CN102818534B - Detection method for detecting surface shape of plane optical component - Google Patents
Detection method for detecting surface shape of plane optical component Download PDFInfo
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- CN102818534B CN102818534B CN201210289617.0A CN201210289617A CN102818534B CN 102818534 B CN102818534 B CN 102818534B CN 201210289617 A CN201210289617 A CN 201210289617A CN 102818534 B CN102818534 B CN 102818534B
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Abstract
The invention relates to a detection method for detecting the surface shape of a plane optical component of which the reflectivity is greater than 13 percent. Tools used by the detection method comprise a Fizeau interferometer, two plane standard lenses with the reflectivities of 4 percent, a plane standard lens with the reflectivity of 4 percent to 13 percent and a reflective or adsorption attenuation sheet with the transmissivity of between 0.30 and 0.36. The detection method comprises the following steps of: firstly, carrying out absolute inspection on the three standard lenses with the reflectivities of 4 percent, 4 percent and 4 percent to 13 percent to obtain the absolute surface shape of the plane standard lens with the reflectivity of 4 percent to 13 percent; then inserting the attenuation sheet in an interference cavity, carrying out relative inspection on the plane standard lens with the reflectivity of 4 percent to 13 percent and calculating a system error of the interferometer; and finally, carrying out relative inspection on the component to be detected and deducting the system error to obtain the absolute surface shape distribution of the component to be detected. The detection method has high detection accuracy for detection of the plane optical component of which the reflectivity is greater than 13 percent.
Description
Technical field
The invention belongs to interference of light metrology and measurement field, particularly a kind of detection method of the surface shape of plane optical component for reflectivity >13%.
Background technology
The result of fizeau interferometer detection plane optical element surface is subject to the restriction of reference surface surface figure accuracy, and the impact of deduction this respect needs to do absolute inspection to detected element.Three traditional planes examine method 3 measurements mutually can obtain three plane components along the absolute face shape distribution on an axis direction.(1.[G.Schulz, J.Schwider.Precise Measurement of Plainness [J] .Applied Optics, 1967,6 (6): 1077 ~ 1084] and 2.[G.Schulz, J.Schwider, C.Hiller et al.Establishing an Optical Flatness Standard [J] .Applied Optics, 1971,10 (4): 929 ~ 934]).Chiayu Ai and J.C.Wyant examines mutually on the basis of method in traditional three planes and proposes even-odd method, plane surface shape is resolved into even-even, odd-odd, even-odd, very-even four function component, measure and make one of them Plane Rotation 45 ° again for 3 times according to traditional three mutual inspection methods, after the measuring for totally 6 times of 90 ° and 180 °, obtain wherein each component respectively, finally be added the absolute face shape distribution (3.[C.Ai obtaining three plane components, J.C.Wyant.Absolute testing of flats decomposed to even and odd function [C] .SPIE, 1992, 1776:73 ~ 83] and 4.[C.Ai, J.C.Wyant.Absolute testing of flats by using even and odd function [J] .Applied Optics, 1993, 32 (25): 4698 ~ 4705]).M.K ü chel proposes face shape be divided into Rotational Symmetry and rotate asymmetric two parts, rectangular coordinate system is not needed to be converted to polar coordinates, absolute inspection (5.[Michael F.K ü chel.A new approach to solve the three flat problem [J] .Optik of three plane surface shapes has been measured by 9 times, 2001,112 (9): 381 ~ 391]).U.Griesmann proposes Mirror Symmetry method, face shape is divided into Mirror Symmetry and the asymmetric two parts of minute surface, realize three plane surface shapes by 6 measurements and definitely check (6.[Ulf Griesmann.Three-flat test solutions based on simple mirror symmetry [J] .Applied Optics, 2006, 45 (23): 5856 ~ 5865] and 7.[Ulf Griesmann, Quandou Wang, Johannes Soons.Three-flat tests including mounting-induced deformations [J] .Optical Engineering, 2007, 46 (9): 0936011 ~ 09360115]).Definitely the method for inspection, when detecting high reflectance surface shape of plane optical component, causes because intetference-fit strengthening is lower test result to there is comparatively big error, can not detect its plane surface shape exactly above.
Summary of the invention
The object of this invention is to provide a kind of detection method of the surface shape of plane optical component for reflectivity >13%, the surface shape of plane optical component of the method measurement of reflectivity >13% has higher precision, can obtain the absolute face shape distribution of having deducted interferometer system error of planar optical elements to be measured.
Technical solution of the present invention is as follows:
A kind of detection method of the surface shape of plane optical component for reflectivity >13%, instrument that this detection method uses comprises fizeau interferometer, first standard mirror of reflectivity 4% and the second standard mirror, the range of choice of reflectivity is the 3rd standard mirror of 4% ~ 13%, the attenuator of one piece of transmissivity between 0.30 ~ 0.36, its feature is: the method comprises the following steps:
1. utilize described fizeau interferometer, adopt existing absolute method of inspection definitely to check the first standard mirror, the second standard mirror and the 3rd standard mirror, obtain absolute face shape distribution C (x, y) of the 3rd standard mirror and store;
2. the systematic error of fizeau interferometer is measured: by the first standard mirror clamping on the reference mirror adjustment rack of described fizeau interferometer, by the 3rd described standard mirror clamping on the mirror adjustment rack to be measured of fizeau interferometer, described attenuator is inserted between the first standard mirror and the 3rd standard mirror, the inclination angle <1 ° of this attenuator and the first described standard mirror, the fizeau interferometer described in utilization measures the corrugated data W of the 3rd standard mirror
0(x, y) also stores, and described fizeau interferometer goes out the systematic error W of fizeau interferometer by following formulae discovery
sys_err:
W
sys_err=W
O（x，y)-C(x，y)；
3. the 3rd standard mirror on mirror adjustment rack to be measured is replaced by planar optical elements to be measured, utilizes fizeau interferometer to measure planar optical elements corrugated data W to be measured
1(x, y) also stores;
4. described fizeau interferometer utilizes following formulae discovery to go out the absolute face shape distribution W of planar optical elements to be measured
test(x, y):
W
test(x,y)＝W
1(x,y)-W
sys_err＝W
1(x,y)-[W
0(x,y)-C(x,y)]。
The described absolute method of inspection is even-odd method, Rotational Symmetry method or Mirror Symmetry method.
Compared with prior art, its remarkable advantage is in the present invention:
1, during planar optical elements reflectivity >13% to be measured, insert the light intensity attenuation sheet of transmissivity between 0.30 ~ 0.36 and measure.Compared to conventional inspection method, to insert when light intensity attenuation sheet can ensure the surface shape of plane optical component interferometry of reflectivity >13% required more than 80% and interfere contrast, and the measuring error because multiple reflections parasitic interaction causes can not be produced.
2, the present invention avoids the systematic error of fizeau interferometer in measuring, and compared with conventional inspection method, improves accuracy of detection.
Accompanying drawing explanation
Fig. 1 is the inventive method step 2 optical path schematic diagram.
Fig. 2 is the inventive method step 3 optical path schematic diagram.
Embodiment
The object of embodiment, technical scheme and advantage for a better understanding of the present invention, below in conjunction with drawings and Examples, the invention will be further described, but should not limit the scope of the invention with this.
Embodiment 1
For a detection method for the surface shape of plane optical component of reflectivity >13%, step is as follows:
1. fizeau interferometer 1-1 is utilized, the even-odd method described in background technology document 4 is adopted definitely to check 4% reflectivity first standard mirror 2,4% reflectivity second standard mirror and 4% reflectivity the 3rd standard mirror 4, obtain absolute face shape distribution C (x, y) of the 3rd standard mirror 4 and store;
2. by the first standard mirror 2 clamping on the reference mirror adjustment rack 1_2 of fizeau interferometer 1-1, by the 3rd standard mirror 4 clamping on the mirror adjustment rack 1_3 to be measured of fizeau interferometer 1-1, the attenuator 5 that transmissivity is 0.36 is inserted between the first standard mirror 2 and the 3rd standard mirror 4,0.8 °, the inclination angle of this attenuator 5 and the first standard mirror 2, as shown in Figure 1, fizeau interferometer 1-1 is utilized to measure the corrugated data W of the 3rd standard mirror 4
0(x, y) also stores, and fizeau interferometer 1-1 goes out the systematic error W of fizeau interferometer 1 by following formulae discovery
sys_err:
W
sys_err=W
O（x，y)-C(x，y)；
3. the 3rd standard mirror 4 on mirror adjustment rack 1_3 to be measured is replaced by the planar optical elements to be measured 6 of 15% reflectivity, as shown in Figure 2, utilizes fizeau interferometer 1-1 to measure planar optical elements 6 corrugated data W to be measured
1(x, y) also stores;
4. fizeau interferometer 1-1 utilizes following formulae discovery to go out the absolute face shape distribution W of planar optical elements 6 to be measured
test(x, y):
W
test(x,y)＝W
1(x,y)-W
sys_err＝W
1(x,y)-[W
0(x,y)-C(x,y)]。
Measurement result is as shown in table 1 below with existing methodical contrast:
Table 1
Embodiment 2
For a detection method for the surface shape of plane optical component of reflectivity >13%, step is as follows:
1. fizeau interferometer 1-1 is utilized, the Mirror Symmetry method described in background technology document 6 is adopted definitely to check 4% reflectivity first standard mirror 2,4% reflectivity second standard mirror and 13% reflectivity the 3rd standard mirror 4, obtain absolute face shape distribution C (x, y) of the 3rd standard mirror 4 and store;
2. by the first standard mirror 2 clamping on the reference mirror adjustment rack 12 of fizeau interferometer 1-1, by the 3rd standard mirror 4 clamping on the mirror adjustment rack 1_3 to be measured of fizeau interferometer 1-1, the attenuator 5 that transmissivity is 0.30 is inserted between the first standard mirror 2 and the 3rd standard mirror 4,0.2 °, the inclination angle of this attenuator 5 and the first standard mirror 2, as shown in Figure 1, fizeau interferometer 1-1 is utilized to measure the corrugated data W of the 3rd standard mirror 4
0(x, y) also stores, and fizeau interferometer 1-1 goes out the systematic error W of fizeau interferometer 1-1 by following formulae discovery
sys_err:
W
sys_err=W
O（x，y)-C(x，y)；
3. the 3rd standard mirror 4 on mirror adjustment rack 1_3 to be measured is replaced by the planar optical elements to be measured 6 of 80% reflectivity, as shown in Figure 2, utilizes fizeau interferometer 1-1 to measure planar optical elements 6 corrugated data W to be measured
1(x, y) also stores;
Fizeau interferometer 1-1 utilizes following formulae discovery to go out the absolute face shape distribution W of planar optical elements 6 to be measured
test(x, y):
W
test(x,y)＝W
1(x,y)-W
sys_err＝W
1(x,y)-[W
0(x,y)-C(x,y)]。
Measurement result is as shown in table 2 below with existing methodical contrast:
Table 2
Experiment shows, the inventive method detects the surface shape of plane optical component of reflectivity >13% has higher accuracy of detection.
Claims (2)
1. the detection method for the surface shape of plane optical component of reflectivity >13%, instrument that this detection method uses comprises fizeau interferometer (1-1), first standard mirror (2) of reflectivity 4% and the second standard mirror, the range of choice of reflectivity is the 3rd standard mirror (4) of 4% ~ 13%, the attenuator of one piece of transmissivity between 0.30 ~ 0.36 (5), is characterized in that: the method comprises the following steps:
1. described fizeau interferometer (1-1) is utilized, existing absolute method of inspection is adopted definitely to check the first standard mirror (2), the second standard mirror and the 3rd standard mirror (4), obtain absolute face shape distribution C (x, y) of the 3rd standard mirror (4) and store;
2. the systematic error of fizeau interferometer is measured: by the first standard mirror (2) clamping on the reference mirror adjustment rack (1-2) of described fizeau interferometer (1-1), by the 3rd described standard mirror (4) clamping on the mirror adjustment rack (1-3) to be measured of fizeau interferometer (1-1), described attenuator (5) is inserted between the first standard mirror (2) and the 3rd standard mirror (4), the inclination angle <1 ° of this attenuator (5) and the first described standard mirror (2), fizeau interferometer (1-1) described in utilization measures the corrugated data W of the 3rd standard mirror (4)
0(x, y) also stores, and described fizeau interferometer (1-1) goes out the systematic error W of fizeau interferometer (1-1) by following formulae discovery
sys_err:
W
sys_err=W
0(x，y)-C(x，y)；
3. the 3rd standard mirror (4) on mirror adjustment rack (1-3) to be measured is replaced by planar optical elements to be measured (6), utilizes fizeau interferometer (1-1) to measure planar optical elements to be measured (6) corrugated data W
1(x, y) also stores;
4. described fizeau interferometer (1-1) utilizes following formulae discovery to go out the absolute face shape distribution W of planar optical elements to be measured (6)
test(x, y):
W
test(x,y)＝W
1(x,y)-W
sys_err＝W
1(x,y)-[W
0(x,y)-C(x,y)]。
2. the detection method of surface shape of plane optical component according to claim 1, is characterized in that the described absolute method of inspection is even-odd method, Rotational Symmetry method or Mirror Symmetry method.
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| CN104296689B (en) * | 2014-11-06 | 2017-03-15 | 中国科学院光电技术研究所 | Method for detecting weightless surface shape of space reflector with supporting structure |
| CN107388996A (en) * | 2017-09-08 | 2017-11-24 | 上海理工大学 | A kind of plane of reference planarity checking method |
| CN108917662B (en) * | 2018-05-18 | 2020-05-19 | 上海理工大学 | Optimization method for reference surface flatness inspection |
| CN110332905B (en) * | 2019-07-22 | 2024-05-07 | 中国工程物理研究院激光聚变研究中心 | Device and method for detecting in-situ surface shape of optical element in any posture |
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| CN101949690B (en) * | 2010-08-24 | 2012-08-22 | 中国科学院光电技术研究所 | Optical surface shape detection device and optical surface shape detection method |
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Inventor after: Zhang Min Inventor after: Tang Feng Inventor after: Wang Xiangchao Inventor after: Dai Fengzhao Inventor before: Zhang Min Inventor before: Tang Feng Inventor before: Wang Xiangchao Inventor before: Dai Fengjian |
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