JP2016126039A - 光導波路装置の製造方法及びレーザ加工装置 - Google Patents
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- 230000003287 optical effect Effects 0.000 title claims abstract description 179
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 26
- 238000006243 chemical reaction Methods 0.000 claims abstract description 47
- 230000001678 irradiating effect Effects 0.000 claims abstract description 4
- 239000000758 substrate Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 56
- 239000012792 core layer Substances 0.000 description 35
- 238000005253 cladding Methods 0.000 description 30
- 229920005989 resin Polymers 0.000 description 17
- 239000011347 resin Substances 0.000 description 17
- 238000000206 photolithography Methods 0.000 description 4
- 239000004020 conductor Substances 0.000 description 3
- 229910000679 solder Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
- B29D11/00—Producing optical elements, e.g. lenses or prisms
- B29D11/00663—Production of light guides
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/138—Integrated optical circuits characterised by the manufacturing method by using polymerisation
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1221—Basic optical elements, e.g. light-guiding paths made from organic materials
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12035—Materials
- G02B2006/12069—Organic material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12133—Functions
- G02B2006/12147—Coupler
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12173—Masking
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/1219—Polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4274—Electrical aspects
- G02B6/428—Electrical aspects containing printed circuit boards [PCB]
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
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- Optics & Photonics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Health & Medical Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Ophthalmology & Optometry (AREA)
- Mechanical Engineering (AREA)
- Optical Integrated Circuits (AREA)
- Laser Beam Processing (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
受光素子80は下面に複数の受光部(不図示)を備えており、受光素子80の各受光部が光導波路5の各光路変換傾斜面Sに光結合されている。
Claims (10)
- 基板の上に、複数の光路を備えた光導波路を形成する工程と、
傾斜反射面を備えたミラー部品と、前記ミラー部品の上に複数の開口部が設けられたマスクとを備えた反射機構を、前記光導波路の上に配置する工程と、
レーザを前記反射機構のマスクの複数の開口部を通して前記ミラー部品に照射し、前記ミラー部品で反射して傾いたレーザにより、前記複数の光路に光路変換傾斜面を同時に形成する工程と
を有することを特徴とする光導波路装置の製造方法。 - 前記ミラー部品は、石英ガラスから形成されることを特徴とする請求項1に記載の光導波路装置の製造方法。
- 前記ミラー部品は、前記反射傾斜面を備えた柱状部材を横置きに設置した部品であることを特徴とする請求項1又は2に記載の光導波路装置の製造方法。
- 前記光路変換傾斜面は、前記光路の外側から内側に向けて傾斜しており、前記光路変換傾斜面の空気界面が光路変換ミラーとして機能することを特徴とする請求項1乃至3のいずれか一項に光導波路装置の製造方法。
- 前記複数の光路に光路変換傾斜面を形成する工程の後に、前記光路変換傾斜面に光結合される光素子を搭載する工程を有することを特徴とする請求項4に記載の光導波路装置の製造方法。
- ステージと、
前記ステージの上方に配置されたレーザ出射部と、
前記ステージと前記レーザ出射部との間に配置され、傾斜反射面を備えたミラー部品と、前記ミラー部品の上に複数の開口部が設けられたマスクとを備えた反射機構とを有することを特徴とするレーザ加工装置。 - 前記ステージの上に複数の光路を備えた光導波路が載置され、
レーザを前記反射機構のマスクの複数の開口部を通して前記ミラー部品に照射し、前記ミラー部品で反射して傾いたレーザにより、前記複数の光路に光路変換傾斜面を同時に形成することを特徴とする請求項6に記載のレーザ加工装置。 - 前記ミラー部品は、石英ガラスから形成されることを特徴とする請求項6又は7に記載のレーザ加工装置。
- 前記ミラー部品は、前記反射傾斜面を備えた柱状部材を横置きに設置した部品であることを特徴とする請求項6乃至8のいずれか一項に記載のレーザ加工装置。
- 前記ミラー部品は、支持基板に固定され、前記マスクは前記支持基板に接続された側板によって支持されていることを特徴とする請求項6乃至9のいずれか一項に記載のレーザ加工装置。
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JP2014264324A JP6395134B2 (ja) | 2014-12-26 | 2014-12-26 | 光導波路装置の製造方法及びレーザ加工装置 |
US14/977,812 US10022927B2 (en) | 2014-12-26 | 2015-12-22 | Method of manufacturing optical waveguide device and laser processing apparatus |
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Cited By (5)
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JP2019200373A (ja) * | 2018-05-18 | 2019-11-21 | 新光電気工業株式会社 | 支持体付光導波路、光導波路搭載基板、光送受信装置 |
JP2020086169A (ja) * | 2018-11-27 | 2020-06-04 | 京セラ株式会社 | 光導波路および光回路基板 |
US10928598B2 (en) | 2018-11-14 | 2021-02-23 | Shinko Electric Industries Co., Ltd. | Optical waveguide mounting substrate and optical communication device |
JPWO2021124932A1 (ja) * | 2019-12-20 | 2021-06-24 | ||
US11372175B2 (en) | 2019-12-09 | 2022-06-28 | Shinko Electric Industries Co., Ltd. | Optical module |
Families Citing this family (4)
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US10168495B1 (en) * | 2017-06-28 | 2019-01-01 | Kyocera Corporation | Optical waveguide and optical circuit board |
JP7027276B2 (ja) * | 2018-07-26 | 2022-03-01 | 京セラ株式会社 | 光導波路および光回路基板 |
US11125954B2 (en) * | 2019-07-17 | 2021-09-21 | Shinko Electric Industries Co., Ltd. | Optical waveguide and optical waveguide device |
JP7477306B2 (ja) * | 2020-01-17 | 2024-05-01 | 日東電工株式会社 | 光電気伝送複合モジュールおよび光電気混載基板 |
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JP2019200373A (ja) * | 2018-05-18 | 2019-11-21 | 新光電気工業株式会社 | 支持体付光導波路、光導波路搭載基板、光送受信装置 |
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US11372175B2 (en) | 2019-12-09 | 2022-06-28 | Shinko Electric Industries Co., Ltd. | Optical module |
JPWO2021124932A1 (ja) * | 2019-12-20 | 2021-06-24 | ||
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