JP2018144177A - Cutting apparatus and cutting method - Google Patents

Cutting apparatus and cutting method Download PDF

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JP2018144177A
JP2018144177A JP2017042087A JP2017042087A JP2018144177A JP 2018144177 A JP2018144177 A JP 2018144177A JP 2017042087 A JP2017042087 A JP 2017042087A JP 2017042087 A JP2017042087 A JP 2017042087A JP 2018144177 A JP2018144177 A JP 2018144177A
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cutting
cutting blade
cut
blade
adhesive sheet
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高野　健
Takeshi Takano
健 高野
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Lintec Corp
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Lintec Corp
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Abstract

PROBLEM TO BE SOLVED: To provide a cutting apparatus and a cutting method, which enable a cutting object to be cut by minimizing the production of dust.SOLUTION: A cutting apparatus comprises a cutting blade 20 for cutting a cutting object AS, and movement means 30 for relatively moving the cutting object AS and the cutting blade 20 to cut the cutting object AS into a predetermined shape. In the cutting blade 20, a chamfered part 20E continuing into an end 20D of a crest 20C is formed in a cross-sectional view in a position of a surface AS1 of the cutting object AS during the cutting of the cutting object AS.SELECTED DRAWING: Figure 1

Description

本発明は、切断装置および切断方法に関する。   The present invention relates to a cutting device and a cutting method.

従来、切断対象物を切断する切断刃と、切断対象物および切断刃を相対移動させて当該切断対象物を所定形状に切断する移動手段とを備えた切断装置が知られている（例えば、特許文献１参照）。   2. Description of the Related Art Conventionally, a cutting apparatus is known that includes a cutting blade that cuts a cutting object and a moving unit that relatively moves the cutting object and the cutting blade to cut the cutting object into a predetermined shape (for example, a patent). Reference 1).

特開２００５−１２３４２０号公報JP-A-2005-123420

しかしながら、特許文献１に記載された従来の切断装置では、カッタ刃４４（切断刃）の峰の端部が角張っているため、保護テープＴ（切断対象物）の切断中に、切断された切断対象物部分が峰の端部に接触し、当該切断対象物部分が擦れて塵埃（コンタミネーション）を発生するという不都合がある。このような塵埃は、非常に微細ではあるが、ハイレベルの清掃度（クラス）が要求されるクリンルームでは、このような非常に微細な塵埃ででも当該切断装置の置かれた雰囲気が汚染されるため、問題とされる場合がある。   However, in the conventional cutting device described in Patent Document 1, since the end of the peak of the cutter blade 44 (cutting blade) is angular, the cut cut during the cutting of the protective tape T (cutting object). There is an inconvenience that the object part comes into contact with the end of the peak and the cutting object part is rubbed to generate dust (contamination). Such dust is very fine, but in a clean room that requires a high level of cleanliness (class), the atmosphere in which the cutting device is placed is contaminated by such very fine dust. Therefore, it may be a problem.

本発明の目的は、塵埃の発生を極力低減させて切断対象物を切断することができる切断装置および切断方法を提供することにある。   An object of the present invention is to provide a cutting apparatus and a cutting method capable of cutting an object to be cut while reducing dust generation as much as possible.

本発明は、請求項に記載した構成を採用した。   The present invention employs the configurations described in the claims.

本発明によれば、峰の端部に続く面取り部が形成された切断刃が採用されているので、切断された切断対象物が角張った峰の端部に接触することがなくなり、塵埃の発生を極力低減させて切断対象物を切断することができる。
また、切断刃における他方の切刃側の峰の端部のみに続くように面取り部が形成されれば、切断刃を簡単に製作することができる。
さらに、刃先から峰の端部に至るまでの間全てが面取り部で形成されている切断刃の場合、塵埃の発生をより効率的に低減させることができる。
また、一方の切刃側が凹形状に形成されている切断刃の場合、一方の切刃と他方の切刃とで形成される切刃角を小さくすることができ、切断された切断対象物が強く面取り部に押し当たることを防止して、塵埃の発生をさらに低減させることができる。 According to the present invention, since the cutting blade in which the chamfered portion is formed following the end of the peak is adopted, the cut object to be cut does not come into contact with the end of the angular peak, and dust is generated. Can be cut as much as possible.
Further, if the chamfered portion is formed so as to continue only to the end of the peak on the other cutting blade side of the cutting blade, the cutting blade can be easily manufactured.
Furthermore, in the case of a cutting blade in which all of the chamfered portion is formed from the blade tip to the end of the peak, dust generation can be more efficiently reduced.
Further, in the case of a cutting blade in which one of the cutting blades is formed in a concave shape, the cutting blade angle formed by one cutting blade and the other cutting blade can be reduced, and the cut object to be cut is Generation of dust can be further reduced by preventing strong pressing against the chamfered portion.

（Ａ）は、本発明の一実施形態に係る切断装置の概略斜視図。（Ｂ）は、図１（Ａ）の切断装置の動作説明図。(A) is a schematic perspective view of the cutting device concerning one embodiment of the present invention. (B) is operation | movement explanatory drawing of the cutting device of FIG. 1 (A). （Ａ）〜（Ｆ）は、変形例の説明図。(A)-(F) are explanatory drawings of a modification.

以下、本発明の一実施形態を図面に基づいて説明する。
なお、本実施形態におけるＸ軸、Ｙ軸、Ｚ軸は、それぞれが直交する関係にあり、Ｘ軸およびＹ軸は、所定平面内の軸とし、Ｚ軸は、前記所定平面に直交する軸とする。さらに、本実施形態では、Ｙ軸と平行な図１に示すＢＤ方向から観た場合を基準とし、基準となる図を挙げることなく方向を示した場合、「上」がＺ軸の矢印方向で「下」がその逆方向、「左」がＸ軸の矢印方向で「右」がその逆方向、「前」がＹ軸の矢印方向で「後」がその逆方向とする。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
In this embodiment, the X axis, the Y axis, and the Z axis are orthogonal to each other, the X axis and the Y axis are axes in a predetermined plane, and the Z axis is an axis that is orthogonal to the predetermined plane. To do. Furthermore, in this embodiment, when viewed from the BD direction shown in FIG. 1 parallel to the Y axis, and when the direction is indicated without giving a reference figure, “up” is the arrow direction of the Z axis. “Down” is the opposite direction, “Left” is the arrow direction of the X axis, “Right” is the opposite direction, “Front” is the arrow direction of the Y axis, and “Back” is the opposite direction.

本発明の切断装置１０は、切断対象物としての接着シートＡＳを切断する切断刃２０と、接着シートＡＳおよび切断刃２０を相対移動させて当該接着シートＡＳを所定形状に切断する移動手段３０とを備え、被着体ＷＫに接着シートＡＳが貼付された一体物ＷＫ１を支持する切断対象物支持手段４０の近傍に配置されている。   The cutting apparatus 10 of the present invention includes a cutting blade 20 that cuts the adhesive sheet AS as a cutting object, and a moving unit 30 that relatively moves the adhesive sheet AS and the cutting blade 20 to cut the adhesive sheet AS into a predetermined shape. And is disposed in the vicinity of the cutting object support means 40 that supports the integrated object WK1 in which the adhesive sheet AS is attached to the adherend WK.

切断刃２０は、接着シートＡＳへの突き刺さりを容易にする切先２０Ａと、移動手段３０によって移動されることで、接着シートＡＳを所定形状に切断する刃先２０Ｂと、当該刃先２０Ｂに対して切断刃２０の切断方向反対側に位置する峰２０Ｃとを備え、接着シートＡＳを切断中の当該接着シートＡＳの表面ＡＳ１位置での断面視において、峰２０Ｃの端部２０Ｄに続く円弧状の面取り部２０Ｅ（所謂Ｒ面取り部）が形成されている。
なお、刃先２０Ｂは、一方の平２０Ｆに続く一方の切刃２０Ｇと、他方の平２０Ｈに続く他方の切刃２０Ｊとで形成され、本実施形態の場合、一方の切刃２０Ｇ側を被着体ＷＫ側にして接着シートＡＳを切断する構成とされ、面取り部２０Ｅは、切断刃２０における他方の切刃２０Ｊ側の峰２０Ｃの端部２０Ｄのみに続くように形成されている。
また、面取り部２０Ｅの円弧半径は、切断刃２０の形状や厚みを考慮したり、接着シートＡＳの特性、特質、性質、材質、組成、構成、形状、寸法および重量や、雰囲気の条件や、その他の要因等を考慮したりして、０．１ｍｍ〜５ｍｍ程度でよいが、０．１ｍｍ未満でもよいし、５ｍｍよりも大きくてもよく、本発明の切断装置１０の使用者（以下、単に「使用者」という）が任意に決定することができる。 The cutting blade 20 is cut by cutting edge 20B that cuts the adhesive sheet AS into a predetermined shape by moving the cutting edge 20A that facilitates piercing to the adhesive sheet AS, the moving means 30, and the cutting edge 20B. An arc-shaped chamfered portion that follows the end portion 20D of the peak 20C in a cross-sectional view at the position AS1 of the surface of the adhesive sheet AS that is cutting the adhesive sheet AS. 20E (so-called R chamfered portion) is formed.
The cutting edge 20B is formed by one cutting edge 20G following one flat 20F and the other cutting edge 20J following the other flat 20H. In this embodiment, the one cutting edge 20G side is attached. It is set as the structure which cut | disconnects adhesive sheet AS on the body WK side, and the chamfering part 20E is formed so that only the edge part 20D of the peak 20C of the other cutting blade 20J side in the cutting blade 20 may be followed.
Further, the arc radius of the chamfered portion 20E takes into consideration the shape and thickness of the cutting blade 20, the characteristics, properties, properties, material, composition, configuration, shape, dimensions and weight of the adhesive sheet AS, atmospheric conditions, In consideration of other factors and the like, it may be about 0.1 mm to 5 mm, but it may be less than 0.1 mm or larger than 5 mm. "User") can be arbitrarily determined.

移動手段３０は、第１〜第６アーム３１Ａ〜３１Ｆによって構成され、その作業範囲内において、作業部である第６アーム３１Ｆで支持したものを何れの位置、何れの角度にでも変位可能な駆動機器としての所謂多関節ロボット３１と、第６アーム３１Ｆに支持され、切断刃２０を保持する刃保持部材３２とを備えている。   The moving means 30 is constituted by first to sixth arms 31A to 31F, and within the work range, the drive supported by the sixth arm 31F as a working part can be displaced at any position and at any angle. A so-called multi-joint robot 31 as a device and a blade holding member 32 supported by a sixth arm 31F and holding the cutting blade 20 are provided.

切断対象物支持手段４０は、減圧ポンプや真空エジェクタ等の図示しない減圧手段によって被着体ＷＫを支持可能な支持面４１Ａと、接着シートＡＳを貫通した切断刃２０部分を受容する溝４１Ｂとを有する支持テーブル４１を備えている。   The cutting object support means 40 includes a support surface 41A that can support the adherend WK by a decompression means (not shown) such as a decompression pump or a vacuum ejector, and a groove 41B that receives the cutting blade 20 portion that penetrates the adhesive sheet AS. A support table 41 is provided.

以上の切断装置１０の動作を説明する。
先ず、使用者が図１中実線で示す初期位置で待機している切断装置１０に対し、操作パネルやパーソナルコンピュータ等の図示しない操作手段を介して自動運転開始の信号を入力する。そして、使用者または多関節ロボットやベルトコンベア等の図示しない搬送手段によって、一体物ＷＫ１が支持面４１Ａ上に載置されると、切断対象物支持手段４０が図示しない減圧手段を駆動し、当該一体物ＷＫ１の吸着保持を開始する。その後、移動手段３０が多関節ロボット３１を駆動し、切先２０Ａを接着シートＡＳに突き刺し、切断刃２０部分を溝４１Ｂ内に位置させた後、当該切断刃２０を被着体ＷＫの外縁に沿って１回転以上回転させることで、接着シートＡＳを所定形状に切断する。このとき、切断された接着シートＡＳ部分すなわち、被着体ＷＫから切り離される側の接着シートＡＳ部分は、他方の切刃２０Ｊ、他方の平２０Ｈおよび面取り部２０Ｅ上を摺動することとなる。 The operation of the above cutting apparatus 10 will be described.
First, a signal for starting an automatic operation is input to the cutting apparatus 10 waiting at an initial position indicated by a solid line in FIG. 1 via an operation means (not shown) such as an operation panel or a personal computer. When the integrated object WK1 is placed on the support surface 41A by a user or a conveying means such as an articulated robot or a belt conveyor, the cutting object support means 40 drives a decompression means (not shown), The suction holding of the integrated object WK1 is started. Thereafter, the moving means 30 drives the articulated robot 31, pierces the cutting edge 20A into the adhesive sheet AS, positions the cutting blade 20 portion in the groove 41B, and then places the cutting blade 20 on the outer edge of the adherend WK. The adhesive sheet AS is cut into a predetermined shape by rotating it one or more times along. At this time, the cut adhesive sheet AS portion, that is, the adhesive sheet AS portion on the side separated from the adherend WK, slides on the other cutting blade 20J, the other flat 20H, and the chamfered portion 20E.

接着シートＡＳの切断が完了すると、移動手段３０が多関節ロボット３１を駆動し、切断刃２０を初期位置に復帰させる。次いで、切断対象物支持手段４０が図示しない減圧手段の駆動を停止した後、使用者または図示しない搬送手段が、所定形状に切断された接着シートＡＳが貼付された被着体ＷＫを別の工程に搬送する。その後、使用者または図示しない搬送手段が支持面４１Ａ上に残った接着シートＡＳ部分を支持面４１Ａ上から取り去り、以降上記同様の動作が繰り返される。   When the cutting of the adhesive sheet AS is completed, the moving unit 30 drives the articulated robot 31 to return the cutting blade 20 to the initial position. Next, after the cutting object support unit 40 stops driving the decompression unit (not shown), the user or the transport unit (not shown) separates the adherend WK to which the adhesive sheet AS cut into a predetermined shape is attached. Transport to. Thereafter, the user or a conveying means (not shown) removes the adhesive sheet AS remaining on the support surface 41A from the support surface 41A, and thereafter the same operation as described above is repeated.

以上のような実施形態によれば、峰２０Ｃの端部２０Ｄに続く面取り部２０Ｅが形成された切断刃２０が採用されているので、切断された接着シートＡＳが角張った峰２０Ｃの端部２０Ｄに接触することがなくなり、塵埃の発生を極力低減させて接着シートＡＳを切断することができる。   According to the embodiment as described above, since the cutting blade 20 having the chamfered portion 20E formed after the end portion 20D of the peak 20C is employed, the end portion 20D of the peak 20C where the cut adhesive sheet AS is squared. The adhesive sheet AS can be cut by reducing the generation of dust as much as possible.

本発明における手段および工程は、それら手段および工程について説明した動作、機能または工程を果たすことができる限りなんら限定されることはなく、まして、前記実施形態で示した単なる一実施形態の構成物や工程に全く限定されることはない。例えば、移動手段は、切断対象物および切断刃を相対移動させて切断対象物を所定形状に切断可能なものであれば、出願当初の技術常識に照らし合わせ、その技術範囲内のものであればなんら限定されることはない（その他の手段および工程も同じ）。   The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, as long as the moving means can move the cutting object and the cutting blade relative to each other and cut the cutting object into a predetermined shape, the moving means is within the technical scope in light of the technical common sense at the beginning of the application. There is no limitation (other means and steps are the same).

切断刃２０は、図２（Ａ）に示すように、峰２０Ｃの両端部２０Ｄそれぞれに続く面取り部２０Ｅが形成されていてもよいし、峰２０Ｃの端部２０Ｄの全域または一部に面取り部２０Ｅが形成されていてもよいし、図２（Ｂ）に示すように、一方の切刃２０Ｇと他方の切刃２０Ｊとが両面取り部２０Ｅの接線方向となることで、平２０Ｆ、２０Ｈのない形状であってもよいし、図２（Ｃ）に示すように、刃先２０Ｂから峰２０Ｃの端部２０Ｄに至るまでの間全てが面取り部２０Ｅで形成されていてもよいし、図２（Ｄ）に示すように、一方の切刃２０Ｇ（他方の切刃２０Ｊ）側が平らな形状でもよいし、図２（Ｅ）に示すように、一方の切刃２０Ｇに凹部２０Ｋが形成されていてもよい。
図２（Ｂ）、（Ｃ）に示すような切断刃２０の場合、例えば、図２（Ａ）に示す一方の平２０Ｆ（他方の平２０Ｈ）と一方の切刃２０Ｇ（他方の切刃２０Ｊ）とで形成される角部２０Ｌがなくなるので、この点においても、切断された接着シートＡＳが角張った切断刃２０部分に接触することがなくなり、塵埃の発生を極力低減させて接着シートＡＳを切断することができるようになる。
なお、峰２０Ｃには、図２（Ｂ）、（Ｄ）に示すように平坦部があってもよいし、図２（Ａ）、（Ｃ）、（Ｅ）に示すように平坦部がなくてもよく、峰２０Ｃに平坦部がない場合、両端部２０Ｄは、峰２０Ｃを形成する線上で一致した位置となる。また、図２（Ｃ）に示すような切断刃２０や、峰２０Ｃに平坦部のない図２（Ｂ）に示す切断刃２０の場合、峰２０Ｃ側が刃先となってもよい。さらに、図２（Ｅ）に示す凹部２０Ｋは、断面視で円弧形状でもよいし、多角形状でもよい。
面取り部２０Ｅは、真円の円弧からなる円弧でもよいし、楕円の円弧からなる円弧等でもよいし、面取り部２０Ｅの代わりに、図２（Ｆ）に示すような直線状の面取り部２０Ｅ１（所謂Ｃ面取り部）でもよく、このような面取り部２０Ｅ１を形成するための１辺の長さも、切断刃２０の形状や厚みを考慮したり、接着シートＡＳの特性、特質、性質、材質、組成、構成、形状、寸法および重量や、雰囲気の条件や、その他の要因等を考慮したりして、０．１ｍｍ〜５ｍｍ程度でよいが、０．１ｍｍ未満でもよいし、５ｍｍよりも大きくてもよく、使用者が任意に決定することができるし、面取り部２０Ｅ１を形成するための２辺の長は、同じ長さでもよいし、異なる長さでもよい。
切断刃２０は、どのような形状でもよく、上記実施形態では、切断刃２０の延出方向（図１（Ａ）の状態でＺ軸方向）に対し、刃先２０Ｂが傾斜して、峰２０Ｃが平行な切断刃２０を例示したが、例えば、切断刃２０の延出方向に対し、刃先２０Ｂが平行で、峰２０Ｃが傾斜した切断刃２０を採用してもよいし、切断刃２０の延出方向に対し、刃先２０Ｂおよび峰２０Ｃの両方が傾斜した切断刃２０を採用してもよいし、丸刃や鋸刃等のその他の形状の切断刃２０を採用してもよい。 As shown in FIG. 2 (A), the cutting blade 20 may be formed with chamfered portions 20E that follow each of the two end portions 20D of the peak 20C, or a chamfered portion at the whole or part of the end portion 20D of the peak 20C. 20E may be formed, and as shown in FIG. 2B, one cutting edge 20G and the other cutting edge 20J are in the tangential direction of the double-sided chamfer 20E, so that the flat 20F, 20H As shown in FIG. 2 (C), the entire shape from the cutting edge 20B to the end 20D of the peak 20C may be formed by a chamfered portion 20E. As shown in FIG. 2D, one of the cutting blades 20G (the other cutting blade 20J) side may be flat, or as shown in FIG. 2E, the one cutting blade 20G has a recess 20K. Also good.
In the case of the cutting blade 20 as shown in FIGS. 2B and 2C, for example, one flat 20F (the other flat 20H) and one cutting blade 20G (the other cutting blade 20J shown in FIG. 2A). ), The cut adhesive sheet AS does not come into contact with the angular cutting blade 20 portion, and the generation of dust is reduced as much as possible. Can be cut.
The peak 20C may have a flat portion as shown in FIGS. 2 (B) and 2 (D), or may not have a flat portion as shown in FIGS. 2 (A), (C) and (E). In the case where the peak 20C has no flat portion, both end portions 20D are located on the line forming the peak 20C. Further, in the case of the cutting blade 20 as shown in FIG. 2C or the cutting blade 20 shown in FIG. 2B where the ridge 20C has no flat portion, the ridge 20C side may be the cutting edge. Furthermore, the recess 20K illustrated in FIG. 2E may have an arc shape or a polygonal shape in cross-sectional view.
The chamfered portion 20E may be an arc formed of a perfect circular arc, an arc formed of an elliptical arc, or the like, or a linear chamfered portion 20E1 (see FIG. 2F) instead of the chamfered portion 20E. The length of one side for forming such a chamfered portion 20E1 also takes into account the shape and thickness of the cutting blade 20, and the characteristics, characteristics, properties, material, and composition of the adhesive sheet AS. In consideration of the configuration, shape, size and weight, atmospheric conditions, other factors, etc., it may be about 0.1 mm to 5 mm, but it may be less than 0.1 mm or larger than 5 mm. The user can arbitrarily determine the length, and the two sides for forming the chamfered portion 20E1 may have the same length or different lengths.
The cutting blade 20 may have any shape. In the above embodiment, the cutting edge 20B is inclined with respect to the extending direction of the cutting blade 20 (Z-axis direction in the state of FIG. 1A), and the ridge 20C is formed. Although the parallel cutting blade 20 was illustrated, for example, the cutting blade 20 in which the cutting edge 20B is parallel and the ridge 20C is inclined with respect to the extending direction of the cutting blade 20 may be adopted. A cutting blade 20 in which both the blade tip 20B and the peak 20C are inclined with respect to the direction may be employed, or a cutting blade 20 of another shape such as a round blade or a saw blade may be employed.

移動手段３０は、刃保持部材３２を設けずに第６アーム３１Ｆで直接切断刃２０を支持してもよいし、第６アーム３１Ｆで駆動機器としての所謂チャックモータを支持し、当該チャックモータのチャックで切断刃２０を着脱自在に支持するように構成してもよいし、被着体ＷＫの外縁と同形状となるように接着シートＡＳを切断してもよいし、被着体ＷＫの外縁よりも内側で接着シートＡＳを切断してもよいし、被着体ＷＫの外縁よりも外側で接着シートＡＳを切断してもよいし、被着体ＷＫの外縁とは関係なく接着シートＡＳを切断してもよいし、接着シートＡＳを貫通または貫通することのない切込が断続的に続くように接着シートＡＳに対して切断刃２０を離間接近させながら、接着シートＡＳおよび切断刃２０を相対移動させて当該接着シートＡＳを切断してもよいし、接着シートＡＳを貫通することのない切込が連続的に続くように接着シートＡＳおよび切断刃２０を相対移動させて当該接着シートＡＳを切断してもよいし、接着シートＡＳを貫通する切込と当該接着シートＡＳを貫通することのない切込とが規則的または不規則的に、連続的または断続的に続くように接着シートＡＳおよび切断刃２０を相対移動させて当該接着シートＡＳを切断してもよし、切断刃２０を停止または移動させつつ接着シートＡＳを移動させて当該接着シートＡＳを切断してもよい。   The moving means 30 may support the cutting blade 20 directly by the sixth arm 31F without providing the blade holding member 32, or support a so-called chuck motor as a driving device by the sixth arm 31F. The cutting blade 20 may be configured to be detachably supported by a chuck, the adhesive sheet AS may be cut to have the same shape as the outer edge of the adherend WK, or the outer edge of the adherend WK. The adhesive sheet AS may be cut on the inner side, the adhesive sheet AS may be cut on the outer side of the outer edge of the adherend WK, or the adhesive sheet AS may be cut regardless of the outer edge of the adherend WK. The adhesive sheet AS and the cutting blade 20 may be cut while approaching and separating the cutting blade 20 from the adhesive sheet AS so that a cut that does not penetrate or penetrate the adhesive sheet AS continues intermittently. Relative movement The adhesive sheet AS may be cut, or the adhesive sheet AS and the cutting blade 20 may be moved relative to each other so as to continue the cutting without penetrating the adhesive sheet AS, and the adhesive sheet AS is cut. Alternatively, the adhesive sheet AS and the cutting blade 20 may be formed so that the cuts that penetrate the adhesive sheet AS and the cuts that do not penetrate the adhesive sheet AS continue regularly or irregularly, continuously or intermittently. The adhesive sheet AS may be cut by relative movement, or the adhesive sheet AS may be cut by moving the adhesive sheet AS while the cutting blade 20 is stopped or moved.

切断対象物支持手段４０は、メカチャックやチャックシリンダ等の把持手段、クーロン力、接着剤、粘着剤、磁力、ベルヌーイ吸着、駆動機器等で接着シートＡＳを支持する構成を採用してもよいし、例えば、被着体ＷＫに接着シートＡＳを貼付するシート貼付装置の被着体支持手段や、被着体ＷＫを検査して不要な部分を切断する検査装置の被着体支持手段等どんなものであってもよいし、一体物ＷＫ１における被着体ＷＫ側から当該一体物ＷＫ１を支持してもよいし、一体物ＷＫ１における接着シートＡＳ側から当該一体物ＷＫ１を支持してもよいし、一体物ＷＫ１における被着体ＷＫのある位置のみを吸着保持してもよいし、一体物ＷＫ１における被着体ＷＫのない位置のみを吸着保持してもよいし、一体物ＷＫ１におけるそれら両方の位置を吸着保持してもよいし、一体物ＷＫ１ではなく、接着シートＡＳのみを支持するものであってもよいし、他の装置や他の部材で切断対象物を支持する場合、本発明の切断装置１０に備わっていなくてもよい。   The cutting object support means 40 may adopt a configuration in which the adhesive sheet AS is supported by a gripping means such as a mechanical chuck or a chuck cylinder, a Coulomb force, an adhesive, an adhesive, a magnetic force, Bernoulli adsorption, or a driving device. , For example, an adherend support means of a sheet sticking apparatus for sticking the adhesive sheet AS to the adherend WK, an adherend support means of an inspection apparatus for inspecting the adherend WK and cutting unnecessary portions, etc. The integrated object WK1 may be supported from the adherend WK side of the integrated object WK1, or the integrated object WK1 may be supported from the adhesive sheet AS side of the integrated object WK1, Only a certain position of the adherend WK in the integrated object WK1 may be sucked and held, or only a position without the adherend WK in the integral object WK1 may be sucked and held, or both of them in the integral object WK1. The position may be held by suction, may support only the adhesive sheet AS, not the integrated object WK1, or may support the object to be cut by another device or another member. The cutting device 10 may not be provided.

切断装置１０は、天地反転して配置したり横向きに配置したりして、接着シートＡＳを切断してもよい。   The cutting device 10 may cut the adhesive sheet AS by placing it upside down or placing it sideways.

本発明における切断対象物および被着体ＷＫの材質、種別、形状等は、特に限定されることはない。例えば、切断対象物および被着体ＷＫは、円形、楕円形、三角形や四角形等の多角形、その他の形状であってもよいし、切断対象物が接着シートの場合、感圧接着性、感熱接着性等の接着形態のものであってもよい。また、このような接着シートは、例えば、接着剤層だけの単層のもの、基材シートと接着剤層とだけで構成されたもの、基材シートと接着剤層との間に中間層を有するもの、接着剤層の間に中間層を有するもの等、１層または２層以上のものであってよい。また、切断対象物や被着体ＷＫとしては、例えば、食品、樹脂容器、シリコン半導体ウエハや化合物半導体ウエハ等の半導体ウエハ、回路基板、光ディスク等の情報記録基板、ガラス板、鋼板、陶器、木板、紙、ゴムまたは樹脂等の単体物であってもよいし、それら２つ以上で形成された複合物であってもよく、任意の形態の部材や物品なども対象とすることができる。なお、接着シートを機能的、用途的な読み方に換え、例えば、情報記載用ラベル、装飾用ラベル、保護シート、ダイシングテープ、ダイアタッチフィルム、ダイボンディングテープ、記録層形成樹脂シート等の任意の形状の任意のシート、フィルム、テープ等を前述のような任意の被着体に貼付することができる。   The material, type, shape, etc. of the object to be cut and the adherend WK in the present invention are not particularly limited. For example, the object to be cut and the adherend WK may be a circle, an ellipse, a polygon such as a triangle or a quadrangle, and other shapes. When the object to be cut is an adhesive sheet, pressure-sensitive adhesiveness, heat-sensitive An adhesive form such as adhesiveness may be used. In addition, such an adhesive sheet is, for example, a single layer having only an adhesive layer, one having only a base sheet and an adhesive layer, and an intermediate layer between the base sheet and the adhesive layer. It may be one layer or two or more layers, such as one having an intermediate layer between adhesive layers. Examples of the object to be cut and the adherend WK include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards and optical disks, glass plates, steel plates, earthenware, and wood plates. It may be a simple substance such as paper, rubber, or resin, or may be a composite formed of two or more of them, and any form of member or article can be targeted. It should be noted that the adhesive sheet is replaced with functional and intended readings, for example, any shape such as a label for information description, a decorative label, a protective sheet, a dicing tape, a die attach film, a die bonding tape, a recording layer forming resin sheet, etc. Any sheet, film, tape or the like can be attached to any adherend as described above.

前記実施形態における駆動機器は、回動モータ、直動モータ、リニアモータ、単軸ロボット、多関節ロボット等の電動機器、エアシリンダ、油圧シリンダ、ロッドレスシリンダおよびロータリシリンダ等のアクチュエータ等を採用することができる上、それらを直接的又は間接的に組み合せたものを採用することもできる。   The drive device in the embodiment employs an electric device such as a rotation motor, a linear motion motor, a linear motor, a single-axis robot, and an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition, a combination of them directly or indirectly can be adopted.

１０…切断装置
２０…切断刃
２０Ｂ…刃先
２０Ｃ…峰
２０Ｄ…端部
２０Ｅ…面取り部
２０Ｅ１…面取り部
２０Ｇ…一方の切刃
２０Ｊ…他方の切刃
２０Ｋ…凹部
３０…移動手段
ＡＳ…接着シート（切断対象物）
ＡＳ１…表面
ＷＫ…被着体 DESCRIPTION OF SYMBOLS 10 ... Cutting device 20 ... Cutting blade 20B ... Cutting edge 20C ... Peak 20D ... End portion 20E ... Chamfered portion 20E1 ... Chamfered portion 20G ... One cutting blade 20J ... The other cutting blade 20K ... Concavity 30 ... Moving means AS ... Adhesive sheet ( Cutting object)
AS1 ... surface WK ... adherend

Claims (5)

切断対象物を切断する切断刃と、
前記切断対象物および前記切断刃を相対移動させて当該切断対象物を所定形状に切断する移動手段とを備え、
前記切断刃は、前記切断対象物を切断中の当該切断対象物の表面位置での断面視において、峰の端部に続く面取り部が形成されていることを特徴とする切断装置。 A cutting blade for cutting an object to be cut;
Moving means for relatively moving the cutting object and the cutting blade to cut the cutting object into a predetermined shape;
The cutting device is characterized in that a chamfered portion is formed following the end of the peak in a cross-sectional view at the surface position of the cutting object during cutting the cutting object. 前記切断対象物は、被着体に積層され、
前記切断刃は、一方の切刃側を前記被着体側にして前記切断対象物を切断する構成とされ、
前記面取り部は、前記切断刃における他方の切刃側の峰の端部のみに続くように形成されていることを特徴とする請求項１に記載の切断装置。 The cutting object is laminated on an adherend,
The cutting blade is configured to cut the cutting object with one cutting blade side being the adherend side,
The cutting apparatus according to claim 1, wherein the chamfered portion is formed so as to continue only to an end portion of a peak on the other cutting edge side of the cutting blade. 前記切断刃は、刃先から峰の端部に至るまでの間全てが面取り部で形成されていることを特徴とする請求項１または２に記載の切断装置。   The cutting device according to claim 1 or 2, wherein the cutting blade is entirely formed of a chamfered portion from the blade tip to the end of the peak. 前記切断刃は、一方の切刃側が凹形状に形成されていることを特徴とする請求項１乃至請求項３に記載の切断装置。   The cutting device according to any one of claims 1 to 3, wherein one of the cutting blades is formed in a concave shape. 切断対象物を切断中の当該切断対象物の表面位置での断面視において、峰の端部に続く面取り部が形成された切断刃を用意する切断刃用意工程と、
前記切断対象物および前記切断刃を相対移動させて当該切断対象物を所定形状に切断する移動工程とを備えていることを特徴とする切断方法。 In a cross-sectional view at the surface position of the cutting object during cutting the cutting object, a cutting blade preparation step of preparing a cutting blade in which a chamfered portion following the end of the peak is formed;
A cutting method comprising: a moving step of relatively moving the cutting object and the cutting blade to cut the cutting object into a predetermined shape.
JP2017042087A 2017-03-06 2017-03-06 Cutting apparatus and cutting method Pending JP2018144177A (en)

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