JP2017500743A - 低雑音の量子的検出素子およびそのような光子検出素子の製造方法 - Google Patents
低雑音の量子的検出素子およびそのような光子検出素子の製造方法 Download PDFInfo
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- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 37
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- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- -1 InAs Chemical compound 0.000 description 1
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Abstract
Description
、照射光がないときに光子検出器を流れる電流、と定義する。暗電流の主な原因には、一方では真正の原因(少数キャリアの拡散電流や、電荷の放射型または非放射型の生成−再結合から生じる電流など)と、他方では製造法に関係する原因(半導体の欠陥上の非放射型再結合から生じる電流(これはSRH電流と呼ばれ、特に表面や界面において強い)など)とがある。
−PN接合またはPIN接合を形成する、半導体層のスタックであって
カットオフ波長λc>λ0を有する吸収材半導体でできた少なくとも1つの層と、
共振光キャビティを形成する半導体層のスタックと、
を含むスタックと、
−前記入射放射と前記光キャビティとをカップリングする構造と、
を備え、
前記カップリングする構造は、
・前記中心波長λ0において共振を形成し、前記共振により、前記中心波長において前記吸収材半導体層において80%を上回る吸収を実現し、
・放射波長λradにおいては共振を形成せず、
前記放射波長は、動作温度において放射型再性結合率が最大となる波長であることを特徴とする光子検出素子に関する。
−エピタキシーされた構造の基板(a substrate of an epitaxied structure)上に、半導体でできた層のスタックであって、
カットオフ波長λc>λ0を有する、吸収材となる半導体でできた少なくとも1つの層と、
誘電体でできた上層と、を含むスタックを形成するステップと、
−カップリング回折格子を形成する誘電体でできた前記上層を構築するステップと、
−前記カップリング回折格子上に、金属反射層を堆積するステップと、
−前記検出素子の前面を形成するために、前記基板を除去するステップと、
を備える方法に関する。
− λ≒1.5μmにおけるInAlAs/InGaAs;
− λ≒0.9μmにおけるAlGaAs/GaAs;
− λ≒0.9μmにおけるGaInP/GaAs;
− 3−5μm帯での[SR InAs/AlSb]/[SR InAs/GaSb];
− 3−5μmおよび8−12μm帯でのHgCdTe/HgCdTe;
− λ≒1.5μmにおけるInPとInAlAs/GaAsSb
Claims (15)
- 中心波長λ0の周囲に集中したスペクトル帯の入射放射のための量子的光子検出素子であって、前記放射を受けることを意図した前面を示し、
−PN接合またはPIN接合を形成する、半導体層のスタックであって
カットオフ波長λc>λ0を有する吸収材半導体でできた少なくとも1つの層と、
共振光キャビティを形成する半導体層のスタックと、
を含むスタックと、
−前記入射放射と前記光キャビティとをカップリングする構造と、
を備え、
前記カップリングする構造は、
・前記中心波長λ0において共振を形成し、前記共振により、前記中心波長において前記吸収材半導体層において80%を上回る吸収を実現し、
・放射波長λradにおいては共振を形成せず、
前記放射波長は、動作温度において放射型再性結合率が最大となる波長である
ことを特徴とする光子検出素子。 - 請求項1に記載の光子検出素子であって、
前記中心波長における共振は、前記吸収材半導体層内に存在する
ことを特徴とする光子検出素子。 - 請求項1または2に光子検出素子であって、
前記入射放射と前記光キャビティとをカップリングする前記構造は、前記放射波長λradにおいて、前記吸収材半導体層内での吸収が減少するのに適し、
前記減少はexp(ΔE/kT)を上回り、
前記ΔEは、前記λradと前記λ0との間におけるエネルギー差である
ことを特徴とする光子検出素子。 - 請求項1から3のいずれか一項に記載の光子検出素子であって、
前記入射放射と前記光キャビティとをカップリングする前記構造は、前記放射波長λradにおいて、前記収材半導体層内で***振を形成する
ことを特徴とする光子検出素子。 - 請求項1から4のいずれか一項に記載の光子検出素子であって、
前記光キャビティは導波路であり、前記カップリング構造は、前面、および/または、後面に、カップリング回折格子を備え、
前記後面は前記光キャビティの側面であって、前記前面を支えるのと反対側である
ことを特徴とする光子検出素子。 - 請求項5に記載の光子検出素子であって、
前記導波路の厚さは、λ0/8nとλ0/nとの間にあり、有利にはλ0/4nと3λ0/4nとの間にあり、
前記nは、前記導波路を形成する半導体の単一の層または複数の層の屈折率の実数部分の平均値である
ことを特徴とする光子検出素子。 - 請求項5または6に記載の光子検出素子であって、
前記単一または複数のカップリング回折格子は、周期がλ0/nとλ0/n1との間である周期的構造を持ち、
前記nは、前記導波路を形成する半導体の単一の層または複数の層の屈折率の実数部分の平均値であり、
前記n1は、放射が入射する媒質の屈折率の実数部分である
ことを特徴とする光子検出素子。 - 請求項1から7のいずれか一項に記載の光子検出素子であって、
前記光キャビティの側面であって、前記前面を支える側と反対側の側面に配置された金属反射層をさらに備える
ことを特徴とする光子検出素子。 - 請求項1から8のいずれか一項に記載の光子検出素子であって、
PN型またはPIN型のヘテロ接合を形成する半導体でできた層のスタックを備え、
前記スタックは前記光キャビティを形成する半導体でできた単一の層または複数の層を有する
ことを特徴とする光子検出素子。 - 請求項9に記載の光子検出素子であって、
前記ヘテロ接合はバリア層を備える
ことを特徴とする光子検出素子。 - 請求項10に記載の光子検出素子であって、
少なくとも1つの前記バリア層が、層の少なくとも一部の上に構成され、その結果、前記光キャビティとのカップリングのための回折格子を形成する
ことを特徴とする光子検出素子。 - 請求項1から11のいずれかに記載の光子検出素子であって、
赤外線のIバンド、IIバンドまたはIIIバンドのいずれか1つを検出するのに適する
ことを特徴とする光子検出素子。 - 赤外線検出器であって、
請求項1から12のいずれか一項に記載の量子的光子検出素子の構成部品の組み合わせを有する
ことを特徴とする赤外線検出器。 - 請求項1から12のいずれか一項に記載の量子的光子検出素子を製造する方法であって、
−エピタキシーされた構造の基板(a substrate of an epitaxied structure)上に、半導体でできた層のスタックであって、
カットオフ波長λc>λ0を有する、吸収材となる半導体でできた少なくとも1つの層と、
誘電体でできた上層と、を含むスタックを形成するステップと、
−カップリング回折格子を形成する誘電体でできた前記上層を構築するステップと、
−前記カップリング回折格子上に、金属反射層を堆積するステップと、
−前記検出素子の前面を形成するために、前記基板を除去するステップと、
を備えることを特徴とする方法。 - 請求項14に記載の製造方法であって、
前記エピタキシーされた構造を形成するステップは、有機金属プロセスによるエピタキシーを含む
ことを特徴とする方法。
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EP3261130B1 (en) * | 2016-06-20 | 2020-11-18 | ams AG | Photodetector device with integrated high-contrast grating polarizer |
FR3069956B1 (fr) * | 2017-08-03 | 2019-09-06 | Thales | Detecteur infrarouge ameliore |
FI3769343T3 (fi) * | 2018-03-22 | 2023-09-01 | Iee Sa | Valoilmaisin |
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FR3118288B1 (fr) * | 2020-12-23 | 2022-12-30 | Thales Sa | Integration d'un circuit de detection a base de resonateurs optiques interconnectes sur un circuit de lecteure d'un imageur |
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