JP2017514279A - Oled用の被支持透明電極 - Google Patents
Oled用の被支持透明電極 Download PDFInfo
- Publication number
- JP2017514279A JP2017514279A JP2016563841A JP2016563841A JP2017514279A JP 2017514279 A JP2017514279 A JP 2017514279A JP 2016563841 A JP2016563841 A JP 2016563841A JP 2016563841 A JP2016563841 A JP 2016563841A JP 2017514279 A JP2017514279 A JP 2017514279A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- refractive index
- oled
- high refractive
- tco
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000003298 dental enamel Anatomy 0.000 claims abstract description 58
- 239000011521 glass Substances 0.000 claims abstract description 26
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 230000004888 barrier function Effects 0.000 claims abstract description 23
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 18
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 18
- 238000000034 method Methods 0.000 claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 claims abstract description 7
- 229910052751 metal Inorganic materials 0.000 claims description 46
- 239000002184 metal Substances 0.000 claims description 46
- 238000000231 atomic layer deposition Methods 0.000 claims description 31
- 239000002253 acid Substances 0.000 claims description 24
- 238000005530 etching Methods 0.000 claims description 22
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 16
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 11
- 229910015902 Bi 2 O 3 Inorganic materials 0.000 claims description 10
- GEIAQOFPUVMAGM-UHFFFAOYSA-N ZrO Inorganic materials [Zr]=O GEIAQOFPUVMAGM-UHFFFAOYSA-N 0.000 claims description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 abstract 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(iii) oxide Chemical compound O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 130
- 230000007547 defect Effects 0.000 description 12
- 239000000203 mixture Substances 0.000 description 8
- 238000004544 sputter deposition Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 6
- 238000000151 deposition Methods 0.000 description 6
- 239000002243 precursor Substances 0.000 description 6
- 238000001878 scanning electron micrograph Methods 0.000 description 6
- 150000007513 acids Chemical class 0.000 description 5
- 229910052797 bismuth Inorganic materials 0.000 description 5
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000605 extraction Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 238000002347 injection Methods 0.000 description 3
- 239000007924 injection Substances 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 3
- 239000011787 zinc oxide Substances 0.000 description 3
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 2
- 229910006404 SnO 2 Inorganic materials 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- QZPSXPBJTPJTSZ-UHFFFAOYSA-N aqua regia Chemical compound Cl.O[N+]([O-])=O QZPSXPBJTPJTSZ-UHFFFAOYSA-N 0.000 description 2
- 239000002585 base Substances 0.000 description 2
- 238000003486 chemical etching Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 239000012044 organic layer Substances 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920001467 poly(styrenesulfonates) Polymers 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000003570 air Substances 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- 239000012080 ambient air Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000000635 electron micrograph Methods 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000013067 intermediate product Substances 0.000 description 1
- 210000005024 intraepithelial lymphocyte Anatomy 0.000 description 1
- 201000001091 isolated ectopia lentis Diseases 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- KYKLWYKWCAYAJY-UHFFFAOYSA-N oxotin;zinc Chemical compound [Zn].[Sn]=O KYKLWYKWCAYAJY-UHFFFAOYSA-N 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 230000001846 repelling effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/60—Forming conductive regions or layers, e.g. electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/805—Electrodes
- H10K50/81—Anodes
- H10K50/814—Anodes combined with auxiliary electrodes, e.g. ITO layer combined with metal lines
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/02—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass
- C03C17/04—Surface treatment of glass, not in the form of fibres or filaments, by coating with glass by fritting glass powder
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/85—Arrangements for extracting light from the devices
- H10K50/854—Arrangements for extracting light from the devices comprising scattering means
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/10—Transparent electrodes, e.g. using graphene
- H10K2102/101—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO]
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/10—Transparent electrodes, e.g. using graphene
- H10K2102/101—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO]
- H10K2102/102—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO] comprising tin oxides, e.g. fluorine-doped SnO2
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
- H10K2102/351—Thickness
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Manufacturing & Machinery (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Electroluminescent Light Sources (AREA)
- Non-Insulated Conductors (AREA)
Abstract
Description
(i)無機ガラス製の透明基材、
(ii)少なくとも30重量%のBi2O3を含む高屈折率エナメルから形成された散乱層、
(iii)ALDにより被着された、Al2O3、TiO2、ZrO2及びHfO2からなる群より選ばれた少なくとも1種の誘電性金属酸化物のバリア層、及び、
(iv)透明導電性酸化物(TCO)の層、
を連続して含む、OLED用の被支持透明電極である。
・無機ガラス製の透明基材、
・少なくとも30重量%のBi2O3を含む高屈折率エナメルから形成された散乱層、
・ALDにより被着された、Al2O3、TiO2、ZrO2及びHfO2からなる群より選ばれた少なくとも1種の誘電性金属酸化物のバリア層、
・透明導電性酸化物(TCO)の層、及び、
・TCO層と直接接触している金属グリッド、
を順に含む。
・無機ガラス製の透明基材、
・少なくとも30重量%のBi2O3を含む高屈折率エナメルから形成された散乱層、
・ALDにより被着された、Al2O3、TiO2及びZrO2からなる群より選ばれた少なくとも1種の誘電性金属酸化物のバリア層、
・TCO層と直接接触している金属グリッド、及び、
・透明導電性酸化物(TCO)の層、
を連続して含む。
・散乱性要素が分散されている高屈折率のエナメル層、及び、
・異なる屈折率の2つの媒体の間の粗い界面、典型的には、高屈折率エナメル層で覆われた特定の粗さの表面構造を有するガラスの表面、
を包含する。
(a)少なくとも30重量%のBi2O3を含む高屈折率エナメルから形成された散乱層を一方の面上で支持する透明基材を提供する工程、
(b)原子層堆積(ALD)により、前記高屈折率エナメル上にそれと直接接触させて、Al2O3、TiO2、ZrO2及びHfO2からなる群より選ばれる少なくとも1種の誘電性金属酸化物の層(バリア層)を形成する工程、及び、
(c)前記誘電性金属酸化物層(b)の上にTCO層を形成する工程、
を含む。
Claims (11)
- OLED用の被支持透明電極であって、
(i)無機ガラス製の透明基材、
(ii)少なくとも30重量%のBi2O3を含む高屈折率エナメルから形成された散乱層、
(iii)ALDにより被着された、Al2O3、TiO2、ZrO2及びHfO2からなる群より選ばれた少なくとも1種の誘電性金属酸化物のバリア層、及び、
(iv)透明導電性酸化物(TCO)の層、
を連続して含む、OLED用の被支持透明電極。 - ALDにより被着されたバリア層が複数のAl2O3層を、TiO2、ZrO2及びHfO2から選ばれるより高い屈折率(n>2)の酸化物の層と交互に含むことを特徴とする、請求項1記載の電極。
- TCO層の下又は上にあり、それと直接接触している金属グリッドをさらに含むことを特徴とする、請求項1又は2記載の電極。
- ALDにより被着されたバリア層の厚さが5nmと200nmの間、好ましくは10nmと100nmの間であることを特徴とする、請求項1〜3のいずれか1項記載の電極。
- 散乱層を形成する高屈折率エナメルが、層の厚さを通して分散されている光を散乱する要素を含むことを特徴とする、請求項1〜4のいずれか1項記載の電極。
- 高屈折率エナメルとより低屈折率の下層の媒体との界面が、算術平均偏差Raが少なくとも0.1μmであり、好ましくは0.2μmと5μmの間、特に0.3μmと3μmの間である粗さプロファイルを有することを特徴とする、請求項1〜5のいずれか1項記載の電極。
- 請求項1〜6のいずれか1項記載の電極を含むOLED。
- 請求項1〜7のいずれか1項記載のOLED用被支持透明電極の製造方法であって、下記の一連の工程、すなわち、
(a)少なくとも30重量%のBi2O3を含む高屈折率エナメルから形成された散乱層を一方の面上で支持する透明基材を提供する工程、
(b)原子層堆積(ALD)により、前記高屈折率エナメル上にそれと直接接触させて、Al2O3、TiO2、ZrO2及びHfO2からなる群より選ばれる少なくとも1種の誘電性金属酸化物のバリア層を形成する工程、及び、
(c)前記誘電性金属酸化物層(b)の上に透明導電性酸化物(TCO)の層を形成する工程、
を含む、OLED用被支持透明電極の製造方法。 - 前記透明導電性酸化物の層と直接接触する金属グリッドを形成する工程(d)であって、少なくとも1つの酸エッチングの工程を含む工程(d)をさらに含むことを特徴とする、請求項7記載の方法。
- 工程(d)を工程(b)の後でかつ工程(c)の前に行って、金属グリッドが誘電性金属酸化物バリア層とTCO層の両方に接触するようにすることを特徴とする、請求項8記載の方法。
- 工程(d)を工程(c)の後に行って、金属グリッドがTCO層と接触するが金属酸化物バリア層とは接触しないようにすることを特徴とする、請求項8記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1453584A FR3020179B1 (fr) | 2014-04-22 | 2014-04-22 | Electrode supportee transparente pour oled |
FR1453584 | 2014-04-22 | ||
PCT/FR2015/051069 WO2015162367A1 (fr) | 2014-04-22 | 2015-04-20 | Electrode supportee transparente pour oled |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2017514279A true JP2017514279A (ja) | 2017-06-01 |
JP2017514279A5 JP2017514279A5 (ja) | 2018-05-17 |
JP6684225B2 JP6684225B2 (ja) | 2020-04-22 |
Family
ID=50976932
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016563841A Expired - Fee Related JP6684225B2 (ja) | 2014-04-22 | 2015-04-20 | Oled用の被支持透明電極 |
Country Status (10)
Country | Link |
---|---|
US (1) | US10319934B2 (ja) |
EP (1) | EP3134929B1 (ja) |
JP (1) | JP6684225B2 (ja) |
KR (1) | KR20160145596A (ja) |
CN (1) | CN106463641B (ja) |
ES (1) | ES2702210T3 (ja) |
FR (1) | FR3020179B1 (ja) |
RU (1) | RU2685086C2 (ja) |
TW (1) | TWI663761B (ja) |
WO (1) | WO2015162367A1 (ja) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3082172A1 (en) | 2015-04-16 | 2016-10-19 | Saint-Gobain Glass France | Layered structure for an oled and a method for producing such a structure |
CN112876078A (zh) * | 2021-04-14 | 2021-06-01 | 亚细亚建筑材料股份有限公司 | 一种高透感面釉 |
US11527732B1 (en) * | 2022-05-31 | 2022-12-13 | Applied Materials, Inc. | OLED anode structures including amorphous transparent conducting oxides and OLED processing method comprising the same |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002343562A (ja) * | 2001-05-11 | 2002-11-29 | Pioneer Electronic Corp | 発光ディスプレイ装置及びその製造方法 |
JP2012521623A (ja) * | 2009-03-24 | 2012-09-13 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | オプトエレクトロニクス素子のための薄膜カプセル封入並びにその製造方法、及びオプトエレクトロニクス素子 |
WO2012147685A1 (ja) * | 2011-04-28 | 2012-11-01 | 旭硝子株式会社 | 有機el素子、透光性基板および有機led素子の製造方法 |
JP2013518361A (ja) * | 2010-01-22 | 2013-05-20 | サン−ゴバン グラス フランス | 電極コーティングの下の高屈折率層でコーティングされたガラス基材およびその基材を含む有機発光デバイス |
JP2013114802A (ja) * | 2011-11-25 | 2013-06-10 | Samsung Yokohama Research Institute Co Ltd | 発光素子基板とその製造方法、面発光素子、照明器具およびバックライト |
WO2013117862A1 (fr) * | 2012-02-10 | 2013-08-15 | Saint-Gobain Glass France | Electrode supportee transparente pour oled |
WO2013147572A1 (ko) * | 2012-03-30 | 2013-10-03 | 주식회사 엘지화학 | 유기전자소자용 기판 |
WO2014013183A1 (fr) * | 2012-07-17 | 2014-01-23 | Saint-Gobain Glass France | Electrode supportee transparente pour oled |
Family Cites Families (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1360522A (fr) | 1962-06-15 | 1964-05-08 | Automotive Prod Co Ltd | Système de freinage fonctionnant par une pression de liquide pour véhicules |
JP2000231985A (ja) * | 1999-02-12 | 2000-08-22 | Denso Corp | 有機el素子 |
US20060154550A1 (en) | 2002-10-16 | 2006-07-13 | Nellissen Antonius J M | Method for manufacturing a light emitting display |
WO2005053053A1 (en) | 2003-11-26 | 2005-06-09 | Koninklijke Philips Electronics N.V. | Light-emitting device comprising an etch-protective layer |
US7508130B2 (en) * | 2005-11-18 | 2009-03-24 | Eastman Kodak Company | OLED device having improved light output |
EP1916725A1 (en) | 2006-10-27 | 2008-04-30 | Nederlandse Organisatie voor toegepast-natuurwetenschappelijk Onderzoek TNO | Organic light emitting diode device with multilayer seal |
KR101548025B1 (ko) * | 2007-07-27 | 2015-08-27 | 아사히 가라스 가부시키가이샤 | 투광성 기판, 그의 제조 방법, 유기 led 소자 및 그의 제조 방법 |
WO2009116531A1 (ja) * | 2008-03-18 | 2009-09-24 | 旭硝子株式会社 | 電子デバイス用基板、有機led素子用積層体及びその製造方法、有機led素子及びその製造方法 |
DE102009022900A1 (de) * | 2009-04-30 | 2010-11-18 | Osram Opto Semiconductors Gmbh | Optoelektronisches Bauelement und Verfahren zu dessen Herstellung |
WO2011046190A1 (ja) * | 2009-10-15 | 2011-04-21 | 旭硝子株式会社 | 有機led素子、有機led素子の散乱層用のガラスフリット及び有機led素子の散乱層の製造方法 |
WO2011046156A1 (ja) * | 2009-10-15 | 2011-04-21 | 旭硝子株式会社 | 有機led素子の散乱層用ガラス及びそれを用いた有機led素子 |
RU2408957C1 (ru) * | 2009-11-25 | 2011-01-10 | Российская Федерация, от имени которой выступает государственный заказчик - Министерство промышленности и торговли Российской Федерации (Минпромторг России) | Органический светоизлучающий диод |
KR20130044227A (ko) * | 2010-04-08 | 2013-05-02 | 아사히 가라스 가부시키가이샤 | 유기 led 소자, 투광성 기판, 및 유기 led 소자의 제조 방법 |
KR20130143547A (ko) * | 2010-07-16 | 2013-12-31 | 에이쥐씨 글래스 유럽 | 유기발광소자용 반투명 전도성 기재 |
CN103026785A (zh) * | 2010-07-26 | 2013-04-03 | 旭硝子株式会社 | 有机led元件的散射层用玻璃及有机led元件 |
FR2963705B1 (fr) * | 2010-08-06 | 2012-08-17 | Saint Gobain | Support a couche diffusante pour dispositif a diode electroluminescente organique, dispositif electroluminescent organique comportant un tel support |
WO2012133832A1 (ja) * | 2011-03-31 | 2012-10-04 | 旭硝子株式会社 | 有機led素子、透光性基板、および透光性基板の製造方法 |
JPWO2013054820A1 (ja) * | 2011-10-14 | 2015-03-30 | 旭硝子株式会社 | 有機led素子の散乱層用ガラス、有機led素子用の積層基板及びその製造方法、並びに有機led素子及びその製造方法 |
EP2773164B1 (en) * | 2011-10-28 | 2019-10-02 | AGC Inc. | Laminated substrate for organic led element, and organic led element |
KR101715112B1 (ko) * | 2012-06-14 | 2017-03-10 | 쌩-고벵 글래스 프랑스 | Oled 소자용 적층체, 그 제조방법 및 이를 구비한 oled 소자 |
EP2712851B1 (en) * | 2012-09-28 | 2015-09-09 | Saint-Gobain Glass France | Method of producing a transparent diffusive oled substrate |
JP6449788B2 (ja) | 2013-02-25 | 2019-01-09 | サン−ゴバン グラス フランス | 有機発光ダイオードを有するデバイスのための基材 |
-
2014
- 2014-04-22 FR FR1453584A patent/FR3020179B1/fr not_active Expired - Fee Related
-
2015
- 2015-03-31 TW TW104110455A patent/TWI663761B/zh not_active IP Right Cessation
- 2015-04-20 JP JP2016563841A patent/JP6684225B2/ja not_active Expired - Fee Related
- 2015-04-20 CN CN201580018195.5A patent/CN106463641B/zh not_active Expired - Fee Related
- 2015-04-20 KR KR1020167029067A patent/KR20160145596A/ko not_active Application Discontinuation
- 2015-04-20 WO PCT/FR2015/051069 patent/WO2015162367A1/fr active Application Filing
- 2015-04-20 EP EP15723259.6A patent/EP3134929B1/fr not_active Not-in-force
- 2015-04-20 US US15/305,529 patent/US10319934B2/en not_active Expired - Fee Related
- 2015-04-20 ES ES15723259T patent/ES2702210T3/es active Active
- 2015-04-20 RU RU2016145417A patent/RU2685086C2/ru active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002343562A (ja) * | 2001-05-11 | 2002-11-29 | Pioneer Electronic Corp | 発光ディスプレイ装置及びその製造方法 |
JP2012521623A (ja) * | 2009-03-24 | 2012-09-13 | オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング | オプトエレクトロニクス素子のための薄膜カプセル封入並びにその製造方法、及びオプトエレクトロニクス素子 |
JP2013518361A (ja) * | 2010-01-22 | 2013-05-20 | サン−ゴバン グラス フランス | 電極コーティングの下の高屈折率層でコーティングされたガラス基材およびその基材を含む有機発光デバイス |
WO2012147685A1 (ja) * | 2011-04-28 | 2012-11-01 | 旭硝子株式会社 | 有機el素子、透光性基板および有機led素子の製造方法 |
JP2013114802A (ja) * | 2011-11-25 | 2013-06-10 | Samsung Yokohama Research Institute Co Ltd | 発光素子基板とその製造方法、面発光素子、照明器具およびバックライト |
WO2013117862A1 (fr) * | 2012-02-10 | 2013-08-15 | Saint-Gobain Glass France | Electrode supportee transparente pour oled |
WO2013147572A1 (ko) * | 2012-03-30 | 2013-10-03 | 주식회사 엘지화학 | 유기전자소자용 기판 |
WO2014013183A1 (fr) * | 2012-07-17 | 2014-01-23 | Saint-Gobain Glass France | Electrode supportee transparente pour oled |
Also Published As
Publication number | Publication date |
---|---|
FR3020179B1 (fr) | 2017-10-06 |
ES2702210T3 (es) | 2019-02-27 |
RU2016145417A3 (ja) | 2018-11-19 |
TW201605095A (zh) | 2016-02-01 |
JP6684225B2 (ja) | 2020-04-22 |
KR20160145596A (ko) | 2016-12-20 |
CN106463641A (zh) | 2017-02-22 |
EP3134929A1 (fr) | 2017-03-01 |
RU2016145417A (ru) | 2018-05-23 |
US20170040565A1 (en) | 2017-02-09 |
RU2685086C2 (ru) | 2019-04-16 |
EP3134929B1 (fr) | 2018-09-19 |
US10319934B2 (en) | 2019-06-11 |
WO2015162367A1 (fr) | 2015-10-29 |
FR3020179A1 (fr) | 2015-10-23 |
CN106463641B (zh) | 2018-09-28 |
TWI663761B (zh) | 2019-06-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5742838B2 (ja) | 有機led素子、透光性基板、および有機led素子の製造方法 | |
JP5998124B2 (ja) | 有機led素子、透光性基板、および透光性基板の製造方法 | |
JP6582981B2 (ja) | 透光性基板、有機led素子、透光性基板の製造方法 | |
JP2006253106A (ja) | カラー有機elディスプレイおよびその製造方法 | |
WO2012057043A1 (ja) | 有機el素子、透光性基板、および有機el素子の製造方法 | |
WO2013054820A1 (ja) | 有機led素子の散乱層用ガラス、有機led素子用の積層基板及びその製造方法、並びに有機led素子及びその製造方法 | |
Kim et al. | An efficient nano-composite layer for highly transparent organic light emitting diodes | |
JP2017514279A (ja) | Oled用の被支持透明電極 | |
TW201324900A (zh) | 有機led元件用積層基板及有機led元件 | |
WO2013137403A1 (ja) | 有機led素子、透光性基板、および透光性基板の製造方法 | |
EP2172991A1 (en) | OLED with a composite semi-transparent electrode to enhance light-extraction over a large range of wavelengths | |
TW202043496A (zh) | 反射陽極電極、薄膜電晶體、有機el顯示器及濺鍍靶材 | |
JP2011040173A (ja) | 有機エレクトロルミネセンス装置 | |
JP5173769B2 (ja) | 有機el素子の製造方法 | |
WO2014112414A1 (ja) | 透光性基板の製造方法、透光性基板、および有機led素子 | |
TW200911020A (en) | Manufacturing method for upper luminance type organic LED using periodic metallic anode structure collacted with aluminum |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20180328 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20180328 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20190128 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20190205 |
|
A601 | Written request for extension of time |
Free format text: JAPANESE INTERMEDIATE CODE: A601 Effective date: 20190418 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20190805 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20200107 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20200204 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20200213 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20200303 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20200327 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6684225 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |