JP2018073174A - 搬送車 - Google Patents
搬送車 Download PDFInfo
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- JP2018073174A JP2018073174A JP2016213246A JP2016213246A JP2018073174A JP 2018073174 A JP2018073174 A JP 2018073174A JP 2016213246 A JP2016213246 A JP 2016213246A JP 2016213246 A JP2016213246 A JP 2016213246A JP 2018073174 A JP2018073174 A JP 2018073174A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0464—Storage devices mechanical with access from above
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/18—Control systems or devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C1/00—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
- B66C1/10—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by mechanical means
- B66C1/22—Rigid members, e.g. L-shaped members, with parts engaging the under surface of the loads; Crane hooks
- B66C1/28—Duplicate, e.g. pivoted, members engaging the loads from two sides
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C1/00—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles
- B66C1/10—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by mechanical means
- B66C1/62—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by mechanical means comprising article-engaging members of a shape complementary to that of the articles to be handled
- B66C1/66—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by mechanical means comprising article-engaging members of a shape complementary to that of the articles to be handled for engaging holes, recesses, or abutments on articles specially provided for facilitating handling thereof
- B66C1/663—Load-engaging elements or devices attached to lifting or lowering gear of cranes or adapted for connection therewith for transmitting lifting forces to articles or groups of articles by mechanical means comprising article-engaging members of a shape complementary to that of the articles to be handled for engaging holes, recesses, or abutments on articles specially provided for facilitating handling thereof for containers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/04—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack
- B66C13/08—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions
- B66C13/085—Auxiliary devices for controlling movements of suspended loads, or preventing cable slack for depositing loads in desired attitudes or positions electrical
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
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- B66C13/16—Applications of indicating, registering, or weighing devices
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/18—Control systems or devices
- B66C13/22—Control systems or devices for electric drives
- B66C13/23—Circuits for controlling the lowering of the load
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66C—CRANES; LOAD-ENGAGING ELEMENTS OR DEVICES FOR CRANES, CAPSTANS, WINCHES, OR TACKLES
- B66C13/00—Other constructional features or details
- B66C13/18—Control systems or devices
- B66C13/48—Automatic control of crane drives for producing a single or repeated working cycle; Programme control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
- H01L21/67742—Mechanical parts of transfer devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J15/00—Gripping heads and other end effectors
- B25J15/0052—Gripping heads and other end effectors multiple gripper units or multiple end effectors
- B25J15/0061—Gripping heads and other end effectors multiple gripper units or multiple end effectors mounted on a modular gripping structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0208—Control or detection relating to the transported articles
- B65G2203/0258—Weight of the article
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
- B65G47/90—Devices for picking-up and depositing articles or materials
- B65G47/907—Devices for picking-up and depositing articles or materials with at least two picking-up heads
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Automation & Control Theory (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Control Of Velocity Or Acceleration (AREA)
- Control Of Conveyors (AREA)
Abstract
Description
1−1.搬送車の機械的構成
搬送車の第一実施形態について、図面を参照して説明する。
図1及び図2に示すように、搬送車1は、搬送対象物8を搬送対象場所9に搬送する。本実施形態では、搬送車1は、複数の搬送対象場所9を備える搬送設備内において、当該複数の搬送対象場所9のそれぞれに搬送対象物8を搬送する。搬送対象物8は、搬送の対象となるものであり、例えば、単一の物品であっても良いし、収容物と当該収容物を収容する容器等、複数の物品の組み合わせであっても良い。本実施形態では、搬送対象物8は、半導体基板80Tと、半導体基板80Tを収容する容器80と、を含んでいる(図3参照)。
次に、搬送車1の制御構成について、図7を参照して説明する。
搬送車1は、当該搬送車1の作動を制御する個別制御装置HMを備えている。例えば、搬送車1が備えられる搬送設備には、個別制御装置HMを含めた設備全体の制御を行う統括制御装置HTが設けられている。統括制御装置HTは、これら複数の個別制御装置HMを含む搬送設備全体の制御を行う。例えば、統括制御装置HT及び個別制御装置HMは、マイクロコンピュータ等のプロセッサ、メモリ等の周辺回路等を備えている。そして、これらのハードウェアと、コンピュータ等のプロセッサ上で実行されるプログラムと、の協働により、統括制御装置HT及び個別制御装置HMの各機能が実現される。
次に、搬送車1の動作について説明する。
例えば、搬送車1は、統括制御装置HTからの指令を受けて、目的の搬送対象場所9に走行し、目的の搬送対象場所9に対応する載置場所92の上方で停止する。そして、搬送車1は、昇降部5によって搬送対象物8をホームポジション(収容部3の内部)から下降させて、当該搬送対象物8を載置場所92に載置する。本実施形態では、搬送対象物8を載置場所92に載置する過程で、第一下降処理と第二下降処理とを実行する。第一下降処理は、昇降体51の下降量DAに基づいて昇降体51の速度制御を行う処理である。図8に示すように、第一下降処理は、第一フェーズF1において実行される。本例では、第一下降処理は、時刻T3において終了する。そして、第一下降処理を終了すると同時に第二下降処理が実行される。第二下降処理は、搬送対象物8の重量変化に基づいて昇降体51の速度制御を行う処理である。第二下降処理は、第二フェーズF2において実行される。本例では、第二下降処理は、時刻T3において開始され、時刻T5において終了する。
次に、搬送車のその他の実施形態について説明する。
以下、上記において説明した搬送車の概要について説明する。
また、搬送対象物を設定量下降させたことを条件とする場合には、重量検出部のみに頼ることなく判定できる。
また、上記の双方を条件とする場合には、上記の条件のうちいずれかを条件とする場合に比べて、より確実性の高い判定ができる。
2 :走行部
3 :収容部
4 :支持部
5 :昇降部
6S :重量検出部
7S :異常検出部
8 :搬送対象物
51 :昇降体
80 :容器
80T :半導体基板
92 :載置場所
99 :搬送経路
VH :昇降速度(下降速度)
VR :走行速度
W0 :基準重量
W0α :第一設定値
Claims (6)
- 下方に設けられた載置場所に搬送対象物を搬送する搬送車であって、
前記搬送対象物を支持する支持部と、
前記搬送対象物を吊り下げ状態で昇降させる昇降部と、
前記搬送対象物の重量を検出する重量検出部と、を備え、
前記支持部により前記搬送対象物を支持した状態での前記昇降部による前記搬送対象物の下降中に前記重量検出部により検出する検出値が第一設定値以下になった後に、前記搬送対象物の下降速度を増加させ、
その後、前記昇降部による前記搬送対象物の吊り下げ状態の解消後に、前記支持部による前記搬送対象物の支持を解除する搬送車。 - 前記重量検出部により検出する検出値が前記第一設定値よりも小さい第二設定値以下になったこと、及び前記搬送対象物を前記搬送車から前記載置場所までの高さに対応する設定量下降させたこと、の少なくとも一方を条件に、前記昇降部による前記搬送対象物の吊り下げ状態が解消されたと判定する請求項1に記載の搬送車。
- 前記昇降部は、前記搬送対象物を等速で下降させる等速下降が可能であり、
前記重量検出部により検出する検出値が前記第一設定値以下になったか否かの判定は、前記搬送対象物の等速下降中に行う請求項1又は2に記載の搬送車。 - 前記第一設定値は、前記搬送対象物の基準重量に対して設定割合小さい値であり、
前記基準重量は、前記搬送対象物の静止状態で前記重量検出部により検出された検出値である請求項1から3のいずれか一項に記載の搬送車。 - 前記搬送対象物は、半導体基板と、前記半導体基板を収容する容器と、を含んでおり、
前記重量検出部により前記容器に収容された前記半導体基板の有無を少なくとも検出し、
前記重量検出部により前記半導体基板が検出された場合に、前記半導体基板が検出されない場合に比べて前記昇降部による前記搬送対象物の昇降速度を遅くする請求項1から4のいずれか一項に記載の搬送車。 - 天井面に沿って設けられた搬送経路を走行する走行部を備え、
前記搬送対象物は、半導体基板と、前記半導体基板を収容する容器と、を含んでおり、
前記重量検出部により前記容器に収容された前記半導体基板の有無を少なくとも検出し、
前記重量検出部により前記半導体基板が検出された場合に、前記半導体基板が検出されない場合に比べて前記走行部による前記搬送対象物の走行速度を遅くする請求項1から5のいずれか一項に記載の搬送車。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016213246A JP6819224B2 (ja) | 2016-10-31 | 2016-10-31 | 搬送車 |
TW106135939A TWI733929B (zh) | 2016-10-31 | 2017-10-19 | 搬送車 |
KR1020170140132A KR102409578B1 (ko) | 2016-10-31 | 2017-10-26 | 반송차 |
US15/794,046 US10347518B2 (en) | 2016-10-31 | 2017-10-26 | Transport vehicle |
CN201711048615.1A CN108016988B (zh) | 2016-10-31 | 2017-10-31 | 搬运车 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016213246A JP6819224B2 (ja) | 2016-10-31 | 2016-10-31 | 搬送車 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018073174A true JP2018073174A (ja) | 2018-05-10 |
JP6819224B2 JP6819224B2 (ja) | 2021-01-27 |
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Application Number | Title | Priority Date | Filing Date |
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JP2016213246A Active JP6819224B2 (ja) | 2016-10-31 | 2016-10-31 | 搬送車 |
Country Status (5)
Country | Link |
---|---|
US (1) | US10347518B2 (ja) |
JP (1) | JP6819224B2 (ja) |
KR (1) | KR102409578B1 (ja) |
CN (1) | CN108016988B (ja) |
TW (1) | TWI733929B (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2020174846A1 (ja) * | 2019-02-26 | 2020-09-03 | 村田機械株式会社 | 移載装置及び天井搬送車 |
JP2022187998A (ja) * | 2021-06-08 | 2022-12-20 | セメス カンパニー,リミテッド | 搬送ユニット、物品搬送システム、及び搬送ユニットの制御方法 |
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JP7305258B2 (ja) | 2018-07-18 | 2023-07-10 | 株式会社ディスコ | 搬送システム |
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KR102231176B1 (ko) * | 2019-12-27 | 2021-03-24 | 세메스 주식회사 | 물품 이송 장치 |
KR20220150968A (ko) * | 2020-03-13 | 2022-11-11 | 무라다기카이가부시끼가이샤 | 그리퍼 장치, 반송차, 및 반송 방법 |
KR20240005384A (ko) | 2022-07-05 | 2024-01-12 | 주식회사 케이씨텍 | 하이브리드 자동 주행 장치 |
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CN108016988A (zh) | 2018-05-11 |
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US20180122656A1 (en) | 2018-05-03 |
JP6819224B2 (ja) | 2021-01-27 |
US10347518B2 (en) | 2019-07-09 |
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KR20180048346A (ko) | 2018-05-10 |
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