JP2017213866A - Scribing wheel and method for manufacturing the same - Google Patents

Scribing wheel and method for manufacturing the same Download PDF

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JP2017213866A
JP2017213866A JP2017081510A JP2017081510A JP2017213866A JP 2017213866 A JP2017213866 A JP 2017213866A JP 2017081510 A JP2017081510 A JP 2017081510A JP 2017081510 A JP2017081510 A JP 2017081510A JP 2017213866 A JP2017213866 A JP 2017213866A
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scribing wheel
base material
wheel base
diamond film
diamond
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JP6504196B2 (en
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正明 北沢
Masaaki Kitazawa
正明 北沢
清文 宮川
Kiyofumi Miyagawa
清文 宮川
留井　直子
Naoko Tomei
直子 留井
弘義 林
Hiroyoshi Hayashi
弘義 林
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Mitsuboshi Diamond Industrial Co Ltd
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Mitsuboshi Diamond Industrial Co Ltd
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/22—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising
    • B28D1/225—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by cutting, e.g. incising for scoring or breaking, e.g. tiles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/10—Glass-cutting tools, e.g. scoring tools
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00—Severing cooled glass
    • C03B33/10—Glass-cutting tools, e.g. scoring tools
    • C03B33/105—Details of cutting or scoring means, e.g. tips
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mining & Mineral Resources (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Laser Beam Processing (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a scribing wheel that can improve sliding resistance in use by enhancing yield of a scribing wheel and prevents breakage of a wheel holder.SOLUTION: A method for manufacturing a scribing wheel includes: forming a diamond film 17 at an inclined plane of a scribing wheel substrate 12 via a pair of spacers; and, after forming the diamond film, irradiating an annular region 15a part to be a boundary between the inclined plane to which the film adheres, and lateral faces 15, 16 with a laser beam to remove it and, at the same time, forming an annular groove in the same part of the substrate.SELECTED DRAWING: Figure 5

Description

本発明は脆性材料基板に圧接・転動させてスクライブするためのスクライビングホイール及びその製造方法に関するものである。   The present invention relates to a scribing wheel for scribing by pressing and rolling on a brittle material substrate and a method for manufacturing the scribing wheel.

従来のスクライビングホイールは、超硬合金製又は多結晶焼結ダイヤモンド（以下、ＰＣＤという）製の円板を基材としている。ＰＣＤはダイヤモンド粒子をコバルトなどと共に焼結させたものである。スクライビングホイールは基材となる円板の両側より円周のエッジを互いに斜めに削り込み、円周面にV字形の刃先を形成したものである。このようにして形成されたスクライビングホイールをスクライブ装置のスクライブヘッド等に回転自在に軸着して脆性材料基板に所定の荷重で押し付け、脆性材料基板の面に沿って移動させることで、転動させながらスクライブすることができる。   Conventional scribing wheels are based on a disc made of cemented carbide or polycrystalline sintered diamond (hereinafter referred to as PCD). PCD is obtained by sintering diamond particles together with cobalt or the like. The scribing wheel is formed by cutting the circumferential edges obliquely from both sides of a disk as a base material to form a V-shaped cutting edge on the circumferential surface. The scribing wheel formed in this way is rotatably attached to a scribing head of a scribing device, pressed against the brittle material substrate with a predetermined load, and moved along the surface of the brittle material substrate to roll it. You can scribe while.

特許文献１にはガラス基板を切断するためのガラス切断用刃に関し、その寿命を長くするために、V字形状の刃先表面をダイヤモンドで被膜したガラス切断用刃が開示されている。このガラス切断用刃は、ダイヤモンドと相性の良いセラミックで形成された刃先表面にダイヤモンド膜を被覆し、このダイヤモンド膜を表面研磨処理して整形される。このようなガラス切断用刃を用いることにより、刃の寿命が長く、また切断面が平滑となるように高硬度ガラスを切断できると示されている。   Patent Document 1 discloses a glass cutting blade in which a V-shaped blade edge surface is coated with diamond in order to increase the life of the glass cutting blade for cutting a glass substrate. This blade for cutting a glass is shaped by coating a diamond film on the surface of a cutting edge formed of a ceramic that is compatible with diamond and then polishing the diamond film. It has been shown that by using such a glass cutting blade, the high-hardness glass can be cut such that the blade has a long life and the cut surface is smooth.

また、特許文献２には、断面がＶ字形に形成された円周部を有するスクライビングホイールの刃先となる傾斜面にダイヤモンド膜を成長させ、稜線の両側の領域を研磨したスクライビングホイールが提案されている。   Patent Document 2 proposes a scribing wheel in which a diamond film is grown on an inclined surface serving as a cutting edge of a scribing wheel having a circumferential portion with a V-shaped cross section, and the regions on both sides of the ridge line are polished. Yes.

特開平０４−２２４１２８号公報Japanese Patent Laid-Open No. 04-224128 特開２０１３−２２０５５４号公報JP 2013-220554 A

しかるに断面がＶ字形に形成されたスクライビングホイール基材の傾斜面にダイヤモンド膜を形成する場合には、貫通孔や側壁にダイヤモンド膜の付着を避けるため、図１（ａ）に示すようにスクライビングホイール基材１００（以下、単にホイール基材という）を一対のスペーサ１０１，１０２に挟み、ホイール基材１００の側壁をスペーサ１０１，１０２に接触させて成膜炉の中に保持する。そして成膜炉の中でホイール基材１００の傾斜面へのダイヤモンド膜の付着を完了した後、図１（ｂ）に示すようにスペーサ１０１，１０２を分離してホイール基材１００を洗浄していた。通常は膜厚を確保するため複数回ダイヤモンド膜を付着する必要があり、この作業を複数回繰り返していた。   However, when the diamond film is formed on the inclined surface of the base of the scribing wheel having a V-shaped cross section, the scribing wheel is used as shown in FIG. A base material 100 (hereinafter simply referred to as a wheel base material) is sandwiched between a pair of spacers 101 and 102, and a side wall of the wheel base material 100 is brought into contact with the spacers 101 and 102 and held in a film forming furnace. After the diamond film adheres to the inclined surface of the wheel base material 100 in the film forming furnace, the spacers 101 and 102 are separated and the wheel base material 100 is cleaned as shown in FIG. It was. Usually, it is necessary to deposit a diamond film a plurality of times in order to secure the film thickness, and this operation is repeated a plurality of times.

しかるにダイヤモンド膜を付着させる際にホイール基材１００の側面をスペーサ１０１，１０２に接触させても、側面の外周面周辺に膜が回り込んで付着し、側面の外周面の膜厚が数μｍ程度大きくなることがある。しかもホイール基材１００はスペーサ１０１，１０２と一旦分離すると、洗浄後元の通りにスペーサに挟み込めないため、再度ダイヤモンド膜を付着する際に外周面周辺に更にダイヤモンド膜が回り込んで周辺部分の膜厚が大きくなり、許容公差の範囲を超えてしまう場合がある。   However, even if the side surface of the wheel base 100 is brought into contact with the spacers 101 and 102 when depositing the diamond film, the film wraps around and adheres to the periphery of the outer peripheral surface of the side surface, and the film thickness of the outer peripheral surface of the side surface is about several μm. May grow. In addition, once the wheel base material 100 is separated from the spacers 101 and 102, it cannot be sandwiched between the spacers as it is after the cleaning. Therefore, when the diamond film is attached again, the diamond film further wraps around the outer peripheral surface and the peripheral portion The film thickness may increase and exceed the allowable tolerance range.

完成したスクライビングホイールはホイールホルダの切り込みの隙間に挿入し、回転自在に保持して用いられる。このとき側面にダイヤモンド膜が付着していると、スクライビングホイールが挿入される隙間の許容公差の範囲を超えてしまい、ホイールホルダに保持することができなくなる場合があるという問題点があった。ホイールホルダに保持できた場合であっても、スクライビングホイールの側面と傾斜面との境界部分の厚さが大きければ、スクライビングホイールの回転に伴いスクライビングホイールを使用したときの摺動抵抗が大きくなりやすいという問題点があった。更にホイールホルダの切り込みの側面にある貫通孔の周辺部分のみが環状に摩耗し、ホイールホルダも損傷してしまうという問題点もあった。   The completed scribing wheel is inserted into the notch gap of the wheel holder and is used while being rotatably held. At this time, if a diamond film is attached to the side surface, there is a problem that the tolerance of the gap into which the scribing wheel is inserted may be exceeded and the wheel holder may not be held. Even if it can be held by the wheel holder, if the thickness of the boundary between the side surface and the inclined surface of the scribing wheel is large, the sliding resistance when the scribing wheel is used tends to increase as the scribing wheel rotates. There was a problem. Further, only the peripheral portion of the through hole on the side surface of the notch of the wheel holder is worn in an annular shape, and the wheel holder is also damaged.

本発明はこのような問題点に鑑みてなされたものであって、ホイール基材の側面のダイヤモンド膜の付着に伴う歩留りの低下を防止すると共に、スクライビングホイールを使用する際に摺動抵抗が大きくなることのないスクライビングホイール及びその製造方法を提供することを目的とする。   The present invention has been made in view of such problems, and prevents a decrease in yield due to the adhesion of the diamond film on the side surface of the wheel base material, and has a large sliding resistance when using a scribing wheel. An object of the present invention is to provide a scribing wheel and a method for manufacturing the same.

この課題を解決するために、本発明のスクライビングホイールは、円周部に沿って稜線が形成され、前記稜線と前記稜線の両側の傾斜面からなる刃先を有するスクライビングホイール基材と、前記スクライビングホイール基材の傾斜面にダイヤモンド膜を有するダイヤモンド膜と、前記スクライビングホイール基材の両側の側面のダイヤモンド膜が形成されている傾斜面との境界となる環状の領域に環状溝を具備するものである。   In order to solve this problem, the scribing wheel of the present invention includes a scribing wheel base material having a ridgeline formed along a circumferential portion, and having a cutting edge composed of the ridgeline and inclined surfaces on both sides of the ridgeline, and the scribing wheel. An annular groove is provided in an annular region serving as a boundary between a diamond film having a diamond film on an inclined surface of the substrate and an inclined surface on which the diamond films on both side surfaces of the scribing wheel substrate are formed. .

この課題を解決するために、本発明のスクライビングホイールの製造方法は、円板の円周部に沿って稜線が形成され、前記稜線と前記稜線の両側の傾斜面からなる刃先を有するスクライビングホイールの製造方法であって、円板状のスクライビングホイール基材の円周に沿って側面の両側より互いに斜めに削り込むよう研磨して円周部分に傾斜面と稜線からなる刃先部分を形成し、前記スクライビングホイール基材の傾斜面にダイヤモンド膜を形成し、スクライビングホイール基材の両側の側面のうち前記ダイヤモンド膜を有する傾斜面との境界となる環状領域を切削して側面の環状領域のダイヤモンド膜を除去すると共に環状溝を形成するものである。   In order to solve this problem, a method for manufacturing a scribing wheel according to the present invention is a scribing wheel having a ridgeline formed along a circumferential portion of a disk and having a cutting edge composed of the ridgeline and inclined surfaces on both sides of the ridgeline. A manufacturing method comprising polishing a blade-shaped scribing wheel base material to form a cutting edge portion composed of an inclined surface and a ridge line on the circumferential portion by grinding the surface obliquely from both sides of the side surface, A diamond film is formed on the inclined surface of the scribing wheel base material, and an annular region serving as a boundary with the inclined surface having the diamond film is cut out of both side surfaces of the scribing wheel base material to form a diamond film in the annular region on the side surface. It removes and forms an annular groove.

ここで前記スクライビングホイール基材の側面の環状溝は、環状にレーザ光を照射することによって形成するようにしてもよい。   Here, the annular groove on the side surface of the scribing wheel base material may be formed by irradiating the laser beam in an annular shape.

ここで複数の前記刃先部分を形成したスクライビングホイール基材と、前記各スクライビングホイール基材の側面が全て接触するスペーサとを交互に接触させて前記各ダイヤモンドホイール基材の傾斜面にダイヤモンド膜を形成するようにしてもよい。   Here, a scribing wheel base material in which a plurality of the cutting edge portions are formed and a spacer on which all side surfaces of each scribing wheel base material are in contact with each other alternately to form a diamond film on the inclined surface of each diamond wheel base material You may make it do.

ここで複数の前記刃先部分を形成した前記スクライビングホイール基材を側面を合わせて互いに接触させ、外側に前記両側のスクライビングホイール基材の外側の側面が全て接触する一対のスペーサを接触させて前記各ダイヤモンドホイール基材の傾斜面にダイヤモンド膜を形成するようにしてもよい。   Here, the scribing wheel base material on which a plurality of the blade edge portions are formed are brought into contact with each other by aligning the side surfaces, and a pair of spacers that are in contact with all the outer side surfaces of the scribing wheel base materials on both sides are brought into contact with each other. A diamond film may be formed on the inclined surface of the diamond wheel base material.

ここで前記スクライビングホイール基材の環状溝は、レーザ光を側面に対して水平に照射することにより形成するようにしてもよい。   Here, you may make it form the annular groove | channel of the said scribing wheel base material by irradiating a laser beam horizontally with respect to a side surface.

ここで前記スクライビングホイール基材の環状溝は、レーザ光を側面に対して垂直に照射することにより形成するようにしてもよい。   Here, you may make it form the annular groove | channel of the said scribing wheel base material by irradiating a laser beam perpendicularly | vertically with respect to a side surface.

このような特徴を有する本発明によれば、ダイヤモンド膜の傾斜面と側面の境界部分となる側面に膜が付着した場合であっても側面の膜を除去しているため、膜の付着によるスクライビングホイールの厚さの変化に伴う歩留りの低下を防止することができる。又スクライビングホイールの側面には膜が付着していないため、スクライビングホイールをホイールホルダに取付けて使用する場合の摺動抵抗を少なくすることができ、ホイールホルダの損傷を防止することができるという効果が得られる。   According to the present invention having such characteristics, the side film is removed even when the film adheres to the side surface that is the boundary between the inclined surface and the side surface of the diamond film. It is possible to prevent a decrease in yield due to a change in wheel thickness. In addition, since no film is attached to the side surface of the scribing wheel, the sliding resistance when the scribing wheel is attached to the wheel holder can be reduced, and the wheel holder can be prevented from being damaged. can get.

図１はスクライビングホイールの製造時にダイヤモンド膜の付着処理を示す概略図である。FIG. 1 is a schematic view showing a diamond film adhesion process during the manufacture of a scribing wheel. 図２は本発明の第１の実施の形態によるスクライビングホイールの製造過程の正面図及び側面図である。FIG. 2 is a front view and a side view of the manufacturing process of the scribing wheel according to the first embodiment of the present invention. 図３は本発明の第１の実施の形態によるスクライビングホイール基材上にダイヤモンド膜の付着処理を示す概略図である。FIG. 3 is a schematic view showing a diamond film adhesion process on a scribing wheel substrate according to the first embodiment of the present invention. 図４はレーザ照射前後のスクライビングホイールの側面と傾斜面との境界部分を示す拡大断面図である。FIG. 4 is an enlarged sectional view showing a boundary portion between the side surface and the inclined surface of the scribing wheel before and after laser irradiation. 図５は本発明の実施の形態によるスクライビングホイール基材へのレーザ光の照射を示す正面図及び側面図である。FIGS. 5A and 5B are a front view and a side view showing irradiation of laser light to the scribing wheel base material according to the embodiment of the present invention. 図６は本実施の形態によるレーザ照射後のスクライビングホイールの正面図及び側面図である。FIG. 6 is a front view and a side view of the scribing wheel after laser irradiation according to the present embodiment. 図７は本発明の他の実施の形態によるスクライビングホイール基材へのレーザ光の照射を示す側面図である。FIG. 7 is a side view showing laser light irradiation on a scribing wheel base material according to another embodiment of the present invention. 図８は他の実施の形態によるスクライビングホイール基材上にダイヤモンド膜の付着処理を示す概略図である。FIG. 8 is a schematic diagram showing a diamond film deposition process on a scribing wheel substrate according to another embodiment. 図９は本発明の他の実施の形態によるスクライビングホイール基材へのレーザ光の照射を示す側面図である。FIG. 9 is a side view showing laser light irradiation on a scribing wheel base material according to another embodiment of the present invention.

図２（ａ），（ｂ）は本発明の第１の実施の形態によるスクライビングホイールの製造過程を示す正面図及びその側面図である。スクライビングホイールを製造する際には、例えば、超硬合金のスクライビングホイール基材となる円板１０の中央にまず図２（ａ）に示すように軸穴となる貫通孔１１を形成する。次にこの貫通孔１１に図示しないモータ等のシャフトを連通して貫通孔１１の中心軸を回転軸として回転させつつ、円板１０の全円周を円板の表裏両側より回転軸に対して斜めに研磨して図２（ｂ）に示すように垂直断面Ｖ字形に形成してスクライビングホイール基材１２とし、Ｖ字形部分を刃先とする。こうして形成したＶ字形の斜面を傾斜面１３，１４、側面を１５，１６とする。   2A and 2B are a front view and a side view showing a manufacturing process of the scribing wheel according to the first embodiment of the present invention. When manufacturing a scribing wheel, for example, a through-hole 11 serving as a shaft hole is first formed in the center of a disc 10 serving as a cemented carbide scribing wheel substrate, as shown in FIG. Next, a shaft of a motor or the like (not shown) is communicated with the through hole 11 to rotate the central axis of the through hole 11 as a rotation axis, and the entire circumference of the disk 10 is directed to the rotation axis from both the front and back sides of the disk. As shown in FIG. 2B, it is slanted and formed into a V-shaped cross section as a scribing wheel base material 12, and the V-shaped portion is the cutting edge. The V-shaped slope formed in this way is designated as inclined surfaces 13 and 14 and the side surfaces as 15 and 16.

次に傾斜面１３，１４へのダイヤモンド薄膜の形成過程について説明する。まずＶ字形の傾斜面１３，１４をダイヤモンド膜の付着が容易になるようにあらかじめ粗面にしておく。次に図３に示すようにスクライビングホイール基材１２を一対のスペーサ２１，２２で挟んで円柱状の部材２３を貫通させて上下で固定する。スペーサ２１，２２の側面の直径はスクライビングホイール基材１２の側面１５，１６の側面より少し大きくする。こうすればスクライビングホイール基材の側面１５，１６は夫々スペーサ２１，２２の側面に完全に接触させることができる。この状態で前処理を行った後、成膜炉に入れてスクライビングホイール基材の傾斜面１３，１４にダイヤモンド膜１７を成膜する。次にスクライビングホイール基材１２と一対のスペーサ２１，２２とを分離した後、超音波洗浄などで洗浄する。   Next, the formation process of the diamond thin film on the inclined surfaces 13 and 14 will be described. First, the V-shaped inclined surfaces 13 and 14 are roughened in advance so that the diamond film can be easily attached. Next, as shown in FIG. 3, the scribing wheel base 12 is sandwiched between a pair of spacers 21 and 22, and a cylindrical member 23 is passed through and fixed up and down. The diameters of the side surfaces of the spacers 21 and 22 are slightly larger than the side surfaces 15 and 16 of the scribing wheel base 12. In this way, the side surfaces 15 and 16 of the scribing wheel base can be brought into full contact with the side surfaces of the spacers 21 and 22, respectively. After pre-processing in this state, the diamond film 17 is formed on the inclined surfaces 13 and 14 of the scribing wheel base material in a film forming furnace. Next, the scribing wheel base 12 and the pair of spacers 21 and 22 are separated and then cleaned by ultrasonic cleaning or the like.

なお１回の成膜で必要な膜厚が得られない場合には、上記の成膜とスクライビングホイール基材の側面のダイヤモンド膜の成膜処理を複数回繰り返すことにより、必要な膜厚を得るようにしてもよい。   In addition, when a required film thickness cannot be obtained by one film formation, a necessary film thickness is obtained by repeating the above film formation and the film formation process of the diamond film on the side surface of the scribing wheel base material a plurality of times. You may do it.

成膜炉でダイヤモンド膜を付着させる際に、側面１５，１６の最外周の環状部分にもダイヤモンド粒子が回り込んでわずかに付着して環状の凸部となる。図４（ａ）は傾斜面１３と側面１５が交差する外周の一部を拡大して示す断面図であり、傾斜面１３及び側面１５の外周部分にダイヤモンド膜１７が付着していることを示している。   When the diamond film is deposited in the film forming furnace, the diamond particles wrap around the outermost annular portions of the side surfaces 15 and 16 and slightly adhere to form annular convex portions. FIG. 4A is an enlarged cross-sectional view showing a part of the outer periphery where the inclined surface 13 and the side surface 15 intersect, and shows that the diamond film 17 is attached to the outer peripheral portions of the inclined surface 13 and the side surface 15. ing.

次に側面１５に回り込んで付着したダイヤモンド膜を除去するため、成膜の後に図５に示すようにスクライビングホイールの側面１５のＶ字形の傾斜面との境界となる環状領域１５ａに対してレーザ光を照射する。レーザ光源としては、ダイヤモンド膜及びホイール基材への熱影響を軽減するため、例えばパルス幅が１０ナノ秒以下の短いものを用いることが好ましい。そして図５（ａ）のハッチングで示す部分はレーザ光を照射した部分を示している。レーザ光を照射することによって側面１５に付着したダイヤモンド膜１７だけでなく、スクライビングホイール基材１２を構成する超鋼合金の環状領域１５ａがわずかに、例えば深さ５μｍ程度環状に除去され、図４（ｂ）に図５（ｂ）の小円部分の断面図を示すように環状溝１５ｂが形成されることとなる。従って、側面１５にダイヤモンド膜１７がわずかに付着している場合であっても、レーザ光を照した後にはダイヤモンド膜を側面１５から完全に除去することができる。   Next, in order to remove the diamond film attached around the side surface 15, the laser is applied to the annular region 15 a that forms a boundary with the V-shaped inclined surface of the side surface 15 of the scribing wheel as shown in FIG. 5 after film formation. Irradiate light. As the laser light source, it is preferable to use a laser light source having a short pulse width of 10 nanoseconds or less, for example, in order to reduce the thermal effect on the diamond film and the wheel substrate. And the part shown by hatching in FIG. 5A shows the part irradiated with the laser beam. By irradiating the laser beam, not only the diamond film 17 adhering to the side surface 15 but also the annular region 15a of the super steel alloy constituting the scribing wheel base material 12 is slightly removed, for example, in an annular shape having a depth of about 5 μm. An annular groove 15b is formed as shown in FIG. 5 (b) which is a cross-sectional view of the small circle portion of FIG. 5 (b). Therefore, even when the diamond film 17 is slightly adhered to the side surface 15, the diamond film can be completely removed from the side surface 15 after being irradiated with the laser beam.

更に側面１６に回り込んで付着したダイヤモンド膜を除去するため、図５に示すようにスクライビングホイール基材１２を反転させ、同様にして側面１６と研磨面１４との境界の環状領域１６ａに対してレーザ光を照射する。これによって環状部分１６ａのダイヤモンド膜１７が除去され、更にスクライビングホイール基材が環状に除去され５μｍ程度の窪みとなる環状溝１６ｂが形成されることとなる。環状溝１５ｂ、１６ｂの幅は側面の凸部を確実に除去できるよう、１００μｍ〜２００μｍとすることが好ましい。本実施の形態では１５０μｍ程度とされている。   Further, in order to remove the diamond film attached around the side surface 16, the scribing wheel base material 12 is inverted as shown in FIG. 5, and similarly to the annular region 16 a at the boundary between the side surface 16 and the polishing surface 14. Irradiate with laser light. As a result, the diamond film 17 in the annular portion 16a is removed, and the scribing wheel base material is removed in an annular shape to form an annular groove 16b having a depression of about 5 μm. The widths of the annular grooves 15b and 16b are preferably set to 100 μm to 200 μm so as to reliably remove the convex portions on the side surfaces. In this embodiment, it is about 150 μm.

この後、ダイヤモンド膜が付された先端部分を先端が鋭くなるように砥石などの研磨材によって研磨する。研磨は粗研磨と仕上げ研磨の２段階としてもよく、元のダイヤモンド膜１７よりも例えば５°程度鈍角になるようにしてもよい。図６はこうして完成したスクライビングホイールを示す正面図及び側面図である。   Thereafter, the tip portion with the diamond film is polished with an abrasive such as a grindstone so that the tip is sharp. Polishing may be performed in two stages of rough polishing and finish polishing, and may be made to have an obtuse angle of about 5 °, for example, from the original diamond film 17. FIG. 6 is a front view and a side view showing the scribing wheel thus completed.

このようにして側面１５,１６に付着したダイヤモンド膜を除去することにより、側面に環状凸部がなくなるため、ホイールホルダの側面と傾斜面との境界部分での摩擦が少なくなり、摺動抵抗を改善することができる。   By removing the diamond film adhering to the side surfaces 15 and 16 in this way, there is no annular convex portion on the side surface, so friction at the boundary between the side surface and the inclined surface of the wheel holder is reduced, and sliding resistance is reduced. Can be improved.

尚この実施の形態ではスクライビングホイールの側面に対して垂直な方向からレーザ光を照射して側面のダイヤモンド膜が付着した環状の凸部をなくしているが、図７に示すようにスクライビングホイールの側面に平行な方向からレーザ光を照射してもよい。また、レーザ光に代えて砥石を用いて側面に付着したダイヤモンド膜を除去するようにしてもよい。   In this embodiment, the laser beam is irradiated from the direction perpendicular to the side surface of the scribing wheel to eliminate the annular convex portion to which the diamond film on the side surface is attached. However, as shown in FIG. You may irradiate a laser beam from the direction parallel to. Further, the diamond film adhering to the side surface may be removed using a grindstone instead of the laser beam.

又この実施の形態ではスクライビングホイール基材の傾斜面にダイヤモンド薄膜を付着する際に、一対のスペーサを介してホイール基材を保持しているが、複数のホイール基材に同時にダイヤモンド薄膜を付着させる場合には、図８（ａ）に示すようにホイール基材１２とスペーサ３１，３２，３３・・・とを交互に接触させて成膜してもよい。   In this embodiment, when the diamond thin film is attached to the inclined surface of the scribing wheel base material, the wheel base material is held via a pair of spacers. The diamond thin film is simultaneously attached to a plurality of wheel base materials. In this case, as shown in FIG. 8A, the film may be formed by alternately contacting the wheel base 12 and the spacers 31, 32, 33.

又複数のホイール基材に同時にダイヤモンド薄膜を付着させる場合に、図８（ｂ）に示すように両端にのみスペーサ３１，３２を配置し、その間に複数のホイール基材１２を側面を合わせて互いに接触させて保持してダイヤモンド薄膜を成膜するようにしてもよい。この場合には図９（ａ），（ｂ）に示すように側面からレーザ光を照射すると、側面に付着したダイヤモンド膜の除去と各ホイール基材の分離とを同時に行うことができる。尚図９（ｃ）は図９（ｂ）に円で示す側面と傾斜面との境界部分を示す部分拡大図である。   When a diamond thin film is simultaneously adhered to a plurality of wheel base materials, spacers 31 and 32 are disposed only at both ends as shown in FIG. A diamond thin film may be formed by holding it in contact. In this case, as shown in FIGS. 9A and 9B, when the laser beam is irradiated from the side surface, the removal of the diamond film adhering to the side surface and the separation of each wheel base material can be performed simultaneously. FIG. 9C is a partially enlarged view showing a boundary portion between the side surface and the inclined surface indicated by a circle in FIG. 9B.

又、この実施の形態では側面に付着したダイヤモンド膜を除去した後にダイヤモンド膜が付された先端部分を研磨しているが、ダイヤモンド膜の先端を研磨した後に、側面に付着したダイヤモンド膜を除去するようにしてもよい。   Further, in this embodiment, the diamond film attached to the side surface is removed after the removal of the diamond film attached to the side surface, but the diamond film attached to the side surface is removed after polishing the tip of the diamond film. You may do it.

本発明のスクライビングホイールは側面に付着するダイヤモンド膜を効果的に除去し、使用時の摺動抵抗の少ないスクライビングホイールを提供することができ、スクライブ装置に好適に用いることができる。   The scribing wheel of the present invention can effectively remove the diamond film adhering to the side surface, can provide a scribing wheel with low sliding resistance during use, and can be suitably used for a scribing device.

１０ 円板
１１ 貫通孔
１２ スクライビングホイール基材
１３，１４ 傾斜面
１５，１６ 側面
１５ａ，１６ａ 環状領域
１５ｂ，１６ｂ 環状溝
１７ ダイヤモンド膜
２１，２２ スペーサ
２３ シャフト DESCRIPTION OF SYMBOLS 10 Disc 11 Through-hole 12 Scribing wheel base material 13,14 Inclined surface 15,16 Side surface 15a, 16a Annular area | region 15b, 16b Annular groove | channel 17 Diamond film | membrane 21,22 Spacer 23 Shaft

Claims (7)

円周部に沿って稜線が形成され、前記稜線と前記稜線の両側の傾斜面からなる刃先を有するスクライビングホイール基材と、
前記スクライビングホイール基材の傾斜面にダイヤモンド膜を有するダイヤモンド膜と、
前記スクライビングホイール基材の両側の側面のダイヤモンド膜が形成されている傾斜面との境界となる環状の領域に環状溝を具備するスクライビングホイール。 A scribe line is formed along a circumferential portion, and a scribing wheel base material having a cutting edge composed of the ridge line and inclined surfaces on both sides of the ridge line,
A diamond film having a diamond film on the inclined surface of the scribing wheel base;
A scribing wheel comprising an annular groove in an annular region which is a boundary with the inclined surfaces on which the diamond films on both side surfaces of the scribing wheel substrate are formed. 円板の円周部に沿って稜線が形成され、前記稜線と前記稜線の両側の傾斜面からなる刃先を有するスクライビングホイールの製造方法であって、
円板状のスクライビングホイール基材の円周に沿って側面の両側より互いに斜めに削り込むよう研磨して円周部分に傾斜面と稜線からなる刃先部分を形成し、
前記スクライビングホイール基材の傾斜面にダイヤモンド膜を形成し、
スクライビングホイール基材の両側の側面のうち前記ダイヤモンド膜を有する傾斜面との境界となる環状領域を切削して側面の環状領域のダイヤモンド膜を除去すると共に環状溝を形成するスクライビングホイールの製造方法。 A method of manufacturing a scribing wheel, in which a ridge line is formed along a circumferential portion of a disc, and the ridge line has a cutting edge made of inclined surfaces on both sides of the ridge line,
Polishing so as to cut each other diagonally from both sides of the side surface along the circumference of the disc-shaped scribing wheel base material, forming a cutting edge portion composed of an inclined surface and a ridge line on the circumferential portion,
Forming a diamond film on the inclined surface of the scribing wheel substrate;
A method for manufacturing a scribing wheel, wherein an annular region serving as a boundary with the inclined surface having the diamond film is cut from both side surfaces of the scribing wheel base material to remove the diamond film in the annular region on the side surface and to form an annular groove. 前記スクライビングホイール基材の側面の環状溝は、環状にレーザ光を照射することによって形成した請求項２記載のスクライビングホイールの製造方法。   The manufacturing method of the scribing wheel according to claim 2, wherein the annular groove on the side surface of the scribing wheel base material is formed by irradiating laser light in an annular shape. 複数の前記刃先部分を形成したスクライビングホイール基材と、前記各スクライビングホイール基材の側面が全て接触するスペーサとを交互に接触させて前記各ダイヤモンドホイール基材の傾斜面にダイヤモンド膜を形成する請求項２記載のスクライビングホイールの製造方法。   A scribing wheel base material in which a plurality of the cutting edge portions are formed and a spacer on which all side surfaces of each scribing wheel base material are in contact with each other alternately to form a diamond film on the inclined surface of each diamond wheel base material. Item 3. A method for producing a scribing wheel according to Item 2. 複数の前記刃先部分を形成した前記スクライビングホイール基材を側面を合わせて互いに接触させ、外側に前記両側のスクライビングホイール基材の外側の側面が全て接触する一対のスペーサを接触させて前記各ダイヤモンドホイール基材の傾斜面にダイヤモンド膜を形成する請求項２記載のスクライビングホイールの製造方法。   Each of the diamond wheels is formed by bringing the scribing wheel base material formed with a plurality of cutting edge portions into contact with each other with the side surfaces in contact with each other, and contacting a pair of spacers with which the outer side surfaces of the scribing wheel base materials on both sides are in contact with each other. The method for producing a scribing wheel according to claim 2, wherein a diamond film is formed on the inclined surface of the substrate. 前記スクライビングホイール基材の環状溝は、レーザ光を側面に対して水平に照射することにより形成した請求項３記載のスクライビングホイールの製造方法。   The manufacturing method of the scribing wheel according to claim 3, wherein the annular groove of the scribing wheel base material is formed by irradiating the side surface with laser light horizontally. 前記スクライビングホイール基材の環状溝は、レーザ光を側面に対して垂直に照射することにより形成した請求項３記載のスクライビングホイールの製造方法。   The manufacturing method of the scribing wheel according to claim 3, wherein the annular groove of the scribing wheel base material is formed by irradiating a laser beam perpendicularly to the side surface.
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