JP2017207300A - Member for ceramic reference device for noncontact type shape measuring machine calibration - Google Patents
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本発明は、非接触式形状測定機の校正に使用されるセラミックス製の基準器用部材に関する。なお、非接触式形状測定機は、非接触式三次元測定機又は非接触式三次元座標測定機と呼ばれることもあるが、本明細書では非接触式形状測定機という。 The present invention relates to a ceramic reference member used for calibration of a non-contact type shape measuring machine. In addition, although a non-contact type shape measuring machine may be called a non-contact type three-dimensional measuring machine or a non-contact type three-dimensional coordinate measuring machine, it is called a non-contact type shape measuring machine in this specification.
近年、半導体やMEMSの微細化技術の進歩によりCCDイメージセンサーやCMOSイメージセンサー等のカメラシステムの機能は飛躍的に高くなってきており、また、その低価格化により用途は爆発的に広がってきている。このため、これらのセンサーを利用した非接触式形状測定機が多く開発されてきている。 In recent years, the functions of camera systems such as CCD image sensors and CMOS image sensors have increased dramatically due to advances in semiconductor and MEMS miniaturization technologies, and their applications have expanded explosively due to their lower prices. Yes. For this reason, many non-contact type shape measuring machines using these sensors have been developed.
また、工業製品の精密測定の分野において、自動車部品・航空機部品や家電部品などに複雑な曲面が使用されてきており、曲面測定等の複雑な測定が増えてきている。これらの曲面等の製造精度は省エネに大きく影響する場合が多いことから、これらの形状測定の高精度化と高速測定化が強く求められてきている。これらの測定に当初は接触式形状測定機が使用されていたが、測定スピードや測定の完全性の問題から、最近は非接触式形状測定機が使用されるようになってきている。 In the field of precision measurement of industrial products, complex curved surfaces have been used for automobile parts, aircraft parts, home appliance parts, etc., and complicated measurements such as curved surface measurement are increasing. Since the manufacturing accuracy of these curved surfaces and the like often greatly affects energy saving, there is a strong demand for higher accuracy and higher speed measurement of these shapes. A contact-type shape measuring machine was initially used for these measurements, but recently a non-contact type shape measuring machine has come to be used due to the problems of measurement speed and completeness of measurement.
これらの非接触式形状測定機には、そのセンシング方式から縞フリンジ投影方式、レーザースキャニング方式、レーザーポイント測定方式等があるが、いずれにしても光学的に測定されるため基準器としては光に対して正反射ではなく拡散反射する材料が必要となる。このため光を正反射してしまう金属材料はそのまま使用することが困難で、金属材料を使用する場合にはブラスト処理等のつや消し処理を実施した後に表面にTiN等のセラミックスコーティングする方法等がとられている。しかし、このようにブラスト処理やコーティングにより作製される基準器では精度の良いものが得られない。 These non-contact type shape measuring machines include the fringe fringe projection method, laser scanning method, laser point measurement method, etc. from the sensing method. On the other hand, a material that diffusely reflects instead of regular reflection is required. For this reason, it is difficult to use a metal material that regularly reflects light. If a metal material is used, a method of coating a ceramic such as TiN on the surface after performing a matte treatment such as a blast treatment is used. It has been. However, it is not possible to obtain an accurate reference device manufactured by blasting or coating.
一方、接触式形状測定機でジルコニア等のセラミックスの高精度球が基準球として使用されていることは広く知られており、光学的測定においてもこれらのセラミックスはほとんどの入射光を拡散反射するため光学的測定の基準器としても有用と考えられてきた。しかし、実際に使用してみるとセラミックス中では図1に示されるような光の体積拡散が強く発生することがわかってきた。 On the other hand, it is widely known that high-precision spheres of ceramics such as zirconia are used as reference spheres in contact-type shape measuring machines, and these ceramics diffusely reflect most incident light in optical measurement. It has also been considered useful as a reference instrument for optical measurements. However, when actually used, it has been found that volume diffusion of light as shown in FIG. 1 occurs strongly in ceramics.
体積拡散とは入射された光がセラミックスの内部に潜り込み、内部で3次元的に拡散する現象のことで、従来のセラミックスにおいては数ミリのオーダーで潜り込みが発生する。このように入射された光が基準器たるセラミックスの内部に深く潜り込むと、距離測定が不正確になるという問題が発生する。また、前述した入射光の3次元的拡散のうち、入射光の入射ベクトルと反対方向ベクトルを持つ光はセラミックス表面にまで戻ってくる。この体積拡散して戻ってくる光のため、センシング方式として縞フリンジ投影方式を採用した場合、入射した光のパターンが広がって不鮮明なパターンになってしまい、正確な測定ができなくなるという問題もある。さらに、センシング方式によっては測定自体が不可能になる場合もあり、このセラミックスの体積拡散の現象は、非接触式形状測定機校正用の基準器として使用する場合に大きな問題である。 Volume diffusion is a phenomenon in which incident light enters into ceramics and diffuses three-dimensionally inside, and in conventional ceramics, the penetration occurs on the order of several millimeters. If the incident light enters deeply into the ceramic as a reference device, there arises a problem that distance measurement becomes inaccurate. Of the three-dimensional diffusion of incident light described above, light having a direction vector opposite to the incident vector of incident light returns to the ceramic surface. Due to this volume-diffused light that returns, when the fringe fringe projection method is used as the sensing method, the pattern of incident light spreads and becomes unclear, and there is a problem that accurate measurement cannot be performed. . Furthermore, depending on the sensing method, the measurement itself may be impossible, and this volume diffusion phenomenon of ceramics is a serious problem when used as a reference device for non-contact type shape measuring machine calibration.
なお、基準器としてセラミックスと金属以外では樹脂等も使用されているが、樹脂の場合には精度が悪く、また経時変化も心配されることから、非常に粗い測定精度の場合にのみ使用される。非接触式形状測定機の測定精度は、その開発当初は数ミリから数百ミクロンと非常にラフな測定が主流であったため、このような樹脂製のものが使用されてきた。しかし、前述のように省エネ等の問題からより高精度な測定が求められてきたことにより、基準器としても高精度・高信頼性のものが求められてきている。現在、高精度非接触式測形状定機としてはカタログ仕様として数ミクロンのものが開発されてきており、通常、基準器の精度として装置精度の1/5以下が必要とされることを考慮すると、2ミクロンからサブミクロン精度の高精度基準器が必要となってくる。 Resin etc. are also used as a standard other than ceramics and metals. However, in the case of resin, accuracy is poor and change with time is a concern, so it is used only for extremely rough measurement accuracy. . Since the measurement accuracy of non-contact type shape measuring machines was very rough, from several millimeters to several hundreds of microns at the beginning of its development, such resin-made ones have been used. However, as described above, due to the demand for more accurate measurement due to problems such as energy saving, a reference device having high accuracy and high reliability has been required. Currently, a high-precision non-contact shape measuring machine has been developed with a catalog specification of several microns. Considering that the accuracy of the standard is usually 1/5 or less of the device accuracy, A high-precision reference device with accuracy from 2 microns to submicron is required.
そのほか、現在使用されている基準器としては、セラミックスや金属の高精度球・平板の表面に塗料を塗ることにより拡散反射を実現している基準器がある。しかし、これらの基準器は塗装により精度が悪くなることに加え、一度触れてしまうと塗料が剥げてしまい測定精度が極端に悪化してしまうという大きな問題があり、非常に使用が難しい基準器となっている。 In addition, as a reference device currently used, there is a reference device that realizes diffuse reflection by applying a paint on the surface of a ceramic or metal high precision sphere or flat plate. However, in addition to the accuracy of these standards being reduced by painting, there is a major problem that once touched, the paint will peel off and the measurement accuracy will be extremely deteriorated. It has become.
以上述べたように、非接触式形状測定機を精度良く校正するために、高精度な基準器が必要になっており、従来の樹脂製や表面コート品に代ってセラミックス製の基準器が候補として考えられる。しかし、セラミックスは光を体積拡散する特性があるため、距離測定が不正確になるという問題や、セラミックスに投影されたパターンを精度良く計測できないという問題がある。 As described above, in order to calibrate a non-contact type shape measuring machine with high accuracy, a high-precision standard device is required. Instead of a conventional resin or surface-coated product, a ceramic standard device is required. Considered as a candidate. However, ceramics have the property of volume diffusing light, so that there are problems that distance measurement becomes inaccurate and patterns projected on the ceramics cannot be measured with high accuracy.
そこで、本発明が解決しようとする課題は、光の体積拡散が少なく、非接触式形状測定機を精度良く校正することができる高精度の非接触式形状測定機校正用のセラミックス基準器用部材を提供することにある。 Therefore, the problem to be solved by the present invention is to provide a ceramic reference member for calibration of a high-precision non-contact type shape measuring machine that can calibrate a non-contact type shape measuring machine with high accuracy and a small volume of light. It is to provide.
本発明者は、前記課題を解決するために、高精度の基準器として緻密で精度加工が可能であり、さらに温度による変化や経時変化の少ないコーディエライト質焼結体の適用が有効であるとの発想のもと、コーディエライト質焼結体における光の体積拡散を少なくすることを志向した。その結果、ジルコンとジルコニアの少なくとも一種とコーディエライトとの複合焼結体とすることにより光の体積拡散が少なくなって前記課題を解決できることを見出し、本発明を完成させた。 In order to solve the above-mentioned problems, the present inventor is capable of precise and precise processing as a high-precision reference instrument, and further, it is effective to apply a cordierite-based sintered body with little change due to temperature and change with time. The idea was to reduce the volume diffusion of light in the cordierite sintered body. As a result, it has been found that by using a composite sintered body of at least one of zircon and zirconia and cordierite, the volume diffusion of light can be reduced and the above problems can be solved, and the present invention has been completed.
すなわち、本発明によれば、「ジルコンとジルコニアの少なくとも一種を21〜50質量%含み、残部が実質的にコーディエライトよりなり、見掛け気孔率が0.01%未満の複合焼結体であることを特徴とする非接触式形状測定機校正用のセラミックス基準器用部材」が提供される。 That is, according to the present invention, “a composite sintered body containing 21 to 50% by mass of at least one of zircon and zirconia, the balance being substantially made of cordierite, and an apparent porosity of less than 0.01%. There is provided a member for a ceramic reference instrument for calibration of a non-contact type shape measuring machine.
本発明の複合焼結体において体積拡散が少なくなるメカニズムは必ずしも明らかではないが、コーディエライト粒子の比重2.4とジルコン、ジルコニアの比重4.7、6.0とが大きく異なるため、コーディエライトとジルコン又はジルコニアとの粒界にて大きな屈折が発生し、光が深く潜り込まずに光の拡散が抑えられると考えられる。 Although the mechanism for reducing volume diffusion in the composite sintered body of the present invention is not necessarily clear, the cordierite particles have a specific gravity of 2.4 and zircon and zirconia having a specific gravity of 4.7 and 6.0. It is considered that a large refraction occurs at the grain boundary between erite and zircon or zirconia, and the diffusion of light is suppressed without deeply penetrating light.
なお、特許文献1には、ジルコンとコーディエライトの複合焼結体として、「結晶が、酸化珪素(SiO2)50〜53質量%、酸化アルミニウム(Al2O3)33〜36質量%、酸化マグネシウム(MgO)13〜15質量%を組成範囲とするコーディエライト結晶と、ジルコン結晶と、から成り、コーディエライト結晶とジルコン結晶との混合割合が重量比で99/1〜82/18の範囲であり、室温における熱膨張係数が−0.1〜+0.1×10−6/℃であり、且つ、ヤング率を嵩比重で割った値(ヤング率/嵩比重)が5×107m2/s2以上であることを特徴とするコーディエライト緻密焼結体」が開示されているが(請求項1参照)、このようにジルコンの含有量が1〜18質量%と低い場合、体積拡散が十分に少なくならず非接触式形状測定機校正用の基準器用としては不適切であり、また、この特許文献1には焼結体の体積拡散問題や基準器としての応用についても記載されていない。 In Patent Document 1, as a composite sintered body of zircon and cordierite, “crystals are 50 to 53% by mass of silicon oxide (SiO 2 ), 33 to 36% by mass of aluminum oxide (Al 2 O 3 ), It consists of cordierite crystal having a composition range of magnesium oxide (MgO) 13 to 15% by mass and zircon crystal, and the mixing ratio of cordierite crystal and zircon crystal is 99/1 to 82/18 by weight ratio. The thermal expansion coefficient at room temperature is −0.1 to + 0.1 × 10 −6 / ° C. and the Young's modulus divided by the bulk specific gravity (Young's modulus / bulk specific gravity) is 5 × 10 Although a cordierite dense sintered body characterized by being 7 m 2 / s 2 or more is disclosed (see claim 1), the zircon content is as low as 1 to 18% by mass in this way. If volume diffusion is sufficient Not less is unsuitable as a reference dexterity contactless form measuring instrument for calibration, also not described for application as volume diffusion problems and reference unit of the sintered body in Patent Document 1.
特許文献2には、「天体望遠鏡に設けられ、天体から届き集光された光を反射させる天体望遠鏡用ミラーであって、前記光を反射するための表面粗さがRaで10nm以下の反射面を備えた低熱膨張セラミックスからなる板部材と、前記板部材の反射面に設けられた所定の反射膜と、低熱膨張セラミックスからなり、前記板部材と接合されて前記板部材を保持するコア部材と、前記板部材と前記コア部材とを接合する、前記板部材および前記コア部材を構成する低熱膨張セラミックスよりも溶融温度の低い低熱膨張セラミックスからなる接合部と、を有し、前記板部材と前記コア部材の−10〜10℃における平均の熱膨張係数が、−1×10−6〜1×10−6/℃の範囲にあり、前記板部材および前記コア部材の−10〜10℃における平均の熱膨張係数と、前記接合部の−10〜10℃における平均の熱膨張係数との差が±0.1×10−6/℃の範囲内であり、前記板部材および前記コア部材を構成する低熱膨張セラミックスと前記接合部を形成する低熱膨張セラミックスは、リチウムアルミノシリケート、リン酸ジルコニウムカリウム、コーディエライトから選ばれる一種以上の第1の材料と、炭化珪素、窒化珪素、サイアロン、アルミナ、ジルコニア、ムライト、ジルコン、窒化アルミニウム、ケイ酸カルシウム、炭化ホウ素から選ばれる一種以上の第2の材料を複合してなる複合材料であることを特徴とする天体望遠鏡用ミラー」が開示されており(請求項1参照)、この中に本発明の複合焼結体と同様のコーディエライトとジルコンの組合せも含まれているが、焼結体の体積拡散問題や基準器としての応用については記載されておらず、実施例としてはβユークリブタイトと炭化珪素の組合せの複合焼結体しか開示されていない。また特許文献3〜9にも、本発明の複合焼結体と同様のコーディエライトとジルコンの組合せが含まれるが、焼結体の体積拡散問題や基準器としての応用については全く記載されていない。 Patent Document 2 states that “a celestial telescope mirror that is provided in an astronomical telescope and reflects the light collected from the celestial object and having a surface roughness Ra of 10 nm or less for reflecting the light. A plate member made of low thermal expansion ceramics, a predetermined reflective film provided on a reflection surface of the plate member, a core member made of low thermal expansion ceramics and bonded to the plate member to hold the plate member; A joining portion made of low thermal expansion ceramics having a melting temperature lower than that of the low thermal expansion ceramics constituting the plate members and the core members, which joins the plate members and the core members, and the plate members and the thermal expansion coefficient of the mean at -10 to 10 ° C. of the core member is in the range of -1 × 10 -6 ~1 × 10 -6 / ℃, put the -10 to 10 ° C. of the plate member and the core member The thermal expansion coefficient of the average difference between the average thermal expansion coefficient at -10 to 10 ° C. of the joint portion is in the range of ± 0.1 × 10 -6 / ℃, the plate member and the core member The low thermal expansion ceramic that forms the joint portion with the low thermal expansion ceramic that constitutes the material includes at least one first material selected from lithium aluminosilicate, potassium zirconium phosphate, and cordierite, silicon carbide, silicon nitride, sialon, and alumina. An astronomical telescope mirror characterized by being a composite material formed by combining at least one second material selected from zirconia, mullite, zircon, aluminum nitride, calcium silicate, and boron carbide. (See claim 1), which includes a combination of cordierite and zircon similar to the composite sintered body of the present invention. The volume diffusion problem of the bonded body and its application as a reference device are not described, and only a composite sintered body of a combination of β-eucributite and silicon carbide is disclosed as an example. Also, Patent Documents 3 to 9 include the same cordierite and zircon combination as the composite sintered body of the present invention, but the volume diffusion problem of the sintered body and its application as a reference device are not described at all. Absent.
本発明によれば、緻密で光の体積拡散の少ないセラミックス基準器用部材が提供可能となり、このセラミックス基準器用部材を使用することにより、非接触式形状測定機を精度良く校正することができる。 ADVANTAGE OF THE INVENTION According to this invention, it becomes possible to provide the member for ceramic reference devices which is precise | minute and has little volume diffusion of light, By using this member for ceramic reference devices, a non-contact-type shape measuring machine can be calibrated accurately.
また、通常、非接触式形状測定機校正用の基準器は表面がつや消し状であることが求められるが、本発明のセラミックス基準器用部材によれば光の体積拡散が小さいことからセンシング方式によっては表面が光沢面でも測定が可能となる。したがって、精度が1ミクロン以下、例えば真球度0.2ミクロン、平面度0.1ミクロンといった超高精度な基準器も提供可能である。 In addition, the reference device for calibration of a non-contact type shape measuring machine is usually required to have a matte surface, but according to the ceramic reference device member of the present invention, since the volumetric diffusion of light is small, depending on the sensing method Measurement is possible even when the surface is glossy. Therefore, it is possible to provide an extremely high precision reference device having an accuracy of 1 micron or less, for example, a sphericity of 0.2 microns and a flatness of 0.1 microns.
さらに本発明によれば、コーディエライトが有する優れた特性を活かして、温度や時間に対する形状安定性にも優れた非接触式形状測定機校正用のセラミックス基準器が提供可能となる。 Furthermore, according to the present invention, it is possible to provide a ceramic reference instrument for calibration of a non-contact type shape measuring machine that is excellent in shape stability with respect to temperature and time by utilizing the excellent characteristics of cordierite.
本発明において非接触式形状測定機校正用の基準器用部材として使用される複合焼結体(以下、単に「本発明の複合焼結体」という。)は、光の体積拡散を少なくするために、ジルコンとジルコニアの少なくとも一種を21〜50質量%含み残部が実質的にコーディエライトよりなる。ジルコンとジルコニアの少なくとも一種の含有量が21質量%未満ではこれらの粒子が少なくなってしまい、逆に50質量%超ではコーディエライト粒子が少なくなってしまうので、いずれの場合も光の体積拡散が十分に少なくならない。なお、ジルコンとジルコニアの少なくとも一種の含有量は21〜30質量%であることが好ましい。また、コーディエライトの含有量は43〜78質量%であることが好ましい。 In the present invention, a composite sintered body used as a reference member for calibration of a non-contact type shape measuring machine (hereinafter simply referred to as “composite sintered body of the present invention”) is used to reduce volume diffusion of light. In addition, 21 to 50% by mass of at least one of zircon and zirconia is contained, and the balance is substantially made of cordierite. If the content of at least one of zircon and zirconia is less than 21% by mass, these particles are reduced, and conversely if it exceeds 50% by mass, cordierite particles are reduced. Is not enough. In addition, it is preferable that content of at least 1 type of a zircon and a zirconia is 21-30 mass%. The cordierite content is preferably 43 to 78% by mass.
ところでこれまで、セラミックスの体積拡散を評価する方法はなかったため、本発明にあたり本発明者は図2のような評価方法を開発した。すなわち、ライン状のレーザー光をセラミックス表面に一定の角度で入射し、光入射部の真上に設置した2次元輝度計(CCDカメラ)により光の輝度分布を測定する。これにより、入射したレーザー光の幅に対してセラミックス表面にてどのように幅が拡がっているかを輝度分布としてライン分析する。 By the way, since there has been no method for evaluating the volume diffusion of ceramics, the present inventor has developed an evaluation method as shown in FIG. That is, a linear laser beam is incident on the ceramic surface at a certain angle, and the luminance distribution of the light is measured by a two-dimensional luminance meter (CCD camera) installed immediately above the light incident portion. Thus, line analysis is performed as a luminance distribution to determine how the width of the ceramic surface is expanded with respect to the width of the incident laser beam.
具体的には、波長λのレーザー光を使用したそれぞれの測定において測定される輝度分布は図3のようにほぼガウシアン分布となるので、このガウシアン分布の半値全幅をFWHM(λ)とする。そして、セラミックスの基準材料(99.5%アルミナ)の前記半値全幅をFWHMa(λ)とし、測定したサンプルの半値全幅をFWHMi(λ)として、光の体積拡散相対係数(RVS)を下記のように定義する。ここで、FWHMr(λ)は波長λにおけるレーザー光の入射時の輝度分布の半値全幅であり、全反射率が7〜8%であるセラミックス黒色基準板にレーザー光を照射して測定される。
RVS(λ)=(FWHMi(λ)−FWHMr(λ))/(FWHMa(λ)−FWHMr(λ))
λ:レーザー光の波長(nm)
Specifically, the luminance distribution measured in each measurement using the laser beam having the wavelength λ is almost Gaussian as shown in FIG. 3, and the full width at half maximum of the Gaussian distribution is FWHM (λ). Then, the full width at half maximum of the ceramic reference material (99.5% alumina) is FWHM a (λ), the full width at half maximum of the measured sample is FWHM i (λ), and the volume diffusion relative coefficient of light (RVS) is as follows: Define as follows. Here, FWHMr (λ) is the full width at half maximum of the luminance distribution when the laser beam is incident at the wavelength λ, and is measured by irradiating the ceramic black reference plate having a total reflectance of 7 to 8% with the laser beam.
RVS (λ) = (FWHMi (λ) −FWHMr (λ)) / (FWHM a (λ) −FWHMr (λ))
λ: Laser light wavelength (nm)
これにより、サンプルへの入射光に対するサンプル表面における入射光の幅の広がりが相対的に評価できる。本発明においては従来のセラミックスに対して光の体積拡散が小さいため、入射光に対する幅の広がりが小さく、RVS(670)を0.5以下に抑えることができる。なお、レーザー光の波長λとして670nmを基準としたのは、非接触式形状測定機で最も一般的に使用される赤色レーザー光の中間的な波長に相当するからである。 Thereby, the spread of the width of the incident light on the sample surface relative to the incident light on the sample can be relatively evaluated. In the present invention, since the volume diffusion of light is smaller than that of conventional ceramics, the spread of the width with respect to the incident light is small, and RVS (670) can be suppressed to 0.5 or less. The reason why the wavelength λ of the laser beam is set to 670 nm is that it corresponds to an intermediate wavelength of the red laser beam that is most commonly used in a non-contact type shape measuring machine.
続いて本発明の複合焼結体の特徴について説明すると、本発明の複合焼結体は、その見掛け気孔率が0.01%未満と緻密である。見掛け気孔率が0.01%以上であると、気孔部に入り込んだ汚れが取れなくなり部分的に着色するため、光学的な測定基準としては適当でない。また、精密仕上げ時に気孔部の周りは粒子の脱落等のミクロな破損が起きやすく、破片によるキズが発生する場合もあるから、この点からも適当でない。 Next, the characteristics of the composite sintered body of the present invention will be described. The composite sintered body of the present invention is dense with an apparent porosity of less than 0.01%. If the apparent porosity is 0.01% or more, the dirt that has entered the pores cannot be removed, and it is partially colored, so it is not suitable as an optical measurement standard. In addition, micro-breakage such as dropping of particles is likely to occur around the pores during precision finishing, and scratches due to fragments may occur, which is not appropriate from this point.
本発明の複合焼結体は、焼結性の向上のため希土類元素のLa,Ce,Sm,Gd,Dy,Er,Yb,Yの一種以上を酸化物換算で1〜7質量%含むことが好ましい。特に、Laを酸化物換算で2〜5質量%含むことが好ましい。これらの希土類酸化物が1質量%未満であると焼結性が悪くなり緻密な焼結体が得られなくなるので好ましくない。 一方、7質量%超では比重が大きくなり過ぎて、比剛性が低くなってしまうとともに、焼結中に低融点の液相が多量に発生するために表面近傍の液相が気化して幅の広い表層を形成してしまうため好ましくない。なお、焼結性の向上のためには、希土類元素を含まない焼結助剤を使用することもできるが、焼結温度が高くなりコーディエライトの融点直下での非常に狭い温度領域での焼結となり製造安定性の面から、前記希土類元素の使用が好ましい。 The composite sintered body of the present invention contains 1 to 7% by mass of one or more of rare earth elements La, Ce, Sm, Gd, Dy, Er, Yb, and Y in terms of oxide for improving the sinterability. preferable. In particular, it is preferable to contain 2 to 5% by mass of La in terms of oxide. If these rare earth oxides are less than 1% by mass, the sinterability deteriorates and a dense sintered body cannot be obtained. On the other hand, if it exceeds 7% by mass, the specific gravity becomes too large and the specific rigidity becomes low, and a large amount of low melting point liquid phase is generated during sintering. This is not preferable because a wide surface layer is formed. In order to improve the sinterability, a sintering aid that does not contain rare earth elements can also be used, but the sintering temperature becomes high, and in a very narrow temperature range just below the melting point of cordierite. The rare earth element is preferably used from the standpoint of sintering and production stability.
本発明の複合焼結体は非接触式形状測定機校正用の基準器として使用されることから、入射光に対する反射率がある程度高くないと測定が困難になる場合があるので、白色系の反射率の高いものが好ましい。具体的には、非接触式形状測定機には、赤色レーザー、緑色レーザー、青色レーザー又は白色光が使用されるので、可視光領域、すなわち400〜800nmの波長領域に対して全反射率が70%以上であることが好ましく、85%以上がより好ましい。ここでいう全反射率とは積分球による反射率測定でサンプルの全面半球方向に反射する光量合計の入射光量に対する割合である。 Since the composite sintered body of the present invention is used as a reference device for calibration of a non-contact type shape measuring machine, measurement may be difficult unless the reflectance with respect to incident light is high to some extent. A high rate is preferable. Specifically, since a red laser, a green laser, a blue laser, or white light is used for the non-contact type shape measuring machine, the total reflectance is 70 in the visible light region, that is, the wavelength region of 400 to 800 nm. % Or more is preferable, and 85% or more is more preferable. The total reflectance here is the ratio of the total amount of light reflected in the direction of the entire hemisphere of the sample in reflectance measurement using an integrating sphere to the amount of incident light.
なお、黒色や灰色のセラミックスにおいては、体積拡散する光の多くがセラミックス内部で吸収されるため、光の体積拡散はあまり問題とならないが、全反射率が黒色の場合で10%以下、灰色の場合で20%以下と非常に低いため、測定に必要な光量が不足して測定ができない場合や、正確な測定ができない場合が多く発生するので好ましくない。ただし、僅かな着色剤は反射率を大きく損なわないので、添加が許容される。これらの着色剤としては酸化コバルト、酸化ニッケル、酸化マンガン、酸化クロム、酸化鉄の一種又は二種以上が挙げられ、全体として0.3質量%以下であれば許容される。 In black and gray ceramics, most of the volume diffusing light is absorbed inside the ceramic, so volume diffusion of light is not a problem, but the total reflectance is 10% or less when the total reflectance is black. In some cases, it is very low, 20% or less, which is not preferable because the amount of light necessary for measurement is insufficient and measurement cannot be performed or accurate measurement is not possible. However, since a slight amount of colorant does not significantly impair the reflectance, addition is permitted. Examples of these colorants include one or more of cobalt oxide, nickel oxide, manganese oxide, chromium oxide, and iron oxide, and it is acceptable as long as it is 0.3% by mass or less as a whole.
本発明の複合焼結体は、温度や時間に対する形状安定性を確保する点から、20℃における熱膨張係数が1.5×10−6/K以下であることが好ましい。特に、1次元又は2次元のスケールをセラミックスの表面に形成した基準器の場合、セラミックスの熱膨張係数が大きいと測定時の温度変化によりスケールの長さが変化してしまい、基準器の精度が低下するため、熱膨張係数は20℃で1.5×10−6/K未満であることが好ましい。また、本発明の複合焼結体中のコーディエライトの組成は、コーディエライトの全質量を100質量%としたとき、MgO:11〜14質量%、Al2O3:29〜36質量%、SiO2 :50〜60質量%であることが好ましい。この組成範囲外では、コーディエライトの熱膨張係数が大きくなってしまい、複合焼結体全体の熱膨張係数が20℃で1.5×10−6/K以上になってしまうので好ましくない。 The composite sintered body of the present invention preferably has a thermal expansion coefficient at 20 ° C. of 1.5 × 10 −6 / K or less from the viewpoint of securing shape stability with respect to temperature and time. In particular, in the case of a reference device in which a one-dimensional or two-dimensional scale is formed on the surface of the ceramic, if the thermal expansion coefficient of the ceramic is large, the length of the scale changes due to temperature changes during measurement, and the accuracy of the reference device is reduced. In order to decrease, the thermal expansion coefficient is preferably less than 1.5 × 10 −6 / K at 20 ° C. The composition of cordierite in the composite sintered body of the present invention is as follows: MgO: 11 to 14% by mass, Al 2 O 3 : 29 to 36% by mass when the total mass of cordierite is 100% by mass. , SiO 2: is preferably 50 to 60 wt%. Outside this composition range, the thermal expansion coefficient of cordierite becomes large, and the thermal expansion coefficient of the entire composite sintered body becomes 1.5 × 10 −6 / K or more at 20 ° C., which is not preferable.
本発明の複合焼結体は、ヤング率が155GPa以上、ヤング率を嵩比重で割った値(ヤング率/嵩比重)の比剛性が52GPa・cm3/g以上であることが好ましい。非接触式形状測定機校正用の基準器は平面基準として平板状で使用する場合もあり、このような場合、ヤング率や比剛性が低いと自重変形が大きくなって測定毎の自重変形の違いが誤差となりやすいので好ましくない。 The composite sintered body of the present invention preferably has a Young's modulus of 155 GPa or more and a specific rigidity of a value obtained by dividing the Young's modulus by the bulk specific gravity (Young's modulus / bulk specific gravity) of 52 GPa · cm 3 / g or more. In some cases, the standard for calibration of non-contact type shape measuring machines is used as a flat reference, and in such cases, if the Young's modulus and specific rigidity are low, the self-weight deformation increases and the difference in self-weight deformation for each measurement Is not preferable because it tends to be an error.
このようにヤング率や比剛性を高くし、また見掛け気孔率を小さくする点から、本発明の複合焼結体は、HIP(熱間静水圧プレス法)等の圧力焼結による焼結品であることが好ましい。 Thus, the composite sintered body of the present invention is a sintered product by pressure sintering such as HIP (hot isostatic pressing) from the viewpoint of increasing Young's modulus and specific rigidity and decreasing the apparent porosity. Preferably there is.
本発明の複合焼結体を使用する非接触式形状測定機校正用の基準器の形状としては、平板、直方体、球又は階段形状が挙げられる。このうち、球形状基準器としては図4のような単独基準球、図5のような球2個の長さバー基準球、図6のような基準球が複数個のボールバー、図7のような多球3次元形状基準器が挙げられる。 Examples of the shape of the reference device for non-contact type shape measuring machine calibration using the composite sintered body of the present invention include a flat plate, a rectangular parallelepiped, a sphere, and a step shape. Among these, as the spherical shape reference device, the single reference sphere as shown in FIG. 4, the two sphere length bar reference spheres as shown in FIG. 5, the reference sphere as shown in FIG. Such a multi-sphere three-dimensional shape reference device can be mentioned.
このような基準球については、図4のような単独基準球が広く使用されている。図5のような2個の基準球は球間の長さ基準として使用される。また、図6のような多球を一直線上に取り付けたボールバーでは3次元形状測定機上で水平、垂直、対角にセットして校正することにより3次元的な校正が可能となる。図7には3次元的な校正をするためのその他形状の多球3次元形状基準器を示している。 As such a reference sphere, a single reference sphere as shown in FIG. 4 is widely used. Two reference spheres as shown in FIG. 5 are used as a length reference between the spheres. In addition, a ball bar in which multispheres as shown in FIG. 6 are mounted in a straight line enables three-dimensional calibration by setting the horizontal, vertical, and diagonal calibrations on a three-dimensional shape measuring machine. FIG. 7 shows a multi-sphere three-dimensional shape reference device having other shapes for three-dimensional calibration.
基準球の精度はつや消し品の場合、真球度1〜5μmに仕上げられるが、最近の高精度の非接触式形状測定機校正用としては真球度1〜3μmであることが好ましい。つや消しの必要ない基準球の場合には真球度0.08〜1μmに仕上げることが好ましく、コストと性能面から真球度0.25〜1μmがより好ましい。 In the case of a matte product, the accuracy of the reference sphere is finished to a sphericity of 1 to 5 μm. However, it is preferable that the accuracy of the reference sphere is 1 to 3 μm for calibrating a recent high-precision non-contact type shape measuring machine. In the case of a reference sphere that does not require matting, the sphericity is preferably 0.08 to 1 μm, and the sphericity is more preferably 0.25 to 1 μm from the viewpoint of cost and performance.
平面基準器としては、平板状で3〜20mm程度の厚みのものが一般的である。また、図8に示す階段形状の基準器は段差ゲージと呼ばれ、垂直方向の高さの校正に使用される。 As the plane reference device, a flat plate having a thickness of about 3 to 20 mm is generally used. The staircase-shaped reference device shown in FIG. 8 is called a step gauge and is used for vertical height calibration.
このような基準器において仕上げ加工される基準面の平面度は測定機の要求により異なるが、精度範囲において0.1〜5μmに仕上げるのが好ましく、2μm以下がより好ましい。基準面につや消しが必要な場合には、基準面は平均表面粗さとしてRa0.2〜0.5μmになるようにつや消し加工を実施する。つや消しが不要の場合にはRaは0.15〜0.001μmに研磨する。大型の平面基準器の場合には自重変形の再現性を良くするために、下面に島出し形状を加工したり、脚を取り付ける等で支持点を固定したりすることにより、自重変形を一定とすることが好ましい。 The flatness of the reference surface to be finished in such a reference device varies depending on the requirements of the measuring machine, but it is preferably finished to 0.1 to 5 μm and more preferably 2 μm or less in the accuracy range. When matting is necessary for the reference surface, the mating process is performed so that the reference surface has an average surface roughness of Ra 0.2 to 0.5 μm. When matting is unnecessary, Ra is polished to 0.15 to 0.001 μm. In order to improve the reproducibility of the self-weight deformation in the case of a large plane reference device, the self-weight deformation is made constant by processing the island shape on the lower surface or fixing the support point by attaching a leg etc. It is preferable to do.
また、本発明の複合焼結体はスケールとして使用することもできる。スケールを作製する場合、樹脂等のスケールパターンを本発明の複合焼結体に印刷する方法と、金属コートした本発明の複合焼結体に露光・現像・エッチングのリソグラフィー法によりスケールパターンを形成する方法の両方が使用できる。 The composite sintered body of the present invention can also be used as a scale. In the case of producing a scale, a scale pattern such as resin is printed on the composite sintered body of the present invention, and a scale pattern is formed on the composite sintered body of the present invention coated with metal by lithography method of exposure / development / etching. Both methods can be used.
以下、実施例によって本発明を具体的に説明する。 Hereinafter, the present invention will be described specifically by way of examples.
コーディエライト68質量%、ジルコン29.4質量%、ジルコニア0.6質量%、酸化ランタン2質量%からなる複合焼結体を焼成、HIP処理により作製した。コーディエライトの組成はMgO:13質量%、Al2O3:34質量%、SiO2:53質量%であった。得られた複合焼結体の密度は2.95g/cm3、見掛け気孔率は0.00%、ヤング率は160GPaで比剛性は54.2GPa・cm3/gであった。 A composite sintered body comprising 68% by mass of cordierite, 29.4% by mass of zircon, 0.6% by mass of zirconia, and 2% by mass of lanthanum oxide was produced by firing and HIP treatment. The composition of cordierite was MgO: 13% by mass, Al 2 O 3 : 34% by mass, and SiO 2 : 53% by mass. The density of the obtained composite sintered body was 2.95 g / cm 3 , the apparent porosity was 0.00%, the Young's modulus was 160 GPa, and the specific rigidity was 54.2 GPa · cm 3 / g.
この複合焼結体のCuKα線によるX線回折の結果を図9に示している。同図より本複合焼結体はコーディエライト、ジルコンと僅かのジルコニア結晶からなることがわかる。 FIG. 9 shows the result of X-ray diffraction of the composite sintered body using CuKα rays. From this figure, it can be seen that this composite sintered body is composed of cordierite, zircon and a few zirconia crystals.
また、本複合焼結体の400〜800nmの入射光に対する全反射率のグラフを図10に示している。同図からわかるように、前記波長領域における平均の全反射率は96.9%で最低値は90.1%であった。 Moreover, the graph of the total reflectance with respect to 400-800 nm incident light of this composite sintered compact is shown in FIG. As can be seen from the figure, the average total reflectance in the wavelength region was 96.9% and the minimum value was 90.1%.
本複合焼結体より50×50×15mm、平面度0.5μm、平均表面粗さRa0.2μmの平面基準器を作製し、前述の光の体積拡散相対係数(RVS)を測定した。その結果、RVS(670)=0.18であった。 A plane reference device having 50 × 50 × 15 mm, flatness of 0.5 μm, and average surface roughness Ra of 0.2 μm was prepared from the composite sintered body, and the volume diffusion relative coefficient (RVS) of the light was measured. As a result, RVS (670) = 0.18.
また、本複合焼結体をベアリング球の加工方法にて研削・研磨して直径25mm、真球度0.25μmの光沢球と真球度1.4μmのつや消し球を作製した。これらの基準球の精密校正後の径の不確かさは、光沢球が0.28μm、つや消し球が1.65μmで、良好であった。さらに、これらの基準球を縞フリンジ投影方式、レーザースキャニング方式及びレーザーポイント測定方式の3方式の門型3次元形状測定にセットして基準球として測定を実施し、全ての方式において測定が可能であることを確認した。 The composite sintered body was ground and polished by a bearing ball processing method to produce a glossy sphere having a diameter of 25 mm and a sphericity of 0.25 μm and a matted sphere having a sphericity of 1.4 μm. The uncertainties of the diameters of these reference spheres after precision calibration were good, with the glossy sphere being 0.28 μm and the matting sphere being 1.65 μm. In addition, these reference spheres can be set as a reference sphere by setting them in three types of portal-type three-dimensional shape measurement, a fringe fringe projection method, a laser scanning method, and a laser point measurement method, and measurement is possible in all methods. I confirmed that there was.
コーディエライト71.1質量%、ジルコン25質量%、ジルコニア0.4質量%、酸化ランタン3.5質量%からなる複合焼結体を焼成、HIP処理により作製した。コーディエライトの組成はMgO:12.8質量%、Al2O3:32.5質量%、SiO2:54.7質量%であった。得られた複合焼結体の密度は2.93g/cm3、見掛け気孔率は0.00%、ヤング率は157GPaで比剛性は53.5GPa・cm3/gであった。また、本複合焼結体の400〜800nmの入射光に対する全反射率の平均は97.2%で最低値は91.5%であった。 A composite sintered body composed of cordierite 71.1% by mass, zircon 25% by mass, zirconia 0.4% by mass, and lanthanum oxide 3.5% by mass was produced by firing and HIP treatment. The composition of the cordierite MgO: 12.8 wt%, Al 2 O 3: 32.5 wt%, SiO 2: 54.7 was mass%. The density of the obtained composite sintered body was 2.93 g / cm 3 , the apparent porosity was 0.00%, the Young's modulus was 157 GPa, and the specific rigidity was 53.5 GPa · cm 3 / g. Moreover, the average of the total reflectance with respect to the incident light of 400 to 800 nm of the composite sintered body was 97.2%, and the lowest value was 91.5%.
本複合焼結体より40×40×8mm、段差2mm、平面度0.5μm、平均表面粗さRa0.2μmの段差基準器を作製し、光の体積拡散相対係数(RVS)を測定した。その結果、RVS(670)=0.27であった。また、この段差基準器をレーザースキャン型の非接触CMMにおいてZ軸方向の段差を測定して、接触型測定機との差を確認したところ、段差の誤差は0.2μm以下と良好であった。 A step standard having a size of 40 × 40 × 8 mm, a step of 2 mm, a flatness of 0.5 μm, and an average surface roughness Ra of 0.2 μm was prepared from the composite sintered body, and a volume diffusion relative coefficient (RVS) of light was measured. As a result, RVS (670) = 0.27. Further, when the difference between the step reference device and the contact type measuring machine was confirmed by measuring the step in the Z-axis direction in a laser scanning type non-contact CMM, the difference in the step was as good as 0.2 μm or less. .
下記表1の成分の複合焼結体を作製して、各複合焼結体から50×70×12mmのつや消しの平面基準器を作製した。そして、各基準器の波長400〜800nmにおける全反射率と光の体積拡散相対係数RVS(670)を測定した。また、各複合焼結体の嵩密度、見掛け気孔率、ヤング率、比剛性、及び20℃での熱膨張係数の物性値を測定した。 A composite sintered body having the components shown in Table 1 below was prepared, and a flat reference device having a mat size of 50 × 70 × 12 mm was prepared from each composite sintered body. And the total reflectance in wavelength 400-800nm of each reference | standard device and the volume diffusion relative coefficient RVS (670) of light were measured. In addition, physical properties of the bulk density, apparent porosity, Young's modulus, specific rigidity, and thermal expansion coefficient at 20 ° C. of each composite sintered body were measured.
表1中、No.1〜15の複合焼結体は、ジルコンとジルコニアの少なくとも一種を21〜50質量%含み、残部が実質的にコーディエライトよりなる本発明例であり、いずれも光の体積拡散相対係数RVS(670)が0.5以下で光の体積拡散が少なくなっていた。 In Table 1, the composite sintered bodies of Nos. 1 to 15 are examples of the present invention containing 21 to 50% by mass of at least one kind of zircon and zirconia, and the balance is substantially made of cordierite. The volume diffusion of light was small when the volume diffusion relative coefficient RVS (670) was 0.5 or less.
一方、No.16はジルコンとジルコニアの含有量が20質量%と少ない比較例、No.16はジルコンとジルコニアの含有量が52質量%と多い比較例で、いずれも光の体積拡散相対係数RVS(670)が0.5を超えていた。 On the other hand, No. 16 is a comparative example in which the content of zircon and zirconia is as low as 20% by mass, and No. 16 is a comparative example in which the content of zircon and zirconia is as high as 52% by mass. (670) was over 0.5.
本発明による体積拡散の少ない非接触式形状測定機校正用のセラミックス基準器は、門型、スタンド型、アーム型等の色々な構造型の非接触形状測定機の校正用に使用される。また、製造ラインにおけるインライン非接触式形状測定ユニットや形状測定機能付きの監視カメラシステム等、その他の非接触形状測定機(光学測定機器)の校正用に使用することもできる。 The ceramic standard for calibration of non-contact type shape measuring machines with small volume diffusion according to the present invention is used for calibrating non-contact type shape measuring machines of various structures such as a portal type, a stand type, and an arm type. It can also be used for calibration of other non-contact shape measuring machines (optical measuring devices) such as an in-line non-contact shape measuring unit or a monitoring camera system with a shape measuring function in a production line.
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