JP2017115206A - 透明導電膜、透明導電膜付き基板および透明導電膜付き基板の製造方法 - Google Patents
透明導電膜、透明導電膜付き基板および透明導電膜付き基板の製造方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims abstract description 66
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000000149 argon plasma sintering Methods 0.000 claims description 39
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 21
- 239000001301 oxygen Substances 0.000 claims description 21
- 229910052760 oxygen Inorganic materials 0.000 claims description 21
- 238000004544 sputter deposition Methods 0.000 claims description 12
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 claims description 10
- 230000031700 light absorption Effects 0.000 abstract description 35
- GRPQBOKWXNIQMF-UHFFFAOYSA-N indium(3+) oxygen(2-) tin(4+) Chemical compound [Sn+4].[O-2].[In+3] GRPQBOKWXNIQMF-UHFFFAOYSA-N 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 70
- 239000011521 glass Substances 0.000 description 38
- 238000000034 method Methods 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 230000000052 comparative effect Effects 0.000 description 11
- 238000005286 illumination Methods 0.000 description 10
- 230000007423 decrease Effects 0.000 description 6
- 238000001771 vacuum deposition Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000006124 Pilkington process Methods 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 239000005385 borate glass Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000007500 overflow downdraw method Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- BIKXLKXABVUSMH-UHFFFAOYSA-N trizinc;diborate Chemical compound [Zn+2].[Zn+2].[Zn+2].[O-]B([O-])[O-].[O-]B([O-])[O-] BIKXLKXABVUSMH-UHFFFAOYSA-N 0.000 description 1
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/453—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates
- C04B35/457—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on zinc, tin, or bismuth oxides or solid solutions thereof with other oxides, e.g. zincates, stannates or bismuthates based on tin oxides or stannates
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- C04B35/622—Forming processes; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
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- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/06—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors mainly consisting of other non-metallic substances
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- H01B5/14—Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
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- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
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- H10K50/805—Electrodes
- H10K50/82—Cathodes
- H10K50/828—Transparent cathodes, e.g. comprising thin metal layers
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- H10K2102/10—Transparent electrodes, e.g. using graphene
- H10K2102/101—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO]
- H10K2102/103—Transparent electrodes, e.g. using graphene comprising transparent conductive oxides [TCO] comprising indium oxides, e.g. ITO
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
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- H10K50/854—Arrangements for extracting light from the devices comprising scattering means
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- Inorganic Chemistry (AREA)
- Electroluminescent Light Sources (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Physical Vapour Deposition (AREA)
- Non-Insulated Conductors (AREA)
- Manufacturing Of Electric Cables (AREA)
Abstract
【解決手段】酸化インジウム錫膜からなる透明導電膜であって、(キャリア移動度)/(キャリア濃度)が、2×10−20cm5/V/S以上であり、かつ、(キャリア移動度)×(キャリア濃度)が、200×1020cm−1/V/S以上である。
【選択図】図2
Description
まず、ガラス基板として、ソーダガラス基板を用意する。次に、ガラス基板上に亜鉛ホウ酸系ガラスペーストをスクリーン印刷すると共に、大気雰囲気下で乾燥する。その後、大気雰囲気下でガラスペーストを焼成することにより、ガラス基板上にガラスからなる光散乱層を形成する。なお、ガラス基板及び光散乱層の屈折率は、1.6とする。
続いて、光散乱層上にビスマス系ガラスペーストをアプリケータで塗布し、大気雰囲気下で乾燥する。その後、大気雰囲気下でガラスペーストを焼成することにより、光散乱層上にガラスからなる平滑層を形成する。なお、平滑層の屈折率は、1.9とする。
その後、平滑層上に、ITO膜からなる透明導電膜をスパッタリング法により形成する。スパッタリング時には、スパッタリング装置のチャンバー内に、光散乱層及び平滑層が形成されたガラス基板と、酸化インジウム錫のターゲット(成膜材料)とを配置する。この状態で、チャンバー内に、反応ガスとして、アルゴンと酸素の混合ガスを供給する。スパッタリング時のガラス基板の温度は、150℃〜350℃とする。
次に、透明導電膜上に、有機EL発光層を真空蒸着法により形成する。その後、第有機EL発光層上に、金属膜を真空蒸着法により形成する。
1.ITO膜付き基板の視感透過率(A)をISO9050に準拠した方法で測定する。
[測定波長:380nm〜780nm、標準光源:D65]
2.ITO膜付き基板の視感反射率(B)をISO9050に準拠した方法で測定する。[測定波長:380nm〜780nm、標準光源:D65]
3.ITO膜付き基板の光吸収率(C)=100%−(A)−(B)
4.ITO膜なし基板の視感透過率(D)をISO9050に準拠した方法で測定する。[測定波長:380nm〜780nm、標準光源:D65]
5.ITO膜なし基板の視感反射率(E)をISO9050に準拠した方法で測定する。[測定波長:380nm〜780nm、標準光源:D65]
6.ITO膜なし基板の光吸収率(F)=100%−(D)−(E)
7.ITO膜の光吸収率(G)=(C)−(F)
2 透明導電膜(第1電極)
3 有機EL発光層
4 金属膜(第2電極)
Claims (4)
- 酸化インジウム錫膜からなる透明導電膜であって、
(キャリア移動度)/(キャリア濃度)が、2×10−20cm5/V/S以上であり、かつ、(キャリア移動度)×(キャリア濃度)が、200×1020cm−1/V/S以上であることを特徴とする透明導電膜。 - (キャリア移動度)/(キャリア濃度)が、3.6×10−20cm5/V/S以上であることを特徴とする請求項1に記載の透明導電膜。
- 基板の上に、光散乱層と、酸化インジウム錫膜からなる透明導電膜とを備えた透明導電膜付き基板であって、
前記透明導電膜のキャリア移動度をμ(cm2/V/S)、キャリア濃度をn(cm−3)とした場合に、
μ/nが、2×10−20cm5/V/S以上であり、かつ、μ×nが、200×1020cm−1/V/S以上であることを特徴とする透明導電膜付き基板。 - 基板の上に、酸化インジウム錫膜からなる透明導電膜を備えた透明導電膜付き基板の製造方法であって、
前記基板を酸化インジウム錫のターゲットを有するチャンバー内に配置するとともに、前記チャンバー内の酸素濃度を0.5%〜0.9%とした状態でスパッタリングを行うことを特徴とする透明導電膜付き基板の製造方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015251989A JP2017115206A (ja) | 2015-12-24 | 2015-12-24 | 透明導電膜、透明導電膜付き基板および透明導電膜付き基板の製造方法 |
PCT/JP2016/086897 WO2017110551A1 (ja) | 2015-12-24 | 2016-12-12 | 透明導電膜、透明導電膜付き基板および透明導電膜付き基板の製造方法 |
US16/065,184 US20210193950A1 (en) | 2015-12-24 | 2016-12-12 | Transparent conductive film, substrate provided with transparent conductive film, and method for producing substrate provided with transparent conductive film |
EP16878442.9A EP3396013A4 (en) | 2015-12-24 | 2016-12-12 | TRANSPARENT CONDUCTIVE FILM, SUBSTRATE HAVING TRANSPARENT CONDUCTIVE FILM, AND PROCESS FOR PRODUCING A SUBSTRATE WITH TRANSPARENT CONDUCTIVE FILM |
KR1020187007335A KR20180098216A (ko) | 2015-12-24 | 2016-12-12 | 투명 도전막, 투명 도전막을 갖는 기판 및 투명 도전막을 갖는 기판의 제조 방법 |
TW105142071A TW201738181A (zh) | 2015-12-24 | 2016-12-19 | 透明導電膜、附透明導電膜之基板及附透明導電膜之基板之製造方法 |
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JP2015251989A JP2017115206A (ja) | 2015-12-24 | 2015-12-24 | 透明導電膜、透明導電膜付き基板および透明導電膜付き基板の製造方法 |
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JP2015251989A Ceased JP2017115206A (ja) | 2015-12-24 | 2015-12-24 | 透明導電膜、透明導電膜付き基板および透明導電膜付き基板の製造方法 |
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Country | Link |
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US (1) | US20210193950A1 (ja) |
EP (1) | EP3396013A4 (ja) |
JP (1) | JP2017115206A (ja) |
KR (1) | KR20180098216A (ja) |
TW (1) | TW201738181A (ja) |
WO (1) | WO2017110551A1 (ja) |
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CN113106405A (zh) * | 2021-03-18 | 2021-07-13 | 上海交通大学 | 一种降低ito薄膜红外吸收率的方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09230806A (ja) * | 1995-03-22 | 1997-09-05 | Toppan Printing Co Ltd | 電極板およびこれを用いた液晶表示装置 |
JPH09324264A (ja) * | 1996-06-03 | 1997-12-16 | Toppan Printing Co Ltd | スパッタリングターゲット |
JPH11195333A (ja) * | 1998-01-06 | 1999-07-21 | Kobe Steel Ltd | 透明導電膜の製造方法およびその透明導電膜 |
JP2000233969A (ja) * | 1998-12-08 | 2000-08-29 | Tosoh Corp | Itoスパッタリングターゲットおよび透明導電膜の製造方法 |
JP2001089846A (ja) * | 1999-07-16 | 2001-04-03 | Hoya Corp | 低抵抗ito薄膜及びその製造方法 |
JP2002343151A (ja) * | 2001-03-07 | 2002-11-29 | Ueyama Denki:Kk | 透明導電膜積層基板の製造方法 |
JP2009004275A (ja) * | 2007-06-22 | 2009-01-08 | Panasonic Electric Works Co Ltd | 面発光体及び面発光体の製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010177161A (ja) | 2009-02-02 | 2010-08-12 | Toyobo Co Ltd | 透明導電性フィルム |
FR2955575B1 (fr) | 2010-01-22 | 2012-02-24 | Saint Gobain | Substrat verrier revetu d'une couche haut indice sous un revetement electrode et dispositif electroluminescent organique comportant un tel substrat. |
JP2013216925A (ja) | 2012-04-05 | 2013-10-24 | Toppan Printing Co Ltd | 透明導電膜の製造方法及び透明導電基板 |
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2015
- 2015-12-24 JP JP2015251989A patent/JP2017115206A/ja not_active Ceased
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2016
- 2016-12-12 US US16/065,184 patent/US20210193950A1/en not_active Abandoned
- 2016-12-12 EP EP16878442.9A patent/EP3396013A4/en not_active Withdrawn
- 2016-12-12 WO PCT/JP2016/086897 patent/WO2017110551A1/ja active Application Filing
- 2016-12-12 KR KR1020187007335A patent/KR20180098216A/ko unknown
- 2016-12-19 TW TW105142071A patent/TW201738181A/zh unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09230806A (ja) * | 1995-03-22 | 1997-09-05 | Toppan Printing Co Ltd | 電極板およびこれを用いた液晶表示装置 |
JPH09324264A (ja) * | 1996-06-03 | 1997-12-16 | Toppan Printing Co Ltd | スパッタリングターゲット |
JPH11195333A (ja) * | 1998-01-06 | 1999-07-21 | Kobe Steel Ltd | 透明導電膜の製造方法およびその透明導電膜 |
JP2000233969A (ja) * | 1998-12-08 | 2000-08-29 | Tosoh Corp | Itoスパッタリングターゲットおよび透明導電膜の製造方法 |
JP2001089846A (ja) * | 1999-07-16 | 2001-04-03 | Hoya Corp | 低抵抗ito薄膜及びその製造方法 |
JP2002343151A (ja) * | 2001-03-07 | 2002-11-29 | Ueyama Denki:Kk | 透明導電膜積層基板の製造方法 |
JP2009004275A (ja) * | 2007-06-22 | 2009-01-08 | Panasonic Electric Works Co Ltd | 面発光体及び面発光体の製造方法 |
Non-Patent Citations (2)
Title |
---|
LEE, HO-CHUL ET AL.: "Behaviors of carrier concentrations and mobilities in indium-tin-oxide thin films by DC magnetron sp", VACUUM, vol. 77, JPN6017001172, 2004, pages 69 - 77, ISSN: 0004172712 * |
LEE, HO-CHUL: "Electron scattering mechanisms in indium-tin-oxide thin films prepared at the various process condit", APPLIED SURFACE SCIENCE, vol. 252, JPN6017001171, 2006, pages 3428 - 3435, ISSN: 0004172711 * |
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WO2017110551A1 (ja) | 2017-06-29 |
KR20180098216A (ko) | 2018-09-03 |
TW201738181A (zh) | 2017-11-01 |
US20210193950A1 (en) | 2021-06-24 |
EP3396013A1 (en) | 2018-10-31 |
EP3396013A4 (en) | 2019-08-28 |
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