JP2018076233A - Filling device - Google Patents

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JP2018076233A
JP2018076233A JP2018022802A JP2018022802A JP2018076233A JP 2018076233 A JP2018076233 A JP 2018076233A JP 2018022802 A JP2018022802 A JP 2018022802A JP 2018022802 A JP2018022802 A JP 2018022802A JP 2018076233 A JP2018076233 A JP 2018076233A
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powder
leveling
circular plate
cylindrical container
plate material
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JP6512419B2 (en
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安国 今林
Yasukuni Imabayashi
安国 今林
千果 近藤
Chika Kondo
千果 近藤
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Sumitomo Metal Mining Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a filling device which solves the problem resulting from irregularities in operations, by mechanizing operations conventionally performed manually, such as powder charging operation, powder leveling operation and circular plate material charging operation.SOLUTION: A filling device, which charges circular plate materials (wafers) 6 and powder 7 alternately into a cylindrical container 8 to embed the circular plate materials in the powder, includes: conveying means for conveying the container; powder charging means for charging powder of a fixed amount into the container; powder leveling means for horizontally leveling the powder into a flat shape in the leveling height position of the powder; circular plate material charging means having a holding tool for holding one sheet of the circular plate material 6 and a moving member, and opening the holding of the circular plate material 6 in synchronization with a timing at which the holding tool reaches above the powder in the container; and control means for controlling the conveying means to repeatedly bringing the container in each of the positions where the powder charging means, the powder leveling means and the circular plate material charging means are provided, and meanwhile, for controlling the powder charging means, the powder leveling means and the circular plate material charging means to repeatedly perform powder charging, powder leveling and circular plate material charging.SELECTED DRAWING: Figure 5

Description

本発明は、ウエハ状態のタンタル酸リチウム結晶等円形板材と粉末を容器内に交互に投入して複数枚の円形板材を粉末内に埋め込む充填装置に係り、従来、手作業でなされていた容器内への粉末投入作業、粉末均し作業、円形板材投入作業等を機械的に行う充填装置に関するものである。   The present invention relates to a filling apparatus in which a circular plate material such as a lithium tantalate crystal in a wafer state and a powder are alternately placed in a container to embed a plurality of circular plate materials in the powder. The present invention relates to a filling device that mechanically performs a powder charging operation, a powder leveling operation, a circular plate material charging operation, and the like.

携帯電話等の信号ノイズを除去するために用いられている表面弾性波（ＳＡＷ）フィルターの基板材料としてタンタル酸リチウム結晶（以下、ＬＴ結晶と略称する）が使われている。   A lithium tantalate crystal (hereinafter abbreviated as an LT crystal) is used as a substrate material for a surface acoustic wave (SAW) filter that is used to remove signal noise in mobile phones and the like.

しかし、表面弾性波素子製造プロセスにおいて、ＬＴ結晶の特性である焦電性に起因する歩留まり低下が問題となっていた。すなわち、一般的なＬＴ結晶の体積抵抗率は１０-14〜１０-15Ω・ｃｍ程度であるため、上記プロセスで受ける温度変化によってＬＴ結晶基板の表面に電荷（焦電性に起因する電荷）がチャージアップし、これにより発生するスパークによってＬＴ結晶基板の表面に形成された電極等のパターンが破壊され、更にＬＴ結晶基板の割れ等が生じて素子製造プロセスでの歩留まり低下が問題となっていた。 However, in the surface acoustic wave device manufacturing process, there has been a problem of yield reduction due to pyroelectricity, which is a characteristic of LT crystals. That is, since the volume resistivity of a general LT crystal is about 10 −14 to 10 −15 Ω · cm, a charge (charge due to pyroelectricity) is generated on the surface of the LT crystal substrate due to a temperature change in the above process. Is charged up, and the sparks generated thereby destroy the pattern of electrodes and the like formed on the surface of the LT crystal substrate, and further cause cracks in the LT crystal substrate, resulting in a decrease in yield in the device manufacturing process. It was.

この問題を解決するため、特許文献１では、ウエハ状態のＬＴ結晶をＡｌとＡｌ2Ｏ3の混合粉末に埋め込み、窒素ガス中の減圧雰囲気下で熱処理してＬＴ結晶の体積抵抗率を低下させ、表面弾性波素子製造プロセスにおける結晶表面への電荷のチャージアップを抑制することで、素子製造プロセスにおける歩留まりの向上を図ったＬＴ結晶の製造方法が開示されている。 In order to solve this problem, in Patent Document 1, the LT crystal in a wafer state is embedded in a mixed powder of Al and Al 2 O 3 and heat-treated in a reduced-pressure atmosphere in nitrogen gas to reduce the volume resistivity of the LT crystal. A method of manufacturing an LT crystal is disclosed in which the charge up of the crystal surface in the surface acoustic wave device manufacturing process is suppressed to improve the yield in the device manufacturing process.

ところで、特許文献１におけるＡｌとＡｌ2Ｏ3の混合粉末へのＬＴ結晶の埋め込み作業については、従来、手作業によりなされていた。すなわち、容器内にＡｌとＡｌ2Ｏ3の混合粉末を投入し、かつ、投入した混合粉末の表面が平坦になるように均した後、ウエハ状態のＬＴ結晶を載置し、更にＬＴ結晶が覆い隠されるようにＡｌとＡｌ2Ｏ3の混合粉末を充填する作業を繰り返し行っているが、その作業は手作業により行なわれていた。 By the way, the embedding operation of the LT crystal in the mixed powder of Al and Al 2 O 3 in Patent Document 1 has been conventionally performed manually. That is, a mixed powder of Al and Al 2 O 3 is charged into a container, and the surface of the charged mixed powder is leveled so that the surface becomes flat, and then a wafer-state LT crystal is placed. The operation of filling the mixed powder of Al and Al 2 O 3 so as to be covered is repeated, but the operation is performed manually.

しかし、手作業による従来の方法では、投入する粉末の分量、粉末の均し具合、ウエハの置き位置等にばらつきが生じ易く、ＬＴ結晶の処理結果に影響を与え、多量の損失を生じさせる問題が存在した。   However, with the conventional manual method, the amount of powder to be charged, the leveling of the powder, the position of placing the wafer, etc. are likely to vary, affecting the results of processing the LT crystal and causing a large amount of loss. Existed.

特開２００５−１１９９０８号公報JP 2005-119908 A

本発明はこのような問題点に着目してなされたもので、その課題とするところは、従来、手作業でなされていた粉末投入作業、粉末均し作業、円形板材投入作業等を機械化して、作業のばらつきに起因する問題を解消した充填装置を提供することにある。   The present invention has been made paying attention to such problems, and the problem is to mechanize conventional powder input work, powder leveling work, circular plate material input work, etc. that have been done manually. An object of the present invention is to provide a filling apparatus that solves the problems caused by the variation in work.

すなわち、本発明に係る第１の発明は、
一端側に円形の開口部を有しかつ他端側が閉止された円筒形容器内に上記開口部と略同一の形状を有する円形板材と定量の粉末を交互に投入して各円形板材間に略等量の粉末を介在させながら円形板材を粉末内に埋め込む充填装置において、
上記円筒形容器を水平方向へ搬送する搬送手段と、
上記円筒形容器の搬送路上に設けられかつ円筒形容器内に定量の粉末を投入する粉末投入手段と、
上記円筒形容器の搬送路上に設けられかつ均し具と該均し具を回転させながら下方向へ移動させる回転移動部材を有すると共に、円筒形容器内に投入された粉末の均し高さ位置において粉末を水平方向へ平坦に均す粉末均し手段と、
上記円筒形容器の搬送路上に設けられかつ先端側に１枚の円形板材を保持する保持具と該保持具を下方向へ移動させる移動部材を有すると共に、上記保持具が円筒形容器内の粉末上に到達するタイミングに同期させて円形板材の保持を開放する円形板材投入手段と、
上記搬送手段を制御して、粉末投入手段、粉末均し手段および円形板材投入手段が設けられた搬送路上の各設置箇所に円筒形容器を繰り返し搬入させると共に、上記粉末投入手段、粉末均し手段および円形板材投入手段をそれぞれ制御して、粉末投入、粉末均しおよび円形板材投入を繰り返させる制御手段、
を具備することを特徴とするものである。 That is, the first invention according to the present invention is:
In a cylindrical container having a circular opening at one end and closed at the other end, a circular plate having substantially the same shape as that of the opening and a fixed amount of powder are alternately put in between the circular plates. In a filling device that embeds a circular plate in a powder while interposing an equal amount of powder,
Conveying means for conveying the cylindrical container in the horizontal direction;
A powder charging means provided on the conveyance path of the cylindrical container and charging a fixed amount of powder into the cylindrical container;
A leveling position of the powder charged in the cylindrical container, having a leveling tool and a rotationally moving member that moves on the leveling tool while rotating the leveling tool, provided on the conveyance path of the cylindrical container. A powder leveling means for leveling the powder horizontally in
A holder provided on the conveyance path of the cylindrical container and holding a circular plate on the tip side; and a moving member for moving the holder downward; and the holder is a powder in the cylindrical container. A circular plate material input means for releasing the holding of the circular plate material in synchronization with the timing of reaching the top,
The conveying means is controlled so that the cylindrical container is repeatedly carried into each installation location on the conveying path provided with the powder feeding means, the powder leveling means, and the circular plate material feeding means, and the powder feeding means, the powder leveling means And control means for repeating the powder charging, powder leveling and circular plate material charging, respectively controlling the circular plate material charging means,
It is characterized by comprising.

また、本発明に係る第２の発明は、
第１の発明に記載の充填装置において、
上記粉末均し手段における均し高さ位置が、円筒形容器内に交互に投入される円形板材の枚数と粉末の層数に対応して変位することを特徴とする。 Further, the second invention according to the present invention is:
In the filling device according to the first invention,
The leveling height position in the powder leveling means is displaced corresponding to the number of circular plates and the number of powder layers alternately put into a cylindrical container.

次に、本発明に係る第３の発明は、
第１の発明または第２の発明に記載の充填装置において、
上記粉末がＡｌとＡｌ2Ｏ3の混合粉末で構成され、上記円形板材がタンタル酸リチウム結晶から成るウエハであることを特徴とし、
第４の発明は、
第１の発明〜３の発明のいずれかに記載の充填装置において、
上記円筒形容器の開口縁部に嵌合され、円筒形容器内に投入された粉末の飛散を防止する円筒形アタッチメントが取付けられていることを特徴とするものである。 Next, the third invention according to the present invention is:
In the filling device according to the first invention or the second invention,
The powder is composed of a mixed powder of Al and Al 2 O 3 , and the circular plate is a wafer made of lithium tantalate crystals,
The fourth invention is:
In the filling apparatus according to any one of the first to third inventions,
A cylindrical attachment that is fitted to the opening edge of the cylindrical container and prevents scattering of the powder charged into the cylindrical container is attached.

本発明に係る充填装置によれば、従来、手作業でなされていた粉末投入作業、粉末均し作業、円形板材投入作業等が機械化されるため、作業のばらつきに起因した上述の問題を解消できる効果を有する。   According to the filling device according to the present invention, since the powder input operation, the powder leveling operation, the circular plate material input operation, and the like, which have been conventionally performed manually, are mechanized, the above-described problems caused by the work variations can be solved. Has an effect.

本発明に係る充填装置における搬送手段の説明図。Explanatory drawing of the conveyance means in the filling apparatus which concerns on this invention. 本発明に係る充填装置における粉末投入手段の説明図。Explanatory drawing of the powder injection | throwing-in means in the filling apparatus which concerns on this invention. 本発明に係る充填装置における粉末均し手段の説明図。Explanatory drawing of the powder leveling means in the filling apparatus which concerns on this invention. 本発明に係る粉末均し手段における均し具の平面図。The top view of the leveling tool in the powder leveling means which concerns on this invention. 本発明に係る粉末均し手段における均し具の作用説明図。Action | operation explanatory drawing of the leveling tool in the powder leveling means which concerns on this invention. 本発明に係る粉末均し手段における均し具の作用説明図。Action | operation explanatory drawing of the leveling tool in the powder leveling means which concerns on this invention. 本発明の変形例に係る粉末均し手段における均し具の平面図。The top view of the leveling tool in the powder leveling means which concerns on the modification of this invention. 本発明の変形例に係る粉末均し手段における均し具の作用説明図。Action | operation explanatory drawing of the leveling tool in the powder leveling means which concerns on the modification of this invention. 本発明に係る圧縮手段における圧縮具の作用説明図。Action | operation explanatory drawing of the compression tool in the compression means which concerns on this invention. 本発明に係る円筒形アタッチメントの説明図。Explanatory drawing of the cylindrical attachment which concerns on this invention. 円筒形アタッチメントと均し具の作用説明図。Action | operation explanatory drawing of a cylindrical attachment and a leveling tool. 本発明に係る充填装置における円形板材投入手段の説明図。Explanatory drawing of the circular board | plate material injection | throwing-in means in the filling apparatus which concerns on this invention. 本発明に係る充填装置における円形板材投入手段の作用説明図。Action | operation explanatory drawing of the circular board | plate material injection | throwing-in means in the filling apparatus which concerns on this invention.

以下、本発明の実施の形態について図面を参照して詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

まず、本発明に係る充填装置は、
円筒形容器を水平方向へ搬送する「搬送手段」と、
上記円筒形容器の搬送路上に設けられかつ円筒形容器内に定量の粉末を投入する「粉末投入手段」と、
上記円筒形容器の搬送路上に設けられかつ均し具と該均し具を回転させながら下方向へ移動させる回転移動部材を有すると共に円筒形容器内に投入された粉末の均し高さ位置において粉末を水平方向へ平坦に均す「粉末均し手段」と、
上記円筒形容器の搬送路上に設けられかつ先端側に１枚の円形板材を保持する保持具と該保持具を下方向へ移動させる移動部材を有すると共に上記保持具が円筒形容器内の粉末上に到達するタイミングに同期させて円形板材の保持を開放する「円形板材投入手段」と、
上記搬送手段を制御して粉末投入手段、粉末均し手段および円形板材投入手段が設けられた搬送路上の各設置箇所に円筒形容器を繰り返し搬入させると共に、上記粉末投入手段、粉末均し手段および円形板材投入手段をそれぞれ制御して粉末投入、粉末均しおよび円形板材投入を繰り返させる「制御手段」、
を具備することを特徴とする。 First, the filling device according to the present invention is:
"Conveying means" for conveying the cylindrical container in the horizontal direction;
"Powder input means" that is provided on the conveyance path of the cylindrical container and inputs a predetermined amount of powder into the cylindrical container;
At the leveling position of the powder charged in the cylindrical container and having a leveling tool and a rotationally moving member that moves the leveling tool downward while rotating the leveling tool. "Powder leveling means" to level the powder flat in the horizontal direction,
A holder provided on the conveyance path of the cylindrical container and holding a circular plate on the tip side; and a moving member for moving the holder downward; and the holder is disposed on the powder in the cylindrical container. `` Circular plate material input means '' that releases the holding of the circular plate material in synchronization with the timing to reach,
The conveying means is controlled so that a cylindrical container is repeatedly carried into each installation location on a conveying path provided with powder feeding means, powder leveling means and circular plate material charging means, and the powder feeding means, powder leveling means, and "Control means" for controlling the circular plate material charging means to repeat powder charging, powder leveling and circular plate material charging,
It is characterized by comprising.

１．搬送手段
本発明に係る充填装置の搬送手段は、図１に示すように、図示外のモータにより反時計回りで回転する搬送テーブル１により構成され、搬送テーブル１は９０°回転する毎に停止するように制御されている。また、搬送テーブル１は、粉末投入部２、粉末均し部３、粉末圧縮部４、円形板材（ウエハ）投入部５の各工程ステージを有しており、上記粉末投入部２には後述する粉末投入手段（粉末供給機）が設けられ、上記粉末均し部３には後述する粉末均し手段が設けられ、上記粉末圧縮部４には後述する圧縮手段が設けられ、かつ、上記円形板材（ウエハ）投入部５には後述する円形板材投入手段が設けられている。 1. Conveying means As shown in FIG. 1, the conveying means of the filling apparatus according to the present invention is constituted by a conveying table 1 that is rotated counterclockwise by a motor (not shown), and the conveying table 1 stops every 90 ° rotation. So that it is controlled. Further, the transfer table 1 has respective process stages of a powder input unit 2, a powder leveling unit 3, a powder compression unit 4, and a circular plate (wafer) input unit 5. The powder input unit 2 will be described later. A powder charging means (powder feeder) is provided, the powder leveling section 3 is provided with a powder leveling means described later, the powder compression section 4 is provided with a compression means described below, and the circular plate material The (wafer) loading unit 5 is provided with a circular plate material loading means described later.

尚、搬送テーブル１の近傍に、該搬送テーブル１に円筒形容器８を搬入しかつ充填処理後の円筒形容器８を搬出する容器搬入・搬出手段を設けてもよい。また、図１においては、粉末均し部３と粉末圧縮部４が個別に設けられた構造になっているが、粉末均し部３において粉末均し機能と粉末圧縮機能を兼ねる構造を採用してもよい。この場合、搬送テーブル１が１２０°回転する毎に停止するように制御してもよい。   In the vicinity of the transfer table 1, container loading / unloading means for loading the cylindrical container 8 into the transfer table 1 and unloading the cylindrical container 8 after the filling process may be provided. Moreover, in FIG. 1, although the powder leveling part 3 and the powder compression part 4 are the structures provided separately, the powder leveling part 3 employ | adopts the structure which combines a powder leveling function and a powder compression function. May be. In this case, the conveyance table 1 may be controlled to stop every time it rotates 120 °.

そして、搬送手段を具備する本発明に係る充填装置は次のように作動する。   And the filling apparatus which concerns on this invention which comprises a conveyance means operate | moves as follows.

まず、手作業により搬送テーブル１の所定位置に円筒形容器８をセットし、図示外のスイッチによって装置をスタートさせると、粉末投入部２において粉末投入手段（粉末供給機）から粉末が円筒形容器８内に投入される。次、搬送テーブル１が９０°回転し、粉末均し部３において粉末が平坦に均され、その後搬送テーブル１が９０°回転し、粉末圧縮部４において粉末が圧縮される。更に、搬送テーブル１が９０°回転し、円形板材（ウエハ）投入部５において円形板材（ウエハ）が円筒形容器８内に投入された後、搬送テーブル１が９０°回転すると元の粉末投入部２の位置となる。この動作を繰り返すことで、所望とするウエハ枚数が充填された円筒形容器を得ることができる。また、複数の円筒形容器を同時に処理することで、処理速度を格段に速めることができる。また、動作途中において円筒形容器８内における円形板材（ウエハ）の載置位置を計測し、計測された位置データに基づき次工程での「粉末の均し高さ位置」を設定することで、粉末投入部２における粉末投入量のある程度のばらつきが許容されて平坦に均すことが可能となる。   First, when the cylindrical container 8 is manually set at a predetermined position on the transfer table 1 and the apparatus is started by a switch (not shown), the powder is fed from the powder feeding means (powder feeder) in the cylindrical powder container 2. 8 is inserted. Next, the conveyance table 1 is rotated 90 °, the powder is leveled flat in the powder leveling unit 3, and then the conveyance table 1 is rotated 90 ° and the powder is compressed in the powder compression unit 4. Further, after the transfer table 1 is rotated 90 ° and the circular plate material (wafer) is charged into the cylindrical container 8 in the circular plate material (wafer) input portion 5, the original powder input portion is rotated when the transfer table 1 is rotated 90 °. 2 position. By repeating this operation, a cylindrical container filled with the desired number of wafers can be obtained. Moreover, the processing speed can be remarkably increased by processing a plurality of cylindrical containers simultaneously. In addition, by measuring the mounting position of the circular plate (wafer) in the cylindrical container 8 in the middle of the operation, by setting the “powder leveling position” in the next process based on the measured position data, A certain amount of variation in the amount of powder input in the powder input unit 2 is allowed and can be leveled.

２．粉末投入手段
本発明に係る充填装置の粉末投入手段（粉末供給機）は、上記粉末投入部２において円筒形容器８内に定量の粉末７を投入するもので、図２に示すように、スクリューフィーダー（図示せず）を具備する粉末供給機９が例示される。図２中、符号６は、円筒形容器８内に投入された円形板材（ウエハ）を示している。 2. Powder input means The powder input means (powder supply machine) of the filling apparatus according to the present invention is for supplying a fixed amount of powder 7 into the cylindrical container 8 in the powder input unit 2, as shown in FIG. The powder supply machine 9 which comprises a feeder (not shown) is illustrated. In FIG. 2, reference numeral 6 indicates a circular plate material (wafer) charged into the cylindrical container 8.

尚、粉末均し手段の上記「粉末の均し高さ位置」を決定（設定）する際に必要となる円筒形容器８内における粉末７層の厚み寸法についは、［（粉末の投入量／粉末の嵩密度）÷円筒形容器８の内径面積］から事前に算出することができる。   The thickness dimension of the powder 7 layer in the cylindrical container 8 required for determining (setting) the above-mentioned “powder leveling position” of the powder leveling means is [(powder input amount / It can be calculated in advance from (bulk density of powder) / inner diameter area of cylindrical container 8].

３．粉末均し手段
本発明に係る充填装置の粉末均し手段は、図３に示すように、円筒形容器内に投入された粉末を「粉末の均し高さ位置」において水平方向へ平坦に均す均し具１０と、該均し具１０を回転させながら下方向へ移動させる回転移動部材１１とで構成されている。 3. Powder leveling means As shown in FIG. 3, the powder leveling means of the filling apparatus according to the present invention is configured to level the powder charged in the cylindrical container flatly in the horizontal direction at the “powder leveling position”. A leveling tool 10 and a rotationally moving member 11 that moves the leveling tool 10 downward while rotating the leveling tool 10 are configured.

そして、粉末均し機能と粉末圧縮機能を兼ね備えた粉末均し手段と、粉末均し機能のみで粉末圧縮機能を具備しない粉末均し手段が例示される。   Examples thereof include a powder leveling means having both a powder leveling function and a powder compression function, and a powder leveling means having only a powder leveling function and no powder compression function.

（１）粉末均し機能と粉末圧縮機能を兼ね備えた粉末均し手段
この粉末均し手段は、図４〜図５に示すように、均し具１０が円筒形容器８の閉止面（底面）より小径の円盤状底面を有し、かつ、均し具１０の中心部から離れた部位Ａに上記回転移動部材１１の先端が取付けられており、図５に示すように、円盤状均し具１０を偏心させることにより均し具１０に粉末均し機能が具備され、図６に示すように、均し具１０の円盤状底面で粉末７を押圧することにより粉末圧縮機能が具備されている。 (1) Powder leveling means having both a powder leveling function and a powder compression function As shown in FIGS. 4 to 5, the powder leveling means is configured so that the leveling tool 10 is a closed surface (bottom surface) of the cylindrical container 8. The tip of the rotationally moving member 11 is attached to a portion A having a disk-shaped bottom surface with a smaller diameter and away from the center portion of the leveling tool 10, and as shown in FIG. The powder leveling function is provided in the leveling tool 10 by decentering 10, and the powder compression function is provided by pressing the powder 7 on the disk-shaped bottom surface of the leveling tool 10 as shown in FIG. 6. .

そして、上記回転移動部材１１は、図３に示すように先端が均し具１０に取付けられた回転移動部材本体１３と、該回転移動部材本体１３を回転させながら下方へ移動させる駆動系移動部材１４と、上記駆動系移動部材１４の下端側に設けられたセンサ１４ａとでその主要部が構成されている。   As shown in FIG. 3, the rotary moving member 11 includes a rotary moving member main body 13 having a tip attached to the leveling tool 10, and a drive system moving member that moves the rotary moving member main body 13 downward while rotating the rotary moving member main body 13. 14 and the sensor 14a provided on the lower end side of the drive system moving member 14 constitute the main part.

まず、上記駆動系移動部材１４は、上方側中央にモータ１４ｂを有し、かつ、図示外の単軸ロボットの作用で駆動系移動部材１４全体が上下方向へ移動すると共に、下端側には上記センサ１４ａが取り付けられている。   First, the drive system moving member 14 has a motor 14b at the upper center, and the entire drive system moving member 14 is moved up and down by the action of a single-axis robot (not shown). A sensor 14a is attached.

また、上記回転移動部材本体１３は、直方体形状を有しその中央に空洞部１３ａが設けられていると共に上端に「ドグ」と称される金属板１３ｂが取付けられた本体ハウジング１３ｃと、上記金属板１３ｂと本体ハウジング１３ｃに設けられた開口（図示せず）を介し上記空洞部１３ａに嵌入されその一端側が駆動系移動部材１４のモータ１４ｂに取付けられ他端側が本体ハウジング１３ｃの下方側に取付けられたシャフト１３ｄと、上記空洞部１３ａ内を貫通するシャフト１３ｄに取付けられ該シャフト１３ｄの回転力を本体ハウジング１３ｃに伝達して本体ハウジング１３ｃを回転させると共に上面側が空洞部１３ａの天井面に係合して本体ハウジング１３ｃを上記駆動系移動部材１４に吊下げ保持させる篏合係止部材１３ｅと、上記空洞部１３ａ内の底面と篏合係止部材１３ｅとの間のシャフト１３ｄに取付けられかつ均し具１０に作用してその円盤状底面を押圧するバネ材１３ｆとで構成されている。   The rotationally movable member main body 13 has a rectangular parallelepiped shape, a hollow portion 13a is provided at the center thereof, and a metal plate 13b called a "dog" is attached to the upper end of the main body housing 13c. The hollow portion 13a is fitted into the cavity 13a through an opening (not shown) provided in the plate 13b and the main body housing 13c, and one end side thereof is attached to the motor 14b of the drive system moving member 14, and the other end side is attached to the lower side of the main body housing 13c. The shaft 13d is attached to the shaft 13d penetrating the hollow portion 13a and the rotational force of the shaft 13d is transmitted to the main body housing 13c to rotate the main body housing 13c, and the upper surface side is related to the ceiling surface of the hollow portion 13a. And a mating locking member 13e for suspending and holding the main body housing 13c on the drive system moving member 14; It is composed of a spring member 13f for pressing the disk-shaped bottom surface to act on attached and smoothing device 10 to the shaft 13d between the bottom and the 篏合 locking member 13e of the part 13a.

そして、均し具１０を「粉末の均し高さ位置」へ移動させながら回転させて円筒形容器８内に投入された粉末７を平坦に均す（図５参照）と共に、上記バネ材１３ｆの作用により均し具１０の円盤状底面が押圧されるように構成されている。   Then, the leveling tool 10 is rotated while being moved to the “powder leveling position” to level the powder 7 charged in the cylindrical container 8 (see FIG. 5) and the spring material 13f. It is comprised so that the disk shaped bottom face of the leveling tool 10 may be pressed by this action.

ところで、上記回転移動部材本体１３の本体ハウジング１３ｃが下方へ移動して均し具１０の円盤状底面が円筒形容器８内の粉末７面上に到達すると、上記駆動系移動部材１４に吊下げ保持された本体ハウジング１３ｃの下方への移動は停止されるが、シャフト１３ｄに取付けられた篏合係止部材１３ｅはシャフト１３ｄの移動に伴って下方への移動を継続する。そして、篏合係止部材１３ｅの移動によりバネ材１３ｆが圧縮されて円筒形容器８内の粉末７は均し具１０の円盤状底面により押圧される（図６参照）が、均し具１０の押圧力が高過ぎると粉末７内に埋め込まれたウエハ等の円形板材が破損されてしまう場合がある。このため、図３に示された充填装置の粉末均し手段においては上述したセンサ１４ａが組み込まれている。すなわち、上記回転移動部材本体１３の篏合係止部材１３ｅがシャフト１３ｄの移動に伴って下方へ過剰に移動した場合、上記駆動系移動部材１４のセンサ１４ａも篏合係止部材１３ｅと共に下方へ移動するため、停止している本体ハウジング１３ｃの上端に設けられた「ドグ」と称される金属板１３ｂとセンサ１４ａとの位置がずれて、その異常が検出されるように制御されている。   By the way, when the main body housing 13c of the rotary moving member main body 13 moves downward and the disk-like bottom surface of the leveling tool 10 reaches the surface of the powder 7 in the cylindrical container 8, it is suspended from the drive system moving member 14. Although the downward movement of the held main body housing 13c is stopped, the engagement locking member 13e attached to the shaft 13d continues to move downward as the shaft 13d moves. The spring member 13f is compressed by the movement of the engagement locking member 13e, and the powder 7 in the cylindrical container 8 is pressed by the disk-shaped bottom surface of the leveling tool 10 (see FIG. 6). If the pressing force is too high, a circular plate such as a wafer embedded in the powder 7 may be damaged. For this reason, the above-described sensor 14a is incorporated in the powder leveling means of the filling apparatus shown in FIG. That is, when the engagement locking member 13e of the rotary moving member body 13 moves excessively downward along with the movement of the shaft 13d, the sensor 14a of the drive system moving member 14 also moves downward together with the engagement locking member 13e. In order to move, control is performed such that the position of the metal plate 13b called "dog" provided at the upper end of the stopped main body housing 13c and the sensor 14a are shifted and the abnormality is detected.

更に、円盤状均し具１０の外周面には、図３〜図４に示すように、可撓性材料で構成されたスクレーパ１２が付設されており、円筒形容器８の内壁面に付着した粉末７がスクレーパ１２で削り取られるようになっている。   Further, as shown in FIGS. 3 to 4, a scraper 12 made of a flexible material is attached to the outer peripheral surface of the disk-shaped leveling tool 10, and adheres to the inner wall surface of the cylindrical container 8. The powder 7 is scraped off by the scraper 12.

また、上記粉末均し手段により円筒形容器内の粉末を水平方向へ平坦に均す場合、均し具１０による均し位置、すなわち「粉末の均し高さ位置」を適正に決定（設定）することが重要となる。   When the powder in the cylindrical container is leveled horizontally by the powder leveling means, the leveling position by the leveling tool 10, that is, the “powder leveling position” is appropriately determined (set). It is important to do.

そして、上述した［（粉末の投入量／粉末の嵩密度）÷円筒形容器８の内径面積］から事前に算出される粉末７層における厚み寸法のデータと、後述する円形板材（ウエハ）投入手段の保持具先端における移動距離のデータに基づいて本充填装置における「粉末の均し高さ位置」は適正に決定（設定）されている。   Then, data on the thickness of the powder 7 layer calculated in advance from the above-mentioned [(powder input amount / powder bulk density) / inner diameter area of cylindrical container 8] and circular plate (wafer) input means described later. The “powder leveling position” in the filling device is appropriately determined (set) based on the movement distance data at the tip of the holder.

（２）粉末均し機能のみで粉末圧縮機能を具備しない粉末均し手段
この粉末均し手段は、図７〜図８に示すように、均し具１０が細長で矩形状の底面を有し、かつ、均し具１０の略中央部に回転移動部材１１が取付けられており、図８に示すように矩形状均し具１０の作用により粉末均し機能が具備されている。 (2) Powder leveling means that has only a powder leveling function and does not have a powder compression function. As shown in FIGS. 7 to 8, this powder leveling means has an elongated and rectangular bottom surface as shown in FIGS. And the rotational movement member 11 is attached to the approximate center part of the leveling tool 10, and the powder leveling function is comprised by the effect | action of the rectangular-shaped leveling tool 10, as shown in FIG.

また、矩形状均し具１０の両端には、図７に示すように、可撓性材料で構成されたスクレーパ１２が付設されており、円筒形容器８の内壁面に付着した粉末７がスクレーパ１２で削り取られるようになっている。   Further, as shown in FIG. 7, scrapers 12 made of a flexible material are attached to both ends of the rectangular leveling tool 10, and the powder 7 adhered to the inner wall surface of the cylindrical container 8 is scraper 12. 12 is scraped off.

更に、図１に示すように搬送テーブル１における粉末均し部（粉末均し手段）３と円形板材（ウエハ）投入部（円形板材投入手段）５間に、円筒形容器８の底面と略同径の円盤状底面を有する圧縮具１５とこの圧縮具１５を下方向へ移動させる移動材１６を有する圧縮手段が付設されており、粉末圧縮機能を具備しない上記粉末均し手段を補足して、図９に示すように圧縮具１５の円盤状底面により粉末均し手段で平坦に均された粉末７を押圧するように構成されている。   Further, as shown in FIG. 1, between the powder leveling part (powder leveling means) 3 and the circular plate material (wafer) input part (circular plate material input means) 5 in the transfer table 1, it is substantially the same as the bottom surface of the cylindrical container 8. A compression means having a compression tool 15 having a disk-shaped bottom surface of a diameter and a moving material 16 for moving the compression tool 15 downward is provided, supplementing the powder leveling means not having a powder compression function, As shown in FIG. 9, it is comprised so that the powder 7 averaged by the powder leveling means may be pressed by the disk-shaped bottom face of the compression tool 15.

（３）円筒形アタッチメント
円筒形アタッチメント１７は、図１０〜図１１に示すように、円筒形容器８の開口縁部に嵌合されて円筒形容器８内に投入された粉末７の飛散を防止する部材である。 (3) Cylindrical Attachment As shown in FIGS. 10 to 11, the cylindrical attachment 17 is fitted to the opening edge of the cylindrical container 8 to prevent the powder 7 thrown into the cylindrical container 8 from scattering. It is a member to do.

円筒形容器８の開口縁部に嵌合させる余分な作業が追加されるため、上記円筒形アタッチメント１７は必須の部材ではないが、粉末７の飛散を防止する観点から円筒形アタッチメント１７を適用することが望ましい。   Since an extra work for fitting into the opening edge of the cylindrical container 8 is added, the cylindrical attachment 17 is not an essential member, but the cylindrical attachment 17 is applied from the viewpoint of preventing the powder 7 from scattering. It is desirable.

４．円形板材投入手段
本発明に係る充填装置の円形板材投入手段は、図１２〜図１３に示すように、先端側に１枚の円形板材（ウエハ）６を真空吸引により保持する保持具１８と、該保持具１８を下方向へ移動させる移動部材１９を有しており、上記保持具１８が円筒形容器８内の粉末７上に到達したタイミングに同期させて上記真空吸引を停止し、円形板材（ウエハ）６の保持が開放されるように構成されている。 4). Circular plate material input means As shown in FIGS. 12 to 13, the circular plate material input means of the filling apparatus according to the present invention includes a holder 18 that holds one circular plate material (wafer) 6 at the front end side by vacuum suction, A moving member 19 for moving the holder 18 downward is provided, and the vacuum suction is stopped in synchronization with the timing when the holder 18 reaches the powder 7 in the cylindrical container 8. (Wafer) 6 is configured to be released.

また、上記移動部材１９は、図１２〜図１３に示すように、先端が保持具１８に取付けられた移動部材本体２０と、該移動部材本体２０を下方へ移動させる駆動系部材２１とでその主要部が構成されており、かつ、該駆動系部材２１の下端側にはセンサ２１ａが取り付けられていると共に、図示外の単軸ロボットの作用により駆動系部材２１全体が上下方向へ移動するように構成されている。   Further, as shown in FIGS. 12 to 13, the moving member 19 includes a moving member main body 20 having a tip attached to the holder 18 and a drive system member 21 that moves the moving member main body 20 downward. The main part is configured, and a sensor 21a is attached to the lower end side of the drive system member 21, and the entire drive system member 21 is moved vertically by the action of a single-axis robot (not shown). It is configured.

更に、上記移動部材本体２０は、直方体形状を有しその中央に空洞部２０ａが設けられていると共に上端に「ドグ」と称される金属板２０ｂが取付けられた本体ハウジング２０ｃと、上記金属板２０ｂと本体ハウジング２０ｃに設けられた開口（図示せず）を介し上記空洞部２０ａに嵌入されその一端側が駆動系部材２１に取付けられ他端側が本体ハウジング２０ｃの下方側に取付けられたシャフト２０ｄと、上記空洞部２０ａ内を貫通するシャフト２０ｄに取付けられると共に上面側が空洞部２０ａの天井面に係合して本体ハウジング２０ｃを上記駆動系部材２１に吊下げ保持させる篏合係止部材２０ｅとで構成されている。   Furthermore, the moving member main body 20 has a rectangular parallelepiped shape, a hollow portion 20a is provided at the center thereof, and a main body housing 20c to which a metal plate 20b called "dog" is attached at the upper end, and the metal plate 20b and a shaft 20d fitted into the cavity 20a through an opening (not shown) provided in the main body housing 20c, one end of which is attached to the drive system member 21, and the other end is attached to the lower side of the main body housing 20c. And a mating locking member 20e which is attached to the shaft 20d penetrating through the cavity 20a and whose upper surface engages with the ceiling surface of the cavity 20a to suspend and hold the main body housing 20c on the drive system member 21. It is configured.

そして、上記移動部材本体２０の本体ハウジング２０ｃが下方へ移動して保持具１８に保持された円形板材（ウエハ）６が円筒形容器８内の粉末７面に到達すると、図１３に示すように上記駆動系部材２１に吊下げ保持されている本体ハウジング２０ｃの下方への移動は停止されるが、上記シャフト２０ｄに取付けられた篏合係止部材２０ｅはシャフト２０ｄの移動に伴って下方への移動を継続する。そして、上記移動部材本体２０の篏合係止部材２０ｅがシャフト２０ｄの移動に伴って下方への移動を継続すると駆動系部材２１のセンサ２１ａも篏合係止部材２０ｅと共に下方へ移動し、図１３に示すように停止している本体ハウジング２０ｃの上端に設けられた「ドグ」と称される金属板２０ｂとセンサ２１ａの位置がずれる結果、円形板材（ウエハ）６が円筒形容器８内の粉末７面に到達したタイミングを検出することができ、このタイミングに合わせて真空吸引を停止することで円形板材（ウエハ）６の保持が開放されるように構成されている。   Then, when the main body housing 20c of the moving member main body 20 moves downward and the circular plate (wafer) 6 held by the holder 18 reaches the surface of the powder 7 in the cylindrical container 8, as shown in FIG. The downward movement of the main body housing 20c suspended and held by the drive system member 21 is stopped, but the engagement locking member 20e attached to the shaft 20d moves downward as the shaft 20d moves. Continue moving. When the engagement locking member 20e of the moving member main body 20 continues to move downward as the shaft 20d moves, the sensor 21a of the drive system member 21 also moves downward together with the engagement locking member 20e. As shown in FIG. 13, the position of the sensor 21a is shifted from the position of the sensor 21a with the metal plate 20b called "dog" provided at the upper end of the stopped main body housing 20c. The timing at which the powder 7 surface is reached can be detected, and the holding of the circular plate material (wafer) 6 is released by stopping the vacuum suction in accordance with this timing.

尚、「ドグ」と称される金属板２０ｂとセンサ２１ａの位置ずれが確実に検知されるようにするため、シャフト２０ｄの他端側が取付けられる本体ハウジング２０ｃの下方側取付け部にはシャフト２０ｄの下方側への移動を可能にさせる遊びが設けられている。   In addition, in order to surely detect the positional deviation between the metal plate 20b called "dog" and the sensor 21a, the lower side mounting portion of the main body housing 20c to which the other end side of the shaft 20d is mounted is attached to the shaft 20d. A play is provided to allow downward movement.

ところで、上記移動部材１９の単軸ロボット（図示せず）に保持具１８先端の移動距離を計測して記憶する計測手段が付設された場合、当該円形板材投入工程における円筒形容器８内の円形板材（ウエハ）載置面の位置データを知ることができるため、次の工程で粉末が投入されかつ粉末均し工程で「粉末の均し高さ位置」を決定（設定）する際に上記位置データを利用することが可能となる利点を有する。すなわち、上述の［（粉末の投入量／粉末の嵩密度）÷円筒形容器８の内径面積］から事前に算出される粉末７層における厚み寸法のデータと、上記計測手段で求められた円形板材（ウエハ）載置面の位置データに基づいて上記「粉末の均し高さ位置」を適正に決定（設定）できる利点を有する。   By the way, when a measuring means for measuring and storing the moving distance of the tip of the holder 18 is attached to the single-axis robot (not shown) of the moving member 19, the circular shape in the cylindrical container 8 in the circular plate material charging step. Since the position data of the plate (wafer) mounting surface can be known, the above position is used when the powder is charged in the next step and the “powder leveling position” is determined (set) in the powder leveling step. There is an advantage that data can be used. That is, the data of the thickness dimension in the powder 7 layer calculated in advance from the above-mentioned [(input amount of powder / bulk density of powder) / inner diameter area of cylindrical container 8] and the circular plate material obtained by the measuring means. (Wafer) It has an advantage that the “powder leveling position” can be appropriately determined (set) based on the position data of the mounting surface.

５．制御手段
本発明に係る充填装置の制御手段は少なくとも以下の２つの制御系を備えている。 5. Control means The control means of the filling apparatus according to the present invention comprises at least the following two control systems.

（１）上記粉末投入手段、粉末均し手段（または粉末均し手段と圧縮手段）および円形板材投入手段がそれぞれ設けられた搬送テーブル１の粉末投入部２、粉末均し部３（または粉末均し部３と粉末圧縮部４）、円形板材（ウエハ）投入部５の各箇所に円筒形容器８を繰り返し搬入させる搬送手段（搬送テーブル１）の制御系を設けることを要し、かつ、充填処理が完了した円筒形容器８を搬出しかつ充填処理前の円筒形容器８を搬入させる搬入・搬出装置が組み込まれている場合にはその制御系を有することが好ましい。 (1) The powder charging unit 2 and the powder leveling unit 3 (or the powder leveling unit 3) (or the powder leveling unit) of the conveying table 1 provided with the powder charging unit, the powder leveling unit (or the powder leveling unit and the compression unit), and the circular plate material charging unit, respectively. It is necessary to provide a control system for the transfer means (transfer table 1) for repeatedly carrying the cylindrical container 8 into each part of the processing unit 3 and the powder compression unit 4) and the circular plate material (wafer) input unit 5 and filling. In the case where a loading / unloading device for unloading the cylindrical container 8 that has been processed and loading the cylindrical container 8 before the filling process is incorporated, it is preferable to have the control system.

（２）搬送テーブル１における上記粉末投入部２、粉末均し部３（または粉末均し部３と粉末圧縮部４）、円形板材（ウエハ）投入部５の各箇所において、粉末投入手段、粉末均し手段（または粉末均し手段と圧縮手段）および円形板材投入手段をそれぞれ制御して、粉末投入、粉末均しおよび円形板材投入を繰り返させる制御系を設けることを要する。 (2) In each part of the powder feeding unit 2, the powder leveling unit 3 (or the powder leveling unit 3 and the powder compression unit 4), and the circular plate (wafer) feeding unit 5 in the transfer table 1, powder feeding means, powder It is necessary to provide a control system for controlling the leveling means (or the powder leveling means and the compression means) and the circular plate material feeding means, respectively, to repeat the powder charging, the powder leveling and the circular plate material charging.

本発明に係る充填装置によれば、従来、手作業でなされていた粉末投入作業、粉末均し作業、円形板材投入作業等が機械化されて作業のばらつきに起因する諸問題を解決できるため、ウエハ状態のＬＴ結晶をＡｌとＡｌ2Ｏ3の混合粉末に埋め込み熱処理してＬＴ結晶の体積抵抗率を低下させる処理方法に利用される産業上の利用可能性を有している。 According to the filling apparatus of the present invention, since the powder input operation, the powder leveling operation, the circular plate material input operation, and the like, which have been conventionally performed manually, can be mechanized to solve various problems caused by variations in the operation. The present invention has industrial applicability for use in a processing method in which the LT crystal in a state is embedded in a mixed powder of Al and Al 2 O 3 and heat treated to reduce the volume resistivity of the LT crystal.

１ 搬送テーブル
２ 粉末投入部
３ 粉末均し部
４ 粉末圧縮部
５ 円形板材（ウエハ）投入部
６ 円形板材（ウエハ）
７ 粉末
８ 円筒形容器
９ 粉末供給機
１０ 均し具
１１ 回転移動部材
１２ スクレーパ
１３ 回転移動部材本体
１３ａ 空洞部
１３ｂ 「ドグ」と称される金属板
１３ｃ 本体ハウジング
１３ｄ シャフト
１３ｅ 篏合係止部材
１３ｆ バネ材
１４ 駆動系移動部材
１４ａ センサ
１４ｂ モータ
１５ 圧縮具
１６ 移動材
１７ 円筒形アタッチメント
１８ 保持具
１９ 移動部材
２０ 移動部材本体
２０ａ 空洞部
２０ｂ 「ドグ」と称される金属板
２０ｃ 本体ハウジング
２０ｄ シャフト
２０ｅ 篏合係止部材
２１ 駆動系部材
２１ａ センサ
DESCRIPTION OF SYMBOLS 1 Transfer table 2 Powder input part 3 Powder leveling part 4 Powder compression part 5 Circular plate material (wafer) input part 6 Circular plate material (wafer)
7 Powder 8 Cylindrical container 9 Powder feeder 10 Leveling tool 11 Rotating member 12 Scraper 13 Rotating member main body 13a Cavity 13b Metal plate 13c called "dog" Main body housing 13d Shaft 13e Joint locking member 13f Spring material 14 Drive system moving member 14a Sensor 14b Motor 15 Compressor 16 Moving material 17 Cylindrical attachment 18 Holder 19 Moving member 20 Moving member main body 20a Cavity 20b Metal plate 20c called “dog” Main body housing 20d Shaft 20e Joint locking member 21 Drive system member 21a Sensor

Claims (4)

一端側に円形の開口部を有しかつ他端側が閉止された円筒形容器内に上記開口部と略同一の形状を有する円形板材と定量の粉末を交互に投入して各円形板材間に略等量の粉末を介在させながら円形板材を粉末内に埋め込む充填装置において、
上記円筒形容器を水平方向へ搬送する搬送手段と、
上記円筒形容器の搬送路上に設けられかつ円筒形容器内に定量の粉末を投入する粉末投入手段と、
上記円筒形容器の搬送路上に設けられかつ均し具と該均し具を回転させながら下方向へ移動させる回転移動部材を有すると共に、円筒形容器内に投入された粉末の均し高さ位置において粉末を水平方向へ平坦に均す粉末均し手段と、
上記円筒形容器の搬送路上に設けられかつ先端側に１枚の円形板材を保持する保持具と該保持具を下方向へ移動させる移動部材を有すると共に、上記保持具が円筒形容器内の粉末上に到達するタイミングに同期させて円形板材の保持を開放する円形板材投入手段と、
上記搬送手段を制御して、粉末投入手段、粉末均し手段および円形板材投入手段が設けられた搬送路上の各設置箇所に円筒形容器を繰り返し搬入させると共に、上記粉末投入手段、粉末均し手段および円形板材投入手段をそれぞれ制御して、粉末投入、粉末均しおよび円形板材投入を繰り返させる制御手段、
を具備することを特徴とする充填装置。 In a cylindrical container having a circular opening at one end and closed at the other end, a circular plate having substantially the same shape as that of the opening and a fixed amount of powder are alternately put in between the circular plates. In a filling device that embeds a circular plate in a powder while interposing an equal amount of powder,
Conveying means for conveying the cylindrical container in the horizontal direction;
A powder charging means provided on the conveyance path of the cylindrical container and charging a fixed amount of powder into the cylindrical container;
A leveling position of the powder charged in the cylindrical container, having a leveling tool and a rotationally moving member that moves on the leveling tool while rotating the leveling tool, provided on the conveyance path of the cylindrical container. A powder leveling means for leveling the powder horizontally in
A holder provided on the conveyance path of the cylindrical container and holding a circular plate on the tip side; and a moving member for moving the holder downward; and the holder is a powder in the cylindrical container. A circular plate material input means for releasing the holding of the circular plate material in synchronization with the timing of reaching the top,
The conveying means is controlled so that the cylindrical container is repeatedly carried into each installation location on the conveying path provided with the powder feeding means, the powder leveling means, and the circular plate material feeding means, and the powder feeding means, the powder leveling means And control means for repeating the powder charging, powder leveling and circular plate material charging, respectively controlling the circular plate material charging means,
A filling apparatus comprising: 上記粉末均し手段における均し高さ位置が、円筒形容器内に交互に投入される円形板材の枚数と粉末の層数に対応して変位することを特徴とする請求項１に記載の充填装置。   2. The filling according to claim 1, wherein the leveling height position in the powder leveling means is displaced in accordance with the number of circular plates and the number of powder layers alternately put into a cylindrical container. apparatus. 上記粉末がＡｌとＡｌ2Ｏ3の混合粉末で構成され、上記円形板材がタンタル酸リチウム結晶から成るウエハであることを特徴とする請求項１または２に記載の充填装置。 The powder is constituted by mixed powder of Al and Al 2 O 3, the filling apparatus according to claim 1 or 2, characterized in that the circular plate member is a wafer made of lithium tantalate crystals. 上記円筒形容器の開口縁部に嵌合され、円筒形容器内に投入された粉末の飛散を防止する円筒形アタッチメントが取付けられていることを特徴とする請求項１〜３のいずれかに記載の充填装置。   The cylindrical attachment fitted to the opening edge part of the said cylindrical container, and preventing scattering of the powder thrown in in the cylindrical container is attached. Filling equipment.
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