JP2016186457A - Magnetic sensor - Google Patents

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JP2016186457A
JP2016186457A JP2015066765A JP2015066765A JP2016186457A JP 2016186457 A JP2016186457 A JP 2016186457A JP 2015066765 A JP2015066765 A JP 2015066765A JP 2015066765 A JP2015066765 A JP 2015066765A JP 2016186457 A JP2016186457 A JP 2016186457A
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magnetic
magnetic field
soft magnetic
field passing
soft
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JP6580357B2 (en
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佑貴 今井
Yuki Imai
佑貴 今井
安藤　秀人
Hideto Ando
秀人 安藤
雅史 金子
Masafumi Kaneko
雅史 金子
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Alps Alpine Co Ltd
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Alps Electric Co Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a magnetic sensor with improved hysteresis.SOLUTION: A magnetic sensor S has a plurality of soft magnetic materials 12 arranged along a magnetic sensor 10 for forming a magnetic path of an external magnetic field. Among the plurality of soft magnetic materials 12, two adjacent soft magnetic materials 12A and 12B extend in the band-like shape along the magnetic sensor 10, have a magnetic sensing portion D of the magnetic sensor 10 held therebetween in a Y1-Y2 direction in the plan view, and have a first magnetic field crossover part 12e of the soft magnetic material 12B and a second magnetic field crossover part 12c of the soft magnetic material 12A, which constitute a pair and are disposed facing each other so that the external magnetic field can travel therebetween. The magnetic sensing portion D is disposed apart in an X1-X2 direction from both an end 12c2 of the second magnetic field crossover part 12c of the soft magnetic material 12A and an end 12e2 of the first magnetic field crossover part 12e of the soft magnetic material 12B.SELECTED DRAWING: Figure 2

Description

本発明は、磁気抵抗効果素子を有する磁気センサに関する。   The present invention relates to a magnetic sensor having a magnetoresistive effect element.

磁気抵抗効果素子を有する磁気センサは、例えば、携帯電話等の携帯機器に組み込まれる地磁気を検知する地磁気センサとして使用されうる。   A magnetic sensor having a magnetoresistive element can be used as a geomagnetic sensor that detects geomagnetism incorporated in a portable device such as a mobile phone.

例えば、特許文献１に開示される磁気センサは、磁気抵抗効果を有する素子部に軟磁性体によって外部磁界を導く構成を有している。   For example, the magnetic sensor disclosed in Patent Document 1 has a configuration in which an external magnetic field is guided to a device portion having a magnetoresistive effect by a soft magnetic material.

特開２０１３−１６０６３９号公報JP 2013-160639 A

しかしながら、このような磁気センサでは、保磁力を超える外部磁界が軟磁性体に作用することによって、外部磁界の作用後の残留磁化状態（外部磁界を取り除いたあとの磁化状態）が初期の磁化状態から変動してしまうことがある。そのため、軟磁性体自身により生じる磁界も変動し、この変動が素子部に検知されて磁気センサの出力のヒステリシスとして現れることがあった。   However, in such a magnetic sensor, an external magnetic field exceeding the coercive force acts on the soft magnetic material, so that the remanent magnetization state (magnetization state after removing the external magnetic field) after the action of the external magnetic field is the initial magnetization state. May vary. For this reason, the magnetic field generated by the soft magnetic material itself also fluctuates, and this fluctuation may be detected by the element portion and appear as hysteresis of the output of the magnetic sensor.

そこで本発明は、上記従来の課題を解決するためのものであり、ヒステリシスを改善した磁気センサを提供することを目的とする。   Accordingly, the present invention is to solve the above-described conventional problems, and an object thereof is to provide a magnetic sensor with improved hysteresis.

本発明は、上記目的を達成するために、平面視で帯状に延在し、幅方向の感度軸を有する磁気検知部分が設けられた磁気検知体と、外部磁界の磁路を形成するように前記磁気検知体に沿って並べられた軟磁性材料からなる複数の磁路形成体とを有し、前記複数の磁路形成体のうちの隣り合う２つの磁路形成体が、前記磁気検知体に沿って帯状に延在するとともに平面視で前記磁気検知部分を前記幅方向に挟み、互いの間を前記外部磁界が進行可能に対向して配置される一対の磁界渡し部分を有し、前記磁気検知部分が、前記一対の磁界渡し部分のそれぞれの先端のうちの一方又は両方と前記磁気検知体の延在方向に間隔をあけて配置されていることを特徴とする磁気センサである。   In order to achieve the above-mentioned object, the present invention forms a magnetic path of an external magnetic field and a magnetic detection body provided with a magnetic detection portion extending in a band shape in plan view and having a sensitivity axis in the width direction. A plurality of magnetic path forming bodies made of a soft magnetic material arranged along the magnetic sensing body, and two adjacent magnetic path forming bodies among the plurality of magnetic path forming bodies are the magnetic sensing body. And a pair of magnetic field passing portions arranged so as to face each other so that the external magnetic field can travel between each other, extending in a band shape along the plane and sandwiching the magnetic detection portion in the width direction in plan view, The magnetic sensor is characterized in that one or both of the tip ends of each of the pair of magnetic field passing portions and the extending direction of the magnetic detector are spaced apart from each other.

本発明によれば、外部磁界の磁路を形成するように磁気検知体に沿って軟磁性材料からなる複数の磁路形成体が並べられている。これら複数の磁路形成体のうちの隣り合う２つの磁路形成体が、磁気検知体に沿って帯状に延在するとともに平面視で磁気検知体の磁気検知部分を幅方向に挟み、互いの間を外部磁界が進行可能に対向して配置される一対の磁界渡し部分を有している。そして、磁気検知部分が、一対の磁界渡し部分のそれぞれの先端のうちの一方又は両方と前記磁気検知体の延在方向に間隔をあけて配置されている。これにより、一対の磁界渡し部分は、帯状に延在していることから形状磁気異方性により先端に磁極が現れ、この先端から離れるにしたがって磁界の向きが延在方向に沿うように変化し、つまり、磁界における延在方向に直交する成分が小さくなりかつ延在方向に平行な成分が大きくなる。そのため、一対の磁界渡し部分の先端から離れて磁気検知部分を配置することで、磁路形成体に残留磁化が生じた場合であっても、磁気検知部分によって検知される当該残留磁化による磁界について当該磁気検知部分の感度軸方向の成分をより小さくすることができ、残留磁化の変化の影響を低減することができる。   According to the present invention, a plurality of magnetic path forming bodies made of a soft magnetic material are arranged along the magnetic detector so as to form a magnetic path of an external magnetic field. Two adjacent magnetic path forming bodies of the plurality of magnetic path forming bodies extend in a strip shape along the magnetic detection body and sandwich the magnetic detection portion of the magnetic detection body in the width direction in a plan view. It has a pair of magnetic field passing portions arranged so as to face each other so that an external magnetic field can travel. And the magnetic detection part is arrange | positioned at intervals in the extending direction of one or both of each front-end | tip of a pair of magnetic field transfer part, and the said magnetic detection body. As a result, since the pair of magnetic field passing portions extend in a band shape, a magnetic pole appears at the tip due to the shape magnetic anisotropy, and the direction of the magnetic field changes along the extending direction as the distance from the tip increases. That is, the component perpendicular to the extending direction in the magnetic field is reduced and the component parallel to the extending direction is increased. Therefore, even if residual magnetization is generated in the magnetic path forming body by disposing the magnetic detection part away from the tips of the pair of magnetic field transfer parts, the magnetic field due to the residual magnetization detected by the magnetic detection part The component in the sensitivity axis direction of the magnetic detection portion can be further reduced, and the influence of the change in residual magnetization can be reduced.

また、本発明では、前記磁気検知部分が、前記一対の磁界渡し部分のそれぞれの延在方向中央部分のうちの一方又は両方と前記幅方向に対向して配置されていることが好ましい。これにより、磁気検知部分が、一対の磁界渡し部分の先端からより離れてその延在方向中央位置付近に配置されるので、磁気検知部分によって検知される磁路形成体の残留磁化による磁界について当該磁気検知部分の感度軸方向の成分をさらに小さくすることができ、残留磁化の変化の影響をさらに低減することができる。   Moreover, in this invention, it is preferable that the said magnetic detection part is arrange | positioned facing the said width direction with one or both of each extending direction center part of a pair of said magnetic field transfer part. As a result, the magnetic detection part is arranged farther from the tip of the pair of magnetic field transfer parts and near the center position in the extending direction, so that the magnetic field due to the residual magnetization of the magnetic path forming body detected by the magnetic detection part The component in the sensitivity axis direction of the magnetic detection portion can be further reduced, and the influence of the change in residual magnetization can be further reduced.

また、本発明では、前記隣り合う２つの磁路形成体のそれぞれが、前記磁気検知体と交差して前記幅方向に延在する交差部分と、前記交差部分における前記幅方向の一端部から前記磁気検知体に沿って帯状に延在する第１磁界渡し部分と、前記交差部分における前記幅方向の他端部から前記磁気検知体に沿って前記第１磁界渡し部分と反対方向に帯状に延在する第２磁界渡し部分と、を有し、前記隣り合う２つの磁路形成体のうちの一方の磁路形成体の前記第２磁界渡し部分と他方の磁路形成体の前記第１磁界渡し部分とで、前記一対の磁界渡し部分を構成することが好ましい。   Further, in the present invention, each of the two adjacent magnetic path forming bodies intersects the magnetic detector and extends in the width direction, and from the one end in the width direction at the intersecting portion. A first magnetic field passing portion extending in a strip shape along the magnetic detector, and a strip extending in the opposite direction to the first magnetic field passing portion along the magnetic detector from the other end in the width direction at the intersecting portion. A second magnetic field transfer portion, and the second magnetic field transfer portion of one of the two adjacent magnetic path formation members and the first magnetic field of the other magnetic path formation member. It is preferable that the pair of magnetic field passing portions constitute the passing portion.

また、本発明では、前記隣り合う２つの磁路形成体のうちの一方の磁路形成体の前記第２磁界渡し部分がその前記第１磁界渡し部分より長く形成されていることが好ましい。   In the present invention, it is preferable that the second magnetic field passing portion of one of the two adjacent magnetic path forming members is formed longer than the first magnetic field passing portion.

また、本発明では、前記隣り合う２つの磁路形成体のうちの他方の磁路形成体の前記第１磁界渡し部分がその前記第２磁界渡し部分より長く形成されていることが好ましい。   Moreover, in this invention, it is preferable that the said 1st magnetic field transfer part of the other magnetic path formation body of the said two adjacent magnetic path formation bodies is formed longer than the said 2nd magnetic field transfer part.

また、本発明では、前記隣り合う２つの磁路形成体のうちの一方又は両方における厚さが、３μｍ以上であることが好ましい。   Moreover, in this invention, it is preferable that the thickness in one or both of the said two adjacent magnetic path formation bodies is 3 micrometers or more.

本発明によれば、ヒステリシスを改善することができる。   According to the present invention, hysteresis can be improved.

本発明の一実施形態に係る磁気センサの概略図（平面図）である。It is the schematic (plan view) of the magnetic sensor which concerns on one Embodiment of this invention. 図１の磁気センサが有する第１の磁気抵抗効果素子及び第４の磁気抵抗効果素子の一部を拡大して示した磁気センサの部分拡大平面図である。It is the elements on larger scale of the magnetic sensor which expanded and showed a part of 1st magnetoresistive effect element and 4th magnetoresistive effect element which the magnetic sensor of FIG. 1 has. 図２のＡ−Ａ線に沿って切断し矢印方向から見た磁気センサの部分拡大断面図である。It is the elements on larger scale of the magnetic sensor cut | disconnected along the AA line of FIG. 2, and was seen from the arrow direction. 図２のＢ−Ｂ線に沿って切断し矢印方向から見た磁気センサの部分拡大断面図である。It is the elements on larger scale of the magnetic sensor cut | disconnected along the BB line of FIG. 2, and was seen from the arrow direction. 図１の磁気センサが有する第２の磁気抵抗効果素子及び第３の磁気抵抗効果素子の一部を拡大して示した磁気センサの部分拡大平面図である。It is the elements on larger scale of the magnetic sensor which expanded and showed a part of 2nd magnetoresistive effect element and 3rd magnetoresistive effect element which the magnetic sensor of FIG. 1 has. 本発明の比較例に係る磁気センサが有する第１の磁気抵抗効果素子及び第４磁気抵抗効果素子の一部を拡大して示した磁気センサの部分拡大平面図である。It is the elements on larger scale of the magnetic sensor which expanded and showed a part of 1st magnetoresistive effect element and 4th magnetoresistive effect element which the magnetic sensor which concerns on the comparative example of this invention has. 本発明の比較例に係る磁気センサが有する第２の磁気抵抗効果素子及び第３磁気抵抗効果素子の一部を拡大して示した磁気センサの部分拡大平面図である。It is the elements on larger scale of the magnetic sensor which expanded and showed a part of 2nd magnetoresistive effect element and 3rd magnetoresistive effect element which the magnetic sensor which concerns on the comparative example of this invention has. 棒磁石によって生じる磁界（磁力線）を模式的に示す図である。It is a figure which shows typically the magnetic field (line of magnetic force) produced by a bar magnet. 本発明の実施例１、２の磁気センサが有する磁気抵抗効果素子の部分拡大平面図である。It is the elements on larger scale of the magnetoresistive effect element which the magnetic sensor of Example 1, 2 of this invention has. 本発明の実施例３の磁気センサが有する磁気抵抗効果素子の部分拡大平面図である。It is the elements on larger scale of the magnetoresistive effect element which the magnetic sensor of Example 3 of this invention has. 本発明の比較例の磁気センサが有する磁気抵抗効果素子の部分拡大平面図である。It is the elements on larger scale of the magnetoresistive effect element which the magnetic sensor of the comparative example of this invention has. 実施例及び比較例のヒステリシス量を示すグラフである。It is a graph which shows the hysteresis amount of an Example and a comparative example.

以下に、本発明の一実施形態に係る磁気センサについて、図１〜図７を参照して説明する。   Hereinafter, a magnetic sensor according to an embodiment of the present invention will be described with reference to FIGS.

図１は、本発明の一実施形態に係る磁気センサの概略図（平面図）である。図２は、図１の磁気センサが有する第１の磁気抵抗効果素子及び第４の磁気抵抗効果素子の一部を拡大して示した磁気センサの部分拡大平面図である。図３は、図２のＡ−Ａ線に沿って切断し矢印方向から見た磁気センサの部分拡大断面図である。図４は、図２のＢ−Ｂ線に沿って切断し矢印方向から見た磁気センサの部分拡大断面図である。図５は、図１の磁気センサが有する第２の磁気抵抗効果素子及び第３の磁気抵抗効果素子の一部を拡大して示した磁気センサの部分拡大平面図である。図６は、本発明の比較例に係る磁気センサが有する第１の磁気抵抗効果素子及び第４磁気抵抗効果素子の一部を拡大して示した磁気センサの部分拡大平面図である。図７は、本発明の比較例に係る磁気センサが有する第２の磁気抵抗効果素子及び第３磁気抵抗効果素子の一部を拡大して示した磁気センサの部分拡大平面図である。図８は、棒磁石によって生じる磁界（磁力線）を模式的に示す図である。   FIG. 1 is a schematic view (plan view) of a magnetic sensor according to an embodiment of the present invention. FIG. 2 is a partially enlarged plan view of the magnetic sensor showing a part of the first magnetoresistive element and the fourth magnetoresistive element included in the magnetic sensor of FIG. FIG. 3 is a partially enlarged cross-sectional view of the magnetic sensor taken along the line AA in FIG. 2 and viewed from the direction of the arrows. 4 is a partially enlarged cross-sectional view of the magnetic sensor taken along the line BB in FIG. 2 and viewed from the direction of the arrow. FIG. 5 is a partially enlarged plan view of the magnetic sensor showing a part of the second magnetoresistive effect element and the third magnetoresistive effect element included in the magnetic sensor of FIG. FIG. 6 is a partially enlarged plan view of the magnetic sensor showing a part of the first magnetoresistive element and the fourth magnetoresistive element included in the magnetic sensor according to the comparative example of the present invention. FIG. 7 is a partially enlarged plan view of the magnetic sensor showing a part of the second magnetoresistive element and the third magnetoresistive element included in the magnetic sensor according to the comparative example of the present invention. FIG. 8 is a diagram schematically showing a magnetic field (lines of magnetic force) generated by a bar magnet.

各図に示すＸ１−Ｘ２方向、及びＹ１−Ｙ２方向は一平面内にて直交する２方向を示し、Ｚ方向は前記一平面に対して直交する方向を示している。   The X1-X2 direction and the Y1-Y2 direction shown in each drawing indicate two directions orthogonal to each other in one plane, and the Z direction indicates a direction orthogonal to the one plane.

本実施形態における磁気センサＳは、磁気抵抗効果素子を有しており、例えば、携帯電話等の携帯機器に搭載される地磁気センサとして構成される。   The magnetic sensor S in the present embodiment has a magnetoresistive effect element, and is configured as a geomagnetic sensor mounted on a mobile device such as a mobile phone, for example.

磁気センサＳは、図１に示すように、矩形状の磁気抵抗効果素子の形成領域Ｋを有している。この形成領域Ｋには、その中心ＫｃからＸ１−Ｘ２方向及びＹ１−Ｙ２方向に分割された４つの領域部分が設けられている。これら４つの領域部分内には、第１の磁気抵抗効果素子１、第２の磁気抵抗効果素子２、第３の磁気抵抗効果素子３、第４の磁気抵抗効果素子４が形成されている。図１では、各領域部分について、磁気抵抗効果素子１〜４の形状を省略して図示している。   As shown in FIG. 1, the magnetic sensor S has a rectangular magnetoresistive element formation region K. The formation region K is provided with four region portions divided from the center Kc in the X1-X2 direction and the Y1-Y2 direction. A first magnetoresistive effect element 1, a second magnetoresistive effect element 2, a third magnetoresistive effect element 3, and a fourth magnetoresistive effect element 4 are formed in these four region portions. In FIG. 1, the shape of the magnetoresistive effect elements 1 to 4 is omitted for each region portion.

第１の磁気抵抗効果素子１及び第３の磁気抵抗効果素子３は、入力端子５に接続されている。また、第２の磁気抵抗効果素子２及び第４の磁気抵抗効果素子４は、接地端子６に接続されている。また、第１の磁気抵抗効果素子１と第２の磁気抵抗効果素子２との間には、第１の出力端子７が接続されている。また、第３の磁気抵抗効果素子３と第４の磁気抵抗効果素子４との間には、第２の出力端子８が接続されている。このように第１の磁気抵抗効果素子１、第２の磁気抵抗効果素子２、第３の磁気抵抗効果素子３及び第４の磁気抵抗効果素子４によりブリッジ回路が構成されている。   The first magnetoresistance effect element 1 and the third magnetoresistance effect element 3 are connected to the input terminal 5. The second magnetoresistance effect element 2 and the fourth magnetoresistance effect element 4 are connected to the ground terminal 6. A first output terminal 7 is connected between the first magnetoresistive element 1 and the second magnetoresistive element 2. A second output terminal 8 is connected between the third magnetoresistive element 3 and the fourth magnetoresistive element 4. As described above, the first magnetoresistive element 1, the second magnetoresistive element 2, the third magnetoresistive element 3, and the fourth magnetoresistive element 4 form a bridge circuit.

第１の磁気抵抗効果素子１は、図２に示すように、磁気検知体１０と、磁気検知体１０と非接触に配置された複数の磁路形成体としての軟磁性体１２と、を備えている。なお、第４の磁気抵抗効果素子４についても、図２に示す構成を有している。   As shown in FIG. 2, the first magnetoresistive element 1 includes a magnetic detector 10 and a soft magnetic body 12 as a plurality of magnetic path forming bodies arranged in non-contact with the magnetic detector 10. ing. Note that the fourth magnetoresistive element 4 also has the configuration shown in FIG.

磁気検知体１０は、複数の素子部１１と、複数の電極部１６と、複数の接続部１７と、を有している。磁気検知体１０は、複数の素子部１１の端部が接続部１７によって接続されることにより互いに連なって帯状に形成されている。本実施形態の磁気検知体１０は、平面視でミアンダ形状（蛇腹形状）に形成されている。   The magnetic detection body 10 includes a plurality of element portions 11, a plurality of electrode portions 16, and a plurality of connection portions 17. The magnetic detection body 10 is formed in a band shape by being connected to each other by connecting the end portions of the plurality of element portions 11 with the connection portion 17. The magnetic detector 10 of the present embodiment is formed in a meander shape (bellows shape) in plan view.

複数の素子部１１は、図３に示すように、それぞれがＸ１−Ｘ２方向に直線帯状に延在して形成されており、Ｙ１−Ｙ２方向に間隔をあけて互いに平行に配置されている。各素子部１１の幅寸法（Ｙ１−Ｙ２方向への寸法）は、０．５〜５μｍ程度、各素子部１１の長さ寸法（Ｘ１−Ｘ２方向への寸法）は、２〜３００μｍ程度であり、各素子部１１のアスペクト比（長さ寸法／幅寸法）は、４〜６００程度となっている。   As shown in FIG. 3, each of the plurality of element portions 11 is formed to extend in a straight strip shape in the X1-X2 direction, and is arranged in parallel to each other with an interval in the Y1-Y2 direction. The width dimension (dimension in the Y1-Y2 direction) of each element part 11 is about 0.5 to 5 μm, and the length dimension (dimension in the X1-X2 direction) of each element part 11 is about 2 to 300 μm. The aspect ratio (length dimension / width dimension) of each element unit 11 is about 4 to 600.

各素子部１１は、図３に示すように、基板１５表面の絶縁下地層１９上に形成される。   Each element portion 11 is formed on an insulating base layer 19 on the surface of the substrate 15 as shown in FIG.

各素子部１１は、例えば、図３下方から順に積層された非磁性下地層６０、固定磁性層６１、非磁性材料層６２、フリー磁性層６３及び保護層６４を有している。各素子部１１を構成するこれら各層６０〜６４は、例えば、絶縁下地層１９上にスパッタリングにて順次成膜されて積層される。   Each element unit 11 includes, for example, a nonmagnetic underlayer 60, a pinned magnetic layer 61, a nonmagnetic material layer 62, a free magnetic layer 63, and a protective layer 64, which are sequentially stacked from the bottom of FIG. Each of these layers 60 to 64 constituting each element unit 11 is sequentially deposited and laminated on the insulating base layer 19 by sputtering, for example.

固定磁性層６１は、第１磁性層６１ａ及び第２磁性層６１ｂと、これら第１磁性層６１ａ及び第２磁性層６１ｂ間に介在する非磁性中間層６１ｃとの積層フェリ構造を有している。第１磁性層６１ａ及び第２磁性層６１ｂは、ＣｏＦｅ合金（コバルト−鉄合金）などの軟磁性材料で形成されている。非磁性中間層６１ｃ、はＲｕ（ルテニウム）等である。非磁性材料層６２はＣｕ（銅）などの非磁性材料で形成されている。フリー磁性層６３は、ＮｉＦｅ合金（ニッケル−鉄合金）などの軟磁性材料で形成されている。保護層６４はＴａ（タンタル）などで形成されている。   The pinned magnetic layer 61 has a laminated ferrimagnetic structure of a first magnetic layer 61a and a second magnetic layer 61b and a nonmagnetic intermediate layer 61c interposed between the first magnetic layer 61a and the second magnetic layer 61b. . The first magnetic layer 61a and the second magnetic layer 61b are made of a soft magnetic material such as a CoFe alloy (cobalt-iron alloy). The nonmagnetic intermediate layer 61c is made of Ru (ruthenium) or the like. The nonmagnetic material layer 62 is formed of a nonmagnetic material such as Cu (copper). The free magnetic layer 63 is made of a soft magnetic material such as a NiFe alloy (nickel-iron alloy). The protective layer 64 is made of Ta (tantalum) or the like.

本実施形態では、固定磁性層６１を積層フェリ構造として、第１磁性層６１ａと第２磁性層６１ｂとが反平行に磁化固定されたセルフピン止め型を採用している。このセルフピン止め型では、反強磁性層を用いず、よって磁場中熱処理を施すことなく固定磁性層６１を構成する第１磁性層６１ａと第２磁性層６１ｂとを磁化固定している。なお、第１磁性層６１ａと第２磁性層６１ｂとの磁化固定力は、外部磁界が作用したときでも磁化揺らぎが生じない程度の大きさであれば足りる。   In the present embodiment, a self-pinning type in which the pinned magnetic layer 61 has a laminated ferrimagnetic structure and the first magnetic layer 61a and the second magnetic layer 61b are fixed in antiparallel with magnetization is employed. In this self-pinning type, the first magnetic layer 61a and the second magnetic layer 61b constituting the pinned magnetic layer 61 are fixed by magnetization without using an antiferromagnetic layer and thus without performing heat treatment in a magnetic field. It should be noted that the magnetization pinning force between the first magnetic layer 61a and the second magnetic layer 61b only needs to be large enough not to cause magnetization fluctuation even when an external magnetic field is applied.

もちろん、上述した素子部１１の構造は一例であって、素子部１１に他の構造を採用してもよい。例えば、反強磁性層、固定磁性層、非磁性層、フリー磁性層及び保護層の順に積層された積層構造を有する構成とすることもできる。かかる構成では、反強磁性層と固定磁性層との間で交換結合磁界（Ｈｅｘ）を生じさせて固定磁性層の磁化方向を固定することが可能である。また、下からフリー磁性層６３、非磁性材料層６２、固定磁性層６１、及び保護層６４の順に積層された積層構造とされてもよい。また固定磁性層６１は、第１磁性層６１ａと第２磁性層６１ｂとの磁化の大きさが同じで磁化方向が反平行である構成にできる。   Of course, the structure of the element unit 11 described above is an example, and another structure may be adopted for the element unit 11. For example, a configuration in which an antiferromagnetic layer, a pinned magnetic layer, a nonmagnetic layer, a free magnetic layer, and a protective layer are stacked in this order may be employed. In such a configuration, it is possible to fix the magnetization direction of the pinned magnetic layer by generating an exchange coupling magnetic field (Hex) between the antiferromagnetic layer and the pinned magnetic layer. Alternatively, a laminated structure in which the free magnetic layer 63, the nonmagnetic material layer 62, the pinned magnetic layer 61, and the protective layer 64 are laminated in that order from the bottom may be employed. The pinned magnetic layer 61 can be configured such that the first magnetic layer 61a and the second magnetic layer 61b have the same magnetization magnitude and the magnetization directions are antiparallel.

各素子部１１を構成する第２磁性層６１ｂの固定磁化方向（Ｐ；感度軸方向）はＹ２方向（即ち、素子部１１の幅方向）である（図２、図３参照）。この固定磁化方向（Ｐ）が固定磁性層６１の固定磁化方向である。   The fixed magnetization direction (P; sensitivity axis direction) of the second magnetic layer 61b constituting each element unit 11 is the Y2 direction (that is, the width direction of the element unit 11) (see FIGS. 2 and 3). This fixed magnetization direction (P) is the fixed magnetization direction of the fixed magnetic layer 61.

複数の電極部１６は、図２に示すように、一部が各素子部１１に接してＸ１−Ｘ２方向に間隔Ｔ１を空けて配置されている。   As shown in FIG. 2, the plurality of electrode portions 16 are partly in contact with each element portion 11 and are arranged at an interval T1 in the X1-X2 direction.

図３に示すように、上記一部の電極部１６の形成位置では、保護層６４の一部が削られており、それにより形成された凹み部６４ａ上に上記一部の電極部１６が形成されている。   As shown in FIG. 3, in the formation position of the said part electrode part 16, a part of protective layer 64 is shaved and the said part electrode part 16 is formed on the recessed part 64a formed by it. Has been.

電極部１６は、素子部１１（保護層６４）よりも電気抵抗値の低い非磁性導電材料で形成されている。電極部１６は、材質を特に限定するものでないが、Ａｌ、Ｃｕ、Ｔｉ、Ｃｒ等の非磁性導電材料の単層あるいは積層構造で形成される。例えば、電極部１６はＣｕとＡｌとの積層構造で形成される。なお、上述した複数の接続部１７も、電極部１６と同様に形成される。   The electrode portion 16 is formed of a nonmagnetic conductive material having an electric resistance value lower than that of the element portion 11 (protective layer 64). Although the electrode part 16 does not specifically limit a material, it is formed by the single | mono layer or laminated structure of nonmagnetic electrically conductive materials, such as Al, Cu, Ti, Cr. For example, the electrode part 16 is formed with a laminated structure of Cu and Al. The plurality of connection portions 17 described above are also formed in the same manner as the electrode portion 16.

図２に示すように、各電極部１６の幅寸法（Ｙ１−Ｙ２への寸法）は各素子部１１の幅寸法よりも大きく形成されており、これにより電極部１６の電気抵抗をより小さくでき、また各電極部１６を各素子部１１上に形成する際の位置合わせのマージンを広くとることが可能である。   As shown in FIG. 2, the width dimension of each electrode part 16 (dimension to Y1-Y2) is formed larger than the width dimension of each element part 11, and thereby the electrical resistance of the electrode part 16 can be further reduced. In addition, it is possible to widen the alignment margin when the electrode portions 16 are formed on the element portions 11.

なお上記したような保護層６４の一部の削り取り処理は、例えばエッチングにて行うことができる。保護層６４の一部を削り取る処理は、特に保護層６４表面の酸化層を削り取るためのものであり、これにより素子部１１と電極部１６間の導通性を良好にできる。   Note that the part of the protective layer 64 as described above can be removed by etching, for example. The process of scraping off a part of the protective layer 64 is particularly for scraping off the oxide layer on the surface of the protective layer 64, whereby the conductivity between the element part 11 and the electrode part 16 can be improved.

またエッチング等により保護層６４の表面を削る際、図３に示すように保護層６４の一部が残るように制御することが好ましい。これによりフリー磁性層６３はエッチングの影響を受けず削られない。   Further, when the surface of the protective layer 64 is etched by etching or the like, it is preferable to control so that a part of the protective layer 64 remains as shown in FIG. As a result, the free magnetic layer 63 is not affected by the etching and is not removed.

磁気検知体１０は、平面視で素子部１１と素子部１１に重ねられた電極部１６とがＸ１−Ｘ２方向に交互に並ぶ。即ち、磁気検知体１０は、素子部１１における電極部１６が重ねられていない部分と電極部１６が重ねられた部分とが交互に並んでいる。磁気検知体１０では、素子部１１における電極部１６が重ねられていない部分（後述するギャップＧの箇所）が磁気検知部分Ｄとして機能する。詳細については後述する。   In the magnetic detection body 10, the element portions 11 and the electrode portions 16 superimposed on the element portions 11 are alternately arranged in the X1-X2 direction in a plan view. In other words, in the magnetic detector 10, the portions of the element portion 11 where the electrode portions 16 are not overlapped and the portions where the electrode portions 16 are overlapped are alternately arranged. In the magnetic detector 10, a portion where the electrode portion 16 in the element portion 11 is not overlapped (a portion of a gap G described later) functions as the magnetic detection portion D. Details will be described later.

複数の軟磁性体１２は、図２に示すように、素子部１１（即ち、磁気検知体１０）に沿ってＸ１−Ｘ２方向に並べて配置されている。各軟磁性体１２はＮｉＦｅ、ＣｏＦｅ、ＣｏＦｅＳｉＢやＣｏＺｒＮｂ等で形成される。   As shown in FIG. 2, the plurality of soft magnetic bodies 12 are arranged side by side in the X1-X2 direction along the element portion 11 (that is, the magnetic detection body 10). Each soft magnetic body 12 is made of NiFe, CoFe, CoFeSiB, CoZrNb, or the like.

図２においてＸ１−Ｘ２方向にて隣り合う２つの軟磁性体１２のうち、Ｘ１側に配置された軟磁性体１２を第１の軟磁性体１２Ａ、Ｘ２側に配置された軟磁性体１２を第２の軟磁性体１２Ｂと定義する。図２には、一組の軟磁性体１２にのみ符号１２Ａ，１２Ｂを付した。なお、軟磁性体１２Ｂの一つ右隣の軟磁性体１２及び二つ右隣の軟磁性体１２に着目してこれら隣り合う２つの軟磁性体１２をペアと考えれば、これらうちの左側が軟磁性体１２Ａとなり、右側が軟磁性体１２Ｂとなる。Ｘ１−Ｘ２方向に間隔をあけて並べられた複数の軟磁性体１２は、最もＸ１側から２つずつペアとなってそれぞれが軟磁性体１２Ａ、軟磁性体１２Ｂとなるように設けられている。   Of the two soft magnetic bodies 12 adjacent in the X1-X2 direction in FIG. 2, the soft magnetic body 12 disposed on the X1 side is the first soft magnetic body 12A, and the soft magnetic body 12 disposed on the X2 side is the same. It is defined as the second soft magnetic body 12B. In FIG. 2, reference numerals 12 </ b> A and 12 </ b> B are attached to only one set of soft magnetic bodies 12. If the two soft magnetic bodies 12 adjacent to each other are considered as a pair by focusing on the soft magnetic body 12 on the right side and the soft magnetic body 12 on the right side of the soft magnetic body 12B, the left side of them is The soft magnetic body 12A is formed, and the right side is the soft magnetic body 12B. The plurality of soft magnetic bodies 12 arranged at intervals in the X1-X2 direction are provided so that two pairs from the X1 side are the most, and each becomes a soft magnetic body 12A and a soft magnetic body 12B. .

第１の軟磁性体１２Ａは、磁気検知体１０と交差してＹ１−Ｙ２方向に延在する交差部分１２ａと、交差部分１２ａのＹ２側端部（即ち、磁気検知体１０の幅方向の一端部）からＸ１方向に延出し、平面視にて素子部１１のＹ２側に配置される第１磁界渡し部分１２ｂと、交差部分１２ａのＹ１側端部（即ち、磁気検知体１０の幅方向の他端部）からＸ２方向に延出し、平面視にて素子部１１のＹ１側に配置される第２磁界渡し部分１２ｃと、を有して構成される。第１の軟磁性体１２Ａは、平面視で、クランク形状に屈曲された帯状に形成されている。   The first soft magnetic body 12A includes a crossing portion 12a that crosses the magnetic detector 10 and extends in the Y1-Y2 direction, and a Y2 side end portion of the crossing portion 12a (that is, one end in the width direction of the magnetic detector 10). Portion) extending in the X1 direction and arranged on the Y2 side of the element portion 11 in plan view, and the Y1 side end of the intersecting portion 12a (that is, in the width direction of the magnetic detector 10). A second magnetic field transfer portion 12c extending in the X2 direction from the other end portion and disposed on the Y1 side of the element portion 11 in plan view. The first soft magnetic body 12A is formed in a band shape bent in a crank shape in plan view.

第２の軟磁性体１２Ｂは、磁気検知体１０と交差してＹ１−Ｙ２方向に延在する交差部分１２ｄと、交差部分１２ｄのＹ２側端部（即ち、磁気検知体１０の幅方向の一端部）からＸ１方向に延出し、平面視にて素子部１１のＹ２側に配置される第１磁界渡し部分１２ｅと、交差部分１２ｄのＹ１側端部（即ち、磁気検知体１０の幅方向の他端部）からＸ２方向に延出し、平面視にて素子部１１のＹ１側に配置される第２磁界渡し部分１２ｆと、を有して構成される。第２の軟磁性体１２Ｂは、平面視で、クランク形状に屈曲された帯状に形成されている。   The second soft magnetic body 12B includes a crossing portion 12d that crosses the magnetic detector 10 and extends in the Y1-Y2 direction, and a Y2 side end of the crossing portion 12d (that is, one end in the width direction of the magnetic detector 10). Portion) extending in the X1 direction and arranged on the Y2 side of the element portion 11 in plan view, and the Y1 side end of the intersecting portion 12d (that is, in the width direction of the magnetic detector 10). A second magnetic field transfer portion 12f that extends in the X2 direction from the other end portion and is disposed on the Y1 side of the element portion 11 in plan view. The second soft magnetic body 12B is formed in a band shape bent in a crank shape in plan view.

第１の軟磁性体１２Ａの交差部分１２ａ及び第２の軟磁性体１２Ｂの交差部分１２ｄは、各電極部１６とＺ方向に離間して（図３）電極部１６と平面視で交差する（図２）ように配置される。交差部分１２ａ、１２ｄと電極部１６との間には絶縁層２５が介在し、交差部分１２ａ、１２ｄと電極部１６とは電気的に非接触となっている。   The intersecting portion 12a of the first soft magnetic body 12A and the intersecting portion 12d of the second soft magnetic body 12B are separated from each electrode portion 16 in the Z direction (FIG. 3) and intersect the electrode portion 16 in plan view ( 2). An insulating layer 25 is interposed between the intersecting portions 12a and 12d and the electrode portion 16, and the intersecting portions 12a and 12d and the electrode portion 16 are not in electrical contact with each other.

第１の軟磁性体１２Ａは、第２磁界渡し部分１２ｃのＸ１−Ｘ２方向の長さＬ１２ｃが第１磁界渡し部分１２ｂのＸ１−Ｘ２方向の長さＬ１２ｂより長くなるように形成されている。第２の軟磁性体１２Ｂは、第１磁界渡し部分１２ｅのＸ１−Ｘ２方向の長さＬ１２ｅが第２磁界渡し部分１２ｆのＸ１−Ｘ２方向の長さＬ１２ｆより長くなるように形成されている。   The first soft magnetic body 12A is formed such that the length L12c in the X1-X2 direction of the second magnetic field passing portion 12c is longer than the length L12b in the X1-X2 direction of the first magnetic field passing portion 12b. The second soft magnetic body 12B is formed such that the length L12e in the X1-X2 direction of the first magnetic field passing portion 12e is longer than the length L12f in the X1-X2 direction of the second magnetic field passing portion 12f.

本実施形態において、第１の軟磁性体１２Ａは、第１磁界渡し部分１２ｂの長さＬ１２ｂが４．５μｍとなり、第２磁界渡し部分１２ｃの長さＬ１２ｃが１０．４μｍとなるように形成され、交差部分１２ａ、第１磁界渡し部分１２ｂ及び第２磁界渡し部分１２ｃのいずれも幅が２．０μｍとなるように形成されている。また、第２の軟磁性体１２Ｂは、第１磁界渡し部分１２ｅの長さＬ１２ｅが１０．４μｍとなり、第２磁界渡し部分１２ｆの長さＬ１２ｆが４．５μｍとなるように形成され、交差部分１２ｄ、第１磁界渡し部分１２ｅ及び第２磁界渡し部分１２ｆのいずれも幅が２．０μｍとなるように形成されている。   In the present embodiment, the first soft magnetic body 12A is formed such that the length L12b of the first magnetic field passing portion 12b is 4.5 μm and the length L12c of the second magnetic field passing portion 12c is 10.4 μm. The crossing portion 12a, the first magnetic field passing portion 12b, and the second magnetic field passing portion 12c are all formed to have a width of 2.0 μm. The second soft magnetic body 12B is formed so that the length L12e of the first magnetic field passing portion 12e is 10.4 μm and the length L12f of the second magnetic field passing portion 12f is 4.5 μm, 12d, the first magnetic field transfer portion 12e, and the second magnetic field transfer portion 12f are all formed to have a width of 2.0 μm.

図２で符号を付した隣り合う２つの第１の軟磁性体１２Ａ及び第２の軟磁性体１２Ｂを代表として着目すると、第１の軟磁性体１２Ａが有する第２磁界渡し部分１２ｃの延在方向中央位置１２ｃｃを含む中央部分１２ｃ１と、第２の軟磁性体１２Ｂが有する第１磁界渡し部分１２ｅの延在方向中央位置１２ｅｃを含む中央部分１２ｅ１とが、Ｙ１−Ｙ２方向にギャップＧを介して対向している。   When attention is paid to the two first soft magnetic bodies 12A and 12B adjacent to each other with reference numerals in FIG. 2 as representative, the extension of the second magnetic field passing portion 12c of the first soft magnetic body 12A The central portion 12c1 including the direction central position 12cc and the central portion 12e1 including the extending direction central position 12ec of the first magnetic field passing portion 12e included in the second soft magnetic body 12B via the gap G in the Y1-Y2 direction. Facing each other.

図２に示すように、第１の軟磁性体１２Ａの第２磁界渡し部分１２ｃと、第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅとがギャップＧを介して対向する位置（中央部分１２ｃ１及び中央部分１２ｅ１の対向箇所）には電極部１６が配置されていない。即ち、平面視にて、電極部１６間の間隔Ｔ１の位置に、ギャップＧが位置している。このギャップＧの箇所に、磁気検知体１０の素子部１１における電極部１６が重ねられていない部分（即ち、磁気検知部分Ｄ）が配置される。   As shown in FIG. 2, the second magnetic field passing portion 12c of the first soft magnetic body 12A and the first magnetic field passing portion 12e of the second soft magnetic body 12B are opposed to each other with a gap G (center portion). 12c1 and the central part 12e1) are not provided with the electrode part 16. That is, the gap G is located at the position of the interval T1 between the electrode portions 16 in plan view. A portion where the electrode portion 16 of the element portion 11 of the magnetic detector 10 is not overlapped (that is, the magnetic detection portion D) is disposed at the gap G.

この磁気検知部分Ｄは、第１の軟磁性体１２Ａの第２磁界渡し部分１２ｃと第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅとに平面視でＹ１−Ｙ２方向に挟まれて配置されている。また、磁気検知部分Ｄは、第１の軟磁性体１２Ａの第２磁界渡し部分１２ｃの先端１２ｃ２に対しＸ１向きにＴａ（Ｔａ＞０）だけ間隔をあけて配置され、かつ、第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅの先端１２ｅ２に対してＸ２向きにＴｂ（Ｔｂ＞０）だけ間隔をあけて配置されている。   The magnetic detection portion D is disposed so as to be sandwiched between the second magnetic field passing portion 12c of the first soft magnetic body 12A and the first magnetic field passing portion 12e of the second soft magnetic body 12B in the Y1-Y2 direction in plan view. Has been. Further, the magnetic detection portion D is arranged at a distance of Ta (Ta> 0) in the X1 direction with respect to the tip 12c2 of the second magnetic field passing portion 12c of the first soft magnetic body 12A, and the second soft magnetic body 12A has a second softness. The magnetic body 12B is disposed at an interval of Tb (Tb> 0) in the X2 direction with respect to the tip 12e2 of the first magnetic field passing portion 12e.

本実施形態において、第１の軟磁性体１２Ａ及び第２の軟磁性体１２Ｂは、Ｔａ＝Ｔｂ＝３．４５μｍとなるように配置されている。   In the present embodiment, the first soft magnetic body 12A and the second soft magnetic body 12B are arranged so that Ta = Tb = 3.45 μm.

図２に示すように、外部磁界Ｈ１がＸ２方向に向けて作用したとき、外部磁界Ｈ１は、各軟磁性体１２内、及び軟磁性体１２Ａ，１２Ｂ間を通る矢印の磁路Ｍ１を進む。このとき、図４に示すように、素子部１１に対して第１の軟磁性体１２Ａの第２磁界渡し部分１２ｃから第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅとの間で、Ｙ２方向への外部磁界Ｈ２が漏れ、この外部磁界Ｈ２が素子部１１に作用する。即ち、第１の軟磁性体１２Ａの第２磁界渡し部分１２ｃと第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅとで一対の磁界渡し部分を構成する。   As shown in FIG. 2, when the external magnetic field H1 acts in the X2 direction, the external magnetic field H1 travels along the magnetic path M1 indicated by an arrow passing through each soft magnetic body 12 and between the soft magnetic bodies 12A and 12B. At this time, as shown in FIG. 4, between the second magnetic field passing portion 12c of the first soft magnetic body 12A and the first magnetic field passing portion 12e of the second soft magnetic body 12B with respect to the element portion 11, The external magnetic field H2 in the Y2 direction leaks, and this external magnetic field H2 acts on the element portion 11. That is, the second magnetic field passing portion 12c of the first soft magnetic body 12A and the first magnetic field passing portion 12e of the second soft magnetic body 12B constitute a pair of magnetic field passing portions.

このように第１の磁気抵抗効果素子１及び第４の磁気抵抗効果素子４では、Ｘ２方向の外部磁界Ｈ１が軟磁性体１２により進行方向がＹ２方向に変換されて素子部１１に作用する。   As described above, in the first magnetoresistive effect element 1 and the fourth magnetoresistive effect element 4, the external magnetic field H <b> 1 in the X2 direction is converted into the Y2 direction by the soft magnetic body 12 and acts on the element portion 11.

素子部１１では、電極部１６が重ねられた部分において素子部１１よりも優先的に電極部１６に電流が流れ、この部分では素子部１１としての感度をもたない。これにより、素子部１１における電極部１６が重ねられてない部分である磁気検知部分Ｄのみ磁気抵抗効果素子として機能する。   In the element portion 11, current flows through the electrode portion 16 preferentially over the element portion 11 in the portion where the electrode portion 16 is overlapped, and this portion does not have sensitivity as the element portion 11. Thereby, only the magnetic detection part D which is the part which the electrode part 16 in the element part 11 is not piled up functions as a magnetoresistive effect element.

そして、各素子部１１の感度軸方向（Ｐ）は、Ｙ２方向である。またフリー磁性層６３の磁化方向は素子部１１の形状異方性によりＸ１−Ｘ２方向である。各素子部１１にＹ２方向の外部磁界Ｈ２が作用することでフリー磁性層６３の磁化方向はＹ２方向を向く。この結果、固定磁性層６１の磁化方向とフリー磁性層６３の磁化方向が同方向となり、磁気検知部分Ｄの電気抵抗値は小さくなる。   The sensitivity axis direction (P) of each element unit 11 is the Y2 direction. Further, the magnetization direction of the free magnetic layer 63 is the X1-X2 direction due to the shape anisotropy of the element portion 11. When the external magnetic field H2 in the Y2 direction acts on each element portion 11, the magnetization direction of the free magnetic layer 63 faces the Y2 direction. As a result, the magnetization direction of the pinned magnetic layer 61 and the magnetization direction of the free magnetic layer 63 become the same direction, and the electric resistance value of the magnetic detection portion D becomes small.

図５は、本実施形態における第２の磁気抵抗効果素子２及び第３の磁気抵抗効果素子３の部分拡大平面図である。   FIG. 5 is a partially enlarged plan view of the second magnetoresistive effect element 2 and the third magnetoresistive effect element 3 in the present embodiment.

図５に示す第２の磁気抵抗効果素子２は、図５に示すように、磁気検知体１０と、磁気検知体１０と非接触に配置された複数の磁路形成体としての軟磁性体１４と、を備えている。なお、第３の磁気抵抗効果素子３についても、図５に示す構成を有している。   As shown in FIG. 5, the second magnetoresistance effect element 2 shown in FIG. 5 includes a magnetic detection body 10 and a soft magnetic body 14 as a plurality of magnetic path forming bodies arranged in non-contact with the magnetic detection body 10. And. Note that the third magnetoresistive element 3 also has the configuration shown in FIG.

第２の磁気抵抗効果素子２は、図２に示す第１の磁気抵抗効果素子１において複数の軟磁性体１２に代えて、複数の軟磁性体１４を有する以外は同一の構成を有している。即ち、図５に示す第２の磁気抵抗効果素子２と図２に示す第１の磁気抵抗効果素子１との間で磁気検知体１０（素子部１１及び電極部１６）の構成に違いはない。   The second magnetoresistance effect element 2 has the same configuration except that the first magnetoresistance effect element 1 shown in FIG. 2 has a plurality of soft magnetic bodies 14 instead of the plurality of soft magnetic bodies 12. Yes. That is, there is no difference in the configuration of the magnetic detector 10 (element portion 11 and electrode portion 16) between the second magnetoresistive effect element 2 shown in FIG. 5 and the first magnetoresistive effect element 1 shown in FIG. .

複数の軟磁性体１４は、図５に示すように、素子部１１（即ち、磁気検知体１０）に沿ってＸ１−Ｘ２方向に並べて配置されている。各軟磁性体１４はＮｉＦｅ、ＣｏＦｅ、ＣｏＦｅＳｉＢやＣｏＺｒＮｂ等で形成される。   As shown in FIG. 5, the plurality of soft magnetic bodies 14 are arranged in the X1-X2 direction along the element portion 11 (that is, the magnetic detection body 10). Each soft magnetic body 14 is made of NiFe, CoFe, CoFeSiB, CoZrNb, or the like.

図５においてＸ１−Ｘ２方向にて隣り合う２つの軟磁性体１４のうち、Ｘ１側に配置された軟磁性体１４を第３の軟磁性体１４Ｃ、Ｘ２側に配置された軟磁性体１４を第４の軟磁性体１４Ｄと定義する。図５には、一組の軟磁性体１４にのみ符号１４Ｃ、１４Ｄを付した。なお、軟磁性体１４Ｄの一つ右隣の軟磁性体１４及び二つ右隣の軟磁性体１４に着目してこれら隣り合う２つの軟磁性体１４をペアと考えれば、これらうちの左側が軟磁性体１４Ｃとなり、右側が軟磁性体１４Ｄとなる。Ｘ１−Ｘ２方向に間隔をあけて並べられた複数の軟磁性体１４は、最もＸ１側から２つずつペアとなってそれぞれが軟磁性体１４Ｃ、軟磁性体１４Ｄとなるように設けられている。   Of the two soft magnetic bodies 14 adjacent in the X1-X2 direction in FIG. 5, the soft magnetic body 14 disposed on the X1 side is the third soft magnetic body 14C, and the soft magnetic body 14 disposed on the X2 side is It is defined as a fourth soft magnetic body 14D. In FIG. 5, reference numerals 14 </ b> C and 14 </ b> D are attached to only one set of soft magnetic bodies 14. If the two soft magnetic bodies 14 adjacent to each other are considered as a pair by focusing on the soft magnetic body 14 adjacent to the right and the soft magnetic bodies 14 adjacent to the right of the soft magnetic body 14D, the left side of these is The soft magnetic body 14C is formed, and the right side is the soft magnetic body 14D. The plurality of soft magnetic bodies 14 arranged at intervals in the X1-X2 direction are provided so that two pairs from the X1 side are the most, and each becomes a soft magnetic body 14C and a soft magnetic body 14D. .

第３の軟磁性体１４Ｃは、磁気検知体１０と交差してＹ１−Ｙ２方向に延在する交差部分１４ａと、交差部分１４ａのＹ１側端部（即ち、磁気検知体１０の幅方向の一端部）からＸ１方向に延出し、平面視にて素子部１１のＹ１側に配置される第１磁界渡し部分１４ｂと、交差部分１４ａのＹ２側端部（即ち、磁気検知体１０の幅方向の他端部）からＸ２方向に延出し平面視にて素子部１１のＹ２側に配置される第２磁界渡し部分１４ｃと、を有して構成される。第３の軟磁性体１４Ｃは、平面視で、クランク形状に屈曲された帯状に形成されている。   The third soft magnetic body 14C includes a crossing portion 14a that crosses the magnetic detection body 10 and extends in the Y1-Y2 direction, and a Y1 side end of the crossing portion 14a (that is, one end in the width direction of the magnetic detection body 10). Portion) extending in the X1 direction and arranged on the Y1 side of the element portion 11 in plan view, and the Y2 side end of the intersecting portion 14a (that is, in the width direction of the magnetic detector 10). A second magnetic field transfer portion 14c extending in the X2 direction from the other end portion and disposed on the Y2 side of the element portion 11 in plan view. The third soft magnetic body 14C is formed in a band shape bent in a crank shape in plan view.

第４の軟磁性体１４Ｄは、磁気検知体１０と交差してＹ１−Ｙ２方向に延在する交差部分１４ｄと、交差部分１４ｄのＹ１側端部（即ち、磁気検知体１０の幅方向の一端部）からＸ１方向に延出し、平面視にて素子部１１のＹ１側に配置される第１磁界渡し部分１４ｅと、交差部分１４ｄのＹ２側端部（即ち、磁気検知体１０の幅方向の他端部）からＸ２方向に延出し平面視にて素子部１１のＹ２側に配置される第２磁界渡し部分１４ｆと、を有して構成される。第４の軟磁性体１４Ｄは、平面視で、クランク形状に屈曲された帯状に形成されている。   The fourth soft magnetic body 14D includes a crossing portion 14d that crosses the magnetic detector 10 and extends in the Y1-Y2 direction, and a Y1 side end portion of the crossing portion 14d (that is, one end in the width direction of the magnetic detector 10). Portion) extending in the X1 direction and arranged on the Y1 side of the element portion 11 in plan view, and the Y2 side end of the intersecting portion 14d (that is, in the width direction of the magnetic detector 10). A second magnetic field transfer portion 14f extending in the X2 direction from the other end portion and disposed on the Y2 side of the element portion 11 in plan view. The fourth soft magnetic body 14D is formed in a band shape bent in a crank shape in plan view.

本実施形態において、図５に示す複数の軟磁性体１４（第３の軟磁性体１４Ｃ、第４の軟磁性体１４Ｄ）は、それぞれに対応する軟磁性体１２（図２の第１の軟磁性体１２Ａ、第２の軟磁性体１２Ｂ）を上下方向（Ｙ１−Ｙ２方向）に反転させた形状と同一である。   In the present embodiment, the plurality of soft magnetic bodies 14 (third soft magnetic body 14C and fourth soft magnetic body 14D) shown in FIG. 5 correspond to the corresponding soft magnetic bodies 12 (first soft magnetic bodies 14 in FIG. 2). The shape is the same as that obtained by inverting the magnetic body 12A and the second soft magnetic body 12B in the vertical direction (Y1-Y2 direction).

第３の軟磁性体１４Ｃの交差部分１４ａ及び第４の軟磁性体１４Ｄの交差部分１４ｄは、各電極部１６とＺ方向に離間して電極部１６と平面視で交差するように配置される。交差部分１４ａ、１４ｄと電極部１６との間には絶縁層２５が介在し、交差部分１４ａ、１４ｄと電極部１６とは電気的に非接触となっている。   The intersecting portion 14a of the third soft magnetic body 14C and the intersecting portion 14d of the fourth soft magnetic body 14D are arranged so as to intersect with the electrode portions 16 in a plan view while being spaced apart from each electrode portion 16 in the Z direction. . An insulating layer 25 is interposed between the intersecting portions 14a and 14d and the electrode portion 16, and the intersecting portions 14a and 14d and the electrode portion 16 are not in electrical contact with each other.

第３の軟磁性体１４Ｃは、第２磁界渡し部分１４ｃのＸ１−Ｘ２方向の長さＬ１４ｃが第１磁界渡し部分１４ｂのＸ１−Ｘ２方向の長さＬ１４ｂより長くなるように形成されている。第４の軟磁性体１４Ｄは、第１磁界渡し部分１４ｅのＸ１−Ｘ２方向の長さＬ１４ｅが第２磁界渡し部分１４ｆのＸ１−Ｘ２方向の長さＬ１４ｆより長くなるように形成されている。   The third soft magnetic body 14C is formed such that the length L14c in the X1-X2 direction of the second magnetic field passing portion 14c is longer than the length L14b in the X1-X2 direction of the first magnetic field passing portion 14b. The fourth soft magnetic body 14D is formed such that the length L14e in the X1-X2 direction of the first magnetic field passing portion 14e is longer than the length L14f in the X1-X2 direction of the second magnetic field passing portion 14f.

本実施形態において、第３の軟磁性体１４Ｃは、第１磁界渡し部分１４ｂの長さＬ１４ｂが４．５μｍとなり、第２磁界渡し部分１４ｃの長さＬ１４ｃが１０．４μｍとなるように形成され、交差部分１４ａ、第１磁界渡し部分１４ｂ及び第２磁界渡し部分１４ｃのいずれも幅が２．０μｍとなるように形成されている。また、第４の軟磁性体１４Ｄは、第１磁界渡し部分１４ｅの長さＬ１４ｅが１０．４μｍとなり、第２磁界渡し部分１４ｆの長さＬ１４ｆが４．５μｍとなるように形成され、交差部分１４ｄ、第１磁界渡し部分１４ｅ及び第２磁界渡し部分１４ｆのいずれも幅が２．０μｍとなるように形成されている。   In the present embodiment, the third soft magnetic body 14C is formed so that the length L14b of the first magnetic field passing portion 14b is 4.5 μm and the length L14c of the second magnetic field passing portion 14c is 10.4 μm. The crossing portion 14a, the first magnetic field passing portion 14b, and the second magnetic field passing portion 14c are all formed to have a width of 2.0 μm. The fourth soft magnetic body 14D is formed such that the length L14e of the first magnetic field passing portion 14e is 10.4 μm and the length L14f of the second magnetic field passing portion 14f is 4.5 μm, and the intersection portion 14d, the first magnetic field transfer portion 14e, and the second magnetic field transfer portion 14f are all formed to have a width of 2.0 μm.

図５で符号を付した隣り合う２つの第３の軟磁性体１４Ｃと第４の軟磁性体１４Ｄを代表として着目すると、第３の軟磁性体１４Ｃが有する第２磁界渡し部分１４ｃの延在方向中央位置１４ｃｃを含む中央部分１４ｃ１と、第４の軟磁性体１４Ｄが有する第１磁界渡し部分１４ｅの延在方向中央位置１４ｅｃを含む中央部分１４ｅ１とが、Ｙ１−Ｙ２方向にギャップＧを介して対向している。   When the two third soft magnetic bodies 14C and 14D adjacent to each other with reference numerals in FIG. 5 are taken as representatives, the extension of the second magnetic field passing portion 14c of the third soft magnetic body 14C is considered. The central portion 14c1 including the direction central position 14cc and the central portion 14e1 including the extending direction central position 14ec of the first magnetic field passing portion 14e included in the fourth soft magnetic body 14D via the gap G in the Y1-Y2 direction. Facing each other.

図５に示すように、第３の軟磁性体１４Ｃの第２磁界渡し部分１４ｃと、第４の軟磁性体１４Ｄの第１磁界渡し部分１４ｅとがギャップＧを介して対向する位置（中央部分１４ｃ１及び中央部分１４ｅ１の対向箇所）には電極部１６が配置されていない。即ち、平面視にて、電極部１６間の間隔Ｔ１の位置に、前記ギャップＧが位置している。このギャップＧの箇所に、磁気検知体１０の素子部１１における電極部１６が重ねられていない部分（即ち、磁気検知部分Ｄ）が配置される。   As shown in FIG. 5, the second magnetic field passing portion 14c of the third soft magnetic body 14C and the first magnetic field passing portion 14e of the fourth soft magnetic body 14D are opposed to each other through the gap G (center portion). 14c1 and the central portion 14e1) are not provided with the electrode portion 16. That is, the gap G is located at the position of the interval T1 between the electrode portions 16 in plan view. A portion where the electrode portion 16 of the element portion 11 of the magnetic detector 10 is not overlapped (that is, the magnetic detection portion D) is disposed at the gap G.

この磁気検知部分Ｄは、第３の軟磁性体１４Ｃの第２磁界渡し部分１４ｃと第４の軟磁性体１４Ｄの第１磁界渡し部分１４ｅとに平面視でＹ１−Ｙ２方向に挟まれて配置されている。また、磁気検知部分Ｄは、第３の軟磁性体１４Ｃの第２磁界渡し部分１４ｃの先端１４ｃ２に対してＸ１向きにＴｃ（Ｔｃ＞０）だけ間隔をあけて配置され、かつ、第４の軟磁性体１４Ｄの第１磁界渡し部分１４ｅの先端１４ｅ２に対してＸ２向きにＴｄ（Ｔｄ＞０）だけ間隔をあけて配置されている。   This magnetic detection portion D is disposed between the second magnetic field passing portion 14c of the third soft magnetic body 14C and the first magnetic field passing portion 14e of the fourth soft magnetic body 14D in the Y1-Y2 direction in plan view. Has been. The magnetic detection portion D is disposed at an interval of Tc (Tc> 0) in the X1 direction with respect to the tip 14c2 of the second magnetic field passing portion 14c of the third soft magnetic body 14C, and the fourth The soft magnetic body 14D is disposed at an interval of Td (Td> 0) in the X2 direction with respect to the tip 14e2 of the first magnetic field passing portion 14e.

本実施形態において、第３の軟磁性体１４Ｃ及び第４の軟磁性体１４Ｄは、Ｔｃ＝Ｔｄ＝３．４５μｍとなるように配置されている。   In the present embodiment, the third soft magnetic body 14C and the fourth soft magnetic body 14D are arranged so that Tc = Td = 3.45 μm.

図５に示すように、外部磁界Ｈ１がＸ２方向に向けて作用したとき、外部磁界Ｈ１は、各軟磁性体１４内、及び軟磁性体１４Ｃ，１４Ｄ間を通る矢印の磁路Ｍ２を進む。このとき、素子部１１に対して第３の軟磁性体１４Ｃの第２磁界渡し部分１４ｃから第４の軟磁性体１４Ｄの第１磁界渡し部分１４ｅとの間で、Ｙ１方向への外部磁界Ｈ３が漏れ、この外部磁界Ｈ３が素子部１１に作用する。即ち、第３の軟磁性体１４Ｃの第２磁界渡し部分１４ｃと第４の軟磁性体１４Ｄの第１磁界渡し部分１４ｅとで一対の磁界渡し部分を構成する。   As shown in FIG. 5, when the external magnetic field H1 acts in the X2 direction, the external magnetic field H1 travels along the magnetic path M2 indicated by an arrow passing through each soft magnetic body 14 and between the soft magnetic bodies 14C and 14D. At this time, the external magnetic field H3 in the Y1 direction between the second magnetic field passing portion 14c of the third soft magnetic body 14C and the first magnetic field passing portion 14e of the fourth soft magnetic body 14D with respect to the element portion 11 is obtained. Leaks, and this external magnetic field H3 acts on the element portion 11. That is, the second magnetic field passing portion 14c of the third soft magnetic body 14C and the first magnetic field passing portion 14e of the fourth soft magnetic body 14D constitute a pair of magnetic field passing portions.

このように第２の磁気抵抗効果素子２及び第３の磁気抵抗効果素子３では、Ｘ２方向の外部磁界Ｈ１が軟磁性体１４により進行方向がＹ１方向に変換されて素子部１１に作用する。   As described above, in the second magnetoresistive effect element 2 and the third magnetoresistive effect element 3, the external magnetic field H1 in the X2 direction is converted into the Y1 direction by the soft magnetic body 14 and acts on the element portion 11.

素子部１１では、電極部１６が重ねられた部分において素子部１１よりも優先的に電極部１６に電流が流れ、この部分では素子部１１としての感度をもたない。これにより、素子部１１における電極部１６が重ねられてない部分である磁気検知部分Ｄのみ磁気抵抗効果素子として機能する。   In the element portion 11, current flows through the electrode portion 16 preferentially over the element portion 11 in the portion where the electrode portion 16 is overlapped, and this portion does not have sensitivity as the element portion 11. Thereby, only the magnetic detection part D which is the part in which the electrode part 16 in the element part 11 is not piled up functions as a magnetoresistive effect element.

そして、各素子部１１の感度軸方向（Ｐ）は、Ｙ２方向である。またフリー磁性層６３の磁化方向は素子部１１の形状異方性によりＸ１−Ｘ２方向である。そして、各素子部１１にＹ１方向の外部磁界Ｈ３が作用することでフリー磁性層６３の磁化方向はＹ１方向を向く。この結果、固定磁性層６１の磁化方向とフリー磁性層６３の磁化方向が反対方向となり、磁気検知部分Ｄの電気抵抗値は大きくなる。   The sensitivity axis direction (P) of each element unit 11 is the Y2 direction. Further, the magnetization direction of the free magnetic layer 63 is the X1-X2 direction due to the shape anisotropy of the element portion 11. Then, the external magnetic field H3 in the Y1 direction acts on each element unit 11, so that the magnetization direction of the free magnetic layer 63 faces the Y1 direction. As a result, the magnetization direction of the pinned magnetic layer 61 and the magnetization direction of the free magnetic layer 63 are opposite to each other, and the electric resistance value of the magnetic detection portion D increases.

このように、磁気センサＳにＸ２方向の外部磁界Ｈ１が作用すると、第１の磁気抵抗効果素子１及び第４の磁気抵抗効果素子４の電気抵抗値が小さくなり、第２の磁気抵抗効果素子２及び第３の磁気抵抗効果素子３の電気抵抗値は大きくなり、図１に示すブリッジ回路により差動出力を得ることができる。   Thus, when the external magnetic field H1 in the X2 direction acts on the magnetic sensor S, the electrical resistance values of the first magnetoresistive effect element 1 and the fourth magnetoresistive effect element 4 become small, and the second magnetoresistive effect element. The electrical resistance values of the second and third magnetoresistive elements 3 are increased, and a differential output can be obtained by the bridge circuit shown in FIG.

ここで比較例の磁気センサついて説明する。図６、図７は、比較例の磁気センサである。図６には第１の磁気抵抗効果素子及び第４の磁気抵抗効果素子を示す。図７には第２の磁気抵抗効果素子及び第３の磁気抵抗効果素子を示す。図６、図７に示す磁気検知体１０の構造は図２、図３と同じである。   Here, a magnetic sensor of a comparative example will be described. 6 and 7 show a magnetic sensor of a comparative example. FIG. 6 shows a first magnetoresistive element and a fourth magnetoresistive element. FIG. 7 shows a second magnetoresistive element and a third magnetoresistive element. The structure of the magnetic detector 10 shown in FIGS. 6 and 7 is the same as that shown in FIGS.

比較例の磁気センサが有する複数の軟磁性体７２、７４は、上述した実施形態の複数の軟磁性体１２、１４と同様の構成を有している。   The plurality of soft magnetic bodies 72 and 74 included in the magnetic sensor of the comparative example have the same configuration as the plurality of soft magnetic bodies 12 and 14 of the above-described embodiment.

即ち、複数の軟磁性体７２は、図６に示すように、素子部１１（即ち、磁気検知体１０）に沿ってＸ１−Ｘ２方向に並べて配置されている。各軟磁性体７２はＮｉＦｅ、ＣｏＦｅ、ＣｏＦｅＳｉＢやＣｏＺｒＮｂ等で形成される。複数の軟磁性体７４についても同様である。   That is, as shown in FIG. 6, the plurality of soft magnetic bodies 72 are arranged in the X1-X2 direction along the element portion 11 (that is, the magnetic detection body 10). Each soft magnetic body 72 is formed of NiFe, CoFe, CoFeSiB, CoZrNb, or the like. The same applies to the plurality of soft magnetic bodies 74.

図６においてＸ１−Ｘ２方向にて隣り合う２つの軟磁性体７２のうち、Ｘ１側に配置された軟磁性体７２を第１の軟磁性体７２Ａ、Ｘ２側に配置された軟磁性体７２を第２の軟磁性体７２Ｂと定義する。図６には、一組の軟磁性体７２にのみ符号７２Ａ，７２Ｂを付した。なお、軟磁性体７２Ｂの一つ右隣の軟磁性体７２及び二つ右隣の軟磁性体７２に着目してこれら隣り合う２つの軟磁性体７２をペアと考えれば、これらうちの左側が軟磁性体７２Ａとなり、右側が軟磁性体７２Ｂとなる。Ｘ１−Ｘ２方向に間隔をあけて並べられた複数の軟磁性体７２は、最もＸ１側から２つずつペアとなってそれぞれが軟磁性体７２Ａ、軟磁性体７２Ｂとなるように設けられている。   In FIG. 6, among the two soft magnetic bodies 72 adjacent in the X1-X2 direction, the soft magnetic body 72 arranged on the X1 side is changed to the first soft magnetic body 72A, and the soft magnetic body 72 arranged on the X2 side is changed. It is defined as the second soft magnetic body 72B. In FIG. 6, reference numerals 72 </ b> A and 72 </ b> B are attached to only one set of soft magnetic bodies 72. If the two soft magnetic bodies 72 adjacent to each other are considered as a pair by paying attention to the soft magnetic body 72 adjacent to the right and the two soft magnetic bodies 72 adjacent to the right of the soft magnetic body 72B, the left side of them is The soft magnetic body 72A is formed, and the right side is the soft magnetic body 72B. The plurality of soft magnetic bodies 72 arranged at intervals in the X1-X2 direction are provided so that two pairs from the X1 side are the most, and each becomes a soft magnetic body 72A and a soft magnetic body 72B. .

第１の軟磁性体７２Ａは、磁気検知体１０と交差してＹ１−Ｙ２方向に延在する交差部分７２ａと、交差部分７２ａのＹ２側端部（即ち、磁気検知体１０の幅方向の一端部）からＸ１方向に延出し、平面視にて素子部１１のＹ２側に配置される第１磁界渡し部分７２ｂと、交差部分７２ａのＹ１側端部（即ち、磁気検知体１０の幅方向の他端部）からＸ２方向に延出し、平面視にて素子部１１のＹ１側に配置される第２磁界渡し部分７２ｃと、を有して構成される。第１の軟磁性体７２Ａは、平面視で、クランク形状に屈曲された帯状に形成されている。   The first soft magnetic body 72A includes a crossing portion 72a that crosses the magnetic detector 10 and extends in the Y1-Y2 direction, and a Y2 side end of the crossing portion 72a (that is, one end in the width direction of the magnetic detector 10). Portion) extending in the X1 direction and arranged on the Y2 side of the element portion 11 in plan view, and the Y1 side end of the intersecting portion 72a (that is, in the width direction of the magnetic detector 10). A second magnetic field transfer portion 72c extending in the X2 direction from the other end portion and disposed on the Y1 side of the element portion 11 in plan view. The first soft magnetic body 72A is formed in a band shape bent in a crank shape in plan view.

第２の軟磁性体７２Ｂは、磁気検知体１０と交差してＹ１−Ｙ２方向に延在する交差部分７２ｄと、交差部分７２ｄのＹ２側端部（即ち、磁気検知体１０の幅方向の一端部）からＸ１方向に延出し、平面視にて素子部１１のＹ２側に配置される第１磁界渡し部分７２ｅと、交差部分１２ｄのＹ１側端部（即ち、磁気検知体１０の幅方向の他端部）からＸ２方向に延出し、平面視にて素子部１１のＹ１側に配置される第２磁界渡し部分７２ｆと、を有して構成される。第２の軟磁性体７２Ｂは、平面視で、クランク形状に屈曲された帯状に形成されている。   The second soft magnetic body 72B crosses the magnetic detector 10 and extends in the Y1-Y2 direction, and the Y2 side end of the cross portion 72d (that is, one end in the width direction of the magnetic detector 10). Portion) extending in the X1 direction and arranged on the Y2 side of the element portion 11 in plan view, and the Y1 side end of the intersecting portion 12d (that is, in the width direction of the magnetic detector 10). A second magnetic field transfer portion 72f that extends in the X2 direction from the other end portion and is disposed on the Y1 side of the element portion 11 in plan view. The second soft magnetic body 72B is formed in a band shape bent in a crank shape in plan view.

図７に示す複数の軟磁性体７４（第３の軟磁性体７４Ｃ、第４の軟磁性体７４Ｄ）は、それぞれに対応する軟磁性体７２（図６の第１の軟磁性体７２Ａ、第２の軟磁性体７２Ｂ）を上下方向（Ｙ１−Ｙ２方向）に反転させた形状と同一であるので、説明を省略する。   A plurality of soft magnetic bodies 74 (third soft magnetic body 74C, fourth soft magnetic body 74D) shown in FIG. 7 correspond to soft magnetic bodies 72 (first soft magnetic body 72A, first soft magnetic body 72A in FIG. 2 is the same as the shape obtained by inverting the soft magnetic body 72B) in the vertical direction (Y1-Y2 direction), and the description thereof will be omitted.

図６の比較例の第１の磁気抵抗効果素子及び第４の磁気抵抗効果素子において図２に示す本実施形態の第１の磁気抵抗効果素子及び第４の磁気抵抗効果素子と異なる点は、磁気検知体１０の磁気検知部分Ｄ（素子部１１における電極部１６が重ねられてない部分）と、第１の軟磁性体７２Ａの第２磁界渡し部分７２ｃ及び第２の軟磁性体７２Ｂの第１磁界渡し部分７２ｅとの位置関係である。   The first magnetoresistive effect element and the fourth magnetoresistive effect element of the comparative example of FIG. 6 are different from the first magnetoresistive effect element and the fourth magnetoresistive effect element of the present embodiment shown in FIG. The magnetic detection portion D of the magnetic detection body 10 (the portion where the electrode portion 16 of the element portion 11 is not overlapped), the second magnetic field transfer portion 72c of the first soft magnetic body 72A, and the second of the second soft magnetic body 72B. This is the positional relationship with the one magnetic field passing portion 72e.

具体的には、図２に示す本実施形態では、磁気検知部分Ｄが、第１の軟磁性体１２Ａの第２磁界渡し部分７２ｃと第２の軟磁性体１２Ｂの第１磁界渡し部分７２ｅとの間に挟まれて配置されるとともに、磁気検知部分Ｄが、第１の軟磁性体１２Ａの第２磁界渡し部分１２ｃの先端１２ｃ２に対してＸ１向きに間隔Ｔａをあけて配置されかつ第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅの先端１２ｅ２に対してＸ２向きに間隔Ｔｂをあけて配置されている。   Specifically, in the present embodiment shown in FIG. 2, the magnetic detection portion D includes the second magnetic field passing portion 72c of the first soft magnetic body 12A and the first magnetic field passing portion 72e of the second soft magnetic body 12B. And the magnetic sensing portion D is disposed at a distance Ta in the X1 direction with respect to the tip 12c2 of the second magnetic field passing portion 12c of the first soft magnetic body 12A and the second The soft magnetic body 12B is disposed with a space Tb in the X2 direction with respect to the tip 12e2 of the first magnetic field passing portion 12e.

一方、比較例では、磁気検知部分Ｄが、第１の軟磁性体７２Ａの第２磁界渡し部分７２ｃと第２の軟磁性体７２Ｂの第１磁界渡し部分７２ｅとの間に挟まれて配置される点は同じであるが、磁気検知部分Ｄが、第１の軟磁性体７２Ａの第２磁界渡し部分７２ｃの先端７２ｃ２とＹ１−Ｙ２方向に対向して配置され（即ち、先端７２ｃ２に対してＸ１向きではなく、反対のＸ２向きに間隔をあけている）かつ第２の軟磁性体７２Ｂの第１磁界渡し部分７２ｅの先端７２ｅ２とＹ１−Ｙ２方向に対向して配置されている（即ち、Ｘ２向きではなく、反対のＸ１向きに間隔をあけている）。   On the other hand, in the comparative example, the magnetic detection portion D is disposed between the second magnetic field passing portion 72c of the first soft magnetic body 72A and the first magnetic field passing portion 72e of the second soft magnetic body 72B. However, the magnetic sensing portion D is disposed opposite to the tip 72c2 of the second magnetic field passing portion 72c of the first soft magnetic body 72A in the Y1-Y2 direction (that is, with respect to the tip 72c2). (It is not in the X1 direction but is spaced in the opposite X2 direction) and is disposed opposite to the tip 72e2 of the first magnetic field passing portion 72e of the second soft magnetic body 72B in the Y1-Y2 direction (ie, It is spaced in the opposite X1 direction, not in the X2 direction).

ここで、図８に、棒磁石によって生じる磁界方向（磁力線）を模式的に示す。図８に示すように棒磁石は長手方向両端部に磁極が生じ、平面視長辺（図８のＸ１−Ｘ２方向に延びる辺）を見ると、両端に近いほど磁界方向が長辺と直交する方向（Ｙ１−Ｙ２方向）に向き、両端からはなれて長辺の長手方向中央に近づくほど磁界方向が長辺と平行に近づく。即ち、長尺形状の磁性体においては、形状磁気異方性により長手方向端部に磁極が生じやすく、この磁極が生じた端部から長手方向中央寄りに離れることで磁性体から生じる磁界における長手方向に直交する成分が比較的小さくなりかつ長手方向に平行な成分が比較的大きくなる。   Here, FIG. 8 schematically shows the direction of the magnetic field (lines of magnetic force) generated by the bar magnet. As shown in FIG. 8, magnetic poles are generated at both ends in the longitudinal direction of the bar magnet, and when the long side in plan view (side extending in the X1-X2 direction in FIG. 8) is viewed, the magnetic field direction is orthogonal to the long side as it is closer to both ends. The magnetic field direction approaches parallel to the long side as it goes in the direction (Y1-Y2 direction) and approaches the center of the long side in the longitudinal direction. That is, in a long magnetic body, a magnetic pole is likely to be generated at the end in the longitudinal direction due to the shape magnetic anisotropy, and the longitudinal direction in the magnetic field generated from the magnetic body is separated from the end where the magnetic pole is generated toward the center in the longitudinal direction. The component orthogonal to the direction becomes relatively small and the component parallel to the longitudinal direction becomes relatively large.

そして、図６に示すように、比較例において、外部磁界Ｈ１がＸ２方向に向けて作用したとき、外部磁界Ｈ１は、軟磁性体７２内、及び軟磁性体７２Ａ，７２Ｂ間を通る矢印の磁路Ｍ３を進む。このとき、素子部１１に対して第１の軟磁性体７２Ａの第２磁界渡し部分７２ｃから第２の軟磁性体７２Ｂの第１磁界渡し部分７２ｅとの間で、Ｙ２方向への外部磁界Ｈ２が漏れ、この外部磁界Ｈ２が素子部１１に作用する。   As shown in FIG. 6, in the comparative example, when the external magnetic field H1 acts in the X2 direction, the external magnetic field H1 is a magnetic field indicated by an arrow passing through the soft magnetic body 72 and between the soft magnetic bodies 72A and 72B. Follow the road M3. At this time, the external magnetic field H2 in the Y2 direction between the second magnetic field passing portion 72c of the first soft magnetic body 72A and the first magnetic field passing portion 72e of the second soft magnetic body 72B with respect to the element portion 11 Leaks, and this external magnetic field H2 acts on the element portion 11.

そのあと、外部磁界Ｈ１が取り除かれて複数の軟磁性体７２に残留磁化が生じた場合、形状磁気異方性により第１の軟磁性体７２Ａの第２磁界渡し部分７２ｃの先端７２ｃ２及び第２の軟磁性体７２Ｂの第１磁界渡し部分７２ｅの先端７２ｅ２に磁極が現れる。そして、磁気検知部分Ｄが、これら先端７２ｃ２及び先端７２ｅ２とＹ１−Ｙ２方向に対向して配置されているので、磁気検知部分Ｄに対して、残留磁化による磁界におけるＹ１−Ｙ２方向の成分が比較的大きくなりかつＸ１−Ｘ２方向の成分が比較的小さくなり、そのため、磁気検知部分Ｄによって残留磁化による磁界（磁気）が検知されやすくなる。これにより、ヒステリシスの問題が生じる。   Thereafter, when the external magnetic field H1 is removed and residual magnetization is generated in the plurality of soft magnetic bodies 72, the tip 72c2 and the second end 72c2 of the second magnetic field passing portion 72c of the first soft magnetic body 72A are caused by the shape magnetic anisotropy. A magnetic pole appears at the tip 72e2 of the first magnetic field passing portion 72e of the soft magnetic body 72B. And since the magnetic detection part D is arrange | positioned facing these front-end | tip 72c2 and front-end | tip 72e2, and Y1-Y2 direction, the component of the Y1-Y2 direction in the magnetic field by a residual magnetization is compared with the magnetic detection part D. And the component in the X1-X2 direction becomes relatively small. Therefore, a magnetic field (magnetism) due to residual magnetization is easily detected by the magnetic detection portion D. This creates a hysteresis problem.

これに対して本実施形態では、磁気検知部分Ｄが、第１の軟磁性体１２Ａの第２磁界渡し部分１２ｃの先端１２ｃ２とＸ１方向にＴａ（Ｔａ＞０）だけ間隔をあけて配置され、かつ、第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅの先端１２ｅ２とＸ２方向にＴｂ（Ｔｂ＞０）だけ間隔をあけて配置されているので、磁気検知部分Ｄに対して、残留磁化による磁界におけるＹ１−Ｙ２方向の成分が比較的小さくなりかつＸ１−Ｘ２方向の成分が比較的大きくなるため、磁気検知部分によって残留磁化による磁界（磁気）が検知されにくくなる。これにより、ヒステリシスの問題を改善できる。なお、図７の比較例の第２の磁気抵抗効果素子及び第３の磁気抵抗効果素子において図５に示す本実施形態の第２の磁気抵抗効果素子及び第３の磁気抵抗効果素子と異なる点についても同様であるので説明は省略する。   On the other hand, in the present embodiment, the magnetic detection portion D is disposed at a distance of Ta (Ta> 0) in the X1 direction from the tip 12c2 of the second magnetic field transfer portion 12c of the first soft magnetic body 12A, In addition, since the tip 12e2 of the first magnetic field passing portion 12e of the second soft magnetic body 12B is spaced apart by Tb (Tb> 0) in the X2 direction, the residual magnetization with respect to the magnetic sensing portion D Since the component in the Y1-Y2 direction in the magnetic field due to is relatively small and the component in the X1-X2 direction is relatively large, it is difficult for the magnetic detection portion to detect the magnetic field (magnetism) due to residual magnetization. Thereby, the problem of hysteresis can be improved. The second magnetoresistive effect element and the third magnetoresistive effect element of the comparative example of FIG. 7 are different from the second magnetoresistive effect element and the third magnetoresistive effect element of the present embodiment shown in FIG. Since the same applies to, a description thereof is omitted.

以上より、本実施形態によれば、外部磁界の磁路を形成するように磁気検知体１０に沿って並べられた複数の軟磁性体１２のうちの隣り合う２つの軟磁性体１２Ａ、１２Ｂが、磁気検知体１０に沿って帯状に延在するとともに平面視で磁気検知体１０の磁気検知部分ＤをＹ１−Ｙ２方向に挟み、互いの間を外部磁界が進行可能に対向して配置されて対をなす軟磁性体１２Ａの第２磁界渡し部分１２ｃ及び軟磁性体１２Ｂの第１磁界渡し部分１２ｅ（即ち、一対の磁界渡し部分）を有している。そして、磁気検知部分Ｄが、軟磁性体１２Ａの第２磁界渡し部分１２ｃの先端１２ｃ２及び軟磁性体１２Ｂの第１磁界渡し部分１２ｅの先端１２ｅ２の両方とＸ１−Ｘ２方向に間隔をあけて配置されている。これにより、対をなす軟磁性体１２Ａの第２磁界渡し部分１２ｃ及び軟磁性体１２Ｂの第１磁界渡し部分１２ｅは、帯状に延在していることから形状磁気異方性により先端１２ｃ２及び先端１２ｅ２に磁極が現れ、これら先端１２ｃ２及び先端１２ｅ２から離れるにしたがって磁界の向きがＸ１−Ｘ２方向に沿うように変化し、つまり、磁界におけるＸ１−Ｘ２方向（延在方向）に直交する成分が小さくなりかつＸ１−Ｘ２方向に平行な成分が大きくなる。そのため、これら先端１２ｃ２及び先端１２ｅ２から離れて磁気検知部分Ｄを配置することで、軟磁性体１２に残留磁化が生じた場合であっても、磁気検知部分Ｄによって検知される軟磁性体１２Ａ、１２Ｂの残留磁化による磁界について当該磁気検知部分Ｄの感度軸方向（Ｙ１−Ｙ２方向）の成分をより小さくすることができる。複数の軟磁性体１４についても同様である。このことから、残留磁化の変化の影響を低減することができる。   As described above, according to the present embodiment, two adjacent soft magnetic bodies 12A and 12B among the plurality of soft magnetic bodies 12 arranged along the magnetic detector 10 so as to form a magnetic path of the external magnetic field are provided. The magnetic detection body 10 extends in a strip shape along the magnetic detection body 10 and the magnetic detection portion D of the magnetic detection body 10 is sandwiched in the Y1-Y2 direction in a plan view, and an external magnetic field is disposed so as to be able to travel between each other. It has the 2nd magnetic field transfer part 12c of 12 A of soft magnetic bodies which make a pair, and the 1st magnetic field transfer part 12e (namely, a pair of magnetic field transfer part) of the soft magnetic body 12B. And the magnetic detection part D is spaced apart from both the tip 12c2 of the second magnetic field passing part 12c of the soft magnetic body 12A and the tip 12e2 of the first magnetic field passing part 12e of the soft magnetic body 12B in the X1-X2 direction. Has been. As a result, the second magnetic field passing portion 12c of the soft magnetic body 12A and the first magnetic field passing portion 12e of the soft magnetic body 12B that extend in a pair extend in a band shape, so that the distal end 12c2 and the distal end are formed by shape magnetic anisotropy. A magnetic pole appears at 12e2, and the direction of the magnetic field changes along the X1-X2 direction as the distance from the tip 12c2 and tip 12e2 increases. That is, the component perpendicular to the X1-X2 direction (extending direction) in the magnetic field is small. And the component parallel to the X1-X2 direction increases. Therefore, by disposing the magnetic detection portion D away from the tip 12c2 and the tip 12e2, the soft magnetic body 12A detected by the magnetic detection portion D even when residual magnetization occurs in the soft magnetic body 12, The component in the sensitivity axis direction (Y1-Y2 direction) of the magnetic detection portion D can be further reduced with respect to the magnetic field due to the residual magnetization of 12B. The same applies to the plurality of soft magnetic bodies 14. From this, it is possible to reduce the influence of the change in the residual magnetization.

また、本実施形態によれば、磁気検知部分Ｄが、一対の磁界渡し部分である軟磁性体１２Ａの第２磁界渡し部分１２ｃ及び軟磁性体１２Ｂの第１磁界渡し部分１２ｅのそれぞれの延在方向中央部分の両方とＹ１−Ｙ２方向に対向して配置されている。これにより、磁気検知部分Ｄが、先端１２ｃ２及び先端１２ｅ２からより離れてその延在方向中央位置付近に配置されるので、磁気検知部分Ｄによって検知される軟磁性体１２Ａ、１２Ｂの残留磁化による磁界について当該磁気検知部分Ｄの感度軸方向の成分をさらに小さくすることができる。複数の軟磁性体１４についても同様である。このことから、残留磁化の変化の影響をさらに低減することができる。   In addition, according to the present embodiment, the magnetic detection part D is an extension of the second magnetic field passing part 12c of the soft magnetic body 12A and the first magnetic field passing part 12e of the soft magnetic body 12B, which are a pair of magnetic field passing parts. It is arranged so as to oppose both the central portion in the direction and the Y1-Y2 direction. Thereby, since the magnetic detection part D is arrange | positioned in the extension direction center position away from the front-end | tip 12c2 and the front-end | tip 12e2, the magnetic field by the residual magnetization of the soft magnetic bodies 12A and 12B detected by the magnetic detection part D The component in the sensitivity axis direction of the magnetic detection portion D can be further reduced. The same applies to the plurality of soft magnetic bodies 14. From this, it is possible to further reduce the influence of the change in the residual magnetization.

また、本実施形態では、隣り合う２つの軟磁性体１２Ａ、１２Ｂのそれぞれが、磁気検知体１０と交差してＹ１−Ｙ２方向に延在する交差部分１２ａ、１２ｄと、交差部分１２ａ、１２ｄにおけるＹ２側端部からＸ１方向に沿って帯状に延在する第１磁界渡し部分１２ｂ、１２ｅと、交差部分１２ａ、１２ｄにおけるＹ１側端部からＸ２方向に沿って帯状に延在する第２磁界渡し部分１２ｃ、１２ｆと、を有している。そして、隣り合う２つの軟磁性体１２Ａ、１２Ｂのうちの一方の軟磁性体１２Ａの第２磁界渡し部分１２ｃと他方の軟磁性体１２Ｂの第１磁界渡し部分１２ｅとで、一対の磁界渡し部分を構成している。複数の軟磁性体１４についても同様である。   Moreover, in this embodiment, each of two adjacent soft magnetic bodies 12A and 12B intersects the magnetic detector 10 and extends in the Y1-Y2 direction, and in the intersecting portions 12a and 12d. First magnetic field passing portions 12b and 12e extending in a strip shape along the X1 direction from the Y2 side end portion, and a second magnetic field passing extending in a strip shape along the X2 direction from the Y1 side end portion at the intersecting portions 12a and 12d And portions 12c and 12f. A pair of magnetic field passing portions is composed of the second magnetic field passing portion 12c of one soft magnetic body 12A and the first magnetic field passing portion 12e of the other soft magnetic body 12B of the two adjacent soft magnetic bodies 12A and 12B. Is configured. The same applies to the plurality of soft magnetic bodies 14.

また、本実施形態では、隣り合う２つの軟磁性体１２Ａ、１２Ｂのうちの一方の軟磁性体１２Ａの第２磁界渡し部分１２ｃがその第１磁界渡し部分１２ｂより長く形成され、他方の軟磁性体１２Ｂの第１磁界渡し部分１２ｅがその第２磁界渡し部分１２ｆより長く形成されている。これにより、軟磁性体１２Ａ、１２Ｂについて、形状磁気異方性を維持したまま、一方の軟磁性体１２Ａの第２磁界渡し部分１２ｃ及び他方の軟磁性体１２Ｂの第１磁界渡し部分１２ｅから漏れる磁界の影響を低減した。複数の軟磁性体１４についても同様である。   In the present embodiment, the second magnetic field passing portion 12c of one soft magnetic body 12A out of the two adjacent soft magnetic bodies 12A and 12B is formed longer than the first magnetic field passing portion 12b, and the other soft magnetic material. The first magnetic field passing portion 12e of the body 12B is formed longer than the second magnetic field passing portion 12f. Thus, the soft magnetic bodies 12A and 12B leak from the second magnetic field passing portion 12c of one soft magnetic body 12A and the first magnetic field passing portion 12e of the other soft magnetic body 12B while maintaining the shape magnetic anisotropy. Reduced the effect of magnetic field. The same applies to the plurality of soft magnetic bodies 14.

以上により、本実施形態では、比較例に示される従来の構成に比べてヒステリシスを効果的に改善することができる。   As described above, in this embodiment, the hysteresis can be effectively improved as compared with the conventional configuration shown in the comparative example.

以上、本発明について、好ましい実施形態を挙げて説明したが、本発明の磁気センサは上記実施形態の構成に限定されるものではない。   While the present invention has been described with reference to the preferred embodiment, the magnetic sensor of the present invention is not limited to the configuration of the above embodiment.

例えば、上述した実施形態では、磁気検知部分Ｄが、第１の軟磁性体１２Ａの第２磁界渡し部分１２ｃの先端１２ｃ２とＸ１向きにＴａ（Ｔａ＞０）だけ間隔をあけて配置され、かつ、第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅの先端１２ｅ２とＸ２向きにＴｂ（Ｔｂ＞０）だけ間隔をあけて配置されている構成であったが、これに限定されるものではない。磁気検知部分Ｄが、上記先端１２ｃ２とのみＸ１向きに間隔をあけて配置され、先端１２ｅ２とＹ１−Ｙ２方向に対向して配置（即ち、Ｘ２向きに間隔をあけていない）された構成であってもよい。または、これとは逆に、磁気検知部分Ｄが、上記先端１２ｅ２とのみＸ２向きに間隔をあけて配置され、先端１２ｃ２とＹ１−Ｙ２方向に対向して配置（即ち、Ｘ１向きに間隔をあけていない）された構成であってもよい。磁気検知部分Ｄと、第３の軟磁性体１４Ｃ及び第４の軟磁性体１４Ｄとの位置関係についても同様である。   For example, in the above-described embodiment, the magnetic detection portion D is disposed at a distance of Ta (Ta> 0) in the X1 direction from the tip 12c2 of the second magnetic field passing portion 12c of the first soft magnetic body 12A, and The second soft magnetic body 12B is configured to be spaced apart from the tip 12e2 of the first magnetic field passing portion 12e of the second soft magnetic body 12B by Tb (Tb> 0) in the X2 direction. However, the present invention is not limited to this. Absent. The magnetic detection portion D is configured such that only the tip 12c2 is spaced from the tip 12 in the X1 direction and is disposed facing the tip 12e2 in the Y1-Y2 direction (that is, not spaced in the X2 direction). May be. Or, conversely, the magnetic detection portion D is arranged with a gap in the X2 direction only with respect to the tip 12e2, and is arranged to face the tip 12c2 in the Y1-Y2 direction (that is, with a gap in the X1 direction). It may be a configuration that is not. The same applies to the positional relationship between the magnetic detection portion D, the third soft magnetic body 14C, and the fourth soft magnetic body 14D.

また、上述した実施形態では、軟磁性体１２の第１磁界渡し部分と第２磁界渡し部分とは長さが異なる構成であったが、これら第１磁界渡し部分と第２磁界渡し部分との長さを同一にしてもよい。軟磁性体１４についても同様である。   In the above-described embodiment, the first magnetic field passing portion and the second magnetic field passing portion of the soft magnetic body 12 have different lengths. However, the first magnetic field passing portion and the second magnetic field passing portion are different from each other. The lengths may be the same. The same applies to the soft magnetic body 14.

また、上述した実施形態では、複数の軟磁性体１２（及び軟磁性体１４）が、最もＸ１側から２つずつペアとなってそれぞれが軟磁性体１２Ａ、１２Ｂ（又は、軟磁性体１４Ｃ、１４Ｄ）となるように設けられ、これらペアの一方の軟磁性体１２Ａの第２磁界渡し部分１２ｃと他方の軟磁性体１２Ｂの第１磁界渡し部分１２ｅとの間に磁気検知部分Ｄが設けられているものであったが、これに限定されるものではない。この他方の軟磁性体１２Ｂは、そのＸ２側の軟磁性体１２との関係で一方の軟磁性体１２Ａとなり、そのＸ２側の軟磁性体１２が他方の軟磁性体１２Ｂとなって、これらをペアとして一方の軟磁性体１２Ａの第２磁界渡し部分１２ｃと他方の軟磁性体１２Ｂの第１磁界渡し部分１２ｅとの間に磁気検知部分Ｄが設けられているものであってもよい。軟磁性体１４についても同様である。   In the above-described embodiment, a plurality of soft magnetic bodies 12 (and soft magnetic bodies 14) are paired in pairs from the X1 side, and each of the soft magnetic bodies 12A and 12B (or soft magnetic bodies 14C, 14D), and a magnetic detection portion D is provided between the second magnetic field passing portion 12c of one soft magnetic body 12A of the pair and the first magnetic field passing portion 12e of the other soft magnetic body 12B. However, the present invention is not limited to this. The other soft magnetic body 12B becomes one soft magnetic body 12A in relation to the soft magnetic body 12 on the X2 side, and the soft magnetic body 12 on the X2 side becomes the other soft magnetic body 12B. As a pair, a magnetic detection portion D may be provided between the second magnetic field passing portion 12c of one soft magnetic body 12A and the first magnetic field passing portion 12e of the other soft magnetic body 12B. The same applies to the soft magnetic body 14.

図９〜図１１に示す本発明の実施例及び比較例を用い、磁気検知部分Ｄと、複数の軟磁性体との位置関係、及び、軟磁性体の形状を変化させたときのヒステリシス量（中点ずれ）を求めた。   Using examples and comparative examples of the present invention shown in FIGS. 9 to 11, the positional relationship between the magnetic detection portion D and a plurality of soft magnetic bodies, and the amount of hysteresis when the shape of the soft magnetic bodies is changed ( Midpoint deviation) was determined.

図９〜図１１は、本発明の実施例及び比較例における磁気抵抗効果素子の部分拡大平面図である。   9 to 11 are partially enlarged plan views of magnetoresistive elements in Examples and Comparative Examples of the present invention.

実施例１では、図９に示すように、第１の軟磁性体１２Ａの第２磁界渡し部分１２ｃの長さＬ１２ｃを、第１磁界渡し部分１２ｂの長さＬ１２ｂより長くし、かつ、第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅの長さＬ１２ｅを、第２磁界渡し部分１２ｆの長さＬ１２ｆより長くした。具体的には、第１の軟磁性体１２Ａは、第１磁界渡し部分１２ｂの長さＬ１２ｂが５．０μｍとなり、第２磁界渡し部分１２ｃの長さＬ１２ｃが１０．４μｍとなるように形成し、交差部分１２ａ、第１磁界渡し部分１２ｂ及び第２磁界渡し部分１２ｃのいずれも幅が２．０μｍとなるように形成している。また、第２の軟磁性体１２Ｂは、第１磁界渡し部分１２ｅの長さＬ１２ｅが１０．４μｍとなり、第２磁界渡し部分１２ｆの長さＬ１２ｆが５．０μｍとなるように形成し、交差部分１２ｄ、第１磁界渡し部分１２ｅ及び第２磁界渡し部分１２ｆのいずれも幅が２．０μｍとなるように形成している。長さＬ１２ｂと長さＬ１２ｆとは同じであり、長さＬ１２ｃと長さＬ１２ｅとは同じである。第１の軟磁性体１２Ａ及び第２の軟磁性体１２Ｂの厚さは、３μｍとした。また、第１の軟磁性体１２Ａの第２磁界渡し部分１２ｃの先端１２ｃ２から磁気検知部分ＤまでのＸ１向きの距離Ｔａを３．４５μｍとし、第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅの先端１２ｅ２から磁気検知部分ＤまでのＸ２向きの距離Ｔｂを３．４５μｍとした。電極部１６間の間隔Ｔ１を２．５μｍとした。   In the first embodiment, as shown in FIG. 9, the length L12c of the second magnetic field passing portion 12c of the first soft magnetic body 12A is made longer than the length L12b of the first magnetic field passing portion 12b, and the second The length L12e of the first magnetic field passing portion 12e of the soft magnetic body 12B is longer than the length L12f of the second magnetic field passing portion 12f. Specifically, the first soft magnetic body 12A is formed such that the length L12b of the first magnetic field passing portion 12b is 5.0 μm and the length L12c of the second magnetic field passing portion 12c is 10.4 μm. The crossing portion 12a, the first magnetic field passing portion 12b, and the second magnetic field passing portion 12c are all formed to have a width of 2.0 μm. The second soft magnetic body 12B is formed so that the length L12e of the first magnetic field passing portion 12e is 10.4 μm and the length L12f of the second magnetic field passing portion 12f is 5.0 μm, 12d, the first magnetic field transfer portion 12e, and the second magnetic field transfer portion 12f are all formed to have a width of 2.0 μm. The length L12b and the length L12f are the same, and the length L12c and the length L12e are the same. The thickness of the first soft magnetic body 12A and the second soft magnetic body 12B was 3 μm. Further, the distance Ta in the X1 direction from the tip 12c2 of the second magnetic field passing portion 12c of the first soft magnetic body 12A to the magnetic detection portion D is 3.45 μm, and the first magnetic field passing portion of the second soft magnetic body 12B is set. The distance Tb in the X2 direction from the tip 12e2 of 12e to the magnetic detection portion D was set to 3.45 μm. The interval T1 between the electrode parts 16 was 2.5 μm.

実施例２では、平面視形状を実施例１と同一にし（図９）、第１の軟磁性体１２Ａ及び第２の軟磁性体１２Ｂの厚さを、２μｍとした。   In Example 2, the shape in plan view was the same as that in Example 1 (FIG. 9), and the thicknesses of the first soft magnetic body 12A and the second soft magnetic body 12B were 2 μm.

実施例３では、図１０に示すように、第１の軟磁性体１２Ａの第１磁界渡し部分１２ｂの長さＬ１２ｂと第２磁界渡し部分１２ｃの長さＬ１２ｃとを同じ長さにし、かつ、第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅの長さＬ１２ｅと第２磁界渡し部分１２ｆの長さＬ１２ｆとを同じ長さとした。具体的には、第１の軟磁性体１２Ａは、第１磁界渡し部分１２ｂの長さＬ１２ｂ及び第２磁界渡し部分１２ｃの長さＬ１２ｃが共に８．４μｍとなるように形成し、交差部分１２ａ、第１磁界渡し部分１２ｂ及び第２磁界渡し部分１２ｃのいずれも幅が２．０μｍとなるように形成している。また、第２の軟磁性体１２Ｂは、第１磁界渡し部分１２ｅの長さＬ１２ｅ及び第２磁界渡し部分１２ｆの長さＬ１２ｆが共に８．４μｍとなるように形成し、交差部分１２ｄ、第１磁界渡し部分１２ｅ及び第２磁界渡し部分１２ｆのいずれも幅が２．０μｍとなるように形成している。長さＬ１２ｂ、Ｌ１２ｃ、Ｌ１２ｅ、Ｌ１２ｆは全て同じ長さである。第１の軟磁性体１２Ａ及び第２の軟磁性体１２Ｂの厚さは、２μｍとした。また、第１の軟磁性体１２Ａの第２磁界渡し部分１２ｃの先端１２ｃ２から磁気検知部分ＤまでのＸ１向きの距離Ｔａを２．４５μｍとし、第２の軟磁性体１２Ｂの第１磁界渡し部分１２ｅの先端１２ｅ２から磁気検知部分ＤまでのＸ２向きの距離Ｔｂを２．４５μｍとした。電極部１６間の間隔Ｔ１を２．５μｍとした。   In Example 3, as shown in FIG. 10, the length L12b of the first magnetic field passing portion 12b and the length L12c of the second magnetic field passing portion 12c of the first soft magnetic body 12A are made the same length, and The length L12e of the first magnetic field passing portion 12e and the length L12f of the second magnetic field passing portion 12f of the second soft magnetic body 12B are the same. Specifically, the first soft magnetic body 12A is formed such that the length L12b of the first magnetic field passing portion 12b and the length L12c of the second magnetic field passing portion 12c are both 8.4 μm, and the intersecting portion 12a. The first magnetic field passing portion 12b and the second magnetic field passing portion 12c are both formed to have a width of 2.0 μm. The second soft magnetic body 12B is formed such that the length L12e of the first magnetic field passing portion 12e and the length L12f of the second magnetic field passing portion 12f are both 8.4 μm, and the crossing portion 12d, the first Both the magnetic field passing portion 12e and the second magnetic field passing portion 12f are formed to have a width of 2.0 μm. The lengths L12b, L12c, L12e, and L12f are all the same length. The thickness of the first soft magnetic body 12A and the second soft magnetic body 12B was 2 μm. Further, the distance Ta in the X1 direction from the tip 12c2 of the second magnetic field passing portion 12c of the first soft magnetic body 12A to the magnetic detection portion D is 2.45 μm, and the first magnetic field passing portion of the second soft magnetic body 12B is set. The distance Tb in the X2 direction from the tip 12e2 of 12e to the magnetic detection portion D was set to 2.45 μm. The interval T1 between the electrode parts 16 was 2.5 μm.

比較例では、図１１に示すように、第１の軟磁性体７２Ａの第１磁界渡し部分７２ｂの長さＬ７２ｂと第２磁界渡し部分７２ｃの長さＬ７２ｃとを同じ長さにし、かつ、第２の軟磁性体７２Ｂの第１磁界渡し部分７２ｅの長さＬ７２ｅと第２磁界渡し部分７２ｆの長さＬ７２ｆとを同じ長さとした。第１の軟磁性体７２Ａの平面視形状は、図１０に示す実施例３の第１の軟磁性体１２Ａと同一であり、第２の軟磁性体７２Ｂの形状は、図１０に示す実施例３の第２の軟磁性体１２Ｂと同一である。長さＬ７２ｂ、Ｌ７２ｃ、Ｌ７２ｅ、Ｌ７２ｆは全て同じ長さである。第１の軟磁性体７２Ａ及び第２の軟磁性体７２Ｂの厚さは、２μｍとした。また、第１の軟磁性体７２Ａの第２磁界渡し部分７２ｃの先端７２ｃ２と磁気検知部分ＤがＹ１−Ｙ２方向に対向し、第２の軟磁性体７２Ｂの第１磁界渡し部分７２ｅの先端７２ｅ２と磁気検知部分ＤもＹ１−Ｙ２方向に対向して配置した。換言すると、第１の軟磁性体７２Ａの第２磁界渡し部分７２ｃの先端７２ｃ２から磁気検知部分ＤまでのＸ１向きの距離Ｔａを−０．５μｍとし、第２の軟磁性体７２Ｂの第１磁界渡し部分７２ｅの先端７２ｅ２から磁気検知部分ＤまでのＸ２向きの距離Ｔｂを−０．５μｍとした。電極部１６間の間隔Ｔ１を２．５μｍとした。   In the comparative example, as shown in FIG. 11, the length L72b of the first magnetic field passing portion 72b and the length L72c of the second magnetic field passing portion 72c of the first soft magnetic body 72A are set to the same length, and The length L72e of the first magnetic field passing portion 72e of the second soft magnetic body 72B and the length L72f of the second magnetic field passing portion 72f are the same length. The planar shape of the first soft magnetic body 72A is the same as that of the first soft magnetic body 12A of the third embodiment shown in FIG. 10, and the shape of the second soft magnetic body 72B is the same as that of the embodiment shown in FIG. 3 is the same as the second soft magnetic body 12B. The lengths L72b, L72c, L72e, and L72f are all the same length. The thickness of the first soft magnetic body 72A and the second soft magnetic body 72B was 2 μm. Further, the tip 72c2 of the second magnetic field passing portion 72c of the first soft magnetic body 72A and the magnetic detection portion D face each other in the Y1-Y2 direction, and the tip 72e2 of the first magnetic field passing portion 72e of the second soft magnetic body 72B. And the magnetic detection portion D are also arranged to face each other in the Y1-Y2 direction. In other words, the distance Ta in the X1 direction from the tip 72c2 of the second magnetic field transfer portion 72c of the first soft magnetic body 72A to the magnetic detection portion D is set to −0.5 μm, and the first magnetic field of the second soft magnetic body 72B is set. The distance Tb in the X2 direction from the tip 72e2 of the transfer portion 72e to the magnetic detection portion D was set to −0.5 μm. The interval T1 between the electrode parts 16 was 2.5 μm.

実施例１〜３の軟磁性体１２及び比較例の軟磁性体７２のＹ１−Ｙ２方向長さは同一に設定してある。   The Y1-Y2 direction lengths of the soft magnetic body 12 of Examples 1 to 3 and the soft magnetic body 72 of the comparative example are set to be the same.

実験では、各実施例の磁気センサ及び比較例の磁気センサのサンプルを３つずつ作成し、それぞれの磁気センサに、同じ大きさのＸ１−Ｘ２方向を向く外部磁界を作用させ、ヒステリシスループを得てその際のヒステリシス量（外部磁界を与えていないときのゼロ点からのずれ量）を測定した。その実験結果のグラフを図１２に示す。   In the experiment, three samples of the magnetic sensor of each example and the magnetic sensor of the comparative example were prepared, and an external magnetic field facing the X1-X2 direction of the same magnitude was applied to each magnetic sensor to obtain a hysteresis loop. The amount of hysteresis at that time (the amount of deviation from the zero point when no external magnetic field was applied) was measured. A graph of the experimental results is shown in FIG.

図１２において、ヒステリシス量はいずれも０（ｍＧ）に近いほうが好ましい。   In FIG. 12, the hysteresis amount is preferably close to 0 (mG).

図１２の実験結果に示すように、いずれも各実施例１〜３のほうが比較例に比べてヒステリシスを改善できたことがわかった。   As shown in the experimental results of FIG. 12, it was found that each of Examples 1 to 3 was able to improve the hysteresis compared to the comparative example.

本発明に係る磁気センサは、例えば、携帯電話等の携帯機器に組み込まれる地磁気を検知する地磁気センサとして好適に使用されうる。   The magnetic sensor according to the present invention can be suitably used as, for example, a geomagnetic sensor that detects geomagnetism incorporated in a mobile device such as a mobile phone.

１〜４ 磁気抵抗効果素子
１０ 磁気検知体
１１ 素子部
１２ 軟磁性体（磁路形成体）
１２Ａ 第１の軟磁性体
１２ａ 交差部分
１２ｂ 第１磁界渡し部分
１２ｃ 第２磁界渡し部分（一対の磁界渡し部分の一方）
１２ｃ２ 先端
１２Ｂ 第２の軟磁性体
１２ｄ 交差部分
１２ｅ 第１磁界渡し部分（一対の磁界渡し部分の他方）
１２ｅ２ 先端
１２ｆ 第２磁界渡し部分
１４ 軟磁性体（磁路形成体）
１４Ｃ 第３の軟磁性体
１４ａ 交差部分
１４ｂ 第１磁界渡し部分
１４ｃ 第２磁界渡し部分（一対の磁界渡し部分の一方）
１４ｃ２ 先端
１４Ｄ 第４の軟磁性体
１４ｄ 交差部分
１４ｅ 第１磁界渡し部分（一対の磁界渡し部分の他方）
１４ｅ２ 先端
１４ｆ 第２磁界渡し部分
６０ 非磁性下地層
６１ 固定磁性層
６２ 非磁性材料層
６３ フリー磁性層
６４ 保護層
Ｄ 磁気検知部分
Ｇ ギャップ
Ｈ１〜Ｈ３ 外部磁界
Ｍ１〜Ｍ３ 磁路
Ｓ 磁気センサ
1-4 Magnetoresistance effect element 10 Magnetic detector 11 Element part 12 Soft magnetic body (magnetic path formation body)
12A First soft magnetic body 12a Crossing portion 12b First magnetic field passing portion 12c Second magnetic field passing portion (one of a pair of magnetic field passing portions)
12c2 tip 12B second soft magnetic body 12d intersecting portion 12e first magnetic field passing portion (the other of the pair of magnetic field passing portions)
12e2 tip 12f second magnetic field passing portion 14 soft magnetic body (magnetic path forming body)
14C Third soft magnetic body 14a Crossing portion 14b First magnetic field passing portion 14c Second magnetic field passing portion (one of a pair of magnetic field passing portions)
14c2 Tip 14D Fourth soft magnetic body 14d Crossing portion 14e First magnetic field passing portion (the other of the pair of magnetic field passing portions)
14e2 tip 14f second magnetic field passing portion 60 nonmagnetic underlayer 61 pinned magnetic layer 62 nonmagnetic material layer 63 free magnetic layer 64 protective layer D magnetic detection portion G gap H1 to H3 external magnetic field M1 to M3 magnetic path S magnetic sensor

Claims (6)

平面視で帯状に延在し、幅方向の感度軸を有する磁気検知部分が設けられた磁気検知体と、
外部磁界の磁路を形成するように前記磁気検知体に沿って並べられた軟磁性材料からなる複数の磁路形成体とを有し、
前記複数の磁路形成体のうちの隣り合う２つの磁路形成体が、前記磁気検知体に沿って帯状に延在するとともに平面視で前記磁気検知部分を前記幅方向に挟み、互いの間を前記外部磁界が進行可能に対向して配置される一対の磁界渡し部分を有し、
前記磁気検知部分が、前記一対の磁界渡し部分のそれぞれの先端のうちの一方又は両方と前記磁気検知体の延在方向に間隔をあけて配置されていることを特徴とする磁気センサ。 A magnetic detector provided with a magnetic detection portion extending in a band shape in plan view and having a sensitivity axis in the width direction;
A plurality of magnetic path forming bodies made of a soft magnetic material arranged along the magnetic detection body so as to form a magnetic path of an external magnetic field;
Two adjacent magnetic path forming bodies out of the plurality of magnetic path forming bodies extend in a strip shape along the magnetic detection body, and sandwich the magnetic detection portion in the width direction in plan view, and between each other. A pair of magnetic field passing portions disposed so as to face each other so that the external magnetic field can travel,
The magnetic sensor is characterized in that the magnetic detection part is arranged with one or both of the tips of the pair of magnetic field passing parts spaced apart from each other in the extending direction of the magnetic detection body. 前記磁気検知部分が、前記一対の磁界渡し部分のそれぞれの延在方向中央部分のうちの一方又は両方と前記幅方向に対向して配置されていることを特徴とする請求項１に記載の磁気センサ。   2. The magnetism according to claim 1, wherein the magnetic detection portion is arranged to face one or both of the extending direction center portions of the pair of magnetic field passing portions in the width direction. Sensor. 前記隣り合う２つの磁路形成体のそれぞれが、前記磁気検知体と交差して前記幅方向に延在する交差部分と、前記交差部分における前記幅方向の一端部から前記磁気検知体に沿って帯状に延在する第１磁界渡し部分と、前記交差部分における前記幅方向の他端部から前記磁気検知体に沿って前記第１磁界渡し部分と反対方向に帯状に延在する第２磁界渡し部分と、を有し、
前記隣り合う２つの磁路形成体のうちの一方の磁路形成体の前記第２磁界渡し部分と他方の磁路形成体の前記第１磁界渡し部分とで、前記一対の磁界渡し部分を構成することを特徴とする請求項１又は２に記載の磁気センサ。 Each of the two adjacent magnetic path formers intersects the magnetic detector and extends in the width direction, and extends from the one end in the width direction at the intersection along the magnetic detector. A first magnetic field passing portion extending in a strip shape, and a second magnetic field passing extending in a strip shape in the opposite direction from the first magnetic field passing portion along the magnetic sensor from the other end in the width direction at the intersecting portion. And having a portion,
The pair of magnetic field passing portions is constituted by the second magnetic field passing portion of one of the adjacent two magnetic path forming members and the first magnetic field passing portion of the other magnetic path forming member. The magnetic sensor according to claim 1, wherein the magnetic sensor is a magnetic sensor. 前記隣り合う２つの磁路形成体のうちの一方の磁路形成体の前記第２磁界渡し部分がその前記第１磁界渡し部分より長く形成されていることを特徴とする請求項３に記載の磁気センサ。   The said 2nd magnetic field transfer part of one magnetic path formation body of the said adjacent two magnetic path formation bodies is formed longer than the said 1st magnetic field transfer part, The Claim 3 characterized by the above-mentioned. Magnetic sensor. 前記隣り合う２つの磁路形成体のうちの他方の磁路形成体の前記第１磁界渡し部分がその前記第２磁界渡し部分より長く形成されていることを特徴とする請求項３又は４に記載の磁気センサ。   5. The method according to claim 3, wherein the first magnetic field passing portion of the other magnetic path forming member of the two adjacent magnetic path forming members is formed longer than the second magnetic field passing portion. The magnetic sensor described. 前記隣り合う２つの磁路形成体のうちの一方又は両方における厚さが、３μｍ以上であることを特徴とする請求項１〜４のいずれか一項に記載の磁気センサ。   5. The magnetic sensor according to claim 1, wherein a thickness of one or both of the two adjacent magnetic path forming bodies is 3 μm or more.
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