JP2016160442A - Manufacturing apparatus and manufacturing method of solder ball - Google Patents
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Abstract
Description
本発明は水晶振動子などの気密性を有するセラミック製電子部品の封止用、または半導体デバイスの接合用のはんだボールの製造装置および製造方法に関する。 The present invention relates to a solder ball manufacturing apparatus and a manufacturing method for sealing ceramic electronic parts having airtightness such as a crystal resonator or joining semiconductor devices.
情報通信機器やＯＡ機器などの電子機器には、水晶振動子、水晶発振器、ＳＡＷフィルターなどの電子部品が使用されている。これら電子部品はその構造上高気密性を確保する必要があり、高い信頼性も求められている。そのため、比較的信頼性の高いＡｕ系のはんだボールがこれら電子部品のパッケージ接合や封止に用いられている。また、電子部品のパッケージ接合や封止用のはんだボールには信頼性や気密性を維持するために多くの制約が課されている。例えばボール径に関しては、ばらつきが小さいことが求められている。その理由は、ボール径にバラつきが大きいと封止に用いたハンダの量が局所的に異なるため、デバイスの気密性に個体差が生じやすくなるからである。 Electronic devices such as crystal resonators, crystal oscillators, and SAW filters are used in electronic devices such as information communication devices and OA devices. These electronic components need to ensure high airtightness due to their structures, and high reliability is also required. Therefore, relatively reliable Au-based solder balls are used for package bonding and sealing of these electronic components. In addition, many restrictions are imposed on solder balls for packaging and sealing electronic components in order to maintain reliability and airtightness. For example, the ball diameter is required to have a small variation. The reason is that if the ball diameter varies greatly, the amount of solder used for sealing is locally different, so that individual differences are likely to occur in the airtightness of the device.
ＬＳＩなどの半導体デバイスで採用されているボールグリッドアレイ（ＢＧＡ）にも接続材料としてはんだボールが用いられているが、近年の電子部品や半導体パッケージの小型化や微細化に伴い、使用されるはんだボールのボール径も微細化し且つ規格公差が狭く規定される傾向にある。この様な真球に近いはんだボールの製造方法としては油中アトマイズ法が多く用いられているが、上記したようにボール径が微細化し且つその規格公差が狭くなると、収率が低下する傾向にあった。そこで、収率を向上させるために種々の改善案が提案されている。 Solder balls are also used as connection materials for ball grid arrays (BGA) used in semiconductor devices such as LSI, but the solder used in connection with recent miniaturization and miniaturization of electronic components and semiconductor packages The ball diameter of the balls tends to be finer and the standard tolerance tends to be narrowed. As a method for producing such a solder ball close to a true sphere, an atomizing method in oil is often used. However, as described above, when the ball diameter becomes finer and its standard tolerance narrows, the yield tends to decrease. there were. Therefore, various improvements have been proposed to improve the yield.
例えば特許文献１には、オイルで満たされたカラムと、該カラム内のオイル中で糸状にはんだ溶融合金を吐出するノズルとから基本的に構成される油中アトマイズ装置において、該ノズルから吐出した糸状はんだ溶融合金が分断する領域のオイルに適度な温度勾配を生じさせる技術が開示されている。これにより糸状はんだ溶融合金の分断が安定化し、ボール径のバラツキを抑えることができると記載されている。 For example, Patent Document 1 discloses that in an in-oil atomizing apparatus that is basically composed of a column filled with oil and a nozzle that discharges a solder molten alloy in a thread form in the oil in the column, the nozzle is discharged from the nozzle. A technique for generating an appropriate temperature gradient in oil in a region where the thread-shaped solder molten alloy is divided is disclosed. It is described that, by this, the division of the thread-shaped solder molten alloy is stabilized, and the variation in ball diameter can be suppressed.
しかしながら、油中アトマイズ装置は、糸状はんだ溶融合金を分断させて球状化させるカラムの上側と、球状化した溶融合金を固化させるカラムの下側とでオイルに温度差をつけるため、カラム内でオイルの対流が生じ、これによりノズルから吐出された糸状はんだ溶融合金の分断が影響を受けてボール径にバラツキを生じることがあった。本発明は上記した従来の問題点に鑑みてなされたものであり、ノズルから糸状に吐出されるはんだ溶融合金の分断がカラム内で生じるオイルの対流の影響を受けにくいはんだボールの製造装置および製造方法を提供することを目的としている。 However, the atomizing device in oil creates a temperature difference between the upper side of the column that spheroidizes the thread-shaped solder molten alloy and the lower side of the column that solidifies the spheroidized molten alloy. As a result, the breakage of the thread-like solder molten alloy discharged from the nozzle is affected, and the ball diameter may vary. The present invention has been made in view of the above-described conventional problems, and a solder ball manufacturing apparatus and a manufacturing method in which the division of a solder molten alloy discharged in a thread form from a nozzle is not easily affected by oil convection generated in a column. It aims to provide a method.
上記目的を達成するため、本発明が提供するはんだボールの製造装置は、オイルで満たされた縦長のカラムと、該オイルに先端部が浸漬した状態ではんだボールの原料となる溶融合金を真下に向けて吐出するノズルと、該カラムの上側のオイルを加熱するヒーターとからなるはんだボールの製造装置であって、開放した両端部を有する筒状部材がその中心軸を上下方向に向けて前記先端部の直ぐ真下に設けられていることを特徴としている。 In order to achieve the above object, the solder ball manufacturing apparatus provided by the present invention includes a vertically long column filled with oil, and a molten alloy, which is a raw material of the solder ball with the tip immersed in the oil, directly below. A solder ball manufacturing apparatus comprising a nozzle that discharges toward the top and a heater that heats oil on the upper side of the column, wherein a cylindrical member having open ends is arranged so that the central axis is directed vertically and the tip It is characterized by being provided directly under the section.
また、本発明に係るはんだボールの製造方法は、縦長のカラム内の加熱されたオイルの中でノズルの先端部からはんだボールの原料となる溶融合金を真下に向けて吐出することではんだボールを製造する方法であって、該先端部から糸状に吐出される溶融合金が分断して球状化しながら落下する際の該溶融合金の周囲のオイルも溶融合金と一緒に真下に向けて流動することを特徴としている。 In addition, the method for producing a solder ball according to the present invention includes discharging a molten alloy, which is a raw material of the solder ball, from a tip portion of a nozzle in heated oil in a vertically long column toward the bottom. The molten alloy discharged in the form of a thread from the tip part is a method of manufacturing, and the oil around the molten alloy when falling while being spheroidized also flows downward together with the molten alloy. It is a feature.
本発明によれば、カラム内に満たされたオイルの中でノズル先端部から糸状に吐出される溶融合金の分断および球状化がオイルの対流で乱されにくくなるので、ボール径のバラツキが少なく且つ極めて真球に近い高品質のはんだボールを高い収率で作製することが可能になる。 According to the present invention, the division and spheroidization of the molten alloy discharged in the form of a thread from the nozzle tip in the oil filled in the column are less likely to be disturbed by the convection of the oil, so there is little variation in the ball diameter and High-quality solder balls that are very close to true spheres can be produced with high yield.
本発明者は、オイルで満たされた縦長のカラムと、該オイルに先端部が浸漬した状態ではんだボールの原料となる溶融状態の金属を吐出するノズルと、該カラムの上側のオイルを加熱するヒーターとからなるはんだボールの製造装置において、当該ノズルから真下に向けて吐出される糸状はんだ溶融合金が、その先端側から順次分断して表面張力により球状化するプロセスに注目した。このプロセスでボール径にバラツキのない高品質のはんだボールを生成するための理想的な状態とは、次々に分断して球状化されるはんだボール群が、鉛直方向に略均等な間隔をあけて一列に並んで整然と自然落下している状態であり、そのためには糸状はんだ溶融合金の分断と球状化が安定的に繰り返されることが必要である。 The inventor heats a vertically long column filled with oil, a nozzle that discharges a molten metal that becomes a raw material of a solder ball when the tip is immersed in the oil, and oil on the upper side of the column In the solder ball manufacturing apparatus composed of a heater, attention was paid to the process in which the thread-like solder molten alloy discharged from the nozzle directly downward is divided from the tip side and spheroidized by surface tension. The ideal state for producing high-quality solder balls with no variation in the ball diameter in this process is the group of solder balls that are divided into spheroids one after another, with approximately equal intervals in the vertical direction. It is in a state where the natural fall is orderly arranged in a row, and for this purpose, it is necessary that the splitting and spheroidization of the thread-shaped solder molten alloy be stably repeated.
そこで、従来の油中アトマイズ装置に対して、実際にノズルから糸状に吐出するはんだ溶融合金が分断および球状化しながら落下する様子をハイスピードカメラ（ｎａｃ ｆｘ６０００）を用いて注意深く観察した。その結果、糸状はんだ溶融合金が分断する位置が上下して球状化する分断片の長さが不規則に短くなったり長くなったりする現象や、球状化されたボール群が上下左右に方向性無く散乱する現象や、球状化したボールの直径が極端に小さくなったり大きくなったりする現象や、隣接するボール同士が接合する現象が生じていることが分かった。 Therefore, the state where the solder molten alloy actually discharged in a thread form from the nozzle dropped while being cut and spheroidized was carefully observed using a high-speed camera (nax fx6000) with respect to the conventional atomizer in oil. As a result, the part where the thread-shaped solder molten alloy breaks up and down is spheroidized, and the length of the piece is irregularly shortened or lengthened. It was found that a phenomenon of scattering, a phenomenon in which the diameter of a spheroidized ball became extremely small or large, and a phenomenon in which adjacent balls joined each other occurred.
油中アトマイズ法では、オイルの温度が２０〜３０℃程度の常温ではノズルから吐出された糸状はんだ溶融合金が分断される前に凝固してしまう。ノズルから溶融合金が安定的に吐出し、一定量吐出後に溶融合金を分断し粒径にバラツキのない真球状のはんだボールを形成するため、カラムの上側のオイルはヒーターではんだの融点以上の温度に加熱保持されている。そのため、カラムの上側ではヒーターで温められたオイルの上昇により熱対流が発生し、その結果上記したボール群の乱れ等が生じているものと考えられる。 In the atomizing method in oil, when the temperature of the oil is about 20 to 30 ° C., the thread-shaped solder molten alloy discharged from the nozzle is solidified before being divided. The molten alloy is discharged stably from the nozzle, and after a certain amount of discharge, the molten alloy is divided to form a true spherical solder ball with no variation in particle size. Is kept heated. Therefore, it is considered that heat convection is generated by the rise of the oil heated by the heater on the upper side of the column, and as a result, the above-described disturbance of the ball group occurs.
一方、カラムの下側のオイルは球状化したはんだボールが良好に固化できるようにはんだの融点よりも低く保持されているため、上記したカラムの上側のような熱対流は発生しにくいが、はんだボールの落下と一緒にオイルもカラム中心部を下方に向かって流れるので、このカラム中心部を下方に向かって流れるオイルがカラム下端部で折り返し、カラムの内壁部付近を上昇する流れを生ずると考えらえる。そして、カラムの上側で上記の熱対流と合流して更に上昇し、液面近傍でカラムの中央部方向と外周部方向に流れが別れ、外周部方向に向かった流れはカラム内壁に沿って下降してカラム上部の縮径部で外周部から中心部に向かう流れを生じさせると考えられる。このように、カラム内ではノズルの先端部から吐出される糸状はんだ溶融合金に向かう様々なオイルの流れが生じて乱流を発生させていると考えられるため、上記した様々な現象が生じてボール形状が安定しないものと考えられる。 On the other hand, the oil on the lower side of the column is kept lower than the melting point of the solder so that the spheroidized solder balls can be solidified well. As the ball falls, the oil flows downward in the center of the column, so the oil flowing downward in the center of the column is folded at the lower end of the column, causing a flow that rises near the inner wall of the column. Get it. Then, it joins with the above-mentioned thermal convection at the upper side of the column and rises further, the flow separates in the central direction and the outer peripheral direction of the column near the liquid surface, and the flow toward the outer peripheral direction falls along the inner wall of the column Thus, it is considered that a flow from the outer peripheral portion toward the central portion is generated at the reduced diameter portion at the upper part of the column. In this way, it is considered that various oil flows toward the thread-shaped solder molten alloy discharged from the nozzle tip in the column generate turbulent flow. It is considered that the shape is not stable.
かかるオイルの対流による悪影響を抑えるため、本発明の一具体例のはんだボールの製造装置では、縦長のカラム内に満たされたオイルに先端部を浸漬させた状態で溶融合金を吐出するノズルの先端部の真下に、両端部が開放された好適には円筒形状の筒状部材（整流筒とも称する）をその中心軸を上下方向に向けて設けている。これにより、ノズルから糸状に吐出されたはんだ溶融合金は、筒状部材の内側で分断および球状化しながら自然落下することができ、オイルの対流による外周部からの悪影響を筒状部材の外壁部での遮断により受けにくくすることができ、ボール径のバラツキが抑えられた高品質のはんだボールを作製することが可能になる。 In order to suppress the adverse effect due to the oil convection, in the solder ball manufacturing apparatus according to an embodiment of the present invention, the tip of the nozzle that discharges the molten alloy while the tip is immersed in the oil filled in the vertically long column A cylindrical member (also referred to as a rectifying cylinder), preferably having a cylindrical shape with both ends open, is provided directly below the part with its central axis directed in the vertical direction. As a result, the molten solder alloy discharged from the nozzle in the form of a thread can naturally fall while being divided and spheroidized inside the cylindrical member, and adverse effects from the outer peripheral part due to convection of oil can occur at the outer wall portion of the cylindrical member. It is possible to make a high-quality solder ball in which variation in ball diameter is suppressed, and it is possible to make it difficult to receive by blocking.
図１を参照しながらより具体的に説明すると、本発明の一具体例のはんだボール製造装置は、上部に位置する大径部、下部に位置する小径部およびこれらをつなぐ縮径部からなる例えばガラス製の縦長のカラム１と、該カラム１内に満たされたオイルＯの中に糸状にはんだ溶融合金を吐出する例えばガラス製のノズル２と、カラム１の縮径部内に設置されているヒーター３とから基本的に構成されている。冷却速度の適正化のため、カラム１の小径部にヒーターを追加設置してもよい。オイルＯには一般にヤシ油や大豆油などの植物油、またはシリコーン油などの合成油が用いられる。主にカラム１の大径部および縮径部に滞留している上側のオイルは、糸状はんだ溶融合金が良好に分断して球状化するように、ヒーター３ではんだ溶融合金の融点付近の温度に連続的に加熱されている。 More specifically, referring to FIG. 1, a solder ball manufacturing apparatus according to an embodiment of the present invention includes a large-diameter portion located at an upper portion, a small-diameter portion located at a lower portion, and a reduced-diameter portion connecting them. A vertically long column 1 made of glass, a nozzle 2 made of, for example, glass that discharges a molten solder alloy into oil O filled in the column 1, and a heater installed in a reduced diameter portion of the column 1 3 is basically composed. In order to optimize the cooling rate, a heater may be additionally installed in the small diameter portion of the column 1. Oil O is generally a vegetable oil such as coconut oil or soybean oil, or a synthetic oil such as silicone oil. The upper oil staying mainly in the large diameter portion and the reduced diameter portion of the column 1 is heated to a temperature near the melting point of the solder molten alloy by the heater 3 so that the thread-shaped solder molten alloy is well divided and spheroidized. It is continuously heated.
一方、主にカラム１の小径部に滞留している下側のオイルは、球状化したはんだ溶融合金が良好に固化できるようにはんだ溶融合金の融点より低温に維持されている。これにより、カラム１の上側のオイルの中で球状化したはんだ溶融合金は、カラム１の下側のオイルの中を落下している間に徐々に凝固し、カラム１の底部ではんだボールとして回収される。本発明の一具体例のはんだボール製造装置では、このノズル２の先端部の直ぐ真下に両端部が開放された例えばガラス製の筒状部材４がその中心軸を上下方向に向けて設けられている。 On the other hand, the lower oil staying mainly in the small diameter portion of the column 1 is maintained at a temperature lower than the melting point of the solder molten alloy so that the spheroidized solder molten alloy can be solidified well. As a result, the solder molten alloy spheroidized in the oil on the upper side of the column 1 is gradually solidified while dropping in the oil on the lower side of the column 1 and recovered as solder balls at the bottom of the column 1. Is done. In the solder ball manufacturing apparatus of one specific example of the present invention, a cylindrical member 4 made of, for example, glass having both ends opened directly below the tip of the nozzle 2 is provided with its central axis directed in the vertical direction. Yes.
筒状部材４の長さは、糸状はんだ溶融合金が分断して球状化するまでの範囲を十分にカバーするように、ノズル２の先端部の近傍からカラム１の縮径部と小径部との接合部より少し下側に至るまでの長さを有しているのが好ましい。また、筒状部材４の中心軸に垂直な面の断面積は、後述する筒状部材４の内側と外側のオイルの流れが安定して循環できる大きさを有しているのが好ましく、例えば筒状部材４が筒状の場合は、カラム１の小径部の内径の１／５〜１／２程度の内径を有しているのが好ましい。 The length of the cylindrical member 4 is such that the reduced diameter portion and the small diameter portion of the column 1 from the vicinity of the tip portion of the nozzle 2 so as to sufficiently cover the range until the thread-shaped solder molten alloy is divided and spheroidized. It is preferable to have a length that extends slightly below the joint. Further, the cross-sectional area of the surface perpendicular to the central axis of the cylindrical member 4 preferably has such a size that oil flows inside and outside the cylindrical member 4 described later can circulate stably. When the tubular member 4 is tubular, it preferably has an inner diameter of about 1/5 to 1/2 of the inner diameter of the small diameter portion of the column 1.
かかる構成により、図２に示すように、ノズル２より吐出された糸状はんだ溶融合金Ｓ１は、筒状部材４の内側のオイルの中で分断されて糸状はんだ溶融合金Ｓ１自身の表面張力で球状となりながら自然落下する。その際、筒状部材４が保護管の役割をするので、対流するオイルが、真下に向かって落下するはんだ溶融合金に対して向流方向や横方向や斜め方向から衝突してはんだ溶融合金を巻き込むのを極力抑制することができる。また、筒状部材４の内側をはんだ溶融合金が自然落下することにより、筒状部材４の内側のオイルもはんだ溶融合金に引きずられて筒状部材４の内側を真下に向かって流れ、白矢印のように筒状部材４の下側の開口部から球状化したはんだ溶融合金（球状溶融合金とも称する）Ｓ２と共に流れ出す。 With this configuration, as shown in FIG. 2, the thread-like solder molten alloy S1 discharged from the nozzle 2 is divided in the oil inside the tubular member 4 and becomes spherical due to the surface tension of the thread-like solder molten alloy S1 itself. While falling naturally. At that time, since the cylindrical member 4 serves as a protective tube, the convection oil collides with the solder molten alloy falling from below directly in the countercurrent direction, the lateral direction, or the oblique direction, and the solder molten alloy is formed. Entrainment can be suppressed as much as possible. Further, when the solder molten alloy naturally falls inside the cylindrical member 4, the oil inside the cylindrical member 4 is also dragged by the solder molten alloy and flows downward directly inside the cylindrical member 4. In this way, it flows out together with the spheroidized solder molten alloy (also referred to as a spherical molten alloy) S2 from the lower opening of the cylindrical member 4.
筒状部材４の上側の開口部は、オイルの液面より下側の好適にはノズル２の先端部よりわずかに下方で開口しているので、上記した下側の開口部から流れ出した筒状部材内のオイル分を補うように、筒状部材４の外側を上方に向かって流れるオイルが筒状部材４の当該上側の開口部から白矢印のように筒状部材４の内側に流れ込む。このようにして筒状部材４の内側および外側でそれぞれ下降流および上昇流として循環する安定したオイルの流れが発生する。 Since the opening on the upper side of the tubular member 4 is opened below the oil level, preferably slightly below the tip of the nozzle 2, the tubular flowed out from the lower opening described above. The oil that flows upward on the outside of the tubular member 4 flows into the inside of the tubular member 4 as indicated by a white arrow from the upper opening of the tubular member 4 so as to compensate for the oil content in the member. In this way, a stable oil flow that circulates as a downward flow and an upward flow is generated inside and outside the cylindrical member 4, respectively.
更に、筒状部材４の内側で糸状はんだ溶融合金Ｓ１から次々に分断して形成される球状溶融合金Ｓ２群の各々は、落下方向の後ろ側ではオイルの圧力が低くなるため、当該後ろ側で隣接して落下する球状溶融合金Ｓ２はオイルから受ける抵抗が少なくなるので追従しやすくなって不規則な分散現象をほとんど生じなくなる。その結果、次々に形成される球状溶融合金Ｓ２群は、分散することなく略均等な間隔をあけて一列に並んで規則的に落下してゆき、筒状部材４の下側の開口部を出た後もこの状態が持続される。 Further, each of the spherical molten alloy S2 group formed by successively separating from the thread-like solder molten alloy S1 inside the cylindrical member 4 has a lower oil pressure on the rear side in the dropping direction. Adjacently dropping spherical molten alloy S2 has less resistance from the oil, so it is easy to follow and hardly causes irregular dispersion. As a result, the spherical molten alloy S2 group formed one after another falls regularly in a line at substantially equal intervals without being dispersed, and exits from the lower opening of the tubular member 4. This state persists after a while.
特に筒内を流れる流体は、周縁部よりも中央部の流れが速くなる性質があるため、ノズル２の先端部を筒状部材４の中心軸に一致させることで上記した球状溶融合金Ｓ２群の落下時の規則性をより高めることができる。以上説明したように、ノズル２の直ぐ真下に筒状部材４をその中心軸を上下方向に向けて設置することにより、前述したはんだ溶融合金がオイル内で***および球状化するための理想的な状態が実現し、よってボール径のバラツキが抑えられた極めて高品質のはんだボールを高い収率で作製することが可能になる。 In particular, the fluid flowing in the cylinder has a property that the flow in the central portion is faster than the peripheral portion, so that the tip of the nozzle 2 coincides with the central axis of the cylindrical member 4 to make the above-described spherical molten alloy S2 group. The regularity at the time of fall can be improved more. As described above, by installing the cylindrical member 4 directly below the nozzle 2 with its central axis directed in the vertical direction, the above-described solder molten alloy is ideal for splitting and spheroidizing in the oil. As a result, it is possible to produce a very high quality solder ball with a high yield, in which variation in ball diameter is suppressed.
以下、具体的な実施例を挙げて本発明をさらに詳細に説明するが、本発明はこれら実施例によって何ら限定されるものではない。まず、油中アトマイズ法で作製した場合に収率が低くなりやすい高融点組成のＡｕ系３元合金からなるはんだ母合金を作製した。具体的には、原料としてそれぞれ純度９９.９質量％以上のＡｕ、Ｓｎ、Ａｇを準備した。大きな薄片やバルク状の原料については、溶解後の合金においてサンプリング場所による組成のバラツキがなく均一になるように留意しながら切断、粉砕等を行い、３ｍｍ以下の大きさに細かくした。 Hereinafter, the present invention will be described in more detail with reference to specific examples, but the present invention is not limited to these examples. First, a solder mother alloy made of an Au-based ternary alloy having a high melting point composition, which tends to decrease the yield when produced by an atomizing method in oil, was produced. Specifically, Au, Sn, and Ag each having a purity of 99.9% by mass or more were prepared as raw materials. Large flakes and bulk-shaped raw materials were cut and pulverized, etc. so as to be uniform with no variation in composition depending on the sampling location in the alloy after melting, and were reduced to a size of 3 mm or less.
次に、高周波溶解炉用グラファイトるつぼに、これら原料から所定量をそれぞれ秤量して入れた。原料の入ったるつぼを高周波溶解炉に入れ、酸化を抑制するために窒素を原料１ｋｇ当たり０.７Ｌ／分以上の流量で流した。この状態で溶解炉の電源を入れ、原料を加熱溶融させた。金属が溶融しはじめたら混合棒でよく攪拌し、局所的な組成のばらつきが起きないように均一に混ぜた。十分溶融したことを確認した後、高周波電源を切り、速やかにるつぼを取り出し、るつぼ内の溶湯をはんだ母合金の鋳型に流し込んだ。鋳型には、直径２４ｍｍの円柱形状のものを使用した。このようにして、同じ組成の４個のはんだ母合金のインゴットを作製した。このようにして作製したはんだ母合金に対してＩＣＰ発光分光分析器（ＳＨＩＭＡＺＵ Ｓ−８１００）を用いて組成分析を行った結果、はんだ母合金の組成はＡｕ−３０質量％Ｓｎ−１２質量％Ａｇであった。 Next, predetermined amounts of these raw materials were weighed into a graphite crucible for a high-frequency melting furnace. The crucible containing the raw material was placed in a high-frequency melting furnace, and nitrogen was flowed at a flow rate of 0.7 L / min or more per 1 kg of the raw material in order to suppress oxidation. In this state, the melting furnace was turned on to heat and melt the raw material. When the metal began to melt, it was stirred well with a mixing rod and mixed uniformly so as not to cause local compositional variations. After confirming sufficient melting, the high frequency power supply was turned off, the crucible was quickly removed, and the molten metal in the crucible was poured into the solder mother alloy mold. A cylindrical shape having a diameter of 24 mm was used as the mold. In this way, four solder mother alloy ingots having the same composition were produced. As a result of composition analysis using the ICP emission spectroscopic analyzer (SHIMAZU S-8100) for the solder mother alloy thus produced, the composition of the solder mother alloy was Au-30 mass% Sn-12 mass% Ag. Met.
次に、実施例１〜２および比較例１〜２のはんだボール製造装置を用意した。実施例１のはんだボール製造装置には、孔径０.１２３ｍｍのノズル２の直ぐ真下に筒状部材４がその中心軸を上下方向に向けて設けられた図１に示すような油中アトマイズ装置を採用した。筒状部材４には全長が１０５ｍｍ、内径がカラムの小径部の内径の１／５となるガラス製の円筒を用いた。実施例２の装置には、孔径０.１２３ｍｍに代えて孔径０.１２５ｍｍのノズル２を用いた以外は実施例１の装置と同様のものを採用した。比較例１および２の装置には、筒状部材４を設けなかった以外はそれぞれ実施例１および２と同様のものを採用した。 Next, the solder ball manufacturing apparatus of Examples 1-2 and Comparative Examples 1-2 was prepared. The solder ball manufacturing apparatus according to the first embodiment includes an in-oil atomizing apparatus as shown in FIG. 1 in which a cylindrical member 4 is provided directly below a nozzle 2 having a hole diameter of 0.123 mm with its central axis directed vertically. Adopted. The cylindrical member 4 was a glass cylinder having a total length of 105 mm and an inner diameter that was 1/5 of the inner diameter of the small diameter portion of the column. The apparatus of Example 2 was the same as that of Example 1 except that the nozzle 2 having a hole diameter of 0.125 mm was used instead of the hole diameter of 0.123 mm. The devices of Comparative Examples 1 and 2 were the same as those of Examples 1 and 2 except that the cylindrical member 4 was not provided.
これら実施例１〜２および比較例１〜２の装置のカラムにノズル先端部が浸漬するようにオイルを満たし、ヒーター３で３３０℃に加熱した。そして、それぞれのノズルに上記にて作製したはんだ母合金のインゴットをセットし、高周波加熱コイルにより５００℃まで加熱して５分保持した。５分経過後、不活性ガスによりノズル内部に圧力を加えてアトマイズを行い、糸状のはんだ溶融合金をオイル中に吐出させることではんだボールを作製した。 The oil was filled so that the nozzle tip was immersed in the columns of the devices of Examples 1 and 2 and Comparative Examples 1 and 2, and heated to 330 ° C. with the heater 3. And the solder mother alloy ingot produced above was set to each nozzle, and it heated to 500 degreeC with the high frequency heating coil, and hold | maintained for 5 minutes. After 5 minutes, pressure was applied to the inside of the nozzle with an inert gas, atomization was performed, and a solder ball was produced by discharging a thread-like solder molten alloy into the oil.
その結果、実施例１〜２の装置では、図２に示すように次々に形成される球状溶融合金Ｓ２群が分散することなく略均等な間隔をあけて一列に並んで規則的に落下して行き、この状態は球状溶融合金Ｓ２群が筒状部材４の下側の開口部を出た後も持続されていた。一方、比較例１〜２の装置では、図３に示すように次々に形成される球状溶融合金Ｓ２群が不規則に分散した。 As a result, in the apparatuses of Examples 1 and 2, the spherical molten alloy S2 group formed one after another as shown in FIG. 2 is regularly dropped in a line at regular intervals without being dispersed. This state was maintained even after the spherical molten alloy S2 group exited the lower opening of the cylindrical member 4. On the other hand, in the apparatuses of Comparative Examples 1 and 2, as shown in FIG. 3, the spherical molten alloy S2 group formed one after another was irregularly dispersed.
実施例１および比較例１の装置に対して、球状溶融合金Ｓ２群がオイル中を落下している様子を撮影した写真を図４（ａ）、（ｂ）に示す。図４（ａ）は筒状部材４の下側の開口部を出た直後の球状溶融合金Ｓ２群を撮影したものであり、図４（ｂ）も図４（ａ）と同じレベルの所で撮影したものである。筒状部材４を設置した図４（ａ）では、球状溶融合金Ｓ２群の各々は隣接する前方の球状溶融合金Ｓ２にほぼ追従しており、球状溶融合金Ｓ２群全体としてほとんど乱れること無く略直線状に下方に落下している様子が確認できる。これに対して筒状部材４を設けなかった図４（ｂ）では、分断された球状溶融合金Ｓ２群が散乱している様子が確認出来る。このように、筒状部材４の有無により糸状のはんだ溶融合金Ｓ１が分断および球状化される状態に明白に違いが生じた。 FIGS. 4A and 4B show photographs of the spherical molten alloy S2 group falling in the oil with respect to the apparatus of Example 1 and Comparative Example 1. FIG. FIG. 4 (a) is a photograph of the spherical molten alloy S2 group immediately after exiting the lower opening of the cylindrical member 4, and FIG. 4 (b) is also at the same level as FIG. 4 (a). It was taken. In FIG. 4A in which the cylindrical member 4 is installed, each of the spherical molten alloy S2 groups substantially follows the adjacent forward spherical molten alloy S2, and the spherical molten alloy S2 group as a whole is substantially straight without being disturbed. It can be seen that it is falling downward. In contrast, in FIG. 4B in which the cylindrical member 4 is not provided, it can be confirmed that the divided spherical molten alloy S2 group is scattered. As described above, there is a clear difference in the state where the thread-shaped solder molten alloy S1 is divided and spheroidized depending on the presence or absence of the cylindrical member 4.
次に、得られたはんだボールをエタノールで３回洗浄し、その後真空乾燥機を用いて４０℃の真空中で３時間の条件で乾燥した。そして、ボール径のバラツキを評価するため、目開き０.２４ｍｍと０.２６ｍｍの２種類の篩を用いて０.２４ｍｍ篩下（不良品）、０.２６ｍｍ篩上（不良品）、および０.２４ｍｍ篩上０.２６ｍｍ篩下（良品）の間の３つに篩分けして各々秤量し、篩分け前の全体の質量に対する割合を計算した。その結果を下記表１に示す。 Next, the obtained solder balls were washed three times with ethanol, and then dried in a vacuum at 40 ° C. for 3 hours using a vacuum dryer. Then, in order to evaluate the variation in the ball diameter, 0.22 mm sieve (defective product), 0.26 mm sieve (defective product), and 0. The sieving was carried out into three pieces between 0.24 mm sieve and 0.26 mm sieve (good product), and each was weighed, and the ratio to the total mass before sieving was calculated. The results are shown in Table 1 below.
表１の結果から明らかなように、比較例１〜２に比べて実施例１〜２の方が０.２４ｍｍ篩上０.２６ｍｍ篩下のはんだボールの収率が高く、筒状部材をノズルの直ぐ真下に設けることで良好な結果が得られることが分かった。なお、実施例１は実施例２に比べて０.２４ｍｍ篩上０.２６ｍｍ篩下のはんだボールの収率が少し低くなったが、その理由は、実施例１は実施例２よりもノズル孔が小さいため、０.２４ｍｍ以下の分布に偏ったためであると考えられる。逆に、比較例１〜２では比較例１よりもノズル孔径の大きい比較例２の方が０.２４ｍｍ以下の不良割合が高くなったが、これは分断および球状化が安定せずにバラつきが大きいことによるものと考えられる。 As is apparent from the results in Table 1, the yields of the solder balls under 0.26 mm on the 0.24 mm screen are higher in Examples 1 and 2 than in Comparative Examples 1 and 2, and the cylindrical member is a nozzle. It was found that a good result can be obtained by providing it immediately below. In Example 1, the yield of the solder balls under 0.26 mm on the 0.24 mm screen was slightly lower than that in Example 2, because the nozzle hole in Example 1 was more nozzle holes than in Example 2. This is considered to be because the distribution is biased to a distribution of 0.24 mm or less. On the contrary, in Comparative Examples 1 and 2, the ratio of defects of 0.24 mm or less was higher in Comparative Example 2 having a larger nozzle hole diameter than in Comparative Example 1, but this was not stable and was unevenly divided and spheroidized. This is probably due to the large size.
１ カラム
２ ノズル
３ ヒーター
４ 筒状部材（整流筒）
Ｏ オイル
Ｓ１ 糸状はんだ溶融合金
Ｓ２ 球状溶融合金
1 column 2 nozzle 3 heater 4 cylindrical member (rectifying cylinder)
O Oil S1 Threaded solder molten alloy S2 Spherical molten alloy
Claims (3)
The method for producing a solder ball according to claim 2, wherein the molten alloy is an alloy containing Au as a main component.
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| CN110115959A (en) * | 2018-02-05 | 2019-08-13 | 亚申科技研发中心（上海）有限公司 | The liquid phase jet stream pelletizing method and system of solid matter |
| KR20240006550A (en) | 2021-05-11 | 2024-01-15 | 가부시끼가이샤 레조낙 | Method for classifying solder particles, solder particles, classification system for solder particles, adhesive composition, and adhesive film |
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| JPH11229004A (en) * | 1998-02-12 | 1999-08-24 | Sumitomo Metal Mining Co Ltd | Production of solder ball |
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| KR20240006550A (en) | 2021-05-11 | 2024-01-15 | 가부시끼가이샤 레조낙 | Method for classifying solder particles, solder particles, classification system for solder particles, adhesive composition, and adhesive film |
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