JP2018197163A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2018197163A5 JP2018197163A5 JP2017103313A JP2017103313A JP2018197163A5 JP 2018197163 A5 JP2018197163 A5 JP 2018197163A5 JP 2017103313 A JP2017103313 A JP 2017103313A JP 2017103313 A JP2017103313 A JP 2017103313A JP 2018197163 A5 JP2018197163 A5 JP 2018197163A5
- Authority
- JP
- Japan
- Prior art keywords
- magnet
- transport
- magnets
- pair
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005339 levitation Methods 0.000 claims description 88
- 239000000969 carrier Substances 0.000 description 27
- 230000000694 effects Effects 0.000 description 6
- 230000001629 suppression Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 2
- 230000003247 decreasing Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 230000003542 behavioural Effects 0.000 description 1
- 230000001771 impaired Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006011 modification reaction Methods 0.000 description 1
- 230000001105 regulatory Effects 0.000 description 1
- 230000000630 rising Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017103313A JP6954597B2 (ja) | 2017-05-25 | 2017-05-25 | 磁気式浮上搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017103313A JP6954597B2 (ja) | 2017-05-25 | 2017-05-25 | 磁気式浮上搬送装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2018197163A JP2018197163A (ja) | 2018-12-13 |
| JP2018197163A5 true JP2018197163A5 (ko) | 2019-08-29 |
| JP6954597B2 JP6954597B2 (ja) | 2021-10-27 |
Family
ID=64663877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2017103313A Active JP6954597B2 (ja) | 2017-05-25 | 2017-05-25 | 磁気式浮上搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6954597B2 (ko) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109677837B (zh) * | 2019-01-07 | 2020-06-26 | 安徽理工大学 | 一种可控磁电混合悬浮磁垫带式运输机及其控制电路 |
| CN113049942B (zh) * | 2021-02-25 | 2024-03-08 | 深圳市磐锋精密技术有限公司 | 一种键盘薄膜电路板功能测试设备及测试方法 |
| CN114526899B (zh) * | 2022-02-21 | 2024-01-09 | 江苏申牌万向轮有限公司 | 一种基于磁悬浮技术的脚轮转动性能检测设备及检测方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56125984A (en) * | 1980-03-10 | 1981-10-02 | Nippon Telegr & Teleph Corp <Ntt> | Magnetically floating movable base |
| JPH01168038A (ja) * | 1987-12-24 | 1989-07-03 | Toshiba Corp | 磁気浮上式案内装置 |
| JPH03223021A (ja) * | 1989-12-29 | 1991-10-02 | Ntn Corp | 特殊環境下で用いられる搬送装置 |
| JP2013021036A (ja) * | 2011-07-08 | 2013-01-31 | Canon Anelva Corp | 搬送装置 |
-
2017
- 2017-05-25 JP JP2017103313A patent/JP6954597B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101288599B1 (ko) | 기판 이송 장치 | |
| KR101409524B1 (ko) | 기판 이송 장치 | |
| JP6538194B2 (ja) | 物体を保持、位置づけし、移動させるための装置 | |
| KR101386685B1 (ko) | 기판 처리 장치 | |
| JP2018197163A5 (ko) | ||
| JP6954597B2 (ja) | 磁気式浮上搬送装置 | |
| KR960010485A (ko) | 자기 부상 반송장치 | |
| KR20220002515A (ko) | 자기 부상 시스템, 자기 부상 시스템의 베이스 및 캐리어, 및 캐리어를 부상시키는 방법 | |
| CN112867878B (zh) | 用于承载平面物体的载体、用于输送载体的输送***、用于非接触式地输送载体的方法和用于生产涂布基板的方法 | |
| KR102166910B1 (ko) | 증착 시스템 내에서의 비접촉식 이송을 위한 캐리어, 캐리어의 비접촉식 이송을 위한 장치, 및 증착 시스템 내에서의 캐리어의 비접촉식 이송을 위한 방법 | |
| KR102439631B1 (ko) | 자기 부상 이송 장치 | |
| CN115385100A (zh) | 传送装置和喷墨打印设备 | |
| KR101883950B1 (ko) | 자기부상 이송 장치 | |
| KR102232179B1 (ko) | 자기 부상이송 장치 | |
| TW201932395A (zh) | 磁浮系統、真空系統與運輸載體之方法 | |
| KR102213655B1 (ko) | 자기 부상이송 장치 | |
| KR20220099611A (ko) | 기판 이송 장치 | |
| CN112218971A (zh) | 用于运输载体的磁悬浮***、用于磁悬浮***的载体、用于竖直处理基板的处理***以及运输载体的方法 | |
| CN112640073A (zh) | 用于运输第一载体及第二载体的设备、用于垂直处理基板的处理***及用于其的方法 | |
| KR20220145606A (ko) | 마그네틱 기어를 이용한 이송 장치 | |
| JP2020087977A (ja) | 磁気浮上搬送装置 | |
| US20220135348A1 (en) | Transport apparatus, vacuum apparatus, processing system, and a method for manufacturing an article | |
| CN112189058B (zh) | 用于运输载体的设备、用于竖直地处理基板的处理***以及切换载体的运输路径的方法 | |
| KR20240065648A (ko) | 기판 캐리어 이송 장치 | |
| WO2023218757A1 (ja) | 天井搬送車 |