200911713 九、發明說明： 【發明所屬之技術領域】 本f明是關於一種用以使熔融玻璃等熔融物流出而成 形為球狀、橢圓球狀或扁平球狀等近似球狀成形體之熔融 物流出喷嘴。較佳的是關於一種用以成形數位多功能光碟 (DVD)、光碟（CD)、磁光碟（M0, Magneto-optical Disc) 等之光學讀取透鏡、用於行動電話中附帶照相機之透鏡、 光通信用透鏡、或用於光學設備等中之透鏡或稜鏡等光學 . . 元件、或者用以利用精密壓機而獲得該等光學元件之預成 型材料、或者作為用於半導體裝置等中之微型焊接 (Mi cro-so 1 deri ng)之焊球等微細金屬球而使用之微小球 狀顆粒之熔融物流出喷嘴。 【先前技術】 近年來，隨著微型工程之發展，業界正在進行由微型 (透鏡等微小光學元件構成的微小光學系統的設計及製造 術之開發。特別是自開始研究光通信系統實用化之時 做為DVD、CD、磁光碟（M〇)等之光學讀取透鏡、用:二 電話中附帶照相機之透鏡、光通信用透鏡、用於光風H 等中之透鏡或稜鏡等光學元件、或光纖或半導體雷^又備 像元件，微型透鏡被開始廣泛應用，直到實用化。田、之成 亦被要求 、另-方面’隨著光碟及賺之普及，其讀取頭 之透鏡，或攝影機用透鏡等，無論其較小外徑， 具有高精度之光學性 200911713 為了使用玻璃來加工該等製品，先前是藉由研磨來直 接對玻璃進行球面加工等，但是該方法既耗費成本，於加 工時數上亦耗費時間。 再者，在半導體裝置等中進行的用於微型焊接之焊 球、微機械等中所使用的微細滾珠軸承用之滾珠等廣泛領 域内，要求窄粒度分布以及高真球度之微細金屬球，其需 求正在增長。 因此，業界一直在研究以高精度且廉價地大量生產玻 璃製造的該等元件或微小金屬球之方法（例如，專利文獻 1)。 專利文獻1中所揭示之方法是，一面對熔融玻璃施加 振動，一面將熔融玻璃自流孔排出至氣相中而形成玻璃 滴，繼而使該玻璃滴一邊落下一邊凝固，藉此製造微小球 狀顆粒。製造上述之微小球狀顆粒時，通常是在將坩堝内 之玻璃加以熔融及澄清化時，預先使玻璃在熔融玻璃流出 管内部或喷嘴前端内部固化，在開始進行球狀顆粒成形時 使流出管昇溫，利用燃燒器等對在喷嘴前端内部已固化之 玻璃加熱，開始流出溶融玻璃。然而，溶融玻璃開始流出 時，有時玻璃會在喷嘴外表面潤濕上昇而於喷嘴前端形成 團狀。在上述狀態下，無法使溶融玻璃作為固定流量及固 定形狀之玻璃流而流出，從而無法獲得精度較佳之微小 球。為此，雖然考慮出了暫時停止流出玻璃，藉由燃燒器 等進行加熱以去除在喷嘴前端潤濕上昇之玻璃，但因為該 方法無法徹底使玻璃自喷嘴前端去除，殘留在喷嘴前端之 6 200911713 玻璃會進而引發潤濕上昇，而 粒。 又，，在專利文獻2與專利文獻3中 利用重力及熔融玻璃之表面張力’自'/;200911713 IX. Description of the Invention: [Technical Field] The present invention relates to a molten stream of a substantially spherical shaped body formed by melting a molten glass or the like into a spherical shape, an elliptical shape, or a flat spherical shape. Exit the nozzle. Preferably, it relates to an optical reading lens for forming a digital versatile disc (DVD), a compact disc (CD), a magneto-optical disc (M0), a lens for a mobile phone with a camera, and a light. a communication lens, an optical device such as a lens or a lens used in an optical device, or the like, or a preform for obtaining the optical element using a precision press, or as a micro device for use in a semiconductor device or the like. A melt of fine spherical particles used for welding a fine metal ball such as a solder ball of a micro-so-de1 ng is flowed out of the nozzle. [Prior Art] In recent years, with the development of micro-engineering, the industry is developing the design and manufacturing of micro-optical systems composed of tiny optical components such as lenses, especially since the beginning of research on the practical use of optical communication systems. An optical reading lens such as a DVD, a CD, or a magneto-optical disc (M〇), a lens for a camera attached to a second telephone, a lens for optical communication, a lens for a light wind H or the like, or an optical element such as a lens, or Optical fiber or semiconductor lightning and imaging components, micro lenses have been widely used until practical use. Tian, Zhicheng is also required, another - aspect 'With the popularity of optical discs and earning, its read head lens, or camera With a lens or the like, regardless of its small outer diameter, it has high-precision optical properties. 200911713 In order to process these products using glass, the glass was directly processed by grinding, etc., but the method is costly and processed. In the case of a fine ball bearing used for soldering balls, micromachines, and the like for micro soldering performed in a semiconductor device or the like. In a wide range of fields such as balls, the demand for fine metal spheres with narrow particle size distribution and high true sphericity is increasing. Therefore, the industry has been studying the mass production of such components or micro metal balls made of glass with high precision and low cost. A method (for example, Patent Document 1). The method disclosed in Patent Document 1 is that, when vibration is applied to the molten glass, the molten glass is discharged from the orifice into the gas phase to form a glass droplet, and then the glass droplet is dropped on one side. When the microsphere-like particles are produced by solidification, the glass is usually solidified in the inside of the molten glass outflow tube or the inside of the nozzle tip when the glass in the crucible is melted and clarified. When the spheroidal particle formation is started, the outflow pipe is heated, and the glass solidified inside the nozzle tip is heated by a burner or the like to start flowing out of the molten glass. However, when the molten glass starts to flow out, sometimes the glass may be wetted on the outer surface of the nozzle. Wet up and form a dough at the front end of the nozzle. In the above state, the molten glass cannot be made solid. The glass flow of a constant flow rate and a fixed shape flows out, so that a microball having a better precision cannot be obtained. For this reason, it is considered that the glass is temporarily stopped, and heating is performed by a burner or the like to remove the glass which is wetted and raised at the tip end of the nozzle. However, since this method cannot completely remove the glass from the tip end of the nozzle, the glass which remains in the front end of the nozzle will in turn cause the wetting to rise and the particles. Further, in Patent Document 2 and Patent Document 3, the surface of gravity and molten glass is utilized. Tension '自'/;
璃分離且滴落溶融玻璃塊，來成形球狀或橢圓球狀之玻璃 體（預成型材料）。然而，在上述製造玻璃體之方法中，往 往會出現熔融玻璃潤濕上昇並附著在喷嘴之前端附近而無 法流出固定流量及固定形狀玻璃流之情形。又，由於澗濕 《 上昇之玻璃會長時間保持在該處，被外部空氣冷卻至一定 溫度，因此玻璃中將產生失透，已產生該失透之溶融玻璃 而混入於落下的玻璃滴中，易於使所獲得之玻璃體產生因 失透而導致不良。 因此’業界需要開發出一種不會使玻璃等之溶融物潤 濕上昇並附著、能夠流出固定流量及固定形狀之熔融物 流、能夠成形預成型材料或者玻璃元件等之球狀顆粒之熔 融物流出喷嘴。 i,: [專利文獻1]日本專利特開2003-104744號公報。 [專利文獻2]日本專利特公平7-51446號公報。 [專利文獻3]日本專利特開2001-089159號公報。 【發明内容】 [發明所欲解決之問題] 本發明之目的在於提供一種熔融物流出喷嘴，其用於 使溶融物自熔融物流出喷嘴流出，於熔融物落下過程中， 200911713 表面張力而以高精度大量製造微小球狀顆粒或 材料日士 2 = ^該置’在製造微小球狀顆粒或預成型 :了物於喷嘴潤濕上昇的情形非常少，且能夠輕 易地元全去除喷嘴前端潤濕上昇之玻璃。.The glass is separated and the molten glass lump is dropped to form a spherical or ellipsoidal glass (preform). However, in the above method of producing a glass body, there is a case where the molten glass wets up and adheres to the vicinity of the front end of the nozzle without flowing out the fixed flow rate and the fixed shape glass flow. In addition, since the rising glass will remain there for a long time and is cooled to a certain temperature by the outside air, devitrification will occur in the glass, and the devitrified molten glass will be generated and mixed into the dropped glass droplets, which is easy. The glass body obtained is deficient due to devitrification. Therefore, the industry needs to develop a melt flow out nozzle which does not wet and adhere to a melt such as glass, adheres to a fixed flow rate and a fixed shape, and can form a spherical material such as a preform or a glass element. . i,: [Patent Document 1] Japanese Patent Laid-Open Publication No. 2003-104744. [Patent Document 2] Japanese Patent Publication No. Hei 7-51446. [Patent Document 3] Japanese Laid-Open Patent Publication No. 2001-089159. SUMMARY OF THE INVENTION [Problem to be Solved by the Invention] An object of the present invention is to provide a melt flow out nozzle for discharging a molten material from a molten material out of a nozzle, and during the falling of the molten material, the surface tension is high in 200911713. Accuracy to manufacture a large number of tiny spherical particles or materials. The Japanese material 2 = ^ This is in the manufacture of tiny spherical particles or preforms: the wetting and rising of the nozzle is very small, and it is easy to remove the front end of the nozzle. Glass. .
[解決問題之技術手段] 球』2者等發現’在用於使㈣物流出而形成微小之 或預成型材料之紫置之溶融物流出喷嘴中，藉由 、之表面的中心線平均粗糙度（Ra，Ce伽⑽ rr=emjghness)設定於—定·内，而可在幾乎不會 融物潤濕上昇之情形下’以高精度而穩定地形成大 絲物液滴等球狀顆粒或預成型材料，從而完成 更具體而言，本發明提供以下内容。 枯卜⑴—種炫融物流出喷嘴，其具有熔融物之流路，以 f炫融物自前端流出’具備面向上述流路之内表面、包覆 、求ί内表面之外表面、以及上述内表面與上述外表面於上 成之端面，且上述外表面之中心線平均粗 〇又（Ra)為ι·6 以下。 8 200911713 (5) 如⑴至(4)中任—項所述之熔融物流出噴嘴 其中上述外表面之垂直於炫融物流出方向之剖面大致’ 形或者大致呈橢圓形。 圓 (6) 如（1)至（5)中任一項所述之熔融物流出噴嘴； 其中上述端面與熔融物流出方向垂直。 (υ如（1)至（6)中任—項所述之熔融物流出噴嘴， 其中位於上述前端之上述内表面之垂直於溶融物流出方向 的剖面積ai為40 mm2以下。 (8) 如（1 )至（7)中任一項所述之熔融物流出噴嘴， 其中上述内表面之垂直於熔融物流出方向之剖面大致呈 形。 (9) 如（1)至（7)中任一項所述之熔融物流出喷嘴， 其中熔融物係熔融玻璃。 (10) 一種球狀顆粒成形裝置，其具有（1)至（9) 中任一項所述之溶融物流出噴嘴。 (11) 一種球狀玻璃成形裝置，其具有（1)至（9) 中任一項所述之溶融物流出噴嘴。 (12) —種玻璃成形體成形裝置，其具有（1)至（9) 中任一項所述之熔融物流出喷嘴。 (13 ) —種球狀顆粒製造方法，其使用（1 〇 )所述之 球狀顆粒成形裝置來使熔融物成形為球狀。 (14) 一種球狀玻璃製造方法，其使用（11)所述之 球狀玻璃成形裝置來使玻璃成形為球狀。 05) —種玻璃成形體製造方法，其使用（12)所述 200911713 之玻璃成形體成形裝置來製造玻璃成形體。 [功效] 可以獲得一種熔融物流出喷嘴，其用以製造熔融物成 形體，較佳的是製造微小之球狀顆粒或預成型材料，於該 熔融物流出喷嘴，潤濕上昇之情形非常少，並且能夠輕易 地完全去除喷嘴前端所潤濕上昇之玻璃。 因此，本發明之熔融物流出喷嘴可適用於製造熔融物 成形體，較佳的是製造微小球狀顆粒或預成型材料。 【實施方式】 以下，對本發明進行具體說明。 本發明熔融物流出喷嘴於内部具有熔融物之流路，以 使熔融物自前端流出，該熔融物流出喷嘴具備面向流路之 内表面、包覆内表面之外表面、以及在前端連接内表面與 外表面之端面，並且外表面之中心線平均粗糖度（Ra)為 1. 6 // m 以下。 以下，對本發明熔融物流出喷嘴之實施形態進行詳細 說明，但本發明不受以下實施形態之任何限定，可於本發 明目的之範圍内適當加以變化而實施本發明。再者，有時 對說明重複之處會適當予以省略，其並非對本發明要旨之 限定。 參照第一圖至第四圖，說明本發明之熔融物流出喷嘴 之實施形態。第一圖係本發明實施形態熔融物流出喷嘴1 之立體圖，第二圖係表示本發明實施形態之熔融物流出喷 10 200911713 嘴1之各内表面及各外表面之立體圖。第三圖係以與熔融 物流出方向平行且通過熔融物流出噴嘴丨之中心之平面加 以切斷之縱剖面®。第四圖係本發明實施形態之溶融物流 出喷嘴1之平面圖。 冲一叫丹乐二圖所示，本實施形態熔融物流出噴嘴 具備面向流路6之内表面31、包覆内表面31之外表面32 Z於前端2連接内表面31與外表面犯之端面21，且用 f r、:_部3連接二=:= 之流:構成’且物财赌融物流動 之内表面3】、心面狀:具有位於熔融物流出侧 ^ W表面31連接且自第一攻，々w 騎二流路剖面積a2之第二内表面4ι、二面積⑴變 連接且具有第二流路剖面積出之第”第-内表面 流路剖面積a2大於第—流路剖面積J内表面51，且第二 此處’所謂流路剖面，係指出現於 直剖面’係由熔融物流出噴嘴：物-出方向之 :二内表面41以及第三内表面5”所固：（内表面3卜 σ面積係指上述流路剖面之面 積。又固t面’所謂流路 積ai，係指出現於炫融物流出方明弟-流路剖面 =直剖面上之内表面31部分的流路剖:圖:箭頭方向） 、積，又，所謂第二流路剖面产 〃（第一圖之A。 流出方向之垂直剖面上之第三内：2，係指出現於熔融物 51部分的流路剖面 200911713 (第一圖之a2)之面積。 又’熔融物流出喷嘴1之外表面呈現為如下形狀：位 於炫融物流出側具有第一外形剖面積bi之外表面32、與外 表面32連接且自第一外形剖面積bl變為第二外形剖面積 匕2之第二外表面42、以及與第二外表面42連接且具有第二 外形剖面積h之第三外表面52，且，第—外形剖面積bi 小於第二外形剖面積b2。 此處，所謂外形剖面，係指出現於熔融物流出方向之 垂直剖面，係以熔融物流出喷嘴1之外形（外表面32、第 —夕卜表面42、以及第三外表面52)所圍成之面，所謂外形 剖面積，係指上述外形剖面之面積。又，所謂第一外形剖 面積b! ’係指出現於外表面32部分的熔融物流出方向之垂 直剖面以熔融物流出噴嘴1之外形所圍成之剖面（第二圖 之Βι)面積，所謂第二外形剖面積b2，係指出現於第二外 表面52之溶融物流出方向之垂直剖面以溶融物流出喷嘴j 外形所圍成之剖面（第二圖之B2)面積。 本實施形悲炫融物流出喷嘴1以外表面3 2之中心線平 均粗糙度（Ra)為1.6 /zm以下（參照第一圖）之方式而 形成外表面3 2。 熔融物流出噴嘴1雖根據玻璃等之熔融物組成、取決 於熔融物組成之熔融物黏度、以及熔融物流出喷嘴之原材 料組成之不同，而多少有所差異，但通常具有易於被熔融 物潤濕之性質。若溶融物對於熔融物流出喷嘴1之潤濕性 較高，則當熔融物間始流出時或者熔融物流出時，熔融物 12 200911713 將繞流至熔融物流出喷嘴1之外♦面 於炼融物流出喷嘴丨夕卜 ^則’從而產生炫融物 潤濕上昇之熔融α上昇之現象。繼而， .汁之烙嘁物於熔融物流出喷 叩 得溶融物難以流出。或者，由於_ ^端2結成塊，使 而成f所獲得之成形體產生不良之原"因昇而產生失透，從 猎由將炼融物流出噴嘴j外表 (Ra)設定於一預定簕圖& 中心線平均粗糙度 濕上昇且附著之熔融物。又，藉:自外表面32去除潤 均粗键度㈤，可_卜表面32 f；^表^中心線平 因此可防止炫融物潤濕上昇且附著於之濁濕性， 外表面32。5] μ· ^ Α 、垃政物流出喷嘴1之 ,_ 可自炫融物流*噴嘴1衫H固― 流I及固定形狀L疋地机出固疋 ,,θ 攸而此约以高精廋來籍宗i士猫 成大夏微小之球狀顆粒或預成型材料。 心^ 此處’炫融物流出噴嘴1外表 度（Ra)參“ ㈣面32之中心線平均粗糙 二2，.…以下’更佳為0.8㈣下，最 .下。藉由使中心線平均轉度㈤處於 r / 01以下’可有效抑制玻璃潤濕上昇於對玻璃之潤渴性 =之材料上，從料輕易地去除附著於外表面32上之溶 β然而，為了降低熔融物流出喷嘴1之加工成本，較佳 的是炫融物流出噴嘴1外表面32之中心線平均祕度（Ra) 大於 0.025 /z m。 此處’中心線平均粗糙度（Ra)係依據JIS-B0601 : 2001 而測得之值，當無法依據JIS-B0601 : 2001來測定上述中 13 200911713 心線平均粗糙度時，以由超硬材料構成之按粗糙度分類的 標準測試片作為參考，於顕微鏡下與加工過程中之製品進 行比較而進行測定。 季父佳的是，除外表面 入 I 崎囬Z1〔翏照第E 圖）或者内表面叫參照第三圖）之中心線平均粗糖度（Ra 亦為1.6⑽以下，更佳的是，端面21及内表面31之中 :線：均粗糙度㈤與外表面32之中心線平均粗糙度相 二々由使端面21及内表面31之中心線平均粗糙度(肋 :精度=使炫融物穩定地流下’從而提高成型- 及二流路6之流路剖“與“ 就加工二：::Bz之形狀並無特別限定，但 物之流動紊亂等角度而言，減少㈣ 物等角4士：易地去除附著於外表面扣上之熔融 又而5，更佳的是外表面32位置之 圓形或者大致呈樵圓. y »彳面大致呈 出致呈橢0形’就使剛剛自熔融物流”流 爪出之熔融物之流出形狀易於成為圓 ^ 内表面2立置之=球之成形體之觀點而言，更佳的是 最佳的是於Λ*約践形或約4_形。此外， 路剖面與外=7嘴1中不存在壁厚不均勻，且流 出喷嘴1 : 圓’其原因在於易於使熔瞻 均質之成形體。 度刀布·均句，從而易於獲得 14 200911713 面 溶融物流出喷嘴1之端面U只要於前端2連接了内表 ^1及外表面32即可，對其形狀並無特別限定，但較佳 二：：熔融物：出方向垂直。藉由使端面21與熔融物流出 口附：ί.:合易地形成端面21，並且可充分地提高流出 口附近之機械強度。 内表面贺嘴1的内表面31 (即’位於前端之 ί i 要根據所欲;造:球Ι面積& (參照第二圖）之大小，只 徑為小而適當設計即可。於使直 路剖面積⑴之上限粒或預成型材料成型之情形時，流 以上/ 1二土為4Q _2以下，於使直經為2.5 流路剖^ 顆粒或預成型材料成型之情形時， 麵之球t 上限較佳為3〇臓2以下，於使直徑小於h 之上限=7=成型材料成型之情形時，流路剖面積a 下。只要流路剖面積出之〜“ 内，則可較佳地用於製造球狀顆粒或預成 '、 流出t ’於與熔融物流出方向垂直之方向上切斷熔： 態^^ ^成之剖面形狀，I未特別指定為如本實“ 等形狀«形，如弟五圖所示’例如亦可為侧形、四方形 鉑人乍為構成本發明熔融物流出喷嘴1之材料，可例示， 熔蛐物中之性質，因此，亦可較佳地用於製 、 而叙高熔融溫度或較少雜質等之玻璃。 Q、別 本兔明之熔融物流出噴嘴丨可與將熔融物自保持容器 15 200911713[Technical means for solving the problem] The ball and the like found that 'the center line average roughness of the surface of the surface of the melt which is used to make the (4) flow out to form a fine or preformed material. (Ra, Ce gamma (10) rr = emjghness) is set in -, and can form spherical particles such as large droplets or high-precision stably with high precision in the case where the melt is hardly increased. Molding the material to accomplish more specifically, the present invention provides the following. Dryness (1) - a kind of smelting and melting nozzle, which has a flow path of molten material, and flows out from the front end with f fused material, having an inner surface facing the above-mentioned flow path, covering, squeezing the outer surface of the inner surface, and the above The inner surface and the outer surface are on the upper end surface, and the center line of the outer surface has an average roughness (Ra) of ι·6 or less. The melt discharge nozzle according to any one of (1) to (4), wherein the outer surface of the outer surface is substantially 'shaped or substantially elliptical" in a cross section perpendicular to the direction in which the molten material flows out. The melt discharge nozzle according to any one of (1) to (5) wherein the end surface is perpendicular to the direction in which the molten material flows out. The melt discharge nozzle according to any one of (1) to (6), wherein a cross-sectional area ai of the inner surface of the front end perpendicular to the flow direction of the molten material is 40 mm 2 or less. The molten material discharge nozzle according to any one of (1), wherein a cross section of the inner surface perpendicular to the direction in which the molten material flows out is substantially shaped. (9) Any one of (1) to (7) The molten material is discharged from the nozzle, wherein the molten material is a molten glass. (10) A spherical particle forming device having the melted flow out nozzle according to any one of (1) to (9). A spherical glass forming apparatus having the molten material discharge nozzle according to any one of (1) to (9). (12) A glass molded body forming apparatus having any one of (1) to (9) A molten material is discharged from the nozzle. (13) A method for producing a spherical particle, which comprises forming a molten material into a spherical shape using the spherical pellet forming device (1). A glass manufacturing method using the spherical glass forming apparatus described in (11) to form a glass into a spherical shape. Glass molded article manufacturing method, using (12) 200 911 713 of the glass molding apparatus for producing molded glass molded article. [Efficacy] It is possible to obtain a melt flow out nozzle for producing a melt formed body, preferably a minute spherical particle or a preformed material, in which the molten flow exits the nozzle, and the wetting rise is very small. And it is easy to completely remove the glass that is wetted by the front end of the nozzle. Therefore, the melt stream discharge nozzle of the present invention can be suitably used for the production of a melt formed body, preferably by making minute spherical particles or a preformed material. [Embodiment] Hereinafter, the present invention will be specifically described. The molten material flowing out of the nozzle has a flow path of the melt inside, so that the molten material flows out from the front end, and the molten flow out nozzle has an inner surface facing the flow path, a surface covering the inner surface, and an inner surface connecting the front end The average roughness (Ra) of the center line of the outer surface is 1. 6 // m or less. Hereinafter, the embodiment of the melt discharge nozzle of the present invention will be described in detail, but the present invention is not limited to the following embodiments, and the present invention can be suitably modified within the scope of the present invention. In addition, the description will be appropriately omitted, and it is not intended to limit the gist of the present invention. An embodiment of the melt discharge nozzle of the present invention will be described with reference to the first to fourth figures. The first drawing is a perspective view of a molten material discharge nozzle 1 according to an embodiment of the present invention, and the second drawing is a perspective view showing each inner surface and each outer surface of the nozzle 1 of the molten material discharge 10 200911713 according to the embodiment of the present invention. The third figure is a longitudinal section® cut in a plane parallel to the direction of the molten stream and passing through the center of the nozzle enthalpy. The fourth drawing is a plan view of the melted discharge nozzle 1 of the embodiment of the present invention. As shown in Fig. 2, the molten-flow nozzle of the present embodiment has an inner surface 31 facing the flow path 6, and an outer surface 32 of the inner surface 31. The end surface 2 is connected to the inner surface 31 and the outer surface. 21, and use fr, : _ part 3 to connect two =: = stream: constitute 'and the inner surface of the material gambling melt flow 3', heart surface: has a surface on the side of the molten stream ^ W connected and from The first attack, 々w rides the second inner surface of the cross-sectional area a2 of the second flow path 4, the two areas (1) are connected and has the second flow path sectional area. The first-first surface flow path sectional area a2 is larger than the first flow path The cross-sectional area J inner surface 51, and the second here, 'the so-called flow path cross-section, means that the straight cross-section is formed by the melt flow out of the nozzle: the object-out direction: the two inner surfaces 41 and the third inner surface 5" Solid: (the inner surface 3 σ area refers to the area of the above-mentioned flow path section. The solid surface t', the so-called flow path product ai, refers to the inner surface 31 which appears on the side of the smelting and condensing stream Mingdi-flow path profile=straight section Part of the flow path section: Figure: arrow direction), product, and so-called second flow path profile calving (A of the first figure. The third inner portion of the vertical section of the direction: 2, refers to the area of the flow path section 200911713 (a2 of the first figure) appearing in the portion of the melt 51. Further, the outer surface of the molten material flowing out of the nozzle 1 assumes the following shape: a second outer surface 42 having a first outer shape cross-sectional area bi and a second outer surface 42 connected to the outer surface 32 and changing from the first outer shape sectional area b1 to the second outer shape sectional area 匕2, and The second outer surface 42 is joined and has a third outer surface 52 of the second cross-sectional area h, and the first cross-sectional area bi is smaller than the second outer sectional area b2. Here, the outer cross-section refers to the occurrence of the molten material. The vertical cross section of the direction is a surface surrounded by the outer shape of the nozzle 1 (the outer surface 32, the first surface 42 and the third outer surface 52), and the cross-sectional area is the outer profile. The area of the cross-sectional area b! The so-called second shape The area b2 refers to the cross section (B2 of the second figure) which is formed by the vertical cross section of the molten outer flow direction of the second outer surface 52 to be melted out of the shape of the nozzle j. The outer surface 3 2 is formed so that the center line average roughness (Ra) of the outer surface 3 2 is 1.6 / zm or less (refer to the first drawing). The melt flow out nozzle 1 depends on the melt composition of glass or the like, depending on The viscosity of the melt composed of the melt and the composition of the raw material of the melt flowing out of the nozzle vary somewhat, but generally have a property of being easily wetted by the melt. If the melt is wetted to the nozzle 1 by the molten material Higher, when the melt begins to flow out or when the melt flows out, the melt 12 200911713 will flow around the melt stream out of the nozzle 1 ♦ face the smelting stream out of the nozzle 丨 ^ 则 则 ' The phenomenon that the melt α rises as the material wets. Then, the juice of the juice is sprayed out of the molten stream, so that the molten material is difficult to flow out. Or, since the _ ^ end 2 is agglomerated, the formed body obtained by the f is defective. The devitrification occurs due to the rise, and the appearance of the nozzle j from the shovel is set to a predetermined position (Ra).簕图 & center line average roughness wet rise and attached melt. Moreover, by: removing the coarse and coarse bond degree (5) from the outer surface 32, the surface of the surface is 32 f; ^ the center line of the surface is flat, thereby preventing the wettability from rising and adhering to the wet and wet, outer surface 32. 5] μ· ^ Α , 劳政物流出嘴1, _ 可自炫融物流* nozzle 1 shirt H solid - flow I and fixed shape L 疋 出 出 ,, θ 攸 攸 此 此 此 此 高 高廋来宗宗士士 into a large summer spherical pellets or preformed materials. Heart ^ Here 'Hyun Rong flow out nozzle 1 appearance degree (Ra) ginseng "(4) Surface 32 of the center line average roughness of 2, .... below 'better than 0.8 (four), the most below. By making the center line average The degree of rotation (five is below r / 01) can effectively suppress the glass wetting from rising to the thirst of the glass = the material is easily removed from the material on the outer surface 32. However, in order to reduce the flow of the melt out of the nozzle The processing cost of 1 is preferably that the center line average fineness (Ra) of the outer surface 32 of the nozzle 1 is greater than 0.025 /zm. Here, the center line average roughness (Ra) is based on JIS-B0601: 2001. The measured value, when the average roughness of the above-mentioned 13 200911713 core line cannot be determined according to JIS-B0601:2001, the standard test piece classified by roughness of super-hard material is used as a reference, and the micro-mirror is processed and processed. The products in the process are compared and measured. It is good for the season father to exclude the surface from the I-Saki back Z1 (refer to the picture E) or the inner surface (refer to the third figure) the center line average coarse sugar (Ra is also 1.6 (10) Below, more preferably, end face 21 and inner table Among the 31: line: the average roughness (five) and the center line average roughness of the outer surface 32 are the same as the center line average roughness of the end surface 21 and the inner surface 31 (rib: accuracy = stable flow of the dazzle) Therefore, the flow path of the forming-and the second-flow path 6 is increased. "The shape of the processing 2:::Bz is not particularly limited, but the flow of the object is disordered, and the angle is reduced. (4) The equiangular 4: easy to remove Attached to the outer surface buckle, the melt is further 5, and more preferably the outer surface 32 is circular or substantially rounded. y » the surface of the 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致 大致The outflow shape of the claw-out melt is apt to be a shape of the ball formed by the inner surface 2 of the inner surface 2, and it is more preferable that it is about a shape or a shape of about 4 mm. There is no uneven wall thickness in the road section and the outer section 7 mouth 1 and the outflow nozzle 1 : round ' is due to the fact that it is easy to make the molded body homogeneous. The degree of the knife cloth is uniform, so that it is easy to obtain 14 200911713 surface melting logistics The end surface U of the nozzle 1 is only required to be connected to the inner surface 1 and the outer surface 32 at the front end 2, and its shape is It is not particularly limited, but preferably two:: melt: the direction of the exit is perpendicular. By the end face 21 and the outlet of the molten stream are attached: the end face 21 is formed easily, and the mechanical strength near the outflow port can be sufficiently increased. The inner surface 31 of the inner surface of the mouthpiece 1 (ie, 'the front end of the ί i should be as desired; the size of the sphere: & (see the second figure), the diameter is small and appropriate design. When the upper section of the straight section (1) is formed by the upper limit particle or the preformed material, the flow above / 1 soil is 4Q _2 or less, and when the straight passage is 2.5 flow path forming pellet or preform material, the surface ball The upper limit of t is preferably 3 〇臓 2 or less, and when the diameter is smaller than the upper limit of h = 7 = the molding material is molded, the flow path sectional area a is lower. As long as the cross-sectional area of the flow path is "inside, it can be preferably used to produce spherical particles or pre-formed, and the outgoing t' is cut in a direction perpendicular to the direction in which the molten material flows out. The cross-sectional shape, I is not specifically designated as the actual "equal shape « shape, as shown in the fifth figure", for example, may be a side shape, a square platinum mantle is a material constituting the melt discharge nozzle 1 of the present invention, and can be exemplified , the nature of the molten material, therefore, can also be preferably used to make glass, which is high in melting temperature or less impurities. Q, Do not melt the melt out of the nozzle, and the melt can be self-retaining the container 15 200911713
導入至熔融物流出喷嘴1之引導通道一體化，亦可於引導 通道與熔融物流出喷嘴1之間設置裝卸功能，以安裝於引 導通道中使用。 I 作為具體實施例，將形成有引導通道出口的面的前端 部與熔融物流出喷嘴1的流入部5,以將上述出口與流入部 5連接方式密著，且利用螺絲固定等手段進行安裝或熔接。 此時，若未能使上述出口與流入部5妥善密著的話，則在 導管部之前端部與熔融物流出喷嘴1之間會進入熔融物， 並使使熔融物自熔融物流出喷嘴1漏出，因此當安裝兩個 部件時，必須至少使該兩個部件安裝為密著至不會使熔融 物漏出之程度。 本發明之熔融物流出喷嘴1由例如機械加工而製得。 具體而言，將市售之普通車刀（bite)或鑽頭（drill)加 以改造而製成特別之工具，使用該工具，於圓柱狀材料之 中心開設接近預定孔徑大小之貫通孔，以製作半成品。其 後，製作與預定之孔徑相適配之線材（wire)，使用線材與 金剛石之研磨劑，對貫通孔之内侧面進行線材研磨加工。 又，將該材料之外侧面切削成預定之外表面形狀，藉由例 如使用研磨布或磨石等之研磨加工，來製作具有所需之中 心線平均粗糙度（Ra)之熔融物流出喷嘴1。再者，上述熔 融物流出喷嘴1之製作方法係一示例，亦可利用其他方法 來製作具有所需之中心線平均粗糙度（Ra)之溶融物流出 喷嘴1。 [球狀顆粒成形裝置] 16 200911713 其次，對使用本發明的熔融物流出噴嘴丨 也 玻璃等球狀顆粒之球狀顆粒成形裝置之—例進行=。再 者，上述球狀顆粒成形裝置僅做例示之目的 任何限定，只要係將溶融物成形為一 ^ 粒成安裝了本發明的溶融物流出噴嘴1之球狀顆 璃、金面圖。球狀齡細錢置7具備保持玻 Ύ 9·The guide passage introduced into the molten material discharge nozzle 1 is integrated, and a loading and unloading function can be provided between the guide passage and the molten material discharge nozzle 1 to be installed in the guide passage. I as a specific example, the front end portion of the surface on which the outlet of the guide passage is formed and the inflow portion 5 of the molten material discharge nozzle 1 are attached to each other so as to be connected to the inflow portion 5, and are attached by means of screw fixing or the like. Welding. At this time, if the outlet and the inflow portion 5 are not properly adhered, the melt enters between the end portion of the conduit portion and the melt discharge nozzle 1 and causes the melt to leak from the melt discharge nozzle 1 . Therefore, when installing two components, at least the two components must be mounted to such an extent that they do not leak out of the melt. The molten material discharge nozzle 1 of the present invention is produced, for example, by machining. Specifically, a commercially available ordinary bite or drill is modified to form a special tool, and a through hole close to a predetermined aperture is opened in the center of the cylindrical material to prepare a semi-finished product. . Thereafter, a wire which is fitted to a predetermined aperture is formed, and the inner side of the through hole is subjected to wire polishing using a wire and a diamond abrasive. Further, the outer side surface of the material is cut into a predetermined outer surface shape, and a molten material discharge nozzle 1 having a desired center line average roughness (Ra) is produced by, for example, a polishing process using a polishing cloth or a grindstone. . Further, the method of manufacturing the melt discharge nozzle 1 is an example, and the melt discharge nozzle 1 having the desired center line average roughness (Ra) may be produced by other methods. [Spherical particle forming apparatus] 16 200911713 Next, an example of a spherical pellet forming apparatus using spherical particles such as glass or the like is used. Further, the above-mentioned spherical particle forming apparatus is arbitrarily limited for the purpose of illustration only, as long as the molten material is formed into a spherical glass or a gold surface on which the molten material discharge nozzle 1 of the present invention is attached. Spherical age fine money set 7 has the ability to keep glass Ύ 9·
Si \ 保持:ΐ、:Γ融物C之翻製等之保持容器8、以及對 9又熱及/錢接（支持）保持容器8之爐體 於保持各益8之下部，連接有將熔 :=之引導通道一C自保持== 二於柱狀地流出。流 , 洛下於洛下過程中藉由重力或#品 收χ手：二離中’從而形成為球狀。所形成之球狀顆粒落乂回 收手段11中之液體111中。 w = 物G’X錢欲製造為雜顆粒相無特別限 可以、組合物、金屬或有機組合物等溶融而成者又， 乂疋熔融玻璃、熔融金屬、熔融樹脂等。 掉播t持容器8具備用以攪拌保持容器8内溶融物C之声 U及加熱裝置（未圖示）。保持容器8只要可^ 融包含玻璃、合屬、构_匕& 乂搶 持容器。。屬魏荨之原料即可，可使用周知之保 亦可使簡容器8於縣物c為㈣玻璃之情形時， …十破璃加以溶融、澄清，並且能夠利用例如加熱器（未 17 200911713 圖示）等周知之裝置而使熔融物溫度保持在預定之溫度。 又：攪拌機81亦可於水平方向上旋轉，並利用攪拌；^未 圖不）來授拌炫融物而使該溶融物均質化，但亦 要而省略該擾拌機81。 . .乂而 【體9 /、要月b夠耐受保持容器8之 9之材質等並無特财定。 料該爐體 .引導通道10與保持容器8之下部連接著， 器8令之炫融物q導至炼融物流出噴嘴、。㈣導、= 二中T有未圖示之加熱器，藉由控制引導通道ίο = 可控制引導通道1G中溶融物之黏性，並且 = 通道10中熔融物C之流速。 」拴制弓丨導 嫁融物流出喷嘴1與引導通道1G連接著，且引道 :0與熔融物流出噴嘴1内流路6連通著。再者，丄:!道 :爾可與引導通道10形成為一體。又，亦= 圖不之加鼽，以奴止丨A w j j叹置未 的溶融物二二 物流出噴嘴1的前端2流出 方式可為如能夠控制炫融物c之黏性。加熱 1°之方式·通電加熱、高週波加熱、&外 線加熱、或藉由使 …、紅外 等。 ，、、、怂為專而使氣體等燃燒來進行加熱 泰要ίΐ容易地獲得質量精度更高之球狀顆粒，亦可根摅 而要而將對引導通道 j根據 之加振器連接於域融物流时嘴1施加振動 者，將加振器直接安;^ 或炫融物流出喷嘴1。再 裝於熔蛐物流出喷嘴1及/或引導通道 18 200911713 10，亦可獲得所需要的效果。 又，保持容器8上設置有原料投入口（未圖示）。可形 成當原料投入口封閉時呈密閉狀態之構造。此外，當保持 容器8中設置有壓力調節手段（未圖示）時，保持容器8 亦可形成如下構造，即，當由壓力調節手段來加壓或減壓 時，構造上能夠承受得住的具備耐壓性之構造。 壓力調節手段用以對保持容器8内熔融物C之液面施 加壓力，無論保持容器8内熔融物C之貯藏量多少，均可 使固定量溶融物C流出至引導通道10。 例如，當保持容器8内溶融物C之貯藏量較多時，利 用壓力調節手段來對保持容器8内減壓，從而可防止熔融 物C大量流出至引導通道10。又，當保持容器8内熔融物 C之貯藏量較少時，利用壓力調節手段來對保持容器8内加 壓，從而可防止熔融物C難以流出至引導通道10。再者， 壓力調節手段亦可利用被密封的爐體9之内部壓力來進行Si \ keep: ΐ, : 容器 Γ C 翻 等 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持 保持The guide channel of the == C self-sustaining == two flows out in a columnar manner. Flow, in the process of Luo under the Luo down by gravity or #品收手: two away from 'and thus formed into a spherical shape. The formed spherical particles fall into the liquid 111 in the recovery means 11. w = material G'X money is not limited to the production of the heteroparticle phase. The composition, the metal or the organic composition may be melted, and the molten glass, molten metal, molten resin or the like may be used. The drop-and-hold container 8 is provided with a sound U for stirring and holding the melt C in the container 8, and a heating device (not shown). The holding container 8 is provided with a glass, a genus, a constituting container, and a holding container. . It can be used as a raw material of Wei Wei. It can also be used to make the container 8 in the case of (4) glass in the case of the container. (10) The glass is melted and clarified, and the heater can be used, for example, (No. 17 200911713) The well-known device is used to maintain the temperature of the melt at a predetermined temperature. Further, the agitator 81 can also be rotated in the horizontal direction, and the mixture can be homogenized by mixing the mixture with the stirring, but the scrambler 81 is omitted. . . . [Body 9 /, the month b is enough to withstand the material of the container 8 9 is not special. The furnace body is connected to the lower portion of the holding container 8, and the device 8 directs the glazing material q to the smelting stream out of the nozzle. (4) Conductor, = 2, T has a heater not shown, by controlling the guiding channel ίο = can control the viscosity of the molten material in the guiding channel 1G, and = the flow rate of the molten material C in the channel 10. The ramming guide is connected to the guide passage 1G, and the guide passage: 0 is in communication with the flow path 6 in the molten material discharge nozzle 1. Furthermore, the 丄:! channel can be formed integrally with the guide channel 10. Also, if the figure is not crowned, the slave can stop the flow of the front end 2 of the nozzle 1 and the flow of the front end 2 of the nozzle 1 can be controlled to control the viscosity of the blister c. Heating by 1°, energization heating, high-cycle heating, & external heating, or by using ..., infrared, etc. , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , When the mouth 1 is applied with vibration, the vibration device is directly installed; ^ or the smelting melt flows out of the nozzle 1. Refilling the melt discharge nozzle 1 and/or the guide passage 18 200911713 10 also achieves the desired effect. Further, a holding material inlet (not shown) is provided in the holding container 8. It can be formed into a closed state when the raw material input port is closed. Further, when the pressure maintaining means (not shown) is provided in the holding container 8, the holding container 8 can also be configured to be structurally capable of being withstood when pressurized or decompressed by the pressure regulating means. A structure with pressure resistance. The pressure adjusting means applies a pressure to the liquid surface of the molten material C in the holding container 8, and allows the fixed amount of the molten material C to flow out to the guide passage 10 regardless of the amount of the molten material C stored in the holding container 8. For example, when the storage amount of the melt C in the container 8 is kept large, the pressure regulating means is used to depressurize the inside of the holding container 8, so that the molten material C can be prevented from flowing out to the guide passage 10 in a large amount. Further, when the storage amount of the melt C in the holding container 8 is small, the inside of the holding container 8 is pressurized by the pressure adjusting means, so that it is prevented that the molten material C is hard to flow out to the guide passage 10. Furthermore, the pressure regulating means can also be carried out by using the internal pressure of the sealed furnace body 9.
Ar/C 调即。 接下來說明使用安裝了上述本發明之熔融物流出噴嘴 1之球狀顆粒成形裝置7來製造球狀顆粒之方法。 首先，使包含玻璃或金屬等之原料熔融，用保持容器8 來保持熔融物。亦可根據需要而使攪拌機81旋轉，並利用 攪拌翼來攪拌熔融物而使該熔融物均質化。 其次，將上述熔融物自引導通道10引導至本發明之熔 融物流出喷嘴1，並使熔融物自熔融物流出噴嘴1流出。熔 融物自熔融物流出喷嘴1以細口徑連續流之狀態或者滴落 19 200911713 之狀態而落入空中。 落入空中之熔融物因重六 狀’並被回收至回收手段11中。㈣，使為球 融物落人至回收手段11中之 」成柄狀之炫 ill mm > ^ " 中，藉此，利用液體 m來緩和㈣亚且使形成為球狀之料物 [球狀顆粒成形方法] 其次’根據第六圖，說明藉由上 而成形出球狀顆粒之成形方法。 貝七珉办衷置7 溶二ίΓ頁形方法係使溶融物自噴嘴流出而成形為 Ϊ;= Γ之方法，使用本發明之炫融物流出 赁嘴1作為上述喷嘴。 ^融物液滴等球狀顆粒之成形方法中，利用周知之 炫融㈣起始㈣化融物，經澄清、攪拌而使該 制化後，將錄融物儲存於保持容118内。在始 烷:“谷器8之底部’連接有用以將内部炫融物C引導至 、、首勿出貪觜1之弓丨導通道10，炫融物C穿過該引導通 10而抵達熔融物流出噴嘴j。 在保持容H 8、引導通道1G以及㈣物流出喷嘴】内 、、=溫度控制’以使内部炫融物C保持適當之溫度，固定 -里熔融物C自熔融物流出喷嘴2之流出部3流出。 離出喷嘴1呈柱狀地流出之熔融物0，相繼分 _ .疋重里之熔融物液滴，並因表面張力而形成為球狀 矛貝粒0 上述一定重量的熔融物之分離方法係藉由控制熔融物 20 200911713 流出喷嘴1以及引導通道10之溫度來控制熔融物之黏性， 隨著熔融物之黏性變化熔融物之流速及流量亦被改變，使 熔融物作為連續流而自熔融物流出喷嘴1流出，亦可由該 連續流變為呈一行滴落之液滴狀熔融物塊。 [實施例] 以下，說明本發明之實施例，但本發明之範圍並不限 定於該等實施例。 〈實施例〉 製作用以製造直徑為1 mm微小球之喷嘴。準備由鉑形 成之圓柱狀材料，並且使用將市售之車刀或鑽頭加以改造 而成之工具，於該材料之中心開設出孔徑為〇. 8 mm之貫通 孔。其後，製作直徑為0. 5 mm之線材，使用線材與金剛石 研磨劑而對貫通孔内侧之面進行線材研磨加工。在此同 時，將該材料之端部以及外侧之面切削成預定形狀，藉由 使用研磨布或紙石等來研磨加工，而獲得内表面、外表面 及端面具有0.2 /z m之中心線平均粗綠度（Ra)之溶融物 流出喷嘴。此處，喷嘴外周面之中心線平均粗链度（Ra ) 藉由如下方式來測定：以由超硬材料構成之按粗糙度分類 的標準測試片作為參考，一面在顕微鏡下與加工過程中之 製品進行比較，一面把握研磨粗糙度。 所製得之喷嘴的流路剖面與外形剖面為同心圓，且流 路剖面積之大小為0. 5 2 mm2。 〈比較例〉 對由翻形成的圓柱狀材料外侧之面僅進行切削，而未 21 200911713 進行研磨加工，除此以外，以與實施例同樣之方式而獲得 熔融物流出喷嘴。該喷嘴之内表面、外表面以及端面之中 心線平均粗糙度（Ra)為1. 7 // m。 〈評價〉 將以上述方式獲得之熔融物流出喷嘴設置於球狀顆粒 成形裝置中。繼而，評價流出開始時之潤濕上昇性、流出 開始時之穩定性、流出過程中之穩定性、以及潤濕上昇時 之恢復性。所謂流出開始時之潤濕上昇性，係指預先使熔 融物在熔融物流出喷嘴之前端内部固化，利用燃燒器等對 該熔融物加熱而開始流出熔融物時，熔融物潤濕上昇於喷 嘴外表面上之頻率。所謂流出開始時之穩定性，係指熔融 物剛剛開始流出後之5秒鐘以内所產生之，以目視觀察到 該熔融物流紊亂之產生頻率。所謂熔融物流紊亂，係指流 下之熔融物因扭曲等而無法固定流下方向。所謂流出過程 中之穩定性，係指熔融物開始流出後超過5秒後所產生之， 以目視觀察到熔融物流紊亂之產生頻率。所謂潤濕上昇時 之恢復性，係指利用燃燒器來對潤濕上昇並附著於熔融物 流出喷嘴之外表面上之熔融物進行加熱時，未形成為一體 流落而以粒狀殘留之頻率。 使玻璃重複流出20次，對於除了潤濕上昇時恢復性以 外之該等評價項目進行評價。人為地使玻璃附著於喷嘴外 表面後去除該玻璃，重複20次，對於潤濕上昇時之恢復性 進行評價，將結果示於以下之表1。 [表1 ] 22 200911713 — 比較例 實施例 流出開始時之潤濕上昇性 〇 ◎ 流出開始時之穩定性 〇 ◎ 流出.過程中之穩定性 〇 ◎ 潤濕上昇時之恢復性 Δ 〇 ◎:產生頻率為2次以下 〇：產生頻率為3次〜5次 △:產生頻率為6次〜8次 X :產生頻率為9次以上 上述實施例可證明：對於本發明熔融物流出喷嘴.而 言，熔融物潤濕上昇於喷嘴之情形非常少，且可輕易地完 全去除潤濕上昇在喷嘴前端之玻璃。 〈用於形成玻璃球〉 將藉由上述方法製得之熔融物流出喷嘴，經由鉑管而 設置於熔融爐鉑製坩鍋之底部。使用重鑭火石玻璃[小原股 份有限公司製造之L-LAH53]作為熔解於鉑製坩鍋中之玻 璃。又，在熔融物流出喷嘴之下方約5 m之位置配置液槽， 並且在液槽内注入水。在該狀態下，將10 Kg上述玻璃投 入翻製琳锅中，並進行加熱熔融。 將加熱熔融後之爐溫設為1050°C，將鉑管後端部之溫 度設為1050°C，將鉑管前端部之溫度設為ll〇〇°C，將熔融 物流出喷嘴之前端部之溫度保持為1150°C。又，於上述狀 態自熔融物流出喷嘴流出熔融玻璃之流出量（流量）為1. 5 Kg〜1·6 Kg/hr ° 於上述條件下自喷嘴流出之熔融玻璃，至距離喷嘴前 23 200911713 端約10 mm的下方是以連續流的形態流下，自此以下則變 為呈一行連續排列之液滴狀玻璃塊，作為玻璃塊而落下。 接下來，上述玻璃塊進而落入液槽内，藉由液槽内之水而 緩和衝擊並且進行冷卻，繼而回收至液槽内。清洗自液槽 回收之玻璃塊，製作由玻璃形成之微小球狀顆粒。 〈用於形成半導體球〉 將藉由上述方法製得之熔融物流出喷嘴設置於熔解爐 之下端。於熔融坩鍋内放入矽100 g，於熔解爐中以矽熔解 溫度即1420°C加以熔解。矽之熔化（melt down)結束後， 利用氬氣或氦氣向溶融掛锅内施加壓力，藉此，自熔融物 流出喷嘴擠出熔融矽並使熔融矽滴落，於設於熔融物流出 喷嘴下方的回收容器之冷卻油内，對滴落之熔融矽加以冷 卻，製成矽球狀體。本實施例中，熔融矽不會潤濕上昇至 喷嘴上，可以穩定地獲得矽球狀體。 〈用於形成金屬球〉 將藉由上述方法而製得之熔融物流出喷嘴，設於由碳 形成的坩堝之底部。於坩堝内裝入5 Kg之無氧銅作為原 料，使圓筒降下，一面利用振動棒之下端塞住熔融物流出 喷嘴，一面於氬氣環境中開始坩堝内之加熱，以使銅熔融。 設定高週波感應加熱器，以使坩堝内之溫度達到1150°C。 安裝於喷嘴上之碳環受到來自高週波感應加熱器之高週波 而加熱。裝入掛塌内之銅完全溶融後，昇起圓筒，並打開 熔融物流出喷嘴。使振動棒以4000 Hz振動，並且注入氬 氣以使坩堝内之壓力達到0. 03 MPa，開始喷出熔融物。藉 24 200911713 由淬火油而使自喷嘴喷出之液滴冷卻並凝固後，回收該液 滴，且於對該液滴進行脫脂洗淨後加以乾燥，藉此獲得銅 球狀體。本實施例中，熔融銅不會潤濕上昇至喷嘴上，可 以穩定地獲得銅球狀體。 【圖式簡單說明】 第一圖係本發明實施形態之熔融物流出喷嘴之立體 圖。 第二圖係表示第一圖的熔融物流出噴嘴之各内表面及 各外表面之透視圖。 第三圖係第一圖的熔融物流出喷嘴之縱剖面圖。 第四圖係第一圖的熔融物流出喷嘴之平面圖。 第五圖係例示本發明的熔融物流出喷嘴的變形之平面 圖。 第六圖係安裝有第一圖的熔融物流出喷嘴之球狀顆粒 成形裝置之剖面圖。 【主要元件符號說明】 1 熔融物流出喷嘴 2 前端 3 流出部 4 傾斜部 5 流入部 6 流路 25 200911713 7 球狀顆粒成形裝置 8 保持容器 9 爐體 '10 引導通道 11 回收手段 21 端面 31 内表面 32 外表面 41 第二内表面 42 第二外表面 51 第三内表面 52 第三外表面 111 液體 Αι 第一流路剖面 ai 第一流路剖面積 26Ar/C is the tone. Next, a method of producing spherical particles using the spherical particle forming device 7 to which the above-described molten material discharge nozzle 1 of the present invention is mounted will be described. First, a raw material containing glass or metal is melted, and the molten material is held by the holding container 8. The agitator 81 may be rotated as needed, and the melt may be agitated by a stirring blade to homogenize the melt. Next, the melt is guided from the guide passage 10 to the melt discharge nozzle 1 of the present invention, and the melt is discharged from the melt flow out of the nozzle 1. The melt falls into the air from the molten material flowing out of the nozzle 1 in a state of continuous flow in a fine diameter or in the state of dripping 19 200911713. The molten material falling into the air is recovered in the recovery means 11 because it is heavy. (4) In order to make the ball melt into the recycling means 11 in the "handle-like illusion ill mm > ^ ", thereby using the liquid m to alleviate the (four) sub-material and form a spherical material [ Spherical particle forming method] Next, a molding method of forming spherical particles by the above will be described based on the sixth drawing. The method of forming a solution is to form a solution of the molten material from the nozzle to form a crucible; = a method of using the present invention to use the diffusing stream of the present invention as the nozzle. In the method of forming spherical particles such as melt droplets, the melted material is stored in the holding volume 118 by using a well-known (4) starting (four) melt, which is clarified and stirred to be processed. At the beginning of the alkane: "the bottom of the trough 8" is connected to guide the inner dazzling C to the bowing guide channel 10, and the dazzling melt C passes through the guiding passage 10 to reach the melting The nozzle j is discharged. In the holding capacity H 8 , the guiding passage 1G and the (4) flowing out nozzle, the temperature control is set to keep the internal scent C at an appropriate temperature, and the fixed-living melt C flows out of the molten nozzle. The outflow portion 3 of the 2 flows out. The molten material 0 which flows out of the nozzle 1 in a columnar shape is successively divided into droplets of the melt in the weight of the crucible, and is formed into spherical spear particles due to surface tension. The method of separating the melt is to control the viscosity of the melt by controlling the temperature of the melt 20 200911713 flowing out of the nozzle 1 and the guide passage 10, and the flow rate and flow rate of the melt are also changed as the viscosity of the melt changes, so that the melt is melted. The material flows out from the melt discharge nozzle 1 as a continuous flow, or may be changed into a droplet-shaped melt block which is dropped in one row. [Examples] Hereinafter, examples of the present invention will be described, but the scope of the present invention It is not limited to the embodiments. EXAMPLES A nozzle for producing a microsphere having a diameter of 1 mm was prepared. A cylindrical material formed of platinum was prepared, and a tool modified from a commercially available turning tool or a drill was used, and an aperture was formed in the center of the material. A through hole of 8 mm. Thereafter, a wire having a diameter of 0.5 mm was produced, and a wire and a diamond abrasive were used to wire the inner surface of the through hole. At the same time, the end of the material was And the outer surface is cut into a predetermined shape, and the grinding process is performed by using a polishing cloth or a paper stone to obtain a melt flow out nozzle having an inner surface, an outer surface, and an end surface having a center line average coarse greenness (Ra) of 0.2 /zm. Here, the average thick chain width (Ra) of the center line of the outer peripheral surface of the nozzle is determined by using a standard test piece classified by roughness of a super-hard material as a reference, while under the micro-mirror and during processing. 5之间。 The comparison of the flow of the nozzle and the profile of the nozzle is a concentric circle, and the cross-sectional area of the flow path is 0. 5 2 mm2. The molten material discharge nozzle was obtained in the same manner as in the example except that the outer surface of the cylindrical material formed by the turning was cut, and the grinding process was not performed in the same manner as in the example. The inner surface and the outer surface of the nozzle were The center line average roughness (Ra) of the end face is 1. 7 // m. <Evaluation> The melt flow out nozzle obtained in the above manner is placed in the spherical particle forming device. Then, the wetting rise at the start of the outflow is evaluated. Stability, stability at the beginning of the outflow, stability during the outflow, and recovery from the rise of wetting. The so-called wetting rise at the beginning of the outflow means that the melt is internally solidified before the melt flows out of the nozzle. When the melt is heated by a burner or the like to start flowing out of the melt, the melt wets the frequency rising on the outer surface of the nozzle. The stability at the start of the outflow is determined within 5 seconds after the melt has just started to flow out, and the frequency of occurrence of the melt flow disturbance is visually observed. The disorder of the molten material means that the molten material flowing down cannot be fixed in the downward direction due to twisting or the like. The term "stability during the outflow" refers to the generation of the melt after the start of the flow, and the frequency of the melt flow disturbance is visually observed. The recovery property at the time of the wetting rise refers to a frequency at which the melt is raised by the burner and adhered to the molten material flowing out of the nozzle surface, and is not formed into a unitary flow and remains in a granular form. The glass was repeatedly discharged 20 times, and evaluation was performed for the evaluation items other than the recovery at the time of wetting rise. The glass was artificially attached to the outer surface of the nozzle, and the glass was removed, and the glass was repeated 20 times, and the recovery property at the time of wetness was evaluated. The results are shown in Table 1 below. [Table 1] 22 200911713 - Comparative Example The wetting rise at the beginning of the outflow 〇 ◎ Stability at the beginning of the outflow 〇 ◎ Outflow. Stability during the process 〇 ◎ Restoration Δ when wetting increased 〇 ◎: Produced The frequency is 2 times or less 〇: the generation frequency is 3 times to 5 times Δ: the generation frequency is 6 times to 8 times X: the generation frequency is 9 times or more. The above embodiment can prove that, for the melt flow out nozzle of the present invention, The wetting of the melt rises to the nozzle very little, and the glass that wets up at the front end of the nozzle can be easily removed completely. <Formation of Glass Balls> The melt obtained by the above method was discharged from a nozzle and placed in the bottom of a melting furnace platinum crucible via a platinum tube. The heavy flint glass [L-LAH53 manufactured by Ohara Co., Ltd.] was used as the glass melted in the platinum crucible. Further, a liquid tank was disposed at a position of about 5 m below the melt discharge nozzle, and water was injected into the liquid tank. In this state, 10 Kg of the above glass was placed in a turned-dish pot and heated and melted. The temperature of the furnace after heating and melting was set to 1050 ° C, the temperature at the rear end of the platinum tube was set to 1050 ° C, and the temperature at the front end of the platinum tube was set to ll ° ° C, and the melt was discharged out of the end before the nozzle. The temperature was maintained at 1150 °C. Further, in the above state, the outflow amount (flow rate) of the molten glass flowing out from the melt discharge nozzle is 1. 5 Kg to 1·6 Kg/hr ° from the nozzle to the molten glass flowing under the above conditions, to the front of the nozzle 23 200911713 The lower portion of about 10 mm flows down in a continuous flow, and thereafter, it becomes a droplet-shaped glass block which is continuously arranged in a row and falls as a glass block. Next, the glass block is further dropped into the liquid tank, the impact is relieved by the water in the liquid tank, and is cooled, and then recovered into the liquid tank. The glass block recovered from the liquid tank is cleaned to produce tiny spherical particles formed of glass. <Used to form a semiconductor ball> A melt flow out nozzle prepared by the above method was placed at the lower end of the melting furnace. 100 g of ruthenium was placed in a melting crucible, and melted in a melting furnace at a melting temperature of 1420 ° C. After the melting of the crucible is finished, pressure is applied to the melting pot by using argon gas or helium gas, thereby extruding the molten crucible from the melt flowing out of the nozzle and dripping the molten crucible to be placed in the melt stream discharge nozzle. In the cooling oil of the lower recovery container, the molten enthalpy of the dropping is cooled to obtain a spheroid. In the present embodiment, the molten crucible does not wet and rise to the nozzle, and the spheroidal body can be stably obtained. <Formation of Metal Balls> The melt flow-out nozzle obtained by the above method was placed at the bottom of a crucible formed of carbon. 5 Kg of oxygen-free copper was placed in the crucible as a raw material, and the cylinder was lowered. While the lower end of the vibrating rod was used to plug the molten material out of the nozzle, the inside of the crucible was heated in an argon atmosphere to melt the copper. Set the high-frequency induction heater so that the temperature inside the crucible reaches 1150 °C. The carbon ring mounted on the nozzle is heated by a high frequency from the high-frequency induction heater. After the copper contained in the collapse is completely melted, the cylinder is raised and the molten stream is opened out of the nozzle. The vibrating rod was shaken at 4000 Hz, and argon was injected so that the pressure in the crucible reached 0.03 MPa, and the melt was started to be ejected. By means of quenching oil, the droplets ejected from the nozzle are cooled and solidified by quenching oil, and the droplets are recovered, and the droplets are degreased and washed, and then dried to obtain copper spheroids. In this embodiment, the molten copper does not wet and rises up to the nozzle, and the copper spheroid can be stably obtained. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a perspective view of a melt discharge nozzle of an embodiment of the present invention. The second drawing shows a perspective view of each of the inner surfaces and outer surfaces of the melt flow out nozzle of the first figure. The third figure is a longitudinal sectional view of the melt flow out nozzle of the first figure. The fourth figure is a plan view of the melt flow out nozzle of the first figure. Fig. 5 is a plan view showing the deformation of the melt discharge nozzle of the present invention. Fig. 6 is a cross-sectional view showing a spherical particle forming apparatus in which the melt flow out nozzle of the first figure is mounted. [Description of main component symbols] 1 Melt flow out nozzle 2 Front end 3 Outflow part 4 Inclined part 5 Inflow part 6 Flow path 25 200911713 7 Spherical particle forming device 8 Holding container 9 Furnace body '10 Guide channel 11 Recovery means 21 End face 31 Surface 32 outer surface 41 second inner surface 42 second outer surface 51 third inner surface 52 third outer surface 111 liquid 第一 first flow path profile ai first flow path sectional area 26