JP2016219457A - Substrate housing container - Google Patents
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- JP2016219457A JP2016219457A JP2015099028A JP2015099028A JP2016219457A JP 2016219457 A JP2016219457 A JP 2016219457A JP 2015099028 A JP2015099028 A JP 2015099028A JP 2015099028 A JP2015099028 A JP 2015099028A JP 2016219457 A JP2016219457 A JP 2016219457A
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Abstract
Description
本発明は、基板収納容器に関する。 The present invention relates to a substrate storage container.
従来、半導体ウェーハからなる複数の基板を収納する基板収納容器が知られている(例えば、特許文献1参照。) Conventionally, a substrate storage container for storing a plurality of substrates made of semiconductor wafers is known (for example, see Patent Document 1).
特許文献1には、開口を有し基板を整列して収納する容器本体と、開口をシール可能に閉鎖する蓋体とを備える基板収納容器が開示される。容器本体の内面には、基板を支持する1対の支持部材が取り付けられ、蓋体の内面には、基板を保持する保持部材(フロントリテーナ)が取り付けられる。保持部材は、枠体と、枠体から延びる弾性片と、弾性片に設けられる保持部を有している。保持部には、基板を保持する溝が形成されていて、保持部の裏面には、係合片が設けられている。 Patent Document 1 discloses a substrate storage container that includes a container body that has an opening and aligns and stores substrates, and a lid that closes the opening in a sealable manner. A pair of support members that support the substrate are attached to the inner surface of the container body, and a holding member (front retainer) that holds the substrate is attached to the inner surface of the lid. The holding member has a frame, an elastic piece extending from the frame, and a holding portion provided on the elastic piece. A groove for holding the substrate is formed in the holding portion, and an engagement piece is provided on the back surface of the holding portion.
この基板収納容器では、基板を安全に輸送するために、保持部材の弾性を利用して、輸送時の振動や衝撃を吸収している。また、蓋体の保持部材との対向部にストッパーを形成し、このストッパーと係合片を嵌合させて、弾性片の過度の変形を防止している。 In this substrate storage container, in order to safely transport the substrate, the elasticity of the holding member is used to absorb vibration and impact during transportation. Further, a stopper is formed at a portion of the lid facing the holding member, and the stopper and the engaging piece are fitted to prevent excessive deformation of the elastic piece.
ところで、基板収納容器の輸送時の振動や衝撃で基板が回転したり破損したりすることを防ぐためには、保持部材の保持力を大きくして安定的に基板を保持することが必要となる。しかし、保持部材の保持力を単に大きくすると、基板と保持部材とが強く接触してしまい、保持部材が削れて基板に汚れが付着し易くなる問題があった。この問題は、特に基板の直径が大きく質量が大きい場合、より顕著に生じる。また、ストッパーと係合片により、保持部材と相対する方向の基板の移動を規制する従来の技術では、十分に汚れを防止することは困難であった。 By the way, in order to prevent the substrate from being rotated or damaged by vibration or impact during transportation of the substrate storage container, it is necessary to increase the holding force of the holding member to stably hold the substrate. However, when the holding force of the holding member is simply increased, the substrate and the holding member are in strong contact with each other, and there is a problem that the holding member is scraped and dirt easily adheres to the substrate. This problem is more noticeable particularly when the substrate has a large diameter and a large mass. In addition, it has been difficult to sufficiently prevent contamination with the conventional technique in which the movement of the substrate in the direction facing the holding member is restricted by the stopper and the engagement piece.
本発明は、このような事情に鑑みてなされたものであり、その目的は、基板の動きを適正に制限して、基板の破損を防止するとともに基板の汚れを防止できる基板収納容器を提供することにある。 The present invention has been made in view of such circumstances, and an object of the present invention is to provide a substrate storage container capable of appropriately restricting the movement of the substrate to prevent the substrate from being damaged and to prevent the substrate from being soiled. There is.
本発明は、以下の構成によって把握される。
(1)本発明に係る第1の観点は、基板収納容器であって、開口を有する容器本体と、前記開口を閉鎖する蓋体と、前記蓋体の内面に取り付けられ、前記容器本体に整列して収納される複数の基板のそれぞれの周縁部を保持する複数の保持部をもつ保持部材と、前記保持部材が取り付けられる前記蓋体の取付け面に設けられ、前記複数の保持部の間を仕切るように前記取付け面から前記保持部の両側に突出する複数の仕切り壁と、を備え、前記仕切り壁が、前記保持部が前記基板の周縁部を保持している状態において、前記取付け面からの突出高さが、前記取付け面から前記保持部の先端までの高さ以上になるように、設けられることを特徴とする。
The present invention is grasped by the following composition.
(1) A first aspect of the present invention is a substrate storage container, which is a container body having an opening, a lid body that closes the opening, an inner surface of the lid body, and aligned with the container body. And a holding member having a plurality of holding portions for holding the respective peripheral portions of the plurality of substrates stored therein, and an attachment surface of the lid body to which the holding member is attached, and between the plurality of holding portions. A plurality of partition walls projecting from the mounting surface to both sides of the holding portion so as to partition, the partition wall from the mounting surface in a state where the holding portion holds the peripheral edge of the substrate. Is provided so that the height of the protrusion is equal to or higher than the height from the mounting surface to the tip of the holding portion.
(2)本発明は、(1)の構成において、前記仕切り壁が、前記保持部が前記基板の周縁部を保持していない状態において、前記取付け面からの突出高さが、前記取付け面から前記保持部の先端までの高さ以上になるように、設けられることを特徴とする。 (2) In the configuration according to (1), in the configuration according to (1), when the partition wall is in a state in which the holding portion does not hold the peripheral portion of the substrate, the protruding height from the mounting surface is It is provided so that it may become more than the height to the front-end | tip of the said holding | maintenance part.
(3)本発明は、(1)又は(2)の構成において、前記仕切り壁が、その突出方向に直角な方向でかつ前記基板の表面に平行な方向の長さが、それに対応する前記保持部の長さの50%以上になるように、設けられることを特徴とする。 (3) According to the present invention, in the configuration of (1) or (2), the length of the partition wall in a direction perpendicular to the protruding direction and parallel to the surface of the substrate corresponds to the holding. It is provided so that it may become 50% or more of the length of a part.
(4)本発明は、(1)から(3)のいずれか1つの構成において、前記仕切り壁が、その突出方向に直角な方向でかつ前記基板の表面に平行な方向の長さが、それに対応する前記保持部の長さの65%以上になるように、設けられることを特徴とする。 (4) According to the present invention, in any one of the constitutions (1) to (3), the partition wall has a length in a direction perpendicular to the protruding direction and parallel to the surface of the substrate. It is provided so that it may become 65% or more of the length of the said corresponding holding | maintenance part.
(5)本発明は、(1)から(4)のいずれか1つの構成において、前記保持部が、その両側に配置される2つの前記仕切り壁との間に合計で0.2mm以上0.5mm以下の隙間を有することを特徴とする。 (5) According to the present invention, in any one of the constitutions (1) to (4), the holding portion is 0.2 mm or more in total between the two partition walls disposed on both sides thereof. It has a gap of 5 mm or less.
(6)本発明は、(1)から(5)のいずれか1つの構成において、前記保持部が、その両側に配置される2つの前記仕切り壁のうち、一方の仕切り壁との間に第1の隙間を、他方の仕切り壁との間に第2の隙間を有し、前記第1の隙間及び前記第2の隙間が、それぞれ、0.1mm以上0.25mm以下の大きさに設定されることを特徴とする。 (6) In the configuration according to any one of (1) to (5), the present invention may be configured such that the holding portion is disposed between one of the two partition walls arranged on both sides thereof. The first gap and the second gap are each set to a size of 0.1 mm or more and 0.25 mm or less. It is characterized by that.
(7)本発明に係る第2の観点は、基板収納容器であって、開口を有する容器本体と、前記開口を閉鎖する蓋体と、前記蓋体の内面に取り付けられ、前記容器本体に整列して収納される複数の基板のそれぞれの周縁部を保持する複数の保持部をもつ保持部材と、前記保持部材が取り付けられる前記蓋体の取付け面に設けられ、前記複数の保持部の間を仕切るように前記取付け面から前記保持部の両側に突出する複数の仕切り壁と、を備え、前記仕切り壁が、その突出方向に直角な方向でかつ前記基板の表面に平行な方向の長さが、対応する前記保持部の長さの50%以上になるように、設けられることを特徴とする。 (7) A second aspect of the present invention is a substrate storage container, which is a container body having an opening, a lid body that closes the opening, an inner surface of the lid body, and aligned with the container body. And a holding member having a plurality of holding portions for holding the respective peripheral portions of the plurality of substrates stored therein, and an attachment surface of the lid body to which the holding member is attached, and between the plurality of holding portions. A plurality of partition walls projecting from the mounting surface to both sides of the holding portion so as to partition, the partition wall having a length in a direction perpendicular to the projecting direction and parallel to the surface of the substrate. , And are provided so as to be 50% or more of the corresponding length of the holding portion.
(8)本発明に係る第3の観点は、基板収納容器であって、開口を有する容器本体と、前記開口を閉鎖する蓋体と、前記蓋体の内面に取り付けられ、前記容器本体に整列して収納される複数の基板のそれぞれの周縁部を保持する複数の保持部をもつ保持部材と、前記保持部材が取り付けられる前記蓋体の取付け面に設けられ、前記複数の保持部の間を仕切るように前記取付け面から前記保持部の両側に突出する複数の仕切り壁と、を備え、前記保持部が、その両側に配置される2つの前記仕切り壁との間に合計で0.2mm以上0.5mm以下の隙間を有することを特徴とする。 (8) A third aspect of the present invention is a substrate storage container, which is a container body having an opening, a lid body that closes the opening, an inner surface of the lid body, and aligned with the container body. And a holding member having a plurality of holding portions for holding the respective peripheral portions of the plurality of substrates stored therein, and an attachment surface of the lid body to which the holding member is attached, and between the plurality of holding portions. A plurality of partition walls protruding on both sides of the holding portion from the mounting surface so as to partition, and the holding portion is 0.2 mm or more in total between the two partition walls arranged on both sides thereof It has a gap of 0.5 mm or less.
本発明によれば、基板の動きを適正に制限して、基板の破損を防止するとともに基板の汚れを防止できる基板収納容器が提供される。 ADVANTAGE OF THE INVENTION According to this invention, the movement of a board | substrate is restrict | limited appropriately and the board | substrate storage container which can prevent the damage | wound of a board | substrate while preventing a damage | damage of a board | substrate is provided.
以下、添付図面を参照して、本発明を実施するための形態(以下、「実施形態」と称する)について詳細に説明する。実施形態の説明の全体を通して同じ要素には同じ番号を付している。 DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as “embodiments”) will be described in detail with reference to the accompanying drawings. The same number is attached | subjected to the same element through the whole description of embodiment.
(基板収納容器の全体構成)
図1に示すように、実施形態に係る基板収納容器1は、容器本体2の前面に開口4を有し複数の基板Wを整列させて(この例では、基板Wを水平な姿勢で垂直方向に並べて)収納する容器本体2と、開口4をシール可能に閉鎖する蓋体11とを備える。容器本体2には、その対向する内面2bに一対の支持部材3が設けられ、支持部材3には、基板Wの周縁部を水平に保持する支持部が垂直方向に一定間隔で形成されている。
(Overall configuration of substrate storage container)
As shown in FIG. 1, the substrate storage container 1 according to the embodiment has an opening 4 on the front surface of the container body 2 and aligns a plurality of substrates W (in this example, the substrates W are placed in a horizontal posture in a vertical direction. A container main body 2 to be stored and a lid body 11 that closes the opening 4 so as to be sealable. The container main body 2 is provided with a pair of support members 3 on the inner surface 2b facing each other, and the support members 3 are formed with support portions that hold the peripheral edge of the substrate W horizontally at regular intervals in the vertical direction. .
容器本体2の天井面2aには、ロボティックフランジ7が着脱自在に装着される。基板収納容器1は、このロボティックフランジ7が自動の天井搬送機に保持されることにより、工程内及び工程間を搬送される。 A robotic flange 7 is detachably mounted on the ceiling surface 2 a of the container body 2. The substrate storage container 1 is transported within and between the processes by holding the robotic flange 7 on an automatic ceiling conveyor.
容器本体2と蓋体11は、例えばポリカーボネート、ポリエーテルエーテルケトン、ポリエーテルイミド、ポリブチレンテレフタレート、ポリアセタール、液晶ポリマー、シクロオレフィンポリマーなどの合成樹脂から形成することができる。また、これらの樹脂に、カーボンパウダー、カーボン繊維、カーボンナノチューブなどを添加して、導電性を付与することもできる。 The container body 2 and the lid body 11 can be formed from a synthetic resin such as polycarbonate, polyether ether ketone, polyether imide, polybutylene terephthalate, polyacetal, liquid crystal polymer, or cycloolefin polymer. In addition, conductivity can be imparted to these resins by adding carbon powder, carbon fibers, carbon nanotubes, or the like.
図2に示すように、基板収納容器1は、蓋体11の内面に取り付けられる左右一対の保持部材21L,21Rと、左右一対の保持部材21L,21Rが取り付けられる左右の取付け面11aのそれぞれに対応して設けられる複数の仕切り壁22と、を備える。なお、左右一対の保持部材21L,21R及びこれらに対応する複数の仕切り壁22は、左右対称な形状であるため、以下の説明では、保持部材21R及びこれに対応する複数の仕切り壁22の構成についてのみ説明する。 As shown in FIG. 2, the substrate storage container 1 has a pair of left and right holding members 21L and 21R attached to the inner surface of the lid 11, and a left and right attachment surface 11a to which the pair of left and right holding members 21L and 21R are attached. And a plurality of partition walls 22 provided correspondingly. Note that the pair of left and right holding members 21L and 21R and the plurality of partition walls 22 corresponding thereto have a symmetrical shape. Therefore, in the following description, the configuration of the holding member 21R and the plurality of partition walls 22 corresponding thereto is described. Only will be described.
(保持部材の構成)
図3に示すように、保持部材21Rは、一対の取付け部21a、複数組の一対の第1弾性片21b及び複数の第2弾性片21cを備える。一対の取付け部21aのうち、蓋体11の中央側に位置する取付け部21aは、その内側の縁に設けられた複数の凸部21a1が蓋体11の凹部11bに嵌合して位置決めされる。一方、蓋体11の外側に位置する取付け部21aは、その外側の縁が蓋体11の係合爪11cに差し込まれることで係合される。これにより、取付け部21aは、蓋体11の取付け面11aに取り付けられる。
(Configuration of holding member)
As shown in FIG. 3, the holding member 21R includes a pair of attachment portions 21a, a plurality of pairs of first elastic pieces 21b, and a plurality of second elastic pieces 21c. Of the pair of attachment portions 21 a, the attachment portion 21 a located on the center side of the lid body 11 is positioned by fitting a plurality of convex portions 21 a 1 provided on the inner edge of the concave portion 11 b of the lid body 11. . On the other hand, the attachment portion 21 a located outside the lid body 11 is engaged by inserting an outer edge of the attachment portion 21 a into the engagement claw 11 c of the lid body 11. As a result, the attachment portion 21 a is attached to the attachment surface 11 a of the lid body 11.
一対の第1弾性片21bは、一対の取付け部21aからそれぞれ内向きに突出しており、取付け部21aの長手方向に所定のピッチで複数組、配列される。第2弾性片21cは、基板Wの前側の周縁部に沿った形状に形成されており、一体に形成される保持部21d(図4参照)をもつ。 The pair of first elastic pieces 21b protrude inward from the pair of attachment portions 21a, and a plurality of sets are arranged at a predetermined pitch in the longitudinal direction of the attachment portions 21a. The 2nd elastic piece 21c is formed in the shape along the peripheral part of the front side of the board | substrate W, and has the holding | maintenance part 21d (refer FIG. 4) formed integrally.
図5(a)に示すように、保持部21dは、一対の傾斜面21eにより形成され、断面略V字形あるいは略Y字形を呈する保持溝21fを有する。保持部材21Rは、例えば、ポリプロピレン、ポリカーボネート、ポリエチレンテレフタレート、ポリブチレンテレフタレート、ポリエーテルエーテルケトン、ポリアセタール、ポリエーテルイミド等の合成樹脂、ポリエステル系の熱可塑性能エラストマー、ポリウレタン系の熱可塑性能エラストマー等の成形材料を使用して成形される。これらの成形材料の中では、成形時のアウトガスや損傷の少ないポリブチレンテレフタレートの選択が最適である。成形材料には、帯電防止剤、カーボンや金属繊維等の導電性付与剤、紫外線吸収剤、ガラス繊維や炭素繊維等の補強剤が選択的に適量添加される。 As shown in FIG. 5A, the holding portion 21d has a holding groove 21f formed by a pair of inclined surfaces 21e and having a substantially V-shaped or Y-shaped cross section. The holding member 21R is made of, for example, a synthetic resin such as polypropylene, polycarbonate, polyethylene terephthalate, polybutylene terephthalate, polyether ether ketone, polyacetal, or polyetherimide, a polyester-based thermoplastic performance elastomer, a polyurethane-based thermoplastic performance elastomer, or the like. Molded using a molding material. Among these molding materials, it is optimal to select polybutylene terephthalate, which has less outgassing and damage during molding. An appropriate amount of an antistatic agent, a conductivity imparting agent such as carbon or metal fiber, an ultraviolet absorber, or a reinforcing agent such as glass fiber or carbon fiber is selectively added to the molding material.
(複数の仕切り壁の構成)
図6(a)から(c)に示すように、複数の仕切り壁22は、上下方向に沿って取付け面11aに延在する基部23に設けられる。仕切り壁22は、基部23から複数の保持部21dの間を仕切るように各保持部21dの上下両側に突出しており、保持部21d及び基板Wの動きを制限する機能を有する。各仕切り壁22は、蓋体11に一体に形成されてもよいし、蓋体11と別部品で形成されてもよい。保持部21dは、その両側に配置される2つの仕切り壁22のうち、一方の仕切り壁22との間に、図5(a)において寸法C1で示される第1の隙間(以下、「第1の隙間C1」と称する)を、他方の仕切り壁22との間に、図5(a)において寸法C2で示される第2の隙間(以下、「第2の隙間C2」と称する)を有する。
(Configuration of multiple partition walls)
As shown in FIGS. 6A to 6C, the plurality of partition walls 22 are provided on the base 23 extending to the attachment surface 11a along the vertical direction. The partition wall 22 protrudes on both upper and lower sides of each holding part 21d so as to partition the plurality of holding parts 21d from the base 23, and has a function of restricting the movement of the holding part 21d and the substrate W. Each partition wall 22 may be formed integrally with the lid body 11 or may be formed as a separate part from the lid body 11. The holding portion 21d has a first gap (hereinafter referred to as “first”) indicated by a dimension C1 in FIG. 5A between one of the two partition walls 22 arranged on both sides of the holding portion 21d. Between the other partition wall 22 and a second gap (hereinafter referred to as “second gap C2”) indicated by a dimension C2 in FIG. 5A.
(仕切り壁の突出高さ)
ここで、仕切り壁22の寸法について述べる。
本発明者は、基板Wの動きを適正に制限するための好適な仕切り壁22の突出高さH2について検討した。ここで、仕切り壁22の突出高さH2は、取付け面11aから仕切り壁22の先端25までの高さである。
(Partition wall protrusion height)
Here, the dimension of the partition wall 22 will be described.
The inventor has examined a suitable projection height H2 of the partition wall 22 for appropriately limiting the movement of the substrate W. Here, the protruding height H <b> 2 of the partition wall 22 is a height from the mounting surface 11 a to the tip 25 of the partition wall 22.
検討の結果、図5(a)に示すように、保持部21dが基板Wの周縁部を保持している状態(蓋体11を閉めることで保持溝21fが基板Wの周縁部からの力を受けて取付け面11a側に距離Hだけ移動した状態)において、仕切り壁22の突出高さH2は、取付け面11aから保持部21dの先端21gまでの高さH1以上に設定することが好適であり、これにより、基板Wと接触して圧縮されるときの保持部21dの動きを仕切り壁22で適切に規制でき、基板Wの汚染が低減されることを見出した。 As a result of the examination, as shown in FIG. 5A, the holding portion 21d holds the peripheral edge of the substrate W (the holding groove 21f applies a force from the peripheral edge of the substrate W by closing the lid 11). In a state in which the partition wall 22 is moved to the mounting surface 11a side by a distance H), the protruding height H2 of the partition wall 22 is preferably set to be equal to or higher than the height H1 from the mounting surface 11a to the tip 21g of the holding portion 21d. Thus, it has been found that the movement of the holding portion 21d when compressed in contact with the substrate W can be appropriately regulated by the partition wall 22, and contamination of the substrate W is reduced.
また、図5(b)に示すように、仕切り壁22の突出高さH2が、保持部21dが基板Wの周縁部を保持してない状態における取付け面11aから保持部21dの先端21gまでの高さH0以上であれば、基板Wと接触して圧縮されるときの保持部21dの動きを、より確実にかつ適切に仕切り壁22で規制できるため、更なる基板Wの汚染低減を図ることができる。 Further, as shown in FIG. 5B, the protruding height H2 of the partition wall 22 is from the mounting surface 11a to the tip 21g of the holding portion 21d when the holding portion 21d does not hold the peripheral edge of the substrate W. If the height is equal to or higher than H0, the movement of the holding portion 21d when compressed in contact with the substrate W can be more reliably and appropriately regulated by the partition wall 22, so that the contamination of the substrate W can be further reduced. Can do.
(仕切り壁の長さ)
また、基板Wの動きを適正に制限するための仕切り壁22の好適な長さについても検討した。ここでは、仕切り壁22の、その突出方向に直角な方向でかつ基板Wの表面に平行な方向の長さL4(図4参照)に着目し、それに対応する保持部21dの長さL3に対する、仕切り壁22の長さL4の好適な割合について検討した。
(Length of partition wall)
Moreover, the suitable length of the partition wall 22 for restrict | limiting the motion of the board | substrate W appropriately was also examined. Here, paying attention to the length L4 (see FIG. 4) of the partition wall 22 in the direction perpendicular to the projecting direction and parallel to the surface of the substrate W, the length L3 of the holding portion 21d corresponding thereto is A suitable ratio of the length L4 of the partition wall 22 was examined.
まず、図7(a)に示すように、保持部21dの長さL3に対する仕切り壁22の長さL4の割合が大きい場合、保持部21dの動きを規制できる仕切り壁22の範囲が比較的広くなるため、保持部21dのねじれ方向の移動(図中、矢印(1)で示す)が小さくなる。 First, as shown in FIG. 7A, when the ratio of the length L4 of the partition wall 22 to the length L3 of the holding portion 21d is large, the range of the partition wall 22 that can restrict the movement of the holding portion 21d is relatively wide. Therefore, the movement of the holding portion 21d in the twisting direction (indicated by an arrow (1) in the figure) is reduced.
一方、図7(b)に示すように、保持部21dの長さL3に対する仕切り壁22の長さL4の割合が小さい場合、保持部21dの動きを規制できる仕切り壁22の範囲が狭くなるため、保持部21dのねじれ方向の移動(図中、矢印(2)で示す)が大きくなる。 On the other hand, as shown in FIG. 7B, when the ratio of the length L4 of the partition wall 22 to the length L3 of the holding portion 21d is small, the range of the partition wall 22 that can restrict the movement of the holding portion 21d is narrowed. The movement of the holding portion 21d in the twisting direction (indicated by the arrow (2) in the figure) becomes large.
このような仕切り壁22の長さL4と保持部21dのねじれ方向の移動との関係に注目し、長さL4の長さL3に対する好適な割合を求めた結果、仕切り壁22の長さL4が、保持部21dの長さL3の50%以上、より望ましくは、65%以上であることが、基板Wの動きを適正に制限する上で、好適であることが分かった。すなわち、仕切り壁22の長さL4が保持部21dの長さL3の50%以上であれば、保持部21dがねじれ方向に移動することを十分に規制できて基板Wの汚染を低減でき、65%以上であれば、基板Wの汚染をより低減できることが分かった。 Paying attention to the relationship between the length L4 of the partition wall 22 and the movement of the holding portion 21d in the torsional direction, and obtaining a suitable ratio of the length L4 to the length L3, the length L4 of the partition wall 22 is It has been found that 50% or more of the length L3 of the holding portion 21d, more desirably 65% or more, is preferable in appropriately restricting the movement of the substrate W. That is, if the length L4 of the partition wall 22 is 50% or more of the length L3 of the holding portion 21d, the holding portion 21d can be sufficiently restricted from moving in the twisting direction, and contamination of the substrate W can be reduced. It has been found that the contamination of the substrate W can be further reduced if it is at least%.
(保持部と仕切り壁との隙間)
また、基板Wの動きを適正に制限するための、保持部21dと仕切り壁22の隙間の好適な大きさについて検討した。その結果、隣り合う2つの保持部21dの間(1スロット)における隙間の合計(C1+C2)は、基板Wの破損を防止する上では、0.2mm以上が好適であり、基板Wの汚染を防止する上では、0.5mm以下が好適あることが分かった。さらに、第1の隙間C1及び第2の隙間C2が、それぞれ、0.1mm以上0.25mm以下の大きさに設定されることが、基板Wの動きを適正に制限する上で有効であることを見出した。
(Gap between the holding part and the partition wall)
Further, a suitable size of the gap between the holding portion 21d and the partition wall 22 for appropriately restricting the movement of the substrate W was examined. As a result, the total gap (C1 + C2) between two adjacent holding portions 21d (one slot) is preferably 0.2 mm or more in order to prevent the substrate W from being damaged, and contamination of the substrate W is prevented. It was found that 0.5 mm or less is preferable. Furthermore, it is effective in appropriately restricting the movement of the substrate W that the first gap C1 and the second gap C2 are set to a size of 0.1 mm or more and 0.25 mm or less, respectively. I found.
(実施例)
以下、基板収納容器1の実施例について述べる。
この実施例では、前述した基板収納容器1において第1の隙間C1及び第2の隙間C2の合計(C1+C2)を0.2mm以上0.5mm以下に設定した試作品を作成し、この試作品を振動試験に供し、評価した。振動試験条件及び評価方法は、以下の通りである。
(Example)
Hereinafter, examples of the substrate storage container 1 will be described.
In this embodiment, a prototype in which the total of the first gap C1 and the second gap C2 (C1 + C2) is set to 0.2 mm or more and 0.5 mm or less in the above-described substrate storage container 1 is created. It was subjected to a vibration test and evaluated. The vibration test conditions and evaluation methods are as follows.
○振動試験条件(JIS Z0200:1999準拠 陸走1000km未満相当)
試験機器:EMIC製 936−AW/LAH
振動:正弦波振動
周波数:5Hz〜50Hz、一往復半(5→50→5→50)
加速度:±0.75G
掃引時間:片道7分(計21分)
○汚れ量評価方法
上記振動試験条件で試作品に振動を加えた後、試作品に収納されている基板Wの表面について、集光灯下における反射光の目視観察及びデジタルマイクロスコープによる観察を行い、汚れ量を評価した。
○ Vibration test conditions (JIS Z0200: 1999 compliant, less than 1000km of land travel)
Test equipment: 936 AW / LAH made by EMIC
Vibration: sinusoidal vibration frequency: 5 Hz to 50 Hz, one reciprocal half (5 → 50 → 5 → 50)
Acceleration: ± 0.75G
Sweep time: 7 minutes each way (21 minutes in total)
○ Method for evaluating the amount of dirt After the prototype is vibrated under the above-mentioned vibration test conditions, the surface of the substrate W accommodated in the prototype is visually observed under a condenser lamp and observed with a digital microscope. The amount of dirt was evaluated.
評価の結果、基板Wに付着した汚れ量が少なく、隙間の合計を0.2mm以上0.5mm以下の範囲とすることが、好適な隙間の条件であることが確認された。 As a result of the evaluation, it was confirmed that the amount of dirt adhering to the substrate W was small and the total gap was in the range of 0.2 mm to 0.5 mm, which is a suitable gap condition.
(実施形態の効果)
以上、説明した実施形態の効果について述べる。
本実施形態によれば、仕切り壁22の突出高さH2、仕切り壁22の長さL4、保持部21dと仕切り壁22の隙間を適切に設定することにより、基板Wの動きを適正に制限して、基板Wの破損を防止するとともに基板Wの汚れが防止される基板収納容器1を提供することができる。
(Effect of embodiment)
The effects of the embodiment described above will be described.
According to this embodiment, by appropriately setting the protruding height H2 of the partition wall 22, the length L4 of the partition wall 22, and the gap between the holding portion 21d and the partition wall 22, the movement of the substrate W is appropriately limited. Thus, it is possible to provide the substrate storage container 1 that prevents the substrate W from being damaged and prevents the substrate W from being soiled.
以上、実施形態を用いて本発明を説明したが、本発明の技術的範囲は上記実施形態に記載の範囲には限定されないことは言うまでもない。上記実施形態に、多様な変更又は改良を加えることが可能であることが当業者に明らかである。またそのような変更又は改良を加えた形態も本発明の技術的範囲に含まれ得ることが、特許請求の範囲の記載から明らかである。 As mentioned above, although this invention was demonstrated using embodiment, it cannot be overemphasized that the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above embodiment. Further, it is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.
1 基板収納容器
2 容器本体
4 開口
11 蓋体
11a 取付け面
21L 保持部材
21R 保持部材
21d 保持部
21g 先端
22 仕切り壁
25 先端
W 基板
H 移動距離
H0 保持部の先端までの高さ
H1 保持部の先端までの高さ
H2 仕切り壁の突出高さ
L3 保持部の長さ
L4 仕切り壁の長さ
C1 第1の隙間
C2 第2の隙間
DESCRIPTION OF SYMBOLS 1 Substrate storage container 2 Container body 4 Opening 11 Lid 11a Mounting surface 21L Holding member 21R Holding member 21d Holding part 21g Tip 22 Partition wall 25 Tip W Substrate H Movement distance H0 Height to tip of holding part H1 Tip of holding part Height H2 Partition wall protrusion height L3 Holding portion length L4 Partition wall length C1 First gap C2 Second gap
Claims (8)
開口を有する容器本体と、
前記開口を閉鎖する蓋体と、
前記蓋体の内面に取り付けられ、前記容器本体に整列して収納される複数の基板のそれぞれの周縁部を保持する複数の保持部をもつ保持部材と、
前記保持部材が取り付けられる前記蓋体の取付け面に設けられ、前記複数の保持部の間を仕切るように前記取付け面から前記保持部の両側に突出する複数の仕切り壁と、を備え、
前記仕切り壁が、前記保持部が前記基板の周縁部を保持している状態において、前記取付け面からの突出高さが、前記取付け面から前記保持部の先端までの高さ以上になるように、設けられることを特徴とする基板収納容器。 A substrate storage container,
A container body having an opening;
A lid for closing the opening;
A holding member attached to the inner surface of the lid and having a plurality of holding portions for holding the peripheral edges of the plurality of substrates stored in alignment with the container body;
A plurality of partition walls provided on an attachment surface of the lid to which the holding member is attached, and projecting from the attachment surface to both sides of the holding portion so as to partition the plurality of holding portions;
In the state where the holding portion holds the peripheral portion of the substrate, the partition wall has a protruding height from the mounting surface that is equal to or higher than a height from the mounting surface to the tip of the holding portion. And a substrate storage container.
前記第1の隙間及び前記第2の隙間が、それぞれ、0.1mm以上0.25mm以下の大きさに設定されることを特徴とする請求項1から5のいずれか1項に記載の基板収納容器。 The holding part has a first gap between one of the two partition walls arranged on both sides thereof, and a second gap between the other partition wall,
6. The substrate storage according to claim 1, wherein each of the first gap and the second gap is set to have a size of 0.1 mm or more and 0.25 mm or less. container.
開口を有する容器本体と、
前記開口を閉鎖する蓋体と、
前記蓋体の内面に取り付けられ、前記容器本体に整列して収納される複数の基板のそれぞれの周縁部を保持する複数の保持部をもつ保持部材と、
前記保持部材が取り付けられる前記蓋体の取付け面に設けられ、前記複数の保持部の間を仕切るように前記取付け面から前記保持部の両側に突出する複数の仕切り壁と、を備え、
前記仕切り壁が、その突出方向に直角な方向でかつ前記基板の表面に平行な方向の長さが、対応する前記保持部の長さの50%以上になるように、設けられることを特徴とする基板収納容器。 A substrate storage container,
A container body having an opening;
A lid for closing the opening;
A holding member attached to the inner surface of the lid and having a plurality of holding portions for holding the peripheral edges of the plurality of substrates stored in alignment with the container body;
A plurality of partition walls provided on an attachment surface of the lid to which the holding member is attached, and projecting from the attachment surface to both sides of the holding portion so as to partition the plurality of holding portions;
The partition wall is provided so that a length in a direction perpendicular to the protruding direction and parallel to the surface of the substrate is 50% or more of the length of the corresponding holding portion. Substrate storage container.
開口を有する容器本体と、
前記開口を閉鎖する蓋体と、
前記蓋体の内面に取り付けられ、前記容器本体に整列して収納される複数の基板のそれぞれの周縁部を保持する複数の保持部をもつ保持部材と、
前記保持部材が取り付けられる前記蓋体の取付け面に設けられ、前記複数の保持部の間を仕切るように前記取付け面から前記保持部の両側に突出する複数の仕切り壁と、を備え、
前記保持部が、その両側に配置される2つの前記仕切り壁との間に合計で0.2mm以上0.5mm以下の隙間を有することを特徴とする基板収納容器。
A substrate storage container,
A container body having an opening;
A lid for closing the opening;
A holding member attached to the inner surface of the lid and having a plurality of holding portions for holding the peripheral edges of the plurality of substrates stored in alignment with the container body;
A plurality of partition walls provided on an attachment surface of the lid to which the holding member is attached, and projecting from the attachment surface to both sides of the holding portion so as to partition the plurality of holding portions;
The holding container has a total gap of 0.2 mm or more and 0.5 mm or less between the two partition walls arranged on both sides thereof.
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