JP2016519039A - 直接注入による液状ヒドロロシラン組成物を用いたシリコン含有材料の合成方法 - Google Patents
直接注入による液状ヒドロロシラン組成物を用いたシリコン含有材料の合成方法 Download PDFInfo
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Abstract
Description
本出願は、2013年3月15日に出願された米国仮特許出願第61/787,104号の利益を主張するものであり、その全体は参照によりここに組み込まれている。
本発明は、合衆国エネルギ省による米国政府助成DE-FG36-08G088160の支援を受けてなされた。そのため、米国連邦政府は本発明に一定の権利を有する。
該当なし。
装置及び合成方法の操作原理を説明するために、図2に示すような構成の装置を作成した。10vol%のシクロヘキサシラン(Si6H12、CHS)及び10vol%のシクロペンタシラン(Si5H10、CPS)のシクロオクタン溶液を液状ヒドロシラン前駆体インクとして選択した。インクは、120kHzの超音波発生装置によって駆動されるSono-Tek(商標)ノズル(アトマイザ)に注入された。300sccm〜1000sccmの流量のガス(Ar/He/N2)をエアロゾル(液状ミスト)を移送するキャリアガスとして用いた。液状シランのエアロゾル液滴の気化を促進するために、1LPMの流量で追加の第2ガスが導入された。この後、液状シランの液滴は、150℃〜180℃に維持された円筒状のシャワーヘッドを通って移送された。シャワーヘッドとヘッドプレートとの間の距離は、2〜5mmであった。この実験に用いたシャワーヘッドには、直径1mmの孔が0.5mm間隔で60個設けられていた。
方法についてさらに説明するために、環状ヒドロシラン、ドーパント前駆体及び溶媒をn型シリコン膜及びp型シリコン膜を形成するために用いた。表1は、n型及びp型シリコン薄膜を作るための前駆体の調製に用いたSi6H12、溶媒及びドーパントの濃度を示している。
方法についてさらに説明するために、異なる堆積スキームと、真性シリコン(i-Si)及び縮退ドープされたシリコン薄膜を製造するために、ホットプレート上にシラン組成物を均一に分布させるために用いるシャワーヘッドを有する装置とを構築して評価した。
シリコンナノワイヤ(Si−NW)は光電池、リチウムイオン電池等に広く用いられている。従来のSi−NWの製造は、適切な温度で適切な触媒にシラン気化物を作用させる、CVDを用いた触媒アシスト気体−液体−固体成長又は気体−固体−固体成長を含む数種の技術により行うことができる。用いるシランの活性化エネルギ及び共晶温度(シラン及び触媒の)は、Si−NWの成長速度及び成長温度を規定する。モノシラン(SiH)は、Au、Sn、Ni、Fe、Cu等を触媒とする低温でのSi−NWの製造に広く用いられている。SiHの高い活性化エネルギにより緩やかな成長速度が実現される。種々の問題が、多くの潜在的利用が期待されるSi−NWの大スケールでの工業的製造を阻んでいる。
本発明の範囲をさらに説明するために、窒化シリコン薄膜を液状ヒドロシランを用いて製造した。窒化シリコン薄膜は、マイクロエレクトロニクス産業における誘電体コーティング及び太陽電池の反射防止コーティングとして広く用いられている。図1に示す装置を数種類のSiNx薄膜の堆積に用いた。希釈していないSi6H12又は10vol%のSi6H12トルエン溶液が、Sono-Tek霧化器を介して注入された。9mol%のアンモニアを混合したヘリウムガスをシースガスとして用いた。ドープしていないSiウェハを基板として用い、基板温度は、400℃〜500℃とした。得られた膜は、化学結合を特定するために、フーリエ変換赤外分光(FTIR)法により分析した。1.5lpmの流量のNH3混合物と10%Si6H12(トルエン溶液)とを用いて、500℃の基板温度において、SiNx薄膜のFTIRスペクトルが得られた。FiTRにおける、Si−N、N−H及びSi−Hの存在割合は、SiNx薄膜が形成されていることを示した。
Claims (20)
- エアロゾルを形成するために液状シランを霧化する工程と、
加熱されたエアロゾル及び気化物を得るために、前記エアロゾル及びキャリアガスを加熱する工程と、
膜を形成するために基板の上に加熱された前記エアロゾル及び気化物を堆積させる工程と、
堆積された膜を変換する工程とを備えている、シリコン薄膜の合成方法。 - 加熱された前記エアロゾルを前記基板の上に堆積する工程よりも前に、300℃以上、500℃以下に前記基板を加熱する工程をさらに備えている、請求項1に記載のシリコン薄膜の合成方法。
- 液状シランのエアロゾルを加熱する工程は、150℃以上、250℃以下の温度に前記エアロゾルを加熱する、請求項1に記載のシリコン薄膜の合成方法。
- 前記液状シランは、一般式SinH2n、SinH2n+2及び(−Si−)nにより表されるシランから選択されたシランである、請求項1に記載のシリコン薄膜の合成方法。
- 前記液状シランは、トルエン、キシレン、シクロオクタン、1,2,4-トリクロロベンゼン、ジクロロメタン及びこれらの混合物から選ばれた溶媒を含んでいる、請求項1に記載のシリコン薄膜の合成方法。
- 前記液状シランは、Ti,V,Cr,Mn,Fe,Co,Ni,Zn,Ga,Ge,As,Zr,Nb,Mo,Tc,Ru,Rh,Pd,Ag,Cd,In,Sn,Sb,Hf,Ta,W,Re,Os,Ir,Pt,Au,Hg,TI,Pb,Bi,Al,Si,P,及びBから選ばれた元素を含むドーパントを含んでいる、請求項1に記載のシリコン薄膜の合成方法。
- 前記堆積された膜は、150℃以上、300℃以下のの熱処理により、ポリシランを含む材料に変換される、請求項1に記載のシリコン薄膜の合成方法。
- 前記堆積された膜は、300℃以上、700℃以下の熱処理により、アモルファスシリコンを含む材料に変換される、請求項1に記載のシリコン薄膜の合成方法。
- 前記堆積された膜は、700℃以上、1200℃以下の熱処理により、結晶性シリコンを含む材料に変換される、請求項1に記載のシリコン薄膜の合成方法。
- インク前駆体を形成するために、液状シラン、複数のナノ粒子及び溶媒を混合する工程と、
エアロゾルを形成するために、前記インク前駆体及び第1のキャリアガスを霧化する工程と、
前記エアロゾル及びキャリアガスを加熱する工程と、
膜を形成するために基板の上に加熱された前記エアロゾルを堆積する工程と、
膜を変換する工程とを備えている、シリコン薄膜の合成方法。 - 液状シランエアロゾルの液滴の気化を促進するために前記エアロゾル及び第1のキャリアガスに第2のキャリアガスを混合する工程をさらに備えている、請求項10に記載のシリコン薄膜の合成方法。
- 前記液状シランは、一般式SinH2n、SinH2n+2及び(−Si−)nにより表されるシランから選択されたシランである、請求項10に記載のシリコン薄膜の合成方法。
- 前記液状シランは、ドーパントを含んでいる、請求項10に記載のシリコン薄膜の合成方法。
- 液状シランのエアロゾルを加熱する工程は、150℃以上、250℃以下の温度に前記エアロゾルを加熱する、請求項10に記載のシリコン薄膜の合成方法。
- 前記液状シランは、トルエン、キシレン、シクロオクタン、1,2,4-トリクロロベンゼン、ジクロロメタン及びこれらの混合物から選ばれた溶媒を含んでいる、請求項10に記載のシリコン薄膜の合成方法。
- 加熱された前記エアロゾルを前記基板の上に堆積する工程よりも前に、25℃以上、600℃以下に前記基板を加熱する工程をさらに備えている、請求項10に記載のシリコン薄膜の合成方法。
- キャリアガスの供給源及びアトマイザと流体接続された液状シラン前駆体の供給源と、
前記アトマイザの吐出口と接続された内部チャンバを有する堆積用ヘッド及び排出ダクトとを備え、
霧化された液状シラン及びキャリアガスは、前記堆積用ヘッドの前記排出ダクトから基板に吐出される、シリコン薄膜の製造装置。 - 前記堆積用ヘッドは、加熱又は冷却装置と、キャリアガスの第2の供給源から第2のキャリアガスが流入する流入口とを有している、請求項17に記載のシリコン薄膜の製造装置。
- 基板の加熱装置をさらに備えている、請求項17に記載のシリコン薄膜の製造装置。
- キャリアガスとインク前駆体の前記アトマイザへの気流を制御するインジェクタをさらに備えている、請求項17に記載のシリコン薄膜の製造装置。
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Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08169708A (ja) * | 1994-10-19 | 1996-07-02 | Matsushita Electric Ind Co Ltd | シリコン膜の形成方法及びシリコン膜形成装置 |
JPH09118511A (ja) * | 1995-08-22 | 1997-05-06 | Matsushita Electric Ind Co Ltd | シリコン構造体、その製造方法及びその製造装置、並びにシリコン構造体を用いた太陽電池 |
US6244575B1 (en) * | 1996-10-02 | 2001-06-12 | Micron Technology, Inc. | Method and apparatus for vaporizing liquid precursors and system for using same |
JP2007308774A (ja) * | 2006-05-19 | 2007-11-29 | Utec:Kk | 薄膜形成装置、及び薄膜形成方法 |
JP2010135579A (ja) * | 2008-12-05 | 2010-06-17 | Seiko Epson Corp | ドープシリコン膜の形成方法 |
JP2010526445A (ja) * | 2007-05-04 | 2010-07-29 | コヴィオ インコーポレイテッド | パターン化導体、半導体及び誘電体材料のための印刷処理 |
US20100255664A1 (en) * | 2009-04-02 | 2010-10-07 | Micron Technology, Inc. | Methods of semiconductor processing involving forming doped polysilicon on undoped polysilicon |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5656329A (en) * | 1995-03-13 | 1997-08-12 | Texas Instruments Incorporated | Chemical vapor deposition of metal oxide films through ester elimination reactions |
US6045864A (en) * | 1997-12-01 | 2000-04-04 | 3M Innovative Properties Company | Vapor coating method |
ATE337173T1 (de) * | 2000-06-30 | 2006-09-15 | Ngimat Co | Verfahren zum kunststoffbeschichten |
US20030161937A1 (en) * | 2002-02-25 | 2003-08-28 | Leiby Mark W. | Process for coating three-dimensional substrates with thin organic films and products |
US7314513B1 (en) * | 2004-09-24 | 2008-01-01 | Kovio, Inc. | Methods of forming a doped semiconductor thin film, doped semiconductor thin film structures, doped silane compositions, and methods of making such compositions |
GB0504384D0 (en) * | 2005-03-03 | 2005-04-06 | Univ Durham | Method for producing a composite coating |
US7816269B2 (en) * | 2006-07-07 | 2010-10-19 | Silica Tech, Llc | Plasma deposition apparatus and method for making polycrystalline silicon |
US20080268165A1 (en) * | 2007-04-26 | 2008-10-30 | Curtis Robert Fekety | Process for making a porous substrate of glass powder formed through flame spray pyrolysis |
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Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08169708A (ja) * | 1994-10-19 | 1996-07-02 | Matsushita Electric Ind Co Ltd | シリコン膜の形成方法及びシリコン膜形成装置 |
JPH09118511A (ja) * | 1995-08-22 | 1997-05-06 | Matsushita Electric Ind Co Ltd | シリコン構造体、その製造方法及びその製造装置、並びにシリコン構造体を用いた太陽電池 |
US6244575B1 (en) * | 1996-10-02 | 2001-06-12 | Micron Technology, Inc. | Method and apparatus for vaporizing liquid precursors and system for using same |
JP2007308774A (ja) * | 2006-05-19 | 2007-11-29 | Utec:Kk | 薄膜形成装置、及び薄膜形成方法 |
JP2010526445A (ja) * | 2007-05-04 | 2010-07-29 | コヴィオ インコーポレイテッド | パターン化導体、半導体及び誘電体材料のための印刷処理 |
JP2010135579A (ja) * | 2008-12-05 | 2010-06-17 | Seiko Epson Corp | ドープシリコン膜の形成方法 |
US20100255664A1 (en) * | 2009-04-02 | 2010-10-07 | Micron Technology, Inc. | Methods of semiconductor processing involving forming doped polysilicon on undoped polysilicon |
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