、前記導電片、前記第二絶縁片、の順で積み重ねて設置することを特徴とする請求項9に記載のアクチュエータセンサモジュール。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW106123108 | 2017-07-10 | ||
TW106123108A TWI647668B (zh) | 2017-07-10 | 2017-07-10 | 致動傳感模組 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019015719A true JP2019015719A (ja) | 2019-01-31 |
JP7091152B2 JP7091152B2 (ja) | 2022-06-27 |
Family
ID=62567246
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018108339A Active JP7091152B2 (ja) | 2017-07-10 | 2018-06-06 | アクチュエータセンサモジュール |
Country Status (5)
Country | Link |
---|---|
US (1) | US20190011336A1 (ja) |
EP (1) | EP3431954A1 (ja) |
JP (1) | JP7091152B2 (ja) |
BR (1) | BR102018012768A2 (ja) |
TW (1) | TWI647668B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2019029009A (ja) * | 2017-07-27 | 2019-02-21 | 研能科技股▲ふん▼有限公司 | アクチュエータセンサモジュールの駆動及びデータ伝送システム |
CN113029235A (zh) * | 2021-02-25 | 2021-06-25 | 哈尔滨工业大学 | 小行程纳米级运动台及热相关滞回数据测量方法 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI738175B (zh) * | 2020-01-08 | 2021-09-01 | 研能科技股份有限公司 | 具有氣體檢測功能之家居裝置 |
US11828210B2 (en) | 2020-08-20 | 2023-11-28 | Denso International America, Inc. | Diagnostic systems and methods of vehicles using olfaction |
US11813926B2 (en) | 2020-08-20 | 2023-11-14 | Denso International America, Inc. | Binding agent and olfaction sensor |
US11760169B2 (en) | 2020-08-20 | 2023-09-19 | Denso International America, Inc. | Particulate control systems and methods for olfaction sensors |
US11881093B2 (en) | 2020-08-20 | 2024-01-23 | Denso International America, Inc. | Systems and methods for identifying smoking in vehicles |
US12017506B2 (en) | 2020-08-20 | 2024-06-25 | Denso International America, Inc. | Passenger cabin air control systems and methods |
US11636870B2 (en) | 2020-08-20 | 2023-04-25 | Denso International America, Inc. | Smoking cessation systems and methods |
US11932080B2 (en) | 2020-08-20 | 2024-03-19 | Denso International America, Inc. | Diagnostic and recirculation control systems and methods |
US11760170B2 (en) | 2020-08-20 | 2023-09-19 | Denso International America, Inc. | Olfaction sensor preservation systems and methods |
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JPH10185929A (ja) * | 1996-11-25 | 1998-07-14 | Vermes Mikrotechnik Gmbh | 液体試料の自動連続分析のための装置 |
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JP2009526969A (ja) * | 2006-02-13 | 2009-07-23 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 分子診断アプリケーションのための微小流体装置 |
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-
2017
- 2017-07-10 TW TW106123108A patent/TWI647668B/zh active
-
2018
- 2018-05-29 EP EP18174939.1A patent/EP3431954A1/en active Pending
- 2018-05-30 US US15/992,584 patent/US20190011336A1/en not_active Abandoned
- 2018-06-06 JP JP2018108339A patent/JP7091152B2/ja active Active
- 2018-06-21 BR BR102018012768-3A patent/BR102018012768A2/pt unknown
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH10185929A (ja) * | 1996-11-25 | 1998-07-14 | Vermes Mikrotechnik Gmbh | 液体試料の自動連続分析のための装置 |
JP2005024316A (ja) * | 2003-06-30 | 2005-01-27 | Kyocera Corp | マイクロ化学チップおよびその製造方法 |
JP2009526969A (ja) * | 2006-02-13 | 2009-07-23 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 分子診断アプリケーションのための微小流体装置 |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2019029009A (ja) * | 2017-07-27 | 2019-02-21 | 研能科技股▲ふん▼有限公司 | アクチュエータセンサモジュールの駆動及びデータ伝送システム |
CN113029235A (zh) * | 2021-02-25 | 2021-06-25 | 哈尔滨工业大学 | 小行程纳米级运动台及热相关滞回数据测量方法 |
CN113029235B (zh) * | 2021-02-25 | 2021-09-10 | 哈尔滨工业大学 | 小行程纳米级运动台及热相关滞回数据测量方法 |
Also Published As
Publication number | Publication date |
---|---|
BR102018012768A2 (pt) | 2019-01-22 |
EP3431954A1 (en) | 2019-01-23 |
JP7091152B2 (ja) | 2022-06-27 |
TW201909132A (zh) | 2019-03-01 |
TWI647668B (zh) | 2019-01-11 |
US20190011336A1 (en) | 2019-01-10 |
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