JP2017173604A - Manufacturing apparatus of liquid crystal panel - Google Patents

Manufacturing apparatus of liquid crystal panel Download PDF

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JP2017173604A
JP2017173604A JP2016060318A JP2016060318A JP2017173604A JP 2017173604 A JP2017173604 A JP 2017173604A JP 2016060318 A JP2016060318 A JP 2016060318A JP 2016060318 A JP2016060318 A JP 2016060318A JP 2017173604 A JP2017173604 A JP 2017173604A
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temperature
liquid crystal
flow path
temperature control
path member
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JP6686600B2 (en
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純 藤岡
Jun Fujioka
純 藤岡
亮彦 田内
Akihiko Tauchi
亮彦 田内
剛雄 加藤
Takeo Kato
剛雄 加藤
弘喜 日野
Hiroyoshi Hino
弘喜 日野
貴章 田中
Takaaki Tanaka
貴章 田中
祥平 前田
Shohei Maeda
祥平 前田
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Toshiba Lighting and Technology Corp
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Toshiba Lighting and Technology Corp
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Priority to KR1020160114307A priority patent/KR102497669B1/en
Priority to TW105130179A priority patent/TWI695213B/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G02F1/13793—Blue phases

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)

Abstract

PROBLEM TO BE SOLVED: To suppress temperature unevenness in a panel to be processed when irradiated with ultraviolet.SOLUTION: A manufacturing apparatus of liquid crystal panel according to an embodiment comprises: an ultraviolet light source including a substrate on which a light-emitting element is provided; a stage on which is mounted a panel to be processed including a liquid crystal layer irradiated with ultraviolet of the ultraviolet light source; a first channel member through which a temperature control medium controlling the temperature of the substrate flows; a second channel member through which a temperature control medium controlling the temperature of the stage flows; and a temperature controller controlling a temperature t(°C) of the temperature control medium flowing through the first channel member to fall in a temperature range satisfying (t-30)≤t≤(t+30), where t(°C) represents development temperature at which a polymer stabilised blue phase is developed on the liquid crystal layer.SELECTED DRAWING: Figure 1

Description

本発明の実施形態は、液晶パネルの製造装置に関する。   Embodiments described herein relate generally to a liquid crystal panel manufacturing apparatus.

液晶パネルで用いられる液晶材料として、光学的等方性液晶層である高分子安定化ブルー相（ＰＳＢＰ：Ｐｏｌｙｍｅｒ Ｓｔａｂｉｌｉｚｅｄ Ｂｌｕｅ Ｐｈａｓｅ）が知られている。このような高分子安定化ブルー相は、液晶層を有する被処理パネルに対して紫外線を照射するときに、被処理パネルの温度と、紫外線の照射時間とを適正に制御することで生成される。   As a liquid crystal material used in a liquid crystal panel, a polymer stabilized blue phase (PSBP) which is an optically isotropic liquid crystal layer is known. Such a polymer-stabilized blue phase is generated by appropriately controlling the temperature of the panel to be processed and the irradiation time of the ultraviolet ray when the panel to be processed having the liquid crystal layer is irradiated with ultraviolet rays. .

高分子安定化ブルー相を有する液晶パネルの製造装置としては、紫外線光源の紫外線を、ステージ上に載置された被処理パネルに照射する構成が知られている。   As an apparatus for manufacturing a liquid crystal panel having a polymer-stabilized blue phase, a configuration is known in which ultraviolet rays from an ultraviolet light source are irradiated onto a panel to be processed placed on a stage.

特開２０１５−１９４６２３号公報JP-A-2015-194623

上述の液晶パネルの製造装置では、紫外線を被処理パネルに照射するときに生じる、被処理パネルの照射面の面内方向における温度むらや、被処理パネルの温度の経時変化が、液晶パネルの表示特性にむらを招く影響が大きい。このため、被処理パネルの照射面の面内方向における温度を均一化することが望ましい。   In the liquid crystal panel manufacturing apparatus described above, the temperature variation in the in-plane direction of the irradiated surface of the panel to be processed and the change in the temperature of the panel to be processed that occur when the panel is irradiated with ultraviolet rays are displayed on the liquid crystal panel. The effect of causing unevenness in characteristics is large. For this reason, it is desirable to equalize the temperature in the in-plane direction of the irradiation surface of the panel to be processed.

一方、紫外線光源として放電ランプを用いた場合、不要な波長の紫外線が液晶層に照射されることで液晶層に影響を及ぼすおそれがある。この対策としては、紫外線光源として、ＬＥＤ（発光ダイオード）を有するＬＥＤ光源が用いられている。しかし、ＬＥＤ光源を用いた液晶パネルの製造装置では、ＬＥＤ光源と被処理パネルとが近接された状態で紫外線が照射されるので、ＬＥＤ光源の温度が被処理パネルに影響を及ぼし、被処理パネルに温度むらを招くおそれがある。   On the other hand, when a discharge lamp is used as the ultraviolet light source, the liquid crystal layer may be affected by irradiating the liquid crystal layer with ultraviolet light having an unnecessary wavelength. As a countermeasure, an LED light source having an LED (light emitting diode) is used as an ultraviolet light source. However, in an apparatus for manufacturing a liquid crystal panel using an LED light source, ultraviolet light is irradiated in a state where the LED light source and the panel to be processed are close to each other, so that the temperature of the LED light source affects the panel to be processed. May cause uneven temperature.

そこで、本発明は、紫外線の照射時に被処理パネルに温度むらが生じることを抑制することができる液晶パネルの製造装置を提供することを目的とする。   Therefore, an object of the present invention is to provide an apparatus for manufacturing a liquid crystal panel, which can suppress the occurrence of temperature unevenness in a panel to be processed during ultraviolet irradiation.

実施形態に係る液晶パネルの製造装置は、発光素子が設けられた基板を有する紫外線光源と、前記紫外線光源の紫外線が照射される液晶層を有する被処理パネルが載置されるステージと、前記基板の温度を調節する温調媒体が流れる第１の流路部材と、前記ステージの温度を調節する温調媒体が流れる第２の流路部材と、前記液晶層に高分子安定化ブルー相が発現する発現温度をｔ０（℃）としたときに、前記第１の流路部材を流れる温調媒体の温度ｔ１（℃）を、（ｔ０−３０）≦ｔ１≦（ｔ０＋３０）を満たす温度範囲に制御する温度制御装置と、を具備する。 An apparatus for manufacturing a liquid crystal panel according to an embodiment includes an ultraviolet light source having a substrate on which a light emitting element is provided, a stage on which a panel to be processed having a liquid crystal layer irradiated with ultraviolet rays from the ultraviolet light source, and the substrate A first flow path member through which a temperature control medium for adjusting the temperature of the second flow member, a second flow path member through which a temperature control medium for adjusting the temperature of the stage flows, and a polymer-stabilized blue phase appear in the liquid crystal layer the expression temperatures of when the t 0 (℃), the temperature t 1 of the temperature control medium flowing through the first flow path member (℃), (t 0 -30 ) ≦ t 1 ≦ (t 0 +30) And a temperature control device that controls the temperature to satisfy the temperature range.

本発明によれば、紫外線の照射時に被処理パネルに温度むらが生じることを抑制することができる。   According to the present invention, it is possible to suppress the occurrence of temperature unevenness in the panel to be processed during ultraviolet irradiation.

実施形態に係る液晶パネルの製造装置を示す模式図である。It is a schematic diagram which shows the manufacturing apparatus of the liquid crystal panel which concerns on embodiment. 実施形態に係る液晶パネルの製造装置が有する紫外線光源を示す断面図である。It is sectional drawing which shows the ultraviolet light source which the manufacturing apparatus of the liquid crystal panel which concerns on embodiment has. 実施形態に係る液晶パネルの製造装置が有する温度制御装置を示す模式図である。It is a schematic diagram which shows the temperature control apparatus which the manufacturing apparatus of the liquid crystal panel which concerns on embodiment has. 実施形態に係る液晶パネルの製造装置が有する第１の流路部材及び第２の流路部材の各流路を示す模式図である。It is a schematic diagram which shows each flow path of the 1st flow path member and the 2nd flow path member which the manufacturing apparatus of the liquid crystal panel which concerns on embodiment has. 実施形態に係る液晶パネルの製造装置が有する第１の流路部材及び第２の流路部材の各流路の変形例を示す模式図である。It is a schematic diagram which shows the modification of each flow path of the 1st flow path member and the 2nd flow path member which the manufacturing apparatus of the liquid crystal panel which concerns on embodiment has. 実施形態に係る液晶パネルの製造装置が有する第１の流路部材及び第２の流路部材の各流路の他の変形例を示す模式図である。It is a schematic diagram which shows the other modification of each flow path of the 1st flow path member and the 2nd flow path member which the manufacturing apparatus of the liquid crystal panel which concerns on embodiment has.

以下で説明する実施形態に係る液晶パネルの製造装置１は、紫外線光源１０と、ステージ１２と、第１の流路部材１３と、第２の流路部材１４と、温度制御装置１５と、を具備する。紫外線光源１０は、発光素子としてのＬＥＤ１０ａが設けられた基板１０ｂを有する。ステージ１２は、紫外線光源１０の紫外線が照射される液晶層を有する被処理パネル７が載置される。第１の流路部材１３は、基板１０ｂの温度を調節する温調媒体が流れる。第２の流路部材１４は、ステージ１２の温度を調節する温調媒体が流れる。温度制御装置１５は、液晶層に高分子安定化ブルー相が発現する発現温度をｔ０（℃）としたときに、第１の流路部材１３を流れる温調媒体の温度ｔ１（℃）を、（ｔ０−３０）≦ｔ１≦（ｔ０＋３０）を満たす温度範囲に制御する。 A liquid crystal panel manufacturing apparatus 1 according to an embodiment described below includes an ultraviolet light source 10, a stage 12, a first flow path member 13, a second flow path member 14, and a temperature control device 15. It has. The ultraviolet light source 10 includes a substrate 10b provided with an LED 10a as a light emitting element. On the stage 12, a panel 7 to be processed having a liquid crystal layer irradiated with ultraviolet rays from the ultraviolet light source 10 is placed. A temperature adjusting medium for adjusting the temperature of the substrate 10 b flows through the first flow path member 13. A temperature control medium that adjusts the temperature of the stage 12 flows through the second flow path member 14. The temperature control device 15 uses the temperature t 1 (° C.) of the temperature control medium flowing through the first flow path member 13 when the expression temperature at which the polymer-stabilized blue phase appears in the liquid crystal layer is t 0 (° C.). Is controlled to a temperature range satisfying (t 0 −30) ≦ t 1 ≦ (t 0 +30).

また、以下で説明する実施形態に係る液晶パネルの製造装置１は、紫外線光源１０及びステージ１２が配置された処理室６内の温度を調節する空調装置２５を更に具備する。   In addition, the liquid crystal panel manufacturing apparatus 1 according to the embodiment described below further includes an air conditioner 25 that adjusts the temperature in the processing chamber 6 in which the ultraviolet light source 10 and the stage 12 are arranged.

また、以下で説明する実施形態に係る液晶パネルの製造装置１は、第１の流路部材１３を流れる温調媒体の温度を検出する検出素子としての温度センサ２２を更に具備する。温度制御装置１５は、温度センサ２２が検出した温調媒体の温度に基づいて、温調媒体の温度を上述の温度範囲内に制御する。   The liquid crystal panel manufacturing apparatus 1 according to the embodiment described below further includes a temperature sensor 22 as a detection element that detects the temperature of the temperature control medium flowing through the first flow path member 13. The temperature control device 15 controls the temperature of the temperature adjustment medium within the above temperature range based on the temperature of the temperature adjustment medium detected by the temperature sensor 22.

また、以下で説明する実施形態に係る液晶パネルの製造装置１における温度制御装置１５は、第１の流路部材１３を流れる温調媒体を加熱するヒータ２１を有する。   In addition, the temperature control device 15 in the liquid crystal panel manufacturing apparatus 1 according to the embodiment described below includes a heater 21 that heats the temperature control medium flowing through the first flow path member 13.

また、以下で説明する実施形態に係る液晶パネルの製造装置１における被処理パネル７の液晶層は、ネマティック液晶組成物と、ブルー相を発現する液晶組成物と、重合性モノマーとを含み、紫外線を照射することで高分子安定化ブルー相を発現する。   In addition, the liquid crystal layer of the panel 7 to be processed in the liquid crystal panel manufacturing apparatus 1 according to the embodiment described below includes a nematic liquid crystal composition, a liquid crystal composition that exhibits a blue phase, and a polymerizable monomer, and includes ultraviolet rays. The polymer-stabilized blue phase is expressed by irradiating.

（実施形態）
以下、実施形態に係る液晶パネルの製造装置１について、図面を参照して説明する。図１は、実施形態に係る液晶パネルの製造装置１を示す模式図である。図２は、実施形態に係る液晶パネルの製造装置１が有する紫外線光源１０を示す断面図である。図３は、実施形態に係る液晶パネルの製造装置１が有する温度制御装置１５を示す模式図である。 (Embodiment)
A liquid crystal panel manufacturing apparatus 1 according to an embodiment will be described below with reference to the drawings. FIG. 1 is a schematic diagram showing a liquid crystal panel manufacturing apparatus 1 according to an embodiment. FIG. 2 is a cross-sectional view showing the ultraviolet light source 10 included in the liquid crystal panel manufacturing apparatus 1 according to the embodiment. FIG. 3 is a schematic diagram illustrating a temperature control device 15 included in the liquid crystal panel manufacturing apparatus 1 according to the embodiment.

（液晶パネルの製造装置の構成）
図１に示すように、実施形態に係る液晶パネルの製造装置１は、複数の紫外線光源１０と、紫外線光源１０の紫外線が照射される被処理パネル７が載置されるステージ１２と、を備える。また、液晶パネルの製造装置１は、紫外線光源１０の基板１０ｂの温度を調節する温調媒体が流れる第１の流路部材１３と、ステージ１２の温度を調節する温調媒体が流れる第２の流路部材１４と、第１の流路部材１３を流れる温調媒体の温度を制御する温度制御装置１５と、を備える。 (Configuration of LCD panel manufacturing equipment)
As shown in FIG. 1, the liquid crystal panel manufacturing apparatus 1 according to the embodiment includes a plurality of ultraviolet light sources 10 and a stage 12 on which a panel to be processed 7 irradiated with ultraviolet rays from the ultraviolet light sources 10 is placed. . The liquid crystal panel manufacturing apparatus 1 also includes a first flow path member 13 through which a temperature adjusting medium for adjusting the temperature of the substrate 10b of the ultraviolet light source 10 flows, and a second channel through which the temperature adjusting medium for adjusting the temperature of the stage 12 flows. The flow path member 14 and the temperature control apparatus 15 which controls the temperature of the temperature control medium which flows through the 1st flow path member 13 are provided.

液晶パネルの製造装置１の紫外線光源１０によって紫外線が照射される被処理パネル７は、図示しないが、カラーフィルタ基板と、カラーフィルタ基板に対向する対向基板と、カラーフィルタ基板と対向基板との間に設けられた液晶層と、を有する。   The panel to be processed 7 irradiated with ultraviolet rays by the ultraviolet light source 10 of the liquid crystal panel manufacturing apparatus 1 is not shown, but includes a color filter substrate, a counter substrate facing the color filter substrate, and between the color filter substrate and the counter substrate. A liquid crystal layer.

カラーフィルタ基板は、例えば、赤色、緑色、青色の光を透過するカラーフィルタが基板上に配置され、保護膜でカラーフィルタが覆われて形成されている。対向基板は、複数の電極がアレイ状に配置された基板である。液晶層は、少なくとも、ネマティック液晶組成物、ブルー相を発現する液晶組成物、及び、重合性モノマーを含む。液晶層は、紫外線光源１０によって紫外線が照射されることで、高分子安定化ブルー相を発現する。液晶層を構成するネマティック液晶組成物は、誘電異方性を有する材料によって形成されている。重合性モノマーとは、ネマティック液晶組成物や高分子安定化ブルー相を発現する液晶組成物の組成を安定化させるための材料である。   The color filter substrate is formed by, for example, arranging a color filter that transmits red, green, and blue light on the substrate and covering the color filter with a protective film. The counter substrate is a substrate in which a plurality of electrodes are arranged in an array. The liquid crystal layer includes at least a nematic liquid crystal composition, a liquid crystal composition expressing a blue phase, and a polymerizable monomer. The liquid crystal layer exhibits a polymer-stabilized blue phase when irradiated with ultraviolet rays from the ultraviolet light source 10. The nematic liquid crystal composition constituting the liquid crystal layer is formed of a material having dielectric anisotropy. The polymerizable monomer is a material for stabilizing the composition of a nematic liquid crystal composition or a liquid crystal composition that exhibits a polymer-stabilized blue phase.

ブルー相を発現する液晶組成物とは、安定して存在できる温度範囲を例えば、常温、具体的には０（℃）以上に拡大しながらも、紫外線が照射されることで、ネマティック液晶組成物よりも高速な応答性を実現可能な材料である。ブルー相を発現する液晶組成物とは、例えば、１０（℃）〜６０（℃）の間で設定される所定の発現温度に対して、温度が±０．５（℃）以内に保たれた状態で、紫外線が照射されることで、むらなく高分子安定化ブルー相を発現するものである。例えば、発現温度が５５（℃）である場合には、ブルー相を発現する液晶組成物とは、温度が５４．５（℃）〜５５．５（℃）の範囲内に保たれた状態で、紫外線が照射されることで、むらなく高分子安定化ブルー相を発現する材料である。また、発現温度が６０（℃）である場合、ブルー相を発現する液晶組成物とは、温度が５９．５（℃）〜６０．５（℃）の範囲内に保たれた状態で、紫外線が照射されることで、むらなく高分子安定化ブルー相を発現する材料である。   A liquid crystal composition exhibiting a blue phase is a nematic liquid crystal composition that is irradiated with ultraviolet rays while expanding the temperature range in which it can exist stably, for example, to room temperature, specifically 0 (° C.) or higher. It is a material that can realize faster responsiveness. With the liquid crystal composition expressing the blue phase, for example, the temperature is kept within ± 0.5 (° C.) with respect to a predetermined expression temperature set between 10 (° C.) and 60 (° C.). In the state, the polymer-stabilized blue phase is uniformly exhibited by being irradiated with ultraviolet rays. For example, when the onset temperature is 55 (° C.), the liquid crystal composition expressing the blue phase is in a state where the temperature is maintained within the range of 54.5 (° C.) to 55.5 (° C.). It is a material that evenly exhibits a polymer-stabilized blue phase when irradiated with ultraviolet rays. In addition, when the onset temperature is 60 (° C.), the liquid crystal composition expressing the blue phase is an ultraviolet ray in a state where the temperature is maintained in the range of 59.5 (° C.) to 60.5 (° C.). Is a material that evenly develops a polymer-stabilized blue phase.

本実施形態では、温度制御装置１５が、被処理パネル７の液晶層に高分子安定化ブルー相が発現する発現温度をｔ０（℃）としたときに、第１の流路部材１３の流路１３ａを流れる温調媒体の温度ｔ１（℃）を、（ｔ０−３０）≦ｔ１≦（ｔ０＋３０）を満たす温度範囲に制御する。すなわち、第１の流路部材１３を流れる温調媒体の温度ｔ１（℃）は、発現温度ｔ０（℃）に対して、−３０（℃）以上、＋３０（℃）以下の温度範囲に制御されることで、紫外線光源１０の温度が、ステージ１２上の被処理パネル７の温度に影響を及ぼすことが抑制される。このため、高分子安定化ブルー相を発現する所定の発現温度ｔ０（℃）に対して、被処理パネル７の温度を±０．５（℃）以内に保ちやすくなり、高分子安定化ブルー相をむらなく適正に発現することが可能になる。 In the present embodiment, when the temperature control device 15 sets the expression temperature at which the polymer-stabilized blue phase appears in the liquid crystal layer of the panel 7 to be processed to t 0 (° C.), the flow of the first flow path member 13 The temperature t 1 (° C.) of the temperature control medium flowing through the path 13a is controlled to a temperature range that satisfies (t 0 −30) ≦ t 1 ≦ (t 0 +30). That is, the temperature t 1 (° C.) of the temperature control medium flowing through the first flow path member 13 is within a temperature range of −30 (° C.) to +30 (° C.) with respect to the expression temperature t 0 (° C.). By being controlled, the temperature of the ultraviolet light source 10 is suppressed from affecting the temperature of the panel 7 to be processed on the stage 12. For this reason, it becomes easy to keep the temperature of the panel 7 to be treated within ± 0.5 (° C.) with respect to a predetermined expression temperature t 0 (° C.) at which the polymer stabilized blue phase is expressed. The phase can be expressed properly without unevenness.

紫外線光源１０は、図２に示すように、紫外線を発する発光素子としての複数のＬＥＤ１０ａと、ＬＥＤ１０ａが設けられた基板１０ｂとを有しており、いわゆる線状のＬＥＤ光源が用いられている。複数のＬＥＤ１０ａは、長尺状の基板１０ｂの長手方向に沿って所定の間隔をあけて配置されている。例えば、複数の紫外線光源１０は、紫外線光源１０の長手方向に沿って配列されている。また、複数の紫外線光源１０は、平面上に所定の間隔で配列することで面光源として構成されてもよい。本実施形態では、例えば、紫外線光源１０が放射する波長３６５ｎｍの光による照度が、２ｍＷ／ｃｍ２程度に設定されている。なお、発光素子は複数のＬＥＤ１０ａを有しているが、複数のＬＥＤに限定されるものではない。例えば、ＬＤ（Ｌａｓｅｒ Ｄｉｏｄｅ）などの半導体発光素子であれば、どのような形態でもよい。 As shown in FIG. 2, the ultraviolet light source 10 includes a plurality of LEDs 10a as light emitting elements that emit ultraviolet light and a substrate 10b on which the LEDs 10a are provided, and a so-called linear LED light source is used. Several LED10a is arrange | positioned at predetermined intervals along the longitudinal direction of the elongate board | substrate 10b. For example, the plurality of ultraviolet light sources 10 are arranged along the longitudinal direction of the ultraviolet light source 10. Moreover, the several ultraviolet light source 10 may be comprised as a surface light source by arranging at a predetermined space | interval on a plane. In the present embodiment, for example, the illuminance by light having a wavelength of 365 nm emitted from the ultraviolet light source 10 is set to about 2 mW / cm 2 . In addition, although the light emitting element has several LED10a, it is not limited to several LED. For example, any form may be used as long as it is a semiconductor light emitting element such as LD (Laser Diode).

ステージ１２は、紫外線光源１０の直下に対向して配置されており、第２の流路部材１４の流路１４ａを流れる温調媒体が流れる流路（図示せず）を有する。また、ステージ１２には、被処理パネル７全体を覆うように保温ボックス１６が設けられており、保温ボックス１６内へ所定の温度の空気が送風装置（図示せず）から送られる。   The stage 12 is disposed so as to face directly below the ultraviolet light source 10, and has a flow path (not shown) through which the temperature control medium flowing through the flow path 14 a of the second flow path member 14 flows. The stage 12 is provided with a heat retaining box 16 so as to cover the entire panel 7 to be processed, and air having a predetermined temperature is sent into the heat retaining box 16 from a blower (not shown).

第１の流路部材１３は、紫外線光源１０の基板１０ｂの温度を調節する温調媒体が循環する環状の流路を有する。第２の流路部材１４は、ステージ１２の温度を調節する温調媒体が循環する環状の流路を有する。温調媒体としては、例えば、水が用いられているが、ガス等の他の流体が用いられてもよい。   The first flow path member 13 has an annular flow path through which a temperature control medium that adjusts the temperature of the substrate 10 b of the ultraviolet light source 10 circulates. The second flow path member 14 has an annular flow path through which a temperature control medium that adjusts the temperature of the stage 12 circulates. For example, water is used as the temperature control medium, but other fluids such as gas may be used.

また、図２に示すように、第１の流路部材１３は、紫外線光源１０の基板１０ｂを放熱するための放熱部材１７を有する。放熱部材１７は、例えば、アルミニウム等によって形成されており、所定の伝熱性が確保されている。放熱部材１７は、紫外線光源１０の基板１０ｂに接して設けられた第１の支持部材１８と、第１の支持部材１８を支持する第２の支持部材１９と、を有する。第２の支持部材１９には、温調媒体が流れる流路１９ａが設けられている。この流路１９ａは、第１の流路部材１３の流路１３ａに連通されている。また、第２の支持部材１９には、第１の支持部材１８を負圧で吸着するための通気孔１９ｂが設けられている。   In addition, as shown in FIG. 2, the first flow path member 13 has a heat radiating member 17 for radiating heat from the substrate 10 b of the ultraviolet light source 10. The heat radiating member 17 is made of, for example, aluminum, and a predetermined heat transfer property is ensured. The heat radiating member 17 includes a first support member 18 provided in contact with the substrate 10 b of the ultraviolet light source 10 and a second support member 19 that supports the first support member 18. The second support member 19 is provided with a flow path 19a through which the temperature adjustment medium flows. The flow path 19 a communicates with the flow path 13 a of the first flow path member 13. The second support member 19 is provided with a vent hole 19b for adsorbing the first support member 18 with a negative pressure.

本実施形態における温度制御装置１５は、図１及び図３に示すように、第１の流路部材１３の流路１３ａを流れる温調媒体を加熱するヒータ２１と、第１の流路部材１３の流路１３ａを流れる温調媒体の温度を検出する検出素子としての温度センサ２２と、温度センサ２２が検出した温度に基づいてヒータ２１を制御することで、第１の流路部材１３の流路１３ａを流れる温調媒体の温度を制御する制御部２３と、を有する。   As shown in FIGS. 1 and 3, the temperature control device 15 in the present embodiment includes a heater 21 that heats the temperature control medium that flows through the flow path 13 a of the first flow path member 13, and the first flow path member 13. The temperature sensor 22 as a detection element that detects the temperature of the temperature control medium flowing through the flow path 13a, and the heater 21 is controlled based on the temperature detected by the temperature sensor 22, thereby allowing the flow of the first flow path member 13 to flow. And a control unit 23 that controls the temperature of the temperature control medium flowing through the path 13a.

ヒータ２１は、図３に示すように、第１の流路部材１３の一部の流路１３ａ内に配置されており、電源（図示せず）を介して制御部２３と接続されている。温度センサ２２は、第１の流路部材１３の一部、例えば、第１の流路部材１３においてヒータ２１の下流側に配置されており、制御部２３と接続されている。また、温度センサ２２は、紫外線光源１０の基板１０ｂ近傍の流路１３ａに設けられてもよく、基板１０ｂの温度を適正に制御することが可能になる。制御部２３は、第１の流路部材１３の流路１３ａ内の温調媒体が、上述した温度範囲内になるように温度を制御する。   As shown in FIG. 3, the heater 21 is disposed in a part of the flow path 13 a of the first flow path member 13, and is connected to the control unit 23 via a power source (not shown). The temperature sensor 22 is disposed on a part of the first flow path member 13, for example, on the downstream side of the heater 21 in the first flow path member 13, and is connected to the control unit 23. Further, the temperature sensor 22 may be provided in the flow path 13a in the vicinity of the substrate 10b of the ultraviolet light source 10, and it becomes possible to appropriately control the temperature of the substrate 10b. The control unit 23 controls the temperature so that the temperature adjustment medium in the flow path 13a of the first flow path member 13 is within the above-described temperature range.

また、温度制御装置１５は、ヒータ２１を有する構成に限定されるものではなく、例えば、温調媒体を加熱及び冷却するチラー装置（図示せず）が用いられてもよい。第２の流路部材１４の流路１４ａを流れる温調媒体の温度を制御する温度制御装置について図示を省略するが、上述した温度制御装置１５と同様に構成されてもよい。   Moreover, the temperature control apparatus 15 is not limited to the structure which has the heater 21, For example, the chiller apparatus (not shown) which heats and cools a temperature control medium may be used. Although illustration is omitted about the temperature control apparatus which controls the temperature of the temperature control medium which flows through the flow path 14a of the 2nd flow path member 14, you may be comprised similarly to the temperature control apparatus 15 mentioned above.

また、図１に示すように、紫外線光源１０及びステージ１２は、被処理パネル７に紫外線を照射する処理室６内に配置されている。処理室６内の温度は、空調装置２５によって所定の温度に調節されている。空調装置２５は、処理室６内へ所定の温度の空気を送る送風管２５ａと、処理室６内から空気を排出する排気管２５ｂとを有する。処理室６の側壁には、空調装置２５の送風管２５ａ及び排気管２５ｂが連結されている。   Further, as shown in FIG. 1, the ultraviolet light source 10 and the stage 12 are disposed in a processing chamber 6 that irradiates the panel 7 to be processed with ultraviolet rays. The temperature in the processing chamber 6 is adjusted to a predetermined temperature by the air conditioner 25. The air conditioner 25 includes a blower pipe 25 a that sends air at a predetermined temperature into the processing chamber 6, and an exhaust pipe 25 b that discharges air from the processing chamber 6. A blower pipe 25 a and an exhaust pipe 25 b of the air conditioner 25 are connected to the side wall of the processing chamber 6.

（第１の流路部材と第２の流路部材の各流路の構成）
図４は、実施形態に係る液晶パネルの製造装置１が有する第１の流路部材１３及び第２の流路部材１４の各流路１３ａ、１４ａを示す模式図である。第１の流路部材１３の流路１３ａと第２の流路部材１４の流路１４ａは、例えば、図４に示すように、互いに独立して設けられており、温調媒体がそれぞれ独立して流れる。 (Configuration of each flow path of the first flow path member and the second flow path member)
FIG. 4 is a schematic diagram showing the flow paths 13 a and 14 a of the first flow path member 13 and the second flow path member 14 included in the liquid crystal panel manufacturing apparatus 1 according to the embodiment. For example, as shown in FIG. 4, the flow path 13a of the first flow path member 13 and the flow path 14a of the second flow path member 14 are provided independently of each other, and the temperature control medium is independent of each other. Flowing.

このため、第１の流路部材１３の流路１３ａを流れる温調媒体と、第２の流路部材１４の流路１４ａを流れる温調媒体とを異なる温度に制御することが可能になり、紫外線光源１０の基板１０ｂと、ステージ１２上の被処理パネル７とを、それぞれ適正な温度に制御することができる。また、第１の流路部材１３の流路１３ａを流れる温調媒体と、第２の流路部材１４の流路１４ａを流れる温調媒体として、異なる温調媒体を用いることが可能になり、紫外線光源１０の温度と、ステージ１２上の被処理パネル７の温度との制御に適した温調媒体を選択することもできる。   For this reason, it becomes possible to control the temperature control medium flowing through the flow path 13a of the first flow path member 13 and the temperature control medium flowing through the flow path 14a of the second flow path member 14 to different temperatures. The substrate 10b of the ultraviolet light source 10 and the panel 7 to be processed on the stage 12 can be controlled to appropriate temperatures. Also, different temperature control media can be used as the temperature control medium flowing through the flow path 13a of the first flow path member 13 and the temperature control medium flowing through the flow path 14a of the second flow path member 14. A temperature control medium suitable for controlling the temperature of the ultraviolet light source 10 and the temperature of the panel 7 to be processed on the stage 12 can also be selected.

なお、第１の流路部材１３の流路１３ａと第２の流路部材１４の流路１４ａは、必要に応じて、後述する変形例のように構成されてもよい。   In addition, the flow path 13a of the 1st flow path member 13 and the flow path 14a of the 2nd flow path member 14 may be comprised like the modification mentioned later as needed.

（液晶パネルの製造装置における温度制御）
温度制御装置１５は、第１の流路部材１３の流路１３ａを流れる温調媒体の温度ｔ１を、上述のように、発現温度ｔ０に対して−３０（℃）以上、＋３０（℃）以下の温度範囲内に制御することで、紫外線光源１０の熱が、ステージ１２上の被処理パネル７の温度に及ぼす影響が抑えられる。このため、被処理パネル７の照射面の面内方向において温度むらが生じることが抑えられる。また、第１の流路部材１３の流路１３ａを流れる温調媒体の温度は、−２０（℃）以上、＋２０（℃）以下の温度範囲内に制御することが好ましく、被処理パネル７に温度むらが生じることをより一層抑えられる。 (Temperature control in liquid crystal panel manufacturing equipment)
As described above, the temperature control device 15 sets the temperature t 1 of the temperature control medium flowing through the flow path 13a of the first flow path member 13 to −30 (° C.) or higher with respect to the expression temperature t 0 . ) By controlling within the following temperature range, the influence of the heat of the ultraviolet light source 10 on the temperature of the panel 7 to be processed on the stage 12 can be suppressed. For this reason, it is suppressed that the temperature nonuniformity arises in the surface direction of the irradiation surface of the to-be-processed panel 7. FIG. The temperature of the temperature control medium flowing through the flow path 13a of the first flow path member 13 is preferably controlled within a temperature range of −20 (° C.) or higher and +20 (° C.) or lower. The occurrence of uneven temperature can be further suppressed.

また、ステージ１２内を流れる温調媒体の温度、すなわち第２の流路部材１４の流路１４ａを流れる温調媒体の温度と、空調装置２５による処理室６内の温度は、例えば、４０（℃）程度に設定されており、互いに等しい温度に制御されることが好ましい。これにより、ステージ１２上の被処理パネル７の温度の変動が抑えられる。   Further, the temperature of the temperature adjustment medium flowing in the stage 12, that is, the temperature of the temperature adjustment medium flowing in the flow path 14a of the second flow path member 14, and the temperature in the processing chamber 6 by the air conditioner 25 are, for example, 40 ( It is preferable that the temperature is set to be equal to each other and controlled to be equal to each other. Thereby, the fluctuation | variation of the temperature of the to-be-processed panel 7 on the stage 12 is suppressed.

上述のように実施形態の液晶パネルの製造装置１は、被処理パネル７の液晶層に高分子安定化ブルー相が発現する発現温度をｔ０（℃）としたときに、第１の流路部材１３を流れる温調媒体の温度ｔ１（℃）を、（ｔ０−３０）≦ｔ１≦（ｔ０＋３０）を満たす温度範囲に制御する温度制御装置１５を備える。これにより、紫外線光源１０の熱が、ステージ１２上の被処理パネル７の温度に及ぼす影響が抑えられる。したがって、高分子安定化ブルー相の発現する温度ｔ０に対して＋０．５（℃）〜−０．５（℃）に容易に制御することが可能になり、紫外線の照射時に被処理パネル７の面内方向に温度むらが生じることを抑制することができる。 As described above, the liquid crystal panel manufacturing apparatus 1 according to the embodiment has the first flow path when the expression temperature at which the polymer-stabilized blue phase appears in the liquid crystal layer of the panel to be processed 7 is t 0 (° C.). A temperature control device 15 is provided that controls the temperature t 1 (° C.) of the temperature control medium flowing through the member 13 to a temperature range that satisfies (t 0 −30) ≦ t 1 ≦ (t 0 +30). Thereby, the influence which the heat | fever of the ultraviolet light source 10 has on the temperature of the to-be-processed panel 7 on the stage 12 is suppressed. Therefore, it becomes possible to easily control the temperature to 0 at which the polymer-stabilized blue phase appears, from +0.5 (° C.) to −0.5 (° C.). It is possible to suppress the occurrence of temperature unevenness in the in-plane direction.

また、実施形態の液晶パネルの製造装置１は、紫外線光源１０及びステージ１２が配置された処理室６内の温度を調節する空調装置２５を備える。空調装置２５によって、ステージ１２上の被処理パネル７の温度を適正に制御することが可能になる。その一方で、空調装置２５を用いた空調環境下では、処理室６内に生じる気流を介して、紫外線光源１０の温度が、被処理パネル７に伝熱しやすくなるので、被処理パネル７に温度むらが生じやすくなる傾向がある。しかしながら、本実施形態よれば、第１の流路部材１３内を流れる温調媒体の温度が上述した温度範囲内に制御されることによって、空調装置２５の気流の影響でステージ１２上の被処理パネル７に温度むらが生じることを抑えると共に、処理室６内で被処理パネル７の温度が変動することを空調装置２５によって抑えることができる。   In addition, the liquid crystal panel manufacturing apparatus 1 according to the embodiment includes an air conditioner 25 that adjusts the temperature in the processing chamber 6 in which the ultraviolet light source 10 and the stage 12 are disposed. The air conditioner 25 can appropriately control the temperature of the panel 7 to be processed on the stage 12. On the other hand, in an air-conditioning environment using the air conditioner 25, the temperature of the ultraviolet light source 10 is easily transferred to the panel 7 to be processed via the air flow generated in the processing chamber 6. Unevenness tends to occur. However, according to this embodiment, the temperature of the temperature control medium flowing in the first flow path member 13 is controlled within the above-described temperature range, so that the processing target on the stage 12 is affected by the airflow of the air conditioner 25. It is possible to suppress the occurrence of temperature unevenness in the panel 7 and to prevent the air conditioner 25 from changing the temperature of the panel 7 to be processed in the processing chamber 6.

また、実施形態の液晶パネルの製造装置１における温度制御装置１５は、温度センサ２２が検出した第１の流路部材１３内の温調媒体の温度に基づいて、温調媒体の温度を上述の温度範囲内に制御する。これにより、紫外線光源１０の基板１０ｂの熱によって変動する第１の流路部材内１３を流れる温調媒体の温度を迅速かつ適正に制御することができる。   In addition, the temperature control device 15 in the liquid crystal panel manufacturing apparatus 1 according to the embodiment sets the temperature of the temperature adjustment medium based on the temperature of the temperature adjustment medium in the first flow path member 13 detected by the temperature sensor 22. Control within the temperature range. Thereby, the temperature of the temperature control medium flowing through the first flow path member 13 that varies due to the heat of the substrate 10b of the ultraviolet light source 10 can be quickly and appropriately controlled.

（変形例）
以下、実施形態の液晶パネルの製造装置１における第１の流路部材１３と第２の流路部材１４の各流路１３ａ、１４ａの変形例について図面を参照して説明する。なお、変形例において、第１の実施形態と同一の構成部材には、便宜上、第１の実施形態と同一符号を付して説明する。 (Modification)
Hereinafter, modified examples of the flow paths 13a and 14a of the first flow path member 13 and the second flow path member 14 in the liquid crystal panel manufacturing apparatus 1 of the embodiment will be described with reference to the drawings. In addition, in a modification, the same code | symbol as 1st Embodiment is attached | subjected and demonstrated to the same structural member as 1st Embodiment for convenience.

図５は、実施形態に係る液晶パネルの製造装置１が有する第１の流路部材１３及び第２の流路部材１４の各流路１３ａ、１４ａの変形例を示す模式図である。図６は、実施形態に係る液晶パネルの製造装置１が有する第１の流路部材１３及び第２の流路部材１４の各流路１３ａ、１４ａの他の変形例を示す模式図である。   FIG. 5 is a schematic diagram illustrating a modification of the flow paths 13a and 14a of the first flow path member 13 and the second flow path member 14 included in the liquid crystal panel manufacturing apparatus 1 according to the embodiment. FIG. 6 is a schematic diagram illustrating another modification example of the flow paths 13a and 14a of the first flow path member 13 and the second flow path member 14 included in the liquid crystal panel manufacturing apparatus 1 according to the embodiment.

変形例として図５に示すように、第１の流路部材１３の流路１３ａと第２の流路部材１４の流路１４ａは、温調媒体が循環するように直列に連結されており、環状の循環路を構成している。   As a modification, as shown in FIG. 5, the flow path 13a of the first flow path member 13 and the flow path 14a of the second flow path member 14 are connected in series so that the temperature control medium circulates. An annular circulation path is formed.

変形例では、第１の流路部材１３の流路１３ａを流れる温調媒体の温度と、第２の流路部材１４の流路１４ａを流れる温調媒体の温度とを共通の温度制御装置１５によって制御することが可能になり、液晶パネルの製造装置１の構成を簡素化することができる。また、第１の流路部材１３の流路１３ａを流れる温調媒体と、第２の流路部材１４の流路１４ａを流れる温調媒体として、共通する温調媒体を用いることが可能になり、液晶パネルの製造コストを抑えることができる。   In the modification, a common temperature control device 15 uses the temperature of the temperature control medium flowing through the flow path 13 a of the first flow path member 13 and the temperature of the temperature control medium flowing through the flow path 14 a of the second flow path member 14. It becomes possible to control by this, and the structure of the manufacturing apparatus 1 of a liquid crystal panel can be simplified. In addition, a common temperature control medium can be used as the temperature control medium flowing through the flow path 13a of the first flow path member 13 and the temperature control medium flowing through the flow path 14a of the second flow path member 14. The manufacturing cost of the liquid crystal panel can be suppressed.

上述の変形例においても、実施形態と同様に、紫外線の照射時に被処理パネル７の面内方向に温度むらが生じることを抑制することができる。   Also in the above-described modified example, similarly to the embodiment, it is possible to suppress the occurrence of temperature unevenness in the in-plane direction of the panel to be processed 7 when irradiated with ultraviolet rays.

他の変形例として図６に示すように、第１の流路部材１３の流路１３ａと第２の流路部材１４の流路１４ａは、並列に連結されており、各流路の一方側から他方側へ向かって温調媒体が流れる。なお、各流路１３ａ、１４ａの並列部分の両側の流路は、直列に連結されて循環路を構成してもよく、各流路１３ａ、１４ａに温調媒体を循環させることが可能になる。   As another modification, as shown in FIG. 6, the flow path 13a of the first flow path member 13 and the flow path 14a of the second flow path member 14 are connected in parallel, and one side of each flow path The temperature control medium flows from one side to the other side. The flow paths on both sides of the parallel portion of the flow paths 13a and 14a may be connected in series to form a circulation path, and the temperature control medium can be circulated through the flow paths 13a and 14a. .

他の変形例では、上述した変形例と同様に、第１の流路部材１３の流路１３ａを流れる温調媒体の温度と、第２の流路部材１４の流路１４ａを流れる温調媒体の温度とを共通の温度制御装置１５によって制御することが可能になり、液晶パネルの製造装置１の構成を簡素化することができる。また、第１の流路部材１３の流路１３ａを流れる温調媒体と、第２の流路部材１４の流路１４ａを流れる温調媒体として、共通する温調媒体を用いることが可能になり、液晶パネルの製造コストを抑えることができる。   In other modified examples, similarly to the modified example described above, the temperature of the temperature adjusting medium flowing through the flow path 13a of the first flow path member 13 and the temperature adjusting medium flowing through the flow path 14a of the second flow path member 14 are as follows. It is possible to control the temperature of the liquid crystal panel by the common temperature control device 15, and the configuration of the liquid crystal panel manufacturing apparatus 1 can be simplified. In addition, a common temperature control medium can be used as the temperature control medium flowing through the flow path 13a of the first flow path member 13 and the temperature control medium flowing through the flow path 14a of the second flow path member 14. The manufacturing cost of the liquid crystal panel can be suppressed.

上述の他の変形例においても、実施形態と同様に、紫外線の照射時に被処理パネル７の面内方向に温度むらが生じることを抑制することができる。   Also in the other modified examples described above, similarly to the embodiment, it is possible to suppress the occurrence of temperature unevenness in the in-plane direction of the panel 7 to be processed at the time of ultraviolet irradiation.

本発明の実施形態を説明したが、実施形態は、例として提示したものであり、本発明の範囲を限定することを意図していない。実施形態は、その他の様々な形態で実施することが可能であり、発明の要旨を逸脱しない範囲で、種々の省略、置き換え、変更を行うことができる。実施形態やその変形は、本発明の範囲や要旨に含まれると同様に、特許請求の範囲に記載された発明とその均等の範囲に含まれるものである。   Although the embodiments of the present invention have been described, the embodiments are presented as examples and are not intended to limit the scope of the present invention. The embodiment can be implemented in various other forms, and various omissions, replacements, and changes can be made without departing from the spirit of the invention. The embodiments and modifications thereof are included in the scope of the present invention and the gist thereof, and are also included in the invention described in the claims and the equivalents thereof.

１ 液晶パネルの製造装置
６ 処理室
７ 被処理パネル
１０ 紫外線光源
１０ａ ＬＥＤ
１０ｂ 基板
１２ ステージ
１３ 第１の流路部材
１３ａ 流路
１４ 第２の流路部材
１４ａ 流路
１５ 温度制御装置
２１ ヒータ
２２ 温度センサ（検出素子）
２３ 制御部
２５ 空調装置
ｔ０ 発現温度
ｔ１ 第１の流路部材を流れる温調媒体の温度 DESCRIPTION OF SYMBOLS 1 Manufacturing apparatus of liquid crystal panel 6 Processing chamber 7 Panel to be processed 10 Ultraviolet light source 10a LED
10b Substrate 12 Stage 13 First channel member 13a Channel 14 Second channel member 14a Channel 15 Temperature controller 21 Heater 22 Temperature sensor (detection element)
23 control unit 25 air conditioner t 0 expression temperature t 1 temperature of the temperature control medium flowing through the first flow path member

Claims (5)

発光素子が設けられた基板を有する紫外線光源と；
前記紫外線光源の紫外線が照射される液晶層を有する被処理パネルが載置されるステージと；
前記基板の温度を調節する温調媒体が流れる第１の流路部材と；
前記ステージの温度を調節する温調媒体が流れる第２の流路部材と；
前記液晶層に高分子安定化ブルー相が発現する発現温度をｔ０（℃）としたときに、前記第１の流路部材を流れる温調媒体の温度ｔ１（℃）を、（ｔ０−３０）≦ｔ１≦（ｔ０＋３０）を満たす温度範囲に制御する温度制御装置と；
を具備する、液晶パネルの製造装置。 An ultraviolet light source having a substrate provided with a light emitting element;
A stage on which a panel to be processed having a liquid crystal layer irradiated with ultraviolet rays from the ultraviolet light source is placed;
A first flow path member through which a temperature control medium for adjusting the temperature of the substrate flows;
A second flow path member through which a temperature control medium for adjusting the temperature of the stage flows;
When the expression temperature at which the polymer-stabilized blue phase appears in the liquid crystal layer is t 0 (° C.), the temperature t 1 (° C.) of the temperature control medium flowing through the first flow path member is (t 0 −30) a temperature control device that controls the temperature range to satisfy ≦ t 1 ≦ (t 0 +30);
A liquid crystal panel manufacturing apparatus comprising: 前記紫外線光源及び前記ステージが配置された処理室内の温度を調節する空調装置を更に具備する、
請求項１に記載の液晶パネルの製造装置。 An air conditioner that adjusts the temperature in the processing chamber in which the ultraviolet light source and the stage are disposed;
The apparatus for manufacturing a liquid crystal panel according to claim 1. 前記第１の流路部材を流れる温調媒体の温度を検出する検出素子を更に具備し、
前記温度制御装置は、前記検出素子が検出した前記温調媒体の温度に基づいて、前記温調媒体の温度を前記温度範囲内に制御する、
請求項１または２に記載の液晶パネルの製造装置。 A detection element for detecting the temperature of the temperature control medium flowing through the first flow path member;
The temperature control device controls the temperature of the temperature control medium within the temperature range based on the temperature of the temperature control medium detected by the detection element;
The apparatus for manufacturing a liquid crystal panel according to claim 1. 前記温度制御装置は、前記第１の流路部材を流れる温調媒体を加熱するヒータを有する、
請求項１または２に記載の液晶パネルの製造装置。 The temperature control device includes a heater that heats a temperature control medium flowing through the first flow path member.
The apparatus for manufacturing a liquid crystal panel according to claim 1. 前記液晶層は、ネマティック液晶組成物と、ブルー相を発現する液晶組成物と、重合性モノマーとを含み、紫外線を照射することで高分子安定化ブルー相を発現する、
請求項１ないし４のいずれか１項に記載の液晶パネルの製造装置。 The liquid crystal layer includes a nematic liquid crystal composition, a liquid crystal composition that exhibits a blue phase, and a polymerizable monomer, and exhibits a polymer-stabilized blue phase by irradiation with ultraviolet rays.
The manufacturing apparatus of the liquid crystal panel of any one of Claim 1 thru | or 4.
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